Furnace tube

Abstract

The utility model discloses a furnace tube which comprises an outer furnace tube, an inner furnace tube, an upper furnace cover and a lower furnace door, the inner furnace tube is mounted in the outer furnace tube; the upper end and the lower end of the inner furnace tube are open, the upper end opening is provided with a connecting piece for hoisting connection, and the lower end opening is provided with a supporting table top for mounting a supporting base, so that the inner furnace tube can be downwards hoisted into the outer furnace tube from the top of the outer furnace tube to be mounted or upwards inserted into the outer furnace tube from the bottom of the outer furnace tube to be mounted. The inner furnace tube provided by the utility model adopts a penetrating type design, can be hoisted from the top and can also be supported from the bottom to be inserted upwards for installation, so that the installation modes of the inner furnace tube are diversified. And the carrier in the furnace tube is placed on the rotatable boat support base, and the position and the angle of the carrier can be adjusted in the furnace, so that a gas field and a thermal field in the closed chamber are uniform, and the overall process yield is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of solar energy, in particular to a furnace tube. Background Art

[0002] With the current spread of the photovoltaic industry, there are two types of vertical furnaces and horizontal furnaces in the production processes such as diffusion, oxidation, doping, PECVD, and LPCVD. The structures of both types require wafers to be loaded into specific carriers and transferred into the reaction chamber for processing. By introducing specific reaction gases, specific coating, diffusion, oxidation, and thin film deposition processes can be achieved on the wafers. In the existing two-layer furnace tube design, the two ends of the double-layer furnace tube are sealed by a base and a top wall respectively to form a straight-through cavity. The wafers to be processed are placed in the straight-through cavity, and the straight-through cavity is heated by the heating layer on the double-layer furnace tube or the furnace body is set as an inner and outer furnace body with the inner furnace cavity being closed.

[0003] For example, when installing the inner and outer furnace tubes in the prior art, due to the structural limitations of the inner furnace tube, such as in the existing patent CN116499251B, the top of the inner furnace tube is open and the bottom is closed and is equipped with heating elements. In order to avoid damaging the heating components, only the inner furnace tube can be hoisted from the top and inserted into the outer furnace tube from the top. However, if the height space at the existing processing site is limited, the hoisting difficulty during the installation of the inner furnace tube increases or normal installation cannot be carried out, greatly increasing the assembly difficulty. Summary of the Utility Model

[0004] In order to solve the technical problem that the inner furnace tube in the above-mentioned prior art can only be hoisted, the utility model provides a furnace tube.

[0005] The technical solution adopted by the utility model is as follows:

[0006] The utility model provides a furnace tube, including an outer furnace tube, an inner furnace tube, and a lower furnace door;

[0007] The inner furnace tube is installed inside the outer furnace tube; both the upper and lower ends of the inner furnace tube are open. A connecting piece for hoisting connection is provided at the upper end opening, and a supporting table surface is arranged at the lower end opening, so that the inner furnace tube can be hoisted downward from the top of the outer furnace tube and installed inside the outer furnace tube, or inserted into the outer furnace tube from the bottom of the outer furnace tube;

[0008] The lower furnace door is installed at the lower ends of the outer furnace tube and the inner furnace tube. The upper and lower ends of the accommodation space between the inner furnace tube and the outer furnace tube are sealed to form a sealed chamber, and heating sources for heating the sealed chamber are provided on the inner furnace tube and the outer furnace tube.

[0009] Further, an annular support flange is provided on the inner wall at the upper end of the inner furnace tube, and the support flange serves as the connecting member; an annular step protrudes from the inner wall at the lower end of the inner furnace tube or a support flange is provided to form the support tabletop.

[0010] In the first embodiment, the connecting member at the upper end of the inner furnace tube is connected to a connector for hoisting.

[0011] In the second embodiment, a support flange is further provided at a position on the outer wall of the outer furnace tube near the upper end face for installing a top support, and a hanging seat is connected between the top support and the connecting member of the inner furnace tube.

[0012] Further, a rotating device is included. The rotating device is provided with a plurality of carrier placement positions corresponding to the sealed chamber. When the rotating device rotates, it drives the carriers on the carrier placement positions to adjust their positions and angles in the sealed chamber.

[0013] Further, an upper furnace cover is installed at the upper end of the furnace tube. Central holes are provided in the middle of both the upper furnace cover and the lower furnace door. The central hole of the upper furnace cover can penetrate the upper end of the inner furnace tube or penetrate the hoisting member connecting the upper end of the inner furnace tube; the central hole of the lower furnace door can penetrate the lower end of the inner furnace tube.

[0014] Further, an outer sealing flange is provided on the outer wall at the upper end of the outer furnace tube, and an inner sealing flange is provided on the inner wall of the inner furnace tube; the upper furnace cover covers the upper end faces of the outer furnace tube and the inner furnace tube, and its outer edge is hermetically connected to the outer sealing flange, and the inner edge is connected to the inner sealing flange.

[0015] Further, a spherical protrusion is formed by protruding outward from the outer end face of the upper furnace cover away from the accommodation space.

[0016] Further, a cavity is provided inside the upper furnace cover around the periphery of the central hole, and a plurality of reinforcing ribs are provided in the cavity connecting between the upper and lower inner walls of the cavity.

[0017] Further, the lower layer plate, the outer layer plate and the inner layer plate that cooperate with the outer end face of the upper furnace cover to enclose the cavity are hollow layer plates, and the inside of the hollow layer plates serves as a water cooling channel or installs water cooling components.

[0018] Further, an annular heat insulation pad is connected to the support tabletop at the lower end of the inner furnace tube as a support base. The upper end face of the annular heat insulation pad is hermetically connected to the support tabletop, and the lower end extends beyond the lower end face of the inner furnace tube.

[0019] Further, a magneto - fluid sealing assembly is sealingly connected to the central hole of the lower furnace door. The rotating device includes: a boat support base disposed in the sealed chamber of the furnace tube and having a plurality of carrier placement positions, the boat support base being connected to the transmission shaft of the magneto - fluid sealing assembly; and a rotation power source located outside the sealed chamber and connected to the transmission shaft to drive the boat support base to rotate.

[0020] In the first embodiment, the boat support base includes:

[0021] A rotating base, the rotating base being located at the bottom of the sealed chamber and connected to the transmission shaft;

[0022] A hanging plate, vertically arranged on the rotating base, and a plurality of carrier placement positions for hanging the carriers are provided on the hanging plate.

[0023] In the second embodiment, the boat support base includes:

[0024] A rotating base, the rotating base having a plurality of carrier placement positions for the carrier boats to pass through or be placed, and being connected to the transmission shaft;

[0025] Multiple pairs of bearing members, each pair of bearing members being located at the two side edges of a carrier placement position and being foldably arranged on the rotating base;

[0026] When the bearing members are switched to the folded state, the carrier can pass through the corresponding carrier placement position of the bearing members from the bottom upwards; when the bearing members are switched to the unfolded state, the carrier can be placed on the bearing members.

