Lifting pin installation calibration tool and electrostatic chuck

Abstract

The utility model provides a lifting pin installation calibration tool and an electrostatic chuck. The calibration tool comprises a pin body, a center alignment structure, a first clamping structure, an outer cylinder and a limiting structure. The needle main body can be sleeved in the outer cylinder; a central shaft of the needle main body penetrates through a mounting hole for introducing the lifting pin; the center alignment structure is located at the bottom of the needle body and can clamp the lifting pin to coincide with the center axis of the needle body. The outer wall of the outer cylinder abuts against the inner wall of the pin hole. The outer diameter of the limiting structure is larger than the inner wall diameter of the pin hole, and the bottom face is perpendicular to the center axis of the mounting hole. The first clamping structure and the clamping limiting structure are fixed to the needle body. According to the utility model, the outer wall of the outer cylinder can abut against the pin hole for installing the lifting pin, thereby ensuring that the lifting pin is not contacted with the electrostatic chuck, and preventing particles from splashing to pollute wafers or production line environment; meanwhile, the center alignment structure is arranged to clamp the lifting pin at the center shaft position, the lifting pin installation position error is reduced, the lifting pin installation position precision is improved, the experience requirement for lifting pin installation is reduced, and the installation efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor equipment, and particularly relates to a lift pin installation and calibration tool and an electrostatic chuck. Background Art

[0002] In the semiconductor etching (ETCH) equipment of the prior art, the moving part, the chamber liftpin, is a serious particle source. Especially when the installation position of the liftpin is inaccurate, resulting in contact between the liftpin and the pin hole of the electrostatic chuck (ESC) used to install the liftpin, friction will occur between the liftpin and the pin hole of the electrostatic chuck during the liftpin up / down process, causing a large number of particles to splash. The splashed particles are easily adsorbed on the surface of the wafer to form defects, which will have an adverse impact on the yield of the produced products, easily contaminate the production line environment, reduce the overall production yield of the wafer fab, and cause huge losses.

[0003] Since there is no tool to assist in calibrating the installation position of the liftpin, in order to avoid large errors in the installation position of the liftpin, staff with less work experience cannot directly install the liftpin. Only senior staff can judge the installation position of the liftpin based on experience; and during the installation process, in order to ensure the accurate installation position of the liftpin, it often takes a long time to adjust and confirm, resulting in a long installation time of the liftpin on the electrostatic chuck and low production efficiency.

[0004] Therefore, there is an urgent need for a tool that can reduce the installation position error of the liftpin of the electrostatic chuck and improve the ease and efficiency of liftpin installation.

[0005] It should be noted that the above introduction of the technical background is only for the convenience of clearly and completely explaining the technical solution of the present application and facilitating the understanding of those skilled in the art. It cannot be considered that the above technical solutions are well-known to those skilled in the art just because these solutions are described in the background art part of the present application. Summary of the Utility Model

[0006] In view of the above-mentioned disadvantages of the prior art, the purpose of the present utility model is to provide a lift pin installation and calibration tool and an electrostatic chuck, which are used to solve the problems of difficult confirmation of the installation position of the liftpin of the electrostatic chuck and low installation efficiency in the prior art.

[0007] To achieve the above object and other related objects, the present utility model provides the following technical solutions:

[0008] In a first aspect, the present utility model provides a lifting pin installation and calibration tool, and the lifting pin installation and calibration tool includes a needle part and a barrel part;

[0009] The needle part includes a needle body, a central alignment structure, and a first clamping structure, and the barrel part includes an outer barrel and a limiting structure; the needle body can be sleeved inside the outer barrel; when the needle body is sleeved inside the outer barrel, the central axis of the outer barrel coincides with the central axis of the needle body;

