Special-shaped mask plate cutting device

Abstract

The utility model discloses a special-shaped mask plate cutting device, which relates to the technical field of mask plate processing equipment and comprises a main body support frame, a longitudinal guide rail is mounted at the top of the main body support frame, a transverse guide rail is mounted below the longitudinal guide rail in a sliding manner, and a movable bracket for clamping a mask plate is connected onto the transverse guide rail in a sliding manner; the movable bracket is connected with a clamping block; a cutting platform is installed at the bottom of the main body supporting frame, and a plurality of supporting columns are installed on the cutting platform through first detachable connecting pieces; a cutting device guide rail is installed on the main body supporting frame over the cutting platform, and the cutting device is connected to the cutting device guide rail in a sliding mode. According to the special-shaped cutting device for the mask, multi-size and special-shaped mask cutting can be achieved, the phenomena of poor product cutting precision, edge breakage or corner breakage in cutting and the like are effectively reduced, and therefore the cutting yield of products is increased, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of mask processing equipment, in particular to a special-shaped mask cutting device. Background Art

[0002] The mask, also known as the photomask or photomask (Photo mask for short), plays an important role in integrated circuits (IC), flat panel displays (FPD), MicroLEDs, printed circuit boards (PCBs) and other fields. It is a key material in the microelectronics manufacturing process and is mainly used for pattern transfer in the semiconductor industry manufacturing process. It is made of an opaque light-shielding film (chromium and chromium oxide commonly used in the industry) on a transparent substrate (quartz glass or soda glass) to form a mask pattern, selectively block exposure, and then the designed layout will be transferred to downstream products through exposure and other processes. Because the downstream products use the pattern on the mask as a benchmark, the accuracy and quality level of the mask will directly affect the yield of the final downstream products. The main manufacturing process of the mask is as follows: first, a layer of metal chromium and chromium oxide is plated on a quartz glass or soda glass substrate (the purpose is to reduce the reflectivity during the exposure process), and then a photoresist is coated on the chromium oxide layer, which is also called photoresist. It is a photosensitive material that changes its chemical properties under the irradiation of light of a specific wavelength. The designed product layout is engraved on the mask through laser or electron beam direct writing lithography equipment. The exposed area is formed through a process (photoresist development, chromium layer etching) to form a design version. Figure 1 The same pattern eventually becomes an exposure mask master that can be used for downstream industry products.

[0003] In addition to the industry standards, the size of the mask also has demands for masks of special sizes or shapes due to the different sizes and shapes of products in the downstream manufacturing industry and the wide variety of industries. For masks of special shapes (circular, triangular, etc.) or sizes, the industry currently uses laser and plasma cutting methods, but these methods have high cutting costs, which in turn increases the budget costs of downstream customers and are not widely used at present.

[0004] At present, the industry still uses glass cutting knives to perform manual scribing and cutting. The cut shapes are still basically square or rectangular, but manual scribing and cutting have problems such as scribing errors, uneven cutting force, and inability to cut masks of special sizes. As a result, the current cutting yield is low and cannot meet the diverse size requirements of customers. Utility Model Content

[0005] Based on the problems pointed out in the background art that the existing mask cutting methods have relatively low cutting yield and cannot meet the diverse size requirements of customers, the purpose of this application is to propose a special-shaped mask cutting device. This mask special-shaped cutting device can realize the cutting of masks with multiple sizes and special shapes, effectively reducing phenomena such as poor cutting accuracy, cutting edge chipping or corner chipping of products, thereby improving the cutting yield of products and increasing production efficiency.

[0006] The utility model is realized through the following technical solutions:

[0007] This application provides a special-shaped mask cutting device, including a main body support frame. A longitudinal guide rail is installed on the top of the main body support frame. A transverse guide rail is slidably installed on the longitudinal guide rail. A moving bracket for clamping the mask is slidably connected below the transverse guide rail. A clamping block is connected to the moving bracket;

[0008] A cutting platform is installed at the bottom of the main body support frame. A plurality of support columns are installed on the cutting platform through a detachable connecting piece one;

[0009] A cutting device guide rail is installed on the main body support frame directly above the cutting platform. The cutting device is slidably connected to the cutting device guide rail.