[0027] Further, the magneto - fluid sealing assembly is annular, and a corresponding central hole is also provided in the middle, and it is divided into an inner - ring part, an outer - ring part, and an annular transmission shaft located between the inner - ring part and the outer - ring part; its inner - ring part is sealingly connected to the support base at the bottom of the inner furnace tube, the outer - ring part is sealingly connected to the inner edge of the lower furnace door, and the inner - ring part and the outer - ring part are rotationally sealed with the transmission shaft.

[0028] Further, the outer edge of the lower furnace door is sealingly connected to the step at the bottom of the outer furnace tube, and the inner edge is sealingly connected to the magneto - fluid assembly.

[0029] Preferably, a ring of gears or a pulley is provided on the outer wall surface of one end of the transmission shaft located outside the furnace tube.

[0030] Further, a plurality of furnace openings penetrating the lower furnace door are provided on the lower furnace door, the size and shape of the furnace openings match the size and shape of the side surface of the carrier, and a furnace cover is provided corresponding to each furnace opening, and the furnace cover is connected to a driving structure, and the driving structure is used to drive the furnace cover to open or close relative to the furnace opening.

[0031] Further, the furnace cover and / or the lower furnace door are of a spherical convex structure protruding downward.

[0032] Further, an internal heating source is provided on the inner side of the inner furnace tube, an external heating source is provided on the outer side of the outer furnace tube, the internal heating source is divided into multiple independent heating sections, and a heat dissipation device is correspondingly provided on the periphery of the external heating source and the internal heating source.

[0033] Compared with the prior art, the present utility model has the following advantages:

[0034] 1. The inner furnace tube adopts a through-type design, which can be hoisted from the top or inserted and installed upward from the bottom for support, making the installation method of the inner furnace tube diversified.

[0035] 2. The carrier is placed on a rotatable boat support base. When reaction gases are introduced into the sealed chamber or there are differences in the heating temperature, the carrier can adjust its position and angle in the furnace to make the gas field and thermal field inside the sealed chamber uniform, thereby improving the overall process yield.

[0036] 3. The lower furnace door and the upper furnace cover are designed as outwardly convex drum surfaces, with better pressure-bearing capacity and not easily deformed.

[0037] 4. The bottom is sealed by a magnetohydrodynamic component, which can place the driving component of the boat support base outside, and at the same time ensure that the sealed chamber passing through the reaction gas remains sealed.

[0038] 5. The lower furnace door is provided with multiple small furnace doors. When loading and unloading the carrier, a single small furnace door can be opened to avoid heat loss in the furnace and affect the processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0040] Figure 1 It is the front view in the first embodiment of the present utility model;

[0041] Figure 2 It is the A-A sectional view in the first embodiment of the present utility model;

[0042] Figure 3 It is the three-dimensional structure diagram from the first perspective in the first embodiment of the present utility model;

[0043] Figure 4 It is the top view structure diagram in the first embodiment of the present utility model;

[0044] Figure 5 It is the three-dimensional structure diagram from the second perspective in the first embodiment of the present utility model;

[0045] Figure 6 It is the front view in the second embodiment of the present utility model;

[0046] Figure 7 It is the sectional view taken along line A-A in the second embodiment of the present utility model;

[0047] Figure 8 It is the top view structure diagram in the second embodiment of the present utility model;

[0048] Figure 9 It is the three-dimensional structure diagram from the first perspective in the second embodiment of the present utility model;

[0049] Figure 10 It is the three-dimensional structure diagram from the second perspective in the second embodiment of the present utility model;

[0050] Figure 11 It is the three-dimensional structure diagram of the lower furnace door in the embodiment of the present utility model;

[0051] Figure 12 It is the structure diagram of the lower furnace door and the driving structure in the embodiment of the present utility model;

[0052] Figure 13 It is the three-dimensional structure diagram of the driving structure cooperating with the furnace cover in the embodiment of the present utility model;

[0053] Figure 14 It is the structure diagram of the driving structure cooperating with the furnace cover in the embodiment of the present utility model;

[0054] Figure 15 It is the structure diagram of the driving structure cooperating with the furnace tube in the embodiment of the present utility model;

[0055] Figure 16 It is the front view in the first embodiment of the boat support base of the present utility model;

[0056] Figure 17 It is the structure diagram in the second embodiment of the boat support base of the present utility model;

[0057] Figure 18 It is the three-dimensional structure diagram in the second embodiment of the boat support base of the present utility model;

[0058] Figure 19 It is the front view sketch of the heating source, heat dissipation device cooperating with the furnace tube in the embodiment of the present utility model;

[0059] Figure 20 It is Figure 19 the view from direction C of;

[0060] 1. Furnace tube;

[0061] 11. Outer furnace tube; 111. Support flange; 112. Outer sealing flange; 12. Inner furnace tube; 121. Inner sealing flange; 122. Annular step; 123. Annular heat insulation pad; 13. Sealed chamber;

[0062] 2. Upper furnace cover;

[0063] 21. Reinforcing rib; 22. Lower layer plate; 23. Inner layer plate; 24. Outer layer plate;

[0064] 3. Lower furnace door;

[0065] 31. Furnace opening; 311. First convex block; 312. Annular cavity;

[0066] 32. Furnace cover; 321. Second convex block; 322. Mounting plate; 323. First guide post; 324. Weight reduction hole;

[0067] 33. Driving structure; 331. Rotating driving device; 332. Coupling; 333. Rotating shaft; 334. Rotating plate; 335. Pushing and pulling driving device; 336. Mounting area; 337. Second guide post; 338. First electrical interface; 339. Second electrical interface; 340. Connecting plate; 341. First partition; 342. Second partition; 343. Third partition; 344. First accommodation space; 345. Second accommodation space;

[0068] 41. Connector; 42. Hanging seat; 81. Top bracket; 82. Bottom bracket;

[0069] 5. Boat support base; 50. Carrier; 591. Gear;

[0070] 51. Rotating base; 52. Fixed ring; 53. Hanging plate; 54. Hanging hook hole;

[0071] 501. Carrier placement position; 55. Bearing member; 551. Bearing fixing part; 552. Bearing movable part; 553. Rotating shaft;

[0072] 6. Magnetohydrodynamic component;

[0073] 61. Outer ring part; 62. Inner ring part; 59. Transmission shaft;

[0074] 71. External heat source; 72. Internal heat source; 73. Heat dissipation device; 74. Water cooling interface. Detailed implementation mode

[0075] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0076] The principle and structure of the present utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0077] Existing vertical furnaces generally have inner and outer double-layer furnace tubes. When installing the inner and outer furnace tubes, due to the structural limitations of the inner furnace tube, for example, in the existing patent CN116499251B, the top of the inner furnace tube is open and the bottom is closed, and a heating element is installed at the bottom. The inner furnace tube can only be hoisted at the top opening and inserted into the outer furnace tube from the top of the outer furnace tube. If the height space of the existing processing site is limited, the hoisting difficulty during the installation of the inner furnace tube increases or normal installation cannot be carried out, increasing the assembly difficulty.

