Vacuum isolating valve and vacuum exhaust system
By designing the valve body air inlet of the vacuum isolation valve, it can be fully opened, solving the problem of easy blockage of existing vacuum isolation valves, achieving efficient exhaust efficiency, extending equipment working time and reducing maintenance costs.
Patent Information
- Application Number
- CN202422122490.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-29
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-08-29
AI Technical Summary
Existing vacuum isolation valves are prone to clogging in the etching process with more polymers, resulting in reduced exhaust efficiency, increased maintenance costs, and affect etching rate and wafer yield.
A vacuum isolation valve is designed, and its valve body air inlet is located between the two ends of the linear movement path of the valve core, ensuring that the valve body air inlet can be fully opened, preventing the valve core from blocking the air flow, thereby increasing the air flow through the cross-section and preventing polymer accumulation and blockage.
It effectively improves the exhaust efficiency of the vacuum exhaust system, avoids blockage inside the valve body, extends the normal working time of the equipment, reduces maintenance frequency and cost, and maintains the etching rate and wafer yield.
Smart Images
Figure CN222992178U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of vacuum systems, and more particularly, to a vacuum isolation valve and a vacuum exhaust system. Background Art
[0002] In the existing dry etching process technology, the etching chamber requires an ultra-high vacuum environment, and the etching machine is equipped with a turbo molecular pump and a dry pump to operate together to meet the conditions of the etching process. The gas flow and the generated polymer during the etching process enter the front-stage pipeline after passing through the vacuum isolation valve and are finally discharged through the dry pump. Among them, the valve flap in the vacuum isolation valve is controlled by a driving mechanism to move to open or close the valve. Currently, the vacuum isolation valve provided by the existing technology keeps the valve flap in an open state, and the valve can only be opened halfway, resulting in a small cross-sectional area of the gas flow at the air inlet of the valve body. In the etching process with a large amount of polymer, the vacuum isolation valve is extremely prone to blockage, thus reducing the exhaust efficiency, shortening the equipment shutdown and maintenance cycle, and increasing the maintenance cost. In addition, due to the accumulation of polymer, the etching rate will be reduced and the wafer yield will be affected. Summary of the Utility Model
[0003] The purpose of the present application is to provide a vacuum isolation valve and a vacuum exhaust system, which can effectively improve the exhaust efficiency, avoid blockage inside the valve body, and effectively reduce the maintenance cost.
[0004] The embodiments of the present application are implemented as follows:
[0005] In a first aspect, an embodiment of the present application provides a vacuum isolation valve, including a valve core, a driving mechanism, and a valve body having an air passage cavity; an air inlet and an air outlet of the valve body are provided on the valve body and communicate with the air passage cavity; the valve core is driven by the driving mechanism to move linearly in the air passage cavity close to or away from the air outlet of the valve body, and the air inlet of the valve body is located between the two ends of the linear movement path of the valve core; when the valve core is located at one end of the linear movement path away from the air outlet of the valve body, the air passage cavity is opened; or, when the valve core is located at one end of the linear movement path close to the air outlet of the valve body, the air passage cavity is closed.
[0006] As an optional implementation manner, the edge of the air inlet of the valve body away from the air outlet is flush with the end of the linear movement path away from the air outlet of the valve body.
[0007] As an optional implementation manner, an air inlet connecting pipe is provided on the air inlet of the valve body, and an air outlet connecting pipe is provided on the air outlet of the valve body.
[0008] As an optional implementation manner, the central axis of the air inlet connecting pipe is perpendicular to and intersects the linear movement path, and the central axis of the air outlet connecting pipe is parallel to the linear movement path.
[0009] As an alternative embodiment, the valve core is in a plate-like structure, and the geometric center of the plate-like structure is located on the central axis of the air outlet of the valve body. The projection surface of the air outlet of the valve body on the plate-like structure along the central axis direction is smaller than the plate-like structure; the plate-like structure abuts against the inner wall of the air passage cavity to block the air outlet of the valve body.
[0010] As an alternative embodiment, when the plate-like structure abuts against the inner wall of the air passage cavity, the surface of the plate-like structure facing away from the air outlet of the valve body is flush with the edge of the air inlet of the valve body close to the air outlet of the valve body.
[0011] As an alternative embodiment, an annular seal is provided on the plate-like structure. When the plate-like structure abuts against the inner wall of the air passage cavity, the air outlet of the valve body is located inside the annular seal.
[0012] As an alternative embodiment, the air flow passage area of the air inlet of the valve body is the same as the air flow passage area of the air outlet of the valve body.
