Vacuum coating equipment with film surface detection function

Abstract

The utility model relates to the technical field of vacuum coating, and discloses vacuum coating equipment with a film surface detection function. The conveying device is used for conveying the plated part along a preset direction; the process chamber is arranged on the base frame and is used for coating a plated part; the buffer chamber is arranged on the base frame and located on the rear side of the process chamber in the conveying direction of the plated part, and the buffer chamber is used for isolating the environment of the process chamber from other environments; the image acquisition module is arranged in the buffer chamber and comprises at least one CCD (Charge Coupled Device) camera and a transmission structure, the CCD camera and the transportation device are oppositely arranged, and the transmission structure is used for driving the CCD camera to move to a set position along a set path in a plane parallel to the transportation device. And the production efficiency is influenced by the quality detection of the film surface.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, and particularly relates to a vacuum coating device with a film surface detection function. Background Art

[0002] Vacuum coating is a process of converting metal, non-metal or compound materials into gaseous or plasma states through physical or chemical means in a highly vacuum environment and depositing them on the surface of the workpiece to be coated to form a thin film. Compared with traditional coating, vacuum coating has excellent effects such as a richer variety of coating materials, easier control of film layer thickness, and strong adhesion.

[0003] In the prior art, after the workpiece to be coated is completed with coating processing, it is usually necessary to open the process chamber, take out the coated product and manually detect the film surface quality of the workpiece to be coated, or the device itself transports the workpiece to be coated to a designated position for film surface quality detection, analyze various performance indicators of the film surface, and judge whether the coating indicators meet the standards, so as to judge whether the product is qualified.

[0004] However, in the above prior art, off-line detection is carried out after the product is coated, and subsequent processes after detection will bring relatively long process queuing waiting time, which will affect the performance of some film layer materials sensitive to time and environment. Also, because off-line detection requires opening the process chamber to take out the coated product, the gas atmosphere environment and vacuum environment in the process chamber are both damaged. When coating the next workpiece to be coated later, it is necessary to re-introduce gas and evacuate the process chamber again. Since vacuum coating requires a very high vacuum degree, the evacuation time is very long, and continuous production cannot be achieved, which will affect production efficiency. Summary of the Utility Model

[0005] In view of this, the utility model provides a vacuum coating device with a film surface detection function to solve the problems of low reliability of detection results and the influence of film surface quality detection on production efficiency.

[0006] The utility model provides a vacuum coating device with a film surface detection function, including: a base frame; a transportation device for transporting the workpiece to be coated along a predetermined direction; a process chamber provided on the base frame for coating the workpiece to be coated; a buffer chamber provided on the base frame and located at the rear side of the process chamber in the transportation direction of the workpiece to be coated, and the buffer chamber is used to isolate the process chamber environment from other environments; a graphic acquisition module provided in the buffer chamber, including at least one CCD camera and a transmission structure, the CCD camera is disposed opposite to the transportation device, and the transmission structure is used to drive the CCD camera to move along a set path to a set position in a plane parallel to the plane where the transportation device is located.

[0007] Beneficial effects: By providing a transportation device to transport the workpieces to be plated along the setting direction of the continuous production line, the workpieces to be plated are processed through each coating process in a predetermined order. After the workpiece to be plated is transferred to the process chamber along with the transportation of the transportation device, a vacuum coating device in the process chamber, such as a sputtering coating device or an evaporation coating device, coats the surface of the workpiece to be plated. After the coating is completed, the workpiece to be plated continues to be transferred to the buffer chamber along with the movement of the transportation device. In the buffer chamber, the temperature or ambient air pressure of the workpiece to be plated is adjusted, and at the same time, the surface coating quality is monitored by the graphic acquisition module. During the detection process of the workpiece to be plated, the next workpiece to be plated has entered the process chamber under the transportation of the transportation mechanism for coating processing. After the workpiece to be plated stops in the buffer chamber, the CCD camera is transported to a set position above the workpiece to be plated by the transmission structure, realizing the monitoring of the surface coating quality of the workpiece to be plated. After the shooting is completed, the CCD camera is reset under the drive of the transmission mechanism. The workpiece to be plated completes the detection and continues to be conveyed to the next coating process, and the next workpiece to be plated enters the buffer chamber, and so on. Since there is no need to separately transfer the workpiece to be plated to a certain target position for photographing and detection, but the CCD is integrated into the continuous production line on the trajectory of the transportation mechanism for transporting the workpiece to be plated, and the photographing position is matched with the position of the workpiece to be plated by moving the CCD camera, it can not only efficiently and reliably monitor the coating quality of the workpiece to be plated online, but also reduce the overall waiting time on the continuous production line and improve the production efficiency. And because the process chamber and the buffer chamber are connected, the product after coating can directly perform online film surface quality detection in the buffer chamber; the buffer chamber is used to isolate the process chamber environment from other environments, that is, when the process chamber and the coating chamber are not connected, the buffer chamber has reached a vacuum degree similar to or slightly lower than that of the process chamber, and the entire detection process does not require breaking the vacuum environment, nor does it require pumping the chamber environment from normal pressure to a preset high vacuum degree again.