[0078] In response to this, as Figure 1 、 2 shown, the present utility model proposes a furnace tube 1, including an outer furnace tube 11, an inner furnace tube 12, an upper furnace cover 2, a lower furnace door 3 and a rotating device;

[0079] Both the inner and outer furnace tubes are circular tubes. The upper and lower ends of the outer furnace tube 11 are open, and the inner furnace tube 12 is installed inside. After installation, a receiving space is formed between the outer wall of the inner furnace tube 12 and the inner wall of the outer furnace tube;

[0080] The upper and lower ends of the inner furnace tube 12 are open. An inner heating source 72 is provided inside the inner furnace tube 12. A connecting piece for hoisting connection is provided at the upper end opening, and a support table surface is provided at the lower end opening. The support table surface can install a support base, so that the inner furnace tube 12 can be hoisted downward from the top of the outer furnace tube 11 and installed inside the outer furnace tube 11, or inserted into the outer furnace tube 11 from the bottom of the outer furnace tube 11 for installation;

[0081] The upper furnace cover 2 and the lower furnace door 3 are respectively installed at the upper and lower ends of the outer furnace tube 11 and the inner furnace tube 12, and are used to seal the upper and lower ends of the receiving space between the inner furnace tube 12 and the outer furnace tube 11 to form a sealed chamber 13 (while a sealing component needs to be cooperated), so as to meet the requirement of vacuum pumping in the process; and an inner heating source 72 is provided inside the inner furnace tube 12, and an outer heating source 71 is provided outside the outer furnace tube 11. The inner and outer heating sources can heat the sealed chamber 13 of the furnace tube 1 through the tube walls of the inner and outer furnace tubes;

[0082] The rotating device is provided with a plurality of carrier placement positions corresponding to the sealed chamber. When the rotating device rotates, it drives the carriers on the carrier placement positions to adjust positions and angles in the sealed chamber, so as to make the wafers on the carriers be heated evenly.

[0083] By providing a through-type inner furnace tube in the utility model, a connector is provided at the top opening of the inner furnace tube, and a support table is provided at the bottom opening for installing a support base, enabling the installation of the inner furnace tube to be completed not only by hoisting from the top but also by inserting it from the bottom of the vertical furnace, which is more convenient. At the same time, the carrier in the furnace tube is placed on a rotatable rotating device, allowing the carrier to adjust its position and angle in the furnace, making the gas field and thermal field inside the sealed chamber uniform when reaction gas is introduced or the temperature difference during heating occurs, and improving the overall process yield.

[0084] In a specific embodiment, as Figure 2 shown, a support flange (specifically, the subsequent inner sealing flange 121) is provided on the inner wall at the upper end of the inner furnace tube 12. The support flange serves as a connector, and the inner furnace tube can adopt various hoisting and fixing methods. Now, two examples are given;

[0085] The first embodiment, as Figures 1 to 5 shown, a connector 41 for hanging is directly installed on the support flange (i.e., the inner sealing flange 121) by means of screw connection. The connector 41 can be directly connected to the hoisting equipment. At the same time, a screw hole is provided in the support part at the upper end of the inner heat source 72. The connecting foot of the connector 41 passes through the inner sealing flange 121 and a nut is screwed on, enabling the inner sealing flange 121 to be hung on the connecting foot of the connector 14. At the same time, the connecting foot is also threadedly connected to the support at the upper end of the inner heat source 72 to ensure that the entire inner furnace tube 12 is stably hung;

[0086] The second embodiment, as Figures 6 to 10 shown, a support flange 111 is provided on the outer wall of the outer furnace tube 11 near the upper end face for installing the top support 81. The cross beam of the top support 81 hangs above the inner furnace tube 12, and a hanging seat 42 is connected between the cross beam and the support flange (i.e., the inner sealing flange 121) of the inner furnace tube 12, enabling the upper end of the inner furnace tube 12 to be directly connected to the top support 81 of the furnace tube 1 through the hanging seat 42, that is, the inner furnace tube 12 is supported and hung by the flange of the furnace tube 1 itself.

[0087] Specifically, a support flange 111 is also provided on the outer wall of the outer furnace tube 11 near the lower end face for installing the bottom support 82. The bottom support 82 can be used to assist in fixing the peripheral components of the furnace tube, such as water-cooled pipes, etc., and can also play a role in supporting the entire furnace tube.

[0088] In a specific embodiment, there are also various setting methods for the support table at the lower end of the inner furnace tube 12. Now, two specific implementation methods are given;

[0089] The first embodiment, as Figure 2As shown, an annular step 122 protrudes from the inner wall at the lower end of the inner furnace tube 12. The lower side surface of the annular step 122 can serve as a support surface for installing or connecting a support base that enables the bottom of the inner furnace tube to be stably placed.

[0090] In the second embodiment, a support flange (not shown in the figure) is installed on the inner wall of the inner furnace tube 12 near the lower end face, and the support base is connected through the support flange so that the bottom of the inner furnace tube can be supported.

[0091] In a further embodiment of the above two implementations, as Figure 2 shown, an annular heat insulation pad 123 can be installed on the annular step or the support flange. The annular heat insulation pad 123 can serve as the support base. At the same time, the lower end face of the annular heat insulation pad 123 extends beyond the lower end of the inner furnace tube 12, which can not only play a supporting role but also play a heat insulation role.

[0092] Specifically, the annular heat insulation pad 123 is fixedly connected to the annular step or the support flange of the inner furnace tube 12 by a sealed connection method, that is, the connection between the annular heat insulation pad 123 and the inner furnace tube is in a sealed state.

[0093] In a specific embodiment, as Figure 2 shown, central holes are provided in the middle of the upper furnace cover 2 and the lower furnace door 3. The central hole of the upper furnace cover can penetrate the upper end of the inner furnace tube 12 or penetrate the hanging parts (such as connectors and hanging seats) connecting the upper end of the inner furnace tube; the central hole of the lower furnace door 3 can penetrate the lower end of the inner furnace tube 12.

