Boat inlet and outlet circulation device and coating equipment

Abstract

The utility model discloses an in-out boat circulation device and coating equipment, and relates to the technical field of thin film deposition. The in-out boat circulation device is arranged in a rack and comprises an in-boat conveying assembly, an out-boat conveying assembly and a boat transfer table, and the in-boat conveying assembly is used for conveying a boat loaded with a to-be-coated product into the rack; the boat outlet conveying assembly is used for conveying the boat loaded with the coated product out of the rack; the boat transfer table is arranged between the boat inlet conveying assembly and the boat outlet conveying assembly in a liftable mode, the boat inlet conveying assembly conveys a boat loaded with a to-be-coated product to the boat transfer table, and the boat transfer table ascends and descends to convey the boat loaded with the to-be-coated product to the reaction cavities of different heights; and boats loaded with coated products can be received from the reaction cavities with different heights, and the boats loaded with the coated products are conveyed to the boat outlet conveying assembly. The boat inlet and outlet circulation device can realize boat inlet and outlet of reaction cavities at different heights, and the boat inlet and outlet efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film deposition, in particular to a boat transfer device and a coating equipment for loading and unloading wafers. Background Art

[0002] Thin film deposition technology is widely used in the production and manufacturing of microelectronic devices, TFTs, solar cells, etc. In a vacuum chamber, chemical reaction gases are introduced, and chemical molecules are decomposed by thermal energy or plasma energy to form a thin film on the surface of a substrate.

[0003] Quartz boats are generally used as carriers for silicon wafers in coating equipment. Before coating, the products to be coated are loaded onto the boats by a wafer loader and then transported into the coating equipment. The coating equipment includes a loading and unloading chamber and a coating chamber. The loading and unloading chamber is used to place the boats loaded with products to be coated and the boats loaded with coated products. The boats loaded with products to be coated wait to be transported into the coating chamber for coating; the boats loaded with coated products that have completed coating in the coating chamber are transported back to the loading and unloading chamber and wait to be transported out of the coating equipment.

[0004] In order to improve the production capacity of coating equipment, multiple reaction chambers are usually stacked in the coating chamber of existing coating equipment in the height direction, and the heights of the boats entering and leaving the reaction chambers at different heights are different. In the prior art, the lifting of a handling robot is used to complete the entry and exit of the boats in the reaction chambers at different heights, and the efficiency of the entry and exit of the boats is relatively low. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a boat transfer device and a coating equipment for loading and unloading wafers, so as to improve the efficiency of the entry and exit of the boats and further improve the production capacity of the coating equipment.

[0006] To achieve the above object, the utility model adopts the following technical solutions:

[0007] The boat transfer device is arranged in a frame and includes:

[0008] A boat loading conveyor assembly for conveying the boat loaded with the product to be coated into the frame;

[0009] A boat unloading conveyor assembly for conveying the boat loaded with the coated product out of the frame;

[0010] A boat turntable is arranged between the boat loading conveyor assembly and the boat unloading conveyor assembly in a liftable manner. The boat loading conveyor assembly conveys the boat loaded with the product to be coated onto the boat turntable. The boat turntable can be lifted to convey the boat loaded with the product to be coated to reaction chambers at different heights, and can receive the boat loaded with the coated product from reaction chambers at different heights and convey the boat loaded with the coated product to the boat unloading conveyor assembly.

[0011] As an alternative solution of the boat in-and-out transfer device, the boat in-and-out transfer device further includes a scissor lift mechanism and a driving mechanism. The scissor lift mechanism is arranged below the boat turntable, and the driving mechanism is arranged on the frame and connected to the scissor lift mechanism for driving the scissor lift mechanism to lift so as to drive the boat turntable to lift.

[0012] As an alternative solution of the boat in-and-out transfer device, the scissor lift mechanism includes a first scissor arm and a second scissor arm. The first scissor arm and the second scissor arm are cross-arranged and hinged. One end of the first scissor arm is hinged to the boat turntable, and the other end is slidably connected to the frame. One end of the second scissor arm is slidably connected to the boat turntable, and the other end is hinged to the frame.

