Vibration reduction mechanical molecular pump

Abstract

The utility model relates to a damping mechanical molecular pump which comprises a base, a rotating shaft and bearings, the rotating shaft is rotatably connected with the base through the upper bearing and the lower bearing, the damping mechanical molecular pump further comprises elastic elements and springs, the elastic elements are located on the outer sides of the bearings, the inner sides of the elastic elements make contact with outer rings of the bearings, and the outer sides of the elastic elements are fixed relative to the position of the base. The outer ring end of at least one bearing is connected with the spring. According to the utility model, the radial elastic element and the axial spring are used for reducing vibration of the bearing together, and the elastic element also plays a role in damping, so that the vibration reduction effect is better; the elastic element plays a role in heat conduction, heat of the bearing is led out, the temperature of the bearing and the temperature of lubricating oil in the bearing are reduced, the service life of the bearing is prolonged, the evaporation capacity of the lubricating oil is reduced, and pollution of lubricating oil steam is reduced.

Description

Technical Field

[0001] The utility model relates to the field of mechanical molecular pumps, in particular to a vibration-damping mechanical molecular pump. Background Art

[0002] In a mechanical molecular pump, the bearing is a rolling bearing, and the rotation speed of the rotating shaft can reach tens of thousands of revolutions, resulting in vibration of the bearing affected by the rotating shaft. However, the existing vibration-damping methods have poor effects.

[0003] Lubricating oil or grease is required for the rolling bearing. When the bearing temperature is too high, it will not only reduce the bearing life, but also accelerate the evaporation of the lubricating oil, causing pollution of the lubricating oil vapor. When the bearing temperature is too high, the service life of the bearing will be reduced, increasing the material cost and labor cost of replacing the bearing. Summary of the Utility Model

[0004] The utility model aims to solve the above problems and provides a vibration-damping mechanical molecular pump, which solves the above technical problems.

[0005] A vibration-damping mechanical molecular pump includes a base, a rotating shaft and bearings. The rotating shaft is rotatably connected to the base through upper and lower bearings. It further includes an elastic element and a spring. The elastic element is located outside the bearing, the inner side of the elastic element contacts the outer ring of the bearing, the outer side of the elastic element is fixed relative to the base, and the end of the outer ring of at least one bearing is connected to the spring.

[0006] Further, it also includes a bearing seat which is fixedly connected to the base. The upper bearing is inserted into the bearing seat, and the base is formed with a mounting hole into which the lower bearing is inserted.

[0007] Further, it also includes a sleeve and an end cover. The sleeve is inserted into the mounting hole and is slidably connected to the mounting hole. The upper end of the sleeve contacts the lower bearing. The end cover is located below the mounting hole and is fixedly connected to the base. The sleeve is formed with an inner boss, and the two ends of the spring respectively contact the inner boss and the end cover.

[0008] Further, the outer side of the elastic element corresponding to the upper bearing is fixed to the bearing seat, and the outer side of the elastic element corresponding to the lower bearing is fixed to the base.

[0009] Further, it also includes a first heat pipe. The upper first heat pipe is inserted between the upper bearing and the bearing seat and contacts the bearing seat. The two sides of the upper elastic element respectively contact the upper first heat pipe and the upper bearing. The lower first heat pipe is inserted between the lower bearing and the base and contacts the base. The two sides of the lower elastic element respectively contact the lower first heat pipe and the lower bearing.

[0010] Furthermore, it further includes a refrigeration device, and the first heat pipe passes through the base and is connected to the refrigeration device.

[0011] Furthermore, the elastic element is annular, and the elastic element is sleeved outside the bearing.

[0012] Furthermore, the elastic elements above and below are respectively greater than or equal to three. The elastic elements above are arranged circumferentially and evenly around the upper bearing, and the elastic elements below are arranged circumferentially and evenly around the lower bearing.

[0013] Furthermore, the elastic element is a thermally conductive silica gel pad with adhesive ability, and the elastic element is adhesively fixed to the outer ring of the bearing.

[0014] The utility model has the following advantages:

[0015] 1. The bearing is vibration-damped jointly by the radial elastic elements and the axial spring. The elastic elements also play a damping role, and the vibration-damping effect is better;

[0016] 2. The elastic elements play a role in heat conduction, conducting the heat of the bearing outwards, reducing the temperature of the bearing and the lubricating oil inside it, prolonging the service life of the bearing, reducing the evaporation amount of the lubricating oil, and reducing the pollution of the lubricating oil vapor. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for description in the embodiments or the prior art. Obviously, the drawings in the following description are only one embodiment of the present utility model. For those of ordinary skill in the art, without creative efforts, other implementation drawings can also be obtained according to the provided drawings.