[0008] In an alternative embodiment, the transmission structure includes a first guide rail and a second guide rail, the first guide rail is perpendicularly arranged with the second guide rail, the CCD camera is slidably arranged on the first guide rail, a first driving module for driving the CCD camera to slide is arranged on the first guide rail, the first guide rail is slidably arranged on the second guide rail, and a second driving module for driving the first guide rail to slide is arranged on the second guide rail.

[0009] Beneficial effects: By providing a first guide rail and a second guide rail that are perpendicular to each other, and arranging the CCD camera on the first guide rail, the CCD camera can be arbitrarily moved within the plane formed by the perpendicular intersection of the first guide rail and the second guide rail, which is convenient for matching with the positions to be detected on different workpiece products to be plated, and any part of the film surface on the product can be detected.

[0010] In an alternative embodiment, a controller is further included. A first position sensor is disposed in the buffer chamber. The controller is electrically connected to the sensor and the transport device respectively. When the work piece to be plated enters the buffer chamber and reaches a set position, the first position sensor sends a signal to the controller. After receiving the signal from the first position sensor, the controller controls the transport device to stop transporting the work piece to be plated.

[0011] Advantageous effects: The CCD camera has high shooting clarity. However, in order to further improve the shooting quality, at the moment of CCD shooting, the CCD camera and the work piece to be plated need to be relatively stationary. If the work piece to be plated and the CCD camera are made to move synchronously by the CCD camera and the work piece to be plated, the transmission accuracy requirements for each driving motor are high and the reliability is low. Therefore, a first position sensor is provided, and after the first position sensor detects that the work piece to be plated moves to a specified position in the buffer chamber, the movement of the work piece to be plated is stopped, and then the CCD camera is transported to the photographing position and stationary photographed to improve the shooting clarity.

[0012] In an alternative embodiment, the moving speed of the CCD camera is faster than the moving speed of the work piece to be plated on the transport device.

[0013] Advantageous effects: By restricting the moving speed of the CCD camera, on the one hand, it avoids the situation that the moving speed is too fast, which causes great pressure on the fixed structure and transmission structure of the CCD camera under the influence of inertia, resulting in the camera being skewed and vibrating, which affects the detection effect. On the other hand, it also avoids the situation that the moving speed of the CCD camera is too slow, making it difficult to match the detection of the work piece to be plated with the speed of the transport device transporting the work piece to be plated, and the transport device needs to stagnate for a long time, which affects the production efficiency. Ensure that the moving speed of the CCD camera is faster than the moving speed of the work piece to be plated on the conveying device, so that when the work piece to be plated reaches a specified position in the buffer chamber, the CCD camera can respond quickly and complete the shooting.

[0014] In an alternative embodiment, the CCD camera has an initial position and at least one shooting position on the transmission structure. At the shooting position, the CCD camera takes a picture of the work piece to be plated moving in a customized manner. After completing the shooting, the CCD camera returns to the initial position. A second position sensor electrically connected to the controller is provided at the initial position on the transmission structure. When the CCD camera moves to the initial position, the second position sensor sends a signal to the controller. After receiving the signal from the second position sensor, the controller controls the transport device to continue transporting the work piece to be plated.

