Coating charging device and flash evaporation coating system applying same

Abstract

The utility model provides a film coating and charging device and a flash evaporation film coating system applying the same. The film coating and charging device comprises a charging cavity, the partition wall is arranged in the loading cavity and divides the interior of the loading cavity into a feeding cavity and a storage cavity, and the storage cavity is communicated with the material evaporation device; the material conveying channel is arranged on the partition wall and penetrates through the feeding cavity and the material storage cavity; the feeding valve is used for opening and closing a feeding hole which is formed in the loading cavity and is communicated with the feeding cavity; the driving device is used for driving the channel valve to open and close the conveying channel; the material conveying device is used for driving the material carrier to convey the evaporation materials from the feeding cavity through the material conveying channel and unload the evaporation materials to the material storage cavity; and the vacuum device is used for vacuumizing the feeding cavity. The charging cavity adopts a double-chamber structure, the charging cavity is sealed and isolated from the storage cavity and the downstream material evaporation device during charging, the charging cavity is sealed and vacuumized before filling, the material is filled into the storage cavity from the charging cavity without damaging the downstream vacuum environment, the continuous charging of the material evaporation device without shutdown is realized, and the evaporation efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of physical vapor deposition, and particularly relates to a coating loading device and a flash evaporation coating system applying the same. Background Art

[0002] Physical vapor deposition technology is widely used in various industries. In the photovoltaic field, this technology is commonly used to evaporate and deposit each functional layer of photovoltaic cells, which has the advantages of high uniformity of the coating layer formed by evaporation, strong adhesion, good compactness, and high evaporation production efficiency.

[0003] At present, in the existing evaporation coating system in the industry, when the loading device feeds materials, it will destroy the vacuum environment of the downstream material evaporation device, resulting in the need to stop evaporating materials when the loading device fills materials, thereby reducing the coating efficiency. At the same time, for the material evaporation device of the existing evaporation coating system, its evaporation rate and material vapor concentration are only controlled by temperature. Just a small temperature difference will cause a change in the material evaporation rate. In addition, the materials in the crucible are also prone to large changes in the evaporation rate due to uneven heating, which in turn affects the deposition thickness and uniformity of the coating layer on the substrate. Summary of the Utility Model

[0004] The utility model provides a flash evaporation coating system and a flash evaporation coating system applying the same to solve the technical problem that the existing evaporation deposition system will break the vacuum when feeding materials, resulting in the need to stop evaporating materials and thus reducing the coating efficiency.

[0005] To solve the above problems, the technical solution adopted by the utility model is as follows:

[0006] The utility model provides a coating loading device, including:

[0007] A loading cavity;

[0008] A partition wall, arranged inside the loading cavity, and dividing the inside of the loading cavity into a feeding cavity and a storage cavity. The storage cavity is communicated with the material evaporation device; a feeding channel, arranged on the partition wall and penetrating through the feeding cavity and the storage cavity;

[0009] A feeding valve, used to open and close a feeding port arranged on the loading cavity and communicating with the feeding cavity;

[0010] A driving device, used to drive a channel valve to open and close the feeding channel;

[0011] A feeding device, used to drive a material carrier to transport and unload evaporation materials from the feeding cavity through the feeding channel to the storage cavity;

[0012] A vacuum device, used to evacuate the feeding cavity.

[0013] Further, the driving device includes:

[0014] A rotating shaft is rotatably mounted on the loading cavity, and one end of the rotating shaft extends into the feeding cavity, and the opposite end of the rotating shaft extends out of the loading cavity;

[0015] A connecting rod, one end of the connecting rod is connected to the opposite end of the rotating shaft;

[0016] A driving cylinder, the fixed end of the driving cylinder is hinged to the outside of the loading cavity, and the movable end of the driving cylinder is hinged to the opposite end of the connecting rod;

[0017] The coating loading device further includes:

[0018] A swing rod, one end of the swing rod is connected to the end of the rotating shaft extending into the feeding cavity;

[0019] A channel valve is connected to the opposite end of the swing rod;

[0020] When the movable end of the driving cylinder reciprocates telescopically, it drives the fixed end and the connecting rod to swing relative to the loading cavity, thereby driving the rotating shaft to rotate forward and backward, and further enabling the swing rod to drive the channel valve to swing close to or away from the material conveying channel to open and close the material conveying channel.

[0021] Preferably, the material conveying device includes:

[0022] A linear driving mechanism for driving the material carrier to reciprocate linearly between the feeding cavity and the storage cavity through the material conveying channel, so that the material carrier conveys and unloads the evaporation material received from the feeding port from the feeding cavity to the storage cavity.

[0023] Preferably, the linear driving mechanism includes:

[0024] A lead screw nut module, the material carrier is mounted on the linear moving part of the lead screw nut module;

[0025] A linear driving unit for driving the lead screw nut module to drive the material carrier to reciprocate linearly between the feeding cavity and the storage cavity through the material conveying channel;

[0026] A guiding roller assembly is arranged in the feeding cavity for supporting and guiding the linear reciprocating motion of the material carrier.

