High-precision mechanical rotary workbench

Abstract

The utility model discloses a high-precision mechanical rotary workbench which comprises a bearing seat and a main shaft. A first through hole penetrating to the bottom of the bearing seat is formed in the top of the bearing seat, and the top of the bearing seat is further integrally connected with a fixing disc. The first through hole penetrates through the fixing disc, and a plurality of first fixing holes are formed in the top of the fixing disc in the circumferential direction at intervals. The upper portion and the lower portion in the first through hole are each provided with a first bearing, the main shaft coaxially penetrates through the first through hole, and the part, located in the first through hole, of the main shaft is connected with the first bearings. An outer gasket is further installed in the first through hole. By adopting a mechanical main shaft rotating mode, compared with an air floating rotary table, the rigidity is greatly improved, the grinding machine can adapt to grinding of high-hardness materials, the application range is wider, and the grinding machine is reasonable in overall design, compact in structure, convenient to use, low in machining cost and high in practicability.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a high-precision mechanical rotary table. Background Art

[0002] In the silicon wafer manufacturing process, a grinding machine is used to thin the wafers cut from a silicon ingot. As semiconductor chips become thinner and more functional, the flatness accuracy in the thinning process becomes increasingly important. During the grinding and thinning process of wafers by a grinding machine, it is necessary to drive the wafers to rotate. Currently, an air-bearing turntable is mainly used. It forms an air film by introducing compressed air to suspend the rotor, enabling frictionless, high-speed, and high-precision rotary motion. However, the air-bearing turntable has the following disadvantages:

[0003] 1) Although the air-bearing turntable can achieve high-speed and high-precision rotary motion, since the support is gas, its rigidity is insufficient, and the axial and radial load-bearing capacities are limited. It needs to be used within a limited load range, otherwise, it will cause wear of the main shaft and the bearing sleeve, and even the main shaft may get stuck.

[0004] 2) The air-bearing turntable has high requirements for the introduced compressed air, and water, oil, impurities, etc. need to be eliminated. Otherwise, it will exacerbate the wear of the bearing sleeve and the main shaft, resulting in changes in accuracy and rigidity.

[0005] 3) The components of the air-bearing turntable are relatively precise, and the assembly requirements are high, resulting in relatively high usage costs and maintenance costs. Summary of the Utility Model

[0006] The purpose of the utility model is to provide a high-precision mechanical rotary table, which adopts the method of mechanical main shaft rotation. Compared with the air-bearing turntable, its rigidity is greatly improved, it can adapt to the grinding of high-hardness materials, has a wider application range, and its overall design is reasonable, the structure is compact, it is convenient to use, has low processing costs, and strong practicability.

[0007] To achieve the above purpose, the following technical solutions are adopted:

[0008] A high-precision mechanical rotary worktable includes a bearing housing and a main shaft. A first through hole penetrating from the top to the bottom is formed in the top of the bearing housing, and a fixed disk is integrally connected to the top of the bearing housing. The first through hole penetrates through the fixed disk, and a plurality of first fixing holes are circumferentially spaced on the top of the fixed disk. A first bearing is installed in each of the upper and lower parts of the first through hole. The main shaft is coaxially arranged through the first through hole, and the part of the main shaft located in the first through hole is connected to the first bearing. An outer washer is also installed in the first through hole. The outer washer has an axially hollow structure, and the part of the main shaft located in the first through hole is coaxially arranged through the outer washer. One end of the outer washer abuts against the bottom of one of the first bearings, and the other end of the outer washer abuts against the top of the other first bearing. A bearing end cover is installed on the top of the fixed disk and the bottom of the bearing housing respectively, and the bearing end cover is used to limit the first bearing in the first through hole.

[0009] Further, an inner washer is arranged in the outer washer, and a gap is left between the outer wall of the inner washer and the inner wall of the outer washer. The inner washer has an axially hollow structure, and the part of the main shaft located in the first through hole is coaxially arranged through the inner washer. One end of the inner washer abuts against the bottom of one of the first bearings, and the other end of the inner washer abuts against the top of the other first bearing.

[0010] Further, both the outer washer and the inner washer have a cylindrical structure.

[0011] Further, a vent hole penetrating from the top to the bottom is formed in the top of the main shaft.

[0012] Further, a bearing plate is integrally connected to the top of the main shaft.

[0013] Further, it further includes a workbench and a rotation driving mechanism. A fixing plate is connected to the top of the workbench, and a first mounting hole is formed in the top of the fixing plate. The bearing housing is arranged through the first mounting hole, and the fixed disk is fixedly connected to the top of the fixing plate. The rotation driving mechanism is connected to the main shaft, and the rotation driving mechanism is used to drive the main shaft to rotate.