[0015] Beneficial effects: By setting a second position sensor at the initial position of the CCD camera, each time the CCD camera finishes taking pictures and returns to the initial position, when the second position sensor detects that the CCD camera reaches the initial position, it immediately sends a signal to the controller, and makes the transport device continue to move and perform the next round of picture-taking detection, effectively improving the integrity and periodicity of the action, avoiding the situation that the driving position of the CCD camera gradually deviates from the predetermined position due to the error accumulation of the program or the motion structure, and improving the reliability of the equipment operation.

[0016] In an optional implementation manner, there are a plurality of the first guide rails, and the plurality of first guide rails are respectively in sliding fit with the second guide rail, and the CCD camera and the first driving motor for driving the corresponding CCD camera to slide are respectively slidably arranged on the plurality of first guide rails.

[0017] Beneficial effects: By providing a plurality of first guide rails, it is convenient to install a plurality of CCD cameras. When the area to be detected on the workpiece to be plated is large, or when it is necessary to further improve the picture-taking efficiency, etc., the plurality of second driving modules drive the first guide rails to move, and the plurality of first driving modules respectively drive the corresponding CCD cameras, so that different CCD cameras move along different motion trajectories respectively and reach different predetermined positions for picture-taking inspection, which helps to greatly improve the efficiency of picture-taking detection, reduce the residence time of the required workpiece to be plated in the buffer chamber, and improve the production efficiency.

[0018] In an optional implementation manner, there are two second guide rails, and the two second guide rails are arranged in parallel and opposite to each other, and the first guide rail is located between the two second guide rails and is respectively in sliding fit with the two first guide rails.

[0019] Beneficial effects: By the two second guide rails being respectively located at both ends of the first guide rail and being in sliding fit with the first guide rail, the situation of the cantilever beam structure at the sliding fit structure between the first guide rail and the second guide rail is reduced, the bending moment generated by the first guide rail under its own weight and the weight of the CCD camera module is reduced, and the adverse effects of internal stress on the structural stability and structural life are reduced, further improving the structural stability and reliability.

[0020] In an optional implementation manner, there are a plurality of the process chambers, there are a plurality of the buffer chambers, the buffer chambers are arranged at the rear sides of the corresponding process chambers in the conveying direction of the workpiece to be plated, and the pattern acquisition modules are respectively arranged in the respective buffer chambers.

[0021] Beneficial effects: When the workpiece to be plated requires multiple types of coatings, since the coating materials and the required coating conditions are different, multiple process chambers are provided to meet the coating requirements of different film layers. By providing multiple buffer chambers and arranging image acquisition modules in each buffer chamber, the coating quality of each film layer on the workpiece to be plated is detected, thereby comprehensively controlling the coating quality of the workpiece to be plated.

[0022] In an optional embodiment, the process chamber is communicated with the buffer chamber, and a valve plate for conducting or blocking the process chamber and the buffer chamber is arranged at the communication position. A negative pressure pumping device is arranged on the buffer chamber, and the negative pressure pumping device is used to maintain a vacuum environment in the buffer chamber.

[0023] Beneficial effects: When the workpiece to be plated is being coated in the process chamber and during the process of taking pictures and detecting in the buffer chamber, the buffer chamber and the process chamber are blocked by the valve plate, thereby avoiding the mutual influence between the coating process and the detection process and maintaining different air pressure environments between different chambers. At the same time, when the workpiece to be plated is transferred between the process chamber and the buffer chamber, the valve plate is opened to communicate the process chamber and the buffer chamber, facilitating the passage of the workpiece to be plated.

[0024] In an optional embodiment, the size corresponding to a single pixel in the image collected by the CCD camera (401) is less than 0.5um * 0.5um.