[0013] As an alternative solution of the boat in-and-out transfer device, a first slide rail and a first hinge seat are arranged at the bottom of the boat turntable. The first hinge seat is arranged at one end in the extending direction of the first slide rail, and one end of the first scissor arm is hinged to the first hinge seat; a first slider is arranged at one end of the second scissor arm, and the first slider is slidably matched with the first slide rail;

[0014] A second slide rail and a second hinge seat are arranged on the frame. The second hinge seat is arranged at one end in the extending direction of the second slide rail, and the other end of the second scissor arm is hinged to the frame. A second slider is arranged at the other end of the first scissor arm, and the second slider is slidably matched with the second slide rail.

[0015] As an alternative solution of the boat in-and-out transfer device, two scissor lift mechanisms are arranged at intervals, and the driving mechanism is arranged between the two scissor lift mechanisms. The driving mechanism drives the two scissor lift mechanisms to lift simultaneously.

[0016] As an alternative solution of the boat in-and-out transfer device, the boat turntable includes a support frame and a turntable surface. The turntable surface is arranged above the support frame and is used for carrying the boat loaded with the product to be coated and the boat loaded with the coated product. The scissor lift mechanism is connected to the support frame.

[0017] As an alternative solution of the boat in-and-out transfer device, the turntable surface includes at least two conveyor rollers. The conveyor rollers are rotatably connected to the support frame, and the rotation of the conveyor rollers can convey the boat loaded with the product to be coated and the boat loaded with the coated product.

[0018] As an alternative embodiment of the boat loading and unloading transfer device, the boat turntable further includes a conveyor belt, which is drivingly arranged between at least two conveyor rollers. The rotation of the conveyor rollers drives the conveyor belt to convey the boat loaded with the products to be coated and the boat loaded with the coated products.

[0019] As an alternative embodiment of the boat loading and unloading transfer device, the boat loading and unloading transfer device further includes a hot air circulation assembly, which is arranged between the boat unloading conveyor assembly and the boat loading conveyor assembly and is used for circulating the heat dissipated by the boat loaded with the coated products to the boat loaded with the products to be coated for preheating the products to be coated.

[0020] A coating equipment, which includes a frame and the boat loading and unloading transfer device according to any of the above embodiments.

[0021] Advantages of the present utility model:

[0022] For the boat loading and unloading transfer device provided by the present utility model, the boat loaded with the products to be coated is conveyed to the boat turntable in the frame through the boat loading conveyor assembly. The boat turntable can be lifted to different heights to sequentially convey the boat loaded with the products to be coated to reaction chambers at different heights. After the coating process in the reaction chamber is completed, the boat turntable can receive the boat loaded with the coated products from the reaction chambers at different heights and convey the boat loaded with the coated products to the boat unloading conveyor assembly. The boat unloading conveyor assembly conveys the boat loaded with the coated products out of the frame. This boat loading and unloading transfer device can realize the loading and unloading of boats for reaction chambers at different heights, improving the efficiency of boat loading and unloading.

[0023] For the coating equipment provided by the present utility model, by adopting the above boat loading and unloading transfer device, the efficiency of boat loading and unloading is improved, and further the production capacity of the coating equipment is increased. Description of the Drawings

[0024] Figure 1 is a schematic structural view of the coating equipment provided by an embodiment of the present utility model;

[0025] Figure 2 is a schematic layout view of the boat loading and unloading transfer device in the frame provided by an embodiment of the present utility model.

[0026] In the figure:

[0027] 100, frame; 101, support beam; 102, chassis; 103, side frame;

[0028] 200, reaction chamber;

[0029] 300, handling robot; 301, robotic arm; 302, handling gripper;

[0030] 1, boat loading conveyor assembly; 11, boat loading buffer position;

[0031] 2. Boat out transfer assembly; 21. Boat out buffer position;

[0032] 3. Boat transfer table;

[0033] 41. First scissor arm; 42. Second scissor arm;

[0034] 5. Hot air circulation assembly; 51. Air inlet hood; 52. Circulation pipeline; 53. Air outlet hood; 54. Circulation fan. Detailed implementation manners

[0035] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to explain the present utility model and should not be construed as a limitation to the present utility model.

[0036] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0037] Unless otherwise clearly defined and limited, the terms "installed", "connected", "connected", "fixed" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. It can be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0038] Unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may include direct contact between the first feature and the second feature, or may include contact between the first feature and the second feature not directly but through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "underneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the horizontal height of the first feature is less than that of the second feature.

[0039] The technical solution of the present utility model will be further described below in conjunction with the accompanying drawings and through specific embodiments.

