Vertical type secvd equipment

Abstract

The utility model provides a vertical type secvd device which comprises an outer furnace tube, an inner furnace tube and a heating source, the inner furnace tube is installed in the outer furnace tube, a furnace cover assembly and a furnace door capable of being opened and closed are arranged at the two ends between the outer furnace tube and the inner furnace tube respectively, the multiple pairs of electrodes are connected in a sealed mode and penetrate through the furnace cover assembly, and the radio frequency power source is arranged outside the furnace tubes and electrically connected with the electrodes. And each pair of electrodes is electrically connected with a corresponding carrier in the straight-through chamber. According to the utility model, the electrode is arranged at the end part of the furnace tube and penetrates through the furnace cover part to connect the straight-through cavity in the furnace tube with the radio frequency power supply outside the furnace tube, so that the graphite boat is electrified through the electrode. In the embodiment that the carrier rotates in the furnace tube, an electrode is directly arranged on a rotating shaft for driving a bearing piece of the carrier to rotate in a penetrating mode, so that the electrode can rotate along with the carrier, the problems of sealing and rotating wiring are solved, and meanwhile, an electric slip ring or an electric brush base body is externally matched to achieve rotating conductive connection; and the electrode can be reliably connected with a radio frequency power supply.

Description

Technical Field

[0001] The utility model relates to the technical field of solar energy, in particular to a vertical PECVD device. Background Art

[0002] In the field of photovoltaic manufacturing technology, the main process equipment is mostly of horizontal structure, such as diffusion, annealing, PECVD (Plasma Enhanced Chemical Vapor Deposition), and LPCVD (Low Pressure Chemical Vapor Deposition), etc.; however, with the development of the market, the production capacity and process level of horizontal equipment are gradually approaching the bottleneck and the improvement is slow.

[0003] In related technologies, a PECVD furnace mainly includes a furnace body, a gas supply system, and an exhaust system. Among them, the furnace body is vertically arranged. Specifically, the furnace body has a process chamber. Gas is introduced into the process chamber through the gas supply system. The exhaust system discharges the tail gas. Most of the current vertical PECVD furnaces can only place one or two carriers. At the same time, certain process temperature and special gases are required, and the carrier needs to be powered on to complete the reaction. Since the vertical furnace needs to be airtight and the internal temperature is high, it is difficult to connect wires. The existing vertical furnaces cannot well realize the external power supply to the internal carrier for power on. Summary of the Utility Model

[0004] In order to solve the technical problem that the carrier in the vertical furnace in the above-mentioned prior art cannot be externally powered on, the utility model proposes a vertical PECVD device.

[0005] The technical solution adopted by the utility model is as follows:

[0006] The utility model proposes a vertical PECVD device, which includes an outer furnace tube, an inner furnace tube, and a heating source. The inner furnace tube is installed inside the outer furnace tube. At both ends between the outer furnace tube and the inner furnace tube, a furnace cover assembly and a switchable furnace door are respectively arranged to seal the upper and lower ends of the direct-through chamber between the inner furnace tube and the outer furnace tube. The heating source is used to heat the direct-through chamber. It also includes multiple pairs of electrodes that are hermetically connected and pass through the furnace cover assembly, and a radio frequency power supply arranged outside the furnace tube and electrically connected to the electrodes. Each pair of electrodes is electrically connected to the corresponding carrier in the direct-through chamber.

[0007] Preferably, the furnace cover assembly is arranged at the upper end, and the furnace door is arranged at the lower end.

[0008] Preferably, the furnace cover assembly is arranged at the lower end, and the furnace door is arranged at the upper end.

[0009] Further, the furnace lid assembly includes a furnace lid, and the electrode is hermetically connected and passes through the furnace lid.

[0010] Further, the furnace lid assembly includes: a furnace lid with a central hole, and a magnetohydrodynamic sealing component that hermetically connects the end of the inner furnace tube and the edge of the central hole of the furnace lid; a rotating device connected to the transmission shaft of the magnetohydrodynamic sealing component is provided in the reaction chamber, and the rotating device carries or mounts the carrier and drives the carrier to rotate around the inner furnace tube; the electrode is hermetically connected and passes through the transmission shaft of the magnetohydrodynamic sealing component.

