Ceramic setter plate with hollow structure

Abstract

The utility model relates to the technical field of ceramic plates, in particular to a ceramic setter plate with a hollow structure, which comprises a plurality of layers of netlike bodies with meshes. The net-shaped body comprises a plurality of first bearing rods arranged in parallel and a plurality of second bearing rods arranged in parallel, the first bearing rods and the second bearing rods are connected to form a net shape, and third bearing rods are arranged at the joints of the first bearing rods and the second bearing rods. A preset included angle is formed between the axial direction of the third bearing rod and the plane formed by the first bearing rod and the second bearing rod, every two adjacent layers of net-shaped bodies are connected through the third bearing rod, and a preset distance is formed between every two adjacent layers of net-shaped bodies. According to the sintering bearing plate, the problem that when the sintering bearing plate is sintered, the temperature of the bottom and other parts of a sintered part is not uniform, so that damage is caused can be solved, the sintering yield of the sintered part is effectively improved, and the yield of sintered materials is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of ceramic plates, in particular to a ceramic support plate with a hollow structure. Background Art

[0002] The setter plate is an essential carrier in the sintering process of ceramics and metals. It is an essential product for powder metallurgy, semiconductors, electronic components, batteries, new energy and other industries. Its quality and performance directly affect the quality, output, energy consumption, cost, etc. of the sintered products. Currently, all the setters on the market are limited by traditional preparation processes and adopt solid thick-walled structures. Although it provides good load-bearing capacity, during the heating process, due to the different thermal conductivity coefficients between the setter plate and the air, the temperature of the contact part between the sample and the setter plate is quite different from the part of the sample exposed to the air, resulting in uneven heating of the sample. The temperature gradient during the heating and cooling process will cause a series of problems, such as cracking, deformation, warping, etc., which will affect the yield and success rate of the sintering process. Utility Model Content

[0003] The purpose of the utility model is to overcome the deficiencies of the prior art. The utility model provides a ceramic support plate with a hollow structure, which can ensure that the placed sintered samples are heated evenly and effectively improve the sintering yield of the sintered samples.

[0004] In order to solve the above problems, the utility model proposes a ceramic support plate with a hollow structure, including several layers of mesh bodies with mesh holes;

[0005] The mesh body includes a plurality of first supporting rods arranged in parallel and a plurality of second supporting rods arranged in parallel, the first supporting rods and the second supporting rods are connected to each other to form a mesh, a third supporting rod is provided at the intersection of the first supporting rod and the second supporting rod, the axial direction of the third supporting rod has a predetermined angle with the plane formed by the first supporting rod and the second supporting rod, two adjacent layers of the mesh body are connected to each other through the third supporting rod, and the two adjacent layers of the mesh body have a predetermined spacing.

[0006] As an improvement of the above technical solution, the mesh holes of the mesh body are of a rectangular structure, and the third supporting rod is perpendicular to the first supporting rod and the second supporting rod respectively.

[0007] As an improvement of the above technical solution, the mesh holes of the mesh body are of a square structure.

[0008] As an improvement of the above technical solution, the midpoints of the two adjacent sides of the mesh are connected by a first connecting rod to form a diamond mesh; the end of the third receiving rod and the end of the diamond mesh located at the first receiving rod are connected with a second connecting rod;

[0009] Or, a second connecting rod is connected to the end of the third receiving rod and the diamond-shaped mesh hole located at the end of the second receiving rod.

[0010] As an improvement to the above technical solution, a reinforcing body is provided at the junction of the first receiving rod, the second receiving rod, and the third receiving rod, and the cross-sectional area of the reinforcing body is larger than the cross-sectional areas of the first receiving rod, the second receiving rod, and the third receiving rod.

[0011] As an improvement to the above technical solution, the cross-sections of the first receiving rod, the second receiving rod, and the third receiving rod are rectangular or circular.

[0012] As an improvement to the above technical solution, the mesh body is made of a photocurable ceramic slurry.

[0013] As an improvement to the above technical solution, the ceramic firing plate is an integrally formed structure.