[0010] An installation hole penetrates through the central axis of the needle body, and the installation hole is used for passing through the lifting pin to be installed; the central alignment structure is located at the bottom of the needle body, the central axis of the central alignment structure coincides with the central axis of the needle body, and the central alignment structure can clamp the lifting pin to be installed extending from the installation hole and make the central axis of the lifting pin coincide with the central axis of the needle body;

[0011] The outer wall of the outer barrel can be abutted against the inner wall of the pin hole of the electrostatic chuck on which the lifting pin to be installed is installed; a limiting structure is disposed around the top edge of the outer barrel, the outer diameter length of the limiting structure is greater than the inner diameter length of the pin hole, and the bottom surface of the limiting structure is perpendicular to the central axis of the installation hole;

[0012] A first clamping structure is fixed above the position of the needle body corresponding to the limiting structure, and the inner diameter length of the first clamping structure is greater than the inner diameter length of the outer barrel and less than the outer diameter length of the limiting structure, so that the first clamping structure can be clamped on the limiting structure.

[0013] Optionally, the central alignment structure includes 2n elastic pieces, where n is an integer greater than or equal to 1; the first cross-section and the second cross-section are two cross-sections of the needle body passing through the central axis, and the first cross-section is perpendicular to the second cross-section; the elastic pieces are all located at the position of the needle body bottom passing through the first cross-section, and the 2n elastic pieces are symmetrically distributed with respect to the second cross-section; the 2n elastic pieces can clamp the lifting pin to be installed extending from the installation hole at the bottom of the needle body.

[0014] Optionally, the central alignment structure includes an annular elastic piece, and the maximum outer diameter of the annular elastic piece is less than or equal to the outer diameter of the outer barrel; the minimum inner diameter of the annular elastic piece is less than or equal to the outer diameter of the lifting pin, so that the annular elastic piece can clamp the lifting pin to be installed extending from the installation hole at the bottom of the needle body.

[0015] Optionally, the limiting structure is a platform perpendicular to the central axis of the outer barrel.

[0016] Optionally, the limiting structure is an annular platform.

[0017] Optionally, a second card structure is fixed on the limiting structure of the cylinder part, and the first card structure and the second card structure can be fixed by being engaged with each other.

[0018] Optionally, the first card structure is an internal thread surface, and the second card structure is an external thread surface.

[0019] Optionally, the first card structure is an external thread surface, and the second card structure is an internal thread surface.

[0020] Optionally, the outer wall of the bottom of the outer cylinder is a conical surface.

[0021] In a second aspect, the present invention provides an electrostatic chuck, and the electrostatic chuck uses any one of the above-mentioned lifting pin installation and calibration tools to calibrate the installation of the lifting pin;

[0022] The electrostatic chuck includes an electrostatic plate and a shunt plate, and the shunt plate is fixed under the electrostatic plate;

[0023] The electrostatic plate includes more than one pin hole penetrating through the electrostatic plate, and the pin hole can be abutted against the outer wall of the outer cylinder in the lifting pin installation and calibration tool;

[0024] At the positions corresponding to the pin holes on the shunt plate, there are all step pin seat holes, and a step pin seat block is engaged in the step pin seat holes, and the step pin seat block can move in the step pin seat holes; at the positions corresponding to the pin holes on the step pin seat block, there are lifting pin through holes, and the inner diameter of the lifting pin through holes is greater than or equal to the outer diameter of the lifting pin.

[0025] As described above, the lifting pin installation and calibration tool and the electrostatic chuck of the present invention have the following beneficial effects:

[0026] By providing the outer wall of the outer cylinder that can be abutted against the pin hole for installing the lifting pin, the present invention ensures that the lifting pin does not contact the electrostatic chuck during the installation process, and no particle splash will occur to cause defects on the surface of the wafer or contaminate the production line environment;

[0027] By providing the central alignment structure of the needle body to keep the lifting pin at the central position of the needle body, the present invention calibrates the installation position of the lifting pin, ensures that the installation position error of the lifting pin is within a controllable range, improves the installation position accuracy of the lifting pin, reduces the experience requirements for the staff installing the lifting pin, and improves the installation efficiency and convenience. Description of the Drawings

[0028] Figure 1 It shows a schematic structural diagram of the cylinder part of the lifting pin installation and calibration tool in the present invention.

