Silicon wafer feeding rotating wheel and silicon wafer production line

Abstract

The utility model discloses a silicon wafer feeding rotating wheel and a silicon wafer production line, the feeding rotating wheel comprises a fixed half rotating wheel and a movable half rotating wheel which are oppositely arranged, the peripheral side of the fixed half rotating wheel and the peripheral side of the movable half rotating wheel are configured to be sleeved with a belt, and an elastic part is arranged between the fixed half rotating wheel and the movable half rotating wheel. The elastic part is configured to apply acting force to the movable half rotating wheel to enable the movable half rotating wheel to be far away from the fixed half rotating wheel, the flange is fixedly connected with the fixed half rotating wheel and detachably connected with the movable half rotating wheel, and the movable half rotating wheel is connected with the flange through the adjusting connecting part. The adjusting connecting part is configured to allow relative movement between the fixed half rotating wheel and the movable half rotating wheel to adjust the outer diameter of the rotating wheel, the rotating shaft passes through the flange, and the driving part is configured to drive the flange to rotate. According to the scheme, the feeding rotating wheel is of an outer diameter adjustable structure, belt replacement is facilitated, and the service life is long.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production, in particular to a silicon wafer loading runner and a silicon wafer production line. Background Art

[0002] In the production process of silicon wafers, first, a silicon rod is cut into silicon wafers by a wire saw. At this time, the silicon wafers are pasted on a crystal carrier by a resin plate. Then, the crystal carrier and the cut silicon wafers are put into a material box together, and the material box transports the crystal carrier and the silicon wafers to a degumming station together. A degumming machine is used to separate the crystal carrier from the silicon wafers, and then the silicon wafers are sequentially transported to subsequent stations such as wafer insertion, cleaning, and drying.

[0003] In the silicon wafer production line disclosed in Chinese Patent CN117484702A, during the vertical loading and wafer insertion production process of silicon wafers, a flipping and conveying module is used to receive the vertically positioned silicon wafers conveyed by a vertical conveying part and flip the silicon wafers from a vertical position to a horizontal position. A horizontal conveying module is used to receive the horizontally positioned silicon wafers conveyed by the flipping and conveying module. The flipping and conveying module includes a rubber-coated rolling wheel. The rubber-coated rolling wheel makes a rotational movement, and the silicon wafer is vertically tangentially attached to the rubber-coated rolling wheel and rotates with the rubber-coated rolling wheel to become a horizontal position, and then continues to move forward through a connecting horizontal conveyor belt, completing the transformation of the silicon wafer from a vertical position to a horizontal position and preparing for wafer insertion.

[0004] The rubber-coated rolling wheel is of an integral structure, and the rubber-coated layer can only be used once, with a short service life and non-reusability. After the rubber-coated layer is worn, it needs to be replaced as a whole, and the replacement operation is complex and time-consuming.

[0005] The above information disclosed in this background art is only used to increase the understanding of the background art of this application. Therefore, it may include prior art that is not known to those of ordinary skill in the art. Summary of the Invention

[0006] In view of the problems pointed out in the background art, the utility model proposes a silicon wafer loading runner and a silicon wafer production line. The runner has an adjustable outer diameter structure, which is convenient for belt replacement and has a long service life.

[0007] To achieve the above-mentioned utility model purpose, the utility model adopts the following technical solutions:

[0008] The utility model provides a silicon wafer loading runner, including:

[0009] A fixed semi-runner;

[0010] A movable semi-runner, the movable semi-runner is disposed opposite to the fixed semi-runner, and the outer peripheral sides of the fixed semi-runner and the movable semi-runner are configured to be sleeved with a belt;

[0011] An elastic part is arranged between the fixed half runner and the movable half runner, and the elastic part is configured to apply a force to the movable half runner to move the movable half runner away from the fixed half runner;

[0012] A flange is fixedly connected to the fixed half runner and detachably connected to the movable half runner;

[0013] An adjustment connecting part, the movable half runner is connected to the flange through the adjustment connecting part, and the adjustment connecting part is configured to allow relative movement between the fixed half runner and the movable half runner to adjust the outer diameter of the runner;

[0014] A rotating shaft, via the flange;

[0015] A driving part is configured to drive the flange to rotate.

