EPD scanner tray and automatic scanner equipment

Abstract

The utility model relates to the technical field of semiconductor material manufacturing, and particularly discloses an EPD scanner tray and automatic scanner device.The EPD scanner tray comprises a detection disc, a rotating disc, a plurality of connecting rods and a plurality of moving piles; the detection disc is provided with a plurality of sliding grooves extending in the radial direction of the detection disc. The multiple sliding grooves are distributed at intervals in the circumferential direction. The moving pile is slidably arranged in the sliding groove. The rotating disc is rotatably arranged, and the rotating disc and the detection disc are coaxial; the other end of the connecting rod is rotatably connected with the movable pile; the connecting rods, the moving piles and the sliding grooves are in one-to-one correspondence. In the scheme, the plurality of moving piles can be driven to move in the sliding grooves by driving the rotating disc to rotate, so that the diameter of the clamping circular cavity defined by the plurality of moving piles is adjusted, the clamping circular cavity can adapt to wafers of various different sizes, the tray does not need to be replaced in the process of detecting the EPD of the single wafer, and the efficiency of detecting the EPD of the single wafer is effectively improved.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor material manufacturing, and particularly relates to an EPD scanner tray and an automatic scanner device. Background Art

[0002] During the production process of gallium arsenide crystals, when an EPD scanner is used to perform EPD detection on the grown gallium arsenide single crystal, due to the fact that in the actual production process, gallium arsenide crystals have different sizes such as 2 inches, 3 inches, 4 inches, 6 inches, and 8 inches, etc., therefore, each time when detecting single crystal wafers of different sizes, the tray on the EPD scanner needs to be replaced with a tray of the corresponding size for detection, resulting in a low efficiency of detecting the EPD of single crystal wafers. Utility Model Content

[0003] In view of this, the purpose of this application is to provide an EPD scanner tray and an automatic scanner device, which are used to solve the problem of low efficiency of the existing EPD scanner in detecting the EPD of single crystal wafers.

[0004] To achieve the above technical purpose, the first aspect of this application provides an EPD scanner tray, including: a detection disk, a rotating disk, a plurality of connecting rods, and a plurality of moving piles;

[0005] A plurality of sliding grooves extending along the radial direction of the detection disk are arranged on the detection disk;

[0006] The plurality of sliding grooves are circumferentially spaced apart;

[0007] The moving pile is slidably arranged in the sliding groove;

[0008] The rotating disk is rotatably arranged, and the rotating disk is coaxial with the detection disk;

[0009] One end of the connecting rod is rotatably connected to the rotating disk, and the other end is rotatably connected to the moving pile;

[0010] The plurality of connecting rods, the plurality of moving piles, and the plurality of sliding grooves correspond to each other one by one.

[0011] Further, it further includes: a support shaft;

[0012] The rotating disk is rotatably arranged on the support shaft;

[0013] The detection disk is fixed on the support shaft.

[0014] Further, it further includes an elastic member;

[0015] Both ends of the elastic member are respectively connected to the support shaft and the connecting rod.

[0016] Further, it further includes: a plurality of first coupling shafts and a plurality of second coupling shafts;

[0017] A plurality of the first coupling shafts are rotatably arranged on the rotating disk, and the plurality of the first coupling shafts are circumferentially spaced apart;

[0018] A plurality of the second coupling shafts are correspondingly and rotatably arranged on the moving piles;

[0019] One end of the connecting rod is rotatably connected to the first coupling shaft, and the other end is rotatably connected to the second coupling shaft.

[0020] Further, a positioning groove axially penetrating the detection disk is provided at the center of the detection disk.

[0021] Further, a sensor and a driving motor are further included;

[0022] The driving motor is drivingly connected to the rotating disk and is used to drive the rotating disk to rotate;

[0023] The sensor is arranged on the detection disk and is used to detect the size of the wafer;

[0024] The sensor is electrically connected to the driving motor;

[0025] The driving motor is further used to adjust the rotation amplitude of the rotating disk according to the size of the wafer.

[0026] Further, the top surface of the moving pile is an inclined surface inclined inward.