[0010] Furthermore, the cutting device includes an L-shaped bracket. The L-shaped bracket includes a vertical section and a horizontal section. A slider is connected to the vertical section of the L-shaped bracket. The slider is slidably connected within the cutting device guide rail; A cutting tool head or a cutting grinding head is slidably connected to the horizontal section of the L-shaped bracket.

[0011] Among them, both the cutting tool head and the cutting grinding head can be 360° rotatable cutting tool heads and cutting grinding heads. This enables the cutting tool head and the cutting grinding head to rotate in any direction.

[0012] In addition, an automatic oil injection device can be connected to the cutting tool head and the cutting grinding head. During cutting, the cutting oil will flow along the tool head onto the glass, improving the success rate of post-cutting operations.

[0013] Furthermore, a moving block is sleeved on the horizontal section of the L-shaped bracket. The cutting tool head or the cutting grinding head is installed on the moving block. The moving block is locked by a positioning pin.

[0014] Furthermore, a scale is provided on the horizontal section of the L-shaped bracket.

[0015] Furthermore, the vertical section of the L-shaped bracket is connected to the slider through a detachable connecting piece two.

[0016] Further, the second detachable connecting member includes a mounting post connected to the slider, a threaded groove is provided on the mounting post, and the top of the L-shaped bracket is screwed into the threaded groove of the mounting post.

[0017] Further, the first detachable connecting member includes a plurality of mounting screw ports provided on the cutting platform, and the support column is fixed to the cutting platform through a bolt assembly.

[0018] Further, the clamping block includes a three-sided fixed jaw.

[0019] Further, the moving bracket is of a telescopic structure.

[0020] Further, the telescopic structure includes an electric telescopic rod.

[0021] Among them, the electric structures involved in this application can all be connected to the control system, and the staff can operate on the control interface of the control system to turn on and off the electric structures. In the case of not using the control system, the staff manually controls each electric structure to turn on and off separately.

[0022] Compared with the prior art, the utility model has the following advantages and beneficial effects:

[0023] (1) By connecting the horizontal guide rail, the vertical guide rail and the moving bracket in this application, the mask plate clamped on the moving bracket can be adjusted to different positions. At the same time, the cutting device is also slidably installed on the guide rail, and mask plates of different sizes and shapes can be cut, effectively reducing phenomena such as poor cutting accuracy, cutting edge collapse or corner collapse of the product, thereby improving the cutting yield of the product and improving the production efficiency.

[0024] (2) By using detachable connecting members to install a plurality of support columns on the cutting platform in this application, the upper plate operation of mask plates of different sizes can be realized by adjusting the number and position of the support columns, ensuring the stability and support of the mask plate on the platform.

[0025] (3) By setting scales on the cutting device in this application, the position of the cutting tool head can be accurately adjusted for mask plates of different sizes, ensuring the accuracy of cutting.

[0026] (4) The cutting device of this application is fixed by a detachable connecting member structure, making the cutting device easy to replace.

[0027] (5) By setting the clamping block to a three-sided fixed jaw structure in this application, it can be ensured that the mask plate will not deviate greatly, and the situation of the mask plate falling off can be effectively prevented.

[0028] (6) In this application, the moving bracket is set as a telescopic structure. After the moving bracket transfers the mask plate above the support column, the clamped mask plate can be stably placed on the support column of the cutting platform by extending. Description of the Drawings

[0029] The drawings described herein are used to provide a further understanding of the embodiments of the present utility model, form a part of this application, and do not constitute a limitation to the embodiments of the present utility model. In the drawings:

[0030] Figure 1 It is a front view of a special-shaped mask plate cutting device in the present utility model;

[0031] Figure 2 It is a left view of a special-shaped mask plate cutting device in the present utility model;

[0032] Figure 3 It is a structural schematic diagram of the moving bracket in the present utility model;

[0033] Figure 4 It is a structural schematic diagram of the support column installed when using a cutting tool head for cutting in the present utility model;

[0034] Figure 5 It is a structural schematic diagram of the support column installed when using an alloy grinding head for cutting in the present utility model;

[0035] Figure 6 It is a front view of the installation of the horizontal guide rail and the vertical guide rail in the present utility model;

[0036] Figure 7 It is a side view of the installation of the horizontal guide rail and the vertical guide rail in the present utility model;

[0037] Figure 8 It is a front view of installing a cutting tool head on the horizontal section of the L-shaped bracket in the present utility model;

[0038] Figure 9 It is a side view of installing a cutting tool head on the horizontal section of the L-shaped bracket in the present utility model;

[0039] Figure 10 It is a structural schematic diagram of the installation of the slider and the guide rail of the cutting device in the present utility model.

