Test head and test sorting machine

By introducing temperature detectors and power parts into the test head, real-time monitoring of the heat source temperature is achieved, and equipment or chip damage caused by abnormal heat source temperature is solved, which improves the safety and reliability of the test process.

CN223011219UActive Publication Date: 2025-06-24HANGZHOU CHANGCHUAN TECH CO LTD
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Patent Information

Application Number
CN202422034317.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-20
Publication Date
2025-06-24
Estimated Expiration
2034-08-20

AI Technical Summary

Technical Problem

The abnormal heat source of the test head heat increases, causing the temperature to be too high, which may damage the test equipment or chip.

Method used

A test head is designed, including a cold source, a heat source, a mounting assembly and a temperature detector. The moving parts are driven by the power parts to move, so that the temperature detector can be close to or away from the heat source detection position, monitor the heat source temperature in real time, and feedback the signal under abnormal conditions.

Benefits of technology

Effectively monitor the heat source temperature, promptly detect abnormal temperature rise, reduce the risk of equipment or chip damage, and improve the safety and reliability of the test process.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a test head and a test sorting machine. The test head comprises a cold source, a heat source, an installation assembly and a temperature detection piece. The heat source is arranged on the cold source and is in heat conduction connection with the cold source. The mounting assembly comprises a power piece and a moving piece, and the power piece is arranged on the cold source and connected with the moving piece. The temperature detection member is disposed on the moving member and has a detection position capable of detecting the temperature of the heat source. The moving part can move relative to the cold source under the control of the power part so as to drive the temperature detection part to be close to or away from the detection position. In practical application, the power part is controlled to drive the moving part to move, so that the temperature detection part moves to a detection position, and the temperature of the heat source is monitored. If the temperature of the heat source is abnormal, the temperature detection member can feed back a temperature abnormal signal, thereby facilitating timely maintenance by a worker, and reducing the risk of damage of a test device or a chip waiting test device caused by abnormal temperature rise of the heat source.
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Description

Technical Field

[0001] This application relates to the technical field of test equipment, and particularly to a test head and a test sorting machine. Background Art

[0002] The test sorting machine controls the temperature of the chip through the test head. The test head usually includes two parts, a cold source and a heat source. The cold quantity of the cold source is transferred to the heat source, and after the cold and heat confrontation with the heat of the heat source, the chip is temperature-controlled through the heat source. When the chip has a large heat generation power consumption, the power of the heat source is reduced, so that the cold quantity of the cold source is transferred to the chip to reduce the chip temperature. When the chip has a small heat generation power consumption, the power of the heat source is increased to prevent the chip from being too low due to excessive cold quantity of the cold source.

[0003] When testing high-power chips, indium sheets can be added at the bottom of the test head to improve the thermal conductivity between the chip and the test head. The melting point of the indium sheet is about 140 °C. If the heat source abnormally heats up, it will cause the indium sheet to melt and drip onto the chip or the test equipment, resulting in damage to the equipment or the chip. Utility Model Content

[0004] Based on this, it is necessary to provide a test head and a test sorting machine for the problem that when the heat source of the test head abnormally heats up, the temperature of the test head becomes too high, resulting in damage to the equipment or the chip.

[0005] In a first aspect, this application provides a test head, which includes:

[0006] A cold source;

[0007] A heat source, arranged on the cold source and thermally connected to the cold source;

[0008] An installation component, including a power component and a moving component, the power component is arranged on the cold source and connected to the moving component; and

[0009] A temperature detection component, arranged on the moving component and having a detection position capable of detecting the temperature of the heat source; the moving component can move relative to the cold source under the control of the power component to drive the temperature detection component to approach or move away from the detection position.

[0010] In some embodiments, the heat source has an assembled state assembled on the cold source and a separated state separated from the cold source. When the temperature detection component is at the detection position, the heat source is in the assembled state;

[0011] During the process of the heat source switching from the separated state to the assembled state, the power component drives the temperature detection component to move from a position far away from the detection position towards the detection position via the moving component.