[0027] The present invention also provides a flash evaporation coating system, including the above-mentioned coating loading device, and the flash evaporation coating system further includes:

[0028] A quantitative feeding device for timing and quantitatively conveying the evaporation material from the storage cavity to the material evaporation device;

[0029] The material evaporation device includes: a flash evaporation crucible provided with an evaporation cavity for receiving the evaporation material; a crucible heating device for flash evaporating the evaporation material in the evaporation cavity into material vapor in a vacuum environment;

[0030] A steam delivery device is used to deliver material steam from an evaporation chamber to a vapor deposition chamber of a substrate vapor deposition device, so as to deposit a coating layer on the surface of a target substrate disposed in the vapor deposition chamber;

[0031] The vacuum device is also used to evacuate the evaporation chamber, the metering feeding device, the steam delivery device and the vapor deposition chamber.

[0032] Further, the metering feeding device includes:

[0033] A device main body, which is connected to a storage chamber;

[0034] A feeding pipeline, which is connected to the device main body and the evaporation chamber;

[0035] A gate valve is disposed on the feeding pipeline and is used to adjust the feeding rate of the vapor deposition material input into the evaporation chamber through the feeding pipeline.

[0036] Preferably, the steam delivery device includes:

[0037] A device housing;

[0038] A channel heating device, including: an inner shell main body disposed in the internal cavity of the device housing; a heating channel disposed at the bottom of one end of the inner shell main body; a gas transmission channel disposed inside the opposite end of the inner shell main body and connected to a flash evaporation crucible and the heating channel; a channel heater disposed inside the inner shell main body and used to heat the material steam entering the heating channel through the gas transmission channel;

[0039] A steam spraying and coating device, including: a bottom shell main body embedded in an installation notch at the bottom of the device housing; an air outlet channel disposed at the top of the bottom shell main body and connected to the heating channel in butt joint; a plurality of steam nozzles are linearly distributed at equal intervals on the bottom shell main body and connect the vapor deposition chamber and the air outlet channel;

[0040] The target substrate is disposed at an interval below the steam nozzles.

[0041] Further, the steam delivery device further includes:

[0042] A heat preservation layer laid on the inner surface of the device housing;

[0043] A plurality of reflecting plates disposed in the internal cavity and surrounding the inner shell main body;

[0044] A cooling device disposed on the device housing.

[0045] Further, the material evaporation device further includes:

[0046] A temperature sensor and a second temperature sensor, which are respectively used to detect the real-time temperatures in the evaporation chamber and the steam delivery device.

[0047] Compared with the prior art, the present utility model has the following beneficial effects:

[0048] The flash evaporation coating system provided by the present utility model has a loading cavity of the coating loading device with a double-chamber structure including a feeding cavity and a storage cavity. During feeding, the feeding cavity is sealed and isolated from the storage cavity and the downstream material evaporation device. Before filling, the feeding cavity is resealed and evacuated, so that when the subsequent evaporation coating material is filled from the feeding cavity into the storage cavity, the vacuum environment of the downstream material evaporation device is not damaged, realizing continuous feeding and loading of the material evaporation device without stopping the machine, greatly improving the evaporation coating efficiency. At the same time, by keeping the material evaporation device in a long-term overheated state, the temperature of the evaporation cavity is much higher than the temperature required for the evaporation of the evaporation coating material, so that the evaporation coating material evaporates instantly when it enters the evaporation cavity to form material vapor. By adjusting the feeding rate of the evaporation coating material input into the evaporation cavity through the feeding adjustment device of the quantitative feeding device, the evaporation coating material is regularly and quantitatively transported from the storage cavity to the evaporation cavity, and then the evaporation rate of the evaporation coating material is controlled by controlling the feeding rate, avoiding the problem that the evaporation rate of the evaporation coating material changes due to the small temperature difference and uneven heating in the evaporation crucible in the existing evaporation coating system, and improving the deposition thickness and uniformity of the coating layer on the substrate. In addition, the material vapor is transported to the coating cavity of the substrate coating device through the vapor transport device, so that the whole set of material evaporation devices does not need to be built into the coating cavity, ensuring that there is enough space in the coating cavity to arrange the substrate. After the material vapor enters the evaporation coating cavity, it forms a stable, uniform vapor wall that can smoothly reach all areas in the evaporation coating cavity, so as to realize the evaporation coating deposition operation of covering and flushing the substrate 360 degrees omnidirectionally from top to bottom in the coating cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] To more clearly illustrate the technical solutions proposed by the present utility model, the present utility model will be described in detail below in conjunction with the embodiments and the drawings. It should be understood that the following specific embodiments and the descriptions in the drawings of the specification are only some embodiments of the present utility model, and those skilled in the art can make changes to these drawings under the concept of the present utility model.

[0050] Figure 1 It is a perspective assembly structure schematic diagram of an embodiment of the flash evaporation coating system provided by the present utility model;

[0051] Figure 2 For Figure 1 the hidden structure schematic diagram of the flash evaporation coating system in

[0052] Figure 3 For Figure 2 the front view structure schematic diagram of the coating loading device in

[0053] Figure 4 For Figure 3 the rear view structure schematic diagram of the coating loading device in

[0054] Figure 5 For Figure 4Schematic cross-sectional structure diagram of the coating loading device in [device name] along the A-A direction;

[0055] Figure 6 is Figure 1 Schematic front view structure diagram of the material evaporation device and steam delivery device in [device name] with hidden lines;

[0056] Figure 7 is Figure 6 Schematic cross-sectional structure diagram of the steam delivery device in [device name] along the B-B direction;

[0057] Figure 8 is Figure 6 Schematic front view structure diagram of the material evaporation device and steam delivery device in [device name];

[0058] Figure 9 is Figure 8 Schematic cross-sectional structure diagram of the material evaporation device and steam delivery device in [device name] along the C-C direction.

