UV irradiation module and UV irradiation system

Abstract

The utility model provides a UV irradiation module and a UV irradiation system, and the UV irradiation module comprises a substrate, a plurality of UV lamp tubes, and a plurality of UV energy sensors. The UV lamp tubes are mounted on the substrate and are arranged in a mutually parallel array; and a UV energy sensor is arranged on the substrate near each UV lamp tube. The UV irradiation system comprises at least one UV irradiation module and a control device, and the control device is in circuit connection with a UV energy sensor of the UV irradiation module. According to the technical scheme, in the wafer dispergation operation process, real-time energy detection can be conducted on the UV lamp tubes in the machine table, the problems that part of the UV lamp tubes are attenuated in irradiation power and insufficient in irradiation energy are found in time, repair and replacement are conducted in a targeted mode, and the operation accident that due to insufficient irradiation and missing irradiation, wafers are not subjected to comprehensive dispergation is avoided.

Description

Technical Field

[0001] This application relates to the field of chip manufacturing, and more particularly, to a UV irradiation module and a UV irradiation system. Background Art

[0002] During the chip manufacturing process, a layer of photoresist is covered on the surface of the wafer. Before the wafer is cut into chips, it is necessary to first remove the photoresist. To successfully complete the photoresist removal process, it is necessary to ensure that the surface of the wafer receives sufficient UV light irradiation energy, that is, the UV lamp tube must be able to provide sufficient irradiation power. If there is power attenuation or damage, the machine should be stopped for repair or replacement in time.

[0003] However, in the prior art, technicians can only know the on / off status of the UV light, or can only monitor the service life of the UV lamp tube by accumulating the irradiation time of the UV lamp tube, and cannot perform real-time detection of the UV light irradiation energy. Therefore, when the irradiation power of some UV lamp tubes does not meet the standard due to long use time or malfunction, it is difficult for technicians to discover the problem in time and replace the UV lamp tube in time, which may affect the production process and cause economic losses. In addition, if the accumulated irradiation time of the UV lamp tube is used as the judgment standard, usually all the UV lamp tubes need to be replaced uniformly after reaching the predetermined life of the UV lamp tube, and many of the UV lamp tubes still have the ability to work normally at this time, which will lead to an increase in production costs. Summary of the Utility Model

[0004] The purpose of the embodiments of this application is to provide a UV irradiation module and a UV irradiation system, which can be used to perform real-time energy detection on the UV lamp tube during the photoresist removal operation of the wafer, so that technicians can timely discover the problems of power attenuation and insufficient irradiation energy of some UV lamp tubes and take corresponding measures to avoid operation accidents such as incomplete photoresist removal of the wafer due to insufficient or missed irradiation.

[0005] In a first aspect, this application provides a UV irradiation module, including a substrate, a plurality of UV lamp tubes, and a UV energy sensor. Among them, the UV lamp tubes are installed on the substrate and arranged in a parallel array; a UV energy sensor is arranged on the substrate near each UV lamp tube.

[0006] In an implementable solution, the UV irradiation module includes a signal connector. One end of the signal connector is circuit-connected to the UV energy sensor, and the other end is used for signal connection with an external control device.

[0007] In an implementable solution, an installation position is provided at the position of the substrate facing the UV lamp tube, and the UV energy sensor is arranged in the installation position.

[0008] In an implementable solution, a groove is opened at the position of the substrate corresponding to the installation position, and the UV energy sensor is arranged at the bottom of the groove.

[0009] In an implementable solution, light-shielding plates are arranged on both sides of the installation position parallel to the extending direction of the UV lamp tube.

[0010] In an implementable solution, it further includes a transparent protective cover that covers the UV lamp tube and the UV energy sensor.

[0011] In an implementable solution, a plurality of UV energy sensors are arranged on the substrate near each UV lamp tube, and the UV energy sensors are symmetrically arranged with respect to the length direction of the UV lamp tube.

[0012] In a second aspect, the present application further provides a UV irradiation system, which includes at least one irradiation module and a control device. The control device is electrically connected to the UV energy sensor of the UV irradiation module.

[0013] In an implementable solution, the UV irradiation system further includes a housing structure, and the UV irradiation module is detachably installed on the inner wall surface of the housing structure.