[0012] In some embodiments, the power member includes a pushing member movably disposed on the cold source. The pushing member has a force-receiving end and an acting end, and the acting end is connected to the moving member;

[0013] During the process of the heat source switching from the separated state to the assembled state, a force that promotes the movement of the pushing member can be applied to the force-receiving end, so that the pushing member pushes the moving member to move and drives the temperature detecting member to approach the detection position.

[0014] In some embodiments, the cold source has a first mounting surface and a second mounting surface disposed opposite to each other, and a mounting hole penetrating the first mounting surface and the second mounting surface. The first mounting surface is used for mounting the heat source. The pushing member is movably disposed along the mounting hole, and the moving member is movably disposed along the second mounting surface in a direction intersecting the moving direction of the pushing member;

[0015] The acting end of the pushing member extends out of the second mounting surface and is connected to the moving member. When the pushing member moves along the mounting hole, the force-receiving end of the pushing member can switch between the state of extending out of the first mounting surface and retracting into the mounting hole.

[0016] In some embodiments, a mating groove is provided on the moving member, and the mating groove has an inclined inner wall surface; the acting end has an inclined outer wall surface, and the inclined inner wall surface is in contact with the inclined outer wall surface. When the pushing member moves along the mounting hole, the inclined outer wall surface and the inclined inner wall surface move relative to each other in the inclined direction to push the moving member to move.

[0017] In some embodiments, a limiting groove is formed on the hole wall of the mounting hole, and a boss is provided on the pushing member; the boss is limited in the limiting groove and is movably disposed along the limiting groove in the moving direction of the pushing member.

[0018] In some embodiments, the power member further includes an elastic force applying member, and the elastic force applying member is connected to the moving member and is used for applying an elastic force that promotes the moving member to drive the temperature detecting member away from the detection position.

[0019] In some embodiments, the mounting assembly further includes a fixing member, and the fixing member is fixedly disposed on the cold source and has a first guiding portion;

[0020] A second guiding portion is provided on the moving member, and the first guiding portion is matched with the second guiding portion and can move relative to each other in the moving direction of the moving member.

[0021] In some embodiments, the heat source has a pressing surface disposed away from the cold source. When located at the detection position, the temperature detection member is adhesively connected to an area of the heat source outside the pressing surface.

[0022] In some embodiments, a metal sheet is provided on the pressing surface.

[0023] In a second aspect, the present application provides a test and sorting machine, including a feeding device, a material transfer mechanism, a material receiving device, a test seat, a downward pressing mechanism, and a test head as described in the above embodiments. The test head is installed on the downward pressing mechanism, and the downward pressing mechanism is used to drive the test head away from or close to the test seat, so that the test head acts on the device to be tested located on the test seat. The material transfer mechanism is used to transfer the device to be tested provided by the feeding device to the test seat, and is used to transfer the tested device from the test seat to the material receiving device for recycling.

[0024] In actual application of the above test head and test and sorting machine, by controlling the power member to drive the moving member to move, the temperature detection member is moved to the detection position to monitor the temperature of the heat source. If the temperature of the heat source is abnormal, the temperature detection member can feedback a temperature abnormal signal, which is convenient for the staff to repair in time and reduces the risk of damage to the test equipment or the chip waiting for testing due to abnormal temperature rise of the heat source. Description of the Drawings

[0025] By reading the detailed description of the preferred embodiments below, various other advantages and benefits will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present application. Moreover, in all the drawings, the same reference numerals are used to represent the same components. In the drawings:

[0026] Figure 1 It is a schematic external view of the test head for some embodiments.

[0027] Figure 2 It is a schematic structural view of the heat source in the test head for some embodiments in an assembled state.

[0028] Figure 3 It is a schematic structural view of the heat source in the test head for some embodiments in a separated state.

[0029] Figure 4 It is an assembled schematic view of the mounting component and the temperature detection member in the test head for some embodiments.

[0030] Figure 5 It is a partial schematic view of the cold source in the test head for some embodiments.