[0059] Among them, the main reference signs in the figures are as follows:

[0060] 1. Coating loading device; 11. Loading cavity; 111. Feed inlet; 12. Partition wall; 121. Material conveying channel; 13. Feed cavity; 14. Storage cavity; 141. Discharge port; 142. Limiting block; 143. Arch breaker; 15. Feed valve; 16. Driving device; 161. Rotating shaft; 162. Connecting rod; 163. Driving cylinder; 1631. Fixed end; 1632. Movable end; 164. Bearing; 17. Material conveying device; 171. Linear driving mechanism; 1711. Ball screw nut module; 1712. Linear driving unit; 1713. Guide roller assembly; 18. Material carrier; 19. Swing rod; 191. Channel valve;

[0061] 2. Quantitative feeding device; 21. Device main body; 22. Feeding pipeline; 23. Slide gate valve;

[0062] 3. Material evaporation device; 31. Flash evaporation crucible; 311. Evaporation chamber; 32. Crucible heating device; 321. Electrode; 33. Feeding pipeline; 331. Feed valve; 34. Feed regulating device; 35. Discharge pipeline; 351. Discharge valve; 36. First temperature sensor; 37. Device base; 38. Connecting flange; 39. Device housing;

[0063] 4. Steam delivery device; 41. Device housing; 411. Internal cavity; 412. Installation notch; 42. Channel heating device; 421. Inner housing main body; 4221. Heating channel; 4222. Gas transmission channel; 4223. Channel heater; 43. Steam coating device; 431. Bottom housing main body; 4311. Air outlet channel; 4312. Steam nozzle; 44. Thermal insulation layer; 441. Thermal insulation board; 45. Reflector; 46. Cooling device;

[0064] 5. Substrate evaporation device; 51. Evaporation chamber;

[0065] 6. Target substrate;

[0066] 7. System housing;

[0067] 8. Vacuum device; 81. Vacuum switch assembly; 82. Vacuum detection assembly; 83. Vacuum pump;

[0068] 9. Carrier gas input device; 91. Air pump; 92. Shut-off valve; 93. Carrier gas heater. Detailed implementation manners

[0069] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the Figures 1-9 accompanying drawings and embodiments.

[0070] Please refer to Figures 1-9 simultaneously. The coating loading device provided by the present utility model includes:

[0071] Loading cavity 11; partition wall 12, arranged inside the loading cavity 11, and the partition wall 12 divides the inside of the loading cavity 11 into a feeding cavity 13 and a storage cavity 14, wherein the storage cavity 14 is communicated with the downstream material evaporation device 3; material conveying channel 121, arranged on the partition wall 12, and the material conveying channel 121 penetrates through the feeding cavity 13 and the storage cavity 14; feeding valve 15, used to open and close the feeding port 111 arranged on the loading cavity 11 and communicated with the feeding cavity 13; driving device 16, used to drive the channel valve 191 to open and close so as to open and close the material conveying channel 121; material conveying device 17, used to drive the material carrier 18 to convey and unload the evaporation material from the feeding cavity 13 through the material conveying channel 121 to the storage cavity 14 when the material conveying channel 121 is opened, and drive the material carrier 18 after unloading to return from the storage cavity 14 to the feeding cavity 13 through the material conveying channel 121; vacuum device 8, used to evacuate the feeding cavity 13 when the feeding valve 15 is closed, so that when the channel valve 191 is opened and the material conveying channel 121 is opened, the vacuum environments in the feeding cavity 13, the storage cavity 14 and the downstream material evaporation device 3 are mutually communicated.

[0072] As a preferred embodiment of this embodiment, the feed inlet 111 is provided on the top wall of the loading cavity 11 corresponding to the feed cavity 13, and the feed valve 15 is provided at the position on the top wall corresponding to the feed inlet 111 for opening or closing the feed inlet 111 to open or close the feed passage for the evaporation material to be input into the feed cavity 13 through the feed inlet 111.

[0073] In this embodiment, the driving device 16 includes:

[0074] A rotating shaft 161 rotatably mounted on a bearing 164 provided in the loading cavity 11, with one end of the rotating shaft 161 extending into the feed cavity 13 and the other opposite end extending out of the loading cavity 11; a connecting rod 162, with one end of the connecting rod 162 connected to the other opposite end of the rotating shaft 161 extending out of the loading cavity 11; a driving cylinder 163, with the fixed end 1631 of the driving cylinder 163 hinged to the outside of the loading cavity 11 and the movable end 1632 of the driving cylinder 163 hinged to the other opposite end of the connecting rod 162.

