High-temperature-resistant bidirectional high-vacuum isolation valve

By designing a high-temperature resistant bidirectional high-vacuum isolation valve under high temperature conditions, using the open cylinder drive sealing plate assembly for movement, and combining water pipe cooling measures, the problems of short service life and poor sealing effect at high temperatures in the prior art are solved, and efficient vacuum sealing and long life are achieved.

CN223019548UActive Publication Date: 2025-06-24HUNAN YUFENG VACUUM SCI & TECH CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202422100119.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-28
Publication Date
2025-06-24
Estimated Expiration
2034-08-28

AI Technical Summary

Technical Problem

The existing high-vacuum isolation valves have short service life and poor sealing effect under high temperature conditions, making it difficult to meet the strict requirements for vacuum sealing in the inline coating production line of aviation curved transparent parts.

Method used

A high-temperature resistant bidirectional high vacuum isolation valve is designed, and multiple open cylinders drive seal plate components are used to move away and face each other, ensuring that the valve maintains good vacuum sealing performance under high temperature conditions, and circulating and cooling through the water pipe to avoid overheating of the seal plate.

Benefits of technology

It realizes long-term stable vacuum sealing under high temperature conditions, extends the service life of the valve, and improves sealing performance and reliability.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223019548U_ABST
    Figure CN223019548U_ABST
Patent Text Reader

Abstract

The utility model discloses a high-temperature-resistant bidirectional high-vacuum isolation valve, which belongs to the field of vacuum coating equipment and comprises a valve body, a mounting frame, a sealing plate component and a driving component, the valve body is provided with the mounting frame, the sealing plate component is arranged in the valve body, and the driving component is arranged on the mounting frame; the sealing plate assembly comprises a middle plate, a plurality of first assembling holes arranged in rows are formed in the middle plate, a first sealing plate and a second sealing plate which are arranged in parallel are arranged on the two sides of the middle plate, opening air cylinders are arranged at the positions, corresponding to the first assembling holes, of the second sealing plate, and the opening air cylinders penetrate through the first assembling holes and enable telescopic rods to be connected to the first sealing plate; and one side of the middle plate is connected to a driving assembly. The first sealing plate and the second sealing plate are driven by the multiple opening air cylinders to move away from each other, so that the first sealing plate and the second sealing plate are opened to press the valve port, the valve is in a two-way sealing state, and good vacuum sealing performance is guaranteed.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model belongs to the field of vacuum coating equipment, and specifically relates to a high-temperature resistant bidirectional high-vacuum isolation valve. Background Art

[0002] The vacuum chamber modules of the in-line coating production line for aviation curved transparent parts are arranged in the technological sequence as follows: the transfer and feeding rough vacuum chamber C1, the feeding medium vacuum chamber C2, the feeding high vacuum chamber C3, the process coating chamber C4 (the number of process coating chambers is set differently according to different coating processes), the discharging high vacuum chamber C5, the discharging medium vacuum chamber C6, and the discharging rough vacuum chamber C7. Their vacuum degrees are in turn: C1 is mPa, C2 is nPa, C3 is iPa, C4 is rPa, C5 is iPa, C6 is nPa, and C7 is mPa (where: m > n > i > r). In order to meet the requirements of the vacuum gradient from low to high and then from high to low between each vacuum chamber and the atmosphere isolation requirements between each process chamber, high-vacuum isolation valves need to be installed between two adjacent vacuum chambers to ensure good vacuum sealing when the sealing valve plate assembly switches between the open state and the closed state. The existing valves generally have problems such as short service life and poor sealing effect.

[0003] Secondly, vacuum armored heaters are installed inside the vacuum chamber modules of C1 - C5 of the in-line coating production line for aviation curved transparent parts according to process requirements. The process requires the heaters to heat the workpieces to a temperature of 150 - 350°C, and the heater temperature is even higher than this temperature, about 500 - 600°C. The high-temperature working range of the fluororubber sealing ring of the valve is between 20°C and 200°C. When the valve works under this high-temperature condition for a long time, it is very easy to have problems such as deformation of the sealing plate and failure of the sealing ring, resulting in the vacuum degree of the vacuum chamber not meeting the requirements. Content of the Utility Model

[0004] The purpose of the utility model is to provide a high-temperature resistant bidirectional high-vacuum isolation valve to solve the problems put forward in the above background art.