[0040] As Figure 1 shown, this embodiment provides a coating device, including a frame 100, a reaction chamber device, a boat-in and boat-out transfer device, and a handling robot 300. The reaction chamber device, the boat-in and boat-out transfer device, and the handling robot 300 are all installed in the frame 100. The boat is a carrier for coating products. The boat loaded with products to be coated is conveyed into the frame 100 through the boat-in and boat-out transfer device, and the handling robot 300 transports the boat loaded with products to be coated into the reaction chamber device for the coating process. After the coating process is completed, after the boat loaded with coated products is pushed out of the reaction chamber device, the handling robot 300 transports the boat loaded with coated products to the boat-in and boat-out transfer device, and then the boat-in and boat-out transfer device conveys the boat loaded with coated products out of the frame 100.

[0041] The reaction chamber device includes two groups of reaction chamber components, and the two groups of reaction chamber components are arranged at intervals in the width direction of the frame 100. Each group of reaction chamber components includes at least two reaction chambers 200 arranged in sequence in the height direction. On the one hand, it realizes minimizing the floor area of the coating device as much as possible while increasing the number of reaction chambers 200, and avoiding the increase in transportation costs caused by transportation difficulties due to the too large volume of the coating device; and minimizing the height of the coating device as much as possible under the same production capacity, and avoiding the increase in maintenance costs caused by the need to climb for maintenance due to the too high height. On the other hand, the handling robot 300 can be arranged between the two groups of reaction chamber components, so that the handling robot 300 is located in the interval space between the two groups of reaction chamber components, and one handling robot 300 can sequentially transport multiple boats loaded with products to be coated into each reaction chamber 200 of the two groups of reaction chamber components, and transport the boats loaded with coated products taken out from each reaction chamber 200 to the boat-in and boat-out transfer device.

[0042] As Figure 2As shown in the figure, this embodiment further provides a boat transfer device, which is applied to the above-mentioned coating equipment. The boat transfer device includes a boat loading conveyor component 1, a boat unloading conveyor component 2, and a boat transfer platform 3. The boat loading conveyor component 1 is used to convey the boat loaded with products to be coated into the rack 100. The boat unloading conveyor component 2 is used to convey the boat loaded with coated products out of the rack 100. The boat transfer platform 3 is arranged between the boat loading conveyor component 1 and the boat unloading conveyor component 2 in a liftable manner. The boat loading conveyor component 1 conveys the boat loaded with products to be coated to the boat transfer platform 3. The boat transfer platform 3 can be lifted to convey the boat loaded with products to be coated to reaction chambers 200 at different heights, and can receive the boat loaded with coated products from reaction chambers 200 at different heights, and convey the boat loaded with coated products to the boat unloading conveyor component 2.

[0043] Specifically, the rack 100 includes a chassis 102 and two side frames 103. The two side frames 103 are respectively arranged at both ends of the chassis 102 in the width direction. The boat loading conveyor component 1 is arranged at the front side of one group of reaction chamber components, and the boat unloading conveyor component 2 is arranged at the front side of the other group of reaction chamber components. Both the boat loading conveyor component 1 and the boat unloading conveyor component 2 are arranged on the chassis 102. The boat transfer platform 3 and the handling robot 300 are located at the front side of the furnace opening of the reaction chamber 200, and the boat transfer platform 3 is located below the handling robot 300. Two support beams 101 are arranged at the top of the rack 100. The two support beams 101 span across the two side frames 103, and a limiting groove is formed between the two support beams 101. The robotic arm 301 of the handling robot 300 slides in the limiting groove. The handling robot 300 can translate along the extension direction of the limiting groove, that is, translate along the width direction of the rack 100, so as to respectively convey the boat loaded with products to be coated to the two groups of reaction chamber components, and convey the boat loaded with coated products from the two groups of reaction chamber components to the boat transfer platform 3. When the handling robot 300 is located at the middle position of the limiting groove, it is directly opposite to the boat transfer platform 3 located on the chassis 102, so as to facilitate the handling robot 300 to grab the boat loaded with products to be coated from the boat transfer platform 3 or place the boat loaded with coated products on the boat transfer platform 3.