[0094] Specifically, as Figure 2 shown, the structure and specific implementation manner of the sealed connection of the upper furnace cover 2 are as follows:

[0095] The outer end face of the upper furnace cover 2, which is away from the sealed chamber 13, protrudes outward to form a spherical bulge. Since the sealed chamber 13 needs to be evacuated, setting the outer end face of the upper furnace cover as an upwardly protruding spherical bulge can withstand greater pressure and prevent it from being sucked and deformed during internal evacuation.

[0096] The interior of the upper furnace cover 2 also has a lower layer plate 22, an outer layer plate 24, and an inner layer plate 23 that cooperate with the inner side of the outer end face to enclose a cavity. The lower layer plate 22, the outer layer plate 24, and the inner layer plate 23 are all annular, enclosing an annular cavity on the inner side of the outer end face of the upper furnace cover 2. Multiple reinforcing ribs 21 are arranged in the annular cavity, specifically between the upper and lower inner walls of the cavity. The reinforcing ribs 21 are plate-shaped and have multiple through holes on the plate surface. The reinforcing ribs 21 are arranged at annular intervals in the annular cavity.

[0097] Preferably, the lower layer plate 22, the outer layer plate 24 and the inner layer plate 23 are hollow layer plates. The interior of the hollow layer plates can be used as a water cooling channel or for installing water cooling components, such as installing water cooling pipes, etc., to prevent heat from escaping from the upper furnace cover and affecting the processing.

[0098] As Figure 2 shown, the specific implementation examples of the sealing method at the top of the furnace tube are as follows:

[0099] An outer sealing flange 112 is provided on the outer wall of the upper end of the outer furnace tube 11 (the outer sealing flange is located above the support flange). An inner sealing flange 121 is provided on the inner wall of the inner furnace tube 12 (this inner sealing flange can also be used as a connecting piece, that is, it seals and connects the upper furnace cover and is also used for hanging connection); the upper furnace cover 2 covers the upper end faces of the outer furnace tube and the inner furnace tube. A central hole is provided in the middle of the upper furnace cover 2, that is, the whole is in an annular shape. The outer edge of the upper furnace cover 2 buckles the upper end face of the outer furnace tube 11 and is hermetically connected to the outer sealing flange 112 of the outer furnace tube 11, and the inner edge buckles the upper end of the inner furnace tube 12 and is hermetically connected to the inner sealing flange 121 of the inner furnace tube 12.

[0100] It should be noted that the inner sealing flange is also used as a support flange, that is, the inner sealing flange is a connecting piece. The part of the inner sealing flange close to the inner wall of the inner furnace tube is hermetically connected to the upper furnace cover, and the part of the inner sealing flange close to the center of the inner furnace tube can pass through the connecting feet of the connector or the hanging seat.

[0101] The specific sealing connection methods of the inner and outer sealing flanges and the upper furnace cover are conventional sealing means in the prior art. For example, screws, gaskets, sealing rings, etc. are also required. Those skilled in the art can fully reproduce them, and no repeated description is made in the present invention.

[0102] Specifically, as Figures 11 to 15 shown, the specific implementation manner of the lower furnace door structure is as follows:

[0103] In the first embodiment, the lower furnace door 3 is a whole, with a central hole in the middle, and the entire lower furnace door is directly opened when opened.

[0104] And the lower furnace door 3 bulges downward to form a drum surface, that is, a spherical convex structure is provided. Similar to the function of the upper furnace cover, it can withstand greater pressure.

[0105] In the second embodiment, a central hole is provided in the middle of the lower furnace door 3. A plurality of small furnace doors, namely furnace openings 31, and a furnace cover 32 corresponding to each small furnace door are provided on the lower furnace door. The size and shape of the furnace opening 31 match the size and shape of the side of the carrier. Specifically, the shape of the furnace opening 31 can be made the same as the shape of the side of the carrier, and the size is slightly larger than the size of the side of the carrier, so that the carrier can just pass through the furnace opening 31. The furnace cover 32 is connected with a driving structure 33, and the driving structure 33 is used to drive the furnace cover 32 to open or close relative to the furnace opening 31, so that the small furnace door can be opened separately, reducing the heat loss in the furnace tube.

[0106] In this embodiment, both the lower furnace door 3 and the furnace cover 32 are preferably spherical convex structures protruding downward. This enables the lower furnace door and the furnace cover to withstand greater pressure, preventing the lower furnace door and the furnace cover from being sucked in and damaged when the enclosed space in the furnace tube is evacuated.

[0107] In order to enable the furnace cover 32 to better fit tightly with the corresponding furnace opening 31, improve the sealing performance, and reduce the heat loss in the furnace tube, a first convex block 311 is provided on the side of the furnace opening 31 facing the furnace cover 32. The first convex block 311 forms an annular cavity 312 around the circumference of the furnace opening 31, and the furnace opening 31 is completely located within the annular cavity 312.

[0108] A second convex block 321 is provided on the side of the furnace cover 32 matching the furnace opening 31 facing the furnace opening 31, and the second convex block 321 can be inserted into the annular cavity 312 in a matching manner. In order to further improve the sealing performance between the furnace cover 132 and the corresponding furnace opening 31, a high-temperature resistant sealing strip can also be provided around the second convex block 321.

[0109] Specifically, the driving structure 33 includes a rotational driving device 331, a coupling 332, a rotating shaft 333, a rotating plate 334, a pushing and pulling driving device 335, and a connecting plate 340;

[0110] Among them, the rotational driving device 331 is preferably a rotational motor, and the pushing and pulling driving device 335 is preferably a pushing and pulling motor.

[0111] On one side of the lower furnace door 3, a rotational driving device 331 is provided corresponding to each of the furnace openings 31. The rotating end of the rotational driving device 331 is connected to the rotating shaft 333 through the coupling 332. The end of the rotating shaft 333 is connected to a rotatable rotating plate 334, and the rotating plate 334 is located in front of the furnace opening 31. The coupling 332 can firmly connect the rotating end of the rotational driving device 331 and the rotating shaft 333, so that the rotating end of the rotational driving device 331 and the rotating shaft 333 rotate together and transmit torque and motion, ensuring that during the transmission of motion and power, the relative position between the rotating end of the rotational driving device 331 and the rotating shaft 333 remains unchanged to achieve reliable transmission. Moreover, the coupling 332 can also compensate for the offset between the rotating end of the rotational driving device 331 and the rotating shaft 333 to ensure the continuity and smoothness of transmission. Additionally, the coupling 332 can also mitigate shock and absorb vibration, reducing the wear and failure risks of the rotating end of the rotational driving device 331 and the rotating shaft 333, and improving the stability and reliability of the driving structure 33.

[0112] A push-pull driving device 335 is bolted to the middle of the rotating plate 334. The push-pull end of the push-pull driving device 335 penetrates through the rotating plate 334 and is connected to the furnace cover 32.