[0016] In some embodiments, the adjustment connecting part includes a locking part and a guiding groove. The guiding groove is arranged on one of the flange and the movable half runner, and the guiding groove extends along the relative movement direction of the fixed half runner and the movable half runner. The locking part passes through the guiding groove to fix the flange and the movable half runner.

[0017] In some embodiments, the adjustment connecting part further includes a first sub-guiding part and a second sub-guiding part. The first sub-guiding part is arranged on one of the flange and the movable half runner, and the second sub-guiding part is arranged on the other. The first sub-guiding part is slidably connected to the second sub-guiding part, and the movement direction between the first sub-guiding part and the second sub-guiding part is parallel to the relative movement direction of the fixed half runner and the movable half runner.

[0018] In some embodiments, one of the first sub-guiding part and the second sub-guiding part is a positioning groove, and the other is a positioning post. The positioning post moves along the positioning groove, and the positioning groove extends along the relative movement direction of the fixed half runner and the movable half runner.

[0019] In some embodiments, the fixed half runner includes two spaced-apart sub-fixed half runners, and the movable half runner includes two spaced-apart sub-movable half runners. The two sub-fixed half runners and the two sub-movable half runners are respectively arranged opposite to each other;

[0020] The elastic part is arranged between the oppositely arranged sub-fixed half runner and sub-movable half runner. The flange is arranged on the side of the oppositely arranged sub-fixed half runner and sub-movable half runner. The flange is fixedly connected to the sub-fixed half runner and detachably connected to the sub-movable half runner. A connecting rod is arranged between the two opposite flanges.

[0021] In some embodiments, the sub-fixed semi-rotating wheel includes a first circumferential wall and a first lateral wall, and the sub-movable semi-rotating wheel includes a second circumferential wall and a second lateral wall;

[0022] The belt is sleeved on the first circumferential wall and the second circumferential wall;

[0023] The first lateral wall is fixedly connected to the flange, and the second lateral wall is connected to the flange through the adjusting connection portion.

[0024] In some embodiments, the first circumferential wall and the first lateral wall are provided with first mounting holes on the end surface facing the sub-movable semi-rotating wheel;

[0025] The second circumferential wall and the second lateral wall are provided with second mounting holes on the end surface facing the sub-fixed semi-rotating wheel;

[0026] The elastic portion is a spring, one end of the spring is arranged in the first mounting hole, and the other end is arranged in the second mounting hole.

[0027] In some embodiments, an avoidance hole is formed between the relatively arranged first lateral wall and the second lateral wall, and the connecting rod is fixedly connected to the flange through the avoidance hole.

[0028] In some embodiments, the driving portion includes a motor, a first belt pulley is arranged at the power output end of the motor, a second belt pulley is fixedly arranged on the flange, and a synchronous belt is arranged between the first belt pulley and the second belt pulley.

[0029] In some embodiments, a silicon wafer production line is provided, including the rotating wheel as described above, and the rotating wheel is configured to turn a silicon wafer in a vertical posture into a horizontal posture.

[0030] Compared with the prior art, the advantages and positive effects of the present utility model are:

[0031] For the silicon wafer loading rotating wheel of the present disclosure, an elastic portion is arranged between the relatively arranged fixed semi-rotating wheel and the movable semi-rotating wheel, and the distance between the fixed semi-rotating wheel and the movable semi-rotating wheel is adjustable to adjust the outer diameter of the loading rotating wheel. When the movable semi-rotating wheel moves towards the fixed semi-rotating wheel under the action of an external force, the outer peripheral contour of the loading rotating wheel changes from a circular shape to an elliptical shape, and at this time, the belt can be easily removed from the loading rotating wheel. When the movable semi-rotating wheel moves away from the fixed semi-rotating wheel under the elastic force of the elastic portion, the belt is tightened on the loading rotating wheel, realizing the rapid installation of the belt. The loading rotating wheel has an adjustable outer diameter structure, which is convenient for belt replacement and has a long service life.

[0032] After reading the specific embodiments of the present invention in conjunction with the accompanying drawings, other features and advantages of the present invention will become clearer. Description of the Drawings

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, other accompanying drawings can be obtained based on these drawings without creative efforts.

