Inverted adsorption laser processing table

Abstract

The utility model relates to an inverted adsorption laser processing table which comprises a moving module, an adsorption assembly and a laser cutting head, the adsorption assembly is installed on the moving module, and the laser cutting head is arranged above the adsorption assembly. The adsorption assembly sequentially comprises an adsorption plate and a bottom plate from top to bottom, the adsorption plate is installed on the bottom plate through a plurality of supporting structures, and a gap is formed between the adsorption plate and the bottom plate. According to the utility model, a product is inversely adsorbed, and a single particle directly falls off and is collected after being cut, so that the cutting of the remaining part is not influenced, and the position precision of other particles is not influenced.

Description

Technical Field

[0001] The utility model relates to the technical field related to laser cutting in the semiconductor industry, and particularly relates to an inverted adsorption laser processing table. Background Art

[0002] After a large amount of retrieval, it is found that the existing Chinese patent publication number is CN216503023U, which discloses a warped sheet adsorption laser processing table, including an XY processing platform, a processing adsorption platform, a galvanometer and a vision system; the processing adsorption platform includes a sucker base, an adsorption plate is installed on the sucker base, an intermediate lifting component is installed in the central groove of the sucker base, the intermediate lifting component includes a lifting bottom plate, the driving end at the top of the screw motor is drivingly connected with the upper adsorption support plate, and a plurality of anti-static suckers are installed on the adsorption support plate. The utility model forms a closed space with the bottom of the product by using a sealing ring, and even a warped and deformed product can form a closed space, so that the product can be adsorbed and fixed; the utility model can improve the processing efficiency and ensure the appearance of the product.

[0003] In summary, the problems existing in the prior art are as follows:

[0004] The conventional method of the prior art is to process the product after pasting a film. During the processing, the product expands due to heat; this causes extrusion between particles and position changes, affecting the subsequent processing accuracy.

[0005] In view of the above defects, the designer actively conducts research and innovation in order to create an inverted adsorption laser processing table, making it more valuable in industry. Summary of the Utility Model

[0006] To solve any one of the above technical problems, the purpose of the utility model is to provide an inverted adsorption laser processing table.

[0007] To achieve the above purpose, the utility model adopts the following technical solutions:

[0008] The inverted adsorption laser processing table includes a moving module, an adsorption component and a laser cutting head. The adsorption component is installed on the moving module, and a laser cutting head is arranged above the adsorption component;

[0009] The adsorption component successively includes an adsorption plate and a bottom plate from top to bottom. The adsorption plate is installed on the bottom plate through a plurality of support structures, and a gap is arranged between the adsorption plate and the bottom plate;

[0010] A processing through hole is formed in the middle of the adsorption plate. A plurality of adsorption bosses are evenly distributed on the adsorption plate outside the bottom of the processing through hole. An air pipe joint is installed on the adsorption plate outside the adsorption bosses. The product is adsorbed directly below the processing through hole between a plurality of adsorption bosses.

[0011] As a further improvement of the present utility model, the support structure includes an adjusting screw. A number of threaded holes are evenly distributed on the adsorption plate. A screw lower mounting groove is formed on the bottom plate directly below the threaded hole. The top of the adjusting screw is installed in the upper threaded hole, and the bottom of the adjusting screw is installed in the lower screw lower mounting groove.

[0012] As a further improvement of the present utility model, a threaded sleeve is installed in the threaded hole, and the top of the adjusting screw is screwed into the threaded sleeve.

[0013] As a further improvement of the present utility model, the screw lower mounting groove is of a V-shaped groove structure, and the bottom of the adjusting screw is provided with a ball head, and the ball head is installed in the screw lower mounting groove.

[0014] As a further improvement of the present utility model, the number of the adjusting screws, the threaded holes and the screw lower mounting grooves is three.

[0015] As a further improvement of the present utility model, the number of the adsorption bosses is three.

