Stacking type sorting assembly and full-automatic silicon wafer sorting device

Abstract

The utility model discloses a stacking type sorting assembly and a full-automatic silicon wafer sorting device, relates to the technical field of automatic silicon wafer sorting, and aims to solve the problems that the width size of an existing stacking frame is generally set to be fixed, and when silicon wafers with different sizes need to be sorted, the stacking frame needs to be detached from the surface of a bottom plate, so that the sorting efficiency is high. And the other group of stacking frames are mounted through bolts. The device comprises a supporting mechanism and a sorting mechanism, part of the sorting mechanism is inserted into the supporting mechanism, and the sorting mechanism comprises a mounting bottom plate fixedly arranged on the top wall of the supporting mechanism and a movable groove formed in the top wall of the mounting bottom plate. According to the silicon wafer stacking device, the two sets of movable sleeve blocks are driven to transversely move through the two-way threaded rod, the two sets of stacking frames are driven to synchronously move when the movable sleeve blocks move, and therefore silicon wafers of different sizes can be stacked according to the silicon wafers of different sizes; and the distance between the two groups of stacking frames is adjusted to be matched with the size of the silicon wafer.

Description

Technical Field

[0001] The utility model relates to the technical field of automatic silicon wafer sorting, in particular to a stacking type sorting component and a fully automatic silicon wafer sorting device. Background Technique

[0002] Silicon wafers are important materials for manufacturing integrated circuits. By means of photolithography, ion implantation, etc. on silicon wafers, various semiconductor devices can be made. Silicon wafers are processed from silicon ingots. Through special processes, millions of transistors can be etched on silicon wafers, which are widely used in the manufacture of integrated circuits. The chips made of silicon wafers have amazing computing power, so they are widely used in various industrial productions and the computer field. At the same time, the development of science and technology continuously promotes the development of semiconductors. With the development of technologies such as automation and computers, during the production process of silicon wafers, the silicon wafers after photolithography need to be subjected to quality inspection. After the inspection, the qualified and unqualified silicon wafers are sorted and collected uniformly. Therefore, corresponding stacking type sorting components and fully automatic silicon wafer sorting devices are needed to screen and collect silicon wafers to improve the production efficiency of silicon wafers.

[0003] In the existing stacking type silicon wafer sorting device, a stacking rack is bolted inside to collect silicon wafers in a stacking manner. However, the width dimension of the stacking rack is usually set to be fixed, and only silicon wafers with matching sizes can be sorted and collected. When it is necessary to sort silicon wafers with different sizes, the stacking rack needs to be disassembled from the surface of the bottom plate and another set of stacking racks need to be bolted on again. The operation is rather cumbersome and inconvenient, affecting the use efficiency of the device. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a stacking type sorting component and a fully automatic silicon wafer sorting device to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solutions:

[0006] On the one hand, the present utility model provides a stacking sorting assembly, which is arranged on a workbench for sorting and includes a support mechanism and a sorting mechanism. A part of the sorting mechanism is inserted into the interior of the support mechanism. The sorting mechanism includes a mounting base plate fixed on the top wall of the support mechanism, a movable groove opened on the top wall of the mounting base plate, a bidirectional threaded rod rotatably connected to the inner wall of the movable groove, a sliding sleeve plate fixed on the inner wall of the movable groove, a movable sleeve block arranged inside the movable groove, a stacking rack fixed on the top wall of the movable sleeve block, and a grip rod rotatably connected to the outer side wall of the mounting base plate. The grip rod extends into the interior of the movable groove and is fixedly connected to the end of the bidirectional threaded rod. A threaded groove and an oval notch are formed inside the movable sleeve block. The threaded groove and the oval notch are arranged in a parallel relationship. The threaded groove is threadedly sleeved with the bidirectional threaded rod, and the sliding sleeve plate is slidably sleeved with the oval notch.

[0007] By adopting the above technical solution, the movable sleeve block can be pushed to move by rotating the grip rod, and the distance between adjacent stacking racks can be adjusted to adapt to silicon wafers of different sizes.

[0008] Preferably, the support mechanism includes a support base fixed below the mounting base plate and a sorting conveyor belt fixed on the outer side wall of the sorting conveyor belt. The bottom end of the support base is threadedly connected to the top wall of the workbench.

[0009] By adopting the above technical solution, the support base can provide a supporting effect on the bottom of the sorting mechanism.

