Gate valve sealing structure

Abstract

The utility model discloses a gate valve sealing structure, which is used for a vacuum cavity in a semiconductor ion plating method or a plasma etching process, and comprises an elastic sealing element which is adhered to a position which is a first distance away from the edge of a gate valve base plate in a surrounding manner; the corrosion-resistant blocking sealing element is adhered to the base plate on the inner side of the elastic sealing element, and a second distance is formed between the corrosion-resistant blocking sealing element and the elastic sealing element; during working, the elastic sealing piece is pressed to deform until the height of the elastic sealing piece is consistent with that of the corrosion-resistant blocking sealing piece. A circle of deformable sealing ring is arranged on the outer side of the gate valve sealing structure, and a circle of blocking ring is arranged on the inner side of the gate valve sealing structure. When the gate valve is used, the deformable sealing ring on the outer side can be compressed and sealed firstly, the blocking ring on the inner side just makes contact with an opponent piece when the deformable sealing ring reaches the sealing standard compression amount of the deformable sealing ring, in this way, the blocking ring on the inner side can block most of plasma, the plasma cannot directly bombard the deformable sealing ring, and therefore the service life of the gate valve is prolonged.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, and particularly to a valve sealing structure door for a vacuum chamber in semiconductor ion plating or plasma etching processes. Background Art

[0002] In the manufacturing process of semiconductors such as wafers, ion plating or plasma etching of workpieces is carried out in a clean and highly vacuum environment, and corrosive and reactive gases are used in the manufacturing process. A valve that can be opened and closed is required at the workpiece inlet and outlet of this working condition.

[0003] The existing valve design is to install or bond a sealing ring of fluororubber or perfluoroether rubber on a metal part such as an aluminum plate or a stainless steel plate. During use, the sealing ring on the valve will come into contact with the corrosive gas and reactive gas inside the cavity, and the sealing ring will be gradually corroded, resulting in sealing failure.

[0004] In recent years, due to the increasingly harsh use conditions, the known materials with excellent plasma resistance are used, but the service life is still insufficient and the cost is high. Therefore, there is an urgent need for a valve to improve the above problems. Summary of the Utility Model

[0005] A series of simplified concepts are introduced in the summary of the utility model. These simplified concepts are all simplified from the prior art in this field, which will be further described in detail in the specific implementation part. The summary of the utility model does not mean to attempt to define the key features and essential technical features of the claimed technical solution, nor does it mean to attempt to determine the protection scope of the claimed technical solution.

[0006] The technical problem to be solved by the utility model is to provide a valve sealing structure with stronger plasma corrosion resistance and longer service life compared with the prior art.

[0007] To solve the above technical problem, the valve sealing structure provided by the utility model is used for a vacuum chamber in semiconductor ion plating or plasma etching processes, and includes:

[0008] An elastic seal 5, which is adhesively bonded around at a position at a first distance from the edge of the valve base plate;

[0009] A corrosion-resistant barrier seal 6, which is adhesively bonded on the base plate inside the elastic seal 5, and forms a second distance from the elastic seal 5;

[0010] During operation, the elastic seal 5 is compressed and deformed until the elastic seal 5 is at the same height as the corrosion-resistant barrier seal 6. The corrosion-resistant barrier seal 6 blocks the continuous deformation of the elastic seal 5. At this time, the corrosion-resistant barrier seal 6 can play a role in blocking corrosion.

[0011] Preferably, further improve the valve gate sealing structure, and the elastic seal 5 is a corrosion-resistant elastic seal. Fluororubber, perfluoroether or other corrosion-resistant rubber elastomers can be selected to manufacture the elastic seal 5.

[0012] Preferably, further improve the valve gate sealing structure, the first distance range is 0 mm to 10 mm, and the second distance range is 2 mm to 5 mm. Preferably, the first distance is 2 mm, 3 mm, 4 mm, 5 mm, 6 mm, 7 mm, 8 mm or 9 mm; preferably, the second distance is 2 mm, 3 mm, 4 mm or 5 mm.

[0013] Preferably, further improve the valve gate sealing structure, the elastic seal 5 is a sealing ring; or, a sealing ring embedded in a sealing groove. The top surface of the sealing ring can be a flat surface or a protrusion, and the sealing groove can be a rectangular groove, a dovetail groove or a T-shaped groove.

