Linear motion motor, actuating module and photoetching equipment

Abstract

The utility model provides a linear motion motor, an actuating module and photoetching equipment. Based on the magnetic density distribution condition and the magnetic circuit distribution rule of the Halbach array, the saturation degree of the magnetic flux density is relatively low on the outer side of the position, corresponding to the first tangential magnet, of the first magnetizer and the outer side of the position, corresponding to the second tangential magnet, of the second magnetizer, so that the corresponding first weight reduction groove and / or second weight reduction groove can be arranged; on one hand, the magnetic flux density saturation of a main magnetic circuit is not influenced, the thrust constant of the motor is not influenced, and the maximum output of the motor is not influenced, and on the other hand, the mass of the magnetizer can be reduced, so that the mass of the rotor of the motor is reduced, and the overall mass after the rotor and the motion platform are connected together is reduced. And on the third aspect, the first weight reduction groove and / or the second weight reduction groove can be used for positioning and mounting the mover and the moving table, so that a positioning structure and a mounting structure between the mover and the moving table are simplified.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, and particularly relates to a linear motion motor, an actuating module and a lithography equipment. Background Art

[0002] A linear motion motor (such as a micro motion motor) is a commonly used driving component in lithography. The micro motion motor generally includes two magnetic conductors, two Halbach Arrays respectively arranged on the magnetic conductors, and a coil located between the two Halbach Arrays. Those skilled in the art can understand that the Halbach Array is a kind of magnet structure, which is an approximately ideal structure in engineering, and the goal is to generate the strongest magnetic field with the least amount of magnets. After the coil is energized, a mutual force is generated between the coil and the Halbach Array, so that the corresponding device can be driven to move by using this force.

[0003] Generally, in order to reduce the interference of cable force, etc., the Halbach Array and the magnetic conductor are used as the mover of the motor, and the coil is used as the stator of the motor. In this way, the mass of the mover is significantly larger, resulting in an increase in the output force of the coil and the current required to be energized. Moreover, the mover with a larger mass is connected to the moving stage to be driven, which will cause an increase in the overall mass and affect the driving efficiency of the motor and the acceleration of the moving stage. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a linear motion motor, an actuating module and a lithography equipment, so as to solve the problem that the motor in the current lithography equipment affects the driving efficiency of the moving stage and the acceleration of the moving stage due to the large mass of its own mover.

[0005] To solve the above technical problems, based on one aspect of the utility model, a linear motion motor is provided. The utility model provides a linear motion motor, the output force direction of the linear motion motor is parallel to the X direction, and the linear motion motor includes:

[0006] A first magnetic conductor;

[0007] A second magnetic conductor;

[0008] A coil arranged between the first magnetic conductor and the second magnetic conductor;

[0009] A first Halbach Array arranged between the first magnetic conductor and the coil, the first Halbach Array includes a plurality of first magnets arranged along the X direction, and the first magnet with the magnetization direction parallel to the X direction is the first tangential magnet;

[0010] A second Halbach array disposed between the second magnetic conductor and the coil, the second Halbach array including a plurality of second magnets arranged along the X direction, and the second magnets with magnetization directions parallel to the X direction being second tangential magnets;

[0011] Wherein, a first weight-reducing groove is provided on one side of the first magnetic conductor facing away from the first Halbach array along the Y direction corresponding to the positions of at least one of the first tangential magnets, and / or a second weight-reducing groove is provided on one side of the second magnetic conductor facing away from the second Halbach array along the Y direction corresponding to the positions of at least one of the second tangential magnets;

[0012] The Y direction is parallel to the axial direction of the coil, and the Y direction is perpendicular to the X direction.

[0013] Optionally, the first magnets with magnetization directions parallel to the Y direction are first radial magnets, and the number of the first radial magnets is at least two. The first tangential magnets and the first radial magnets are arranged alternately in sequence. The magnetization directions of two adjacent first radial magnets are opposite, and the magnetization directions of two adjacent first tangential magnets are opposite;

[0014] The second magnets with magnetization directions parallel to the Y direction are second radial magnets, and the number of the second radial magnets is at least two. The second tangential magnets and the second radial magnets are arranged alternately in sequence. The magnetization directions of two adjacent second radial magnets are opposite, and the magnetization directions of two adjacent second tangential magnets are opposite.

[0015] Optionally, the first tangential magnets and the second tangential magnets are in one-to-one correspondence in the Y direction, and the magnetization directions of the corresponding first tangential magnets and second tangential magnets are opposite to each other;

[0016] The first radial magnets and the second radial magnets are in one-to-one correspondence in the Y direction, and the magnetization directions of the corresponding first radial magnets and second radial magnets are the same.

[0017] Optionally, the first magnets at both ends of the first Halbach array are the first radial magnets, and the second magnets at both ends of the second Halbach array are the second radial magnets;

[0018] Wherein, a third weight-reducing groove is provided on one side of the first magnetic conductor facing away from the first Halbach array along the X direction corresponding to the positions of at least one end of the first radial magnets, and / or a fourth weight-reducing groove is provided on one side of the second magnetic conductor facing away from the second Halbach array along the X direction corresponding to the positions of at least one end of the second radial magnets.