[0029] Figure 2 It shows a schematic structural diagram of the needle part of the lifting pin installation and calibration tool in the present invention.

[0030] Figure 3 Shown is a schematic structural view of the lifting pin installation and calibration tool in the present utility model.

[0031] Figure 4 Shown is a schematic view of the contact between the lifting pin and the pin hole during the installation process in the prior art.

[0032] Figure 5 Shown is a schematic view of the non-contact between the lifting pin and the pin hole during the installation process.

[0033] Figure 6 Shown is a schematic view of the non-contact between the lifting pin and the pin hole during the installation process.

[0034] Figure 7 Shown is a schematic structural view of the electrostatic chuck in the present utility model.

[0035] Element number description

[0036] 10. Cylindrical part; 11. Outer cylinder; 12. Limiting structure; 13. Second clamping structure; 14. External thread surface; 15. Tapered surface;

[0037] 20. Needle part; 21. Needle body; 22. Central alignment structure; 23. Elastic sheet; 24. Mounting hole; 25. First clamping structure;

[0038] 26. Internal thread surface;

[0039] 30. Electrostatic chuck; 31. Electrostatic plate; 32. Shunt plate; 33. Pin hole; 34. Step pin seat hole; 35. Step pin seat block;

[0040] 36. Lifting pin through hole; 37. Lifting pin; 38. Sleeve. Specific embodiments

[0041] The following uses specific specific examples to illustrate the implementation manners of the present utility model. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model.

[0042] When detailing the embodiments of the present utility model, for the convenience of description, the schematic structural views representing the device structure will be enlarged locally not in accordance with the general ratio, and the schematic views are only examples and should not limit the protection scope of the present utility model here. In addition, in actual production, three-dimensional spatial dimensions including length, width, and depth should be included.

[0043] For ease of description, spatial relationship terms such as "below", "beneath", "lower", "under", "above", "on" may be used herein to describe the relationship of one element or feature shown in the drawings to other elements or features. It will be understood that these spatial relationship terms are intended to encompass other orientations of the device in use or operation, in addition to the orientation depicted in the drawings.

[0044] In the context of the present application, the structure in which the first feature is "above" the second feature as described may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0045] It should be noted that the diagrams provided in this embodiment only illustrate the basic concept of the present utility model in a schematic manner. Therefore, only the components related to the present utility model are shown in the diagrams, rather than being drawn according to the number, shape, and size of the components in actual implementation. The types, quantities, and proportions of the components in actual implementation may be arbitrarily changed, and the component layout type may also be more complex.

[0046] The present utility model provides a lifting pin installation and calibration tool as Figures 1-3 shown. The lifting pin installation and calibration tool includes a needle portion 20 and a barrel portion 10, where Figure 1 is a structural diagram of the barrel portion 10, Figure 2 is a structural diagram of the needle portion 20, Figure 3 is a structural diagram of the needle portion 20 sleeved inside the barrel portion 10;

[0047] The needle portion 20 includes a needle body 21, a central alignment structure 22, and a first clamping structure 25. The barrel portion 10 includes an outer barrel 11 and a limiting structure 12; the needle body 21 can be sleeved inside the outer barrel 11; when the needle body 21 is sleeved inside the outer barrel 11, the central axis of the outer barrel 11 coincides with the central axis of the needle body 21;

[0048] The central axis of the needle body 21 is penetrated with an installation hole 24 for passing through the lifting pin 37 to be installed; the central alignment structure 22 is located at the bottom of the needle body 21, and the central axis of the central alignment structure 22 coincides with the central axis of the needle body 21. The central alignment structure 22 can clamp the lifting pin 37 to be installed extending from the installation hole 24 and make the central axis of the lifting pin 37 coincide with the central axis of the needle body 21;