[0044] By setting the boat transfer platform 3 to be liftable, when the handling robot 300 translates to the middle position of the limiting groove, while the handling gripper 302 descends along the height direction of the rack 100, the boat transfer platform 3 ascends, so that the handling gripper 302 can quickly grab the boat loaded with products to be coated on the boat transfer platform 3, and can quickly place the boat loaded with coated products on the boat transfer platform 3, further improving the transfer efficiency and thus increasing the production capacity.

[0045] The boat loading conveyor component 1 and the boat unloading conveyor component 2 can be belt conveyors or handling robot conveyors. The specific structures and working principles of the belt conveyors and the handling robot conveyors can be designed with reference to the prior art. This is not the improvement point of this embodiment and will not be elaborated here.

[0046] In one embodiment, the boat transfer device further includes a scissor lift mechanism and a driving mechanism. The scissor lift mechanism is disposed below the boat turntable 3, and the driving mechanism is disposed on the frame 100 and connected to the scissor lift mechanism to drive the scissor lift mechanism to lift, so as to drive the boat turntable 3 to lift. By driving the scissor lift mechanism to lift through the driving mechanism, the scissor lift mechanism drives the boat turntable 3 to lift, improving the stability of the lifting of the boat turntable 3.

[0047] Of course, in other embodiments, the boat turntable 3 can also be lifted by driving a telescopic bracket to expand and contract through a driving mechanism, or directly lifted by a linear driving member.

[0048] In one embodiment, two scissor lift mechanisms are arranged at intervals, and the driving mechanism is disposed between the two scissor lift mechanisms to drive the two scissor lift mechanisms to lift simultaneously. The two scissor lift mechanisms are arranged at intervals below the boat turntable 3, improving the stability of the support of the boat turntable 3; the driving mechanism drives the two scissor lift mechanisms to lift simultaneously, ensuring the synchronism of the lifting of the two scissor lift mechanisms, and thus ensuring the stability of the boat turntable 3 during the lifting process.

[0049] In one embodiment, the scissor lift mechanism includes a first scissor arm 41 and a second scissor arm 42. The first scissor arm 41 and the second scissor arm 42 are cross-arranged and hinged. One end of the first scissor arm 41 is hinged to the boat turntable 3, and the other end is slidably connected to the frame 100. One end of the second scissor arm 42 is slidably connected to the boat turntable 3, and the other end is hinged to the frame 100. Both the first scissor arm 41 and the second scissor arm 42 are arranged with one end hinged and the other end slidably connected. The driving mechanism drives the distances between the two ends of the first scissor arm 41 and the second scissor arm 42 to decrease, thereby driving the boat turntable 3 to rise; when descending, the driving mechanism drives the distances between the two ends of the first scissor arm 41 and the second scissor arm 42 to increase, thereby driving the boat turntable 3 to descend.

[0050] Further, a first slide rail and a first hinge seat are provided at the bottom of the boat turntable 3. The first hinge seat is disposed at one end in the extending direction of the first slide rail, and one end of the first scissor arm 41 is hinged to the first hinge seat; a first slider is provided at one end of the second scissor arm 42, and the first slider is slidably engaged with the first slide rail. A second slide rail and a second hinge seat are provided on the frame 100. The second hinge seat is disposed at one end in the extending direction of the second slide rail, the other end of the second scissor arm 42 is hinged to the frame 100, and a second slider is provided at the other end of the first scissor arm 41, and the second slider is slidably engaged with the second slide rail.

[0051] Specifically, the driving mechanism includes a driving motor, a screw and a nut seat. The driving motor is connected to the screw to drive the screw to rotate. The nut seat is connected to the screw for transmission. The rotation of the screw drives the nut seat to move in a straight line. The nut seat is connected to two scissor-type lifting mechanisms through a connecting piece to simultaneously drive the first scissor arm 41 of the two scissor-type lifting mechanisms to slide along the first slide rail and the second scissor arm 42 to move along the second slide rail, thereby realizing the lifting and lowering of the boat turntable 3.

[0052] Of course, in other embodiments, the driving mechanism may also be other linear driving components such as an electric push rod.

[0053] In one embodiment, the boat transfer table 3 includes a support frame and a transfer table top, the transfer table top is arranged above the support frame, and is used to carry boats loaded with products to be coated and boats loaded with coated products, and the scissor-type lifting mechanism is connected to the support frame. The support frame is used to support the transfer table top, and the scissor-type lifting mechanism drives the transfer table top to rise and fall through the support frame.

