Semiconductor film silver paste coating equipment

Abstract

The utility model discloses semiconductor film silver paste coating equipment, which relates to the technical field of dispensing coating equipment and comprises a silver paste coating box, a feeding module, a discharging module, a dispensing module, a dispensing product detection component, a dispensing baffle and a discharging baffle. The feeding module carries out feeding treatment on the semiconductor film, the feeding conveying belt and the middle conveying belt carry out conveying treatment on the semiconductor film, and the discharging module carries out discharging operation on the processed semiconductor film. The operation range of feeding grabbing and discharging grabbing is larger, semiconductor products of different sizes can be effectively grabbed for feeding and discharging, then a semiconductor film can be effectively grabbed, and the applicability of dispensing processing of the semiconductor film is guaranteed; in the dispensing processing process, the semiconductor film is in belt type supporting and conveying treatment, the conveying and supporting stability of the semiconductor film can be effectively improved, then the stability of the semiconductor film during dispensing processing is improved, and therefore the dispensing processing quality is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of dispensing and coating equipment, in particular to a semiconductor thin-film silver paste coating equipment. Background Technique

[0002] Semiconductor devices generally need to go through multiple process steps to form a complete product. Silver paste is actually a mixture of silver particles suspended in a conductive solvent; silver paste has good electrical conductivity, high adhesion strength, good stability, and good processing performance, so that silver paste has been widely used in semiconductor manufacturing; silver paste needs to be dispensed and coated by a dispenser during semiconductor processing.

[0003] Patent (CN114074058B) discloses a duplex dispensing and coating equipment, including a dispenser main body, a dispensing manipulator is arranged on the dispenser main body, and two dispensing heads are arranged on the dispensing manipulator. It also includes a control panel, which is arranged on the dispenser main body. In this duplex dispensing and coating equipment and bus control system, by setting a lifting mechanism, according to the dispensing production requirements, when the dispensing manipulator drives the two dispensing heads to move downward, the driving motor is used to drive and cooperate with parts such as a driving gear, a transmission gear, and a rack to drive the dispensing head that does not need to be triggered to move slightly upward, so as to avoid accidental touch, resulting in waste of glue and contamination of the product by the glue or collision between the needle and the product, and there is no need to use two sets of relatively expensive driving devices to drive the dispensing head to move in the vertical direction.

[0004] The above-mentioned duplex dispensing and coating equipment in the patent document is mainly used for dispensing and coating small semiconductor devices, but when dispensing and coating large-sized thin-film semiconductors, its applicability is poor and the operation is relatively inconvenient. Summary of the Invention

[0005] The purpose of the utility model is to provide a semiconductor thin-film silver paste coating equipment to solve the problems raised in the above background technique.

[0006] To solve the above technical problems, the utility model provides the following technical solution: A semiconductor thin-film silver paste coating equipment, including a feeding cart, a discharging cart and a silver paste coating box. The feeding cart and the discharging cart are respectively arranged on both sides of the silver paste coating box. Inside the silver paste coating box, there are a feeding module, a discharging module, a dispensing module, a feeding conveyor belt, an intermediate conveyor belt and a dispensing product detection component. The dispensing module is arranged between the feeding module and the discharging module, and the dispensing product detection component is arranged between the feeding conveyor belt and the intermediate conveyor belt. Inside the silver paste coating box, there are vertically arranged a dispensing baffle and a discharging baffle which are movably connected, and the intermediate conveyor belt is arranged between the dispensing baffle and the discharging baffle.

[0007] Furthermore, the dispensing product detection component includes a marble detection ruler, and first cylinders are vertically and symmetrically arranged at both ends of the marble detection ruler. A support plate is horizontally arranged between the output ends of the two first cylinders, and a plurality of line laser measuring instruments are arranged on the top of the support plate.

[0008] Furthermore, second cylinders are vertically and symmetrically arranged at both ends of the bottom of the dispensing baffle, and the outer walls of the second cylinders are fixedly connected to the outer walls of the marble detection ruler. Third cylinders are vertically and symmetrically arranged at both ends of the bottom of the discharge baffle, and the bottoms of the third cylinders are fixedly connected to the inner wall of the silver paste coating box.

[0009] Furthermore, the feeding module includes a first linear driving mechanism and a feeding mechanism. The feeding mechanism is fixedly connected to the output end of the first linear driving mechanism, and a plurality of feeding grippers are arranged at the bottom of the feeding mechanism.

[0010] Furthermore, the discharging module includes a second linear driving mechanism and a discharging mechanism. The discharging mechanism is fixedly connected to the output end of the second linear driving mechanism, and a plurality of discharging grippers are arranged at the bottom of the discharging mechanism.