[0014] Further, the rotation driving mechanism includes a first bracket connected to the workbench, a speed reducer installed on the first bracket, a driving wheel installed on the output shaft of the speed reducer, a driven wheel installed on the lower part of the main shaft, a synchronous belt connected between the driving wheel and the driven wheel, and a rotary motor connected to the speed reducer.

[0015] Further, a locking nut and a locking clamp are installed on the outer wall of the lower part of the main shaft. The driven wheel is located between the locking nut and the locking clamp.

[0016] Adopting the above scheme, the beneficial effects of the utility model are:

[0017] The utility model adopts the rotation mode of a mechanical main shaft. Compared with an air-floating turntable, the rigidity is greatly improved, it can adapt to the grinding of high-hardness materials, has a wider application range, and its overall design is reasonable, the structure is compact, it is convenient to use, the processing cost is low, and the practicability is strong. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of the utility model;

[0019] Figure 2 is a schematic structural diagram of the rotation driving mechanism of the utility model;

[0020] Figure 3 is a schematic structural diagram of the utility model omitting the working frame and the rotation driving mechanism;

[0021] Figure 4 is Figure 3 sectional view of;

[0022] Among them, the description of the attached drawing signs:

[0023] 1. Bearing seat; 2. Main shaft; 3. First bearing; 4. Outer washer; 5. Bearing end cover; 6. Inner washer; 7. Working frame; 8. Rotation driving mechanism; 11. Fixed disk; 12. First fixing hole; 21. Vent hole; 22. Bearing disk; 23. Locking nut; 24. Locking clamp; 71. Fixing plate; 81. First bracket; 82. Reducer; 83. Driving wheel; 84. Driven wheel; 85. Synchronous belt; 86. Rotation motor. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0024] The following combines the attached drawings and specific embodiments to describe the utility model in detail.

[0025] Referring to Figures 1 to 4 as shown, the utility model provides a high-precision mechanical rotating workbench. In one embodiment, it includes a bearing seat 1 and a main shaft 2; a first through hole penetrating through the top to the bottom is provided at the top of the bearing seat 1, and a fixed disk 11 is integrally connected to the top of the bearing seat 1; the first through hole penetrates through the fixed disk 11, and a plurality of first fixing holes 12 are circumferentially spaced apart on the top of the fixed disk 11; a first bearing 3 is installed at the upper and lower parts in the first through hole, the main shaft 2 is coaxially arranged through the first through hole, and the part of the main shaft 2 located in the first through hole is connected to the first bearing 3; an outer washer 4 is also installed in the first through hole; the outer washer 4 has an axially hollow structure, and the part of the main shaft 2 located in the first through hole is coaxially arranged through the outer washer 4; one end of the outer washer 4 abuts against the bottom of one of the first bearings 3, and the other end of the outer washer 4 abuts against the top of the other first bearing 3; a bearing end cover 5 is installed at the top of the fixed disk 11 and the bottom of the bearing seat 1 respectively, and the bearing end cover 5 is used to limit the first bearing 3 in the first through hole.

[0026] Continuing to refer to Figures 1 to 4 As shown, in this embodiment, in order to meet the requirements of the usage conditions of the water environment, except for the bearings, other parts need to be rust-proof. In this embodiment, 3Cr13 stainless steel material is mainly used for manufacturing. This material has good rust-proof ability. At the same time, after heat treatment, the mechanical properties of the material can be greatly improved, thereby greatly improving the machining and assembly accuracy; the bearing housing 1 adopts a design with a through hole in the middle, which can ensure the concentricity of the two bearing positions and is also convenient for machining. A first bearing 3 is installed at the upper and lower parts of the first through hole of the bearing housing 1. The two first bearings 3 adopt an angular contact bearing design, which can improve the axial load and adjustable accuracy.

[0027] At the same time, an inner washer 6 is also arranged inside the outer washer 4, and there is a gap between the outer wall of the inner washer 6 and the inner wall of the outer washer 4; the inner washer 6 has an axially hollow structure, and the part of the main shaft 2 located in the first through hole passes through the inner washer 6 coaxially; one end of the inner washer 6 abuts against the bottom of one of the first bearings 3, and the other end of the inner washer 6 abuts against the top of the other first bearing 3; both the outer washer 4 and the inner washer 6 have a cylindrical structure. The blocking of the inner and outer rings of the bearing adopts a split inner and outer washer 4 design, which can more accurately adjust the axial clearance, thereby improving the axial accuracy. At the same time, the bearing end cover 5 is divided into upper and lower parts, and the end cover and the separated inner and outer washers 4 cooperate to adjust the axial clearance of the bearing.

[0028] In addition, a vent hole 21 is also opened at the top of the main shaft 2 and penetrates through to its bottom. The main shaft 2 adopts a hollow structure (vent hole 21), and the hollow size can be designed with different sizes according to needs. The hollow part can provide a positive pressure or negative pressure source from bottom to top; at the same time, a carrier plate 22 is integrally connected to the top of the main shaft 2. A sealing ring groove (for loading the sealing ring) is opened in the middle of the top of the carrier plate 22, which can ensure the seal between the surface of the main shaft 2, the carrier plate 22 and the load.