[0075] The coating loading device 1 further includes:

[0076] A swing rod 19, with one end of the swing rod 19 connected to the end of the rotating shaft 161 extending into the feed cavity 13; a channel valve 191 connected to the other opposite end of the swing rod 19; when the movable end 1632 of the driving cylinder 163 reciprocates and expands or contracts relative to its fixed end 1631, it drives the fixed end 1631 and the connecting rod 162 to swing relative to the loading cavity 11, thereby driving the rotating shaft 161 to rotate forward and backward, and further driving the swing rod 19 to drive the channel valve 191 to swing closer to or away from the material conveying channel 121, so as to open or close the material conveying channel 121 by the channel valve 191.

[0077] The material conveying device 17 includes:

[0078] A linear driving mechanism 171 for driving the material carrier 18 to reciprocate linearly between the feed cavity 13 and the storage cavity 14 through the material conveying channel 121, so that the material carrier 18 conveys and unloads the evaporation material received from the feed inlet 111 from the feed cavity 13 to the storage cavity 14, and enables the material carrier 18 after unloading to return from the storage cavity 14 to the feed cavity 13 through the material conveying channel 121.

[0079] In this embodiment, the linear driving mechanism 171 includes:

[0080] The lead screw nut module 1711 is disposed inside the loading cavity 11, and the material carrier 18 is installed on the linear moving member of the lead screw nut module 1711; the linear driving unit 1712 is used to drive the lead screw nut module 1711 to drive the material carrier 18 to reciprocate linearly between the feeding cavity 13 and the storage cavity 14 through the material conveying channel 121; the guiding roller assembly 1713 is disposed in the feeding cavity 13 and is used to support and guide the material carrier 18 to reciprocate linearly between the feeding cavity 13 and the storage cavity 14 through the material conveying channel 121.

[0081] As a preferred embodiment of this embodiment, the material carrier 18 is a feeding cart.

[0082] Please refer to Figure 5 , in this embodiment, the coating loading device 1 further includes:

[0083] The limit block 142 is disposed in the storage cavity 14 and close to the material conveying channel 121, and is used to limit the displacement of the material carrier to prevent the material carrier 18 from getting stuck during movement.

[0084] Please refer to Figure 5 , in this embodiment, the bottom of the storage cavity 14 is in an inverted conical shape, and the discharge port 141 is disposed at the inverted conical bottom end (bottom tip) of the storage cavity 14. The coating loading device 1 further includes:

[0085] The arch breaker 143 is disposed at the inverted conical bottom of the storage cavity 14 and is used to disturb the evaporation material to prevent the evaporation material from accumulating at the bottom of the storage cavity 14 and causing blockage of the discharge port 141, so as to avoid poor feeding.

[0086] Please refer to Figure 2 , in this embodiment, the vacuum device 8 includes:

[0087] The vacuum pump 83 is connected to the feeding cavity 13; the vacuum switch assembly 81 is used to control the vacuum pump 83 to evacuate and break the vacuum of the feeding cavity 13 when the feeding valve 15 is closed, so as to perform vacuum loading or break-vacuum feeding operations; the vacuum detection assembly 82 includes a vacuum gauge and a pressure switch, and is used to detect the vacuum degree inside the storage cavity 14 and control the pumping power of the vacuum pump 83 to adjust the vacuum degree in the flash evaporation coating system to meet the set requirements.

[0088] The coating loading device 1 provided by the utility model first controls the channel valve 191 to close the feeding channel 121 between the feeding chamber 13 and the storage chamber 14 during feeding, then opens the feeding valve 15, and puts the vapor deposition material into the material carrier 18 through the feeding port 111; next, controls the feeding valve 15 to close the feeding valve 15, opens the vacuum device to evacuate the feeding chamber 13, and then opens the channel valve 191 to make the vacuum environments of the feeding chamber 13, the storage chamber 14 and the downstream material evaporation device 3 interconnected; drives the carrier to transport and unload the vapor deposition material from the feeding chamber 13 to the storage chamber 14 through the feeding channel 121, and then drives the material carrier 18 to return to the feeding chamber 13 from the storage chamber 14 through the feeding channel 121 after unloading; finally, controls the channel valve 191 to close the feeding channel 121, and completes one loading operation, and feeds and loads the feeding chamber 13 and the storage chamber 14 continuously in this cycle.

[0089] In summary, since the loading chamber 11 of the coating loading device 1 provided by the utility model adopts a dual-chamber structure including a feeding chamber 13 and a storage chamber 14, the feeding chamber 13 is sealed and isolated from the storage chamber 14 and the downstream material evaporation device 3 during feeding. The feeding chamber 13 is resealed and evacuated before filling, and then the channel valve 191 is opened to transport the evaporated material to the storage chamber 14, and then the channel valve 191 is closed again to ensure that the feeding chamber 13 and the storage chamber 14 remain sealed and isolated when the feeding chamber 13 breaks the vacuum for subsequent feeding. The filling and loading are cyclically performed step by step, so that each time the evaporated material is filled from the feeding chamber 13 into the storage chamber 14, the vacuum environment of the downstream material evaporation device 3 is not destroyed, thereby avoiding the problem that the loading device of the traditional evaporation coating system will destroy the vacuum environment of the downstream material evaporation device 3 when feeding, resulting in the material evaporation device 3 needing to stop evaporating the material when the loading device is filling the material, thereby achieving continuous feeding and loading of the material evaporation device 3 without stopping, thereby greatly improving the evaporation efficiency.