[0031] Figure 6 It is a schematic structural view of the moving member for some embodiments.

[0032] Figure 7 Structural schematic diagram of the pusher for some embodiments.

[0033] Figure 8 Structural schematic diagram of the fixing member for some embodiments.

[0034] The reference numerals in the accompanying drawings in the specific implementation manners are as follows:

[0035] 100, test head; 10, cold source; 10a, first mounting surface; 10b, second mounting surface; 10c, mounting hole; 10d, limiting groove; 10e, flow channel; 20, heat source; y, pressing surface; W1, assembled state; W2, separated state; 30, mounting assembly; 31, power member; 31a, pusher; a1, stress receiving end; a2, acting end; a3, boss; m1, inclined outer wall surface; 31b, elastic force applying member; 32, moving member; 32c, mating groove; m2, inclined inner wall surface; 32d, second guiding portion; 33, fixing member; 33e, first guiding portion; 40, temperature detecting member. Specific implementation manners

[0036] To make the above objects, features and advantages of the present application more obvious and understandable, the following will describe the specific implementation manners of the present application in detail with reference to the accompanying drawings. Many specific details are set forth in the following description in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0037] In the description of the present application, it should be understood that if there are terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., the orientation or positional relationship indicated is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0038] In addition, if there are terms such as "first" and "second", they are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0039] In this application, unless otherwise clearly defined and limited, if used, terms such as "installed", "connected", "linked", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0040] In this application, if used, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature is at a higher horizontal level than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature is at a lower horizontal level than the second feature.

[0041] It should be noted that if used, when an element is referred to as "fixed to" or "disposed on" another element, it may be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation.

[0042] In response to the problems mentioned in the background art, the embodiments of this application first propose a test head.

[0043] Referring to Figure 1 , the test head 100 provided by the embodiments of this application includes a cold source 10, a heat source 20, a mounting assembly 30, and a temperature detection component 40. The heat source 20 is disposed on the cold source 10 and is in heat conduction connection with the cold source 10. The mounting assembly 30 includes a power component 31 and a moving component 32. The power component 31 is disposed on the cold source 10 and is connected to the moving component 32. The temperature detection component 40 is disposed on the moving component 32 and has a detection position capable of detecting the temperature of the heat source 20. The moving component 32 can move relative to the cold source 10 under the control of the power component 31 to drive the temperature detection component 40 to approach or move away from the detection position.

[0044] The cold source 10 is used to provide cooling capacity to the test head 100, and a flow channel 10e for circulating a cooling medium can be provided therein. The cooling medium can be cooling water, fluorinated liquid, etc. The heat source 20 is used to provide heat to the test head 100, and heating devices such as electric heating wires and electric heating sheets for generating heat by heating can be provided therein. Preferably, the heat source 20 is arranged on one side of the cold source 10.

[0045] Understandably, the test head 100 has a pressing surface y pressed against the device to be tested, and the temperature of the test head 100 is transmitted to the device to be tested through the pressing surface y to adjust the temperature of the device to be tested. The pressing surface y can be arranged on the heat source 20 or the cold source 10. Taking the pressing surface y arranged on the heat source 20 as an example, the cold source 10 transfers the cooling capacity to the heat source 20, and the heat and the cooling capacity confront each other thermally at the heat source 20, finally making the pressing surface y reach the required temperature.

[0046] The heat source 20 is thermally connected to the cold source 10. They can be in direct thermal contact with each other, or an intermediate heat-conducting substance can be provided. The heat source 20 and the cold source 10 can be connected in a fastening connection, a clamping connection, etc. Preferably, they are detachably assembled for easy maintenance.

[0047] The mounting assembly 30 includes a moving member 32 and a power member 31 for controlling the movement of the moving member 32. The temperature detection member 40 is mounted on the moving member 32 and can move with the moving member 32 to approach or move away from a detection position capable of detecting the temperature of the heat source 20. The temperature detection member 40 can be a contact temperature sensor or a non-contact temperature sensor, that is, the temperature detection member 40 located at the detection position can be in direct contact with the heat source 20 or there can be a gap between it and the heat source 20. The movement trajectory of the moving member 32 can be a straight trajectory, a curved trajectory, etc.