[0011] Furthermore, the feeding mechanism and the discharging mechanism are both provided with fourth cylinders and vacuum air path components. The feeding grippers and the discharging grippers are both vacuum adsorption grippers, and the feeding grippers and the discharging grippers are respectively communicated with the vacuum air path components.

[0012] Compared with the prior art, the beneficial effects achieved by the present utility model are as follows:

[0013] 1. In the present utility model, by providing a silver paste coating box, a feeding module, a discharging module, a dispensing module, a dispensing product detection component, a dispensing baffle and a discharge baffle, the feeding module feeds the semiconductor film, places the semiconductor film to be dispensed on the top of the feeding conveyor belt, and the feeding conveyor belt conveys the semiconductor film. The semiconductor film is conveyed to the lower part of the dispensing module, and the dispensing module performs dispensing processing on the semiconductor film. The middle conveyor belt guides and conveys the semiconductor film during the dispensing process. The discharging module discharges the processed semiconductor film; in the present utility model, the feeding module and the discharging module are provided, and the operation ranges of feeding grasping and discharging grasping are larger, and semiconductor products of different sizes can be effectively grasped for feeding and discharging. Furthermore, the semiconductor film can be effectively grasped to ensure the applicability of the dispensing processing of the semiconductor film; the designs of the feeding conveyor belt and the middle conveyor belt enable the semiconductor film during the dispensing process to be in belt-type support conveying processing, which can effectively improve the stability of the conveying support of the semiconductor film, and further improve the stability of the semiconductor film during dispensing processing, thereby ensuring the dispensing processing quality.

[0014] 2. In the present utility model, the second cylinder is adjusted for telescopic processing, and the second cylinder drives the dispensing baffle to move up and down; the third cylinder is adjusted for telescopic processing, and the third cylinder drives the discharging baffle to move up and down; the dispensing baffle can block the semiconductor film between the feeding conveyor belt and the intermediate conveyor belt, which can effectively ensure that after one semiconductor film is completely processed by dispensing, another semiconductor film can enter the dispensing processing station; the discharging baffle can block the semiconductor film at the end of the intermediate conveyor belt, which can effectively prevent the semiconductor film from falling when being conveyed on the surface of the intermediate conveyor belt. Description of the Drawings

[0015] The drawings are used to provide a further understanding of the present utility model, and constitute a part of the specification. Together with the embodiments of the present utility model, they are used to explain the present utility model, and do not constitute a limitation to the present utility model. In the drawings:

[0016] Figure 1 is the structural schematic diagram of the whole of the present utility model;

[0017] Figure 2 is the internal structural schematic diagram of the whole of the present utility model;

[0018] Figure 3 is the internal structural schematic diagram of the silver paste coating box of the present utility model;

[0019] Figure 4 is the structural schematic diagram of the feeding conveyor belt, intermediate conveyor belt, dispensing product detection component, dispensing baffle and discharging baffle in the present utility model;

[0020] Figure 5 is in the present utility model Figure 4 the structural schematic diagram from another angle;

[0021] In the figure: 1. Feeding vehicle; 2. Discharging vehicle; 3. Silver paste coating box; 4. Feeding module; 5. Discharging module; 6. Dispensing module; 7. Feeding conveyor belt; 8. Intermediate conveyor belt; 9. Dispensing product detection component; 10. Dispensing baffle; 11. Discharging baffle; 12. Support plate; 13. Line laser measuring instrument; 14. Second cylinder; 15. Third cylinder; 16. First linear driving mechanism; 17. Feeding mechanism; 18. Feeding gripper; 19. Second linear driving mechanism; 20. Discharging mechanism; 21. Discharging gripper; 22. Marble detection ruler; 23. First cylinder. Detailed Embodiment

[0022] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0023] Please refer to Figures 1 - 5 , the present invention provides a technical solution: a semiconductor thin film silver paste coating device, including a feeding cart 1, a discharging cart 2 and a silver paste coating box 3. The feeding cart 1 and the discharging cart 2 are respectively arranged on both sides of the silver paste coating box 3. Inside the silver paste coating box 3, there are a feeding module 4, a discharging module 5, a dispensing module 6, a feeding conveyor belt 7, an intermediate conveyor belt 8 and a dispensing product detection component 9. The dispensing module 6 is arranged between the feeding module 4 and the discharging module 5, and the dispensing product detection component 9 is arranged between the feeding conveyor belt 7 and the intermediate conveyor belt 8; Inside the silver paste coating box 3, there are vertically arranged a dispensing baffle 10 and a discharging baffle 11 which are movably connected. The intermediate conveyor belt 8 is arranged between the dispensing baffle 10 and the discharging baffle 11; At both ends of the bottom of the dispensing baffle 10, second cylinders 14 are symmetrically and vertically arranged. The outer wall of the second cylinder 14 is fixedly connected to the outer wall of the marble detection ruler 22. At both ends of the bottom of the discharging baffle 11, third cylinders 15 are symmetrically and vertically arranged. The bottom of the third cylinder is fixedly connected to the inner wall of the silver paste coating box 3.