[0014] Implementing the present utility model has the following advantages

[0015] For several layers of the mesh body of the present utility model, several parallel first receiving rods and several parallel second receiving rods intersect with each other to form a mesh, and a third receiving rod is provided at the intersection of the first receiving rod and the second receiving rod. The axial direction of the third receiving rod has a predetermined angle with the plane formed by the first receiving rod and the second receiving rod. The third receiving rod can support the sintered part, so that there are certain gaps between the mesh body and the bottom surface of the sintering furnace and the bottom surface of the sintered part respectively. The mesh holes of the mesh body can allow the air with a higher temperature during sintering to flow from the mesh body to the top of the sintering chamber, making the air temperature at the top of the sintered part close to or the same as the temperature at the bottom, so as to achieve uniform temperature during sintering, and further ensure uniform sintering of the sample and improve the sintering yield of the sample. Description of the Drawings

[0016] Figure 1 is a perspective view of a ceramic firing plate according to an embodiment of the present utility model;

[0017] Figure 2 is Figure 1 an enlarged view of part A in

[0018] Figure 3 is Figure 2 an enlarged view of part B in

[0019] Figure 4 is an enlarged view of the mesh body structure according to another embodiment of the present utility model. Detailed Embodiments

[0020] To make the objectives, technical solutions, and advantages of the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0021] See Figure 1 and Figure 2 , an embodiment of the present utility model provides a ceramic carrier plate with a hollow structure, which includes a plurality of layers of meshes 1 having mesh holes 14.

[0022] In this embodiment, by making the carrier plate have a hollow structure, heat can quickly transfer heat to the sintered sample to ensure uniform sintering of the sample.

[0023] Specifically, see Figure 3 , the mesh 1 includes a plurality of first receiving rods 11 arranged in parallel and a plurality of second receiving rods 12 arranged in parallel. The first receiving rods 11 and the second receiving rods 12 intersect with each other to form a mesh. A third receiving rod 13 is provided at the intersection of the first receiving rod 11 and the second receiving rod 12. The axial direction of the third receiving rod 13 has a predetermined angle with the plane formed by the first receiving rod 11 and the second receiving rod 12. Adjacent layers of the meshes 1 are connected to each other through the third receiving rod 13, and adjacent layers of the meshes 1 have a predetermined distance.

[0024] The plurality of layers of meshes 1 of the present utility model are formed by a plurality of first receiving rods 11 arranged in parallel and a plurality of second receiving rods 12 arranged in parallel intersecting with each other to form a mesh. A third receiving rod 13 is provided at the intersection of the first receiving rod 11 and the second receiving rod 12. The axial direction of the third receiving rod 13 has a predetermined angle with the plane formed by the first receiving rod 11 and the second receiving rod 12. The third receiving rod 13 can support the sintered part, so that there is a certain gap between the mesh 1 and the bottom surface of the sintering furnace and the bottom surface of the sintered part respectively. The mesh holes 14 of the mesh 1 can allow the air with a higher temperature during sintering to flow from the mesh 1 to the top of the sintering chamber, so that the air temperature at the top of the sintered part is close to or the same as the temperature at the bottom, so as to achieve uniform temperature during sintering, and further ensure uniform sintering of the sample and improve the sintering yield of the sample.

[0025] Preferably, the mesh holes 14 of the mesh 1 are rectangular structures, and the third receiving rods 13 are perpendicular to the first receiving rods 11 and the second receiving rods 12 respectively. When the sintered part is placed on the third receiving rod 13, it is directly above the mesh hole 14, and the air heated by the sintering furnace flows from the mesh hole 14 to the top of the sintered part. Since the first receiving rod 11, the second receiving rod 12 and the third receiving rod 13 are perpendicular to each other, the mesh holes 14 of the plurality of layers of meshes 1 can form a smooth hot air circulation channel, so that the air temperature at the top of the sintered part can be heated up to the same as the air temperature at the bottom faster. Best of all, the mesh holes 14 of the mesh 1 are square structures.