[0005] The utility model provides a high-temperature resistant bidirectional high-vacuum isolation valve, which includes a valve body, a mounting rack, a sealing plate assembly, and a driving assembly. The valve body is provided with a mounting rack, the inside of the valve body is provided with a sealing plate assembly, and the driving assembly is arranged on the mounting rack;

[0006] The sealing plate assembly includes a middle plate. A number of first assembly holes arranged in rows are opened on the middle plate. On both sides of the middle plate, a first sealing plate and a second sealing plate are arranged in parallel. At the position corresponding to the first assembly holes on the second sealing plate, there is an opening cylinder. The opening cylinder passes through the first assembly hole and connects the telescopic rod to the first sealing plate;

[0007] One side of the middle plate is connected to the driving assembly.

[0008] Further solution: A second assembly hole is also formed in the middle plate. A guide rod is arranged in the second assembly hole. One end of the guide rod is connected to the first sealing plate or the second sealing plate, and the other end is connected with a spring. The other end of the spring is fixed to the second sealing plate or the first sealing plate.

[0009] Further solution: A sliding sleeve is assembled in the second assembly hole, and the guide rod passes through the sliding sleeve.

[0010] Further solution: The valve body is provided with a side mounting plate. Middle plate chutes are installed at both ends of the valve body. The middle plate chutes are fixedly installed on the side mounting plate and are located inside the valve body. Support roller assemblies are arranged at both ends of the middle plate, and the support roller assemblies are assembled in the middle plate chutes.

[0011] Further solution: A sealing plate welded bellows is sleeved outside the opening cylinder. One end of the sealing plate welded bellows is hermetically connected to the first sealing plate, and the other end is hermetically connected to the second sealing plate.

[0012] Further solution: A plurality of reflecting plates are installed on the side of the first sealing plate away from the second sealing plate. A water pipe is arranged on the side of the first sealing plate close to the second sealing plate. The reflecting plates are made of mirror surface metal plates. A plurality of hanging plate inserts are arranged on the surface of the reflecting plate on the side assembled with the first sealing plate, and a plurality of hanging grooves corresponding to the hanging plate inserts are arranged on the surface of the first sealing plate.

[0013] Further solution: A plurality of reflecting plates are installed on the side of the second sealing plate away from the first sealing plate. A water pipe is arranged on the side of the second sealing plate close to the first sealing plate. The reflecting plates are made of mirror surface metal plates. A plurality of hanging plate inserts are arranged on the surface of the reflecting plate on the side assembled with the second sealing plate, and a plurality of hanging grooves corresponding to the hanging plate inserts are arranged on the surface of the second sealing plate.

[0014] Further solution: The driving assembly includes a cylinder top plate and a traction rod. A cylinder roller is arranged at each end of the cylinder top plate. Cylinder roller chutes for the cylinder rollers to move are respectively arranged at both ends of the mounting frame. Two groups of driving cylinders are also arranged on the mounting frame. The ends of the telescopic rods of the two groups of driving cylinders are connected to the cylinder top plate. One end of the traction rod is connected to the center of the cylinder top plate, and the other end of the traction rod is connected to the middle plate. The two groups of driving cylinders are symmetrically arranged on both sides of the traction rod.

[0015] Further solution: A cylinder bellows is sleeved outside the traction rod. One end of the cylinder bellows is hermetically connected to the cylinder top plate, and the other end is hermetically connected to the valve body.

[0016] Further solution: Sealing grooves are arranged on the side surfaces of the first sealing plate and the second sealing plate that cooperate with the inner wall surface of the valve body, and sealing rings are installed in the sealing grooves.

[0017] Compared with the prior art, the beneficial effects of the present utility model are as follows: By driving the first sealing plate and the second sealing plate to move away from each other through multiple opening cylinders, the first sealing plate and the second sealing plate are opened and pressed against the valve port, so that the valve is in a double-sided sealing state, ensuring good vacuum sealing performance. By driving the first sealing plate and the second sealing plate to move towards each other through multiple opening cylinders, after the first sealing plate and the second sealing plate are separated from the inner wall of the valve body, the sealing plate assembly is then taken away from the valve port position by the driving assembly, which can avoid the wear of the first sealing plate and the second sealing plate and will not scrape the sealing ring, improving the sealing performance and service life.