[0090] Please also read Figure 1 , 2 6-9, the utility model also provides a flash evaporation coating system, including the above-mentioned coating loading device 1, the flash evaporation coating system also includes:

[0091] The quantitative feeding device 2 is connected to the discharge port 141 at the bottom (lower) of the storage chamber 14, and is used to transport the evaporation material from the storage chamber 14 to the material evaporation device 3 in a timely and quantitative manner to perform the next flash evaporation process according to the feeding cycle preset by the user and the rated feeding volume or mass of the evaporation material;

[0092] The material evaporation device 3 includes: a flash evaporation crucible 31, which is provided with an evaporation chamber 311 for receiving evaporation materials; a feeding pipeline 33, which is connected to the metering feeding device 2 and the evaporation chamber 311, so that the metering feeding device 2 can transfer the evaporation materials from the storage chamber 14 to the evaporation chamber 311 regularly and quantitatively through the feeding pipeline 33; a crucible heating device 32, which is used to flash evaporate the evaporation materials in the evaporation chamber 311 into material vapor in a vacuum environment; a discharging pipeline 35, which is connected to the evaporation chamber 311 and the vapor delivery device 4, so as to input the material vapor from the evaporation chamber 311 into the vapor delivery device 4 through the discharging pipeline 35.

[0093] The vapor delivery device 4 is used to transfer the material vapor from the evaporation chamber 311 to the evaporation chamber 51 of the substrate evaporation device 5 through the discharging pipeline 35, so as to deposit a coating layer on the surface of the target substrate 6 provided in the evaporation chamber 51; the above-mentioned vacuum device is also used to evacuate the evaporation chamber 311, the metering feeding device 2, the vapor delivery device 4 and the evaporation chamber 51; a central control device (not shown in the figure) is used to control the coating loading device 1, the metering feeding device 2, the material evaporation device 3, the vapor delivery device 4 and the substrate evaporation device 5 to perform corresponding mechanism actions; a system housing 7 is used to support and protect the coating loading device 1, the metering feeding device 2, the material evaporation device 3, the vapor delivery device 4, the substrate evaporation device 5 and the central control device.

[0094] Please refer to Figure 6 , as a preferred implementation mode of this embodiment, the feeding pipeline 33 and the discharging pipeline 35 are respectively provided with a feeding valve 331 and a discharging valve 351 to control the opening and closing of the feeding pipeline 33 and the discharging pipeline 35.

[0095] Please refer to Figure 2 , in this embodiment, the metering feeding device 2 includes:

[0096] A device main body 21, the top of the device main body 21 is provided with a main body inlet connected to the discharge port 141 at the bottom (below) of the storage chamber 14, and one end of the device main body 21 is provided with a main body outlet; a feeding pipeline 22, one end of the feeding pipeline 22 is connected to the main body outlet of the device main body 21, and the other end of the feeding pipeline 22 is connected to the feeding pipeline 33 of the material evaporation device 3. The evaporation materials are regularly and quantitatively driven by the device main body 21 and sequentially pass through the storage chamber 14, the discharge port 141, the inside of the device main body 21, the feeding pipeline 22 and the feeding pipeline 33 to enter the inside of the evaporation chamber 311 of the flash evaporation crucible 31; a gate valve 23 is arranged near the feeding pipeline 33 of the feeding pipeline 22, and is used to open and close the feeding pipeline 22 and control the feeding rate of the evaporation materials entering the evaporation chamber 311 through the feeding pipeline 22 and the feeding pipeline 33.

[0097] The flash evaporation coating system provided by the present utility model keeps the material evaporation device 3 in a superheated state for a long time, so that the temperature of the evaporation chamber 311 is much higher than the temperature required for the evaporation of the coating material. When the coating material enters the evaporation chamber 311, it evaporates instantly to form material vapor (i.e., realizing the flash evaporation of the coating material into material vapor). Thus, by adjusting the feeding rate of the coating material input into the evaporation chamber 311 through the feeding adjustment device 34 of the quantitative feeding device 2, the coating material is transported from the storage chamber 14 to the evaporation chamber 311 regularly and quantitatively. Furthermore, by controlling the feeding rate of the coating material transported to the material evaporation device 3, the evaporation rate of the coating material is controlled, avoiding the problem that in the existing evaporation coating system, the evaporation rate and the concentration of the material vapor of the material evaporation device 3 are only controlled by temperature, and it is easy to cause changes in the material evaporation rate due to the small temperature difference and uneven heating of the coating material in the evaporation crucible. Therefore, the deposition thickness and uniformity of the coating layer on the surface of the target substrate 6 are improved.

[0098] Please refer to Figure 9 , in this embodiment, the material evaporation device 3 further includes:

[0099] The first temperature sensor 36 is used to detect the real-time temperature in the evaporation chamber 311.

[0100] Please refer to Figure 9 , as a preferred embodiment of this implementation, the material evaporation device 3 further includes:

[0101] The device base 37 is provided at the bottom of the device housing 39 that wraps the flash evaporation crucible 31 of the material evaporation device 3; the connecting flange 38 is provided on the device base 37; the first temperature sensor 36 adopts a thermocouple sensor, and one end of the first temperature sensor 36 extends into the device housing 39 and is connected to the flash evaporation crucible 31. By the first temperature sensor, the real-time temperature in the evaporation chamber 311 (the temperature of the crucible heating device 32) is monitored in real time, and in cooperation with the adjustment of the feeding rate by the quantitative feeding device 2, the evaporation rate of the coating material in the evaporation chamber 311 is controlled.