[0029] In one embodiment, it further includes a working frame 7 and a rotation driving mechanism 8; a fixing plate 71 is connected to the top of the working frame 7, and a first mounting hole is formed in the top of the fixing plate 71; the bearing seat 1 is arranged through the first mounting hole, and the fixing disk 11 is fixedly connected to the top of the fixing plate 71; the rotation driving mechanism 8 is connected to the main shaft 2, and the rotation driving mechanism 8 is used to drive the main shaft 2 to rotate. The diameter of the fixing disk 11 is larger than that of the main shaft 2, and a plurality of first fixing holes 12 are circumferentially spaced apart at the top edge of the fixing disk 11. Screws can be locked into the first fixing holes 12 to lock and fix the fixing disk 11. At the same time, the rotation driving mechanism 8 includes a first bracket 81 connected to the working frame 7, a speed reducer 82 mounted on the first bracket 81, a driving wheel 83 mounted on the output shaft of the speed reducer 82, a driven wheel 84 mounted on the lower part of the main shaft 2, a synchronous belt 85 connected between the driving wheel 83 and the driven wheel 84, and a rotating motor 86 connected to the speed reducer 82. Driven by the rotating motor 86, the driving wheel 83 can be driven to rotate by the speed reducer 82. When the driving wheel 83 rotates, it will drive the driven wheel 84 to rotate through the synchronous belt 85, and then drive the main shaft 2 to rotate. In addition, a locking nut 23 and a locking clamp 24 are further mounted on the outer wall of the lower part of the main shaft 2; the driven wheel 84 is located between the locking nut 23 and the locking clamp 24. The locking nut 23 adopts a fine thread structure and a double nut design, which can ensure the stability of the installation and connection of the driven wheel 84.

[0030] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A high-precision mechanical rotary table, characterized in that: The invention comprises a bearing seat and a main shaft; a first through hole is provided on the top of the bearing seat and extends to the bottom thereof, and a fixed plate is integrally connected to the top of the bearing seat; the first through hole is provided through the fixed plate, and a plurality of first fixing holes are spaced apart in the circumferential direction at the top of the fixed plate; a first bearing is respectively installed on the upper and lower parts of the first through hole, the main shaft is coaxially arranged through the first through hole, and the part of the main shaft located in the first through hole is connected to the first bearing; an outer washer is also installed in the first through hole; the outer washer is axially hollow, and the part of the main shaft located in the first through hole is coaxially arranged through the outer washer; one end of the outer washer abuts against the bottom of one of the first bearings, and the other end of the outer washer abuts against the top of the other first bearing; a bearing end cover is respectively installed on the top of the fixed plate and the bottom of the bearing seat, and the bearing end cover is used to limit the first bearing in the first through hole.

2. The high-precision mechanical rotary table according to claim 1, characterized in that: An inner washer is also arranged inside the outer washer, and a gap is left between the outer wall of the inner washer and the inner wall of the outer washer; the inner washer is axially hollow in structure, and the part of the main shaft located in the first through hole is coaxially arranged through the inner washer; one end of the inner washer abuts the bottom of one of the first bearings, and the other end of the inner washer abuts the top of the other first bearing.

3. The high-precision mechanical rotary table according to claim 2, characterized in that: The outer gasket and the inner gasket are both cylindrical in structure.

4. The high-precision mechanical rotary table according to claim 1, characterized in that: The top of the main shaft is also provided with a vent hole which penetrates to the bottom thereof.

5. The high-precision mechanical rotary table according to claim 1, characterized in that: The top of the main shaft is also integrally connected with a carrying plate.

6. The high-precision mechanical rotary table according to claim 1, characterized in that: It also includes a working frame and a rotating drive mechanism; the top of the working frame is connected to a fixed plate, and the top of the fixed plate is provided with a first mounting hole; the bearing seat is arranged through the first mounting hole, and the fixed plate is fixedly connected to the top of the fixed plate; the rotating drive mechanism is connected to the main shaft, and the rotating drive mechanism is used to drive the main shaft to rotate.

7. The high-precision mechanical rotary table according to claim 6, characterized in that: The rotation drive mechanism includes a first bracket connected to the workbench, a reducer installed on the first bracket, a driving wheel installed on the output shaft of the reducer, a driven wheel installed on the lower part of the main shaft, a synchronous belt connected between the driving wheel and the driven wheel, and a rotating motor connected to the reducer.

8. The high-precision mechanical rotary table according to claim 7, characterized in that: A locking nut and a locking clamp are also installed on the lower outer wall of the main shaft; the driven wheel is located between the locking nut and the locking clamp.

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