[0018] Figure 1 : The three-dimensional structure schematic diagram of the present utility model;

[0019] Figure 2 : The first main view sectional structure schematic diagram of the present utility model;

[0020] Figure 3 : The second main view sectional structure schematic diagram of the present utility model;

[0021] Figure 4 : The local enlarged structure schematic diagram at A in Figure 3 ;

[0022] Figure 5 : The local enlarged structure schematic diagram at B in Figure 3 ; DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] The present utility model will be further described below in conjunction with the accompanying drawings and examples:

[0024] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.

[0025] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0026] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model.

[0027] As Figures 1 to 5 shown, this embodiment provides a vibration-damping mechanical molecular pump, including a base 1, a rotating shaft 3, and bearings 6. The rotating shaft 3 is rotatably connected to the base 1 through upper and lower bearings 6, and further includes an elastic element 74 and a spring 16. The elastic element 74 is located outside the bearing 6, the inner side of the elastic element 74 contacts the outer ring of the bearing 6, the outer side of the elastic element 74 is fixed relative to the base 1, and the end of the outer ring of at least one bearing 6 is connected to the spring 16.

[0028] The molecular pump further includes a housing 2, a molecular pump stator 4, and a molecular pump rotor 5. The base 1 and the housing 2 are fixedly connected. The molecular pump stator 4 is located inside the housing 2 and is fixedly connected to the housing 2. The molecular pump rotor 5 is fixedly connected to the rotating shaft 3. A cable interface 12 is formed on the side of the base 1, and the cable interface 12 is a prior art. Electric wires pass through the cable interface 12 to supply power to devices such as a motor stator 13.

[0029] Furthermore, it further includes a bearing seat 14. The bearing seat 14 is fixedly connected to the base 1. The upper bearing 6 is inserted into the bearing seat 14, and the base 1 is formed with a mounting hole 19. The lower bearing 6 is inserted into the mounting hole 19.

[0030] Further, it also includes a sleeve 15 and an end cap 17. The sleeve 15 is inserted into the mounting hole 19 and is slidably connected to the mounting hole 19. The upper end of the sleeve 15 contacts the bearing 6 below. The end cap 17 is located below the mounting hole 19 and is fixedly connected to the base 1. The sleeve 15 is formed with an inner boss 151, and both ends of the spring 16 contact the inner boss 151 and the end cap 17 respectively.

[0031] Further, the outer side of the elastic element 74 corresponding to the upper bearing 6 is fixed to the bearing seat 14, and the outer side of the elastic element 74 corresponding to the lower bearing 6 is fixed to the base 1.

[0032] Further, it also includes a first heat pipe 73. The upper first heat pipe 73 is inserted between the upper bearing 6 and the bearing seat 14 and contacts the bearing seat 14. Both sides of the upper elastic element 74 contact the upper first heat pipe 73 and the upper bearing 6 respectively; the lower first heat pipe 73 is inserted between the lower bearing 6 and the base 1 and contacts the base 1. Both sides of the lower elastic element 74 contact the lower first heat pipe 73 and the lower bearing 6 respectively.

[0033] Further, it also includes a refrigeration device. The first heat pipe 73 passes through the base 1 and is connected to the refrigeration device.

[0034] Further, the elastic element 74 is annular, and the elastic element 74 is sleeved outside the bearing 6.

[0035] Further, the number of the upper and lower elastic elements 74 is greater than or equal to three respectively. The upper elastic elements 74 are arranged circumferentially and evenly around the upper bearing 6, and the lower elastic elements 74 are arranged circumferentially and evenly around the lower bearing 6.

[0036] Further, the elastic element 74 is a thermally conductive silicone pad with adhesive ability. The elastic element 74 is adhesively fixed to the outer ring of the bearing 6, and the elastic element 74 is adhesively fixed to the first heat pipe 73, the bearing seat 14, and the base 1.

[0037] During operation, the motor stator 13 in the molecular pump drives the motor rotor 31 fixedly connected to the rotating shaft 3 to rotate, and further drives the molecular pump rotor 5 to rotate relative to the molecular pump stator 4. The molecular pump intakes air from the air inlet 21 and exhausts air from the air outlet 11.