[0025] Beneficial effects: By controlling the pixels, resolution and field of view of the CCD camera, the size of a single pixel point of the CCD camera is ensured to be less than a predetermined value, so that the staff or equipment can obtain sufficiently clear pictures, thereby accurately judging the coating quality of the surface of the workpiece to be plated. Description of the Drawings

[0026] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0027] Figure 1 It is a schematic diagram of the overall structure of a vacuum coating device with a film surface detection function according to an embodiment of the present invention;

[0028] Figure 2 It is a schematic diagram of a vacuum coating device with a film surface detection function according to an embodiment of the present invention for showing the internal structure of the buffer chamber;

[0029] Figure 3Schematic diagram of a vacuum coating device with a film surface detection function according to an embodiment of the present invention, used to illustrate a graphic acquisition module;

[0030] Figure 4 Schematic diagram of a vacuum coating device with a film surface detection function according to an embodiment of the present invention, used to illustrate a transmission mechanism.

[0031] Explanation of reference numerals:

[0032] 100, transport device; 200, process chamber; 300, buffer chamber; 400, graphic acquisition module; 401, CCD camera; 402, transmission mechanism; 4021, first guide rail; 4022, second guide rail; 500, first position sensor; 600, base frame. Detailed implementation manners

[0033] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0034] The following combines Figures 1 to 4 , and describes the embodiments of the present invention.

[0035] According to an embodiment of the present invention, on the one hand, a vacuum coating device with a film surface detection function is provided. Please refer to Figures 1 to 4 , including: a base frame 600; a transport device 100 for transporting a workpiece to be plated along a predetermined direction; a process chamber 200 provided on the base frame 600 for coating the workpiece to be plated; a buffer chamber 300 provided on the base frame 600 and located behind the process chamber 200 in the transport direction of the workpiece to be plated, and the buffer chamber 300 is used to isolate the environment of the process chamber 200 from other environments; a graphic acquisition module 400 provided in the buffer chamber 300, including at least one CCD camera 401 and a transmission structure, the CCD camera 401 is disposed opposite to the transport device 100, and the transmission structure is used to drive the CCD camera 401 to move along a set path to a set position in a plane parallel to the plane where the transport device 100 is located.

[0036] In this embodiment, by setting up the transport device 100 to transport the workpieces to be plated along the setting direction of the continuous production line, the workpieces to be plated are processed through each coating process in a predetermined order. After the workpiece to be plated is transferred to the process chamber 200 along with the transport of the transport device 100, a vacuum coating device in the process chamber 200, such as a sputtering coating device or an evaporation coating device, coats the surface of the workpiece to be plated. After the coating is completed, the workpiece to be plated continues to be transferred to the buffer chamber 300 along with the movement of the transport device 100. In the buffer chamber 300, the temperature of the workpiece to be plated or the ambient air pressure is adjusted, and at the same time, the surface coating quality is monitored by the graphic acquisition module 400. During the detection process of this workpiece to be plated, the next workpiece to be plated has entered the process chamber 200 under the transport of the transport mechanism for coating processing. After this workpiece to be plated stops in the buffer chamber 300, the CCD camera 401 is transported to a set position above the workpiece to be plated by the transmission structure, realizing the monitoring of the surface coating quality of the workpiece to be plated. After the shooting is completed, the CCD camera 401 resets under the drive of the transmission mechanism 402. This workpiece to be plated completes the detection and continues to be conveyed along the continuous production line to the next coating process, and the next workpiece to be plated enters the buffer chamber 300, and so on. Since there is no need to separately transfer the workpiece to be plated to a certain target position for photographic detection, but the CCD is integrated into the continuous production line on the trajectory of the transport mechanism transporting the workpiece to be plated, and the photographing position is matched with the position of the workpiece to be plated by moving the CCD camera 401, it can not only efficiently and reliably perform on-line monitoring of the coating quality of the workpiece to be plated, but also reduce the overall waiting time on the continuous production line and improve the production efficiency. And because the process chamber 200 and the buffer chamber 300 are connected, the product after coating can directly perform on-line film surface quality detection in the buffer chamber 300; the buffer chamber is used to isolate the environment of the process chamber 200 from other environments, that is, when the process chamber and the coating chamber are not connected, the buffer chamber 300 has reached a vacuum degree similar to or slightly lower than that of the process chamber, and the entire detection process does not need to break the vacuum environment, nor does it need to pump the cavity environment from normal pressure to a preset high vacuum degree again.