[0027] Further, a card slot for the wafer to be inserted is provided on the inner side surface of the moving pile.

[0028] Further, the inner side surface of the moving pile is an arc surface.

[0029] The second aspect of the present application provides an automatic scanner device, including: a scanner and the EPD scanner tray according to any one of the above;

[0030] The EPD scanner tray is used for placing the wafer;

[0031] The scanner is used to scan the wafer.

[0032] As can be seen from the above technical solutions, the present application provides an EPD scanner tray and an automatic scanner device. The EPD scanner tray includes: a detection tray, a rotating tray, a plurality of connecting rods, and a plurality of moving piles; a plurality of sliding grooves extending along the radial direction of the detection tray are provided on the detection tray; the plurality of sliding grooves are circumferentially spaced apart; the moving piles are slidably disposed in the sliding grooves; the rotating tray is rotatably provided and is coaxial with the detection tray; one end of the connecting rod is rotatably connected to the rotating tray, and the other end is rotatably connected to the moving pile; the plurality of connecting rods, the plurality of moving piles, and the plurality of sliding grooves correspond one by one.

[0033] In this solution, driving the rotation of the rotating tray can drive a plurality of moving piles to move in the sliding grooves, thereby adjusting the diameter of the clamping circular cavity formed by the plurality of moving piles, and being able to adapt to wafers of various different sizes, realizing that there is no need to replace the tray during the detection of single-wafer EPD, and effectively improving the efficiency of detecting single-wafer EPD. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0035] Figure 1 It is a top view three-dimensional view of the overall structure of an EPD scanner tray provided by an embodiment of the present application;

[0036] Figure 2 It is a bottom view three-dimensional view of an EPD scanner tray provided by an embodiment of the present application;

[0037] Figure 3 It is a schematic diagram of an EPD scanner tray provided by another embodiment of the present application;

[0038] Figure 4 It is a side view of the moving pile of an EPD scanner tray provided by another embodiment of the present application;

[0039] In the figure: 10, detection tray; 11, sliding groove; 12, positioning groove; 20, moving pile; 21, clamping groove; 30, rotating tray; 31, driving motor; 40, connecting rod; 51, support shaft; 52, first coupling shaft; 53, second coupling shaft; 60, sensor. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0040] The technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the specification of the present application without creative efforts belong to the scope protected by the present application.

[0041] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the embodiments of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0042] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0043] Please refer to Figure 1 and Figure 2 An EPD scanner tray provided in the embodiments of the present application includes: a detection disk 10, a rotating disk 30, a plurality of connecting rods 40, and a plurality of moving piles 20. The detection disk 10 can be used to place wafers for the scanner to perform EPD detection on the wafers. A plurality of chutes 11 extending along the radial direction of the detection disk 10 are provided on the detection disk 10. Specifically, the detection disk 10 can be in a disk shape. The plurality of chutes 11 are circumferentially spaced apart, and specifically can be circumferentially evenly distributed.

[0044] The moving piles 20 are slidably disposed in the chutes 11. The plurality of moving piles 20 enclose a clamping circular cavity for clamping wafers. The rotating disk 30 is rotatably provided, and the rotating disk is coaxial with the detection disk 10, that is, the axis lines of the rotating disk and the detection disk 10 overlap, ensuring that when the rotating disk 30 rotates, each moving pile 20 moves the same distance. One end of the connecting rod 40 is rotatably connected to the rotating disk 30, and the other end is rotatably connected to the moving pile 20; the plurality of connecting rods 40, the plurality of moving piles 20, and the plurality of chutes 11 correspond to each other one by one.

[0045] In this embodiment, the connecting rod 40 can be in the shape of a curved rod. When the rotating disk 30 rotates, it can drive the connecting rod 40 to move, and drive the moving pile 20 to slide along the sliding groove 11 through the connecting rod 40. Since the rotating disk 30 and the detection disk 10 are coaxially arranged, and the structures of the plurality of connecting rods 40 are the same, when the rotating disk 30 rotates, it will drive the plurality of moving piles 20 to slide equidistantly, so that the radius of the clamping circular cavity increases or decreases. During the actual detection process, the staff can drive the rotating disk 30 to rotate manually or electrically to adapt to wafers of different sizes; and after the wafer is placed in the clamping circular cavity, since the plurality of moving piles 20 slide equidistantly, the plurality of moving piles 20 can clamp the wafer and drive the wafer to move to the position of the center of the detection disk 10 at the same time, realizing automatic centering of the wafer, avoiding the situation that the scanner cannot scan the entire surface of the wafer because the wafer is not placed at the center of the detection disk 10, and reducing the error of the EPD detection data of the wafer.