[0014] In an implementable solution, when the UV irradiation system includes multiple UV irradiation modules, each UV irradiation module has an independent control switch, and the switch states of the respective UV irradiation modules do not interfere with each other.

[0015] Compared with the prior art, the beneficial effects of the present application at least include:

[0016] The UV irradiation module of the present application can detect the irradiation energy of the UV lamp tube in real time, helping technicians to promptly discover the problem of insufficient UV lamp energy and take countermeasures to ensure that the irradiation power meets the standard. After the production process ends, the technician shuts down the machine to replace the corresponding UV irradiation module, and then proceeds with the next round of wafer de-gluing operation. Therefore, the solution of the present application can effectively prevent the interruption of the production process and avoid economic losses.

[0017] In addition, in the present application, since each UV lamp tube corresponds to one or more UV energy sensors, the irradiation power and irradiation energy of each UV lamp tube can be detected separately, enabling technicians to replace only the problematic part of the UV lamp tubes in a targeted manner. Compared with replacing all UV lamp tubes at once, the solution of the present application can effectively reduce production costs. Description of the Drawings

[0018] To more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the accompanying drawings required for the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and thus should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0019] Figure 1 FIG. is a schematic structural diagram of a UV irradiation module shown according to an embodiment of the present application, where a UV energy sensor is installed around each UV lamp tube;

[0020] Figure 2 FIG. is a schematic structural diagram of a UV irradiation module shown according to an embodiment of the present application, where multiple UV energy sensors are installed around each UV lamp tube;

[0021] Figure 3 FIG. is a partial schematic diagram of a UV irradiation module with a groove opened at the installation position shown according to an embodiment of the present application;

[0022] Figure 4 FIG. is a partial schematic diagram of a UV irradiation module with light-shielding plates added on both sides of the installation position shown according to an embodiment of the present application;

[0023] Figure 5 FIG. is a schematic diagram of a protective cover provided on the substrate of the UV irradiation module;

[0024] Figure 6 FIG. is a schematic diagram of multiple protective covers provided on the substrate of the UV irradiation module;

[0025] Figure 7 FIG. is a schematic diagram of the composition of a UV irradiation system shown according to an embodiment of the present application.

[0026] In the figure: 1. Substrate; 2. UV lamp tube; 3. UV energy sensor; 4. Signal connector; 5. Control device; 6. Housing structure; 11. Installation position; 12. Light-shielding plate; 13. Protective cover. Detailed Embodiments

[0027] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Usually, the components of the embodiments of the present application described and shown in the accompanying drawings here can be arranged and designed in various different configurations.

[0028] Accordingly, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but merely represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts belong to the scope of protection of the present application.

[0029] As Figure 1 shown, the present application provides a UV irradiation module, including a substrate 1, a plurality of UV lamp tubes 2, and a UV energy sensor 3. Among them, the plurality of UV lamp tubes 2 are installed on the substrate 1 and arranged in a parallel array; the UV energy sensor 3 is provided on the substrate 1 near each UV lamp tube 2. It should be noted that since the device will be irradiated by UV light for a long time during the production process, the substrate 1 should be made of a material resistant to UV and high temperature.

[0030] During use, first test the UV irradiation module. The test process should simulate the actual production process, install the UV irradiation module in place and adopt the same power supply and control method, and perform data collection and analysis for a certain period of time. If there is a problem with the test result, replace the corresponding UV lamp tube 2 or directly replace the new UV irradiation module according to the data analysis result, and then retest; if the test result is okay, power on the UV irradiation module again and officially start the wafer de-gluing. During the de-gluing process, if the external control device detects that the irradiation power and energy of the corresponding UV lamp tube 2 are lower than the preset threshold through the UV energy sensor 3 installed around the UV lamp tube 2, it will send an alarm to the technician and take corresponding measures to ensure that the irradiation power meets the standard and ensure the smooth progress of the production process. After the production process is completed, the technician stops the machine for inspection, replaces the corresponding UV irradiation module or UV lamp tube 2, tests the UV irradiation module again, and after confirming that it can work normally, then proceeds to the next round of wafer de-gluing operation.

[0031] In summary, by using the UV energy sensor 3 to detect the irradiation energy of the UV lamp tube 2 in real time, the technician can timely discover the problem of insufficient UV light energy and take corresponding measures, thereby effectively preventing the interruption of the production process and avoiding economic losses.