[0037] In the above embodiment, no specific form of the transport device 100 is limited. The transport device 100 may be a transport plate structure slidably arranged on the base frame 600 in multiple numbers. The transport plate is driven by a motor screw mechanism or a cylinder mechanism, and sequentially transports the workpieces to be plated along the direction of the continuous production line. In some embodiments not shown, the transport device 100 may also be a conveyor belt passing through each chamber of devices such as the process chamber 200 and the buffer chamber 300.

[0038] In addition, specifically, in the above embodiment, a vacuum evaporation coating device, a vacuum sputtering coating device, or other forms of coating devices may be provided in the process chamber 200. The above coating devices are all within the protection scope of this embodiment.

[0039] It should be noted that the CCD (Charge Coupled Device) camera has good shooting clarity. The specific models and parameters of the CCD are not limited in the embodiments of the present application. In one embodiment, by way of example, the pixel count of the CCD camera 401 is greater than 16 million, the field of view is controlled within 0.5 mm - 2 mm, the resolution is 4096 * 4096, and the control focusing lens and focusing structure of the CCD camera 401 ensure that the field of view is 2 mm * 2 mm, so that the size of a single pixel captured by the CCD camera 401 is 0.49 um * 0.49 um; in another embodiment, the pixel count of the CCD camera 401 is 20 million pixels, the resolution of the CCD camera 401 is 5440 * 3648, and the control focusing lens and focusing structure of the CCD camera 401 ensure that the field of view is 0.75 mm * 0.5 mm, so that the size of a single pixel of the CCD camera 401 is 0.14 um * 0.14 um. In the above two examples, it can be ensured that, under the resolution accuracy of the CCD camera 401, the captured images can distinguish film layer quality problems with defect sizes greater than 5 um.

[0040] In one embodiment, please refer to Figure 1 and Figure 3 , the transmission structure includes a first guide rail 4021 and a second guide rail 4022. The first guide rail 4021 and the second guide rail 4022 are perpendicularly arranged. The CCD camera 401 is slidably arranged on the first guide rail 4021. A first driving module for driving the CCD camera 401 to slide is provided on the first guide rail 4021. The first guide rail 4021 is slidably arranged on the second guide rail 4022. A second driving module for driving the first guide rail 4021 to slide is provided on the second guide rail 4022.

[0041] Specifically, the specific forms of the first driving module and the second driving module are not limited in this embodiment. The first driving module and the second driving module can be a lead screw slider driving mechanism driven by a motor. In some embodiments not shown, the first driving module and the second driving module can also be a gear rack driving mechanism driven by a motor, or a cylinder mechanism or a hydraulic cylinder mechanism driven by a gas source or a liquid source.

[0042] In this embodiment, by providing the mutually perpendicular first guide rail 4021 and second guide rail 4022, and by arranging the CCD camera 401 on the first guide rail 4021, the CCD camera 401 can be arbitrarily moved within the plane formed by the perpendicular intersection of the first guide rail 4021 and the second guide rail 4022, which is convenient for matching with the positions to be detected on different workpieces to be plated, and any part of the film surface on the product can be detected.

[0043] In one embodiment, please refer to Figure 2, it further includes a controller (not shown in the figure). A first position sensor 500 is provided in the buffer chamber 300. The controller is electrically connected to the sensor and the transport device 100 respectively. When the work piece to be plated enters the buffer chamber 300 and reaches the set position, the first position sensor 500 sends a signal to the controller. After receiving the signal from the first position sensor 500, the controller controls the transport device 100 to stop transporting the work piece to be plated.

[0044] In this embodiment, the CCD camera 401 has high shooting clarity. However, in order to further improve the shooting quality, at the moment of CCD shooting, it is necessary for the CCD camera 401 to be relatively stationary with respect to the work piece to be plated. If the work piece to be plated and the CCD camera 401 are synchronized by the CCD camera 401 and the work piece to be plated moving synchronously, the transmission accuracy requirements for each driving motor are high and the reliability is low. Therefore, a first position sensor 500 is provided, and after the first position sensor 500 detects that the work piece to be plated moves to the specified position in the buffer chamber 300, the movement of the work piece to be plated is stopped, and then the CCD camera 401 is transported to the photographing position and stationary photographed to improve the shooting clarity.