[0019] Optionally, the positions of the third weight reduction groove and the fourth weight reduction groove correspond to each other in the Y direction.

[0020] Optionally, both the third weight reduction groove and the fourth weight reduction groove are arc-shaped. The third weight reduction groove penetrates through the end of the corresponding first magnetic conductor along the X direction, and the fourth weight reduction groove penetrates through the end of the corresponding second magnetic conductor along the X direction.

[0021] Optionally, the positions of the first weight reduction groove and the second weight reduction groove correspond to each other in the Y direction.

[0022] Optionally, at least one of the first weight reduction grooves extends along the X direction to the first radial magnets on both sides of the corresponding first tangential magnet within the Y-direction position range of the first magnetic conductor; and / or, at least one of the second weight reduction grooves extends along the X direction to the second radial magnets on both sides of the corresponding second tangential magnet within the Y-direction position range of the second magnetic conductor.

[0023] Optionally, one first weight reduction groove is provided at the position of the corresponding first magnetic conductor at every other first tangential magnet, and / or, one second weight reduction groove is provided at the position of the corresponding second magnetic conductor at every other second tangential magnet.

[0024] Optionally, both the first weight reduction groove and the second weight reduction groove are arc-shaped.

[0025] Optionally, the centers of the first weight reduction groove and the corresponding first tangential magnet are collinear in the Y direction, and / or, the centers of the second weight reduction groove and the corresponding second tangential magnet are collinear in the Y direction.

[0026] To solve the above technical problems, based on another aspect of the present invention, the present invention further provides an actuating module, which includes the linear motor as described above, and the number of the linear motors is at least two.

[0027] Optionally, at least two of the linear motors are arranged in sequence along the X direction, or at least two of the linear motors are arranged in sequence along the Y direction.

[0028] Optionally, for at least two linear motors arranged along the X direction, the first magnetic conductors of all the linear motors are integrally formed, and the second magnetic conductors of all the linear motors are integrally formed.

[0029] Optionally, for at least two linear motors arranged along the X direction, the ends of two adjacent linear motors share the same first radial magnet and the same second radial magnet;

[0030] Alternatively, the ends of two adjacent linear motors share the same first tangential magnet and the same second tangential magnet.

[0031] To solve the above technical problems, based on another aspect of the present invention, the present invention further provides a lithography apparatus, which includes a fixed stage, a moving stage movable relative to the fixed stage, a stator connected to the fixed stage, and a mover connected to the moving stage. The stator includes the coils of the motor, and the mover includes a first magnetic conductor, a second magnetic conductor, a first Halbach array, and a second Halbach array of the motor; wherein, the motor is the linear motor as described above.

[0032] In the linear motor of the present invention, based on the magnetic flux density distribution and magnetic circuit distribution law of the Halbach array, it can be known that the saturation degree of the magnetic flux density is relatively low outside the position where the first magnetic conductor corresponds to the first tangential magnet and outside the position where the second magnetic conductor corresponds to the second tangential magnet. Therefore, corresponding first weight-reducing grooves and / or second weight-reducing grooves can be provided. On the one hand, it will not affect the saturation degree of the magnetic flux density of the main magnetic circuit, thus not affecting the thrust constant of the linear motor and having no influence on the maximum output force of the linear motor. On the other hand, under the same output force of the linear motor, the mass of the magnetic conductor can be reduced, thereby reducing the mass of the mover of the linear motor, and further reducing the overall mass after the mover and the moving stage are connected together, improving the driving efficiency of the linear motor for the moving stage and increasing the acceleration of the moving stage. On the third hand, the first weight-reducing groove and / or the second weight-reducing groove can be used for the positioning and installation of the mover and the moving stage, thereby simplifying the positioning structure and installation structure between the two.

[0033] It should be noted that since both the actuating module and the lithography apparatus include the above-mentioned linear motor, they also have the technical effects brought by the linear motor, which will not be repeated here. Description of the Drawings

[0034] Those of ordinary skill in the art should understand that the provided drawings are used to better understand the present invention and do not constitute any limitation to the scope of the present invention. Among them:

[0035] Figure 1 is a schematic diagram of a linear motor according to an embodiment of the present invention;

[0036] Figure 2 is another schematic diagram of a linear motor according to an embodiment of the present invention; (coarse motion motor, linear motor, ironless motor)

[0037] Figure 3 is a schematic diagram when two linear motors in an actuating module of the present invention are connected in series;

[0038] Figure 4 It is a schematic diagram when two linear motion motors in the actuation module of an embodiment of the present utility model are connected in parallel.

