Multipurpose wafer feeding mechanism and integrated silicon wafer tester

Abstract

The utility model discloses a multipurpose sheet feeding mechanism which comprises a rack, a lifting part and a flower basket, the lifting part is arranged in the rack in a sliding mode, and the lifting part comprises a lifting frame connected with the rack in a sliding mode, a clamping block arranged in the lifting frame in a sliding mode, a spring arranged at one end of the clamping block and a pull rod arranged in the lifting frame in a sliding mode. The pull rod is in sliding connection with the clamping block, the spring pushes the clamping block to move inwards in the lifting frame, the pull rod moves to push the clamping block to overcome the elastic force of the spring to move outwards, the flower basket is arranged at the top of the lifting part, clamping grooves are formed in the bottoms of the two sides of the flower basket, and the clamping grooves are connected with the clamping block in a clamped mode. By arranging the lifting part, the pull rod can be pulled to move in the lifting frame, so that the four clamping blocks are driven to move towards the outer side at the same time, the clamping blocks can slide out of the clamping grooves, and the flower basket can be quickly unlocked.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon wafer conveying, in particular to a multi-purpose wafer feeding mechanism and an integrated silicon wafer tester. Background Technique

[0002] Single crystal silicon is a relatively active non-metallic element, which is an important part of crystal materials and at the forefront of the development of new materials. Its main uses are as semiconductor materials and for solar photovoltaic power generation, heating, etc. Due to the many advantages of solar energy such as cleanliness, environmental protection, and convenience, in the past thirty years, solar energy utilization technology has achieved great development in research and development, commercial production, and market development, becoming one of the emerging industries with rapid and stable development in the world. In the PECVD / PVD / RPD preparation process, the transfer of single crystal silicon wafers is an important link in this process, that is, the silicon wafers are transferred to the carrier plate by the transfer device.

[0003] When the existing wafer feeding mechanism is in use, the flower basket needs to be fixed in the wafer feeding mechanism, and the single crystal silicon wafers are conveyed by the conveyor belt. When the single crystal silicon wafers in the flower basket are conveyed, it needs to be disassembled. However, when the existing flower basket is fixed and disassembled, the disassembly and installation of the flower basket cannot be completed quickly. Content of the Utility Model

[0004] The purpose of the utility model is to provide a multi-purpose wafer feeding mechanism and an integrated silicon wafer tester to solve the problem that when the existing wafer feeding mechanism is in use, the flower basket needs to be fixed in the wafer feeding mechanism, and the single crystal silicon wafers are conveyed by the conveyor belt. When the single crystal silicon wafers in the flower basket are conveyed, it needs to be disassembled. However, when the existing flower basket is fixed and disassembled, the disassembly and installation of the flower basket cannot be completed quickly as mentioned in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical scheme: A multi-purpose wafer feeding mechanism, including a frame, a lifting part and a flower basket:

[0006] The lifting part is slidably arranged inside the frame. The lifting part includes a lifting frame slidably connected to the frame, a clamping block slidably arranged inside the lifting frame, a spring arranged at one end of the clamping block, and a pull rod slidably arranged inside the lifting frame. The pull rod is slidably connected to the clamping block. The spring pushes the clamping block to move inward in the lifting frame. The pull rod moves to push the clamping block to move outward against the elastic force of the spring. The flower basket is arranged at the top of the lifting part. Slots are opened at the bottoms of both sides of the flower basket, and the slots are snap-connected with the clamping blocks.

[0007] By adopting the above technical scheme, the pull rod can be pulled to displace it inside the lifting frame, thereby driving the four clamping blocks to move outward simultaneously, so that the clamping blocks can slide out of the slots, enabling the flower basket to be quickly unlocked.

[0008] Preferably, the frame includes a lead screw rotatably provided inside the frame and a motor with an output end connected to the lead screw. A threaded groove is formed on one side of the lifting frame. The lead screw passes through the threaded groove and is threadedly connected thereto. A wafer feeding conveyor belt is provided on the top of the frame.

[0009] By adopting the above technical solution, the motor can drive the lead screw to rotate, thereby driving the lifting frame to slide up and down inside the frame, so that the monocrystalline silicon wafers in the flower basket can be conveyed by the wafer feeding conveyor belt.