[0045] In one embodiment, the moving speed of the CCD camera 401 is faster than the moving speed of the work piece to be plated on the transport device 100.

[0046] Exemplarily, the moving speed of the CCD camera 401 is 0.5 m / s to 2 m / s.

[0047] In this embodiment, by restricting the moving speed of the CCD camera 401, on the one hand, it avoids the situation that the moving speed is too fast, which causes great pressure on the fixed structure and transmission structure of the CCD camera 401 under the influence of inertia, resulting in camera skew and vibration and affecting the detection effect. On the other hand, it also avoids the situation that the moving speed of the CCD camera 401 is too slow, making it difficult to match the detection of the work piece to be plated with the speed of the transport device 100 transporting the work piece to be plated, and the transport device 100 needs to stagnate for a long time, affecting the production efficiency. It is ensured that the moving speed of the CCD camera 401 is faster than the moving speed of the work piece to be plated on the conveying device, so that when the work piece to be plated reaches the specified position in the buffer chamber, the CCD camera 401 can quickly respond and complete the shooting.

[0048] In one embodiment, please refer to Figure 2, the CCD camera 401 has an initial position and at least one shooting position in the transmission structure. At the shooting position, the CCD camera 401 takes pictures of the plated workpieces undergoing customized movement. After completing the picture-taking, the CCD camera 401 returns to the initial position. A second position sensor electrically connected to the controller is provided at the initial position on the transmission structure. When the CCD camera 401 moves to the initial position, the second position sensor sends a signal to the controller, and after receiving the signal from the second position sensor, the controller controls the transport device 100 to continue transporting the plated workpieces.

[0049] In this embodiment, by setting a second position sensor at the initial position of the CCD camera 401, each time the CCD camera 401 completes picture-taking and returns to the initial position, when the second position sensor detects that the CCD camera 401 reaches the initial position, it immediately sends a signal to the controller, and makes the transport device 100 continue to move and perform the next round of picture-taking detection. This effectively improves the integrity and periodicity of the actions, avoids the situation that the driving position of the CCD camera 401 gradually deviates from the predetermined position due to the error accumulation of the program or the motion structure, and improves the reliability of the equipment operation.

[0050] In one embodiment, please refer to Figure 3 , there are multiple first guide rails 4021. The multiple first guide rails 4021 are respectively in sliding fit with the second guide rail 4022, and a CCD camera 401 and a first driving motor for driving the corresponding CCD camera 401 to slide are respectively slidably arranged on the multiple first guide rails 4021.

[0051] In this embodiment, by setting multiple first guide rails 4021, it is convenient to install multiple CCD cameras 401. When the area to be detected on the plated workpieces is large, or when it is necessary to further improve the picture-taking efficiency, etc., the multiple first guide rails 4021 are driven to move by multiple second driving modules, and the corresponding CCD cameras 401 are respectively driven by multiple first driving modules, so that different CCD cameras 401 move along different motion trajectories respectively and reach different predetermined positions for picture-taking inspection, which helps to greatly improve the efficiency of picture-taking detection, reduce the residence time of the required plated workpieces in the buffer chamber, and improve the production efficiency.

[0052] In one embodiment, there are two second guide rails 4022. The two second guide rails 4022 are arranged in parallel and opposite to each other. The first guide rail 4021 is located between the two second guide rails 4022 and is respectively in sliding fit with the two first guide rails 4021.

[0053] In this embodiment, two second guide rails 4022 are respectively located at both ends of the first guide rail 4021 and are slidably engaged with the first guide rail 4021, reducing the occurrence of a cantilever beam structure at the sliding fit structure between the first guide rail 4021 and the second guide rail 4022, reducing the bending moment generated by the first guide rail 4021 under its own weight and the weight of the CCD camera 401 module, and reducing the adverse effects of internal stress on the structural stability and structural life, further improving the structural stability and reliability.

[0054] In one embodiment, please refer to Figure 1 , there are multiple process chambers 200 and multiple buffer chambers 300. The buffer chambers 300 are provided at the rear side of the corresponding process chambers 200 in the direction of the workpiece to be plated. Each buffer chamber 300 is respectively provided with a pattern acquisition module 400.