[0039] In the attached drawings:

[0040] 10 - First magnetic conductor; 11 - First weight reduction groove; 12 - Third weight reduction groove;

[0041] 20 - Second magnetic conductor; 21 - Second weight reduction groove; 22 - Fourth weight reduction groove;

[0042] 30 - Coil;

[0043] 40 - First magnet; 41 - First tangential magnet; 42 - First radial magnet;

[0044] 50 - Second magnet; 51 - Second tangential magnet; 52 - Second radial magnet. Detailed implementation manners

[0045] To make the objectives, advantages and features of the present utility model clearer, the following further describes the present utility model in detail with reference to the attached drawings and specific embodiments. It should be noted that the attached drawings are all in a very simplified form and not drawn to scale, and are only used to conveniently and clearly assist in explaining the objectives of the embodiments of the present utility model. In addition, the structures shown in the attached drawings are often part of the actual structures. In particular, the attached drawings need to show different focuses and sometimes use different scales.

[0046] As used in the present utility model, the singular forms "a", "an" and "the" include plural referents, the term "or" is generally used in the sense of including "and / or", the term "several" is generally used in the sense of including "at least one", the term "at least two" is generally used in the sense of including "two or more", in addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first", "second", "third" may explicitly or implicitly include one or at least two of such features, "one end" and "the other end" and "proximal end" and "distal end" generally refer to two corresponding parts, which include not only the endpoints, the terms "mounted", "connected", "coupled" shall be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection, an electrical connection; it may be directly connected, or indirectly connected through an intermediate medium, it may be the communication inside two elements or the interaction relationship between two elements. In addition, as used in the present utility model, an element disposed on another element generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the two elements may be directly or indirectly connected, coupled, cooperated or transmitted through an intermediate element, and cannot be construed as indicating or implying the spatial position relationship between the two elements, that is, an element may be inside, outside, above, below or on one side of another element and other arbitrary orientations, unless otherwise explicitly stated in the content. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0047] Figure 1 is a schematic diagram of a linear motion motor according to an embodiment of the present utility model, Figure 2 is a schematic diagram of another schematic diagram of a linear motion motor according to an embodiment of the present utility model. It should be noted that, Figure 1 the motor exemplified is specifically a micro motor, Figure 2 the motor exemplified is specifically a coreless linear motor, also known as a long-stroke coarse motion motor. Refer to Figure 1 and Figure 2, an embodiment of the present utility model schematically provides a linear motion motor. The output direction of the linear motion motor is parallel to the X direction, and the linear motion motor can drive the moving table to move unidirectionally along the X direction. The linear motion motor includes a first magnetic conductor 10, a second magnetic conductor 20, a coil 30, and two Halbach arrays, namely the first Halbach array and the second Halbach array. Among them, the magnets in the first Halbach array are first magnets 40, and the magnets in the second Halbach array are second magnets 50. The first magnetic conductor 10 and the second magnetic conductor 20 are arranged in sequence along the Y direction, the Y direction is parallel to the axial direction of the coil 30, and the Y direction is perpendicular to the X direction. The first magnet 40 and the second magnet 50 are usually magnetic steels, in strip shape, and the extension directions (length directions) of the first magnet 40 and the second magnet 50 are both perpendicular to the X direction and the Y direction. The coil 30 is arranged between the first magnetic conductor 10 and the second magnetic conductor 20, and there are gaps between the coil 30 and the first magnetic conductor 10 and the second magnetic conductor 20 respectively. The first Halbach array is arranged between the first magnetic conductor 10 and the coil 30, and the second Halbach array is arranged between the second magnetic conductor 20 and the coil 30. Specifically, the first Halbach array is arranged on the side of the first magnetic conductor 10 facing the coil 30, the second Halbach array is arranged between the second magnetic conductor 20 and the coil 30, and there are gaps between both the first Halbach array and the second Halbach array and the coil 30. The first Halbach array and the second Halbach array can form a closed loop by themselves. When a current is passed through the coil 30, a mutual force is generated between the coil 30 and the two Halbach arrays. The direction of this force is parallel to the X direction. This force is used to drive the corresponding components to move. For example, it can be used to drive the moving table of a lithography device to move, so as to finely adjust the position of the silicon wafer on the moving table and improve the position accuracy of the silicon wafer during exposure.

[0048] Further, continue to refer to Figure 1 and Figure 2, multiple first magnets 40 in the first Halbach array include first tangential magnets 41 arranged in sequence along the X direction with magnetization directions parallel to the X direction, and first radial magnets 42 with magnetization directions parallel to the Y direction. Multiple second magnets 50 in the second Halbach array are arranged in sequence along the X direction. The second magnets 50 with magnetization directions parallel to the X direction are second tangential magnets 51, and the second magnets 50 with magnetization directions parallel to the Y direction are second radial magnets 52. Those skilled in the art can understand that the number of magnets in a Halbach array is usually odd. Since the output direction of the linear motor in this application is the X direction, the first magnet 40 in the middle position of the first Halbach array is the first tangential magnet 41, and the second magnet 50 in the middle position of the second Halbach array is the second tangential magnet 51. Moreover, the first magnet 40 in the middle position of the first Halbach array and the second magnet 50 in the middle position of the second Halbach array correspond to each other in the Y direction, and their respective magnetization directions are opposite along the X direction.