[0016] By means of the above solution, the present utility model has at least the following advantages:

[0017] The present utility model adsorbs the product in an inverted manner. After single-piece cutting, it directly drops and is collected, which does not affect the cutting of the remaining part and does not affect the position accuracy of other particles.

[0018] The above description is only an overview of the technical solution of the present utility model. In order to be able to understand the technical means of the present utility model more clearly and to be implemented in accordance with the content of the specification, the following describes in detail with reference to the preferred embodiments of the present utility model and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments. It should be understood that the following drawings only show some embodiments of the present utility model, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can also be obtained based on these drawings without creative efforts.

[0020] Figure 1 is a schematic structural diagram of an inverted adsorption laser processing table of the present utility model;

[0021] Figure 2 is Figure 1 a schematic structural diagram of the adsorption assembly in

[0022] Figure 3 is Figure 2 a cross-sectional view taken along A-A.

[0023] Among them, the meanings of the reference numerals in the drawings are as follows.

[0024] Moving module 1, adsorption component 2, laser cutting head 3, product 4, adsorption plate 21, processing through-hole 22, adsorption boss 23, air pipe joint 24, threaded hole 25, adjusting screw 26, bottom plate 27, screw lower mounting groove 28. Specific embodiments

[0025] The following will further describe in detail the specific embodiments of the present invention in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0026] In order to enable those skilled in the art to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Usually, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the present invention to be protected, but only represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present invention.

[0027] As Figures 1 to 3 shown, an inverted adsorption laser processing table includes a moving module 1, an adsorption component 2 and a laser cutting head 3. The adsorption component 2 is installed on the moving module 1, and a laser cutting head 3 is arranged above the adsorption component 2.

[0028] Among them, the moving module 1 is an X-axis and Y-axis module or a multi-axis module.

[0029] The adsorption component 2 successively includes an adsorption plate 21 and a bottom plate 27 from top to bottom. The adsorption plate 21 is installed on the bottom plate 27 through a plurality of support structures, and a gap is provided between the adsorption plate 21 and the bottom plate 27. A processing through-hole 22 is opened in the middle of the adsorption plate 21. A plurality of adsorption bosses 23 are evenly distributed on the adsorption plate 21 outside the bottom of the processing through-hole 22. An air pipe joint 24 is installed on the adsorption plate 21 outside the adsorption boss 23. The product 4 is adsorbed directly below the processing through-hole 22 between a plurality of adsorption bosses 23.

[0030] The number of the adsorption bosses 23 is three.

[0031] The support structure includes an adjusting screw 26. A number of threaded holes 25 are evenly distributed on the adsorption plate 21. A screw lower mounting groove 28 is formed on the bottom plate 27 directly below the threaded hole 25. The top of the adjusting screw 26 is installed in the upper threaded hole 25, and the bottom of the adjusting screw 26 is installed in the lower screw lower mounting groove 28.

[0032] A threaded sleeve is installed in the threaded hole 25, and the top of the adjusting screw 26 is screwed into the threaded sleeve.

[0033] The screw lower mounting groove 28 is of a V-shaped groove structure. The bottom of the adjusting screw 26 is provided with a ball head, and the ball head is installed in the screw lower mounting groove 28.

[0034] The number of the adjusting screws 26, the threaded holes 25, and the screw lower mounting grooves 28 is three.

[0035] The positional relationship and connection relationship between the components of the present utility model:

[0036] It is installed on the moving module 1 through the bottom plate 27 and moves along with the platform; the laser cutting head 3 is installed above the adsorption assembly 2. The positional relationship of the parts of the adsorption assembly 2: Three threaded sleeves are embedded in the bottom plate 27, three adjusting screws 26 are respectively screwed into the three threaded sleeves, three air pipe connectors 24 are installed on the circumferential side of the adsorption plate 21, and three adjusting screws 26 are placed in the three screw lower mounting grooves 28 of the bottom plate 27.