[0018] A further beneficial effect of the present utility model is that water pipes are arranged on the sides of the first sealing plate and the second sealing plate, and circulating cooling water flows through the water pipes, avoiding excessive temperature rise and deformation of the first sealing plate and the second sealing plate, preventing the influence on the service life of the sealing rings on the first sealing plate and the second sealing plate, and the valve has good vacuum sealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] For the convenience of those skilled in the art to understand, the present utility model will be further described below in conjunction with the accompanying drawings.

[0020] Figure 1 is a schematic structural diagram of an embodiment of the present utility model;

[0021] Figure 2 is an application schematic diagram of an embodiment of the present utility model;

[0022] Figure 3 is a cross-sectional view of an embodiment of the present utility model;

[0023] Figure 4 is a schematic diagram of an embodiment of the present utility model in a closed state;

[0024] Figure 5 is a schematic diagram of an embodiment of the present utility model in an open state;

[0025] Figure 6 is a partial cross-sectional view of the first sealing plate / second sealing plate in an embodiment of the present utility model.

[0026] In the figure: 1-valve body; 11-side mounting plate; 12-middle plate chute; 2-mounting frame; 21-cylinder roller chute; 5-first vacuum chamber; 6-second vacuum chamber;

[0027] Sealing plate assembly: 301-mounting plate; 302-opening cylinder; 303-sealing plate welded bellows; 304-supporting roller assembly; 305-first sealing plate; 306-middle plate; 307-second sealing plate; 308-sliding sleeve; 309-guiding rod; 310-water pipe; 311-reflecting plate; 312-hanging groove; 313-hanging plate insert; 314-spring; 315-sealing groove;

[0028] Drive assembly: 41 - cylinder roller; 42 - cylinder top plate; 43 - towing bar; 44 - cylinder bellows; 45 - drive cylinder. Specific embodiments

[0029] In order to make the objectives, technical solutions and advantages of the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model, that is, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Usually, the components of the embodiments of the present utility model described and shown in the accompanying drawings herein can be arranged and designed in various different configurations.

[0030] Therefore, the detailed description of the embodiments of the present utility model provided in the accompanying drawings below is not intended to limit the scope of the claimed present utility model, but only represents the selected embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of protection of the present utility model.

[0031] Please refer to Figure 1 、 Figure 2 As shown, this embodiment provides a high-temperature resistant bidirectional high-vacuum isolation valve, including a valve body 1, a mounting bracket 2, a sealing plate assembly and a drive assembly. The valve body 1 includes a first side for connecting with a first vacuum chamber 5, a second side for connecting with a second vacuum chamber 6, and a third side for arranging the mounting bracket 2. A sealing plate assembly is arranged inside the valve body 1, and a drive assembly is arranged on the mounting bracket 2. The valve body 1 is a rectangular box structure. The first side and the second side are two opposite sides. The first vacuum chamber 5 is hermetically installed on the first side. A first valve port is opened on the first side and can communicate with the first vacuum chamber 5. The second vacuum chamber 6 is hermetically installed on the second side. A second valve port is opened on the second side and can communicate with the second vacuum chamber 6. The positions of the first valve port and the second valve port correspond. The sealing plate assembly can slide inside the valve body 1 under the action of the drive assembly. When the sealing plate assembly slides to the first valve port and the second valve port, the valve can be closed. When the sealing plate assembly leaves the first valve port and the second valve port, the valve can be opened. When there is workpiece transmission, the valve is in the open state. When vacuum isolation is required, the valve is in the closed state. The maximum stroke of the sealing plate assembly moving under the action of the drive assembly ≧ the dimensions of the first valve port and the second valve port in this translation direction, so that the sealing plate assembly completely leaves the first valve port and the second valve port, ensuring the maximum passing dimensions of the first valve port and the second valve port.

[0032] Specifically, please refer to Figures 3 - 5As shown, the sealing plate assembly includes a middle plate 306. One side of the middle plate 306 is connected to the driving assembly. A number of first assembly holes arranged in rows are formed on the middle plate 306. On both sides of the middle plate 306, a first sealing plate 305 and a second sealing plate 307 are arranged in parallel. At the position corresponding to the first assembly holes on the second sealing plate 307, there is an opening cylinder 302. The opening cylinder 302 passes through the first assembly hole and its telescopic rod is connected to the first sealing plate 305. Further, a mounting plate can be connected to the end of the telescopic rod of the opening cylinder 302, and the mounting plate is fixed on the first sealing plate 305.