[0034] Figure 1 A schematic diagram of a silicon wafer production line according to some embodiments;

[0035] Figure 2 A structural diagram of a silicon wafer loading wheel according to some embodiments;

[0036] Figure 3 Another structural diagram of a silicon wafer loading wheel according to some embodiments;

[0037] Figure 4 An exploded view of a silicon wafer loading wheel according to some embodiments;

[0038] Figure 5 A side view of a silicon wafer loading wheel according to some embodiments;

[0039] Figure 6 A sectional view of a silicon wafer loading wheel according to some embodiments;

[0040] Figure 7 A partial structural diagram of a silicon wafer loading wheel according to some embodiments;

[0041] Figure 8 A structural diagram of a flange according to some embodiments;

[0042] Figure 9 A structural diagram of a sub - movable half - wheel according to some embodiments;

[0043] Figure 10 Another structural diagram of a sub - movable half - wheel according to some embodiments;

[0044] Figure 11 A structural diagram of a sub - fixed half - wheel according to some embodiments;

[0045] Reference Numerals:

[0046] 11. Cutting station; 12. Horizontal conveying station for material frames; 13. Sharding and flipping station; 14. Horizontal conveying station for silicon wafers; 15. Inserting station; 16. Cleaning and drying station;

[0047] 20. Material frame conveying module;

[0048] 30. Sharding module;

[0049] 40. Flipping and conveying module;

[0050] 50. Horizontal conveying module;

[0051] 60. Material frame;

[0052] 70. Semi - rotating wheel set;

[0053] 100. Fixed semi - rotating wheel; 110. Sub - fixed semi - rotating wheel; 111. First circumferential wall; 112. First lateral wall; 113. First mounting hole; 114. First notch; 120. Positioning post; 130. Third perforation;

[0054] 200. Movable semi - rotating wheel; 210. Sub - movable semi - rotating wheel; 211. Second circumferential wall; 212. Second lateral wall; 213. Second mounting hole; 214. Second notch; 220. First perforation;

[0055] 300. Adjusting connection part; 310. First locking part; 320. Guide groove; 330. First sub - guide part; 340. Second sub - guide part;

[0056] 400. Rotating shaft; 410. Rotating shaft seat; 420. Bearing;

[0057] 500. Driving part; 510. Motor; 520. First pulley; 530. Second pulley; 540. Synchronous belt; 550. Motor seat;

[0058] 600. Flange; 610. Second perforation; 620. Positioning hole;

[0059] 700. Belt;

[0060] 800. Elastic part;

[0061] 910. Connecting rod; 920. End cover; 930. Screw; 940. Avoidance hole; 950. Second locking part; 960. Gap. Detailed implementation mode

[0062] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0063] In the description of the present application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0064] The terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, unless otherwise specified, the meaning of "a plurality" is two or more.

[0065] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "mounted", "connected" and "coupled" should be construed in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0066] In the present utility model, unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the non-direct contact between the first and second features but through other features therebetween. Moreover, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the horizontal height of the first feature is lower than that of the second feature.

[0067] The following disclosure provides many different embodiments or examples for implementing different structures of the present utility model. To simplify the disclosure of the present utility model, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the present utility model. In addition, the present utility model may repeat reference numerals and / or reference letters in different examples. Such repetition is for the purpose of simplification and clarity and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present utility model provides examples of various specific processes and materials, but those of ordinary skill in the art may be aware of the application of other processes and / or the use of other materials.

[0068] In some embodiments, a silicon wafer production line is disclosed, including operations such as silicon wafer cutting, debonding, slicing, loading, cleaning, and drying.

[0069] Referring to Figure 1 , the silicon wafer production line includes a cutting station 11, a debonding station 17, a frame horizontal conveying station 12, a slicing and flipping station 13, a silicon wafer horizontal conveying station 14, an inserting station 15, and a cleaning and drying station 16.

[0070] The cutting station 11 completes the cutting of the silicon rod, the debonding station 17 completes the debonding separation of the crystal carrier and the silicon wafer, the frame horizontal conveying station 12 realizes the horizontal conveying of the frame 60, the slicing and flipping station 13 completes slicing and vertical loading and conveying, the silicon wafer horizontal conveying station 14 completes the horizontal conveying of the silicon wafer, the inserting station 15 completes the inserting of the silicon wafer, and the cleaning and drying station 16 completes the cleaning and drying of the silicon wafer.