[0049] The outer wall of the outer cylinder 11 can be in contact with the inner wall of the pin hole 33 of the electrostatic chuck 30 where the lift pin 37 to be installed is installed; a limiting structure 12 is arranged around the top edge of the outer cylinder 11, the outer diameter length of the limiting structure 12 is greater than the inner wall diameter length of the pin hole 33, and the bottom surface of the limiting structure 12 is perpendicular to the central axis of the mounting hole 24;

[0050] Above the position of the needle body 21 corresponding to the limiting structure 12, a first clamping structure 25 is fixed. The inner diameter length of the first clamping structure 25 is greater than the inner diameter length of the outer cylinder 11 and less than the outer diameter length of the limiting structure 12, so that the first clamping structure 25 can be clamped on the limiting structure 12.

[0051] In the prior art, the lift pin 37 of the moving part cavity of the semiconductor etching equipment is a serious particle pollution source. Especially when the installation position of the lift pin 37 is inaccurate, when the lift pin 37 contacts the pin hole 33 of the electrostatic chuck 30 (ESC, ElectroStatic Chuck) for installing the lift pin 37, as Figure 4 shown, it will cause friction between the lift pin 37 and the pin hole 33 of the electrostatic chuck during the rising or falling process of the lift pin 37, resulting in a large amount of particle splashing; the splashed particles are easily adsorbed on the surface of the wafer to form defects, which will have an adverse impact on the product yield; and the splashed particles are also easily pollute the production line environment, reduce the overall production yield of the wafer fab, and cause huge losses. Since there is no tool in the prior art to assist in calibrating the installation position of the lift pin 37, in order to avoid a large error in the installation position of the lift pin 37, only senior personnel can judge the installation position of the lift pin 37 according to experience in the state as Figures 5-6 shown; and in the installation process, in order to ensure the accurate installation position of the lift pin 37, it is often necessary to carry out a long time of adjustment and confirmation, resulting in a long time for the electrostatic chuck 30 to install the lift pin 37 and low production efficiency.

[0052] The utility model designs a lift pin installation and calibration tool. The outer wall of the outer cylinder 11 of the cylinder part 10 can be in contact with the pin hole 33 for installing the lift pin 37, so as to ensure that the lift pin 37 is always located at the center of the mounting hole 24 and will not contact the electrostatic chuck 30 during the installation process. Therefore, no particle splashing will occur to cause defects on the wafer surface or pollute the production line environment, which can greatly improve the production yield and environmental cleanliness of the wafer fab; at the same time, since the installation position of the lift pin 37 can be automatically calibrated by the lift pin installation and calibration tool during the installation process, it is possible to directly operate the lift pin installation and calibration tool without senior experience to realize the installation of the lift pin 37, reduce the labor cost and time cost required for installing the lift pin 37, and improve the working efficiency of installing the lift pin 37.

[0053] In one embodiment, as Figure 2 shown, the central alignment structure 22 includes 2n elastic sheets 23, where n is an integer greater than or equal to 1; the first cross-section and the second cross-section are two cross-sections of the needle body 21 passing through the central axis, and the first cross-section is perpendicular to the second cross-section; the elastic sheets 23 are all located at the position of the needle body 21 at the bottom passing through the first cross-section, and the 2n elastic sheets 23 are symmetrically distributed with respect to the second cross-section; the 2n elastic sheets 23 can clamp the lift pin 37 to be installed protruding from the mounting hole 24 at the bottom of the needle body 21.

[0054] In one embodiment, as Figure 2 shown, it includes two oppositely arranged elastic sheets 23, and the two elastic sheets 23 are on the same circle around the edge of the mounting hole 24.

[0055] In one embodiment, it includes four oppositely arranged elastic sheets, and the four elastic sheets are on the same circle around the edge of the mounting hole 24.