[0048] For the above-mentioned test head 100, in actual application, by controlling the power member 31 to drive the moving member 32 to move, the temperature detection member 40 is moved to the detection position to monitor the temperature of the heat source 20. If the temperature of the heat source 20 is abnormal, the temperature detection member 40 can feedback a temperature abnormal signal, which is convenient for the staff to repair in time and reduces the risk of damage to the test equipment or the chip waiting for the test device caused by the abnormal temperature rise of the heat source 20.

[0049] Moreover, compared with the solution of installing the temperature detection member 40 at the cold source 10 to detect the temperature of the cold source 10 and indirectly feedback the temperature of the heat source 20, in the embodiment of the present application, the temperature detection member 40 directly detects the temperature of the heat source 20, which can timely detect the abnormal temperature rise of the heat source 20 and further reduce the risk of damage to the test equipment or the chip waiting for the test device.

[0050] In addition, by arranging the temperature detection member 40 to be movable through the mounting assembly 30, changing the position of the temperature detection member 40 can avoid the disassembly and assembly of the heat source 20 and the cold source 10, which is convenient for the assembly of the test head 100.

[0051] In some embodiments, with reference to Figure 2 and Figure 3 , the heat source 20 has an assembled state W1 assembled to the cold source 10 and a separated state W2 separated from the cold source 10. When the temperature detection member 40 is at the detection position, the heat source 20 is in the assembled state W1. During the process of the heat source 20 switching from the separated state W2 to the assembled state W1, the power member 31 drives the temperature detection member 40 to move from a position away from the detection position towards the detection position via the moving member 32.

[0052] In actual application, during the process of assembling the heat source 20 to the cold source 10, under the combined action of the power member 31 and the moving member 32, the temperature detection member 40 can move from a position away from the detection position towards the detection position. When the heat source 20 is assembled in place, the temperature detection member 40 reaches the detection position. In this way, the assembly time of the test head 100 can be shortened and the production efficiency can be improved.

[0053] Specifically, a proximity switch and an induction sheet can be arranged on the test head 100. The proximity switch can be arranged on the cold source 10, and the induction sheet can be arranged on the heat source 20. When the proximity switch changes from not detecting the induction sheet to detecting the induction sheet, it indicates that the heat source 20 is about to be assembled to the cold source 10. At this time, the power member 31 acts, drives the moving member 32 to move, and drives the temperature detection member 40 to move towards the detection position.

[0054] Among them, the power member 31 can be a power device such as a cylinder or a motor that can drive the moving member 32 to move linearly. Of course, the power member 31 can also adopt the solution in the following embodiments.

[0055] Specifically in the embodiment, with reference to Figure 2 , Figure 3 and Figure 4 , the power member 31 includes a pushing member 31a movably arranged on the cold source 10. The pushing member 31a has a force-receiving end a1 and an acting end a2, and the acting end a2 is connected to the moving member 32. During the process of the heat source 20 switching from the separated state W2 to the assembled state W1, a force that can cause the pushing member 31a to move can be applied to the force-receiving end a1, so that the pushing member 31a pushes the moving member 32 to move and drives the temperature detection member 40 to approach the detection position.

[0056] In actual application, during the process of assembling the heat source 20 to the cold source 10, the heat source 20 can synchronously push the pushing member 31a to move, and then push the moving member 32 to move, and drive the temperature detection member 40 to move towards its detection position. When the heat source 20 is installed in place, the temperature detection member 40 synchronously reaches the detection position.

[0057] In this way, the position switching of the temperature detection component 40 is linked to the state switching of the heat source 20. During the assembly process of the heat source 20, the displacement generated pushes the pushing component 31a to move, and then pushes the moving component 32 to move. Without the need to provide other power sources, the structure of the power component 31 can be simplified, and the manufacturing cost of the test head 100 can be reduced.