[0014] Preferably, further improve the valve gate sealing structure, when the elastic seal 5 is a sealing ring, the width range is 3 mm to 12 mm, and the height range is 0.1 mm to 10 mm. Preferably, the width is 4 mm, 5 mm, 6 mm, 7 mm, 8 mm, 9 mm, 10 mm or 11 mm; preferably, the height is 1 mm, 2 mm, 3 mm, 4 mm, 5 mm, 6 mm, 7 mm, 8 mm or 9 mm.

[0015] Preferably, further improve the valve gate sealing structure, when the elastic seal 5 is a sealing ring embedded in a sealing groove, the height range of the embedded sealing ring protruding from the base plate is 0.4 mm to 10 mm, and the top arc size range of the embedded sealing ring is R0.5 mm to R6 mm. Preferably, the height is 1 mm, 2 mm, 3 mm, 4 mm, 5 mm, 6 mm, 7 mm, 8 mm or 9 mm; preferably, the arc size is R1 mm, R2 mm, R3 mm, R4 mm or R5 mm.

[0016] Preferably, further improve the valve gate sealing structure, and the corrosion-resistant barrier seal 6 is made of polytetrafluoroethylene (PTFE).

[0017] Preferably, further improve the valve gate sealing structure, the corrosion-resistant barrier seal 6 is a barrier sealing ring; or, a barrier sealing ring embedded in a barrier groove. The top surface of the barrier sealing ring can be a flat surface or a protrusion, and the barrier groove can be a rectangular groove, a dovetail groove or a T-shaped groove.

[0018] Preferably, the valve gate sealing structure is further improved. When the corrosion-resistant barrier seal 6 is a barrier sealing ring, the width ranges from 0.5 mm to 10 mm, and the height ranges from 0.1 mm to 8 mm. Preferably, the width is 1 mm, 2 mm, 3 mm, 4 mm, 5 mm, 6 mm, 7 mm, 8 mm, or 9 mm; preferably, the height is 1 mm, 2 mm, 3 mm, 4 mm, 5 mm, 6 mm, or 7 mm.

[0019] Preferably, the valve gate sealing structure is further improved. When the corrosion-resistant barrier seal 6 is a barrier sealing ring embedded in the barrier groove, the height of the barrier sealing ring protruding from the valve base plate is 100% - 130% of the height of the elastic seal 5 protruding from the valve base plate. Preferably, the height of the barrier sealing ring protruding from the valve base plate is 110% or 120% of the height of the elastic seal 5 protruding from the valve base plate.

[0020] The valve gate sealing structure provided by the present utility model has a deformable sealing ring on the outside and a barrier ring on the inside. When the valve gate is in use, the deformable sealing ring on the outside will be compressed for sealing first. When the deformable sealing ring reaches its sealing standard compression amount, the barrier ring on the inside just touches the mating part (the deformable sealing ring). In this way, the barrier ring on the inside can block most of the plasma, and the plasma cannot directly bombard the deformable sealing ring, thereby extending the service life of the valve gate. Description of the Drawings

[0021] The drawings of the present utility model are intended to show the general characteristics of the methods, structures, and / or materials used in specific exemplary embodiments according to the present utility model, and supplement the description in the specification. However, the drawings of the present utility model are schematic diagrams not drawn to scale, and thus may not accurately reflect the precise structure or performance characteristics of any given embodiment. The drawings of the present utility model should not be construed as limiting or restricting the scope of the values or properties covered by the exemplary embodiments according to the present utility model. The present utility model will be further described in detail below in conjunction with the drawings and specific embodiments:

[0022] Figure 1 It is a schematic diagram of the prior art plasma gas corrosion principle. The direction indicated by the arrow in the figure is the direction in which the plasma gas contacts the sealing ring.

[0023] Figures 2 to 4 It is a schematic diagram of an embodiment of the present utility model Figures 1 to 3 .