[0011] Further, an annular brush base is provided outside the furnace tube, an electric brush head is provided at the connecting end of the electrode and is placed on the brush base, and when the transmission shaft is driven to rotate, the electric brush head at the connecting end of the electrode slides along the brush base.

[0012] Further, an electric slip ring is provided outside the furnace tube, the rotating part of the electric slip ring is connected to the transmission shaft through a connecting shaft, the electrode is connected to the ring channel on the rotating part, and an electrode wire electrically connecting the ring channel is provided on the brush part of the electric slip ring.

[0013] Further, the rotating device includes: a rotating disk connected to the transmission shaft and surrounding the inner furnace tube, and a carrier bearing position or a hanging position installed on the rotating disk.

[0014] Further, the outer ends of the furnace lid and the furnace door away from the straight-through chamber bulge outward to form spherical protrusions, a partition is provided on the inner end surface of the upper furnace lid surrounding the central hole to form a heat insulation ring package, a partition is provided on the inner end surface of the lower furnace door to form a heat insulation package, and the heat insulation package and the heat insulation ring package can be used as a water cooling channel or install a water cooling component.

[0015] Preferably, the radio frequency power supply is a multi-channel radio frequency power supply or a single-channel radio frequency power supply.

[0016] Further, the heating source includes: an inner heating source provided inside the inner furnace tube, an outer heating source provided outside the outer furnace tube, and a heat dissipation device is correspondingly provided around the outer heating source and the inner heating source.

[0017] Further, a circle of gears or a pulley is provided on the outer wall surface of one end of the transmission shaft located outside the furnace tube.

[0018] Further, the furnace door is provided with a plurality of furnace openings penetrating through the lower furnace door, the size and shape of the furnace openings match the size and shape of the side surface of the carrier, and each furnace opening is correspondingly provided with a furnace lid.

[0019] Compared with the prior art, the present utility model has the following advantages:

[0020] 1. By arranging electrodes at the ends of the furnace tubes, and connecting the direct-through chamber inside the furnace tubes with the radio frequency power supply outside the furnace tubes through the electrodes passing through the furnace cover part, the graphite boats are electrified to complete the reaction.

[0021] 2. In the embodiment where the carrier rotates inside the furnace tube, by directly arranging the electrodes on the rotating shaft that drives the carrier-bearing member to rotate, the electrodes can follow the rotation of the carrier, solving the problems of sealing and rotating wiring. At the same time, an electric slip ring or a brush base can be used outside to achieve rotating electrical connection, enabling the electrodes to be reliably connected to the radio frequency power supply.

[0022] 3. The radio frequency power supply can adopt a single-channel radio frequency power supply, corresponding to the carrier one by one, or a multi-channel radio frequency power supply to improve work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0024] Figure 1 It is a three-dimensional structure schematic diagram of the first embodiment of the present invention;

[0025] Figure 2 It is a three-dimensional structure schematic diagram of the first embodiment of the present invention with the outer furnace tube and the heating source hidden;

[0026] Figure 3 It is a cross-sectional view of the first embodiment of the present invention;

[0027] Figure 4 It is a three-dimensional structure schematic diagram of the second embodiment of the present invention;

[0028] Figure 5 It is a three-dimensional structure schematic diagram of the second embodiment of the present invention with the outer furnace tube and the heating source hidden;

[0029] Figure 6 It is a cross-sectional view of the second embodiment of the present invention;

[0030] Figure 7 It is a three-dimensional structure schematic diagram of the fifth embodiment of the present invention;

[0031] Figure 8 It is a front view of the fifth embodiment of the present invention with the outer furnace tube and the heating source hidden;

[0032] Figure 9Schematic perspective view of hiding the outer furnace tube and the heating source in the fifth embodiment of the present utility model;

[0033] Figure 10 Schematic perspective view of hiding the outer furnace tube and the heating source in the fifth embodiment of the present utility model;

[0034] Figure 11 Schematic perspective view of the sixth embodiment of the present utility model;

[0035] Figure 12 Schematic perspective view of hiding the outer furnace tube and the heating source in the sixth embodiment of the present utility model;

[0036] Figure 13 Cross-sectional view of the sixth embodiment of the present utility model;