[0058] Among them, the pushing component 31a can be rod-shaped, block-shaped, etc. The moving component 32 can be, but is not limited to, a moving rod. One end of it is connected to the acting end a2 of the pushing component 31a, and the temperature detection component 40 is arranged at the other end. As an example, the pushing component 31a can move in the height direction relative to the cold source 10. When the heat source 20 is installed on the cold source 10 from bottom to top, the heat source 20 can push the pushing component 31a to move from bottom to top. The acting end a2 of the pushing component 31a can be connected to the moving component 32 through a rope and a fixed pulley. When the pushing component 31a moves from bottom to top, under the action of the rope, the moving component 32 moves from top to bottom, so that the temperature detection component 40 moves downward to the detection position opposite to the heat source 20. Of course, the cooperation method of the pushing component 31a and the moving component 32 can also adopt the scheme in the following embodiments, and those skilled in the art can also make conventional settings according to conventional means.

[0059] In some embodiments, in combination with Figure 2 、 Figure 3 and Figure 5 , the cold source 10 has a first mounting surface 10a and a second mounting surface 10b arranged opposite to each other, and a mounting hole 10c penetrating the first mounting surface 10a and the second mounting surface 10b. The first mounting surface 10a is used for mounting the heat source 20. The pushing component 31a is movably arranged along the mounting hole 10c, and the moving component 32 is movably arranged along the second mounting surface 10b in a direction intersecting the moving direction of the pushing component 31a. The acting end a2 of the pushing component 31a extends out of the second mounting surface 10b and is connected to the moving component 32. When the pushing component 31a moves along the mounting hole 10c, the stress end a1 of the pushing component 31a can switch between the states of extending out of the first mounting surface 10a and retracting into the mounting hole 10c.

[0060] In Figure 2 and Figure 3 the illustrated orientation, the pushing component 31a moves up and down along the mounting hole 10c, and the moving component 32 moves left and right along the second mounting surface 10b. The upper end of the pushing component 31a is the acting end a2, and the lower end is the stress end a1. When the heat source 20 is installed on the cold source 10 from bottom to top, the heat source 20 pushes the stress end a1 extending out of the first mounting surface 10a to retract into the mounting hole 10c. During this process, the acting end a2 moves from bottom to top and pushes the moving component 32 to move from left to right, so that the temperature detection component 40 moves closer to the heat source 20 from left to right. When the heat source 20 is installed in place, the stress end a1 is completely retracted into the mounting hole 10c and no longer affected by the heat source 20, and the temperature detection component 40 reaches the detection position.

[0061] At this time, the movement of the pushing member 31a is restricted by the mounting hole 10c, so that the pushing member 31a moves more smoothly. Moreover, the pushing member 31a is arranged inside the mounting hole 10c without being exposed outside, making the test head 100 more aesthetically pleasing. In addition, the moving direction of the moving member 32 intersects with the moving direction of the pushing member 31a, which can reduce the space required for the test head 100 in the up-and-down direction.

[0062] There are various solutions for specifically implementing the scheme of moving the acting end a2 up and down to push the moving member 32 to move left and right, and those skilled in the art can make conventional settings. For example, a swing rod is rotatably mounted at the acting end a2 through a rotating shaft, and the swinging end of the swing rod is connected to the moving member 32. When the acting end a2 moves up and down, the swing rod can be driven to swing, and then the moving rod can be driven to move left and right. Of course, the solution in the following embodiment can also be adopted.

[0063] In a specific embodiment, in combination with Figure 3 、 Figure 6 and Figure 7 , a mating groove 32c is provided on the moving member 32. The mating groove 32c has an inclined inner wall surface m2, and the acting end a2 has an inclined outer wall surface m1. The inclined inner wall surface m2 is in contact with the inclined outer wall surface m1. When the pushing member 31a moves along the mounting hole 10c, the inclined outer wall surface m1 and the inclined inner wall surface m2 move relative to each other in the inclined direction to push the moving member 32 to move.