[0113] Specifically, one end of the connecting plate 340 of the driving structure 33 is provided with a first partition plate 341 and a second partition plate 342 at intervals, and a third partition plate 343 is provided at the other end of the connecting plate 340; a first accommodation space 344 is formed between the first partition plate 341, the second partition plate 342 and the corresponding part of the connecting plate 340; a second accommodation space 345 is formed between the second partition plate 342, the third partition plate 343 and the corresponding part of the connecting plate 340; and a through hole (not shown, the same throughout the text) is provided at the same position of the first partition plate 341, the second partition plate 342 and the third partition plate 343. Among them, the rotation driving device 331 is fixed on the side of the third partition plate 343 away from the second partition plate 342, and then the rotating end of the rotation driving device 331 passes through the through hole of the third partition plate 343 and is connected to the coupling 332. The coupling 332 is located in the second accommodation space 345; one end of the rotating shaft 333 is rotatably connected in the through hole of the first partition plate 341, and the other end of the rotating shaft 333 passes through the through hole of the second partition plate 342 and is connected to the coupling 332, and the rotating plate 334 is sleeved on the rotating shaft 333 located in the first accommodation space 344. In this way, the first accommodation space 344 and the second accommodation space 345 can effectively isolate the space between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, prevent accidental contact caused by mechanical failure or improper operation, reduce the potential injury risk, and protect the safety of the staff and equipment; and the first accommodation space 344 and the second accommodation space 345 can reduce the mutual influence between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, prevent the vibration and force generated when the rotation driving device 331 works from being transmitted between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, and improve the stability of the entire driving structure 33.

[0114] Among them, the lower furnace door further includes a control unit. The rotation driving device 331 is equipped with a first electrical interface 338, and the push-pull driving device 335 is equipped with a second electrical interface 139. Both the first electrical interface 338 and the second electrical interface 339 are used for electrically connecting to the control unit that controls the furnace door structure.

[0115] In this way, when it is necessary to open the furnace cover 32 relative to the furnace opening 31, the staff clicks "Start" on the operation panel corresponding to the control unit. Then, when the control unit receives the opening signal sent by the operation panel, it will first start the push-pull driving device 335, so that the push-pull driving device 335 controls the furnace cover 32 to move away from the corresponding furnace opening 31. When the furnace cover 32 is no longer in contact with the corresponding furnace opening 31, the control center turns off the push-pull driving device 335 and simultaneously starts the rotation driving device 331. At this time, the rotation driving device 331 controls the rotating plate 334 and the furnace cover 32 located on the rotating plate 334 to move towards the outer side away from the center of the furnace cover 32, so as to completely expose the corresponding furnace opening 31. Then the control unit turns off the rotation driving device 331. Then the staff inserts the carrier on which the wafer to be processed is placed into the furnace opening 31 and then places it in the furnace tube 1, and then performs the process, that is, introducing specific reaction gases into the furnace tube 1, so as to realize specific processes such as coating, diffusion, oxidation, and thin film deposition on the wafer to be processed.

[0116] When it is necessary to close the furnace cover 32 relative to the furnace opening 31, the staff clicks "Close" on the operation panel corresponding to the control unit. Then, when the control unit receives the closing signal sent by the operation panel, at this time the control unit will first start the rotation driving device 331, so that the rotation driving device 331 controls the rotating plate 334 and the furnace cover 32 located on the rotating plate 334 to move towards the inner side away from the center of the furnace cover 32 for resetting. Then the control center turns off the rotation driving device 331 and simultaneously starts the push-pull driving device 335, so that the push-pull driving device 335 controls the furnace cover 32 to approach the corresponding furnace opening 31 until the second bump 321 of the furnace cover 32 is inserted into the annular cavity 312 of the corresponding furnace opening 31 in a matching manner, so that the furnace cover 32 completely covers the corresponding furnace opening 31, and then the control unit turns off the push-pull driving device 335.

[0117] Wherein, a rectangular mounting plate 322 is further provided on one side of the furnace cover 32 facing the rotating plate 334. The push-pull end of the push-pull driving device 335 is connected to the middle of the mounting plate 322. The four sides of the mounting plate 322 are connected to the furnace cover 32 through the first guiding columns 323. The mounting plate 322 can share part of the weight and load between the furnace cover 32 and the push-pull driving device 335, enhancing the stability and reliability of the overall structure; and the mounting plate 322 can also absorb the vibration and impact force generated when the furnace cover 32 rotates, so as to reduce the damage to the furnace cover 32 and the push-pull driving device 335 and extend their service life; and the mounting plate 322 can be connected to the furnace cover 32 through the first guiding columns 323, so that the relative position between the furnace cover 32 and the push-pull driving device 335 can be better adjusted, ensuring the accuracy and stability of the rotation of the furnace cover 32.

[0118] Moreover, the mounting plate 322 is also provided with a plurality of weight-reducing holes 324, which can reduce the weight of the mounting plate 322 and enable the rotation driving device 331 and the push-pull driving device 335 to better control the movement of the furnace cover 32.

[0119] Among them, a rectangular mounting area 336 is provided in the middle of the rotating plate 334, and a push-pull driving device 335 is provided in the middle of the mounting area 336. The four sides of the mounting area 336 are all connected to the mounting plate 322 through second guiding columns 337.

[0120] In this embodiment, the second guiding columns 337 are exemplified by being installed at the four corners of the mounting area 336.

[0121] The second guiding columns 337 can ensure the precise alignment of the relative positions between the mounting plate 322 and the furnace cover 32. In this way, during the rotation of the furnace cover 32, the second guiding columns 337 can guide the mounting plate 322 and the furnace cover 32 to move along a predetermined path, preventing them from deviating from the correct position or shifting, which helps to maintain the stability and accuracy of the rotation of the furnace cover 32.

[0122] Such as Figure 2 、 16 As shown, in a specific embodiment, a magneto-fluid sealing assembly is hermetically connected to the central hole of the lower furnace door for the rotary sealing of the rotating device.

[0123] Furthermore, the rotary sealing rotating device specifically includes: a boat support base and a rotary power source. The boat support base is arranged in the sealed chamber of the furnace tube and is provided with a plurality of carrier placement positions. The inner edge at the bottom of the boat support base protrudes downward in a circle and is connected to the transmission shaft of the magneto-fluid sealing assembly, so that the boat support base rotates along with the rotation of the rotating shaft; the rotary power source is directly connected to the lower end of the transmission shaft of the magneto-fluid sealing assembly outside the sealed chamber of the furnace tube, providing a power source outside the furnace tube to avoid the influence of the high temperature inside the furnace on the normal operation of the rotary power source. That is, because the temperature inside the furnace tube is about 500° or above, the motor serving as the rotary power source cannot work normally at this temperature, and placing the rotary power source outside can ensure the normal operation of the rotating device.