[0037] The working principle and working process of the present utility model:

[0038] First, take out the adsorption plate 21, place the product 4 on the three adsorption surfaces of the adsorption plate 21 and place it in the center. Open the vacuum of the three air pipe connectors 24. There are three adsorption bosses 23 in the central hole of the adsorption plate 21, and the rest are open, ensuring the largest laser processing area. Then place the adsorption plate 21 with the product 4 on the bottom plate 27. There are three centripetal long V-shaped grooves on the bottom plate 27. The lower ends of the three adjusting screws 26 are ball heads, and the three ball heads are placed in the three V-shaped grooves, which has a centering effect, and the adsorption plate 21 will not be displaced relative to each other during the movement of the platform. Measure the flatness of the product 4 through the image. If it exceeds the marked value, adjust the posture of the adsorption plate 21 through the three adjusting screws 26, a three-point leveling structure, so as to adjust the posture of the product 4. After adjustment, start moving the platform for processing. When a whole one is completely cut, this one directly drops onto the bottom plate 27, and continue to cut the next one. After all cutting is completed, move away the adsorption plate 21, turn off the vacuum, take away the corner waste, and collect the product particles that fall on the bottom plate 27.

[0039] The present utility model adsorbs the product in an inverted manner, and directly drops and collects it after single-piece cutting, without affecting the cutting of the remaining part and the position accuracy of other particles.

[0040] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0041] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", "coupled" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection. It may be a mechanical connection or an electrical connection. It may be directly connected or indirectly connected through an intermediate medium. It may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood through specific circumstances.

[0042] The above description is only a preferred embodiment of the present utility model and is not used to limit the present utility model. It should be pointed out that for those of ordinary skill in the art in this technical field, without departing from the technical principle of the present utility model, several improvements and modifications can still be made, and these improvements and modifications should also be regarded as the protection scope of the present utility model.

Claims

1. An inverted adsorption laser processing table, comprising a moving module (1), an adsorption component (2) and a laser cutting head (3), wherein the adsorption component (2) is mounted on the moving module (1), and the laser cutting head (3) is arranged above the adsorption component (2); characterized in that: The adsorption assembly (2) comprises, from top to bottom, an adsorption plate (21) and a bottom plate (27); the adsorption plate (21) is mounted on the bottom plate (27) via a plurality of supporting structures, and a gap is provided between the adsorption plate (21) and the bottom plate (27); A processing through hole (22) is opened in the middle of the adsorption plate (21), a plurality of adsorption bosses (23) are evenly distributed on the adsorption plate (21) outside the bottom of the processing through hole (22), and an air pipe joint (24) is installed on the adsorption plate (21) outside the adsorption bosses (23), and the product (4) is adsorbed directly below the processing through hole (22) between the plurality of adsorption bosses (23).

2. The inverted adsorption laser processing table according to claim 1, characterized in that: The support structure comprises an adjusting screw (26), a plurality of threaded holes (25) are evenly distributed on the adsorption plate (21), a screw lower mounting groove (28) is opened on the bottom plate (27) directly below the threaded holes (25), the top of the adjusting screw (26) is mounted in the upper threaded hole (25), and the bottom of the adjusting screw (26) is mounted in the lower screw lower mounting groove (28).

3. The inverted adsorption laser processing table according to claim 2, characterized in that: A threaded sleeve is installed in the threaded hole (25), and the top of the adjusting screw (26) is screwed into the threaded sleeve.

4. The inverted adsorption laser processing table according to claim 2, characterized in that: The screw rod lower mounting groove (28) is a V-shaped groove structure, and a ball head is provided at the bottom of the adjusting screw rod (26), and the ball head is installed in the screw rod lower mounting groove (28).

5. The inverted adsorption laser processing table according to claim 2, characterized in that: The number of the adjusting screw rod (26), the threaded hole (25) and the screw rod lower mounting groove (28) are all three.

6. The inverted adsorption laser processing table according to claim 1, characterized in that: The number of the adsorption bosses (23) is three.

Images