[0046] In one embodiment, please refer to Figure 1 and Figure 2 , the EPD scanner tray further includes: a support shaft 51; the rotating disk 30 is rotatably arranged on the support shaft 51; the detection disk 10 is fixed on the support shaft 51.

[0047] The support shaft 51 is used for supporting. In application, the support shaft 51 can be arranged on the base.

[0048] In one embodiment, it further includes an elastic member (not shown in the figure); both ends of the elastic member are respectively connected to the support shaft 51 and the connecting rod 40. The elastic member is used to provide an elastic force to the connecting rod 40 to drive the moving pile 20 to move in the direction close to the center of the detection disk 10, so that the moving pile 20 can clamp the wafer more firmly.

[0049] Furthermore, it further includes: a plurality of first coupling shafts 52 and a plurality of second coupling shafts 53; the plurality of first coupling shafts 52 are rotatably arranged on the rotating disk 30, and the plurality of first coupling shafts 52 are circumferentially spaced apart; the plurality of second coupling shafts 53 are correspondingly and rotatably arranged on the moving piles 20; one end of the connecting rod 40 is rotatably connected to the first coupling shaft 52, and the other end is rotatably connected to the second coupling shaft 53.

[0050] In this embodiment, the plurality of first coupling shafts 52 are circumferentially and uniformly distributed on the rotating disk 30, and the distances from each first coupling shaft 52 to the center of the rotating disk 30 are equal, ensuring that the moving amplitudes of the respective moving piles 20 are the same during the rotation of the rotating disk 30.

[0051] As an implementation manner, a positioning groove 12 axially penetrating the detection disk 10 is provided at the center of the detection disk 10, which is convenient for quickly positioning the center of the wafer and ensuring that the wafer is at the position of the detection center of the detector.

[0052] In other embodiments, please refer toFigure 3 The EPD scanner tray may further include a sensor 60 and a drive motor 31. The drive motor 31 is drivingly connected to the rotating disk 30 and is used to drive the rotating disk 30 to rotate. The sensor 60 is disposed on the detection disk 10 and is used to detect the size of the wafer. The sensor 60 is electrically connected to the drive motor 31. The drive motor 31 is further used to adjust the rotation amplitude of the rotating disk 30 according to the size of the wafer.

[0053] Specifically, a processor for controlling the start and stop of the drive motor 31 is disposed in the drive motor 31. The sensor 60 is electrically connected to the processor. The sensor 60 may be an infrared sensor, a vision sensor, etc., as long as the sensor 60 can specifically identify the size of the wafer. After the sensor 60 identifies the size of the wafer, the drive motor 31 drives the rotating disk 30 to rotate according to the size of the wafer, so as to automatically drive the moving pile 20 to move to a position where the diameter of the clamping circular cavity is greater than the diameter of the wafer. After the sensor 60 identifies that the wafer is placed in the clamping circular cavity, the drive motor 31 drives the moving pile 20 to move, so that the diameter of the clamping circular cavity gradually decreases until the wafer is clamped.

[0054] In one embodiment, please refer to Figure 4 The top surface of the moving pile 20 is an inclined surface that slopes inward.

[0055] Specifically, in application, the wafer can be directly placed on the top surfaces of the plurality of moving piles 20. Since the top surface of the moving pile 20 is an inclined surface, the wafer can be stably placed and gradually falls as the moving pile 20 moves outward. It should be noted that the inner side of the moving pile 20 refers to the side close to the center of the detection disk 10.