[0013] As an alternative embodiment, the driving mechanism includes a base provided on the valve body and a telescopic driving assembly mounted on the base. The telescopic end of the telescopic driving assembly is connected to the valve core.
[0014] In a second aspect, an embodiment of the present application provides a vacuum exhaust system, including the above-mentioned vacuum isolation valve and a turbo molecular pump; the intake end of the turbo molecular pump is connected to the vacuum chamber, and the outlet end is connected to the air inlet of the valve body of the vacuum isolation valve; a dry pump is connected to the air outlet of the valve body of the vacuum isolation valve.
[0015] The beneficial effects of the embodiments of the present application include:
[0016] The vacuum isolation valve provided by the embodiments of the present application includes a valve core, a driving mechanism, and a valve body having an air passage cavity; in the embodiments of the present application, an air inlet and an air outlet of the valve body communicating with the air passage cavity are provided on the valve body; the valve core of the embodiments of the present application is driven by the driving mechanism to move linearly in the air passage cavity close to or away from the air outlet of the valve body, and the air inlet of the valve body is located between the two ends of the linear movement path of the valve core. When the valve core of the embodiments of the present application is located at one end of the linear movement path away from the air outlet of the valve body, the air passage cavity is opened. When the valve core of the embodiments of the present application is located at one end of the linear movement path close to the air outlet of the valve body, the air passage cavity is closed. The embodiments of the present application set the air inlet of the valve body between the two ends of the linear movement path of the valve core to ensure that the air inlet of the valve body can be fully opened, so that when the valve core is in the open position, it does not block the air inlet of the valve body, and thus the air flow can smoothly pass through the air inlet of the valve body. Compared with the prior art, the cross-section of the air flow at the air inlet of the valve body in the embodiments of the present application is increased, effectively avoiding the accumulation and blockage of polymers, and enabling the vacuum exhaust valve to have a high exhaust efficiency.
[0017] An embodiment of the present application provides a vacuum exhaust system, which includes the above-mentioned vacuum isolation valve and a turbomolecular pump. The intake end of the turbomolecular pump in the embodiment of the present application is connected to a vacuum chamber, and the outlet end is connected to the intake port of the valve body of the vacuum isolation valve. The outlet port of the valve body of the vacuum isolation valve in the embodiment of the present application is connected to a dry pump. The vacuum exhaust system provided by the embodiment of the present application adopts the above-mentioned vacuum isolation valve, which has a large cross-sectional area for air flow, effectively avoids the accumulation and blockage of polymers, and enables the exhaust system to have a high exhaust efficiency. Compared with the prior art, the vacuum exhaust system provided by the embodiment of the present application increases the downtime maintenance cycle of the equipment, effectively extends the normal working time of the equipment, and reduces the maintenance frequency and cost. In addition, it can avoid the accumulation of polymers, so that the etching rate will not decrease, which is beneficial to preventing the decline of production yield. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.
[0019] Figure 1 It is one of the schematic structural diagrams of the vacuum isolation valve in the embodiment of the present application;
[0020] Figure 2 It is the second schematic structural diagram of the vacuum isolation valve in the embodiment of the present application;
[0021] Figure 3 It is the third schematic structural diagram of the vacuum isolation valve in the embodiment of the present application.
[0022] ICON:
[0023] 100 - Vacuum isolation valve; 101 - Valve core; 102 - Driving mechanism; 103 - Valve body; 104 - Airway cavity; 105 - Intake port of the valve body; 106 - Outlet port of the valve body; 107 - Linear movement path; 108 - Intake connection pipe; 109 - Outlet connection pipe; 110 - Telescopic driving assembly; 111 - Turbomolecular pump; 112 - Dry pump. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Usually, the components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.
[0025] Accordingly, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but merely represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts fall within the scope of protection of the present application.
[0026] It should be noted that like reference numerals and letters denote like items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance.
[0027] In the description of the present application, it should also be noted that unless otherwise clearly specified and limited, the terms "arranged", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.
[0028] In the existing dry etching process technology, the etching chamber requires an ultra-high vacuum environment, and the etching machine is equipped with a turbo molecular pump and a dry pump to operate together to meet the conditions of the etching process. The gas flow and the generated polymer during the etching process enter the foreline after passing through the vacuum isolation valve 100 and are finally discharged through the dry pump 112. Among them, the valve flap in the vacuum isolation valve 100 is controlled by the driving mechanism 102 to move to open or close the valve. Currently, the vacuum isolation valve 100 provided by the existing technology keeps the valve flap in an open state, and the valve can only be opened halfway, resulting in a smaller cross-sectional area of the gas flow at the air inlet 105 of the valve body. In the etching process with a large amount of polymer, the vacuum isolation valve 100 is extremely prone to blockage, thus reducing the exhaust efficiency, shortening the cycle of equipment shutdown and maintenance, and increasing the maintenance cost. In addition, due to the accumulation of polymer, the etching rate will be reduced and the wafer yield will be affected.