[0049] Continue Figure 1 and Figure 2 , regarding the arrangement rule of the first magnets 40 in the first Halbach array, as an example, the number of the first radial magnets 42 is at least two, the number of the first tangential magnets 41 is at least one, and the first tangential magnets 41 and the first radial magnets 42 are arranged alternately along the X direction. That is, one first tangential magnet 41 is arranged between two adjacent first radial magnets 42. When the number of the first tangential magnets 41 is at least two, one first radial magnet 42 is arranged between two adjacent first tangential magnets 41. Moreover, the magnetization directions of two adjacent first radial magnets 42 are opposite, and the magnetization directions of two adjacent first tangential magnets 41 are opposite. Regarding the magnetization arrangement rule of the second magnets 50 in the second Halbach array, as an example, the number of the second radial magnets 52 is at least two, and the second tangential magnets 51 and the second radial magnets 52 are arranged alternately along the X direction. That is, one second tangential magnet 51 is arranged between two adjacent second radial magnets 52. When the number of the second tangential magnets 51 is at least two, one second radial magnet 52 is arranged between two adjacent second tangential magnets 51. Moreover, the magnetization directions of two adjacent second radial magnets 52 are opposite, and the magnetization directions of two adjacent second tangential magnets 51 are opposite.

[0050] Preferably, the first tangential magnet 41 and the second tangential magnet 51 correspond to each other in the Y direction, and the magnetization directions of the corresponding first tangential magnet 41 and second tangential magnet 51 are opposite to each other; the first radial magnet 42 and the second radial magnet 52 correspond to each other in the Y direction, and the magnetization directions of the corresponding first radial magnet 42 and second radial magnet 52 are the same. In this way, the symmetry of the formed closed magnetic circuit with respect to the Y direction can be made higher, and the effective magnetic field of the linear motor can be improved.

[0051] Furthermore, a first weight-reducing groove 11 is provided at a position on the side of the first magnetic conductor 10 facing away from the first Halbach array corresponding to at least one first tangential magnet 41 in the Y direction, and the first weight-reducing groove 11 is recessed in the first magnetic conductor 10 in the Y direction. A second weight-reducing groove 21 may also be provided at a position on the side of the second magnetic conductor 20 facing away from the second Halbach array corresponding to at least one second tangential magnet 51 in the Y direction, and the second weight-reducing groove 21 is recessed in the second magnetic conductor 20 in the Y direction.

[0052] It should be noted that in this embodiment, the first weight-reducing groove 11 may be provided only on the first magnetic conductor 10, or the second weight-reducing groove 21 may be provided only on the second magnetic conductor 20. It is also possible to provide the first weight-reducing groove 11 on the first magnetic conductor 10 and at the same time provide the second weight-reducing groove 21 on the second magnetic conductor 20. There are no restrictions on the number and positions of the first weight-reducing groove 11 and the second weight-reducing groove 21. As an example, refer to Figure 2 , for example, a first weight-reducing groove 11 may be provided at a position on the corresponding first magnetic conductor 10 at an interval of one first tangential magnet 41, or a second weight-reducing groove 21 may be provided at a position on the corresponding second magnetic conductor at an interval of one second tangential magnet 51. As another example, the positions of the first weight-reducing groove 11 and the second weight-reducing groove 21 correspond to each other in the Y direction, that is, the position where the first weight-reducing groove 11 is provided on the first magnetic conductor 10 corresponds to the position where the second weight-reducing groove 21 is provided on the outer side of the second magnetic conductor 20 in the Y direction.

[0053] As can be understood by those skilled in the art, based on the above arrangement of the linear motor (i.e., the first magnetic conductor 10, the second magnetic conductor 20, the first Halbach array, and the second Halbach array), it can be seen that the magnetic flux density saturation is relatively low outside the first magnetic conductor 10 corresponding to the first tangential magnet 41 (the side of the first magnetic conductor 10 facing away from the first Halbach array), and the magnetic flux density saturation is also relatively low outside the second magnetic conductor 20 corresponding to the second tangential magnet 51 (the side of the second magnetic conductor 20 facing away from the second Halbach array). Therefore, setting the first weight-reducing groove 11 outside the first magnetic conductor 10 corresponding to the first tangential magnet 41 will not affect the magnetic flux density saturation. Correspondingly, setting the second weight-reducing groove 21 outside the second magnetic conductor 20 corresponding to the second tangential magnet 51 will also not affect the magnetic flux density saturation. In this way, the setting of the first weight-reducing groove 11 and the second weight-reducing groove 21 can reduce the mass of the mover of the linear motor without affecting the output of the linear motor.