[0033] The opening cylinder 302 is a pneumatic actuator that can perform opening or closing actions and is a reciprocating telescopic cylinder. A plurality of opening cylinders 302 together form a cylinder group, which drives the first sealing plate 305 and the second sealing plate 307 to move towards each other or away from each other. The entire cylinder group is controlled by the same solenoid valve and opens or contracts synchronously. The distance between the first sealing plate 305 and the second sealing plate 307 becomes smaller as the opening cylinder 302 contracts. When the first sealing plate 305 and the second sealing plate 307 leave the wall surface of the valve body 1, the sealing plate assembly can perform an overall translational movement to open the valve. Figure 5 The valve opening state is shown. When the sealing plate assembly is translated to the position corresponding to the first valve port and the second valve port, the opening cylinders 302 open synchronously. The first sealing plate 305 seals the first valve port, and the second sealing plate 307 seals the second valve port to complete the closing of the valve and achieve two-way sealing and isolation. Figure 4 The valve closing state is shown.

[0034] In some embodiments, second assembly holes are also formed on the middle plate 306. Specifically, four second assembly holes can be formed around each first assembly hole. The four second assembly holes are distributed in a rectangle outside the first assembly hole. A guide rod 309 is arranged in the second assembly hole. One end of the guide rod 309 is connected to the first sealing plate 305 or the second sealing plate 307, and the other end is connected with a spring 314. The other end of the spring 314 is fixed to the second sealing plate 307 or the first sealing plate 305.

[0035] Further, a shoulder is provided at the end of the guide rod 309 different from the end connected to the spring 314, so as to limit the movement stroke of the first sealing plate 305 and the second sealing plate 307 and prevent the first sealing plate 305 and the second sealing plate 307 from moving too far and colliding with the middle plate 306.

[0036] Furthermore, a sliding sleeve 308 is assembled in the second assembly hole. The guide rod 309 passes through the sliding sleeve 308. The cooperation between the guide rod 309 and the sliding sleeve 308 can not only guide the movement of the first sealing plate 305 and the second sealing plate 307, but also reduce friction.

[0037] In some embodiments, a side mounting plate 11 is provided on the third side surface of the valve body 1. Middle plate chutes 12 are installed at both ends of the valve body 1. The middle plate chutes 12 are fixedly installed on the side mounting plate 11 and are located inside the valve body 1. Support roller assemblies 304 are provided at both ends of the middle plate 306. The support roller assemblies 304 are fixed to both ends of the middle plate 306 through roller shafts. The support roller assemblies 304 are assembled in the middle plate chutes 12. When the middle plate 306 is translated under the action of the driving assembly, the support roller assemblies 304 roll in the middle plate chutes 12, so that the middle plate 306 does not skew during reciprocating motion.

[0038] In some embodiments, a sealing plate welded bellows 303 is sleeved outside the opening cylinder 302. One end of the sealing plate welded bellows 303 is hermetically connected to the first sealing plate 305, and the other end is hermetically connected to the second sealing plate 307, ensuring no vacuum leakage during the inflation and exhaust processes of the opening cylinder 302. The contraction length of the sealing plate welded bellows 303 can meet the stroke requirements of the first sealing plate 305 and the second sealing plate 307.

[0039] In some embodiments, referring to Figure 6 as shown, a plurality of reflector plates 311 are installed on the side of the first sealing plate 305 away from the second sealing plate 307. A water pipe 310 is provided on the side of the first sealing plate 305 close to the second sealing plate 307. The reflector plates 311 are made of mirror metal plates. A plurality of hanging plate inserts 313 are provided on the surface of the reflector plates 311 that are assembled with the first sealing plate 305. A plurality of hanging grooves 312 corresponding to the hanging plate inserts 313 are provided on the surface of the first sealing plate 305, so as to install the reflector plates 311 on the first sealing plate 305. The reflector plates 311 can reflect the thermal radiation of the vacuum chamber, avoiding excessive temperature rise of the first sealing plate 305. The water pipe 310 can be a metal pipe welded to the surface of the first sealing plate 305, with circulating cooling water inside, and the water temperature is 15 - 25 °C, used to dissipate heat from the first sealing plate 305. The hanging grooves 312 are made of heat-insulating materials to avoid or reduce the heat transfer of the reflector plates 311 hanging in the hanging grooves 312 to the first sealing plate 305.