[0064] The acting end a2 is inserted into the mating groove 32c, and its inclined outer wall surface m1 is in contact with the inclined inner wall surface m2 of the mating groove 32c. When the pushing member 31a moves upward from bottom to top, the inclined outer wall surface m1 moves upward relative to the inclined inner wall surface m2. Due to the inclined fit between the two, the moving member 32 can be pushed to move from left to right.

[0065] At this time, the pushing member 31a moving up and down drives the moving member 32 moving left and right through the cooperation of the inclined outer wall surface m1 and the inclined inner wall surface m2, with a simple structure and reliable transmission.

[0066] In some embodiments, in combination with Figure 4 、 Figure 5 and Figure 7 , a limiting groove 10d is formed on the hole wall of the mounting hole 10c, and a convex platform a3 is provided on the pushing member 31a. The convex platform a3 is limited in the limiting groove 10d and is movably arranged along the limiting groove 10d in the moving direction of the pushing member 31a.

[0067] Specifically, limiting grooves 10d can be provided on the opposite side hole walls of the mounting hole 10c, and convex platforms a3 can be provided on the opposite sides of the pushing member 31a. Each convex platform a3 is correspondingly arranged in a limiting groove 10d.

[0068] The extending direction of the limiting groove 10d is consistent with the moving direction of the pushing member 31a, and the moving direction of the pushing member 31a is the depth direction of the mounting hole 10c. When the pushing member 31a moves along the mounting hole 10c, the boss a3 moves within the limiting groove 10d. When the heat source 20 is installed in place, the boss a3 abuts against the groove wall of the limiting groove 10d, thereby restricting the further movement of the pushing member 31a. The setting of the boss a3 can prevent the pushing member 31a from slipping out of the mounting hole 10c, and at the same time increase the mating area between the pushing member 31a and the mounting hole 10c, improving the movement smoothness of the pushing member 31a.

[0069] Preferably, one end of the limiting groove 10d facing the first mounting surface 10a is a blind end (i.e., the limiting groove 10d does not penetrate the first mounting surface 10a), and the other end is an open end (i.e., the limiting groove 10d penetrates the second mounting surface 10b). The pushing member 31a can be inserted into the mounting hole 10c from the open end, and the downward movement of the boss a3 is restricted by the blind end of the limiting groove 10d, preventing the pushing member 31a from slipping out of the mounting hole 10c from below.

[0070] In some embodiments, the power member 31 further includes an elastic force applying member 31b. The elastic force applying member 31b is connected to the moving member 32 and is used to apply an elastic force that causes the moving member 32 to drive the temperature detecting member 40 away from the detection position.

[0071] Specifically, the elastic force applying member 31b may include a spring and a fixing bracket. The fixing bracket is fixed on the second mounting surface 10b. One end of the spring is fixed on the fixing bracket, and the other end is connected to the moving rod. The spring can apply an elastic force to the moving member 32 to cause it to move away from itself from right to left.

[0072] When the heat source 20 is removed from below the cold source 10, the acting force of the heat source 20 on the force receiving end a1 of the pushing member 31a is eliminated. Under the action of the spring, the moving member 32 moves in the reverse direction and pushes the pushing member 31a to move in the reverse direction, so that the force receiving end a1 of the pushing member 31a extends out of the mounting hole 10c, and the temperature detecting member 40 moves away from its detection position.

[0073] At this time, under the elastic force applied by the elastic force applying member 31b, during the detachment process of the heat source 20, the temperature detecting member 40 can be made to leave the detection position synchronously, avoiding the departure of the heat source 20, and the detachment of the heat source 20 is more convenient.

[0074] Of course, in other embodiments, if the elastic force applying member 31b is not provided, in some cases, when the heat source 20 is detached, the pushing member 31a can also move downward under the action of gravity, thereby driving the moving member 32 to move in the reverse direction. If the elastic force applying member 31b is provided, the elastic force applying member 31b can ensure the reverse movement of the moving member 32, and the process of the reverse movement of the moving member 32 is more reliable. The use state of the test head 100 does not need to be limited, and the application method of the test head 100 is more flexible.