[0037] Figure 14 Schematic perspective view of the third embodiment of the present utility model;

[0038] Figure 15 Front view of hiding the outer furnace tube and the heating source in the third embodiment of the present utility model;

[0039] Figure 16 Schematic perspective view of hiding the outer furnace tube and the heating source in the third embodiment of the present utility model;

[0040] Figure 17 Schematic perspective view of the fourth embodiment of the present utility model;

[0041] Figure 18 Front view of hiding the outer furnace tube and the heating source in the fourth embodiment of the present utility model;

[0042] Figure 19 Cross-sectional view of hiding the outer furnace tube and the heating source in the fourth embodiment of the present utility model;

[0043] 1. Furnace tube;

[0044] 11. Outer furnace tube;

[0045] 12. Inner furnace tube;

[0046] 2. Furnace lid;

[0047] 3. Furnace door;

[0048] 41. Radio frequency power supply; 42. Electrode; 43. Electrode connector; 44. Electrode wire;

[0049] 50. Carrier; 51. Rotating disk; 52. Carrier connection part;

[0050] 6. Magnetohydrodynamic sealing component;

[0051] 61. Outer ring part; 62. Inner ring part; 63. Transmission shaft; 631. Gear;

[0052] 71. External heat source; 72. Internal heat source; 73. Heat dissipation device;

[0053] 8. Electric slip ring; 81. Connecting shaft;

[0054] 9. Brush base; 91. Brush head. Detailed implementation mode

[0055] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0056] The principle and structure of the present utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0057] Most of the current PECVD vertical furnaces can only hold one or two carriers. Moreover, due to the need for a certain process temperature and special gases to complete the reaction, the temperature and gas cannot be evenly distributed throughout the furnace in the vertical furnace body, resulting in uneven yields of the battery wafers in the same batch and unable to meet the production requirements. During the process, the carrier also needs to be powered on to complete the reaction, but the previous vertical furnace only placed the silicon wafers in the carrier without corresponding conductive electrodes.

[0058] In response to this, as Figures 1 to 6 shown, the present utility model proposes a vertical PECVD device, which specifically includes: an outer furnace tube 11, an inner furnace tube 12, a heat source, a furnace cover assembly, a furnace door 3, an electrode 42 and a radio frequency power supply 41. The inner furnace tube 12 is coaxially arranged with the outer furnace tube 11 and is located inside the outer furnace tube 11, so as to form an annular straight-through chamber between the inner furnace tube 12 and the outer furnace tube 11. The furnace cover assembly and the furnace door 3 are respectively arranged at the upper and lower ends of the inner furnace tube 12 and the outer furnace tube 11 to seal both ends of the straight-through chamber. The heat source is arranged on the outer furnace tube and / or the inner furnace tube and can heat the straight-through chamber through the tube walls of the inner and outer furnace tubes. The electrode 42 penetrates through the furnace cover assembly and is fixedly sealed at the penetration point, so that one end of the electrode 42 extends into the straight-through chamber and one end is located outside the straight-through chamber. Among them, the end located inside the straight-through chamber is connected to the carrier 50, and the end located outside the straight-through chamber is connected to the radio frequency power supply 42.

[0059] That is, by powering on the carrier, the process reaction that requires the carrier to be powered on to complete is satisfied, and at the same time, there is a heat source that can heat the straight-through chamber inside the furnace tube.

[0060] Specifically, the radio frequency power supply 41 can be a single-channel radio frequency power supply, that is, a single-channel radio frequency power supply is externally connected to a pair of electrodes corresponding to each vehicle. In other embodiments, the radio frequency power supply can also be a multi-channel radio frequency power supply, that is, a single radio frequency power supply is simultaneously connected to the electrodes of multiple vehicles for power supply.

[0061] As Figures 1 to 3 shown, in the first embodiment, the furnace cover assembly only includes the furnace cover 2. The furnace cover 2 is arranged at the upper end of the furnace tube 1, and the furnace door 3 is arranged at the lower end of the furnace tube 1; the penetration position of the electrode 42 is on the furnace cover 2, that is, a through hole is preset on the furnace cover 2, and an electrode joint 43 with a sealed connection is arranged at the through hole, which can be used to connect the part of the electrode 42 located in the straight-through chamber and the part located outside the straight-through chamber. Both ends of the part of the electrode 42 located in the straight-through chamber are connected to the inner end of the electrode joint 43 and the vehicle 50, and the part of the electrode 42 located outside the straight-through chamber is an electrode wire for connecting the outer end of the electrode joint 43 and the radio frequency power supply.

