Water mist discharging device special for scribing machine
By introducing a water-gas separation plate into the exhaust system of the scriber to separate the water vapor and air in the water mist, the problem of increasing humidity and water accumulation caused by the gathering of water mist in the exhaust pipe is solved, and the stable operation of the exhaust equipment is ensured.
Patent Information
- Application Number
- CN202421525633.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-29
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2034-06-29
AI Technical Summary
In the exhaust system of existing scribers, water mist gathers in the exhaust duct, causing increased humidity, which may cause water accumulation and damage the exhaust equipment.
A special drainage mist device for scribers is designed, including a exhaust chamber, an exhaust port, an air inlet, a water-gas separation plate and a drain port. The water-gas separation plate is a mesh structure of three layers of wire, which is arranged in the exhaust chamber close to the air inlet, and is used to separate the water vapor and air in the water mist.
Through the design of the water-gas separation plate, the water vapor and air in the water mist are effectively separated. The water is discharged through the drainage port, and the dry air is discharged by the exhaust pipe, avoiding the increase in humidity and water accumulation caused by the accumulation of water mist, and ensuring the long-term and stable operation of the exhaust equipment.
Smart Images
Figure CN223013598U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of wafer dicing machines, in particular to a special water mist drainage device for a dicing machine. Background Art
[0002] A wafer dicing machine, also known as a dicing machine, is a key device for cutting semiconductor wafers into small-sized chips. During the manufacturing process, it uses a high-speed rotating diamond blade to cut and process the chips on the wafer, cutting the large-sized wafer into small-sized chips. After being cut, these chips can be separated from the wafer and further used in the manufacture of various electronic products, such as mobile phone and computer chips.
[0003] Since the cutting blade of the dicing machine is in a high-speed rotating state during operation and at the same time needs to provide cutting cooling water, a large amount of water vapor and water mist will be generated. Therefore, a suction fan needs to be connected to extract the water mist in the cutting chamber.
[0004] The current solution usually uses a single suction fan or the pipeline suction duct of the factory, connecting to an opening in the cutting chamber to directly extract the water mist in the cutting chamber. This method will cause the water mist to accumulate in the suction pipeline, resulting in increased humidity. Long-term use may cause water accumulation and damage to the suction equipment. Summary of the Utility Model
[0005] In order to solve the above problems, the utility model provides a special water mist drainage device for a dicing machine that can effectively remove water mist.
[0006] A special water mist drainage device for a dicing machine in the utility model includes a suction chamber, a suction port, an air inlet, a water-vapor separation plate, and a drainage port. The suction port is provided on the suction chamber, an air inlet is provided on one side of the suction chamber, a water-vapor separation plate is provided inside the suction chamber, and a drainage port is provided at the lower part of the suction chamber.
[0007] In the above solution, the suction port is connected to the pipeline of the suction equipment, and the air inlet is connected to the air outlet of the cutting chamber. The water mist generated during the cutting of the cutting chamber will be extracted by this pipeline.
[0008] In the above solution, the water-vapor separation plate is arranged at a position close to the air inlet, and the water-vapor separation plate is a three-layer wire mesh structure.
[0009] The advantages and beneficial effects of the utility model are as follows: The utility model provides a special water mist drainage device for a dicing machine that can effectively remove water mist. The water-vapor separation plate arranged inside the suction chamber can effectively separate the water vapor and air in the water mist. The collected water will be discharged through the drainage port, and the dry air will be discharged through the suction pipeline, ensuring that the suction equipment can operate stably for a long time in a dry environment. Description of the Drawings
[0010] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the attached drawings required for the description of the embodiments or the prior art. Obviously, the attached drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other attached drawings can be obtained based on these drawings.
[0011] Figure 1 It is a structural schematic diagram of the present invention.
[0012] In the figure: 1. Exhaust air chamber, 2. Exhaust air port, 3. Air inlet, 4. Water-vapor separation plate, 5. Drainage port Specific embodiments
[0013] The following will further describe the specific embodiments of the present invention in conjunction with the attached drawings and embodiments. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention and cannot be used to limit the protection scope of the present invention.
[0014] As Figure 1 shown, the present invention is a special water mist drainage device for a dicing machine, including an exhaust air chamber 1, an exhaust air port 2, an air inlet 3, a water-vapor separation plate 4, and a drainage port 5. The exhaust air port 2 is provided on the exhaust air chamber 1, the air inlet 3 is provided on one side of the exhaust air chamber 1, a water-vapor separation plate 4 is provided inside the exhaust air chamber 1, and the drainage port 5 is provided at the lower part of the exhaust air chamber 1. The exhaust air port 2 is connected to the pipeline of the exhaust air equipment, and the air inlet 3 is connected to the air outlet of the cutting chamber. At this time, an exhaust air pipeline of the exhaust air equipment - exhaust air chamber - cutting chamber can be formed, and the water mist generated by the cutting of the cutting chamber will be extracted by this pipeline.
[0015] The water-vapor separation plate 4 is arranged at a position close to the air inlet 3. The water-vapor separation plate 4 is a three-layer wire mesh structure. When the water mist containing a large amount of water vapor passes through, these mesh structures will collect the water vapor therein and form water droplets. The water droplets will fall to the bottom of the exhaust air chamber 1, and the dry air filtered by the water-vapor separation plate 4 will be extracted from the exhaust air chamber 1 by the exhaust air pipeline. A drainage port 5 is provided at the bottom of the exhaust air chamber 1, and the collected water will be discharged from the exhaust air chamber 1 through this port.
[0016] The wafer dicing machine will continuously generate a large amount of water mist during operation. The present invention connects the exhaust air equipment to collect and separate the water and air in the water mist in the cutting chamber, and then the water and air are discharged respectively to ensure the long-term stable operation of the exhaust air equipment.
[0017] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
Claims
1. A special drainage mist device for a dicing machine, characterized in that: It includes an exhaust bin, an exhaust port, an air inlet, a water vapor separation plate and a drain port. The exhaust bin is provided with an exhaust port, one side of the exhaust bin is provided with an air inlet, a water vapor separation plate is provided in the exhaust bin, and the lower part of the exhaust bin is provided with a drain port.
2. A water-discharging mist device for a dicing machine according to claim 1, characterized in that: The air exhaust port is connected to a pipeline of an air exhaust device, the air inlet is connected to an air outlet of a cutting chamber, and water mist generated by cutting in the cutting chamber will be extracted by the pipeline.
3. The water-discharging mist device for a dicing machine according to claim 1, characterized in that: The water-gas separation plate is arranged at a position close to the air inlet, and the water-gas separation plate is a mesh structure of three layers of iron wire.