[0054] In one embodiment, the transfer table includes at least two conveying rollers, which are rotatably connected to the support frame, and the conveying rollers can be rotated to convey the boats carrying the products to be coated and the boats carrying the coated products. By providing the conveying rollers, the conveying rollers can be rotated to receive the boats carrying the products to be coated on the inlet boat conveying assembly 1, and the conveying rollers can be rotated to convey the boats carrying the coated products placed on the transfer table to the outlet boat conveying assembly 2.

[0055] Specifically, the boat turntable 3 also includes a motor, which is connected to a conveying roller. The conveying rollers are connected by a connecting assembly. The motor drives a conveying roller to rotate, which can drive at least two conveying rollers to rotate together, so that at least two conveying rollers convey the boat loaded with products to be coated and the boat loaded with coated products.

[0056] Furthermore, the transfer table also includes a conveyor belt, which is arranged between at least two conveyor rollers, and the conveyor rollers rotate to drive the conveyor belt to convey the boat loaded with the products to be coated and the boat loaded with the coated products. The conveyor belt has better stability and higher transmission efficiency.

[0057] When the coating process is performed, the boat loaded with the products to be coated needs to be heated to a relatively high temperature to cause a chemical reaction. The temperature of the boat loaded with the coated products after coating is very high and needs to be cooled and dissipated before being transferred out of the rack 100, in order to avoid energy waste and improve coating efficiency. In one embodiment, the in-and-out boat transfer device further includes a hot air circulation component 5, which is arranged between the out-boat transfer component 2 and the in-boat transfer component 1, and is used to circulate the heat emitted by the boat loaded with the coated products to the boat loaded with the products to be coated, so as to preheat the products to be coated.

[0058] Specifically, the boat loading and unloading transfer device further includes a boat loading buffer position 11 and a boat unloading buffer position 21. The boat loading buffer position 11 is arranged at one end of the boat loading transfer component 1 close to the boat transfer table 3, and is used for buffering the boat loaded with the products to be coated and waiting for the boat transfer table 3 to receive. The boat unloading buffer position 21 is arranged at one end of the boat unloading transfer component 2 close to the boat transfer table 3, and is used for buffering the boat loaded with the coated products and waiting to be cooled. One end of the hot air circulation component 5 is connected to the boat loading buffer position 11, and the other end is connected to the boat unloading buffer position 21. Since the boats loaded with the products to be coated and the boats loaded with the coated products are both handed over to the handling robot 300 through the boat transfer table 3, and the boat transfer table 3 cannot place the boats loaded with the products to be coated and the boats loaded with the coated products at the same time. To avoid process conflicts, it is necessary to set the boat loading buffer position 11 to buffer the boats loaded with the products to be coated and waiting for the boat transfer table 3 to receive. The boats loaded with the coated products need to be cooled before being conveyed out of the frame 100 through the boat unloading transfer component 2. To avoid waiting on the boat transfer table 3, the boat unloading buffer position 21 is set to buffer the boats loaded with the coated products and waiting to be cooled.

[0059] Specifically, the hot air circulation component 5 includes an air inlet hood 51, a circulation pipeline 52, and an air outlet hood 53. The air inlet hood 51 covers the boat unloading buffer position 21, the air outlet hood 53 covers the boat loading buffer position 11, and the air inlet hood 51 is communicated with the air outlet hood 53 through the circulation pipeline 52. The air inlet hood 51 can gather the heat dissipated from the boat unloading buffer position 21 within a certain space, prevent the heat from dissipating everywhere, and improve the recycling efficiency of the heat. The heat gathered by the air inlet hood 51 flows through the circulation pipeline 52 to the air outlet hood 53, and the air outlet hood 53 gathers the heat flowing here within the covering space of the air outlet hood 53, so that the gathered heat all flows to the boat loaded with the products to be coated at the boat loading buffer position 11, thereby being able to preheat the products to be coated faster.

[0060] Further, the hot air circulation component 5 further includes a circulation fan 54, and the circulation fan 54 is arranged in the circulation pipeline 52. By means of the circulation fan 54, the flow of air can be accelerated, the heat gathered by the air inlet hood 51 can be quickly guided into the circulation pipeline 52, and the heat transfer efficiency is higher, thereby reducing heat loss.

[0061] The coating equipment provided in this embodiment adopts the above-mentioned boat loading and unloading transfer device, which improves the boat loading and unloading efficiency, and at the same time improves the coating efficiency, and further improves the production capacity of the coating equipment.