[0062] As Figures 4 to 6 shown, in the second embodiment, the furnace cover assembly only includes the furnace cover 2. The furnace cover 2 is hermetically arranged at the lower end of the furnace tube 1, and the furnace door is hermetically arranged at the upper end of the furnace tube 1; the penetration position of the electrode 42 is on the furnace cover, that is, a through hole is preset on the furnace cover, and an electrode joint or the electrode can be directly passed through at the through hole; arranging an electrode joint is convenient for sealed installation. Taking the electrode joint as an example, the electrode joint is used as a connection intermediate piece to connect the internal electrode and the external electrode respectively. The internal electrode is connected to the inner end of the electrode joint and the vehicle, and the external electrode is used to connect the outer end of the electrode and the radio frequency power supply.

[0063] In the above two embodiments, 6 electrode joints 43 are arranged on the furnace cover 2 and are arranged in a ring along the furnace cover 2 in a circle, corresponding to the positions of the vehicles located in the furnace tube, which is convenient for wiring between the vehicle and the electrode joint.

[0064] The 6 electrode joints are adjacent to each other in pairs. Two adjacent electrode joints 43 form a pair, which are the positive electrode and the negative electrode respectively. A pair of electrode joints 43 are respectively connected to the positive electrode introduction end and the negative electrode introduction end of a vehicle.

[0065] In the above two embodiments, the inner furnace tube 12 can be a through-type inner furnace tube 12, that is, both ends are open. At the same time, the furnace cover 2 and the furnace door 3 are provided with central holes corresponding to the two open ends. At the same time, sealing flanges are provided at the upper and lower ends of the inner furnace tube to be hermetically connected to the furnace cover and the furnace door respectively, and support flanges are provided, so that the inner furnace tube can be hoisted from the top through the support flange or supported from the bottom through the support flange.

[0066] In other embodiments, the inner furnace tube 12 can also have a structure with one end open and the other end hemispherical. When the hemispherical end of the inner furnace tube faces the furnace lid, the furnace lid does not need to have a central hole in the center; when the hemispherical end of the inner furnace tube faces the furnace door, the furnace door does not need to have a central hole in the center.

[0067] In a specific embodiment, outer sealing flanges are provided on the outer walls at both ends of the outer furnace tube 11; the outer edges of the furnace lid 2 of the furnace lid assembly and the furnace door 3 are hermetically connected to the outer sealing flanges at both ends of the outer furnace tube.

[0068] In a preferred embodiment, the furnace lid assembly includes: a furnace lid 2 and a magnetohydrodynamic sealing component 6; the pecvd device further includes a rotating device; a central hole is provided in the center of the furnace lid 2, and the magnetohydrodynamic sealing component 6 is hermetically connected between the end of the inner furnace tube 12 and the edge of the central hole of the furnace lid 2. At the same time, the magnetohydrodynamic sealing component has a transmission shaft 63, the driving end of the transmission shaft 63 is located outside the furnace tube, and the transmission end of the transmission shaft 63 is located in the straight-through chamber, so that external power can penetrate into the straight-through chamber through the transmission shaft, and at the same time, the sealing performance of the straight-through chamber can be ensured.

[0069] The rotating device is installed in the straight-through chamber and is connected to the transmission end of the transmission shaft 63. A plurality of carrier positions are provided on the rotating device, which can carry or hang the carrier 50, and drive the carrier 50 on the carrier position to rotate around the inner furnace tube 12;

[0070] The electrode 42 is inserted through the transmission shaft 63 of the magnetohydrodynamic sealing component 6. Specifically, an electrode channel is arranged along the axial direction of the transmission shaft 63 and penetrates through both ends of the transmission shaft (specifically, it can be the end face or the side face of the end), so that the electrode 42 can be connected to the straight-through chamber from the outside diameter of the transmission shaft through the electrode channel. At the same time, the gap between the electrode and the electrode channel is sealed, and moreover, the electrode can also follow.