[0055] Specifically, in the case where different materials need to be coated on the surface of the workpiece to be plated, and when the same coating thickness on the surface of the workpiece to be plated is relatively thick, multiple process chambers 200 are correspondingly provided. At this time, the buffer chambers 300 are used to separate the chambers for coating different materials. At the same time, the CCD cameras 401 provided in the buffer chambers 300 respectively monitor the coatings of different materials, ensuring that the quality of each coating can be effectively monitored and controlled. It should be noted that the "corresponding process chamber 200" mentioned in the above embodiment refers to one or more process chambers 200 corresponding to the same coating material layer, that is, the buffer chamber 300 is provided after one or more process chambers 200 corresponding to the same coating material.

[0056] In this embodiment, in the case where the workpiece to be plated requires multiple types of coatings, since the coating materials and the required coating conditions are different, multiple process chambers 200 are provided to meet the coating requirements of different film layers. By providing multiple buffer chambers 300 and setting a pattern acquisition module 400 in each buffer chamber 300, the coating quality of each film layer on the workpiece to be plated is detected, so as to comprehensively control the coating quality of the workpiece to be plated.

[0057] In one embodiment, the process chamber 200 is communicated with the buffer chamber 300, and a valve plate for conducting or blocking the process chamber 200 and the buffer chamber 300 is provided at the communication position. A negative pressure pumping device is provided on the buffer chamber 300, and the negative pressure pumping device is used to maintain the vacuum environment in the buffer chamber 300.

[0058] In this embodiment, when the plated object is located in the process chamber 200 for coating, and when the plated object is located in the buffer chamber 300 for photographing and testing, the buffer chamber and the process chamber 200 are blocked by the valve plate, thereby avoiding the mutual influence between the coating process and the testing process, and maintaining different air pressure environments between different chambers. At the same time, when the plated object is transferred between the process chamber 200 and the buffer chamber 300, the valve plate is opened to connect the process chamber and the buffer chamber, so as to facilitate the passage of the plated object.

[0059] In addition, it should be noted that the continuous production line may further include at least one transition chamber, which is located at the front side of the process chamber 200 in the conveying direction of the plated workpiece.

[0060] In some of the above embodiments, see Figure 1 Exemplarily, there are three process chambers 200. Along the direction of transporting the plated parts by the transport device 100, the modules on the equipment are: a loading platform (not shown in the figure), a first transition chamber (not shown in the figure), a first process chamber 200, a second process chamber 200, a first buffer chamber 300, a third process chamber 200, a second buffer chamber 300, a second transition chamber (not shown in the figure), and an unloading platform (not shown in the figure). Among them, the air pressure in the first transition chamber is initially reduced to make the interior in a low vacuum state. The first process chamber 200 and the second process chamber 200 are both high vacuum plating chambers, and nickel oxide plating is performed on the plated parts. The first buffer chamber 300 isolates the second process chamber 200 from the third process chamber 200, and the plated parts are photographed and inspected by the CCD camera 401. Then the plated parts enter the third process chamber 200 and are coated with aluminum oxide. After the coating is completed, the plated parts enter the second buffer chamber 300. The second buffer chamber 300 isolates the third process chamber 200 from the indoor environment, and photographs and inspects the plated parts by the CCD camera 401. The plated parts that pass the inspection are transported to the lower material table and unloaded, thereby completing the plating processing of the plated parts.

[0061] In one embodiment, the size of a single pixel in the image captured by the CCD camera 401 is smaller than 0.5um*0.5um.

[0062] Exemplarily, the pixel of the CCD camera 401 is greater than 16 million, the resolution of the CCD camera 401 is better than 4096*4096, and the field of view of the CCD camera 401 is 0.5 mm-2 mm.

[0063] In this embodiment, by controlling the pixels, resolution, and field of view of the CCD camera 401, it is ensured that the size of a single pixel point of the CCD camera 401 is less than a predetermined value, so that the staff or equipment can obtain sufficient clear pictures, and thus accurately judge the coating quality of the surface of the workpiece to be plated.

[0064] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations fall within the scope defined by the appended claims.