[0124] By providing a rotatable boat support base 5, the position and angle of the carrier can be adjusted, so that when reaction gas is introduced into the sealed chamber or there is a temperature difference during heating, the gas field and thermal field inside the sealed chamber are uniform, improving the overall process yield.

[0125] Specifically, such as Figure 2As shown, the magnetohydrodynamic component 6 is located at the bottom of the furnace tube 1. The magnetohydrodynamic component 6 specifically includes an outer ring part 61, an inner ring part 62, and a transmission shaft 59 in a ring shape. The top surface of its outer ring part 61 is sealingly connected to the edge of the central hole of the lower furnace door 3, and a first sealing ring 611 can be seen in the figure; the top surface of the inner ring part 62 is sealingly connected to the lower end surface of the annular heat insulation pad 123 at the bottom of the inner furnace tube 12, and a second sealing ring 621 can be seen in the figure. The gap between the inner ring part 62 and the outer ring part 61 of the magnetohydrodynamic component 6 is an annular rotating sealing space, and the transmission shaft 59 penetrates through this rotating sealing space of the magnetohydrodynamic component 6;

[0126] The boat support base 5 surrounds the inner furnace tube 12 inside and has a plurality of carrier placement positions 501. The rotating base 51 at the bottom is in a ring shape and penetrates through the central hole of the lower furnace door. The transmission shaft 59 is connected to the bottom of the rotating base 51 below, penetrates through the rotating sealing space of the magnetohydrodynamic component 6, and the lower end of the transmission shaft 59 is located outside the furnace tube. A gear or pulley is provided at the lower end and is rotationally connected to the rotating power source. Thus, the rotating power source drives the entire boat support base 5 to rotate around the inner furnace tube 12 through the transmission shaft 59.

[0127] A magnetohydrodynamic fluid (not shown in the figure) is provided in the gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring part 62 of the magnetohydrodynamic component. Specifically, multiple annular grooves can be provided on the inner wall surface of the transmission shaft 59 or multiple annular grooves can be provided on the outer wall surface of the inner ring part of the magnetohydrodynamic component to place the magnetohydrodynamic fluid, forming multiple sealing rings in the gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring part 62 of the magnetohydrodynamic component 6;

[0128] The magnetohydrodynamic fluid is also arranged in the same way between the outer wall surface of the rotating shaft and the inner wall surface of the outer ring part of the magnetohydrodynamic component. Permanent magnets are provided inside both the outer ring part 61 and the inner ring part 62, and the magnetic poles serve as the inner wall of the rotating sealing space, enabling the magnetohydrodynamic fluid to surround the transmission shaft 59, so that the magnetohydrodynamic fluid forms multiple sealing rings in the gap between the outer wall surface of the transmission shaft and the inner wall surface of the outer ring part of the magnetohydrodynamic component.

[0129] Specifically, the outer edge of the lower furnace door 3 is connected to the step at the bottom of the outer furnace tube 11, and the inner edge of the lower furnace door 3 is sealingly connected to the outer ring part 61 of the magnetohydrodynamic component 6. That is, the annular heat insulation pad (support base) at the bottom of the inner furnace tube, the inner edge of the lower furnace door, and the transmission shaft (which can also be called a transmission tube) passing through the magnetohydrodynamic component are directly sealed through the magnetohydrodynamic component, sealing the lower end of the closed chamber 13 inside the furnace tube 1.

[0130] In a specific embodiment, a ring of gears 591 is provided on the outer wall surface where the transmission shaft 59 penetrates out of the rotating sealing space of the magnetohydrodynamic component 6, and the rotating power source drives the internal boat support base to rotate in the form of external motor gear transmission.

[0131] In other embodiments, a pulley can also be sleeved on the outer wall surface where the transmission shaft passes through the rotating seal space of the magnetic fluid assembly, and the rotating power source drives the transmission shaft through the pulley drive method.

[0132] As Figure 16 shown, the first embodiment of the boat support base is:

[0133] The boat support base includes: a rotating base 51, a fixing ring 52, and a hanging plate 53;

[0134] The rotating base 51 is disc-shaped, and multiple hanging plates are vertically and spacedly arranged in a circle along the annular edge of the upper surface of the base. The fixing ring 52 is connected to the top of the hanging plate 53 to fix the top of the hanging plate 53 and keep the hanging plate 53 in a stable vertical state; multiple hanging and taking positions (i.e., vehicle placement positions) are spacedly arranged along the length direction of the outer side surface of the hanging plate 53 for hanging the vehicle. That is, multiple vehicles 50 can be hung on the hanging plate 53 in the height direction. Specifically, the vehicles 50 can be hung at different heights of the boat support base, so that the vehicles can be hung in multiple layers along the entire height direction of the boat support base;

[0135] An annular transmission shaft 59 is connected in a circle along the inner edge of the rotating base 51, which can not only support the rotating base 51 but also drive the rotating base 51 to rotate around its center as the central axis. When the rotating base 51 rotates, the vehicle 50 located on the outer side surface of the hanging plate 53 rotates around the central axis of the base following the rotating base 51, so that the position and angle of the vehicle can be changed during the processing;

[0136] In a specific embodiment, a hook hole 54 is provided at the hanging and taking position of the hanging plate 53 to hang the vehicle. The upper part of the hook hole 54 is wider and the lower part is narrower, which is convenient for the hook of the vehicle to be hung in;

[0137] The vehicle 50 is a vertical quartz boat, and a hook is provided on it that can be snapped downward into the hook hole. The hook of the vertical quartz boat is snapped into the hook hole to hang the vertical quartz boat at the hanging and taking position.

[0138] Specifically, two hooks are provided on the side surface of each vertical quartz boat in the height direction, and every two hook holes on the hanging plate correspond to hanging one vertical quartz boat. In a specific embodiment, each hanging plate 53 can hang two vertical quartz boats in the height direction, so that the quartz boats can be arranged in two circles, upper and lower, around the boat support base, so that multiple heating forms such as layer heating, local heating, and overall heating can be performed on the multiple vertical quartz boats hung on the boat support base.

[0139] Specifically, the rotating base 51 can also be provided with a heat shield (not shown in the figure). The heat shield is provided with a plurality of through holes for passing through the hanging plate, and a water cooling component is arranged inside the heat shield (the specific water cooling source can be provided through the water cooling joint of the lower furnace cover). The setting of the heat shield does not affect the rotation of the rotating base 51 and the hanging of the hanging plate on the carrier, and at the same time can prevent the temperature at the position of the rotating base from being too high and affecting the stability.