[0071] Alternatively, it can also be that the electrode is directly inserted through the transmission shaft of the magnetohydrodynamic sealing component, and then the electrode is connected to the inside and outside respectively, which is convenient for sealing.

[0072] Specifically, the magnetohydrodynamic sealing component 6 includes: an annular outer ring part, an inner ring part and a transmission shaft 63. The top surface of its outer ring part is hermetically connected to the edge of the central hole of the furnace lid. Specifically, a sealing ring can be added; the top surface of the inner ring part is hermetically connected to the sealing flange provided at the lower end of the inner furnace tube 12. The gap between the inner ring part and the outer ring part of the magnetohydrodynamic sealing component is a ring-shaped rotating sealing space, and the transmission shaft 63 penetrates through this rotating sealing space;

[0073] A magnetic fluid (not shown in the figure) is provided in the gap between the inner wall surface of the transmission shaft 63 and the outer wall surface of the inner ring portion of the magnetic fluid sealing member. Specifically, multiple annular grooves can be provided on the inner wall surface of the transmission shaft 63 or multiple annular grooves can be provided on the outer wall surface of the inner ring portion of the magnetic fluid sealing member to place the magnetic fluid, forming multiple sealing rings in the gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring portion of the magnetic fluid sealing member 6;

[0074] The magnetic fluid is also provided in the same way between the outer wall surface of the transmission shaft and the inner wall surface of the outer ring portion of the magnetic fluid sealing member. Permanent magnets are provided inside both the outer ring portion and the inner ring portion, and the magnetic poles serve as the inner wall of the rotating sealing space, enabling the magnetic fluid to surround the transmission shaft 63, so that the magnetic fluid forms multiple sealing rings in the gap between the outer wall surface of the transmission shaft and the inner wall surface of the outer ring portion of the magnetic fluid sealing member.

[0075] A gear 631 is provided on the outer wall surface of one end of the transmission shaft outside the furnace tube or a pulley is sleeved, so that the rotating shaft can be driven to rotate by an external power source.

[0076] As Figures 14 to 16 shown, in the third embodiment, that is, a further embodiment of the above-mentioned preferred embodiment, the furnace lid assembly includes: a furnace lid 2 and a magnetic fluid sealing member 6; wherein the furnace lid assembly is located at the upper end of the furnace tube 1, the furnace door 3 is located at the lower end of the furnace tube 1, and multiple annular brush bases 9 are provided outside the upper end of the furnace tube 1. The brush bases 9 are electrically connected to the radio frequency power supply 41 through electrode wires 44. The number of the brush bases 9 is at least two, and can also correspond one by one to the number of electrodes led out from the transmission shaft 63. Taking two as an example, the two brush bases 9 are arranged in parallel and spaced up and down. The position of the brush base 9 is directly opposite to the position of the transmission shaft 63 of the magnetic fluid sealing member 6. The electrodes 42 are connected to the connection ends outside the upper end of the transmission shaft 63 with two electrically conductive heads 91 that bend and extend outwards. The ends of the electrically conductive heads 91 are respectively placed on the two brush bases 9. When the transmission shaft 63 is driven to rotate, the electrically conductive heads 91 at the connection ends of the electrodes 42 move along with the transmission shaft 63, and the ends (contact connection ends) of the electrically conductive heads 91 are slidably electrically connected to the brush bases 9, so that the carrier 50 in the straight-through chamber inside the furnace tube can be connected to the radio frequency power supply 41 located outside through the electrodes 42 and the brush bases 9. And since both the electrodes 42 and the carrier 50 directly follow the rotation of the transmission shaft, the electrodes and the carrier are relatively stationary, which is convenient for the carrier to be electrically connected.