[0056] Specifically, other appropriate numbers of elastic sheets can also be set as needed, all within the protection scope of the present utility model.

[0057] In one embodiment, the central alignment structure 22 includes an annular elastic sheet, and the maximum outer diameter of the annular elastic sheet is less than or equal to the outer diameter of the outer cylinder 11; the minimum inner diameter of the annular elastic sheet is less than or equal to the outer diameter of the lift pin 37, so that the annular elastic sheet can clamp the lift pin 37 to be installed protruding from the mounting hole 24 at the bottom of the needle body 21.

[0058] The present utility model sets the central alignment structure 22 as an elastic sheet, so that the central alignment structure 22 will not cause a large clamping pressure on the lift pin 37 when clamping the lift pin 37, improving the service life of the lift pin 37; at the same time, it ensures that the central alignment structure 22 can clamp the lift pin 37, ensuring that the lift pin 37 does not contact the pin hole 33 during the installation process.

[0059] In one embodiment, as Figure 1 shown, the limiting structure 12 is a platform perpendicular to the central axis of the outer cylinder 11.

[0060] The present utility model sets the limiting structure 12 as a platform perpendicular to the central axis of the outer cylinder 11, and uses a simple structure to realize the parallelism of the central axis and the central axis of the pin hole 33 when the outer cylinder 11 is set on the pin hole 33, so as to further ensure that the lift pin 37 does not contact the pin hole 33 during the installation process.

[0061] In one embodiment, the limiting structure 12 is an annular platform.

[0062] In one embodiment, a second clamping structure 13 is fixed on the limiting structure 12 of the barrel portion 10, and the first clamping structure 25 and the second clamping structure 13 can be clamped and fixed to each other.

[0063] In one embodiment, as Figure 3 shown, the first clamping structure 25 is an internal thread surface 26, and the second clamping structure 13 is an external thread surface 14.

[0064] In one embodiment, the first clamping structure 25 is an external thread surface, and the second clamping structure 13 is an internal thread surface.

[0065] By providing that the first clamping structure 25 and the second clamping structure 13 can be threadedly connected, the present utility model can realize a detachable fixing structure between the barrel portion 10 and the needle portion 20. At the same time, the height of the needle portion 20 within the barrel portion 10 can be flexibly adjusted, so that the central alignment structure 22 at the bottom surface of the needle portion 20 is exposed, ensuring that during the installation process, it can be observed and confirmed that the lifting pin 37 is within the central alignment structure 22, thereby improving the reliability of the installation process of the lifting pin 37.

[0066] Specifically, the first clamping structure 25 and the second clamping structure 13 can also select other suitable clamping structures to achieve detachable fixed connection between the barrel portion 10 and the needle portion 20, all of which are within the protection scope of the present utility model.

[0067] In one embodiment, as Figure 1 shown, the outer wall at the bottom of the outer barrel 11 is a tapered surface 15.

[0068] By providing that the outer wall at the bottom of the outer barrel 11 is a tapered surface 15, the present utility model can further facilitate the process of the outer barrel 11 entering the pin hole 33 to form an abutment, and improve the efficiency of installing the lifting pin 37.

[0069] The present utility model also provides an electrostatic chuck 30. As Figure 7 shown, the electrostatic chuck 30 uses any one of the above-mentioned lifting pin installation and calibration tools to calibrate the installation of the lifting pin 37;

[0070] The electrostatic chuck 30 includes an electrostatic plate 31 and a diverge plate 32, and the diverge plate 32 is fixed under the electrostatic plate 31;

[0071] The electrostatic plate 31 includes more than one pin hole 33 penetrating through the electrostatic plate 31, and the pin hole 33 can be abutted against the outer wall of the outer barrel 11 in the lifting pin installation and calibration tool;

[0072] At the positions of the flow dividing plate 32 corresponding to the pin holes 33, there are step pin seat holes 34, and a step pin seat block 35 (pin holder) is engaged in the step pin seat holes 34. The step pin seat block 35 can move within the step pin seat holes 34. At the position of the step pin seat block 35 corresponding to the pin holes 33, there is a lifting pin through hole 36, and the inner diameter of the lifting pin through hole 36 is greater than or equal to the outer diameter of the lifting pin 37.