[0102] Please refer to Figure 9 , as a preferred embodiment of this implementation, the material evaporation device 3 further includes:

[0103] The electrode 321 is provided on the device base 37 and is used to connect to the crucible heating device 32 for power supply.

[0104] Please refer to Figures 6-9 , in this embodiment, the vapor delivery device 4 includes:

[0105] Device housing 41; channel heating device 42, comprising: an inner housing main body 421 disposed in the internal cavity 411 of the device housing 41; a heating channel 4221 disposed at the bottom of one end of the inner housing main body 421; a gas transmission channel 4222 disposed inside the opposite end of the inner housing main body 421 and communicating with the feeding pipeline 33 and the heating channel 4221; a channel heater 4223 disposed inside the inner housing main body 421 for heating the material vapor that is input into the gas transmission channel 4222 through the feeding pipeline 33 and enters the heating channel 4221 from the gas transmission channel 4222, so that the material vapor maintains a relatively high temperature and kinetic energy during the process of being transported to the substrate evaporation coating device 5, and to prevent the material vapor from cooling and condensing during the transportation in the vapor transportation device 4;

[0106] Steam spraying coating device 43, comprising: a bottom housing main body 431 embedded in the installation notch 412 at the bottom of the device housing 41; an air outlet channel 4311 disposed at the top of the bottom housing main body 431 and connected in butt joint with the heating channel 4221 (i.e., the heating channel 4221 and the air outlet channel 4311 are connected in butt joint up and down); a plurality of steam nozzles 4312 are linearly distributed at equal intervals on the bottom housing main body 431 and penetrate through the bottom end (outer surface) of the bottom housing main body 431 and the air outlet channel 4311, so that the steam nozzles 4312 connect the evaporation coating chamber 51 outside the vapor transportation device 4 and the air outlet channel 4311 inside the vapor transportation device 4; the target substrate 6 is located in the evaporation coating chamber 51 and is disposed at an interval below the steam nozzles 4312.

[0107] Please refer to Figure 8 、 9 , in this embodiment, the steam nozzle 4312 adopts a Venturi tube-shaped orifice with the inner diameter expanding and widening at both the upper and lower ends and contracting and narrowing in the middle, that is, the inner diameter gradually contracts from the top end (upper end) to the middle section (middle) of the steam nozzle 4312, and then gradually expands from the middle section (middle) to the bottom end (lower end) of the steam nozzle 4312, so that the steam nozzle 4312 has an hourglass shape with the inner diameters of the upper, middle, and lower sections being "wide - narrow - wide" respectively. Since the steam nozzles 4312 on the bottom housing main body 431 adopt Venturi tube-shaped orifices, by using the Venturi effect, the material vapor that enters the steam nozzle 4312 downward from the air outlet channel 4311 can obtain greater kinetic energy after passing through the inner diameter change of the "wide - narrow - wide" steam nozzle 4312 in sequence, thereby improving the uniformity of the flow of the material vapor ejected from the steam nozzle 4312 on the surface of the lower target substrate 6, and further enhancing the deposition thickness and uniformity of the coating layer formed by the evaporation coating material on the surface of the target substrate 6.

[0108] Please refer to together Figures 6-9 , in this embodiment, the device housing 41 is used to support and fix other components of the vapor transportation device 4; the vapor transportation device 4 further includes:

[0109] The heat insulation layer 44 is laid on the inner surface of the device housing 41; a plurality of reflecting plates 45 are arranged in the internal cavity 411 and surround the inner housing main body 421. The reflecting plates 45 are located between the heat insulation layer 44 and the inner housing main body 421, that is, the heat insulation layer 44 is located outside the reflecting plates 45; the reflecting plates 45 are used to improve the heating effect of the channel heater 4223 of the channel heating device 42; the heat insulation layer 44 is used to further improve the heating effect of the channel heater 4223 and reduce the temperature influence of the channel heating device 42 on the evaporation chamber 51 of the substrate evaporation device 5.

[0110] The cooling device 46 is arranged on the device housing 41 and is used to cool the device housing 41 to further reduce the temperature influence of the channel heating device 42 on the evaporation chamber 51 of the substrate evaporation device 5 and prevent the target substrate 6 from being damaged due to excessive temperature in the evaporation chamber 51.

[0111] Please refer to Figure 7 , as a preferred embodiment of this implementation, the heat insulation layer 44 is composed of a plurality of heat insulation plates 441 spliced together.

[0112] Please refer to Figure 7 , as a preferred embodiment of this implementation, the cooling device 46 is a water-cooled or air-cooled device laid on the outer surface of the device housing 41.

[0113] Please refer to Figure 2 , in this embodiment, the flash evaporation coating system further includes:

[0114] The carrier gas input device 9 is used to provide carrier gas for assisting the transportation of material vapor to the evaporation chamber 51, the gas transmission channel 4222, the heating channel 4221 and the gas outlet channel 4311 of the flash evaporation coating system.