[0071] Among them, the frame horizontal conveying station 12, the slicing and flipping station 13, the silicon wafer horizontal conveying station 14, and the inserting station 15 are arranged in sequence along the same straight line and integrated into an integrated machine structure to realize the automatic transfer of the silicon wafer.

[0072] A slicing device, such as a wire sawing machine, is provided on the cutting station 11. The slicing device is used to cut the silicon rod into silicon wafers. After the silicon rod is cut, the silicon wafers are pasted on the crystal carrier by a resin plate, and the crystal carrier together with the silicon wafers is loaded into the frame 60. The frame 60 is transported to the debonding station 17 by a transfer cart.

[0073] A debonding device is provided on the debonding station 17. The debonding device is used to debond and separate the crystal carrier and the silicon wafers. The silicon wafers continue to stay in the frame 60, and the frame 60 conveys the silicon wafers to the next process.

[0074] A frame conveying module 20 is provided on the frame horizontal conveying station 12, which is used to horizontally convey the frame 60 to the slicing and flipping station 13, that is, to convey the debonded silicon wafers to the next station.

[0075] On the wafer slicing and flipping station 13, there are a slicing module 30 and a flipping and conveying module 40. The slicing module 30 is used to slice the wafers in the wafer cassette 60 and convey the sliced wafers upward one by one in a vertical posture. The flipping and conveying module 40 is used to receive the wafers in a vertical posture conveyed by the slicing module 30 and flip the wafers from a vertical posture to a horizontal posture.

[0076] On the wafer horizontal conveying station 14, there is a horizontal conveying module 50, which is used to receive the wafers in a horizontal posture conveyed by the flipping and conveying module 40 and convey the wafers to the wafer inserting station 15 in a horizontal posture.

[0077] On the wafer inserting station 15, there is a wafer basket, which is used to insert the wafers conveyed by the horizontal conveying module 50.

[0078] On the cleaning and drying station 16, there is cleaning and drying equipment, which is used to clean and dry the inserted wafers.

[0079] This wafer production line realizes the full-process transfer automation of wafers, improving the reliability and efficiency of operations such as wafer transfer, slicing, loading, and inserting.

[0080] In some embodiments, the flipping and conveying module 40 includes a loading runner, and the loading runner is configured to flip the wafers in a vertical posture to a horizontal posture.

[0081] In some embodiments, referring to Figures 2 to 6 , where Figure 2 is a structural diagram of a loading runner, Figure 3 is a structural diagram of the loading runner with the belt 700 omitted, Figure 3 is an exploded view of the loading runner, Figure 4 is a side view of the loading runner, Figure 5 is a sectional view of the loading runner, Figure 4 and Figure 5 omit components such as the motor 510.

[0082] The loading runner includes a fixed half runner 100 and a movable half runner 200 arranged oppositely. There is a distance between the fixed half runner 100 and the movable half runner 200 arranged oppositely, providing a displacement space for the relative movement between the two. The outer peripheral sides of the fixed half runner 100 and the movable half runner 200 are configured to sleeved with the belt 700.

[0083] For example, the fixed half runner 100 and the movable half runner 200 are arranged vertically opposite to each other, and the movable half runner 200 is arranged above the fixed half runner 100. The loading runner includes an elastic part 800, and the elastic part 800 is arranged between the fixed half runner 100 and the movable half runner 200. The elastic part 800 is configured to apply a force to the movable half runner 200 to make the movable half runner 200 move away from the fixed half runner 100.

[0084] The loading runner includes a flange 600, the flange 600 is fixedly connected to the fixed semi-runner 100, and the flange 600 is detachably connected to the movable semi-runner 200.

[0085] The loading runner includes an adjustment connection part 300, and the movable semi-runner 200 is connected to the flange 600 through the adjustment connection part 300. The adjustment connection part 300 is configured to allow relative movement between the fixed semi-runner 100 and the movable semi-runner 200 to adjust the outer diameter of the runner.

[0086] The loading runner includes a rotating shaft 400, and the rotating shaft 400 passes through the flange 600.

[0087] The loading runner includes a driving part 500, and the driving part 500 is configured to drive the flange 600 to rotate.

[0088] The surface of the belt 700 is specially processed so that the surface of the belt 700 has a certain water absorption and friction, and can adsorb the silicon wafer to be turned from a vertical posture to a horizontal posture.