[0073] By using the aforementioned lifting pin installation and calibration tool to install and calibrate the lifting pin 37 on the electrostatic chuck 30, the present utility model can reduce the problem that the electrostatic chuck 30 comes into contact and friction with the pin hole 33 during the installation of the lifting pin 37, thereby generating a pollution particle source, reducing the pollution to the wafer and the production line environment, and thus improving the product yield of the process and the cleanliness of the production environment.

[0074] In one embodiment, the method for installing the lifting pin 37 on the electrostatic chuck 30 by using the lifting pin installation and calibration tool of the present utility model is as follows:

[0075] The to-be-installed lifting pin 37 is sleeved into a sleeve 38 (teachjig), and the tail of the sleeve 38 exposes the lifting pin 37.

[0076] The lifting pin installation and calibration tool is passed through the exposed tail of the lifting pin 37, so that the lifting pin 37 passes through the installation hole 24 of the needle body 21 and is clamped by the central alignment structure 22.

[0077] The first clamping structure 25 and the second clamping structure 13 between the needle part 20 and the cylinder part 10 are adjusted to fix the needle part 20 and the cylinder part 10 at a preset position.

[0078] One end of the lifting pin 37 sleeved with the sleeve 38 is passed through the pin hole 33 of the electrostatic plate 31, through the lifting pin through hole 36 of the step pin seat block 35, until the bottom of the limiting structure 12 of the cylinder part 10 falls on the pin hole 33, so as to keep the lifting pin 37 perpendicular to the surface of the electrostatic plate 31.

[0079] The step pin seat block 35 is adjusted to the center of the step pin seat hole 34, and the screw for fixing the position of the step pin seat block 35 in the step pin seat hole 34 is fixed, so that the step pin seat block 35 is fixed in the step pin seat hole 34.

[0080] The lifting pin installation and calibration tool is removed from the tail of the lifting pin 37, so that the lifting pin 37 is installed in the pin hole 33 of the electrostatic chuck 30.

[0081] The electrostatic chuck 30 is installed and fixed at a preset position in the process chamber.

[0082] Wipe the lifting pin 37 and the pin hole 33 with a lint-free cloth to reduce the residual particles on the surface of the lifting pin 37 or the pin hole 33, and complete the installation of the lifting pin 37.

[0083] In one embodiment, the material of the sleeve 38 is Teflon (polytetrafluoroethylene).

[0084] In summary, for the lifting pin installation and calibration tool and the electrostatic chuck of the present utility model, by providing that the outer wall of the outer cylinder can abut against the pin hole for installing the lifting pin, it is ensured that the lifting pin does not contact the electrostatic chuck during the installation process, and particle splashing will not occur to cause defects on the wafer surface or contaminate the production line environment; at the same time, by providing the central alignment structure of the needle body to keep the lifting pin at the central position of the needle body, the installation position of the lifting pin is calibrated, ensuring that the installation position error of the lifting pin is within a controllable range, improving the installation position accuracy of the lifting pin, reducing the experience requirements for the staff installing the lifting pin, and improving the installation efficiency and convenience.

[0085] Therefore, the present utility model effectively overcomes various disadvantages in the prior art and has high industrial utilization value.

[0086] The above embodiments are only illustrative of the principles and effects of the present utility model, and are not used to limit the present utility model. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present utility model. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed by the present utility model should still be covered by the claims of the present utility model.