[0077] As Figures 17 to 19As shown, in the fourth embodiment, which is a further embodiment of the above-mentioned preferred embodiment, the furnace lid assembly is located at the lower end, the furnace door 3 is located at the upper end, and a plurality of annular brush bases 9 are provided outside the lower end of the furnace tube 1. The brush bases 9 are electrically connected to the radio frequency power supply 41. The number of brush bases 9 is two, or corresponds one-to-one with the number of lead-out electrodes. Taking two as an example, the two brush bases 9 are parallel and spaced up and down, and at the same time, one has a larger diameter and the other has a smaller diameter. The position of the brush base 9 is directly opposite to the position of the transmission shaft 63 of the magneto-fluid sealing member 6. The two electrodes 42 are connected at the external connection ends to two electric brush heads 91 that bend and extend outwards. The ends of the two electric brush heads 91 are respectively placed on the two brush bases 9. When the transmission shaft 63 is driven to rotate, the electric brush heads 91 at the connection ends of the electrodes 42 move along with the transmission shaft 63, and their ends are in sliding electrical connection with the brush bases 9. Thus, the internal carrier 50 can be connected to the external radio frequency power supply 41 through the electrodes 42 and the brush bases 9. Since both the electrodes 42 and the carrier 50 directly follow the rotation of the transmission shaft, the electrodes and the carrier are relatively stationary, which is convenient for the carrier to be energized and connected.

[0078] As Figures 7 to 10 shown, in the fifth embodiment, which is a further embodiment of the above-mentioned preferred embodiment, the furnace lid assembly is located at the upper end of the furnace tube 1, the furnace door 3 is located at the lower end of the furnace tube 1, and an electric slip ring 8 is provided outside the upper end of the furnace tube 1. The rotating part of the electric slip ring 8 is connected to the transmission shaft 63 through a connecting shaft 81, so that the rotating part of the electric slip ring 8 can follow the rotation of the transmission shaft 63. The outer wall surface of the rotating part of the electric slip ring 8 is an arc surface, and metal conductive ring tracks surrounding the rotating part are provided at different heights on the outer wall surface. The conductive ring tracks correspond one-to-one with the number of electrodes 42 led out from the transmission shaft 63, and the electrodes 42 are electrically connected to the corresponding conductive ring tracks through the connecting shaft 81 (which can be arranged inside the connecting shaft or around the connecting shaft). Since the electrodes 42 are arranged on the transmission shaft 63 and follow the rotation of the transmission shaft, the rotating part of the electric slip ring 8 also follows the rotation of the transmission shaft through the connecting shaft 81, that is, the electrodes are relatively stationary with respect to the rotating part of the electric slip ring, and can be fixedly electrically connected to the corresponding conductive ring tracks on the rotating part of the electric slip ring. The electric slip ring also includes a brush part provided outside the rotating part. Brushes corresponding to the conductive ring tracks are provided on the brush part. The brushes are in contact conduction with the conductive ring tracks, and the brushes are always electrically connected to the conductive ring tracks when the rotating part rotates. Electrode wires 44 electrically connected to the brushes are provided on the brush part, and the electrode wires 44 are electrically connected to the radio frequency power supply 41. Thus, the external radio frequency power supply is conductively connected to the electrodes connecting the carrier through the electric slip ring.

[0079] As Figures 11 to 13As shown, in the sixth embodiment, which is a further embodiment of the above-mentioned preferred embodiment, the furnace cover assembly is located at the lower end of the furnace tube 1, the furnace door 3 is located at the upper end of the furnace tube 1, an electric slip ring 8 is provided outside the lower end of the furnace tube 1, and the rotating part of the electric slip ring 8 is connected to the transmission shaft 63 through a connecting shaft 81, so that the rotating part of the electric slip ring 8 can rotate following the transmission shaft 63. The outer wall surface of the rotating part of the electric slip ring 8 is an arc surface, and metal conductive ring channels surrounding the rotating part are provided at different heights on the outer wall surface. The conductive ring channels correspond one-to-one with the number of electrodes 42 led out from the transmission shaft 63, and the electrodes 42 are electrically connected to the corresponding conductive ring channels through the connecting shaft 81 (which can be arranged inside the connecting shaft or around the connecting shaft). Since the electrodes 42 are arranged on the transmission shaft 63 and rotate following the transmission shaft, the rotating part of the electric slip ring 8 also rotates following the transmission shaft through the connecting shaft 81, that is, the electrodes are stationary relative to the rotating part of the electric slip ring, and the corresponding conductive ring channels on the rotating part of the electric slip ring can be fixedly electrically connected. The electric slip ring further includes a brush part arranged outside the rotating part. Brushes corresponding one-to-one with the conductive ring channels are provided on the brush part. The brushes are in contact conduction with the conductive ring channels, and the brushes are always electrically connected to the conductive ring channels when the rotating part rotates. Electrode wires 44 electrically connected to the brushes are provided on the brush part, and the electrode wires 44 are electrically connected to the radio frequency power supply 41, so that the external radio frequency power supply is electrically connected to the electrodes connected to the carrier through the electric slip ring.