[0054] In the above linear motor, the coil 30 is usually used as the stator of the linear motor, and the first magnetic conductor 10, the second magnetic conductor 20, the first Halbach array, and the second Halbach array are usually used as the mover of the linear motor. Based on the magnetic flux density distribution and magnetic circuit distribution law of the Halbach array, it can be seen that the magnetic flux density saturation is relatively low outside the position of the first magnetic conductor 10 corresponding to the first tangential magnet 41 and outside the position of the second magnetic conductor 20 corresponding to the second tangential magnet 51. Therefore, the corresponding first weight-reducing groove 11 and / or second weight-reducing groove 21 can be set. On the one hand, it will not affect the magnetic flux density saturation of the main magnetic circuit, thus not affecting the thrust constant of the linear motor and having no impact on the maximum output of the linear motor. On the other hand, under the same output of the linear motor, it can reduce the mass of the magnetic conductor, thereby reducing the mass of the mover of the linear motor, and further reducing the overall mass after the mover and the moving table are connected together, improving the driving efficiency of the linear motor for the moving table and increasing the acceleration of the moving table. On the third hand, the first weight-reducing groove 11 and / or the second weight-reducing groove 21 can be used for the positioning and installation of the mover and the moving table, thus simplifying the positioning structure and installation structure between the two.

[0055] Optionally, refer to Figure 2, at least one first weight-reducing groove 11 extends in the X direction to the first radial magnets 42 on both sides of the corresponding first tangential magnet 41 within the Y-direction position range of the first magnetic conductor 10. That is, the width of the first weight-reducing groove 11 (the dimension of the first weight-reducing groove 11 in the X direction) is greater than the width of the first tangential magnet 41 (the dimension of the first tangential magnet in the X direction), so that both sides of the first weight-reducing groove 11 in the X direction extend beyond the width range of the first tangential magnet 41, and thus extend into the X-direction range of the first radial magnets 42 on the adjacent two sides. Similarly, at least one second weight-reducing groove 21 extends in the X direction to the second radial magnets 52 on both sides of the corresponding second tangential magnet 51 within the Y-direction position range of the second magnetic conductor 20. That is, the width of the second weight-reducing groove 21 (the dimension of the first weight-reducing groove 11 in the X direction) is greater than the width of the second tangential magnet 51 (the dimension of the first tangential magnet in the X direction), so that both sides of the second weight-reducing groove 21 in the X direction extend beyond the width range of the second tangential magnet 51, and thus extend into the X-direction range of the second radial magnets 52 on the adjacent two sides.

[0056] Of course, referring to Figure 1 , it can also be that at least one first weight-reducing groove 11 is located in the X direction within the Y-direction position range of the corresponding first tangential magnet 41 in the first magnetic conductor 10. That is, the width of the first weight-reducing groove 11 is less than the width of the first tangential magnet 41, so that both sides of the first weight-reducing groove 11 in the X direction do not extend beyond the width range of the first tangential magnet 41. Similarly, at least one second weight-reducing groove 21 is located in the X direction within the Y-direction position range of the corresponding second tangential magnet 51 in the second magnetic conductor 20. That is, the width of the second weight-reducing groove 21 is less than the width of the second tangential magnet 51, so that both sides of the second weight-reducing groove 21 in the X direction do not extend beyond the width range of the second tangential magnet 51.

[0057] Preferably, both the first weight-reducing groove 11 and the second weight-reducing groove 21 are arc-shaped, that is, both are arc-shaped grooves, to avoid the presence of a tip shape at the grooved positions of the first magnetic conductor 10 and the second magnetic conductor 20. Preferably, it is in the shape of an inverted rounded corner. In addition, the first weight-reducing groove 11 can also penetrate both sides of the first magnetic conductor 10 along the extending direction of the first magnet 40, and the second weight-reducing groove 21 can penetrate both sides of the second magnetic conductor 20 along the extending direction of the second magnet 50. That is, in the direction perpendicular to both the X direction and the Y direction, both the first weight-reducing groove 11 and the second weight-reducing groove 21 are shown as through grooves.

[0058] Optionally, the centers of the first weight-reducing groove 11 and the corresponding first tangential magnet 41 are collinear in the Y direction. Similarly, it can also be that the centers of the second weight-reducing groove 21 and the corresponding second tangential magnet 51 are collinear in the Y direction.

[0059] It should be noted that the first magnets 40 at both ends of the first Halbach array can both be the first radial magnets 42, or both be the first tangential magnets 41. Correspondingly, the second magnets 50 at both ends of the second Halbach array can both be the second radial magnets 52, or both be the second tangential magnets 51. For example, Figure 1 both ends of the first Halbach array in Figure 1 are the first radial magnets 42, and both ends of the second Halbach array are the second radial magnets 52; Figure 2 both ends of the first Halbach array in Figure 2 are the first tangential magnets 41, and both ends of the second Halbach array are the second tangential magnets 51.