[0040] Marks in the drawings and corresponding component names:

[0041] 01 - Main support frame, 02 - Cutting platform, 03 - Support column, 04 - Horizontal section, 05 - Moving block, 06 - Cutting tool head, 07 - Vertical section, 08 - Longitudinal guide rail, 09 - Transverse guide rail, 10 - Moving support, 11 - Clamping block, 12 - Control system, 13 - Mask plate, 14 - Cutting device guide rail, 15 - Mounting column, 16 - Oil pump, 17 - Fuel tank, 18 - Oil injection pipe, 19 - Slide block, 20 - Positioning pin. Detailed implementation manners

[0042] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. The components of the embodiments of the present utility model described and illustrated herein can be arranged and designed in various different configurations.

[0043] Therefore, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the claimed present utility model, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the scope of protection of the present utility model.

[0044] It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0045] In the description of the present utility model, it should also be noted that unless otherwise clearly defined and limited, the terms "set", "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0046] Embodiment 1

[0047] Referring to Figures 1 to 10 , this embodiment provides a special-shaped mask plate cutting device, including a main support frame 01. A longitudinal guide rail 08 is installed on the top of the main support frame 01. A transverse guide rail 09 is slidably installed below the longitudinal guide rail 08. A moving support 10 for clamping the mask plate 13 is slidably connected to the transverse guide rail 09. A clamping block 11 is connected to the moving support 10;

[0048] At the bottom of the main support frame 01, a cutting platform 02 is installed, and a plurality of support columns 03 are installed on the cutting platform 02 through detachable connecting member 1;

[0049] On the main support frame 01 directly above the cutting platform 02, a cutting device guide rail 14 is installed, and the cutting device is slidably connected to the cutting device guide rail 14.

[0050] Specifically, the detachable connecting member 1 includes a plurality of installation screw openings provided on the cutting platform 02, and the support columns 03 are fixed to the cutting platform 02 through bolt assemblies.

[0051] Specifically, the cutting device includes an L-shaped bracket. The L-shaped bracket includes a vertical section 07 and a horizontal section 04. A slider 19 is connected to the vertical section 07 of the L-shaped bracket, and the slider 19 is slidably connected within the cutting device guide rail 14; a cutting tool head 06 is slidably connected to the horizontal section 04 of the L-shaped bracket, and the cutting tool head 06 is driven by a cutting oil pump 16. The cutting tool head 06 is a 360° rotatable cutting tool head 06, enabling the cutting tool head 06 to rotate in any direction during the cutting process, thereby enabling the cutting device to cut more types of shaped mask plates 13 and further enhancing the functionality of the cutting device.

[0052] Specifically, a moving block 05 is sleeved on the horizontal section 04 of the L-shaped bracket, the cutting tool head 06 is installed on the moving block 05, and the moving block 05 is locked by a positioning pin 20. Among them, locking holes are provided on both the moving block 05 and the L-shaped bracket. According to the actual cutting position, the staff withdraws the positioning pin 20 from the locking hole, enabling the moving block 05 to move. After moving to the appropriate position, the positioning pin 20 is inserted again to lock the moving block 05.

[0053] Among them, an automatic oil injection device is connected to the moving block 05. The automatic oil injection device includes an oil tank and an oil injection pipe 18 connecting the oil tank and the cutting tool head 06. An electromagnetic valve is connected to the oil injection pipe 18. During cutting, the electromagnetic valve is opened, enabling the oil in the oil tank 17 to flow along the cutting tool head 06 onto the glass, improving the success rate of the operation after cutting.

[0054] Among them, the locking hole can also be a threaded hole structure, and the positioning pin 20 adopts a screw rod structure, which can further enhance the fixing effect of the moving block 05.