[0024] The dispensing product detection component 9 includes a marble detection ruler 22. At both ends of the marble detection ruler 22, first cylinders 23 are symmetrically and vertically arranged. Between the output ends of the two first cylinders 23, there is a support plate 12 horizontally arranged. On the top of the support plate 12, there are several line laser measuring instruments 13. The marble detection ruler 22 in the dispensing product detection component 9 supports the device. At the same time, the surface finish of the marble detection ruler 22 is controlled within 5u, and the parallelism, flatness and perpendicularity accuracy are high, within one silk; The telescopic adjustment of the first cylinder 23 can drive the support plate 12 to move up and down, and then drive the line laser measuring instrument 13 to move up and down. The line laser measuring instrument 13 detects the surface of the dispensing product.

[0025] The feeding module 4 includes a first linear driving mechanism 16 and a feeding mechanism 17. The feeding mechanism 17 is fixedly connected to the output end of the first linear driving mechanism 16. A plurality of feeding grippers 18 are provided at the bottom of the feeding mechanism 17. The first linear driving mechanism 16 drives the feeding mechanism 17 to perform linear reciprocating motion. The feeding mechanism 17 feeds the dispensing products, and the feeding grippers 18 grip the dispensing products to perform a gripping feeding operation on the dispensing products. The discharging module 5 includes a second linear driving mechanism 19 and a discharging mechanism 20. The discharging mechanism 20 is fixedly connected to the output end of the second linear driving mechanism 19. A plurality of discharging grippers 21 are provided at the bottom of the discharging mechanism 20. The second linear driving mechanism 19 drives the discharging mechanism 20 to perform linear reciprocating motion. The discharging mechanism 20 discharges the dispensing products. The discharging grippers 21 grip the dispensing products to perform a gripping discharging operation on the dispensing products.

[0026] Both the feeding mechanism 17 and the discharging mechanism 20 are provided with a fourth air cylinder and a vacuum air path assembly. Both the feeding grippers 18 and the discharging grippers 21 are vacuum adsorption grippers. The feeding grippers 18 and the discharging grippers 21 are respectively communicated with the vacuum air path assembly. The fourth air cylinder can effectively drive the feeding grippers 18 and the discharging grippers 21 to perform lifting adjustment. By setting the vacuum air path assembly and designing the feeding grippers 18 and the discharging grippers 21 as vacuum adsorption grippers, the vacuum adsorption gripping feeding operation of the feeding grippers 18 on the dispensing products can be realized, and the vacuum adsorption gripping discharging operation of the discharging grippers 21 on the dispensing products can be realized. The operation stability of the dispensing products during feeding and discharging can be effectively guaranteed, and the damage of the dispensing products during the feeding and discharging processes can be effectively avoided.

[0027] The working principle of the present utility model:

[0028] Refer to the attached instruction manual Figures 1 - 5, in this utility model, by setting the silver paste coating box 3, the feeding module 4, the discharging module 5, the dispensing module 6, the dispensing product detection component 9, the dispensing baffle 10 and the discharging baffle 11, the feeding cart 1 is used to transfer the semiconductor thin film to be dispensed to the feeding end of the silver paste coating box 3, facilitating the feeding process of the semiconductor thin film to be dispensed. The discharging cart 2 receives the semiconductor thin film after the dispensing process at the discharging end of the silver paste coating box 3. The feeding module 4 processes the feeding of the semiconductor thin film, places the semiconductor thin film to be dispensed on the top of the feeding conveyor belt 7, and the feeding conveyor belt 7 conveys the semiconductor thin film. The semiconductor thin film is conveyed to the lower part of the dispensing module 6, and the dispensing module 6 performs dispensing processing on the semiconductor thin film. The intermediate conveyor belt 8 guides and conveys the semiconductor thin film during the dispensing process. The dispensing product detection component 9 detects the semiconductor thin film, and the discharging module 5 discharges the processed semiconductor thin film; in this utility model, the setting of the feeding module 4 and the discharging module 5 provides a larger operating range for feeding and discharging grasping, can effectively grasp semiconductor products of different sizes for feeding and discharging, and thus can effectively grasp the semiconductor thin film, ensuring the applicability of the dispensing process for the semiconductor thin film. The design of the feeding conveyor belt 7 and the intermediate conveyor belt 8 enables the semiconductor thin film during the dispensing process to be supported and conveyed in a belt-like manner, effectively improving the stability of the conveying support for the semiconductor thin film, and further enhancing the stability of the semiconductor thin film during the dispensing process, thereby ensuring the dispensing quality.