[0140] As Figure 17 , 18 shown, the second embodiment of the boat support base is:

[0141] The boat support base includes: a rotating base 51, a plurality of pairs of bearing members 55. The rotating base 51 has a plurality of carrier placement positions 501 for the carrier boats to pass through or be placed; each pair of bearing members 55 is located on both side edges of a carrier placement position 501 and is foldably arranged on the rotating base 51. At the same time, each pair of bearing members 55 has a folded state and an unfolded state; if a carrier 50 is to be placed, each pair of bearing members 55 switches to the folded state, so that the carrier 50 can pass upward through the carrier placement position 501 from the bottom. When the bottom of the carrier 50 moves above the horizontal plane of the carrier placement position 501, each pair of bearing members 55 switches to the unfolded state, so that the carrier 50 is placed on the bearing members. Subsequently, if the carrier 50 is to be taken out, each pair of bearing members 55 switches to the folded state, so that the carrier 50 can pass through the carrier placement position 501 and be taken out downward from the furnace door, thereby realizing the loading and unloading of the carrier boat.

[0142] In each pair of bearing members 55, each bearing member 55 includes a bearing fixed part 551 and a bearing movable part 552. The bearing fixed part 551 is fixedly arranged on the rotating base 51, and the bearing movable part 552 is rotatably arranged on the bearing fixed part 551. In each bearing member 55, a rotating shaft 553 is provided on the bearing fixed part. The bearing movable part 552 includes two opposite first bearing rods and a second bearing rod connected to the two first bearing rods. The ends of the two bearing rods far from the second bearing rod are sleeved on both ends of the rotating shaft. It can be understood that the rotating base further includes a driving member (not shown in the figure), and the driving member is used to drive the rotation of the rotating shaft. The driving member can be a motor. And a self-locking support structure, such as motor self-locking (not shown in the figure), and the self-locking support structure is used to limit the rotation angle of the bearing movable part.

[0143] When each pair of bearing members 55 is in the folded state, the bearing movable part 552 in each bearing member 55 is arranged away from the carrier placement position 501. When each pair of bearing members 55 is in the unfolded state, the bearing movable part 552 in each bearing member 55 faces the carrier placement position and abuts against the carrier.

[0144] Taking the rotation angle of the load-bearing movable part in each load-bearing member 55 as 90 degrees as an example, when each pair of load-bearing members 55 is in the folded state, the load-bearing movable part 552 in each load-bearing member 55 is in the vertical state. At this time, the load-bearing movable part 552 in each load-bearing member 55 will not block the vehicle placement position 501 of the rotating base 51, so it will not interfere with the up and down movement of the vehicle boat. When each pair of load-bearing members is in the unfolded state, the load-bearing movable part in each load-bearing member is in the horizontal state. At this time, the load-bearing movable part in each load-bearing member extends into the vehicle placement position of the rotating base, so as to be able to bear the vehicle boat.

[0145] In this embodiment, among any two adjacent pairs of load-bearing members, a load-bearing fixed part belonging to one pair of load-bearing members is connected to a load-bearing fixed part belonging to the other pair of load-bearing members. In practical applications, among any two adjacent pairs of load-bearing members, the two mutually connected load-bearing fixed parts can be integrally formed. Such a design can reduce the number of parts and also save installation time.

[0146] In this embodiment, the vehicle placement position 501 is a notch provided on the rotating base 51. The shape and size of the vehicle placement position 501 are adapted to the shape and size of the vehicle boat, which can ensure that the vehicle boat can pass through the vehicle placement position smoothly. It can be understood that in other embodiments, the vehicle placement position can be a through hole provided on the rotating base.

[0147] As Figure 18 shown, the vehicles can be stacked in the height direction, that is, multiple vehicles can be placed on one vehicle placement position. At the same time, in order to prevent the vehicles from tipping over, a circle of vertically upward guardrails can be provided along the outer edge of the rotating base. Since the inner edge of the rotating base is close to the outer wall of the inner furnace tube, the outer wall of the inner furnace tube and the guardrails can ensure that the stacked vehicles will not tip over.

[0148] In a specific embodiment, the external heat source and the internal heat source are an integral whole, that is, the electric heating wire method is directly used to wind around the inner and outer furnace tubes to directly heat the sealed cavity.

[0149] As Figure 19 、 20 shown, in a preferred embodiment, both the external heat source 71 and the internal heat source 72 are arranged in a ring shape and are arranged along the height direction of the inner and outer furnace tubes. Specifically, they can be divided into multiple independent heating sections along the height direction of the furnace tubes. And the boat support base can also be correspondingly hung with vehicles in layers along the height direction, so as to achieve layered corresponding heating and improve the overall heating efficiency.

[0150] Or, the external heat source and the internal heat source are divided into multiple independent heating sections, and the multiple heating sections are arranged at intervals around the inner furnace tube and the outer furnace tube.

[0151] The internal and external heat sources can specifically adopt methods such as resistance wire heating furnace tubes, infrared heating, electromagnetic induction heating, etc.

[0152] In a further embodiment, a heat dissipation device 73 is arranged around the external heat source and the internal heat source to quickly and stably adjust the temperature of the reaction furnace tube. The heat dissipation device can be independent or integrated with the heating device. The heat dissipation device can be manually controlled or automatically controlled by collecting temperature signals, pressure signals, etc. Any method that can achieve automatic control is included within this range. The heat dissipation device 73 can adopt an air-cooled structure or a water-cooled structure. However, it is not limited to the above structures, and any mechanism with a heat exchange and heat dissipation function is included within this range.

[0153] Specifically, Figure 2 There are water-cooling joints 74 at the end face positions of the middle and outer furnace tubes 11, the upper furnace cover 2, and the lower furnace door 3 for supplying water to the heat dissipation device arranged inside them.

[0154] As shown in the figure, a water slip ring is provided at the position where the bottom of the furnace tube is located inside the bottom bracket for supplying water to the water-cooling pipeline (not shown in the figure).

[0155] In a specific embodiment, the internal and external furnace tubes are specifically quartz tubes or silicon nitride tubes. For the furnace tubes proposed by the present utility model, the internal furnace tube adopts a through-type design, which can be hoisted from the top or inserted and installed by supporting from the bottom upward, making the installation method of the internal furnace tube diversified.

[0156] The carrier inside the furnace tube is placed on a rotatable boat support base, so that the carrier can adjust its position and angle in the furnace, making the gas field and thermal field inside the sealed chamber uniform when reaction gas is introduced into the sealed chamber or when the temperature rises, and improving the overall process yield.

[0157] The lower furnace door and the upper furnace cover are designed as outwardly convex drum surfaces, with better pressure-bearing capacity and not easily deformed.

[0158] The bottom is sealed by a magnetohydrodynamic component, which can place the driving component of the boat support base outside, and at the same time ensure that the sealed chamber passing through the reaction gas remains sealed.