[0040] In some embodiments, a plurality of reflector plates 311 are installed on the side of the second sealing plate 307 away from the first sealing plate 305. A water pipe 310 is provided on the side of the second sealing plate 307 close to the first sealing plate 305. The reflector plates 311 are made of mirror metal plates. A plurality of hanging plate inserts 313 are provided on the surface of the reflector plate 311 that is assembled with the second sealing plate 307. A plurality of hanging grooves 312 corresponding to the hanging plate inserts 313 are provided on the surface of the second sealing plate 307, so as to install the reflector plate 311 on the second sealing plate 307. The reflector plates 311 can reflect the thermal radiation of the vacuum chamber, avoiding excessive temperature rise of the second sealing plate 307. The water pipe 310 can be a metal pipe welded to the surface of the second sealing plate 307, with circulating cooling water inside, and the water temperature is 15 - 25 °C, which is used to dissipate heat from the second sealing plate 307. The hanging grooves 312 are made of heat-insulating materials to avoid or reduce the heat transfer of the reflector plate 311 hanging in the hanging grooves 312 to the second sealing plate 307.

[0041] A variety of cooling and heat dissipation measures are taken for the first sealing plate 305 and the second sealing plate 307 to avoid excessive temperature rise of the first sealing plate 305 and the second sealing plate 307, which may cause deformation, and to avoid the influence of the heater on the first sealing plate 305 and the second sealing plate 307, resulting in excessive temperature rise and affecting the service life of the sealing ring and the vacuum seal.

[0042] In some embodiments, please refer to Figure 3 As shown, the driving assembly includes a cylinder top plate 42 and a traction rod 43. A cylinder roller 41 is provided at each end of the cylinder top plate 42. Cylinder roller chutes 21 for the cylinder rollers 41 to move are respectively provided at both ends of the mounting frame 2. Two sets of driving cylinders 45 are also provided on the mounting frame 2. The ends of the telescopic rods of the two sets of driving cylinders 45 are connected to the cylinder top plate 42. One end of the traction rod 43 is connected to the center of the cylinder top plate 42, and the other end of the traction rod 43 is connected to the middle plate 306. The two sets of driving cylinders 45 are symmetrically arranged on both sides of the traction rod 43. The driving cylinders 45 are double-acting reciprocating cylinders. The two sets of driving cylinders 45 are controlled by the same solenoid valve and perform telescopic actions synchronously, driving the cylinder top plate 42 to perform reciprocating linear motion along the cylinder roller chutes 21, so as to drive the sealing plate assembly to perform reciprocating linear motion through the traction rod 43, realizing the opening and closing of the valve.

[0043] Furthermore, a cylinder bellows 44 is sleeved outside the traction rod 43. One end of the cylinder bellows 44 is hermetically connected to the cylinder top plate 42, and the other end is hermetically connected to the valve body 1, specifically connected to the side mounting plate 11. The contraction length of the cylinder bellows 44 can meet the reciprocating stroke requirements of the sealing plate assembly, ensuring good vacuum seal when the sealing plate assembly performs reciprocating motion for opening and closing the valve.

[0044] In some embodiments, a sealing groove 315 is provided on one side of the first sealing plate 305 and the second sealing plate 307 that cooperate with the inner wall surface of the valve body 1. A sealing ring is installed in the sealing groove 315, and a high-temperature resistant fluororubber sealing ring is used. When the valve is closed, the first sealing plate 305 and the second sealing plate 307 are in close contact with the inner wall surface of the valve body 1 and are sealed by the rubber sealing ring. The water pipe 310 can be arranged at a position corresponding to the sealing groove 315, except that the water pipe 310 and the sealing groove 315 are respectively located on the opposite sides of the first sealing plate 305 or the second sealing plate 307. The connection between the water pipe 310 and the first sealing plate 305 or the second sealing plate 307 can be treated with a weld to increase the heat conduction area.

[0045] The opening cylinder 302 and the driving cylinder 45 of the present utility model are two sets of independent power driving systems, and the solenoid valves are independently controlled. Their operations do not interfere with each other, the failure rate is low, and maintenance is convenient.

[0046] It should be noted that the opening cylinder 302 and the driving cylinder 45 can also be replaced with hydraulic cylinders or electric cylinders.