[0029] The dispensing baffle 10 can block the semiconductor thin film between the feeding conveyor belt 7 and the intermediate conveyor belt 8, effectively ensuring that another semiconductor thin film can enter the dispensing processing station only after one semiconductor thin film is completely processed by dispensing. The discharging baffle 11 can block the semiconductor thin film at the end of the intermediate conveyor belt 8, effectively preventing the semiconductor thin film from falling when being conveyed on the surface of the intermediate conveyor belt 8. Adjust the second cylinder 14 to perform telescopic processing, and the second cylinder 14 drives the dispensing baffle 10 to move up and down. After the dispensing baffle 10 rises, it can block the semiconductor thin film, and after the dispensing baffle 10 drops, it no longer blocks the semiconductor thin film, and the semiconductor thin film continues to be conveyed forward under the drive of the feeding conveyor belt 7. Adjust the third cylinder 15 to perform telescopic processing, and the third cylinder 15 drives the discharging baffle 11 to move up and down. After the discharging baffle 11 rises, it can block the semiconductor thin film, and after the discharging baffle 11 drops, it no longer blocks the semiconductor thin film, and the semiconductor thin film continues to be conveyed forward under the drive of the intermediate conveyor belt 8 and can be conveyed to the top of the discharging cart 2.

[0030] Finally, it should be noted that the above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A semiconductor thin film silver paste coating device, comprising a feed vehicle (1), a discharge vehicle (2) and a silver paste coating box (3), characterized in that: The feed vehicle (1) and the discharge vehicle (2) are respectively arranged on both sides of the silver paste pattern coating box (3); the silver paste pattern coating box (3) is provided with a feed module (4), a discharge module (5), a glue dispensing module (6), a feed conveyor belt (7), an intermediate conveyor belt (8) and a glue dispensing product detection component (9); the glue dispensing module (6) is arranged between the feed module (4) and the discharge module (5); the glue dispensing product detection component (9) is arranged between the feed conveyor belt (7) and the intermediate conveyor belt (8); the silver paste pattern coating box (3) is vertically provided with a movably connected glue dispensing baffle (10) and a discharge baffle (11); the intermediate conveyor belt (8) is arranged between the glue dispensing baffle (10) and the discharge baffle (11).

2. The semiconductor thin film silver paste coating equipment according to claim 1, characterized in that: The dispensing product detection component (9) comprises a marble detection ruler (22), first cylinders (23) are vertically symmetrically provided at both ends of the marble detection ruler (22), a support plate (12) is horizontally provided between the output ends of the two first cylinders (23), and a plurality of line laser measuring instruments (13) are provided on the top of the support plate (12).

3. The semiconductor thin film silver paste coating device according to claim 2, characterized in that: A second cylinder (14) is symmetrically and vertically provided at both ends of the bottom of the dispensing baffle (10), and the outer wall of the second cylinder (14) is fixedly connected to the outer wall of the marble detection ruler (22). A third cylinder (15) is symmetrically and vertically provided at both ends of the bottom of the discharging baffle (11), and the bottom of the third cylinder is fixedly connected to the inner wall of the silver paste pattern coating box (3).

4. The semiconductor thin film silver paste coating equipment according to claim 1, characterized in that: The feeding module (4) comprises a first linear drive mechanism (16) and a feeding mechanism (17); the feeding mechanism (17) is fixedly connected to the output end of the first linear drive mechanism (16); and a plurality of feeding grippers (18) are provided at the bottom of the feeding mechanism (17).

5. The semiconductor thin film silver paste coating equipment according to claim 4, characterized in that: The discharging module (5) comprises a second linear drive mechanism (19) and a discharging mechanism (20), wherein the discharging mechanism (20) is fixedly connected to the output end of the second linear drive mechanism (19), and a plurality of discharging grippers (21) are provided at the bottom of the discharging mechanism (20).

6. The semiconductor thin film silver paste coating equipment according to claim 5, characterized in that: The feeding mechanism (17) and the discharging mechanism (20) are both provided with a fourth cylinder and a vacuum air circuit assembly, the feeding gripper (18) and the discharging gripper (21) are both vacuum adsorption grippers, and the feeding gripper (18) and the discharging gripper (21) are both respectively connected to the vacuum air circuit assembly.

Images