[0080] The rotating device specifically includes: a rotating disk 51, the middle part of the rotating disk 51 is connected to the transmission shaft 63 and is arranged around the inner furnace tube 12, and a plurality of carrier connection parts 52 extending outwards are arranged at the edge of the rotating disk 51. The carrier connection parts 52 can specifically be carrier support seats or carrier hook seats.

[0081] When the rotating disk 51 is located at the top of the straight-through cavity of the furnace tube, the carrier connection part can specifically be a carrier hook seat, and the carrier is hung on the carrier hook seat by hanging and stands upright in the straight-through cavity of the furnace tube.

[0082] When the rotating disk 51 is located at the bottom of the straight-through cavity of the furnace tube 1, the carrier 50 connection part can specifically be a carrier support seat, and the carrier stands upright in the straight-through cavity of the furnace tube by bottom support.

[0083] In a specific embodiment, the outer end surface of the furnace cover 2 far from the straight-through cavity bulges outwards to form a spherical protrusion. Since the straight-through cavity needs to be evacuated, setting the outer end surface of the upper furnace cover as an upwardly protruding spherical protrusion can withstand greater pressure and prevent it from being sucked and deformed when the internal is evacuated.

[0084] And a heat insulation ring package is arranged on the inner end surface of the furnace cover around the central hole. The heat insulation ring package is formed by arranging partitions on the inner end surface of the upper furnace cover around the central hole. Heat insulation components such as reinforcing ribs with through holes and water cooling can be arranged in the heat insulation ring package. The reinforcing ribs can improve the support strength, and the heat insulation components such as water cooling can prevent the heat in the cavity from overflowing from the upper end.

[0085] The furnace door 3 is a spherical convex structure protruding downward. This enables the furnace door to withstand greater pressure, thereby preventing the lower furnace door from being sucked in and damaged when the enclosed space inside the furnace tube is evacuated.

[0086] In a specific embodiment, the furnace door can be set in an integral form, or it can be provided with a plurality of furnace openings penetrating through the furnace door. The size and shape of the furnace openings match the size and shape of the side surface of the carrier, and each furnace opening is correspondingly provided with a furnace cover.

[0087] At the same time, a partition is provided on the inner end surface of the furnace door to form a heat insulation package. Heat insulation components such as water cooling can be arranged inside the heat insulation package to prevent the heat in the chamber from overflowing from the lower end. Reinforcing ribs with through holes can also be provided to improve the strength of the bulging part of the lower furnace door.

[0088] The heating source specifically includes: an internal heating source 72 arranged inside the inner furnace tube 12, and an external heating source 71 arranged outside the outer furnace tube 11. The internal and external heating sources can heat the straight-through chamber 13 of the furnace tube 1 through the tube walls of the inner and outer furnace tubes.

[0089] In a specific embodiment, the external heating source and the internal heating source are an integral whole, that is, the electric heating wire is directly wound on the inner and outer furnace tubes to directly heat the enclosed cavity.

[0090] In a preferred embodiment, both the external heating source 71 and the internal heating source 72 are arranged in a ring shape and are arranged along the height direction of the inner and outer furnace tubes. Specifically, they can be divided into multiple independent heating sections along the height direction of the furnace tube, so as to achieve layered corresponding heating and improve the overall heating efficiency.

[0091] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0092] Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present utility model. At the same time, it should be understood that for the sake of convenience in description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific values should be interpreted as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0093] In the description of the present utility model, it should be understood that the orientation or positional relationships indicated by orientation terms such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal", and "top, bottom", etc. are usually based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description. Without contrary instructions, these orientation terms do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus should not be construed as limiting the protection scope of the present utility model; the orientation terms "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0094] For the convenience of description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "above" can be used here to describe the spatial positional relationship between a device or feature shown in the figure and other devices or features. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation described in the figure for the device. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned as "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations should be made for the spatial relative descriptions used here.