[0115] The carrier gas flows to carry the material vapor to move, and is ejected from the gas outlet channel 4311 through each steam nozzle 4312 in multiple paths and enters the evaporation chamber 51 below the steam delivery device 4, so that after the material vapor enters the evaporation chamber 51, a "steam wall" that is stable, uniform and can smoothly reach each area in the evaporation chamber 51 is formed. The target substrate 6 is "washed" through this "steam wall", thereby increasing the coverage area of the material vapor in the evaporation chamber 51, and further realizing 360-degree dead-angle-free evaporation deposition on the target substrate 6 in all directions in the evaporation chamber 51.

[0116] Please refer to Figure 2 , as a preferred embodiment of this implementation, the carrier gas input device 9 includes:

[0117] An air pump 91 for inputting carrier gas into the evaporation chamber 51; a stop valve 92 for controlling the entry of carrier gas into the air pump 91; a carrier gas heater 93 for heating the carrier gas input into the evaporation chamber 51.

[0118] Meanwhile, the flash evaporation coating system provided by the present utility model transports the material vapor formed by the evaporation of the material evaporation device 3 to the coating cavity of the substrate coating device through the vapor delivery device 4, enabling the entire subsystem of the material evaporation device 3 not to be built into the coating cavity, ensuring that there is sufficient space in the coating cavity to arrange the target substrate 6, and realizing the evaporation coating deposition operation of covering the target substrate 6 from top to bottom in the coating cavity.

[0119] As a preferred implementation mode of this embodiment, the vapor transportation system further includes:

[0120] A second temperature sensor (not shown in the figure), which is used to detect the real-time temperature of the vapor delivery device 4.

[0121] As a preferred implementation mode of this embodiment, the second temperature sensor adopts a thermocouple sensor.

[0122] In this embodiment, the substrate coating device further includes:

[0123] A third temperature sensor (not shown in the figure), which is used to detect the real-time temperature in the evaporation coating cavity 51 of the substrate coating device.

[0124] As a preferred implementation mode of this embodiment, the third temperature sensor adopts a thermocouple sensor.

[0125] In this embodiment, the substrate coating device further includes:

[0126] A film thickness detection device (not shown in the figure), which is used to detect the real-time thickness of the coating layer deposited on the surface of the target substrate 6.

[0127] As a preferred implementation mode of this embodiment, the film thickness detection device adopts a crystal oscillator detection device.

[0128] The present utility model also provides a flash evaporation coating control method, which applies the above flash evaporation coating system. The flash evaporation coating control method includes the following steps:

[0129] S1: The driving device 16 drives the channel valve 191 to close the material conveying channel 121, opens the feeding valve 15 to feed the evaporation coating material to the feeding device 17; closes the feeding valve 15, the vacuum device evacuates the feeding chamber 13, the driving device 16 drives the channel valve 191 to open the material conveying channel 121, and the feeding device 17 drives the material carrier 18 to convey and unload the evaporation coating material from the feeding chamber 13 through the material conveying channel 121 to the storage chamber 14, then resets the material carrier 18 to the feeding chamber 13, continues to the next step, and at the same time returns to the driving device 16 driving the channel valve 191 to close the material conveying channel 121 and repeats the execution of S1;

[0130] S2: The metering feeding device 2 transports the evaporation coating material from the storage chamber 14 to the evaporation chamber 311 of the flash evaporation crucible 31 at regular intervals and in a fixed quantity;

[0131] S3: The crucible heating device 32 keeps the flash evaporation crucible 31 in a superheated state in a vacuum environment to flash evaporate the evaporation material in the evaporation chamber 311 into material vapor.

[0132] S4: The vapor delivery device 4 delivers the material vapor from the evaporation chamber 311 to the evaporation chamber 51 of the substrate evaporation device 5 to deposit a coating layer on the surface of the target substrate 6 provided in the evaporation chamber 51.

[0133] In this embodiment, if it is the first evaporation in S3, the crucible heating device 32 should be turned on in advance so that the evaporation crucible reaches the superheated state before the first evaporation operation, thereby realizing the preheating of the evaporation crucible.

[0134] In this embodiment, when necessary in S4, the vapor delivery device 4 uses its carrier gas circulation device to circulate and supply the carrier gas for assisting the transportation of the material vapor to the gas delivery channel 4222, the heating channel 4221, the gas outlet channel 4311 and the evaporation chamber 51, driving and accelerating the flow of the vapor material inside the flash evaporation coating system to achieve 360-degree omnidirectional evaporation of the target substrate 6.

[0135] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Those of ordinary skill in the art should understand that any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. A coating loading device, characterized in that: include: A charging chamber (11); A partition wall (12) is provided inside the charging chamber (11) and divides the inside of the charging chamber (11) into a feeding chamber (13) and a storage chamber (14), wherein the storage chamber (14) is connected to the material evaporation device (3); a material delivery channel (121) is provided on the partition wall (12) and passes through the feeding chamber (13) and the storage chamber (14); A feed valve (15) for opening and closing a feed port (111) provided in the charging chamber (11) and connected to the feed chamber (13); A driving device (16) for driving a channel valve (191) to open and close the material delivery channel (121); A material conveying device (17) for driving a material carrier (18) to convey the vapor deposition material from the material feeding chamber (13) through the material conveying channel (121) and unload the material into the material storage chamber (14); The vacuum device (8) is used to evacuate the feed chamber (13).