[0010] Preferably, two groups of sliding grooves are opened on the top wall of the mounting base plate. The two groups of sliding grooves are symmetrically distributed on the vertical central axis of the mounting base plate. The bottom end of the stacking rack is fixedly connected with a sliding rod, and the bottom end of the sliding rod extends into the interior of the sliding groove and slides with the inner side of the sliding groove.

[0011] By adopting the above technical solution, when the stacking rack adjusts the distance, the sliding rod is driven to slide inside the sliding groove, improving the stability of the stacking rack during movement.

[0012] Preferably, the limiting mechanism is arranged above the sorting mechanism. The bottom end of the limiting mechanism is threadedly connected to the top surface of the mounting base plate. The bottom end of the testing mechanism is connected to the top surface of the workbench. The bottom end of the testing mechanism is in contact with the silicon wafer for quality inspection.

[0013] By adopting the above technical solution, the limiting mechanism can play a limiting role on the top end of the stacking rack during movement, and the testing mechanism can detect the quality of the silicon wafers during transmission.

[0014] Preferably, the limiting mechanism includes a fixed frame fixed on the top surface of the mounting base plate, a limiting groove opened on the bottom wall of the fixed frame, and a limiting movable block slidably arranged inside the limiting groove.

[0015] By adopting the above technical solution, when adjusting the distance, the stacking rack can drive the limit moving block to slide inside the limit groove.

[0016] Preferably, the bottom end of the limit moving block extends to the outside of the sorting mechanism, and the bottom end of the limit moving block is fixedly connected to the top surface of the stacking rack.

[0017] By adopting the above technical solution, it is possible to avoid the top end of the stacking rack from shaking during movement.

[0018] On the other hand, the present utility model provides a fully automated silicon wafer sorting device, including a workbench and the stacking type sorting assembly described in any one of the above, and the fully automated silicon wafer sorting device further includes a conveying mechanism and a testing mechanism. The conveying mechanism is arranged between adjacent sorting mechanisms for conveying and sorting silicon wafers. The testing mechanism is arranged above the conveying mechanism, and the bottom end of the testing mechanism is fixedly connected to the top surface of the workbench. The bottom end of the testing mechanism is in contact with the silicon wafer for quality inspection.

[0019] By adopting the above technical solution, the testing mechanism can detect the quality of multiple groups of silicon wafers and then transport them to the working area of the sorting mechanism through the conveying mechanism.

[0020] Preferably, the conveying mechanism includes a main conveyor belt fixedly arranged on the top surface of the workbench and auxiliary conveyor belts fixedly arranged on two outer sidewalls of the main conveyor belt. Both the main conveyor belt and the auxiliary conveyor belts are located between adjacent sorting mechanisms.

[0021] By adopting the above technical solution, the main conveyor belt transports the silicon wafers from the working area of the testing mechanism to the working area of the sorting mechanism, and then the silicon wafers are sorted by the auxiliary conveyor belts and collected inside the corresponding stacking racks.

[0022] Compared with the prior art, the beneficial effects of the present utility model are as follows: By continuously rotating the grip rod, the bidirectional threaded rod is driven to rotate. When the bidirectional threaded rod rotates, it drives two groups of moving sleeve blocks to move horizontally. When the moving sleeve blocks move, they drive two groups of stacking racks to move synchronously. Thus, according to silicon wafers of different sizes, the distance between the two groups of stacking racks can be adjusted to be adapted to the size of the silicon wafers, enabling the sorting and collection of silicon wafers of different sizes, improving the versatility of the sorting mechanism, and avoiding the cumbersome processes of disassembling and installing the stacking racks by the staff. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is the front view external structure schematic diagram of the present utility model;

[0024] Figure 2 is the partial enlarged structure schematic diagram of the present utility model;

[0025] Figure 3 It is an enlarged schematic view of part A of the present utility model;

[0026] Figure 4 It is an enlarged structural schematic view of the sorting mechanism of the present utility model;

[0027] Figure 5 It is an exploded structural schematic view of the connection between the sorting mechanism and the support mechanism of the present utility model;

[0028] Figure 6 It is a side structural schematic view of the sorting mechanism of the present utility model.

[0029] In the figure: 1. Support mechanism; 101. Support base; 102. Sorting conveyor belt; 2. Sorting mechanism; 201. Installation base plate; 202. Activity groove; 203. Bidirectional threaded rod; 204. Sliding sleeve plate; 205. Moving sleeve block; 206. Stacking rack; 207. Holding rod; 208. Thread groove; 209. Oval notch; 3. Limiting mechanism; 301. Fixed frame; 302. Limiting groove; 303. Limiting moving block; 4. Workbench; 5. Testing mechanism; 6. Sliding groove; 7. Sliding rod; 8. Conveying mechanism; 801. Main conveyor belt; 802. Sub-conveyor belt. Specific embodiments

[0030] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the protection scope of the present utility model.