[0056] Further, a clamping groove 21 for the wafer to be clamped into is provided on the inner side surface of the moving pile 20. During the process of the drive motor 31 driving the moving pile 20 to gradually move outward, the wafer will gradually fall along with the inclined surface until the wafer is clamped into the clamping groove 21. After that, the moving pile 20 can move slightly inward or remain stationary to stably place the wafer in the clamping circular cavity.

[0057] To adapt to the circular wafer, the inner side surface of the moving pile 20 is an arc surface.

[0058] The second aspect of the present application provides an automatic scanner device, including: a scanner and the EPD scanner tray according to any one of the above; the EPD scanner tray is used for placing the wafer; the scanner is used for scanning the wafer.

[0059] Specifically, the automatic scanner device may further include other existing components, as long as the automatic scanner device can specifically perform automatic scanning on the wafer.

[0060] The automatic scanner device provided in this embodiment can fix wafers of different sizes through the EPD scanner tray and can quickly position the wafers, thereby effectively improving the detection efficiency of the wafers.

[0061] The above are the preferred embodiments of the present application and are not intended to limit the present invention. Although the present application has been described in detail with reference to the examples, for those skilled in the art, they can still modify the technical solutions described in the foregoing examples, or perform equivalent replacements for some of the technical features. However, any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An EPD scanner tray, characterized in that: include: A detection disk (10), a rotating disk (30), a plurality of connecting rods (40) and a plurality of movable piles (20); The detection disk (10) is provided with a plurality of slide grooves (11) extending in a radial direction of the detection disk (10); The plurality of slide grooves (11) are distributed at intervals around the circumference; The movable pile (20) can be slidably disposed in the sliding groove (11); The rotating disk (30) is rotatably arranged, and the rotating disk is coaxial with the detection disk (10); One end of the connecting rod (40) is rotatably connected to the rotating disk (30), and the other end is rotatably connected to the moving pile (20); The plurality of connecting rods (40), the plurality of movable piles (20) and the plurality of sliding grooves (11) correspond one to one.

2. The EPD scanner tray according to claim 1, characterized in that: Also includes: Support shaft (51); The rotating disk (30) is rotatably disposed on the supporting shaft (51); The detection disk (10) is fixed on the support shaft (51).

3. The EPD scanner tray according to claim 2, characterized in that: Also included is an elastic member; Two ends of the elastic member are respectively connected to the support shaft (51) and the connecting rod (40).

4. The EPD scanner tray according to claim 1, characterized in that: Also includes: A plurality of first connecting shafts (52) and a plurality of second connecting shafts (53); A plurality of the first connecting shafts (52) are rotatably disposed on the rotating disk (30), and the plurality of the first connecting shafts (52) are distributed at intervals on the circumference; A plurality of the second connecting shafts (53) are rotatably arranged on the movable pile (20) in a one-to-one correspondence; One end of the connecting rod (40) is rotatably connected to the first connecting shaft (52), and the other end is rotatably connected to the second connecting shaft (53).

5. The EPD scanner tray according to claim 1, characterized in that: A positioning groove (12) is provided at the center of the detection disk (10) and penetrates the detection disk (10) in the axial direction.

6. The EPD scanner tray according to claim 1, characterized in that: Also includes a sensor (60) and a drive motor (31); The driving motor (31) is drivingly connected to the rotating disk (30) and is used to drive the rotating disk (30) to rotate; The sensor (60) is arranged on the detection plate (10) and is used to detect the size of the wafer; The sensor (60) is electrically connected to the drive motor (31); The driving motor (31) is also used to adjust the rotation amplitude of the rotating disk (30) according to the size of the wafer.

7. The EPD scanner tray according to claim 6, characterized in that: The top surface of the movable pile (20) is an inclined surface inclined inwardly.

8. The EPD scanner tray according to claim 7, characterized in that: The inner side surface of the movable pile (20) is provided with a snap-in groove (21) for snapping a wafer into.

9. The EPD scanner tray according to any one of claims 1 to 8, characterized in that: The inner side surface of the movable pile (20) is an arc surface.

10. An automatic scanner device, characterized in that: include: A scanner and an EPD scanner tray as claimed in any one of claims 1 to 9; The EPD scanner tray is used for placing wafers; The scanner is used to scan the wafer.

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