[0062] The above content is only the preferred embodiment of the present invention. For those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manners and application scopes. The content of this specification should not be construed as a limitation to the present invention.

Claims

1. A boat in and out circulation device, arranged in the frame (100), characterized in that: include: A boat transfer assembly (1) for transferring a boat loaded with products to be coated into the frame (100); A boat out conveying assembly (2), used for conveying the boat loaded with the coated products out of the frame (100); The boat turntable (3) is movably disposed between the boat inlet conveying assembly (1) and the boat outlet conveying assembly (2). The boat inlet conveying assembly (1) conveys the boat loaded with the products to be coated to the boat turntable (3). The boat turntable (3) is movable so as to convey the boat loaded with the products to be coated to reaction chambers (200) at different heights, receive the boat loaded with the coated products from reaction chambers (200) at different heights, and convey the boat loaded with the coated products to the boat outlet conveying assembly (2).

2. The in-and-out boat circulation device according to claim 1, characterized in that: The in-and-out boat circulation device further comprises a scissor-type lifting mechanism and a driving mechanism, wherein the scissor-type lifting mechanism is arranged below the boat transfer platform (3), and the driving mechanism is arranged on the frame (100), and the driving mechanism is connected to the scissor-type lifting mechanism and is used to drive the scissor-type lifting mechanism to rise and fall, thereby driving the boat transfer platform (3) to rise and fall.

3. The in-and-out boat circulation device according to claim 2, characterized in that: The scissor-type lifting mechanism comprises a first scissor arm (41) and a second scissor arm (42); the first scissor arm (41) and the second scissor arm (42) are cross-arranged and hingedly connected; one end of the first scissor arm (41) is hingedly connected to the boat turntable (3), and the other end is slidably connected to the frame (100); one end of the second scissor arm (42) is slidably connected to the boat turntable (3), and the other end is hingedly connected to the frame (100).

4. The in-and-out boat circulation device according to claim 3, characterized in that: The bottom of the boat turntable (3) is provided with a first slide rail and a first hinge seat, the first hinge seat is provided at one end of the first slide rail in the extension direction, one end of the first scissor arm (41) is hinged to the first hinge seat; one end of the second scissor arm (42) is provided with a first slider, the first slider is slidably matched with the first slide rail; The frame (100) is provided with a second slide rail and a second hinged seat, the second hinged seat is arranged at one end of the second slide rail in the extension direction, the other end of the second scissor arm (42) is hinged to the frame (100), and the other end of the first scissor arm (41) is provided with a second slider, and the second slider is slidably matched with the second slide rail.

5. The in-and-out boat circulation device according to any one of claims 2 to 4, characterized in that: Two scissor-type lifting mechanisms are arranged at intervals, and the driving mechanism is arranged between the two scissor-type lifting mechanisms. The driving mechanism drives the two scissor-type lifting mechanisms to rise and fall simultaneously.

6. The in-and-out boat circulation device according to any one of claims 2 to 4, characterized in that: The boat transfer table (3) comprises a support frame and a transfer table top, wherein the transfer table top is arranged above the support frame and is used to carry the boat carrying the products to be coated and the boat carrying the coated products, and the scissor-type lifting mechanism is connected to the support frame.

7. The in-and-out boat circulation device according to claim 6, characterized in that: The transfer table comprises at least two conveying rollers, which are rotatably connected to the support frame. The conveying rollers can convey the boat loaded with the products to be coated and the boat loaded with the coated products by rotation.

8. The in-and-out boat circulation device according to claim 7, characterized in that: The boat transfer table (3) also includes a conveyor belt, which is arranged between at least two of the conveyor rollers. The conveyor rollers rotate to drive the conveyor belt to transport the boat loaded with the products to be coated and the boat loaded with the coated products.

9. The in-and-out boat circulation device according to claim 1, characterized in that: The in-and-out boat transfer device also includes a hot air circulation component (5), which is arranged between the out-boat conveying component (2) and the in-boat conveying component (1) and is used to circulate the heat emitted by the boat loaded with the coated products to the boat loaded with the products to be coated, so as to preheat the products to be coated.

10. A coating device, characterized in that: It comprises a frame (100) and a boat in and out circulation device as claimed in any one of claims 1 to 9.

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