High-precision direct-drive rotary table

Abstract

The utility model discloses a high-precision direct-drive rotary table which comprises a machine cabinet, a top plate is arranged above the machine cabinet, a bearing seat is arranged at the center position of the top end of the top plate, a second rotary driving piece is arranged at the center position of the bottom end of the top plate, and a rotary shaft is arranged at the top end of the second rotary driving piece. The top end of the rotating shaft penetrates through the top plate and the bearing seat and is provided with a rotating disc, supporting legs are installed at the corners of the bottom end of the cabinet, a control panel is arranged on the surface of the cabinet, the output end of a single-chip microcomputer in the control panel is electrically connected with the input end of a second rotating driving part, and part containing cavities are formed in the outer walls of the two sides of the cabinet correspondingly. A lifting driving piece is installed at the lower end in the piece containing cavity. According to the utility model, the purpose of easily and stably processing workpieces in all directions is achieved, the workpieces arranged on the inner side of the U-shaped frame can be transferred to an area with a specified height so as to be suitable for people with different processing environments and heights to operate and use, and the phenomenon of rotation of the U-shaped frame is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of turntables, and particularly relates to a high-precision direct-drive turntable. Background Technique

[0002] As the name implies, a turntable refers to a type of workbench that rotates workpieces. Turntables are mainly divided into two categories: gear drive and direct drive. A direct-drive turntable can ensure its transmission ratio. In semiconductor equipment, in order to drive the workpiece to rotate, a corresponding direct-drive turntable is required.

[0003] Referring to a high-precision direct-drive turntable with a publication number of CN215470924U, it includes an upper housing and a lower housing. The upper housing is fixedly connected to the upper end of the lower housing. An AC servo motor is fixedly connected inside the lower housing. The upper end of the output shaft of the AC servo motor is equipped with a rigid coupling. The outer wall of the upper end of the rigid coupling is rotationally connected to the upper housing through a cross roller bearing. This high-precision direct-drive turntable has a scientific and reasonable structure, is safe and convenient to use. Through the cooperation between the AC servo motor, the rigid coupling, the cross roller bearing, the upper housing and the lower housing, the AC servo motor transmits its rotation angle to the cross roller bearing without loss through the rigid coupling, thus achieving high rotational angle repeatability, low radial and axial runout, and having extremely high rigidity, ensuring that the deformation amount during rotation is as low as possible. Compared with the prior art, this solution has the advantages of high rotational angle repeatability, low radial and axial runout, and low manufacturing cost. According to the above, although this direct-drive turntable can be well applied, it is usually not convenient to fixedly place the workpiece, and it is difficult to flip the workpiece, thus making it not easy to process the workpiece. Moreover, this direct-drive turntable is not convenient to transfer the workpiece to a designated height area, which often troubles users. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a high-precision direct-drive turntable to solve the problems raised in the above background technique that although the direct-drive turntable can be well applied, it is usually not convenient to fixedly place the workpiece, and it is difficult to flip the workpiece, thus making it not easy to process the workpiece. Moreover, this direct-drive turntable is not convenient to transfer the workpiece to a designated height area.

[0005] To achieve the above object, the present utility model provides the following technical solution: a high-precision direct drive turntable, including a cabinet, a top plate is arranged above the cabinet, a bearing seat is arranged at the center position of the top end of the top plate, a second rotary drive member is arranged at the center position of the bottom end of the top plate, a rotating shaft is arranged at the top end of the second rotary drive member, the top end of the rotating shaft penetrates through the top plate and the bearing seat and is provided with a turntable, feet are installed at the corner positions of the bottom end of the cabinet, a control panel is arranged on the surface of the cabinet, the output end of the single-chip microcomputer inside the control panel is electrically connected to the input end of the second rotary drive member, placing cavities are arranged on the outer walls on both sides of the cabinet, a lifting drive member is installed at the lower end inside the placing cavity, and the input end of the lifting drive member is electrically connected to the output end of the single-chip microcomputer inside the control panel.

[0006] Preferably, equally spaced first bearing seats are arranged at the edge position of the top end of the turntable, and a second bearing seat is arranged at the top end of the turntable on one side of the first bearing seat. Through the arrangement of the first bearing seat and the second bearing seat, it is convenient to place relevant components such as the first rotary drive member and the limit box.

[0007] Preferably, U-shaped frames are arranged above the turntable between the first bearing seat and the second bearing seat, and rubber clamping plates are arranged on the inner walls on both sides of the U-shaped frame. Through the arrangement of the rubber clamping plates, it is convenient to clamp and place the workpiece inside the U-shaped frame.