[0024] Description of the Reference Numerals

[0025] Sealing ring 1 of the prior art

[0026] Cavity 2

[0027] Plasma gas 3

[0028] Valve base plate 4

[0029] Elastic seal 5

[0030] Corrosion-resistant barrier seal 6. Specific implementation mode

[0031] The following describes the implementation mode of the present utility model through specific specific examples. Those skilled in the art can fully understand other advantages and technical effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through different specific implementation modes. The details in this specification can also be applied based on different viewpoints, and various modifications or changes can be made without departing from the overall design concept of the utility model. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. The following exemplary embodiments of the present utility model can be implemented in many different forms and should not be construed as being limited only to the specific embodiments described herein. It should be understood that these embodiments are provided to make the disclosure of the present utility model thorough and complete, and to fully convey the technical solutions of these exemplary specific embodiments to those skilled in the art. It should be understood that when an element is referred to as being "connected" or "coupled" to another element, the element can be directly connected or coupled to the other element, or there can be an intermediate element. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there is no intermediate element. In all the drawings, the same reference numerals always represent the same elements.

[0032] First embodiment;

[0033] The present invention provides a valve sealing structure, which is used for a vacuum chamber of a semiconductor ion plating method or a plasma etching process, and includes:

[0034] An elastic seal 5, which is adhesively bonded around at a position at a first distance from the edge of the valve base plate;

[0035] A corrosion-resistant barrier seal 6, which is adhesively bonded on the base plate inside the elastic seal 5, and forms a second distance from the elastic seal 5;

[0036] During operation, the elastic seal 5 is compressed and deformed until the elastic seal 5 is at the same height as the corrosion-resistant barrier seal 6, and the corrosion-resistant barrier seal 6 blocks the further deformation of the elastic seal 5.

[0037] Since the corrosion-resistant barrier seal is the main contact part of the plasma gas, the corrosion-resistant barrier seal must have corrosion-resistant characteristics. And the elastic seal is mainly for pressure-bearing sealing. Therefore, in the case where the corrosion-resistant barrier seal blocks the plasma gas, the elastic seal can do not have corrosion-resistant effect and only has a sealing effect.

[0038] Optionally, the first distance range is 0 mm to 10 mm, and the second distance range is 2 mm to 5 mm.

[0039] Optionally, referring to Figures 2 to 3 as shown, the elastic seal 5 is an O-ring; or, an O-ring fitted in a sealing groove.

[0040] Wherein, when the elastic seal 5 is an O-ring, the width range is 3 mm to 12 mm, and the height range is 0.1 mm to 10 mm.

[0041] When the elastic seal 5 is an O-ring fitted in a sealing groove, the height of the fitted O-ring protruding from the base plate ranges from 0.4 mm to 10 mm, and the arc dimension of the top of the fitted O-ring ranges from R0.5 mm to R6 mm.

[0042] Optionally, continuing to refer to Figures 2 to 3 as shown, the corrosion-resistant barrier seal 6 is a barrier O-ring; or, a barrier O-ring fitted in a barrier groove. Preferably, the barrier O-ring is made of polytetrafluoroethylene (PTFE).

[0043] When the corrosion-resistant barrier seal 6 is a barrier O-ring, the width range is 0.5 mm to 10 mm, and the height range is 0.1 mm to 8 mm.

[0044] Optionally, when the corrosion-resistant barrier seal 6 is a barrier O-ring fitted in a barrier groove, the height of the barrier O-ring protruding from the valve base plate is 100% to 130% of the height of the elastic seal 5 protruding from the valve base plate. In addition, it should also be understood that although the terms "first", "second", etc. can be used here to describe different elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the exemplary embodiments of the present invention, the first element, component, region, layer or part discussed below can also be referred to as the second element, component, region, layer or part.

[0045] Second embodiment;

[0046] The present invention provides a valve seal structure for a semiconductor ion plating method or a plasma etching process vacuum chamber, comprising:

[0047] An elastic seal 5, which is a corrosion-resistant barrier seal, and is adhesively bonded around at a position at a first distance from the edge of the valve base plate;

[0048] The corrosion-resistant barrier seal 6 is adhered to the base plate inside the elastic seal 5, and a second distance is formed between it and the elastic seal 5;

[0049] During operation, the elastic seal 5 is deformed under pressure until the heights of the elastic seal 5 and the corrosion-resistant barrier seal 6 are the same, and the corrosion-resistant barrier seal 6 blocks further deformation of the elastic seal 5.

[0050] As a further improvement of the first embodiment, the elastic seal 5 and the corrosion-resistant barrier seal can form a double-layer corrosion resistance.