[0089] When the loading runner works, the driving part 500 is started, the driving part 500 drives the flange 600 to rotate, the flange 600 drives the fixed semi-runner 100 and the movable semi-runner 200 to rotate synchronously. Since the elastic part 800 applies a force to the movable semi-runner 200 to make the movable semi-runner 200 move away from the fixed semi-runner 100, the belt 700 is tightened on the outer peripheral sides of the fixed semi-runner 100 and the movable semi-runner 200, driving the belt 700 to rotate synchronously, and the belt 700 adsorbs the silicon wafer to be turned from a vertical posture to a horizontal posture.

[0090] When removing the belt 700 from the loading runner, first release the fixed connection between the movable semi-runner 200 and the flange 600, make the movable semi-runner 200 move towards the direction close to the fixed semi-runner 100, the outer diameter of the loading runner decreases, and then fix the flange 600 and the movable semi-runner 200 through the adjustment connection part 300, and the relative positions of the fixed semi-runner 100 and the movable semi-runner 200 are fixed. At this time, the belt 700 can be removed from the loading runner.

[0091] When installing the belt 700 onto the loading runner, the fixed connection between the movable half runner 200 and the flange 600 is released, causing the movable half runner 200 to move towards the fixed half runner 100. The outer diameter of the loading runner decreases. Then, the flange 600 and the movable half runner 200 are fixed by adjusting the connecting part 300, fixing the relative positions of the fixed half runner 100 and the movable half runner 200. The belt 700 is sleeved around the outer circumferential sides of the movable half runner 200 and the fixed half runner 100. Then, the fixed connection between the movable half runner 200 and the flange 600 is released again. Under the elastic force of the elastic part 800, the movable half runner 200 moves away from the fixed half runner 100, increasing the outer diameter of the loading runner and tensioning the belt 700. Finally, the flange 600 and the movable half runner 200 are fixed by adjusting the connecting part 300.

[0092] For the silicon wafer loading runner of the present disclosure, an elastic part 800 is provided between the relatively arranged fixed half runner 100 and the movable half runner 200. The distance between the fixed half runner 100 and the movable half runner 200 is adjustable to adjust the outer diameter of the loading runner. When the movable half runner 200 moves towards the fixed half runner 100 under an external force, the outer peripheral contour of the loading runner changes from circular to oval, and at this time, the belt 700 can be easily removed from the loading runner. When the movable half runner 200 moves away from the fixed half runner 100 under the elastic force of the elastic part 800, the belt 700 is tensioned on the loading runner, realizing the rapid installation of the belt 700.

[0093] In some embodiments, referring to Figures 2 to 6 , the fixed half runner 100 includes two sub-fixed half runners 110 arranged at intervals, the movable half runner 200 includes two sub-movable half runners 210 arranged at intervals, and the two sub-fixed half runners 110 and the two sub-movable half runners 210 are relatively arranged respectively. Figure 9 and Figure 10 are schematic structural diagrams of the sub-movable half runner 210 observed from different directions, Figure 11 is a structural diagram of one type of the sub-fixed half runner 110.

[0094] An elastic part 800 is provided between the relatively arranged sub-fixed half runner 110 and sub-movable half runner 210. Flanges 600 are provided on the sides of the relatively arranged sub-fixed half runner 110 and sub-movable half runner 210. The flange 600 is fixedly connected to the sub-fixed half runner 110, and the flange 600 is detachably connected to the sub-movable half runner 210. A connecting rod 910 is provided between the two opposite flanges 600.

[0095] The sub-fixed half runner 110, the sub-movable half runner 210, and the flange 600 form a half runner group 70. Referring to Figure 3 and Figure 6, the loading runner includes two relatively arranged semi-runner groups 70, and a belt 700 is sleeved on any one of the semi-runner groups 70. The gap 960 between the two semi-runner groups 70 is used to provide an avoidance space for the horizontal conveying module 50, so that the wafers in a horizontal posture can be smoothly conveyed onto the horizontal conveying module 50.

[0096] The two flanges 600 in the two semi-runner groups 70 are fixed through a connecting rod 910, and the two semi-runner groups 70 share a driving part 500 to realize the synchronous rotation of the two semi-runner groups 70.

[0097] In some embodiments, referring to Figure 7 , a plurality of connecting rods 910 are arranged between the two opposite flanges 600 to improve the connection reliability between the two flanges 600.