[0060] Referring to Figure 1 when both ends of the first Halbach array are the first radial magnets 42 and both ends of the second Halbach array are the second radial magnets 52, a third weight reduction groove 12 is provided on the side of the first magnetic conductor 10 facing away from the first Halbach array at a position corresponding to at least one end of the first radial magnet 42 in the X direction. Alternatively, a fourth weight reduction groove 22 can be provided on the side of the second magnetic conductor 20 facing away from the second Halbach array at a position corresponding to at least one end of the second radial magnet 52 in the X direction. Thus, the applicant has found that Figure 1 in the linear motor shown in the example, the magnetic flux density saturation is relatively low and the magnetic flux density is sparse outside the first magnetic conductor 10 corresponding to the first radial magnets 42 at both ends and outside the second magnetic conductor corresponding to the second radial magnets 52. Therefore, the third weight reduction groove 12 and the fourth weight reduction groove 22 can be provided based on the principle of setting the first weight reduction groove 11 and the second weight reduction groove 21, thereby further reducing the mass of the mover of the linear motor. Of course, the third weight reduction groove 12 and the second weight reduction groove 21 can also be used for positioning and installation between the mover and the moving table of the linear motor.

[0061] Optionally, the positions of the third weight reduction groove 12 and the fourth weight reduction groove 22 correspond to each other in the Y direction, that is, the position where the third weight reduction groove 12 is provided on the first magnetic conductor 10 corresponds to the outside of the second magnetic conductor 20 where the fourth weight reduction groove 22 is provided in the Y direction.

[0062] Preferably, both the third weight reduction groove 12 and the fourth weight reduction groove 22 are arc-shaped, and the third weight reduction groove 12 penetrates through the end of the corresponding first magnetic conductor 10 along the X direction, and the fourth weight reduction groove 22 penetrates through the end of the corresponding second magnetic conductor 20 along the X direction. That is, both of them are arc-shaped grooves, avoiding the presence of tip shapes at the grooved positions of the first magnetic conductor 10 and the second magnetic conductor 20. Preferably, they are in a chamfered corner shape. In addition, the third weight reduction groove 12 can also penetrate through both sides of the first magnetic conductor 10 along the extension direction of the first magnet 40, and the fourth weight reduction groove 22 can penetrate through both sides of the second magnetic conductor 20 along the extension direction of the second magnet 50. That is, in the direction perpendicular to both the X direction and the Y direction, both the first weight reduction groove 11 and the second weight reduction groove 21 are shown as through grooves.

[0063] Figure 3 is a schematic diagram when two linear motion motors in the actuation module of an embodiment of the present invention are connected in series. Figure 4 is another schematic diagram when two linear motion motors in the actuation module of an embodiment of the present invention are connected in parallel. Refer to Figure 3 and Figure 4 , an embodiment of the present invention schematically provides an actuation module, and the actuation module includes at least two linear motion motors as described above. The at least two linear motion motors can be arranged in sequence along the X direction ( Figure 3 as shown), of course, the at least two linear motion motors can also be arranged in sequence along the Y direction ( Figure 4 as shown). The output force of the actuation module is used to drive the movement of components, such as driving the movement stage of a lithography device. It can be understood that regardless of the arrangement direction of the linear motion motors in the actuation module, the overall output force direction of the actuation module is along the X direction. In this way, the actuation module configured by at least two linear motion motors can increase the driving force for the movement stage of the lithography device to meet the actual driving requirements.

[0064] It should be noted that for at least two linear motion motors arranged along the X direction in the actuation module, preferably, the structures of all linear motion motors are the same. Here, the same means that the number of the first magnets 40 in the first Halbach array of all linear motion motors is the same, and the number of the second magnets 50 in the second Halbach array of all linear motion motors is the same. For the first magnets 40 of all linear motion motors and the second magnets 50 of all linear motion motors, those skilled in the art can arrange each first tangential magnet 41, first radial magnet 42, second tangential magnet 51, and second radial magnet 52 according to the arrangement principle of the Halbach array, which will not be elaborated here. For at least two linear motion motors arranged along the Y direction in the actuation module, the structures of each linear motion motor in this embodiment are not limited and can be the same or different.

[0065] Preferably, refer to Figure 3, for at least two linear motors arranged in the X direction, the first magnetic conductors 10 of all the linear motors are integrally formed, and the second magnetic conductors 20 of all the linear motors are integrally formed, that is, all the linear motors share the same first magnetic conductor 10 and the same second magnetic conductor 20. Refer to Figure 4 , for at least two linear motors connected in parallel in the Y direction, the second magnetic conductor 20 of one of the adjacent two linear motors and the first magnetic conductor 10 of the other are integrally formed.

[0066] Preferably, refer to Figure 3 , for at least two linear motors arranged in the X direction, and both ends of each linear motor are radial magnets (one end is the first radial magnet 42 and the second radial magnet 52, and the other end is also the first radial magnet 42 and the second radial magnet 52), the ends of two adjacent linear motors share the same first radial magnet 42 and the same second radial magnet 52. As an example, refer to Figure 3 , the first radial magnet 42a and the first radial magnet 42b are the same first magnet 40, and the second radial magnet 52a and the second radial magnet 52b are the same second magnet 50. Correspondingly, for at least two linear motors arranged in the X direction, and both ends of each linear motor are tangential magnets (one end is the first tangential magnet 41 and the second tangential magnet 51, and the other end is also the first tangential magnet 41 and the second tangential magnet 51), the ends of two adjacent linear motors share the same first tangential magnet 41 and the same second tangential magnet 51. In this way, there are shared first magnet 40 and second magnet 50 between two adjacent linear motors of the actuation module, which can simplify the structure of the actuation module and improve the structural compactness.