[0008] Preferably, a first rotary drive member is installed on the outer wall of the first bearing seat, the input end of the first rotary drive member is electrically connected to the output end of the single-chip microcomputer inside the control panel, and one end of the first rotary drive member penetrates through the first bearing seat and is connected to the outer wall of the U-shaped frame. Through the arrangement of the first rotary drive member, it is convenient to drive the U-shaped frame to rotate.

[0009] Preferably, a limit box is arranged on the outer wall of the second bearing seat, a linkage shaft is rotatably connected inside the limit box, one end of the linkage shaft penetrates through the second bearing seat and is connected to the outer wall of the U-shaped frame, and a four-leaf rotating ring is arranged on the outer wall of the linkage shaft inside the limit box. Through the arrangement of the four-leaf rotating ring, it is convenient to cooperate with the spring member to reduce the phenomenon of the linkage shaft generating rotation.

[0010] Preferably, a spring member is installed on the outer wall of the second bearing seat on one side of the four-leaf rotating ring, a contact member is arranged at the top end of the spring member, one end of the contact member is rotatably connected to the outer wall of the second bearing seat, and the other end of the contact member abuts against the outer wall of the four-leaf rotating ring. Through the arrangement of the spring member, it is convenient to pull one end of the contact member to rotate downward.

[0011] Preferably, a linkage plate is provided at the top end of the lifting driving member, a column is provided at the top end of the linkage plate, and one end of the column away from the linkage plate is fixedly connected to the outer wall of the top plate. Through the arrangement of the lifting driving member, the linkage plate is driven to lift.

[0012] Preferably, a guide rail is provided on the inner wall of the placing cavity on one side of the column, a rail seat is slidably connected to the outer wall of the guide rail, and one end of the rail seat away from the guide rail is connected to the outer wall of the column. By sliding the rail seat on the outer wall of the guide rail, the movement amplitude of the column can be limited.

[0013] Compared with the prior art, the beneficial effects of the present utility model are as follows: The high-precision direct drive turntable not only achieves the purpose of being easy to perform all-round and stable processing on workpieces, but also can transfer the workpieces placed inside the U-shaped frame to a specified height area to be suitable for different processing environments and people of different heights to operate, and moreover reduces the phenomenon of the U-shaped frame rotating;

[0014] (1) Through the arrangement of two rubber clamping plates inside the U-shaped frame, the workpiece can be clamped and placed inside the U-shaped frame, and the first rotation driving member can drive the U-shaped frame to rotate, so that the workpiece can be flipped, thus achieving the purpose of being easy to perform all-round and stable processing on the workpiece;

[0015] (2) By driving the linkage plate to move upward through the lifting driving member, the linkage plate drives the column to move upward, and the column drives the rail seat to slide on the outer wall of the guide rail, so that the column drives the top plate to move upward smoothly to adjust the distance between the top plate and the cabinet, and then the workpieces placed inside the U-shaped frame can be transferred to a specified height area to be suitable for different processing environments and people of different heights to operate, thereby improving the applicable range of the direct drive turntable;

[0016] (3) By pulling one end of the abutting member to rotate downward through the spring member, the bottom end of the abutting member always abuts against the outer wall of the four-leaf rotating ring, so that the rotation amplitude of the linkage shaft can be limited, thereby reducing the phenomenon of the U-shaped frame rotating. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a right view structural schematic diagram of the present utility model;

[0018] Figure 2 For the present utility model Figure 1 The enlarged structural schematic diagram at A in it;

[0019] Figure 3 It is a side view structural schematic diagram of the four-leaf rotating ring of the present utility model;

[0020] Figure 4 It is a left view structural schematic diagram of the present utility model;

[0021] Figure 5 Schematic side view structure of the top plate of the present utility model;

[0022] Figure 6 Schematic bottom view structure of the top plate of the present utility model.