[0098] In some embodiments, referring to Figure 11 , the sub-fixed semi-runner 110 includes a first circumferential wall 111 and a first lateral wall 112, the first lateral wall 112 is arranged on one side of the first circumferential wall 111, and the first circumferential wall 111 is semi-circular.

[0099] Referring to Figure 9 and Figure 10 , the sub-movable semi-runner 210 includes a second circumferential wall 211 and a second lateral wall 212, the second lateral wall 212 is arranged on one side of the second circumferential wall 211, and the second circumferential wall 211 is semi-circular.

[0100] Referring to Figure 1 and Figure 6 , the belt 700 is sleeved on the first circumferential wall 111 and the second circumferential wall 211.

[0101] The first lateral wall 112 is fixedly connected to the flange 600, and the second lateral wall 212 is connected to the flange 600 through an adjusting connection part 300.

[0102] The sub-fixed semi-runner 110 and the sub-movable semi-runner 210 are respectively composed of a circumferential wall and a lateral wall, with light weight and convenient for processing.

[0103] In some embodiments, referring to Figure 11 , the first circumferential wall 111 and the first lateral wall 112 are provided with first mounting holes 113 on the end surface facing the sub-movable semi-runner 210.

[0104] Referring to Figure 10 , the second circumferential wall 211 and the second lateral wall 212 are provided with second mounting holes 213 on the end surface facing the sub-fixed semi-runner 110.

[0105] Referring to Figure 7, the elastic part 800 is a spring. One end of the spring is arranged in the first mounting hole 113, and the other end is arranged in the second mounting hole 213, which facilitates the installation of the spring.

[0106] There are multiple springs to ensure sufficient force is provided to the sub-active half runner 210.

[0107] In some embodiments, referring to Figure 7 , an avoidance hole 940 is formed between the relatively arranged first side wall 112 and the second side wall 212. The connecting rod 910 is fixedly connected to the flange 600 via the avoidance hole 940.

[0108] Referring to Figure 11 , a first notch 114 is provided on the first side wall 112. Referring to Figure 9 , a second notch 214 is provided on the second side wall 212. Referring to Figure 7 , the first notch 114 and the second notch 214 form the avoidance hole 940.

[0109] Referring to Figure 6 , the connecting rod 910 is fixedly connected to the flange 600 by screws 930.

[0110] In some embodiments, referring to Figure 5 , the adjusting connection part 300 includes a locking part (denoted as the first locking part 310) and a guide groove 320. Referring to Figure 8 、 Figure 9 And Figure 11 , a guide groove 320 is provided on one of the flange 600 and the active half runner 200. The guide groove 320 extends along the relative movement direction of the fixed half runner 100 and the active half runner 200. The first locking part 310 fixes the flange 600 and the active half runner 200 via the guide groove 320.

[0111] For example, a guide groove 320 is provided on the flange 600. The guide groove 320 extends along the relative movement direction of the sub-fixed half runner 110 and the sub-active half runner 210. A first through hole 220 for the first locking part 310 to pass through is provided on the sub-active half runner 210. The first locking part 310 is a screw. The screw passes through the guide groove 320 and the first through hole 220 to fix the flange 600 and the active half runner 200.

[0112] For example, the sub-fixed half runner 110 is arranged below the sub-active half runner 210, and the guide groove 320 extends in the vertical direction.

[0113] When replacing the belt 700, first loosen the first locking member 310 to release the fixed connection between the flange 600 and the sub-movable half runner 210, so that the sub-movable half runner 210 moves towards the sub-fixed half runner 110. The outer peripheral contour of the loading runner changes from circular to elliptical. Then lock the first locking member 310 to stop the sub-fixed half runner 110 and the sub-movable half runner 210 in this position state. At this time, the old belt 700 can be easily removed from the loading runner.

[0114] Then, put the new belt 700 on the outer peripheral sides of the sub-fixed half runner 110 and the sub-movable half runner 210, and loosen the first locking member 310. At this time, the sub-movable half runner 210 moves away from the sub-fixed half runner 110 under the action of the elastic part 800 to tighten the belt 700. Then lock the first locking member 310, and the installation of the new belt 700 is completed.

[0115] The guiding groove 320 guides the movement of the sub-movable half runner 210.