[0010] Preferably, the lifting part includes a lifting frame, a clamping block and a spring arranged between the lifting frame and the clamping block. The spring pushes the clamping block to move so as to drive the clamping block to be clamped into the clamping groove.

[0011] By adopting the above technical solution, the spring can push the clamping block to be clamped into the clamping groove, so as to fix the position of the flower basket.

[0012] Preferably, two clamping grooves are respectively formed on both sides of the bottom of the flower basket. Four clamping blocks are provided. The positions of the four clamping blocks correspond to the positions of the four clamping grooves.

[0013] By adopting the above technical solution, the stability of the flower basket fixed on the lifting frame can be improved.

[0014] Preferably, a plurality of placement grooves are provided inside the flower basket, and a plurality of monocrystalline silicon wafers are slidably arranged in the placement grooves.

[0015] By adopting the above technical solution, the monocrystalline silicon wafers can be placed inside the flower basket by sliding.

[0016] Preferably, the lifting part includes a clamping block, a pull rod, sliding blocks arranged on both sides of the pull rod, and a driven block arranged on one side of the bottom of the clamping block. The inclined surface arranged on one side of the sliding block abuts against the inclined surface arranged on one side of the driven block.

[0017] By adopting the above technical solution, the outward sliding displacement of the pull rod can drive the sliding blocks to displace, so that the sliding blocks push the driven block to move, thereby driving the clamping block to move outward simultaneously.

[0018] An integrated silicon wafer tester includes the multi-purpose wafer feeding mechanism described in any one of the above four items. The integrated silicon wafer tester further includes:

[0019] A main conveyor belt, two wafer feeding conveyor belts are respectively arranged on both sides of the main conveyor belt. A tester body is arranged at the end of the main conveyor belt. The four wafer feeding conveyor belts operate in sequence to drive the monocrystalline silicon wafers in the four flower baskets to complete the conveying operation.

[0020] By adopting the above technical solution, the single-crystal silicon wafer can be sent to the main conveyor belt through the wafer feeding conveyor belt, and then the main conveyor belt is used to send the single-crystal silicon wafer to the lower part of the tester body to complete the testing operation.

[0021] Compared with the prior art, the beneficial effect of the present utility model is that by providing a lifting part, the pull rod can be pulled to displace within the lifting frame, thereby driving the four clamping blocks to move outward simultaneously, so that the clamping blocks can slide out of the clamping grooves, enabling the flower basket to be quickly unlocked. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic diagram of the overall structure of the present application;

[0023] Figure 2 is a schematic diagram of the wafer feeding mechanism structure of the present application;

[0024] Figure 3 is a schematic diagram of the side sectional structure of the wafer feeding mechanism of the present application;

[0025] Figure 4 is a schematic diagram of the structure of the lifting part fixing the flower basket of the present application;

[0026] Figure 5 is a schematic diagram of the structure of the lifting part removing the flower basket of the present application;

[0027] Figure 6 is a schematic diagram of the sectional structure of the lifting part of the present application;

[0028] Figure 7 is a schematic diagram of the connection structure between the clamping block and the pull rod of the present application.

[0029] In the figure: 1, frame; 101, lead screw; 102, motor; 2, lifting part; 201, lifting frame; 202, clamping block; 203, spring; 204, pull rod; 205, sliding block; 206, driven block; 207, thread groove; 3, flower basket; 301, clamping groove; 302, placement groove; 4, wafer feeding conveyor belt; 5, main conveyor belt; 6, tester body. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0031] Embodiment 1

[0032] Please refer to Figure 1 , Figure 2 andFigure 3 , the present utility model provides a technical solution: a multi-purpose wafer feeding mechanism, including a frame 1, a lifting part 2 and a flower basket 3:

[0033] The frame 1 is a metal frame structure. The lifting part 2 is slidably arranged inside the frame 1. The lifting part 2 includes a lifting frame 201 slidably connected to the frame 1, a clamping block 202 slidably arranged inside the lifting frame 201, a spring 203 arranged at one end of the clamping block 202, and a pull rod 204 slidably arranged inside the lifting frame 201. The spring 203 is arranged between the lifting frame 201 and the clamping block 202. By the force provided by the spring 203, the spring 203 pushes the clamping block 202 to move inward in the lifting frame 201. The pull rod 204 is slidably connected to the clamping block 202, and a part of the pull rod 204 extends to the outside of the lifting frame 201. The flower basket 3 is arranged at the top of the lifting part 2. Slots 301 are opened at the bottom of both sides of the flower basket 3, and the slots 301 are snap-connected to the clamping blocks 202. A plurality of placement slots 302 are arranged inside the flower basket 3, and a plurality of single crystal wafers are slidably arranged in the placement slots 302. The single crystal wafers can be placed inside the flower basket 3 by sliding. By pulling the pull rod 204 to displace it inside the lifting frame 201, the four clamping blocks 202 are driven to move outward simultaneously, so that the clamping blocks 202 can slide out of the slots 301, so that the flower basket 3 can be quickly unlocked.

[0034] Embodiment 2

[0035] Please refer to Figure 1 , Figure 2 and Figure 3 , the present utility model provides a technical solution: a multi-purpose wafer feeding mechanism, including a frame 1, a lifting part 2 and a lifting frame 201:

[0036] A lead screw 101 is rotatably arranged inside the frame 1. A motor 102 is arranged at the bottom of the frame 1, and the output end of the motor 102 is connected to the lead screw 101. A threaded groove 207 is opened on one side of the lifting frame 201, and the lead screw 101 passes through the threaded groove 207 and is threadedly connected thereto. A wafer feeding conveyor belt 4 is arranged at the top of the frame 1. By driving the lead screw 101 to rotate by the motor 102, the lifting frame 201 is driven to slide up and down inside the frame 1, so that the single crystal wafers located in the flower basket 3 can be conveyed by the wafer feeding conveyor belt 4.

[0037] Embodiment 3

[0038] Please refer to Figure 5 , Figure 6 and Figure 7 , the present utility model provides a technical solution: a multi-purpose wafer feeding mechanism, including a lifting frame 201, a clamping block 202 and a pull rod 204:

[0039] The interior of the lifting frame 201 is provided with four sliding grooves, and a clamping block 202 is slidably arranged in each sliding groove. Two clamping grooves 301 are respectively opened on both sides of the bottom of the flower basket 3. There are four clamping blocks 202, and the positions of the four clamping blocks 202 correspond to the positions of the four clamping grooves 301, improving the stability of the flower basket 3 fixed on the lifting frame 201. Sliding blocks 205 are arranged on both sides of the pull rod 204, and a driven block 206 is arranged on one side of the bottom of the clamping block 202. The inclined surface arranged on one side of the sliding block 205 abuts against the inclined surface arranged on one side of the driven block 206. Through the outward sliding displacement of the pull rod 204, the sliding block 205 can be driven to displace, so that the sliding block 205 pushes the driven block 206 to move, thereby driving the clamping blocks 202 to move outward simultaneously.

[0040] Embodiment 4

[0041] Please refer to Figure 1 、 Figure 2 and Figure 3 The present utility model provides a technical solution: a multi-purpose wafer feeding mechanism, including a main conveyor belt 5 and a tester body 6:

[0042] Main conveyor belt 5, two wafer feeding conveyor belts 4 are respectively arranged on both sides of the main conveyor belt 5, and a tester body 6 is arranged at the end of the main conveyor belt 5. The four wafer feeding conveyor belts 4 operate in sequence to drive the single crystal wafers in the four flower baskets 3 to complete the conveying operation. The four wafer feeding conveyor belts 4 are parallel to each other, and the included angle between the four wafer feeding conveyor belts 4 and the main conveyor belt 5 is 90°. The single crystal wafers are sent to the main conveyor belt 5 through the wafer feeding conveyor belts 4, and then the main conveyor belt 5 sends the single crystal wafers to the lower part of the tester body 6 to complete the testing operation.