Claims

1. A vacuum coating device with film surface detection function, characterized in that: include: Base frame (600); A transport device (100) for transporting a plated object along a predetermined direction; A process chamber (200) is disposed on the base frame (600) and is used for coating a coating object; A buffer chamber (300) is provided on the base frame (600) and is located at the rear side of the process chamber (200) in the direction of conveying the plated object, and the buffer chamber (300) is used to isolate the process chamber (200) environment from other environments; The image acquisition module (400) is arranged in the buffer chamber (300), and comprises at least one CCD camera (401) and a transmission structure, wherein the CCD camera (401) is arranged opposite to the transport device (100), and the transmission structure is used to drive the CCD camera (401) to move along a set path to a set position in a plane parallel to the transport device (100).

2. The vacuum coating equipment with film surface detection function according to claim 1, characterized in that: The transmission structure comprises a first guide rail (4021) and a second guide rail (4022); the first guide rail (4021) and the second guide rail (4022) are arranged vertically; the CCD camera (401) is slidably arranged on the first guide rail (4021); a first driving module for driving the CCD camera (401) to slide is arranged on the first guide rail (4021); the first guide rail (4021) is slidably arranged on the second guide rail (4022); a second driving module for driving the first guide rail (4021) to slide is arranged on the second guide rail (4022).

3. The vacuum coating equipment with film surface detection function according to claim 2, characterized in that: The invention also includes a controller, wherein a first position sensor (500) is provided in the buffer chamber (300), and the controller is electrically connected to the sensor and the transport device (100), respectively. When the plated object enters the buffer chamber (300) and reaches a set position, the first position sensor (500) sends a signal to the controller, and after receiving the signal from the first position sensor (500), the controller controls the transport device (100) to stop transporting the plated object.

4. The vacuum coating equipment with film surface detection function according to claim 3, characterized in that: The moving speed of the CCD camera (401) is faster than the moving speed of the plated object on the transport device (100).

5. The vacuum coating equipment with film surface detection function according to claim 3, characterized in that: The CCD camera (401) has an initial position and at least one shooting position on the transmission structure. At the shooting position, the CCD camera (401) takes a picture of the plated workpiece in customized motion. After completing the shooting, the CCD camera (401) returns to the initial position. A second position sensor electrically connected to the controller is provided at the initial position on the transmission structure. When the CCD camera (401) moves to the initial position, the second position sensor sends a signal to the controller. After receiving the signal from the second position sensor, the controller controls the transport device (100) to continue transporting the plated workpiece.

6. The vacuum coating equipment with film surface detection function according to claim 2, characterized in that: The first guide rail (4021) is provided in plurality, and the plurality of first guide rails (4021) are respectively slidably matched with the second guide rail (4022), and the CCD camera (401) and the first driving module for driving the corresponding CCD camera (401) to slide are respectively slidably arranged on the plurality of first guide rails (4021).

7. The vacuum coating equipment with film surface detection function according to claim 2, characterized in that: Two second guide rails (4022) are provided, the two second guide rails (4022) are arranged in parallel and opposite to each other, and the first guide rail (4021) is located between the two second guide rails (4022) and is slidably matched with the two first guide rails (4021) respectively.

8. The vacuum coating equipment with film surface detection function according to any one of claims 1 to 7, characterized in that: There are a plurality of process chambers (200), and a plurality of buffer chambers (300). The buffer chambers (300) are arranged at the rear side of the corresponding process chamber (200) in the direction of conveying the plated workpiece, and each buffer chamber (300) is respectively provided with the graphic acquisition module (400).

9. The vacuum coating equipment with film surface detection function according to claim 8, characterized in that: The process chamber (200) is connected to the buffer chamber (300), and a valve plate for connecting or blocking the process chamber and the buffer chamber is provided at the connection point. A negative pressure extraction device is provided on the buffer chamber (300), and the negative pressure extraction device is used to maintain a vacuum environment in the buffer chamber (300).

10. The vacuum coating equipment with film surface detection function according to claim 1, characterized in that: The corresponding size of a single pixel in the image collected by the CCD camera (401) is less than 0.5um*0.5um.

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