[0051] Further optionally, the first distance ranges from 0 mm to 10 mm, and the second distance ranges from 2 mm to 5 mm.

[0052] Further optionally, referring to Figures 2 to 3 as shown, the elastic seal 5 is a sealing ring; or, a sealing ring installed in a sealing groove.

[0053] Among them, when the elastic seal 5 is a sealing ring, the width range is 3 mm to 12 mm, and the height range is 0.1 mm to 10 mm.

[0054] When the elastic seal 5 is a sealing ring installed in a sealing groove, the height of the installed sealing ring protruding from the base plate ranges from 0.4 mm to 10 mm, and the top arc size range of the installed sealing ring is R0.5 mm to R6 mm.

[0055] Further optionally, continuing to refer to Figures 2 to 3 as shown, the corrosion-resistant barrier seal 6 is a barrier sealing ring; or, a barrier sealing ring installed in a barrier groove.

[0056] When the corrosion-resistant barrier seal 6 is a barrier sealing ring, the width range is 0.5 mm to 10 mm, and the height range is 0.1 mm to 8 mm.

[0057] Further optionally, referring to Figures 3 to 4 as shown, when the corrosion-resistant barrier seal 6 is a barrier sealing ring installed in a barrier groove, the height of the barrier sealing ring protruding from the valve base plate is 100% to 130% of the height of the elastic seal 5 protruding from the valve base plate.

[0058] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. It will also be understood that terms such as those defined in a general dictionary shall be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and shall not be interpreted in an idealized or overly formal sense unless expressly defined herein.

[0059] The above has described the present utility model in detail through specific implementation manners and embodiments, but these do not constitute a limitation to the present utility model. Without departing from the principle of the present utility model, those skilled in the art can also make many deformations and improvements, which should also be regarded as the protection scope of the present utility model.

Claims

1. A gate valve sealing structure, which is used in a semiconductor ion plating method or a plasma etching process vacuum chamber, characterized in that: include: An elastic sealing member (5) is circumferentially bonded at a position a first distance from an edge of a gate valve base plate; A corrosion-resistant barrier seal (6) bonded to a base plate inside the elastic seal (5) and having a second distance therefrom; During operation, the elastic sealing member (5) is deformed under pressure until the elastic sealing member (5) and the corrosion-resistant barrier sealing member (6) are at the same height, and the corrosion-resistant barrier sealing member (6) prevents the elastic sealing member (5) from further deforming.

2. The gate valve sealing structure according to claim 1, characterized in that: The elastic seal (5) is a corrosion-resistant elastic seal.

3. The gate valve sealing structure according to claim 1, characterized in that: The first distance range is 0mm~10mm, and the second distance range is 2mm~5mm.

4. The gate valve sealing structure according to claim 1, characterized in that: The elastic sealing member (5) is a sealing ring; or a sealing ring embedded in a sealing groove.

5. The gate valve sealing structure according to claim 4, characterized in that: When the elastic sealing member (5) is a sealing ring, the width ranges from 3 mm to 12 mm, and the height ranges from 0.1 mm to 10 mm.

6. The gate valve sealing structure according to claim 4, characterized in that: When the elastic sealing member (5) is a sealing ring embedded in the sealing groove, the height of the embedded sealing ring protruding from the base plate ranges from 0.4 mm to 10 mm, and the arc size of the top of the embedded sealing ring ranges from R0.5 mm to R6 mm.

7. The gate valve sealing structure according to claim 1, characterized in that: The corrosion-resistant barrier seal (6) is made of polytetrafluoroethylene.

8. The gate valve sealing structure according to claim 1, characterized in that: The corrosion-resistant barrier seal (6) is a barrier seal ring; or a barrier seal ring embedded in a barrier groove.

9. The gate valve sealing structure according to claim 8, characterized in that: When the corrosion-resistant barrier seal (6) is a barrier seal ring, the width range is 0.5 mm to 10 mm, and the height range is 0.1 mm to 8 mm.

10. The gate valve sealing structure according to claim 8, characterized in that: When the corrosion-resistant blocking seal (6) is a blocking seal ring embedded in the blocking groove, the height of the blocking seal ring protruding from the valve base plate is 100% to 130% of the height of the elastic seal (5) protruding from the valve base plate.

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