[0029] To solve the above technical problems, the embodiments of the present application provide a vacuum isolation valve 100 and a vacuum exhaust system.
[0030] Refer to Figure 1 、 Figure 2As shown in the figure, an embodiment of the present application provides a vacuum isolation valve 100, which includes a valve core 101, a driving mechanism 102, and a valve body 103 having an air passage cavity 104; a valve body air inlet 105 and a valve body air outlet 106 communicating with the air passage cavity 104 are provided on the valve body 103; the valve core 101 is driven by the driving mechanism 102 to move linearly in the air passage cavity 104 close to or away from the valve body air outlet 106, and the valve body air inlet 105 is located between the two ends of the linear movement path 107 of the valve core 101; when the valve core 101 is located at one end of the linear movement path 107 away from the valve body air outlet 106, the air passage cavity 104 is opened; or, when the valve core 101 is located at one end of the linear movement path 107 close to the valve body air outlet 106, the air passage cavity 104 is closed.
[0031] It should be noted that the vacuum isolation valve 100 provided by the embodiment of the present application is a valve specifically designed for a vacuum system, mainly used to cut off or control the gas flow in the vacuum system. The vacuum isolation valve 100 of the embodiment of the present application is characterized in that it can work in a high-vacuum environment and can provide reliable sealing to prevent gas leakage.
[0032] In the existing dry etching process technology, the etching chamber requires an ultra-high vacuum environment, so devices such as a turbomolecular pump 111 and a vacuum isolation valve 100 are needed. In addition, it should be noted that the vacuum isolation valve 100 provided by the embodiment of the present application is mainly used in the vacuum occasion of the etching environment and can also be used in other devices according to needs.
[0033] It should be noted that the specific structure of the driving mechanism 102 in the embodiment of the present application can be set by those skilled in the art according to needs. It includes a manual driving structure and an electric driving structure, and the purpose is to realize the movement control of the valve core 101. Therefore, no special limitation is imposed on the driving mechanism 102.
[0034] Exemplarily, it can be a manually operated handwheel, lever, etc., or it can be electrically, pneumatically or hydraulically driven. The driving mechanism 102 is responsible for controlling the position of the valve core 101 to realize the opening and closing of the vacuum isolation valve 100.
[0035] Refer to Figure 1 、 Figure 2 As shown in the figure, as an optional implementation manner, the driving mechanism 102 includes a base provided on the valve body 103 and a telescopic driving assembly 110 installed on the base. The telescopic end of the telescopic driving assembly 110 is connected to the valve core 101. Among them, the telescopic driving assembly 110 can be an electric telescopic rod, a pneumatic telescopic rod or a hydraulic telescopic rod, and the specific structure is set by those skilled in the art according to needs.
[0036] It should be noted that the valve body air inlet 105 of the embodiment of the present application is arranged between the two ends of the movement path of the valve core 101. When in the open position, the movement of the valve core 101 to the uppermost position does not affect the air intake cross-sectional area of the valve body air inlet 105, ensuring that the valve body air inlet 105 has a large air intake area. Therefore, the vacuum isolation valve 100 provided by the embodiment of the present application has a high exhaust efficiency.
[0037] The vacuum isolation valve 100 provided by the embodiment of the present application includes a valve core 101, a driving mechanism 102, and a valve body 103 having an air passage cavity 104; in the embodiment of the present application, a valve body air inlet 105 and a valve body air outlet 106 communicating with the air passage cavity 104 are opened on the valve body 103; the valve core 101 of the embodiment of the present application is driven by the driving mechanism 102 to move linearly in the air passage cavity 104 close to or away from the valve body air outlet 106, and the valve body air inlet 105 is located between the two ends of the linear movement path 107 of the valve core 101.