[0095] The foregoing is only the preferred embodiment of the present utility model and is not used to limit the present utility model. For those skilled in the art, the present utility model can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A vertical PECVD device, comprising an outer furnace tube, an inner furnace tube and a heating source, wherein the inner furnace tube is installed in the outer furnace tube, and a furnace cover assembly and a switchable furnace door are respectively arranged at both ends between the outer furnace tube and the inner furnace tube, so that the upper and lower ends of the straight-through chamber between the inner furnace tube and the outer furnace tube are sealed, and the heating source is used to heat the straight-through chamber, characterized in that: It also includes a plurality of pairs of electrodes which are sealed and connected and pass through the furnace cover assembly, and a radio frequency power source which is arranged outside the furnace tube and electrically connected to the electrodes, and each pair of the electrodes is electrically connected to a corresponding carrier in the through chamber.

2. The vertical pecvd device according to claim 1, characterized in that: The furnace cover assembly is arranged at the upper end, and the furnace door is arranged at the lower end.

3. The vertical pecvd device according to claim 1, characterized in that: The furnace cover assembly is arranged at the lower end, and the furnace door is arranged at the upper end.

4. The vertical pecvd device according to claim 2 or 3, characterized in that: The furnace cover assembly includes a furnace cover, and the electrode is sealed and connected to and passes through the furnace cover.

5. The vertical pecvd device according to claim 2 or 3, characterized in that: The furnace cover assembly includes: a furnace cover with a center hole, a magnetic fluid sealing component that seals and connects the end of the inner furnace tube with the edge of the center hole of the furnace cover; a rotating device connected to the transmission shaft of the magnetic fluid sealing component is provided in the straight-through chamber, and the rotating device carries or mounts the carrier and drives the carrier to rotate around the inner furnace tube.

6. The vertical pecvd device according to claim 5, characterized in that: The electrode is seal-connected to and passes through the transmission shaft of the magnetic fluid sealing component.

7. The vertical pecvd device according to claim 6, characterized in that: An annular brush base is arranged outside the furnace tube, a brush head is arranged at the connecting end of the electrode and rests on the brush base, and the brush head at the connecting end of the electrode slides along the brush base when the transmission shaft is driven to rotate.

8. The vertical pecvd device according to claim 6, characterized in that: An electric slip ring is arranged outside the furnace tube, a rotating part of the electric slip ring is connected to the transmission shaft via a connecting shaft, an electrode is connected to a ring track on the rotating part, and an electrode wire electrically connected to the ring track is arranged on the brush part of the electric slip ring.

9. The vertical pecvd device according to claim 6, characterized in that: The rotating device comprises: a rotating disk connected to the transmission shaft and surrounding the inner furnace tube, and a carrier bearing position or a hanging position installed on the rotating disk.

10. The vertical pecvd device according to claim 7, characterized in that: The outer end surfaces of the furnace cover and the furnace door away from the straight-through chamber protrude outward to form a spherical protrusion, the inner end surface of the furnace cover surrounding the center hole is provided with a partition to form an insulation ring package, and the inner end surface of the furnace door is provided with a partition to form an insulation package, and the insulation package and the insulation ring package can be used as water cooling channels or water cooling components can be installed.

11. The vertical pecvd device according to claim 1, characterized in that: The radio frequency power supply is a multi-channel radio frequency power supply or a single-channel radio frequency power supply.

12. The vertical pecvd device according to claim 1, characterized in that: The heating source comprises: an inner heating source arranged inside the inner furnace tube, an outer heating source arranged outside the outer furnace tube, and heat dissipation devices are arranged correspondingly around the outer heating source and the inner heating source.

13. The vertical pecvd device according to claim 6, characterized in that: The outer wall surface of one end of the transmission shaft outside the furnace tube is provided with a circle of gears or a belt pulley.

14. The vertical pecvd device according to claim 1, 2, 3 or 10, characterized in that: The furnace door is provided with a plurality of furnace openings penetrating the furnace door, the size and shape of the furnace openings match the size and shape of the side surfaces of the carrier, and each of the furnace openings is correspondingly provided with a furnace cover.

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