[0023] In the figure: 1, cabinet; 2, support feet; 3, control panel; 4, turntable; 5, U-shaped frame; 6, rubber clamping plate; 7, first rotation driving member; 8, limit box; 9, first bearing seat; 10, second bearing seat; 11, linkage shaft; 12, four-leaf rotating ring; 13, spring member; 14, abutting member; 15, component placement cavity; 16, lifting driving member; 17, linkage plate; 18, column; 19, guide rail; 20, rail seat; 21, top plate; 22, bearing seat; 23, rotating shaft; 24, second rotation driving member. Specific embodiments

[0024] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0025] Please refer to Figures 1-6 , an embodiment provided by the present utility model: a high-precision direct drive turntable, including a cabinet 1, a top plate 21 is arranged above the cabinet 1, a bearing seat 22 is arranged at the center position of the top end of the top plate 21, a second rotation driving member 24 is arranged at the center position of the bottom end of the top plate 21, a rotating shaft 23 is arranged at the top end of the second rotation driving member 24, the top end of the rotating shaft 23 penetrates through the top plate 21 and the bearing seat 22 and a turntable 4 is arranged, equally spaced first bearing seats 9 are arranged at the edge position of the top end of the turntable 4, and a second bearing seat 10 is arranged at the top end of the turntable 4 on one side of the first bearing seat 9;

[0026] During use, through the arrangement of the first bearing seat 9 and the second bearing seat 10, it is convenient to place relevant components such as the first rotation driving member 7 and the limit box 8;

[0027] U-shaped frames 5 are arranged above the turntable 4 between the first bearing seat 9 and the second bearing seat 10, and rubber clamping plates 6 are arranged on the inner walls of both sides of the U-shaped frame 5;

[0028] During use, through the arrangement of the rubber clamping plate 6, it is convenient to clamp and place the workpiece inside the U-shaped frame 5;

[0029] A first rotation driving member 7 is installed on the outer wall of the first bearing seat 9, the input end of the first rotation driving member 7 is electrically connected to the output end of the single-chip microcomputer inside the control panel 3, and one end of the first rotation driving member 7 penetrates through the first bearing seat 9 and is connected to the outer wall of the U-shaped frame 5;

[0030] During use, through the setting of the first rotation driving member 7, the U-shaped frame 5 is driven to rotate;

[0031] A limiting box 8 is arranged on the outer wall of the second bearing seat 10. A linkage shaft 11 is rotatably connected inside the limiting box 8. One end of the linkage shaft 11 penetrates through the second bearing seat 10 and is connected to the outer wall of the U-shaped frame 5. A four-leaf rotating ring 12 is arranged on the outer wall of the linkage shaft 11 inside the limiting box 8;

[0032] During use, through the setting of the four-leaf rotating ring 12, the phenomenon of the linkage shaft 11 generating rotation is reduced in cooperation with the spring member 13;

[0033] A spring member 13 is installed on the outer wall of the second bearing seat 10 on one side of the four-leaf rotating ring 12. A contact member 14 is arranged at the top of the spring member 13. One end of the contact member 14 is rotatably connected to the outer wall of the second bearing seat 10, and the other end of the contact member 14 abuts against the outer wall of the four-leaf rotating ring 12;

[0034] During use, through the setting of the spring member 13, one end of the contact member 14 is pulled to rotate downward;

[0035] Support feet 2 are installed at the corner positions at the bottom end of the cabinet 1. A control panel 3 is arranged on the surface of the cabinet 1. The output end of the single-chip microcomputer inside the control panel 3 is electrically connected to the input end of the second rotation driving member 24. Placement cavities 15 are arranged on the outer walls on both sides of the cabinet 1. A lifting driving member 16 is installed at the lower end inside the placement cavity 15. The input end of the lifting driving member 16 is electrically connected to the output end of the single-chip microcomputer inside the control panel 3. A linkage plate 17 is arranged at the top end of the lifting driving member 16. A column 18 is arranged at the top end of the linkage plate 17. One end of the column 18 away from the linkage plate 17 is fixedly connected to the outer wall of the top plate 21;

[0036] During use, through the setting of the lifting driving member 16, the linkage plate 17 is driven to perform lifting processing;

[0037] A guide rail 19 is arranged on the inner wall of the placement cavity 15 on one side of the column 18. A rail seat 20 is slidably connected to the outer wall of the guide rail 19. One end of the rail seat 20 away from the guide rail 19 is connected to the outer wall of the column 18;

[0038] During use, through the rail seat 20 sliding on the outer wall of the guide rail 19, the movement amplitude of the column 18 is limited.