[0038] In the embodiment of the present application, the valve core 101 is located at one end of the linear movement path 107 away from the valve body air outlet 106, and the air passage cavity 104 is opened. In the embodiment of the present application, the valve core 101 is located at one end of the linear movement path 107 close to the valve body air outlet 106, and the air passage cavity 104 is closed. In the embodiment of the present application, the valve body air inlet 105 is arranged between the two ends of the linear movement path 107 of the valve core 101, ensuring that the valve body air inlet 105 can be fully opened, so that when the valve core 101 is in the open position, it does not block the valve body air inlet 105, and thus the air flow can smoothly pass through the valve body air inlet 105.
[0039] Compared with the prior art, the air flow cross-section of the valve body air inlet 105 in the embodiment of the present application is increased, effectively avoiding the accumulation and blockage of polymers, so that the vacuum exhaust valve has a high exhaust efficiency.
[0040] Refer to Figure 1 As shown, as an optional implementation manner, the edge of the valve body air inlet 105 away from the valve body air outlet 106 is flush with the end of the linear movement path 107 away from the valve body air outlet 106.
[0041] Furthermore, the edge of the valve body air inlet 105 away from the valve body air outlet 106 in the embodiment of the present application is flush with the end of the linear movement path 107 of the valve core 101 away from the air outlet. Through the above setting, after the valve core 101 moves to the open position, the valve body air inlet 105 can be fully opened, and it can ensure that the valve core 101 has a short movement stroke.
[0042] That is to say, compared with the valve body air inlet 105 being located in the middle of the linear movement path 107, the above setting can shorten the stroke of the linear movement path 107 of the valve core 101 to a certain extent, making the vacuum isolation valve 100 have a smaller volume and being convenient for installation.
[0043] Furthermore, in the embodiment of the present application, the valve body air outlet 106 can also be arranged close to the valve body air inlet 105, which is beneficial to further shorten the linear movement path 107, so that the vacuum isolation valve 100 has a smaller volume and is convenient for installation.
[0044] Among them, the air flow passage area of the valve body air inlet 105 is the same as that of the valve body air outlet 106.
[0045] On the one hand, through the above settings, the air flow has a smaller movement path in the vacuum isolation valve 100, which is beneficial to quickly pass the polymer through the vacuum isolation valve 100 and avoid the accumulation of the polymer in the vacuum isolation valve 100. On the other hand, the valve body air inlet 105 of the embodiment of the present application can be fully opened, so that the air flow has a larger passage area and a higher exhaust efficiency. In addition, when partially blocking the valve body air inlet 105, the path of the air flow passing through the vacuum isolation valve 100 can be further shortened.
[0046] As an alternative embodiment, an intake connection pipe 108 is provided on the valve body air inlet 105, and an outlet connection pipe 109 is provided on the valve body air outlet 106. Among them, the central axis of the intake connection pipe 108 of the embodiment of the present application intersects with the central axis of the outlet connection pipe 109.
[0047] Refer to Figure 1 As shown, preferably, the central axis of the intake connection pipe 108 is perpendicularly intersected with the linear movement path 107, and the central axis of the outlet connection pipe 109 is parallel to the linear movement path 107.
[0048] That is to say, in the embodiment of the present application, the air flow enters from the valve body air inlet 105 and enters the valve body air outlet 106 after a 90° turn.
[0049] Refer to Figure 1 As shown, as an alternative embodiment, the valve core 101 is a plate-like structure, the geometric center of the plate-like structure is located on the central axis of the valve body air outlet 106, and the projection surface of the valve body air outlet 106 along the central axis direction on the plate-like structure is smaller than the plate-like structure; the plate-like structure abuts against the inner wall of the air duct cavity 104 to block the valve body air outlet 106.
[0050] Refer to Figure 2 As shown, among them, when the plate-like structure abuts against the inner wall of the air duct cavity 104, the surface of the plate-like structure facing away from the valve body air outlet 106 is flush with the edge of the valve body air inlet 105 close to the valve body air outlet 106.
[0051] As an alternative embodiment, an annular seal is provided on the plate-like structure. When the plate-like structure abuts against the inner wall of the air passage cavity 104, the valve body air outlet 106 is located within the annular seal. By providing the annular seal in the embodiment of the present application, the airtightness of the vacuum isolation valve 100 can be effectively improved, preventing gas leakage.
[0052] Referring Figure 3 As shown, the embodiment of the present application provides a vacuum exhaust system, including the above-mentioned vacuum isolation valve 100 and a turbo molecular pump 111; the intake end of the turbo molecular pump 111 is connected to the vacuum chamber, and the outlet end is connected to the valve body intake port 105 of the vacuum isolation valve 100; the valve body air outlet 106 of the vacuum isolation valve 100 is connected to a dry pump 112.