[0055] In the actual process, the longitudinal guide rail 08 remains stationary as a whole. The transverse guide rail 09 is installed on the longitudinal guide rail 08, enabling the longitudinal movement of the transverse guide rail 09. Meanwhile, in cooperation with the moving brackets 10 at both ends of the transverse guide rail 09 moving back and forth on the transverse guide rail 09, the effect that the moving bracket 10 can move in any direction can be achieved. After transferring the mask 13 to the designated position, all the moving brackets 10 will return to their original positions. The cutting device is also installed on the cutting device guide rail 14, enabling the cutting tool head 06 to move in any direction. Meanwhile, by using a 360° rotating tool head, the cutting tool head 06 can also utilize its own rotation function to cut a variety of different-shaped masks 13. All the electric structures involved are connected to the control system 12, and the staff can operate on the control interface of the control system 12 to turn on and off the electric structures. It is also possible not to connect to the control system 12, and then the staff can manually control each electric structure to turn on and off separately.

[0056] During use, first, according to the existing size of the mask 13, change the number and position of the support columns 03 to ensure that the mask 13 can be placed horizontally on the support columns 03. The support column 03 consists of a support main body at the bottom and a placement main body at the upper part (the diameter of the support main body at the bottom is larger than that of the placement main body at the upper part). Place the mask 13 to be cut on the moving bracket 10 of the mask 13 and clamp it through the clamping block 11 on the moving bracket 10, so that the mask 13 will not deviate significantly and prevent the mask 13 from falling. The moving bracket 10 transfers the mask 13 to the cutting platform 02 through the transverse slide rail and the longitudinal slide rail. After placing the mask 13, place the tool head of the cutting device at the center of the cutting track. The operator controls the cutting device to move and cut according to the cutting route. After cutting, the part that needs to be cut can be removed by using the existing fixture, and then the cutting is completed.

[0057] When replacing the cutting tool head 06 with an alloy grinding head, different from the cutting steps of the cutting tool head 06, the alloy grinding head cutting device is equipped with an infrared detector. The infrared detector will identify the cutting track device reserved on the mask 13, and the cutting device will cut according to the cutting track. To prevent the problem of the mask 13 falling after cutting for masks 13 with special-shaped sizes, a specific number of support columns 03 without upper support small cylinders will be installed below the center of the mask 13 to be pre-cut, which can prevent the mask 13 from falling after cutting. This cutting method does not use a specific fixture to separate the glass, which is more rapid and convenient.

[0058] The mask plate 13 cutting device can adjust the mask plate 13 clamped on the moving bracket 10 to different positions by connecting the horizontal guide rail 09, the vertical guide rail 08 and the moving bracket 10. At the same time, the cutting device is also slidably installed on the guide rail, and can cut mask plates 13 of different sizes and shapes, effectively reducing phenomena such as poor cutting accuracy, cutting chipping or corner chipping of the product, thereby improving the cutting yield of the product and increasing the production efficiency. By installing a plurality of support columns 03 on the cutting platform 02 by means of detachable connectors, the loading operation of mask plates 13 of different sizes can be realized by adjusting the number and positions of the support columns 03, ensuring the stability and support of the mask plate 13 on the platform.

[0059] Embodiment 2

[0060] Based on Embodiment 1, referring to Figures 1 to 10 , this embodiment provides a special-shaped mask plate cutting device. Different from Embodiment 1, a scale is provided on the horizontal section 04 of the L-shaped bracket in this embodiment. Other technical features are the same as those in Embodiment 1.

[0061] Compared with Embodiment 1, in this embodiment, by setting a scale on the cutting device, the position of the cutting tool head can be accurately adjusted for mask plates 13 of different sizes, ensuring the accuracy of cutting.

[0062] Embodiment 3

[0063] Based on Embodiment 2, referring to Figures 1 to 10 , this embodiment provides a special-shaped mask plate cutting device. Different from Embodiment 2, the vertical section 07 of the L-shaped bracket in this embodiment is connected to the slider 19 by a detachable connector II. Other technical features are the same as those in Embodiment 2.

[0064] Specifically, the detachable connector II includes a mounting post 15 connected to the electric slider 19. A threaded groove is provided on the mounting post 15, and the top of the L-shaped bracket is screwed into the threaded groove of the mounting post 15.