[0031] The following is a further detailed description of the present utility model in conjunction with the attached Figure 1-6 drawings.

[0032] Embodiment 1

[0033] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5, an embodiment provided by the present utility model: a stacking sorting component and a fully automatic silicon wafer sorting device, including a workbench 4, a support mechanism 1 and a sorting mechanism 2. The support mechanism 1 is arranged above the workbench 4. The support mechanism 1 includes a support base 101 fixed below the installation base plate 201 and a sorting conveyor belt 102 fixed on the outer side wall of the sorting conveyor belt 102. The structural shape of the support base 101 is in the shape of a "T". The bottom end of the support base 101 extends to the inside of the workbench 4 and is threadedly connected to the bottom wall inside the workbench 4. The support base 101 can provide a supporting effect on the sorting mechanism 2. The sorting conveyor belt 102 is threadedly connected to the side wall of the support base 101 close to the conveying mechanism 8. The sorting conveyor belt 102 can transport the sorted silicon wafers into the inside of the sorting mechanism 2 for stacking. A part of the sorting mechanism 2 is inserted into the inside of the support mechanism 1. The sorting mechanism 2 includes an installation base plate 201 fixed on the top wall of the support mechanism 1. An installation groove is formed on the top wall of the support base 101. The installation base plate 201 is threadedly connected to the inner wall of the support base 101. Two side walls outside the installation base plate 201 are welded with convex blocks, and the convex blocks are symmetrically distributed on the vertical central axis of the installation base plate 201. The size of the installation groove formed inside the support base 101 is adapted to the installation base plate 201. An activity groove 202 is formed on the top wall of the installation base plate 201. The activity groove 202 is located at the horizontal central axis of the installation base plate 201. The shape of the activity groove 202 is rectangular. A bidirectional threaded rod 203 is rotatably connected to the inner wall of the activity groove 202 through a bearing. Two thread surfaces are arranged on the surface of the bidirectional threaded rod 203, and the two thread surfaces are designed in opposite directions. A sliding sleeve plate 204 is welded to the inner wall of the activity groove 202. The side structure of the sliding sleeve plate 204 is oval. The bidirectional threaded rod 203 and the sliding sleeve plate 204 are symmetrically distributed on the horizontal central axis of the activity groove 202. There are two moving sleeve blocks 205 arranged inside the activity groove 202. The two moving sleeve blocks 205 are symmetrically distributed on the vertical central axis of the activity groove 202. A threaded groove 208 and an oval notch 209 are formed inside the moving sleeve block 205. The threaded groove 208 and the oval notch 209 are arranged in a parallel relationship. The threaded groove 208 and the bidirectional threaded rod 203 are threadedly sleeved. By using the threaded structural relationship between the threaded groove 208 and the bidirectional threaded rod 203, when the bidirectional threaded rod 203 is continuously rotated, the two moving sleeve blocks 205 can be driven to move in opposite directions to each other. Therefore, the distance between the two moving sleeve blocks 205 can be adjusted. The shape of the oval notch 209 is adapted to the sliding sleeve plate 204. The sliding sleeve plate 204 and the oval notch 209 are slidably sleeved. The diameter size of the oval notch 209 is slightly larger than that of the sliding sleeve plate 204. Therefore, when the moving sleeve block 205 moves through the bidirectional threaded rod 203, the sliding sleeve plate 204 and the oval notch 209 form a sliding structure, which can provide support for the other end of the moving sleeve block 205 and improve the stability of the moving sleeve block 205 when moving.A stacking rack 206 is welded to the top wall of the movable sleeve block 205. Stacking racks 206 are welded to the top walls of both groups of movable sleeve blocks 205. When the movable sleeve block 205 moves, it can drive the two stacking racks 206 to adjust the distance between them, so as to adapt to silicon wafers of different sizes and specifications, improving the versatility of the sorting mechanism 2 during use. A grip rod 207 is rotatably connected to the outer side wall of the mounting base plate 201 through a bearing. One end of the grip rod 207 extends into the interior of the movable slot 202 and is welded to the end of the bidirectional threaded rod 203. When the grip rod 207 is continuously rotated counterclockwise or clockwise, it can drive the bidirectional threaded rod 203 to rotate synchronously, thereby driving the two movable sleeve blocks 205 to move horizontally and adjusting the distance between the stacking racks 206.,