[0039] When the embodiment of the present application is in use, first, the second rotation driving member 24 is turned on by operating the control panel 3, so that the second rotation driving member 24 drives the turntable 4 to rotate through the rotating shaft 23, and the guide rail 19 can be driven to rotate in a direct drive manner to ensure the rotation accuracy of the turntable. After that, through the arrangement of two rubber clamping plates 6 inside the U-shaped frame 5, the workpiece can be clamped and placed inside the U-shaped frame 5, and the first rotation driving member 7 can drive the U-shaped frame 5 to rotate to turn over the workpiece. Then, one end of the abutting member 14 is pulled downwards by the spring member 13 to rotate, so that the bottom end of the abutting member 14 always abuts against the outer wall of the four-leaf rotating ring 12, so that the four-leaf rotating ring 12 can only rotate in one direction, and the rotation amplitude of the linkage shaft 11 can be limited to reduce the phenomenon of the U-shaped frame 5 generating rotation. Finally, the lifting driving member 16 drives the linkage plate 17 to move upwards, so that the linkage plate 17 drives the column 18 to move upwards, and the column 18 drives the rail seat 20 to slide on the outer wall of the guide rail 19, so that the column 18 drives the top plate 21 to move upwards smoothly, to adjust the distance between the top plate 21 and the cabinet 1, and transfer the workpiece placed inside the U-shaped frame 5 to a specified height area for processing, thus completing the use of the direct drive turntable.

Claims

1. A high-precision direct-drive turntable, characterized in that: The cabinet (1) comprises a top plate (21) disposed above the cabinet (1), a bearing seat (22) disposed at the center of the top end of the top plate (21), a second rotary drive member (24) disposed at the center of the bottom end of the top plate (21), a rotating shaft (23) disposed at the top end of the second rotary drive member (24), the top end of the rotating shaft (23) passing through the top plate (21) and the bearing seat (22) and being provided with a rotating disk (4), and a corner of the bottom end of the cabinet (1) A support foot (2) is installed at each position of the cabinet (1); a control panel (3) is arranged on the surface of the cabinet (1); the output end of the single chip microcomputer inside the control panel (3) is electrically connected to the input end of the second rotating drive member (24); a mounting cavity (15) is arranged on the outer walls on both sides of the cabinet (1); a lifting drive member (16) is installed at the lower end of the mounting cavity (15); the input end of the lifting drive member (16) is electrically connected to the output end of the single chip microcomputer inside the control panel (3).

2. A high-precision direct-drive turntable according to claim 1, characterized in that: First bearing seats (9) are arranged at equal intervals at the edge of the top end of the turntable (4), and a second bearing seat (10) is arranged at the top end of the turntable (4) on one side of the first bearing seat (9).

3. A high-precision direct-drive turntable according to claim 2, characterized in that: A U-shaped frame (5) is provided above the turntable (4) between the first bearing seat (9) and the second bearing seat (10), and rubber clamping plates (6) are provided on the inner walls of both sides of the U-shaped frame (5).

4. The high-precision direct-drive turntable according to claim 3, characterized in that: A first rotating driving member (7) is mounted on the outer wall of the first bearing seat (9); an input end of the first rotating driving member (7) is electrically connected to an output end of a single chip microcomputer inside the control panel (3); and one end of the first rotating driving member (7) passes through the first bearing seat (9) and is connected to the outer wall of the U-shaped frame (5).

5. The high-precision direct-drive turntable according to claim 3, characterized in that: A limit box (8) is arranged on the outer wall of the second bearing seat (10), and a linkage shaft (11) is rotatably connected inside the limit box (8). One end of the linkage shaft (11) passes through the second bearing seat (10) and is connected to the outer wall of the U-shaped frame (5). A four-leaf swivel (12) is arranged on the outer wall of the linkage shaft (11) inside the limit box (8).

6. The high-precision direct-drive turntable according to claim 5, characterized in that: A spring component (13) is installed on the outer wall of the second bearing seat (10) on one side of the four-leaf swivel (12), and a contact component (14) is arranged at the top end of the spring component (13), one end of the contact component (14) is rotatably connected to the outer wall of the second bearing seat (10), and the other end of the contact component (14) is in contact with the outer wall of the four-leaf swivel (12).

7. The high-precision direct-drive turntable according to claim 1, characterized in that: A linkage plate (17) is disposed at the top end of the lifting drive member (16), a column (18) is disposed at the top end of the linkage plate (17), and an end of the column (18) away from the linkage plate (17) is fixedly connected to the outer wall of the top plate (21).

8. The high-precision direct-drive turntable according to claim 7, characterized in that: A guide rail (19) is provided on the inner wall of the placement cavity (15) on one side of the column (18), a rail seat (20) is slidably connected to the outer wall of the guide rail (19), and an end of the rail seat (20) away from the guide rail (19) is connected to the outer wall of the column (18).

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