[0067] This embodiment also provides a lithography apparatus. The lithography apparatus includes a fixed stage, a moving stage movable relative to the fixed stage, a mover and a mover. The stator is connected to the fixed stage, and the mover is connected to the moving stage. The stator includes a coil 30 of a linear motor, and the mover includes a first magnetic conductor 10, a second magnetic conductor 20, a first Halbach array and a second Halbach array of the linear motor. The number of the linear motors can be one or at least two (i.e., the above-mentioned actuation module). Thus, when a current is passed through the coil 30, a mutual acting force is generated between the above-mentioned stator and the mover. Since the stator is restricted by the fixed stage and cannot move, the mover drives the moving stage to move under the drive of the above-mentioned acting force, thereby driving the position of the silicon wafer on the moving stage to achieve fine adjustment, so as to improve the position accuracy of the silicon wafer, and correspondingly improve the coincidence degree between the irradiation area of the light source on the silicon wafer and the exposure area on the silicon wafer in the lithography apparatus. By irradiating the photosensitive layer in the exposure area on the silicon wafer, a circuit diagram with accurate position can be etched on the silicon wafer. Moreover, the settings of the first weight reduction groove 11, the second weight reduction groove 21, the third weight reduction groove 12 and the fourth weight reduction groove 22 can reduce the mass of the magnetic conductor under the premise of not affecting the thrust constant of the linear motor, and further reduce the overall mass after the mover and the moving stage are connected together, reduce the influence of the linear motor on the movement of the moving stage, and improve the driving efficiency and the acceleration of the moving stage. The first weight reduction groove 11, the second weight reduction groove 21, the third weight reduction groove 12 and the fourth weight reduction groove 22 can be used for the positioning and installation of the mover and the moving stage, thereby simplifying the positioning structure and the installation structure between the two, which is very suitable for the compact space of the lithography apparatus.

[0068] Thus, the linear motor of this embodiment is applied to the lithography apparatus. Since the linear motor of this embodiment has a small leakage magnetic flux outward, it has little influence on the operating state and operating accuracy of other components in the lithography apparatus, thereby ensuring the normal operation of other components and the processing accuracy of the silicon wafer, correspondingly improving the operating efficiency of the lithography apparatus and the processing accuracy of the silicon wafer, and further improving its finished product yield. Moreover, the linear motor of this embodiment has a simple structure and a small volume, occupies a small space in the lithography apparatus, and can reduce the volume of the lithography apparatus.

[0069] In summary, in the linear motor, the actuation module and the lithography equipment of the present utility model, based on the magnetic flux density distribution and the magnetic circuit distribution law of the Halbach array, it can be seen that the saturation of the magnetic flux density is relatively low outside the position of the first magnetic conductor corresponding to the first tangential magnet and outside the position of the second magnetic conductor corresponding to the second tangential magnet. Therefore, corresponding first weight-reducing grooves and / or second weight-reducing grooves can be provided. On the one hand, it will not affect the saturation of the magnetic flux density of the main magnetic circuit, thus not affecting the thrust constant of the linear motor and having no impact on the maximum output force of the linear motor. On the other hand, under the condition of the same output force of the linear motor, the mass of the magnetic conductor can be reduced, thereby reducing the mass of the mover of the linear motor, and further reducing the overall mass after the mover and the moving stage are connected together, improving the driving efficiency of the linear motor for the moving stage and increasing the acceleration of the moving stage. On the third hand, the first weight-reducing groove and / or the second weight-reducing groove can be used for the positioning and installation of the mover and the moving stage, thereby simplifying the positioning structure and the installation structure between the two.

[0070] Although the present utility model is disclosed above with preferred embodiments, the above embodiments are not intended to limit the present utility model. For any person skilled in the art, without departing from the scope of the technical solution of the present utility model, many possible variations and modifications can be made to the technical solution of the present utility model by using the technical content disclosed above, or modified into equivalent embodiments with equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present utility model without departing from the content of the technical solution of the present utility model still belong to the scope of protection of the technical solution of the present utility model.