[0026] See Figure 4, in another embodiment of the present utility model, the midpoints of two adjacent sides of the mesh hole 14 are connected by a first connecting rod 2 to form a diamond-shaped mesh hole; the end of the third receiving rod 13 is connected to the diamond-shaped mesh hole at the end of the first receiving rod 11 by a second connecting rod 2;

[0027] or the end of the third receiving rod 13 is connected to the diamond-shaped mesh hole at the end of the second receiving rod 12 by a second connecting rod 3.

[0028] Since diamond-shaped mesh holes are added to the mesh hole 14, and the end of the third receiving rod 3 is connected to the diamond-shaped mesh hole at the end of the first receiving rod 11 or the second receiving rod 12 by a second connecting rod 3, which is equivalent to adding a plurality of triangular structures in the horizontal and vertical directions of the mesh body 1. Triangles are stable structures, so the bearing plate can hold sintered parts with greater mass without deforming or damaging the structure.

[0029] Preferably, a reinforcing body is provided at the junction of the first receiving rod 11, the second receiving rod 12, and the third receiving rod 13, and the cross-sectional area of the reinforcing body is larger than the cross-sectional areas of the first receiving rod 11, the second receiving rod 12, and the third receiving rod 13. Since the junction of the first receiving rod 11, the second receiving rod 12, and the third receiving rod 13 is subject to more force, to ensure that the bearing plate can hold sintered parts with greater mass, a reinforcing body with a cross-sectional area larger than the cross-sectional areas of the first receiving rod 11, the second receiving rod 12, and the third receiving rod 13 is provided at the junction to ensure that the junction is not easily deformed or damaged.

[0030] Preferably, the cross-sections of the first receiving rod 11, the second receiving rod 12, and the third receiving rod 13 are rectangular or circular.

[0031] Preferably, the mesh body 1 is made of photocurable ceramic slurry. In the above two embodiments of the present utility model, photocurable ceramic slurry is used as the raw material and is made into an integrally formed structure by a 3D photocuring printer. Since it is made by 3D printing, on the one hand, the preparation precision of the bearing plate is improved, and on the other hand, the preparation cost of the bearing plate is low and it can be mass-produced.

[0032] The above is the preferred embodiment of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present utility model, several improvements and refinements can be made, and these improvements and refinements are also regarded as the protection scope of the present utility model.

Claims

1. A ceramic support plate with a hollow structure, characterized in that: A mesh body including several layers of meshes; The mesh body includes a plurality of first supporting rods arranged in parallel and a plurality of second supporting rods arranged in parallel, the first supporting rods and the second supporting rods are connected to each other to form a mesh, a third supporting rod is provided at the intersection of the first supporting rod and the second supporting rod, the axial direction of the third supporting rod has a predetermined angle with the plane formed by the first supporting rod and the second supporting rod, two adjacent layers of the mesh body are connected to each other through the third supporting rod, and the two adjacent layers of the mesh body have a predetermined spacing.

2. The ceramic setter plate according to claim 1, characterized in that: The meshes of the mesh body are rectangular in structure, and the third receiving rod is perpendicular to the first receiving rod and the second receiving rod respectively.

3. The ceramic setter plate according to claim 2, characterized in that: The meshes of the mesh body are square structures.

4. The ceramic setter plate according to claim 2, characterized in that: The midpoints of the two adjacent sides of the mesh are connected by a first connecting rod to form a diamond mesh; the end of the third receiving rod and the end of the diamond mesh located at the first receiving rod are connected to a second connecting rod; Or the end of the third receiving rod and the end of the diamond mesh located on the second receiving rod are connected with a second connecting rod.

5. The ceramic setter plate according to claim 4, characterized in that: A reinforcement body is provided at the intersection of the first receiving rod, the second receiving rod and the third receiving rod, and the cross-sectional area of ​​the reinforcement body is larger than the cross-sectional area of ​​the first receiving rod, the second receiving rod and the third receiving rod.

6. The ceramic setter plate according to claim 1, characterized in that: The cross sections of the first receiving rod, the second receiving rod and the third receiving rod are rectangular or circular.

7. The ceramic setter plate according to any one of claims 1 to 6, characterized in that: The mesh body is made of light-cured ceramic slurry.

8. The ceramic setter plate according to any one of claims 1 to 6, characterized in that: The ceramic support plate is an integrally formed structure.

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