Claims

1. A lifting pin installation and calibration tool, characterized in that: The lift pin installation calibration tool comprises a needle portion and a barrel portion; The needle portion includes a needle body, a center alignment structure and a first locking structure, and the barrel portion includes an outer barrel and a limiting structure; the needle body can be sleeved in the outer barrel; when the needle body is sleeved in the outer barrel, the central axis of the outer barrel coincides with the central axis of the needle body; The central axis of the needle body passes through a mounting hole, and the mounting hole is used to pass the lifting pin to be installed; the center alignment structure is located at the bottom of the needle body, and the central axis of the center alignment structure coincides with the central axis of the needle body. The center alignment structure can clamp the lifting pin to be installed extending from the mounting hole and make the central axis of the lifting pin coincide with the central axis of the needle body; The outer wall of the outer cylinder can abut against the inner wall of the pin hole of the electrostatic chuck installed by the lifting pin to be installed; a limiting structure is arranged around the top edge of the outer cylinder, the outer diameter of the limiting structure is greater than the inner wall diameter of the pin hole, and the bottom surface of the limiting structure is perpendicular to the central axis of the installation hole; A first locking structure is fixed above the position of the needle body corresponding to the limiting structure, and the inner diameter of the first locking structure is greater than the inner diameter of the outer tube and smaller than the outer diameter of the limiting structure, so that the first locking structure can be locked on the limiting structure.

2. The lifting pin installation and calibration tool according to claim 1, characterized in that: The center alignment structure includes 2n elastic sheets, where n is an integer greater than or equal to 1; the first section and the second section are two sections of the needle body passing through the central axis, and the first section and the second section are perpendicular to each other; the elastic sheets are all located at the position of the bottom of the needle body passing through the first section, and the 2n elastic sheets are symmetrically distributed about the second section; the 2n elastic sheets can clamp the lifting pin to be installed that extends from the mounting hole at the bottom of the needle body.

3. The lift pin installation and calibration tool according to claim 1, characterized in that: The center alignment structure includes an annular spring sheet, the maximum outer diameter of which is less than or equal to the outer diameter of the outer tube; the minimum inner diameter of which is less than or equal to the outer diameter of the lifting pin, so that the annular spring sheet can clamp the lifting pin to be installed extending from the mounting hole at the bottom of the needle body.

4. The lift pin installation and calibration tool according to claim 1, characterized in that: The limiting structure is a platform perpendicular to the central axis of the outer cylinder.

5. The lifting pin installation and calibration tool according to claim 4, characterized in that: The limiting structure is an annular platform.

6. The lift pin installation and calibration tool according to claim 1, characterized in that: A second locking structure is fixed on the limiting structure of the barrel, and the first locking structure and the second locking structure can be locked and fixed.

7. The lifting pin installation and calibration tool according to claim 6, characterized in that: The first locking structure is an internal thread surface, and the second locking structure is an external thread surface.

8. The lift pin installation and calibration tool according to claim 6, characterized in that: The first locking structure is an external thread surface, and the second locking structure is an internal thread surface.

9. The lift pin installation and calibration tool according to claim 1, characterized in that: The outer wall of the bottom of the outer cylinder is a conical surface.

10. An electrostatic chuck, characterized in that: The electrostatic chuck uses the lift pin installation calibration tool according to any one of claims 1 to 9 to calibrate the installation of the lift pin; The electrostatic chuck comprises an electrostatic plate and a diverter plate, wherein the diverter plate is fixed under the electrostatic plate; The electrostatic plate includes one or more pin holes penetrating the electrostatic plate, and the pin holes can abut against the outer wall of the outer cylinder in the lifting pin installation calibration tool; The position of the diverter plate corresponding to the pin hole includes a stepped pin seat hole, in which a stepped pin seat block is engaged, and the stepped pin seat block can move in the stepped pin seat hole; the position of the stepped pin seat block corresponding to the pin hole is provided with a lifting pin through hole, and the inner diameter of the lifting pin through hole is greater than or equal to the outer diameter of the lifting pin.

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