[0159] And the lower furnace door is provided with multiple small furnace doors. When loading and unloading the carrier, a single small furnace door can be opened to avoid heat loss in the furnace and affect the processing efficiency.

[0160] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present utility model. As used herein, unless the context clearly indicates otherwise, the singular forms are also intended to include the plural forms. In addition, it should also be understood that when the terms "comprising" and / or "including" are used in this specification, they specify the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0161] Unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present utility model. At the same time, it should be understood that, for the sake of convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

Claims

1. A furnace tube, characterized in that: It includes outer furnace tube, inner furnace tube and lower furnace door; The inner furnace tube is installed in the outer furnace tube; the inner furnace tube has openings at the upper and lower ends, a connecting piece for hanging and connecting is provided at the upper opening, and a supporting table is provided at the lower opening, so that the inner furnace tube can be hung from the top of the outer furnace tube downwards to be installed in the outer furnace tube, or inserted from the bottom of the outer furnace tube upwards to be installed in the outer furnace tube; The lower furnace door is installed at the lower ends of the outer furnace tube and the inner furnace tube, the upper and lower ends of the accommodating space between the inner furnace tube and the outer furnace tube are sealed to form a closed chamber, and the inner furnace tube and the outer furnace tube are provided with a heating source for heating the closed chamber.

2. The furnace tube according to claim 1, characterized in that The inner wall of the upper end of the inner furnace tube is provided with a circle of supporting flange, and the supporting flange is the connecting piece; the inner wall of the lower end of the inner furnace tube protrudes a circle of annular steps or is provided with a supporting flange to form the supporting table.

3. The furnace tube according to claim 1, characterized in that The connecting piece at the upper end of the inner furnace tube is connected to a connector for hoisting.

4. The furnace tube according to claim 1, characterized in that A bracket flange is also provided on the outer wall of the outer furnace tube near the upper end surface for installing a top bracket, and a hanging seat is connected between the top bracket and the connecting piece of the inner furnace tube.

5. The furnace tube according to claim 1, characterized in that It also includes a rotating device, which is used to set a plurality of carrier placement positions corresponding to the closed chamber. When the rotating device rotates, it drives the carriers on the carrier placement positions to adjust the position and angle in the closed chamber.

6. The furnace tube according to claim 5, characterized in that An upper furnace cover is installed at the upper end of the furnace tube, and a center hole is provided in the middle of the upper furnace cover and the lower furnace door. The center hole of the upper furnace cover can pass through the upper end of the inner furnace tube, or pass through the hanging piece connected to the upper end of the inner furnace tube; the center hole of the lower furnace door can pass through the lower end of the inner furnace tube.

7. The furnace tube according to claim 6, characterized in that An outer sealing flange is provided on the outer wall of the upper end of the outer furnace tube, and an inner sealing flange is provided on the inner wall of the inner furnace tube; the upper furnace cover covers the upper end surfaces of the outer furnace tube and the inner furnace tube, and its outer edge is sealedly connected to the outer sealing flange, and its inner edge is connected to the inner sealing flange.

8. The furnace tube according to claim 6, characterized in that The outer end surface of the upper furnace cover away from the accommodating space protrudes outward to form a spherical protrusion. The upper furnace cover is provided with a cavity around the central hole. The cavity is provided with a plurality of reinforcing ribs connected between the upper and lower inner walls of the cavity.

9. The furnace tube according to claim 8, characterized in that The lower plate, the outer plate and the inner plate that cooperate with the upper furnace cover and the outer end surface to form a cavity are hollow plates, and the hollow plates serve as water cooling channels or are equipped with water cooling components.

10. The furnace tube according to claim 6, characterized in that An annular heat-insulating pad is connected to the support table at the lower end of the inner furnace tube as a support base, the upper end surface of the annular heat-insulating pad is sealedly connected to the support table, and the lower end exceeds the lower end surface of the inner furnace tube.

11. The furnace tube according to claim 6, characterized in that A magnetic fluid sealing assembly is sealed and connected at the center hole of the lower furnace door, and the rotating device includes: a boat support base arranged in the closed chamber of the furnace tube and having a plurality of carrier placement positions, the boat support base is connected to the transmission shaft of the magnetic fluid sealing assembly; and a rotating power source located outside the closed chamber and connected to the transmission shaft to drive the boat support base to rotate.

12. The furnace tube according to claim 11, characterized in that The boat support base comprises: A rotating base, the rotating base is located at the bottom of the closed chamber and connected to the transmission shaft; A hanging plate is vertically arranged on the rotating base, and a plurality of carrier placement positions for hanging the carrier are provided on the hanging plate.

13. The furnace tube according to claim 11, characterized in that The boat support base comprises: A rotating base, the rotating base having a plurality of carrier placement positions for the carrier boat to pass through or be placed thereon, and connected to the transmission shaft; A plurality of pairs of bearing members, each pair of bearing members is located at two side edges of a carrier placement position and is foldably arranged on a rotating base; When the carrier is switched to a folded state, the carrier can pass upward from the bottom through a carrier placement position corresponding to the carrier; when the carrier is switched to an unfolded state, the carrier can be placed on the carrier.

14. The furnace tube according to claim 11, characterized in that The magnetic fluid sealing component is annular, and a corresponding center hole is also provided in the middle, and is divided into an inner ring part, an outer ring part, and an annular transmission shaft located between the inner ring part and the outer ring part; the inner ring part is sealedly connected to the support base at the bottom of the inner furnace tube, the outer ring part is sealedly connected to the inner edge of the lower furnace door, and the inner ring part and the outer ring part are rotationally sealed with the transmission shaft.

15. The furnace tube according to claim 11, characterized in that The outer edge of the lower furnace door is sealed to the step at the bottom of the outer furnace tube, and the inner edge is sealed to the magnetic fluid sealing assembly.

16. The furnace tube according to claim 11, characterized in that The outer wall surface of one end of the transmission shaft outside the furnace tube is provided with a circle of gears or a belt pulley.

17. The furnace tube according to claim 1, characterized in that The lower furnace door is provided with a plurality of furnace openings penetrating the lower furnace door, the size and shape of the furnace openings match the size and shape of the side surfaces of the carrier, each of the furnace openings is provided with a corresponding furnace cover, and the furnace cover is connected to a driving structure, and the driving structure is used to drive the furnace cover to open or close relative to the furnace opening.

18. The furnace tube according to claim 17, characterized in that The furnace cover and / or the lower furnace door are spherical protrusion structures protruding downward.

19. The furnace tube according to claim 1, characterized in that An inner heating source is provided on the inner side of the inner furnace tube, an outer heating source is provided on the outer side of the outer furnace tube, the inner heating source is divided into a plurality of independent heating sections, and heat dissipation devices are provided correspondingly around the outer heating source and the inner heating source.

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