[0043] Working principle: First, the single crystal wafer to be tested is slidably placed in the placement groove 302 arranged inside the flower basket 3, and then the flower basket 3 is aligned with the lifting frame 201 and pressed down, so that the four clamping blocks 202 are clamped into the clamping grooves 301 under the action of the elastic force of the spring 203, fixing the position of the flower basket 3 and improving the stability of the flower basket 3 fixed on the lifting frame 201. Then, by starting the motor 102 to drive the lead screw 101 to rotate, the lifting frame 201 is driven to slide up and down inside the frame 1, so that the single crystal wafer arranged at the bottommost end in the flower basket 3 can contact the wafer feeding conveyor belt 4 and be conveyed to the main conveyor belt 5 by it. Then, the main conveyor belt 5 sends the single crystal wafer to the lower part of the tester body 6 to complete the testing operation. When the single crystal wafers in the flower basket 3 are conveyed, when it needs to be disassembled, the pull rod 204 is pulled outward, which can drive the sliding block 205 to displace, so that the sliding block 205 pushes the driven block 206 to move, thereby driving the four clamping blocks 202 to move outward simultaneously, so that the clamping blocks 202 can slide out of the clamping grooves 301, so that the flower basket 3 can be quickly unlocked.

[0044] Although embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A multi-purpose film feeding mechanism, characterized in that: include: Rack (1); A lifting part (2), the lifting part (2) is slidably arranged inside the frame (1), the lifting part (2) comprises a lifting frame (201) slidably connected to the frame (1), a block (202) slidably arranged inside the lifting frame (201), a spring (203) arranged at one end of the block (202), and a pull rod (204) slidably arranged inside the lifting frame (201), the pull rod (204) and the block (202) are slidably connected, the spring (203) pushes the block (202) to move inward inside the lifting frame (201), and the pull rod (204) moves to push the block (202) to overcome the elastic force of the spring (203) and move outward; A flower basket (3) is arranged on the top of the lifting part (2), and the bottoms of both sides of the flower basket (3) are provided with card slots (301), and the card slots (301) are card-engaged and connected with the card blocks (202).

2. A multi-purpose film feeding mechanism according to claim 1, characterized in that: The frame (1) comprises a screw rod (101) rotatably arranged inside the frame (1) and a motor (102) whose output end is connected to the screw rod (101); a thread groove (207) is provided on one side of the lifting frame (201); the screw rod (101) passes through the thread groove (207) and is threadedly connected thereto; and a sheet feeding conveyor belt (4) is provided on the top of the frame (1).

3. A multi-purpose film feeding mechanism according to claim 1, characterized in that: The lifting part (2) comprises a lifting frame (201), a clamping block (202), and a spring (203) arranged between the lifting frame (201) and the clamping block (202); the spring (203) pushes the clamping block (202) to move so as to drive the clamping block (202) to be clamped into the clamping slot (301).

4. A multi-purpose film feeding mechanism according to claim 1, characterized in that: Two card slots (301) are respectively provided on two sides of the bottom of the flower basket (3), and four card blocks (202) are provided, and the positions of the four card blocks (202) correspond to the positions of the four card slots (301).

5. The multi-purpose film feeding mechanism according to claim 1, characterized in that: A plurality of placement grooves (302) are arranged inside the flower basket (3), and a plurality of single crystal silicon wafers are slidably arranged in the placement grooves (302).

6. A multi-purpose film feeding mechanism according to claim 3, characterized in that: The lifting part (2) comprises a clamping block (202), a pull rod (204), a sliding block (205) arranged on both sides of the pull rod (204), and a driven block (206) arranged on one side of the bottom of the clamping block (202), wherein the inclined surface arranged on one side of the sliding block (205) abuts against the inclined surface arranged on one side of the driven block (206).

7. An integrated silicon wafer tester, characterized in that: The multi-purpose wafer feeding mechanism according to any four of claims 1 to 6, wherein the integrated silicon wafer tester further comprises: A main conveyor belt (5), two wafer conveyor belts (4) are respectively arranged on both sides of the main conveyor belt (5), a tester body (6) is arranged at the end of the main conveyor belt (5), and the four wafer conveyor belts (4) operate in sequence to drive the single crystal silicon wafers in the four flower baskets (3) to complete the conveying operation.

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