[0116] In some embodiments, referring to Figure 5 、 Figure 8 、 Figure 9 and Figure 11 , the adjusting connection part 300 further includes a first sub-guiding part 330 and a second sub-guiding part 340. One of the flange 600 and the movable half runner 200 is provided with the first sub-guiding part 330, and the other is provided with the second sub-guiding part 340. The first sub-guiding part 330 is slidably connected to the second sub-guiding part 340, and the movement direction between the first sub-guiding part 330 and the second sub-guiding part 340 is parallel to the relative movement direction of the fixed half runner 100 and the movable half runner 200.

[0117] For example, the sub-fixed half runner 110 is arranged below the sub-movable half runner 210, and the first sub-guiding part 330 and the second sub-guiding part 340 slide relative to each other in the vertical direction.

[0118] The sliding connection between the first sub-guiding part 330 and the second sub-guiding part 340 guides the movement of the movable half runner 200 and improves the movement reliability of the movable half runner 200.

[0119] In some embodiments, one of the first sub-guiding part 330 and the second sub-guiding part 340 is a positioning groove, and the other is a positioning post. The positioning post moves along the positioning groove, and the positioning groove extends along the relative movement direction of the fixed half runner 100 and the movable half runner 200.

[0120] For example, referring to Figure 8 , the first sub-guiding part 330 is a positioning groove, and the positioning groove is provided on the flange 600. Referring to Figure 9, the second sub-guide portion 340 is a positioning post, and positioning posts are provided on the sub-movable half runner 210.

[0121] In some embodiments, referring to Figure 5 , the sub-fixed half runner 110 and the flange 600 are fixedly connected through a second locking member 950. For example, the second locking member 950 is a screw. Referring to Figure 8 , the flange 600 is provided with a second through hole 610 for the second locking member 950 to pass through. Referring to Figure 11 , the sub-fixed half runner 110 is provided with a third through hole 130 for the second locking member 950 to pass through.

[0122] In some embodiments, referring to Figure 8 , the flange 600 is provided with a positioning hole 620. Referring to Figure 11 , the sub-fixed half runner 110 is provided with a positioning post 120. The positioning post 120 is inserted into the positioning hole 620, which plays a role in pre-installation positioning for the connection between the flange 600 and the sub-fixed half runner 110.

[0123] In some embodiments, referring to Figure 2 and Figure 3 , the driving portion 500 includes a motor 510. A first pulley 520 is provided at the power output end of the motor 510. A second pulley 530 is fixedly provided on the flange 600. A timing belt 540 is provided between the first pulley 520 and the second pulley 530.

[0124] When the motor 510 is started, it drives the first pulley 520 to rotate, drives the second pulley 530 to rotate through the timing belt 540, and the second pulley 530 drives the flange 600 to rotate. Since the fixed half runner 100 and the movable half runner 200 are both connected to the flange 600, the rotation of the belt 700 can be realized.

[0125] In some embodiments, referring to Figure 2 , the driving portion 500 is located on one side of the loading runner. That is, the driving portion 500 is located at the side of one of the half runner groups 70.

[0126] Referring to Figure 6 , the second pulley 530 is fixedly connected to the flange 600 through a screw 930. The other half runner group 70 further includes an end cover 920, and the end cover 920 is fixedly connected to the flange 600 through a screw 930.

[0127] In some embodiments, referring to Figure 6 , a bearing 420 is provided between the flange 600 and the rotating shaft 400.

[0128] In some embodiments, referring to Figure 4 , rotating shaft seats 410 are respectively provided at both ends of the rotating shaft 400.

[0129] In some embodiments, with reference to Figure 3 , the motor 510 is fixedly disposed on the motor base 550.

[0130] In the description of the above embodiments, the specific features, structures, materials, or characteristics may be combined in any one or more embodiments or examples in a suitable manner.