2. The coating loading device according to claim 1, characterized in that: The driving device (16) comprises: A rotating shaft (161) is rotatably mounted on the charging chamber (11), with one end of the rotating shaft (161) extending into the feeding chamber (13), and the other end of the rotating shaft (161) extending out of the charging chamber (11); A connecting rod (162), one end of the connecting rod (162) being connected to the other end of the rotating shaft (161); A driving cylinder (163), wherein a fixed end (1631) of the driving cylinder (163) is hinged to the outside of the charging chamber (11), and a movable end (1632) of the driving cylinder (163) is hinged to the other end opposite to the connecting rod (162); The coating loading device (1) further comprises: A swing rod (19), one end of which is connected to one end of the rotating shaft (161) extending into the feeding chamber (13); The channel valve (191) is connected to the other end of the swing rod (19); When the movable end (1632) of the driving cylinder (163) performs reciprocating telescopic motion, the fixed end (1631) and the connecting rod (162) are driven to swing relative to the charging chamber (11), thereby driving the rotating shaft (161) to rotate forward and reverse, and further causing the swing rod (19) to drive the channel valve (191) to swing closer to or away from the feeding channel (121) to open and close the feeding channel (121).

3. The coating loading device according to claim 2, characterized in that: The feeding device (17) comprises: A linear drive mechanism (171) is used to drive the material carrier (18) to pass through the material delivery channel (121) and to perform reciprocating linear motion between the feed chamber (13) and the storage chamber (14), so that the material carrier (18) conveys the vapor deposition material received from the feed port (111) from the feed chamber (13) and unloads it to the storage chamber (14).

4. The coating loading device according to claim 3, characterized in that: The linear drive mechanism (171) comprises: A screw nut module (1711), wherein the material carrier (18) is mounted on a linear moving part of the screw nut module (1711); A linear drive unit (1712) is used to drive the lead screw nut module (1711) to drive the material carrier (18) to pass through the material delivery channel (121) and perform reciprocating linear motion between the feed chamber (13) and the storage chamber (14); The guide roller assembly (1713) is disposed in the feed cavity (13) and is used to support and guide the reciprocating linear motion of the material carrier (18).

5. A flash evaporation coating system, characterized in that: The flash coating system comprises the coating loading device according to any one of claims 1 to 4, and further comprises: A quantitative feeding device (2) is used to transport the vapor deposition material from the storage chamber (14) to the material evaporation device (3) in a timely and quantitative manner; The material evaporation device (3) comprises: a flash crucible (31) provided with an evaporation chamber (311) for receiving the evaporation material; a crucible heating device (32) for flash evaporating the evaporation material in the evaporation chamber (311) into material vapor under a vacuum environment; A vapor conveying device (4) for conveying the material vapor from the evaporation chamber (311) to the evaporation chamber (51) of the substrate evaporation device (5) so as to deposit the material vapor on the surface of the target substrate (6) disposed in the evaporation chamber (51) to form a coating layer; The vacuum device (8) is also used to evacuate the evaporation chamber (311), the quantitative feeding device (2), the steam delivery device (4) and the evaporation chamber (51).

6. The flash evaporation coating system according to claim 5, characterized in that: The quantitative feeding device (2) comprises: A device main unit (21), connected to the material storage chamber (14); A feeding pipeline (22) connecting the device main unit (21) and the evaporation chamber (311); The gate valve (23) is arranged on the feeding pipeline (22) and is used to adjust the feeding rate of the evaporation material input into the evaporation chamber (311) through the feeding pipeline (22).

7. The flash evaporation coating system according to claim 6, characterized in that: The steam delivery device (4) comprises: Device housing (41); The channel heating device (42) comprises: an inner shell body (421) disposed in the internal volume (411) of the device outer shell (41); a heating channel (4221) disposed at the bottom of one end of the inner shell body (421); a gas transmission channel (4222) disposed inside the other end of the inner shell body (421) and connecting the flash crucible (31) and the heating channel (4221); and a channel heater (4223) disposed inside the inner shell body (421) and used for heating the material vapor entering the heating channel (4221) through the gas transmission channel (4222); The vapor spray coating device (43) comprises: a bottom shell body (431) embedded in a mounting notch (412) at the bottom of a device housing (41); an air outlet channel (4311) disposed at the top of the bottom shell body (431) and connected to the heating channel (4221); a plurality of steam nozzles (4312) evenly spaced and linearly distributed on the bottom shell body (431) and connected to the vapor deposition chamber (51) and the air outlet channel (4311); The target substrate (6) is arranged at intervals below the steam nozzle (4312).

8. The flash evaporation coating system according to claim 7, characterized in that: The steam delivery device (4) further comprises: A heat-insulating layer (44) is applied on the inner surface of the device housing (41); A plurality of reflection plates (45) are disposed in the internal cavity (411) and surround the inner shell body (421); A cooling device (46) is arranged on the device housing (41).

9. The flash evaporation coating system according to claim 5, characterized in that: The material evaporation device (3) further comprises: The first temperature sensor and the second temperature sensor are respectively used to detect the real-time temperature in the evaporation chamber (311) and the steam delivery device (4).

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