Claims

1. A linear motion motor, characterized in that: The output direction of the linear motion motor is parallel to the X direction, and the linear motion motor comprises: A first magnetic conductor; A second magnetic conductor; a coil disposed between the first magnetic conductor and the second magnetic conductor; a first Halbach array disposed between the first magnetic conductor and the coil, wherein the first Halbach array includes a plurality of first magnets arranged along the X direction, and the first magnets whose magnetization directions are parallel to the X direction are first tangential magnets; A second Halbach array is arranged between the second magnetic conductor and the coil, wherein the second Halbach array includes a plurality of second magnets arranged along the X direction, and the second magnets whose magnetization directions are parallel to the X direction are second tangential magnets; A first weight-reducing groove is provided at a position corresponding to at least one of the first tangential magnets along the Y direction on a side of the first magnetic conductor away from the first Halbach array, and / or a second weight-reducing groove is provided at a position corresponding to at least one of the second tangential magnets along the Y direction on a side of the second magnetic conductor away from the second Halbach array; The Y direction is parallel to the axial direction of the coil, and the Y direction is perpendicular to the X direction.

2. The linear motion motor according to claim 1, characterized in that: The first magnet whose magnetization direction is parallel to the Y direction is a first radial magnet, and the number of the first radial magnets is at least two, the first tangential magnets and the first radial magnets are arranged alternately in sequence, the magnetization directions of two adjacent first radial magnets are opposite, and the magnetization directions of two adjacent first tangential magnets are opposite; The second magnet whose magnetization direction is parallel to the Y direction is a second radial magnet, and the number of the second radial magnets is at least two, the second tangential magnets and the second radial magnets are arranged alternately in sequence, the magnetization directions of two adjacent second radial magnets are opposite, and the magnetization directions of two adjacent second tangential magnets are opposite.

3. The linear motion motor according to claim 2, characterized in that: The first tangential magnets and the second tangential magnets correspond to each other in the Y direction, and the corresponding first tangential magnets and the second tangential magnets have opposite magnetization directions; The first radial magnets and the second radial magnets correspond to each other one by one in the Y direction, and the corresponding first radial magnets and the corresponding second radial magnets have the same magnetization direction.

4. The linear motion motor according to claim 3, characterized in that: The first magnets at both ends of the first Halbach array are the first radial magnets, and the second magnets at both ends of the second Halbach array are the second radial magnets; A third weight-reducing groove is provided at a position of the first radial magnet corresponding to at least one end along the X-direction on a side of the first magnetic conductor away from the first Halbach array, and / or a fourth weight-reducing groove is provided at a position of the second radial magnet corresponding to at least one end along the X-direction on a side of the second magnetic conductor away from the second Halbach array.

5. The linear motion motor according to claim 4, characterized in that: The position of the third weight-reducing groove corresponds to the position of the fourth weight-reducing groove in the Y direction.

6. The linear motion motor according to claim 4, characterized in that: The third weight-reducing groove and the fourth weight-reducing groove are both arc-shaped. The third weight-reducing groove passes through the corresponding end of the first magnetic conductor along the X direction, and the fourth weight-reducing groove passes through the corresponding end of the second magnetic conductor along the X direction.

7. The linear motion motor according to claim 3, characterized in that: The position of the first weight-reducing groove corresponds to the position of the second weight-reducing groove in the Y direction.

8. The linear motion motor according to claim 2, characterized in that: At least one of the first weight-reducing grooves extends along the X direction to the first radial magnets on both sides of the corresponding first tangential magnet within the Y direction position range of the first magnetic conductor; and / or at least one of the second weight-reducing grooves extends along the X direction to the second radial magnets on both sides of the corresponding second tangential magnet within the Y direction position range of the second magnetic conductor.

9. The linear motion motor according to claim 1, characterized in that: A first weight-reducing groove is provided at the position of the first magnetic conductor corresponding to each of the first tangential magnets, and / or a second weight-reducing groove is provided at the position of the second magnetic conductor corresponding to each of the second tangential magnets.

10. The linear motion motor according to claim 1, characterized in that: The first weight-reducing groove and the second weight-reducing groove are both arc-shaped.

11. The linear motion motor according to claim 1, characterized in that: The centers of the first weight-reducing groove and the corresponding first tangential magnet are collinear in the Y direction, and / or the centers of the second weight-reducing groove and the corresponding second tangential magnet are collinear in the Y direction.

12. An actuating module, characterized in that: The invention comprises the linear motion motor according to any one of claims 1 to 11, and the number of the linear motion motors is at least two.

13. The actuating module according to claim 12, characterized in that: At least two of the linear motion motors are arranged in sequence along the X direction, or at least two of the linear motion motors are arranged in sequence along the Y direction.

14. A lithography apparatus, characterized in that: include: Fixed table; A moving table movable relative to the fixed table; a stator connected to the fixing platform, wherein the stator includes a coil of a motor; A mover connected to the moving platform, the mover comprising a first magnetic conductor, a second magnetic conductor, a first Halbach array and a second Halbach array of a motor; Wherein, the motor is a linear motion motor as described in any one of claims 1-11, or, the motor is a linear motion motor of an actuating module as described in claim 12 or 13.

15. The lithographic apparatus according to claim 14, characterized in that The mover is positioned and installed on the moving platform through a first weight-reducing groove on the first magnetic conductor, and / or the mover is positioned and installed on the moving platform through a second weight-reducing groove on the second magnetic conductor.

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