[0065] Compared with Embodiment 2, in this embodiment, the vertical section 07 of the L-shaped bracket and the slider 19 are detachably connected, making the installation and replacement of the entire cutting device more convenient.

[0066] Embodiment 4

[0067] Based on Embodiment 3, referring to Figures 1 to 10 , this embodiment provides a special-shaped mask plate cutting device. Different from Embodiment 3, the clamping block 11 in this embodiment includes a three-sided fixed jaw. Other technical features are the same as those in Embodiment 3.

[0068] Compared with Embodiment 3, in this embodiment, the clamping block 11 is set to a structure of a three-sided fixed jaw, which can ensure that the mask plate 13 will not shift significantly and can effectively prevent the mask plate 13 from falling.

[0069] Embodiment 5

[0070] Based on Embodiment 4, referring to Figures 1 to 10 , this embodiment provides a special-shaped mask plate cutting device. Different from Embodiment 4, the moving bracket 10 in this embodiment is an electric telescopic rod. Other technical features are the same as those in Embodiment 4.

[0071] Compared with Embodiment 4, in this embodiment, the moving bracket 10 is set to an electric telescopic rod. After the moving bracket 10 transfers the mask plate 13 above the support column 03, the clamped mask plate 13 can be stably placed on the support column 03 of the cutting platform 02 by extending.

[0072] The specific embodiments described above further elaborate on the purpose, technical solutions, and beneficial effects of the present invention. It should be understood that the above are only specific embodiments of the present invention and are not used to limit the protection scope of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A special-shaped mask cutting device, characterized in that: It comprises a main support frame (01), a longitudinal guide rail (08) is installed on the top of the main support frame (01), a transverse guide rail (09) is slidably installed below the longitudinal guide rail (08), a movable bracket (10) for clamping a mask (13) is slidably connected to the transverse guide rail (09), and a clamping block (11) is connected to the movable bracket (10); A cutting platform (02) is installed at the bottom of the main support frame (01), and a plurality of support columns (03) are installed on the cutting platform (02) via a detachable connecting piece; A cutting device guide rail (14) is installed on the main body support frame (01) directly above the cutting platform (02), and the cutting device is slidably connected to the cutting device guide rail (14).

2. The device for cutting a special-shaped mask according to claim 1, characterized in that: The cutting device comprises an L-shaped bracket, wherein the L-shaped bracket comprises a vertical section (07) and a horizontal section (04), wherein the vertical section (07) of the L-shaped bracket is connected with a slider (19), and the slider (19) is slidably connected in a guide rail (14) of the cutting device; and a cutting head (06) or a cutting grinding head is slidably connected to the horizontal section (04) of the L-shaped bracket.

3. The special-shaped mask cutting device according to claim 2, characterized in that: A moving block (05) is sleeved on the horizontal section (04) of the L-shaped bracket, the cutting head (06) or the cutting grinding head is installed on the moving block (05), and the moving block (05) is locked by a positioning pin (20).

4. The device for cutting a special-shaped mask according to claim 2, characterized in that: The horizontal section (04) of the L-shaped bracket is provided with a scale.

5. The special-shaped mask cutting device according to claim 2, characterized in that: The vertical section (07) of the L-shaped bracket is connected to the sliding block (19) via a detachable connecting piece 2.

6. The device for cutting a special-shaped mask according to claim 5, characterized in that: The second detachable connecting member comprises a mounting post (15) connected to the sliding block (19), the mounting post (15) being provided with a thread groove, and the top of the L-shaped bracket being screwed into the thread groove of the mounting post (15).

7. The device for cutting a special-shaped mask according to claim 1, characterized in that: The detachable connecting member 1 comprises a plurality of mounting screw holes arranged on the cutting platform (02), and the supporting column (03) is fixed on the cutting platform (02) by a bolt assembly.

8. The device for cutting a special-shaped mask according to claim 1, characterized in that: The clamping block (11) comprises three fixed clamping jaws.

9. The special-shaped mask cutting device according to claim 1, characterized in that: The movable bracket (10) is a telescopic structure.

10. The device for cutting a special-shaped mask according to claim 9, characterized in that: The telescopic structure comprises an electric telescopic rod.

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