[0075] In some embodiments, referring to Figure 8 also includes a fixing member 33 fixedly disposed on the cold source 10 and having a first guiding portion 33e, and a second guiding portion 32d is provided on the moving member 32. The first guiding portion 33e cooperates with the second guiding portion 32d and is capable of relatively moving in the moving direction of the moving member 32.

[0076] Specifically, the first guiding portion 33e includes a convex post, and the second guiding portion 32d includes a guiding groove extending along the moving direction of the moving member 32. The convex post is movably disposed in the guiding groove along the extending direction of the guiding groove. Optionally, the first guiding portions 33e are provided on both opposite sides of the moving member 32, and two second guiding portions 32d are provided on the corresponding fixing member 33, and the two second guiding portions 32d cooperate with the two first guiding portions 33e in a one-to-one correspondence. Optionally, the fixing member 33 forms a guiding groove, and the moving member 32 is disposed in the guiding groove and moves along the guiding groove.

[0077] At this time, under the cooperation of the first guiding portion 33e and the second guiding portion 32d, the fixing member 33 can guide the movement of the moving member 32, and the moving process of the moving member 32 is smoother.

[0078] In some embodiments, the heat source 20 has a pressing surface y disposed away from the cold source 10. When in the detection position, the temperature detection member 40 is adhesively connected to an area of the heat source 20 outside the pressing surface y.

[0079] That is to say, the temperature detection member 40 can be a contact temperature sensor, which is directly adhered to an area of the heat source 20 outside the pressing surface y, and can more accurately detect the temperature of the heat source 20. The temperature detection member 40 is arranged outside the pressing surface y and does not affect the use of the test head 100.

[0080] Further, a metal sheet is provided on the pressing surface y. The metal sheet can be but is not limited to a highly thermally conductive indium sheet. The provision of the metal sheet can make the heat conduction effect between the heat source 20 and the device to be tested more uniform and the heat conduction efficiency higher.

[0081] In addition, an embodiment of the present application further provides a test and sorting machine, which includes a feeding device (not shown), a material transfer mechanism (not shown), a material receiving device (not shown), a test seat (not shown), a pressing mechanism (not shown), and the test head 100 described in any of the above embodiments. The test head 100 is installed on the pressing mechanism, and the pressing mechanism is used to drive the test head 100 to move away from or close to the test seat so that the test head 100 acts on the device to be tested on the test seat. The material transfer mechanism is used to transfer the device to be tested provided by the feeding device to the test seat and to transfer the tested device from the test seat to the material receiving device for recycling.

[0082] The device to be tested can be, but is not limited to, a chip. The loading device is used to load the device to be tested onto itself, and the loading device can include a loading conveying structure, a loading material bearing structure, etc. The unloading device is used to recover the tested devices, and the unloading device can include a recovery bearing structure, an unloading conveying structure, etc. The material transfer mechanism can be a manipulator, etc. The test socket can provide a closed test environment or can be an open tabletop structure.

[0083] This test and sorting machine has all the above beneficial effects and will not be elaborated here.

[0084] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0085] The above-described embodiments only represent several implementation manners of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation on the patent scope of the present application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A test head (100), characterized in that: The test head (100) comprises: Cold source (10); A heat source (20) is disposed on the cold source (10) and is thermally connected to the cold source (10); A mounting assembly (30) comprising a power member (31) and a moving member (32), wherein the power member (31) is disposed on the cold source (10) and connected to the moving member (32); and A temperature detection member (40) is arranged on the movable member (32) and has a detection position capable of detecting the temperature of the heat source (20); the movable member (32) is capable of moving relative to the cold source (10) under the control of the power member (31) to drive the temperature detection member (40) to move closer to or farther from the detection position.