[0034] Embodiment 2

[0035] Please refer to Figure 1 、 Figure 2 、 Figure 4 、 Figure 5 and Figure 6 Two sliding grooves 6 are formed in the top wall of the mounting base plate 201. The two sliding grooves 6 are located below the stacking rack 206 and are symmetrically distributed on the vertical central axis of the mounting base plate 201. The bottom ends of the two stacking racks 206 are both welded with sliding rods 7, and the bottom ends of the sliding rods 7 extend into the interior of the sliding grooves 6 and slide with the inner sides of the sliding grooves 6. Using the sliding structure formed by the sliding grooves 6 and the sliding rods 7, the distance between the two stacking racks 206 is adjusted, improving the stability of the stacking rack 206 during movement.

[0036] Embodiment 3

[0037] Please refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6, The limiting mechanism 3 is arranged above the sorting mechanism 2. The limiting mechanism 3 includes a fixed frame 301 fixedly arranged on the top surface of the mounting base plate 201. The structural shape of the fixed frame 301 is an inverted "concave" shape. The two bottom ends of the fixed frame 301 extend to the outside of the stacking rack 206 and are threadedly connected to the top wall of the mounting base plate 201. A size scale bar is arranged on the outer side wall of the fixed frame 301 for cooperating with the distance adjustment work of the stacking rack 206. A limiting groove 302 is opened on the side wall of the fixed frame 301 close to the stacking rack 206. The structural shape of the limiting groove 302 is rectangular. A limiting moving block 303 is welded at the position on the top wall of the stacking rack 206 corresponding to the limiting groove 302. The top end of the limiting moving block 303 extends into the inside of the limiting groove 302. Therefore, the limiting moving block 303 and the limiting groove 302 form a sliding structure. By using the sliding structure formed by the limiting moving block 303 and the limiting groove 302, a supporting effect is provided for the top end of the stacking rack 206, avoiding the problem that the top end of the stacking rack 206 is prone to shaking without support when the stacking rack 206 moves.

[0038] Embodiment 4

[0039] Please refer to Figure 1 and Figure 2 , The present utility model also provides an embodiment: a fully automated silicon wafer sorting device, including a workbench 4 and the stacking type sorting assembly of any one of the above. A fully automated silicon wafer sorting device further includes a conveying mechanism 8 and a testing mechanism 5. A conveying mechanism 8 is welded above the workbench 4. The conveying mechanism 8 includes a main conveyor belt 801 threadedly connected to the top surface of the workbench 4. The main conveyor belt 801 is located on the transverse central axis of the workbench 4 and is located between adjacent sorting mechanisms 2. The main conveyor belt 801 can be used to transport the detected silicon wafers to the sorting area. Secondary conveyor belts 802 are threadedly connected to the two outer side walls of the main conveyor belt 801. The secondary conveyor belts 802 are used to transport the silicon wafers to the inside of the corresponding stacking racks 206. The bottom end of the testing mechanism 5 is threadedly connected to the top surface of the workbench 4. The testing mechanism 5 is located above the conveying mechanism 8. The bottom end of the testing mechanism 5 is in contact with the silicon wafers for quality inspection.

[0040] Working principle: First, measure the size of the silicon wafers to be conveyed. After measuring the specific diameter data, hold the end of the grip rod 207 and continuously rotate it. When the grip rod 207 rotates, it drives the bidirectional threaded rod 203 to rotate. By using the threaded structural relationship between the bidirectional threaded rod 203 and the threaded groove 208 and the sliding structural relationship between the sliding sleeve plate 204 and the elliptical notch 209, the bidirectional threaded rod 203 drives the two groups of moving sleeve blocks 205 to move;

[0041] Next, when the moving sleeve block 205 moves, it drives the stacking rack 206 to move synchronously. According to the data measured in advance and the scale table set on the outer wall of the fixed rack 301, the distance between the two sets of stacking racks 206 is adjusted to an appropriate length;

[0042] Finally, the conveying mechanism 8 is turned on through the console. The main conveyor belt 801 transports the silicon wafers to the detection area of the testing mechanism 5. The testing mechanism 5 performs quality tests on multiple groups of silicon wafers. After the tests are completed, the main conveyor belt 801 continues to transport the silicon wafers to the working area of the sorting mechanism 2. The auxiliary conveyor belt 802 sorts the silicon wafers of different qualities and transports them to the corresponding sorting areas inside the sorting mechanism 2 respectively, and then transports them to the inner sides of the two sets of stacking racks 206 through the sorting conveyor belt 102, and finally completes the work.