[0053] The vacuum exhaust system provided by the embodiment of the present application includes the above-mentioned vacuum isolation valve 100 and a turbo molecular pump 111. The intake end of the turbo molecular pump 111 in the embodiment of the present application is connected to the vacuum chamber, and the outlet end is connected to the valve body intake port 105 of the vacuum isolation valve 100. The valve body air outlet 106 of the vacuum isolation valve 100 in the embodiment of the present application is connected to a dry pump 112. The vacuum exhaust system provided by the embodiment of the present application adopts the above-mentioned vacuum isolation valve 100, which has a relatively large cross-sectional area for air flow, effectively avoiding the accumulation and blockage of polymers, and enabling the exhaust system to have a relatively high exhaust efficiency.
[0054] Compared with the prior art, the vacuum exhaust system provided by the embodiment of the present application increases the cycle of equipment shutdown for maintenance, effectively extends the normal working time of the equipment, and reduces the maintenance frequency and cost. In addition, it can avoid the accumulation of polymers, so that the etching rate will not decrease, which is beneficial to preventing the decline of production yield.
[0055] The above are only the preferred embodiments of the present application and are not used to limit the present application. For those skilled in the art, the present application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.
Claims
1. A vacuum isolation valve (100), characterized in that: The invention comprises a valve core (101), a driving mechanism (102), and a valve body (103) having an airway cavity (104); the valve body (103) is provided with a valve body air inlet (105) and a valve body air outlet (106) which are in communication with the airway cavity (104); the valve core (101) is driven by the driving mechanism (102) to move in a straight line within the airway cavity (104) toward or away from the valve body air outlet (106). Movement, the valve body air inlet (105) is located between the two ends of the straight-line moving path (107) of the valve core (101); the valve core (101) is located at the end of the straight-line moving path (107) away from the valve body air outlet (106), and the airway cavity (104) is opened; or, the valve core (101) is located at the end of the straight-line moving path (107) close to the valve body air outlet (106), and the airway cavity (104) is closed.
2. The vacuum isolation valve (100) according to claim 1, characterized in that: The edge of the valve body air inlet (105) away from the valve body air outlet (106) is flush with the end of the straight moving path (107) away from the valve body air outlet (106).
3. The vacuum isolation valve (100) according to claim 2, characterized in that: An air inlet connecting pipe (108) is provided on the air inlet (105) of the valve body, and an air outlet connecting pipe (109) is provided on the air outlet (106) of the valve body.
4. The vacuum isolation valve (100) according to claim 3, characterized in that: The central axis of the air inlet connecting pipe (108) intersects the linear moving path (107) at right angles, and the central axis of the air outlet connecting pipe (109) is parallel to the linear moving path (107).
5. The vacuum isolation valve (100) according to claim 1, characterized in that: The valve core (101) is a plate-like structure, the geometric center of the plate-like structure is located on the central axis of the valve body air outlet (106), and the projection area of the valve body air outlet (106) on the plate-like structure along the central axis is smaller than the plate-like structure; the plate-like structure abuts against the inner wall of the airway cavity (104) to seal the valve body air outlet (106).
6. The vacuum isolation valve (100) according to claim 5, characterized in that: When the plate-like structure abuts against the inner wall of the airway cavity (104), the surface of the plate-like structure on the side facing away from the valve body air outlet (106) is flush with the edge of the valve body air inlet (105) close to the valve body air outlet (106).
7. The vacuum isolation valve (100) according to claim 5, characterized in that: An annular seal is provided on the plate-like structure, and when the plate-like structure abuts against the inner wall of the airway cavity (104), the valve body air outlet (106) is located inside the annular seal.
8. The vacuum isolation valve (100) according to any one of claims 1 to 7, characterized in that: The air flow passing area of the valve body air inlet (105) is consistent with the air flow passing area of the valve body air outlet (106).
9. The vacuum isolation valve (100) according to any one of claims 1 to 7, characterized in that: The driving mechanism (102) comprises a base arranged on a valve body (103) and a telescopic driving assembly (110) mounted on the base, wherein the telescopic end of the telescopic driving assembly (110) is connected to the valve core (101).
10. A vacuum exhaust system, characterized in that: It comprises the vacuum isolation valve (100) as claimed in any one of claims 1 to 9 and a turbomolecular pump (111); the air inlet end of the turbomolecular pump (111) is connected to the vacuum chamber, and the air outlet end is connected to the air inlet (105) of the valve body of the vacuum isolation valve (100); the air outlet (106) of the valve body of the vacuum isolation valve (100) is connected to a dry pump (112).