2. The test head (100) according to claim 1, characterized in that: The heat source (20) has an assembled state (W1) in which it is assembled on the cold source (10) and a separated state (W2) in which it is separated from the cold source (10); when the temperature detection element (40) is located at the detection position, the heat source (20) is in the assembled state (W1); During the process of the heat source (20) switching from the separated state (W2) to the assembled state (W1), the power member (31) drives the temperature detection member (40) to move from a position away from the detection position toward the detection position via the moving member (32).

3. The test head (100) according to claim 2, characterized in that: The power member (31) comprises a pushing member (31a) movably arranged on the cold source (10), the pushing member (31a) having a force-bearing end (a1) and an action end (a2), and the action end (a2) is connected to the moving member (32); During the process of switching the heat source (20) from the separated state (W2) to the assembled state (W1), a force can be applied to the force-bearing end (a1) to cause the pushing member (31a) to move, so that the pushing member (31a) pushes the moving member (32) to move and drives the temperature detecting member (40) to approach the detecting position.

4. The test head (100) according to claim 3, characterized in that: The cold source (10) comprises a first mounting surface (10a) and a second mounting surface (10b) which are arranged opposite to each other, and a mounting hole (10c) which passes through the first mounting surface (10a) and the second mounting surface (10b); the first mounting surface (10a) is used for mounting the heat source (20); the pushing member (31a) is movably arranged along the mounting hole (10c); and the moving member (32) is movably arranged along the second mounting surface (10b) in a direction intersecting with the moving direction of the pushing member (31a); The action end (a2) of the pushing member (31a) extends out of the second mounting surface (10b) and is connected to the moving member (32); when the pushing member (31a) moves along the mounting hole (10c), the force-bearing end (a1) of the pushing member (31a) can switch between a state of extending out of the first mounting surface (10a) and retracting into the mounting hole (10c).

5. The test head (100) according to claim 4, characterized in that: The movable member (32) is provided with a matching groove (32c), and the matching groove (32c) has an inclined inner wall surface (m2); the action end (a2) has an inclined outer wall surface (m1), and the inclined inner wall surface (m2) is in contact with the inclined outer wall surface (m1); when the pushing member (31a) moves along the mounting hole (10c), the inclined outer wall surface (m1) and the inclined inner wall surface (m2) move relative to each other in an inclined direction to push the movable member (32) to move.

6. The test head (100) according to claim 4, characterized in that: A limiting groove (10d) is formed on the hole wall of the mounting hole (10c), and a boss (a3) ​​is provided on the pushing member (31a); the boss (a3) ​​is limited in the limiting groove (10d) and can be movably arranged along the limiting groove (10d) in the moving direction of the pushing member (31a).

7. The test head (100) according to claim 3, characterized in that: The power member (31) further comprises an elastic force applying member (31b), which is connected to the moving member (32) and is used to apply an elastic force that causes the moving member (32) to drive the temperature detecting member (40) away from the detecting position.

8. The test head (100) according to claim 1, characterized in that: The mounting assembly (30) further comprises a fixing member (33), wherein the fixing member (33) is fixedly disposed on the cold source (10) and has a first guide portion (33e); The moving member (32) is provided with a second guide portion (32d), and the first guide portion (33e) cooperates with the second guide portion (32d) and can move relative to each other in the moving direction of the moving member (32).

9. The test head (100) according to claim 1, characterized in that: The heat source (20) has a pressing surface (y) disposed away from the cold source (10), and when located at the detection position, the temperature detection element (40) is in close contact with the area of ​​the heat source (20) located outside the pressing surface (y); The pressing surface (y) is provided with a metal sheet.

10. A test sorting machine, characterized in that: It comprises a loading device, a material transfer mechanism, a material receiving device, a test seat, a pressing mechanism and a test head (100) as described in any one of claims 1 to 9, wherein the test head (100) is installed on the pressing mechanism, and the pressing mechanism is used to drive the test head (100) away from or close to the test seat so that the test head (100) acts on the device to be tested located on the test seat, and the material transfer mechanism is used to transfer the device to be tested provided by the loading device to the test seat, and to transfer the tested device from the test seat to the material receiving device for recovery.

Citation Information

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