[0043] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present utility model. Any reference signs in the claims should not be regarded as limiting the claimed rights.

Claims

1. A stacking type sorting assembly, which is arranged on a workbench (4) for sorting, characterized in that: The sorting components include: A support mechanism (1), wherein the support mechanism (1) is arranged above the workbench (4); A sorting mechanism (2), wherein part of the sorting mechanism (2) is inserted into the interior of a supporting mechanism (1), and the sorting mechanism (2) comprises a mounting base plate (201) fixedly mounted on the top wall of the supporting mechanism (1), a movable groove (202) provided on the top wall of the mounting base plate (201), a bidirectional threaded rod (203) rotatably connected to the inner wall of the movable groove (202), a sliding sleeve plate (204) fixedly mounted on the inner wall of the movable groove (202), a movable sleeve block (205) arranged inside the movable groove (202), and a stacking frame (205) fixedly mounted on the top wall of the movable sleeve block (205). 6) and a gripping rod (207) rotatably connected to the outer wall of the mounting base plate (201), the gripping rod (207) extending to the inside of the movable groove (202) and fixedly connected to the end of the bidirectional threaded rod (203), the inside of the movable sleeve block (205) is provided with a threaded groove (208) and an elliptical notch (209), the threaded groove (208) and the elliptical notch (209) are arranged in parallel, the threaded groove (208) and the bidirectional threaded rod (203) are threadedly sleeved, and the sliding sleeve plate (204) and the elliptical notch (209) are slidably sleeved.

2. A stacking sorting assembly according to claim 1, characterized in that: The support mechanism (1) comprises a support base (101) fixedly arranged below the mounting base plate (201) and a sorting conveyor belt (102) fixedly arranged on the outer side wall of the sorting conveyor belt (102); the bottom end of the support base (101) is threadedly connected to the top wall of the workbench (4).

3. A stacking sorting assembly according to claim 1, characterized in that: Two groups of sliding grooves (6) are provided on the top wall of the mounting base plate (201), and the two groups of sliding grooves (6) are symmetrically distributed on the vertical center axis of the mounting base plate (201). The bottom end of the stacking frame (206) is fixedly connected to a sliding rod (7), and the bottom end of the sliding rod (7) extends into the interior of the sliding groove (6) and slides with the inner side of the sliding groove (6).

4. A stacking sorting assembly according to claim 1, characterized in that: The sorting components also include: A limiting mechanism (3), wherein the limiting mechanism (3) is arranged above the sorting mechanism (2), and the bottom end of the limiting mechanism (3) is threadedly connected to the top surface of the mounting base plate (201).

5. A stacking type sorting assembly according to claim 4, characterized in that: The limiting mechanism (3) comprises a fixing frame (301) fixedly mounted on the top surface of the mounting base plate (201), a limiting groove (302) provided on the bottom wall of the fixing frame (301), and a limiting movable block (303) slidably arranged inside the limiting groove (302).

6. A stacking sorting assembly according to claim 5, characterized in that: The bottom end of the position-limiting movable block (303) extends to the outside of the sorting mechanism (2), and the bottom end of the position-limiting movable block (303) is fixedly connected to the top surface of the stacking frame (206).

7. A fully automated silicon wafer sorting device, characterized in that: The fully automated silicon wafer sorting device comprises a workbench (4) and the stacking sorting assembly according to any one of claims 1 to 6, and further comprises: A conveying mechanism (8), wherein the conveying mechanism (8) is arranged between adjacent sorting mechanisms (2) and is used for conveying and sorting silicon wafers; A testing mechanism (5), wherein the testing mechanism (5) is arranged above the conveying mechanism (8), the bottom end of the testing mechanism (5) is fixedly connected to the top surface of the workbench (4), and the bottom end of the testing mechanism (5) is in contact with the silicon wafer for quality inspection.

8. The fully automated silicon wafer sorting device according to claim 7, characterized in that: The conveying mechanism (8) comprises a main conveying belt (801) fixed on the top surface of the workbench (4) and an auxiliary conveying belt (802) fixed on two outer side walls of the main conveying belt (801); the main conveying belt (801) and the auxiliary conveying belt (802) are both located between adjacent sorting mechanisms (2).

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