[0038] During the high-speed rotation of the rotating shaft 3, the bearing 6 will vibrate. The elastic element 74 buffers the radial vibration of the bearing 6, and the spring 16 buffers the axial vibration of the bearing 6. The elastic element 74 can also play a damping role.

[0039] The refrigeration device cools the outer ring of the bearing 6 through the first heat pipe 73, and reduces the temperature of the inner ring of the bearing 6 through the heat transfer of the elastic element 74, lubricating oil and the rotor, thereby reducing the temperature of the rotating shaft 3 and the molecular pump rotor 5, and avoiding overheating of the rotating shaft 3 and the molecular pump rotor 5 due to high rotational speed. The elastic element 74 fills the gap between hard components such as metals.

[0040] At the same time, the temperature of the lubricating oil in the bearing 6 drops, which can reduce the evaporation and leakage of the lubricating oil, and reduce the pollution of the semiconductor processing environment and equipment by the lubricating oil vapor.

[0041] The present invention has been described by way of example above, but the present invention is not limited to the above specific embodiments, and any modification or variation based on the present invention falls within the scope of protection of the present invention.

Claims

1. A vibration-damping mechanical molecular pump, comprising a base (1), a rotating shaft (3) and a bearing (6), wherein the rotating shaft (3) is rotatably connected to the base (1) via two upper and lower bearings (6), and is characterized in that: It also includes an elastic element (74) and a spring (16), wherein the elastic element (74) is located on the outside of the bearing (6), the inner side of the elastic element (74) is in contact with the outer ring of the bearing (6), the outer side of the elastic element (74) is fixed relative to the base (1), and the outer ring end of at least one bearing (6) is connected to the spring (16).

2. A vibration-damping mechanical molecular pump according to claim 1, characterized in that: It also includes a bearing seat (14), the bearing seat (14) is fixedly connected to the base (1), the upper bearing (6) is inserted into the bearing seat (14), the base (1) is formed with a mounting hole (19), and the lower bearing (6) is inserted into the mounting hole (19).

3. A vibration-damping mechanical molecular pump according to claim 2, characterized in that: It also includes a sleeve (15) and an end cover (17), wherein the sleeve (15) is inserted into the mounting hole (19) and is slidably connected to the mounting hole (19), the upper end of the sleeve (15) is in contact with the bearing (6) below, the end cover (17) is located below the mounting hole (19) and is fixedly connected to the base (1), the sleeve (15) is formed with an inner boss (151), and the two ends of the spring (16) are in contact with the inner boss (151) and the end cover (17) respectively.

4. A vibration-damping mechanical molecular pump according to claim 2, characterized in that: The outer side of the elastic element (74) corresponding to the upper bearing (6) is fixed to the bearing seat (14), and the outer side of the elastic element (74) corresponding to the lower bearing (6) is fixed to the base (1).

5. A vibration-damping mechanical molecular pump according to claim 2, characterized in that: It also includes a first heat pipe (73), wherein the upper first heat pipe (73) is inserted between the upper bearing (6) and the bearing seat (14) and contacts the bearing seat (14), and the upper elastic element (74) is in contact with the upper first heat pipe (73) and the upper bearing (6) on both sides respectively; the lower first heat pipe (73) is inserted between the lower bearing (6) and the base (1) and contacts the base (1), and the lower elastic element (74) is in contact with the lower first heat pipe (73) and the lower bearing (6) on both sides respectively.

6. A vibration-damping mechanical molecular pump according to claim 5, characterized in that: It also includes a refrigeration device, and the first heat pipe (73) passes through the base (1) and is connected to the refrigeration device.

7. The vibration-damping mechanical molecular pump according to claim 1, characterized in that: The elastic element (74) is annular and is sleeved on the outside of the bearing (6).

8. The vibration-damping mechanical molecular pump according to claim 1, characterized in that: The number of the upper and lower elastic elements (74) is greater than or equal to three respectively; the upper elastic elements (74) are evenly arranged around the upper bearing (6) in a circumference, and the lower elastic elements (74) are evenly arranged around the lower bearing (6) in a circumference.

9. The vibration-damping mechanical molecular pump according to claim 1, characterized in that: The elastic element (74) is a heat-conducting silicone pad with adhesive properties, and the elastic element (74) is adhesively fixed to the outer ring of the bearing (6).

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