[0047] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, terms such as "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0048] The above content is only an example and explanation of the structure of the present utility model. Those skilled in the art of this technology can make various modifications, supplements, or use similar methods to replace the specific embodiments described. As long as they do not deviate from the structure of the utility model or exceed the scope defined by this claim book, they should fall within the protection scope of the present utility model.

Claims

1. A high temperature resistant bidirectional high vacuum isolation valve, characterized in that: It includes a valve body, a mounting frame, a sealing plate assembly and a driving assembly, wherein the valve body is provided with a mounting frame, a sealing plate assembly is provided inside the valve body, and a driving assembly is provided on the mounting frame; The sealing plate assembly comprises a middle plate, a plurality of first assembly holes arranged in a row are opened on the middle plate, a first sealing plate and a second sealing plate arranged in parallel are arranged on both sides of the middle plate, an opening cylinder is arranged at a position corresponding to the first assembly hole on the second sealing plate, the opening cylinder passes through the first assembly hole and connects the telescopic rod to the first sealing plate; One side of the middle plate is connected to the driving assembly.

2. A high temperature resistant bidirectional high vacuum isolation valve according to claim 1, characterized in that: The middle plate is also provided with a second assembly hole, in which a guide rod is provided, one end of the guide rod is connected to the first sealing plate or the second sealing plate, and the other end is connected to a spring, and the other end of the spring is fixed to the second sealing plate or the first sealing plate.

3. A high temperature resistant bidirectional high vacuum isolation valve according to claim 2, characterized in that: A sliding sleeve is installed in the second assembly hole, and the guide rod passes through the sliding sleeve.

4. A high temperature resistant bidirectional high vacuum isolation valve according to claim 1, characterized in that: The valve body is provided with a side mounting plate, and middle plate slide grooves are installed at both ends of the valve body. The middle plate slide grooves are fixedly installed on the side mounting plates and located in the valve body. Support roller assemblies are provided at both ends of the middle plate, and the support roller assemblies are assembled in the middle plate slide grooves.

5. A high temperature resistant bidirectional high vacuum isolation valve according to claim 1, characterized in that: A sealing plate welded bellows is sleeved outside the open cylinder. One end of the sealing plate welded bellows is sealed and connected to the first sealing plate, and the other end is sealed and connected to the second sealing plate.

6. A high temperature resistant bidirectional high vacuum isolation valve according to claim 1, characterized in that: A plurality of reflecting plates are installed on the side of the first sealing plate away from the second sealing plate, a water pipe is provided on the side of the first sealing plate close to the second sealing plate, the reflecting plates are made of mirror metal plates, a plurality of hanging plate inserts are provided on the side where the reflecting plates and the first sealing plate are assembled, and a plurality of hanging grooves are provided on the surface of the first sealing plate corresponding to the hanging plate inserts.

7. A high temperature resistant bidirectional high vacuum isolation valve according to claim 1 or 6, characterized in that: A plurality of reflecting plates are installed on the side of the second sealing plate away from the first sealing plate, a water pipe is provided on the side of the second sealing plate close to the first sealing plate, the reflecting plates are made of mirror metal plates, a plurality of hanging plate inserts are provided on the side where the reflecting plates and the second sealing plate are assembled, and a plurality of hanging grooves are provided on the surface of the second sealing plate corresponding to the hanging plate inserts.

8. A high temperature resistant bidirectional high vacuum isolation valve according to claim 1, characterized in that: The driving assembly includes a cylinder top plate and a traction rod. A cylinder roller is provided at each end of the cylinder top plate. Cylinder roller slideways for the cylinder rollers to move are provided at each end of the mounting frame. Two groups of driving cylinders are also provided on the mounting frame. The ends of the telescopic rods of the two groups of driving cylinders are connected to the cylinder top plate. The center of the cylinder top plate is connected to one end of the traction rod, and the other end of the traction rod is connected to the middle plate. The two groups of driving cylinders are symmetrically arranged on both sides of the traction rod.

9. A high temperature resistant bidirectional high vacuum isolation valve according to claim 8, characterized in that: The traction rod is sheathed with a cylinder bellows, one end of the cylinder bellows is sealed and connected to the cylinder top plate, and the other end is sealed and connected to the valve body.

10. A high temperature resistant bidirectional high vacuum isolation valve according to claim 1, characterized in that: A sealing groove is provided on a side surface of the first sealing plate and the second sealing plate that matches with the inner wall surface of the valve body, and a sealing ring is installed in the sealing groove.