[0131] The above are only the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention should be covered by the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A silicon wafer feeding wheel, characterized in that: include: Fixed half wheel; A movable semi-rotating wheel, wherein the movable semi-rotating wheel is arranged opposite to the fixed semi-rotating wheel, and the outer peripheral sides of the fixed semi-rotating wheel and the movable semi-rotating wheel are configured to be sleeved with a belt; an elastic portion, disposed between the fixed semi-rotating wheel and the movable semi-rotating wheel, the elastic portion being configured to apply a force to the movable semi-rotating wheel to move the movable semi-rotating wheel away from the fixed semi-rotating wheel; A flange, wherein the flange is fixedly connected to the fixed semi-rotating wheel, and the flange is detachably connected to the movable semi-rotating wheel; an adjusting connection portion, through which the movable half-wheel is connected to the flange, and the adjusting connection portion is configured to allow relative movement between the fixed half-wheel and the movable half-wheel to adjust the outer diameter of the wheel; a rotating shaft, passing through the flange; The driving unit is configured to drive the flange to rotate.

2. The silicon wafer feeding wheel according to claim 1, characterized in that: The adjustment connection portion includes a locking piece and a guide groove. The guide groove is provided on one of the flange and the movable semi-rotating wheel. The guide groove extends along the relative movement direction of the fixed semi-rotating wheel and the movable semi-rotating wheel. The locking piece fixes the flange and the movable semi-rotating wheel via the guide groove.

3. The silicon wafer feeding wheel according to claim 2, characterized in that: The adjustment connection part also includes a first sub-guide part and a second sub-guide part. The first sub-guide part is arranged on one of the flange and the movable semi-rotating wheel, and the second sub-guide part is arranged on the other. The first sub-guide part is slidably connected to the second sub-guide part, and the movement direction between the first sub-guide part and the second sub-guide part is parallel to the relative movement direction of the fixed semi-rotating wheel and the movable semi-rotating wheel.

4. The silicon wafer feeding wheel according to claim 3, characterized in that: One of the first sub-guide portion and the second sub-guide portion is a positioning groove, and the other is a positioning column. The positioning column moves along the positioning groove, and the positioning groove extends along the relative movement direction of the fixed semi-rotating wheel and the movable semi-rotating wheel.

5. The silicon wafer feeding wheel according to claim 1, characterized in that: The fixed semi-rotating wheel comprises two sub-fixed semi-rotating wheels arranged at intervals, and the movable semi-rotating wheel comprises two sub-movable semi-rotating wheels arranged at intervals, and the two sub-fixed semi-rotating wheels and the two sub-movable semi-rotating wheels are arranged opposite to each other respectively; The elastic part is arranged between the relatively arranged sub-fixed semi-rotating wheel and the relatively arranged sub-movable semi-rotating wheel, the flanges are arranged on the sides of the relatively arranged sub-fixed semi-rotating wheel and the relatively arranged sub-movable semi-rotating wheel, the flange is fixedly connected to the sub-fixed semi-rotating wheel, the flange is detachably connected to the sub-movable semi-rotating wheel, and a connecting rod is arranged between the two relatively arranged flanges.

6. The silicon wafer feeding wheel according to claim 5, characterized in that: The sub-fixed semi-rotating wheel comprises a first circumferential wall and a first lateral wall, and the sub-movable semi-rotating wheel comprises a second circumferential wall and a second lateral wall; The belt is sleeved on the first circumferential wall and the second circumferential wall; The first lateral wall is fixedly connected to the flange, and the second lateral wall is connected to the flange via the adjusting connection portion.

7. The silicon wafer feeding wheel according to claim 6, characterized in that: The first circumferential wall and the first lateral wall are provided with first mounting holes on the end surfaces facing the sub-movable semi-rotating wheel; The second circumferential wall and the second lateral wall are provided with second mounting holes on the end surfaces facing the sub-fixed semi-rotating wheel; The elastic part is a spring, one end of the spring is arranged in the first mounting hole, and the other end of the spring is arranged in the second mounting hole.

8. The silicon wafer feeding wheel according to claim 6, characterized in that: An avoidance hole is formed between the first lateral wall and the second lateral wall which are arranged opposite to each other, and the connecting rod is fixedly connected to the flange via the avoidance hole.

9. The silicon wafer feeding wheel according to any one of claims 1 to 8, characterized in that: The driving part comprises a motor, a first pulley is arranged at a power output end of the motor, a second pulley is fixedly arranged on the flange, and a synchronous belt is arranged between the first pulley and the second pulley.

10. A silicon wafer production line, characterized in that: The rotating wheel comprises the rotating wheel as claimed in any one of claims 1 to 9, wherein the rotating wheel is configured to flip a silicon wafer in a vertical posture to a horizontal posture.

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