[0032] At the same time, since each UV lamp tube 2 corresponds to at least one UV energy sensor 3, the irradiation power and irradiation energy of each UV lamp tube 2 can be detected separately through the UV energy sensor 3, so that the technician can monitor the status of each UV lamp tube 2, and thus only the problematic UV lamp tube 2 can be replaced targeted, without replacing all the UV lamp tubes 2. Compared with replacing all the UV lamp tubes 2 at one time, the solution of the present application can effectively reduce the production cost.

[0033] In this embodiment, asFigure 1 - Figure 2 As shown, the UV irradiation module may include a signal connector 4, one end of which is connected to the circuit of the UV energy sensor 3, and the other end is connected to the signal of the external control device. The signal connector 4 is convenient for transmitting the electrical signal of the UV energy sensor 3 to the external control device. The signal connector 4 can be placed on the side of the substrate 1 to facilitate docking with an external cable or plugging in a wireless signal transmission module.

[0034] The UV irradiation module may include a power supply connector (not shown in the figure), one end of which is connected to the UV lamp 2 circuit, and the other end is connected to the external power supply system through a cable. The power supply connector may also be arranged on the side of the substrate 1 to facilitate the cable to be led out to the outside.

[0035] In addition, a UV lamp holder and a sensor holder (not shown) may be provided inside or on the surface of the substrate 1. The UV lamp holder is connected to the power supply connector circuit, and the power plug pin of the UV lamp 2 is installed on the UV lamp holder in a detachable manner, so that the UV lamp can be directly replaced in the actual production process without rewiring. The sensor holder is connected to the signal connector 4 circuit, and the signal pin of the UV energy sensor 3 is installed on the sensor holder in a plug-in manner, so that the UV energy sensor 3 can be conveniently disassembled and assembled.

[0036] In this embodiment, if Figure 3 - Figure 4 As shown, a mounting position 11 is provided at a position of the substrate 1 facing the UV lamp 2, and the UV energy sensor 3 is provided in the mounting position 11. A fixing device may be provided in each mounting position 11 to fix the UV energy sensor 3; to avoid damage caused by long-term UV irradiation, a UV-resistant and high-temperature-resistant fixing device should be used, which may be a buckle or a screw.

[0037] In this embodiment, if Figure 3 As shown, a groove can be provided at the position of the substrate 1 corresponding to the mounting position 11, and the UV energy sensor 3 is arranged at the bottom of the groove. The use of the groove structure has two main advantages: on the one hand, it can gather the light of the target UV lamp 2; on the other hand, it can block the light of other UV lamps 2. Therefore, the groove provided at the mounting position 11 can reduce the interference of UV energy sensor 3 from UV lamps at other positions, making the detection result of UV energy sensor 3 more accurate.

[0038] In this embodiment, if Figure 4As shown, light-shielding plates 12 can be provided on both sides of the installation position 11 parallel to the extending direction of the UV lamp tube 2, and the light-shielding plates 12 on both sides of each installation position 11 can be symmetrically arranged relative to the installation position 11. Similar to the aforementioned groove-like structure, the light-shielding plates 12 can also achieve the effect of concentrating the light of the target UV lamp tube 2 and blocking the light of other UV lamp tubes 2, thereby making the detection result of the UV energy sensor 3 more accurate. The light-shielding plates 12 can be in a thin sheet structure to reduce weight, lower costs, and facilitate installation. To avoid damage caused by long-term UV irradiation, the light-shielding plates 12 should be made of materials resistant to UV and high temperatures, and should be fixed on the surface of the substrate 1 in a manner resistant to UV and high temperatures, such as by snap-fastening or screwing methods.

[0039] In this embodiment, as Figure 5 - Figure 6 shown, a transparent protective cover 13 can also be included, and the protective cover 13 covers the UV lamp tube 2 and the UV energy sensor 3. Among them, the edge of the protective cover 13 can be fixed on the substrate 1 to form an accommodation space for accommodating the UV lamp tube 2 and the UV energy sensor 3 inside. The protective cover 13 can prevent the products during the debinding process from contaminating and interfering with the UV lamp tube 2 and the UV energy sensor 3, and at the same time can also prevent accidental breakage of the UV lamp tube 2 and the UV energy sensor 3 from damaging the wafer, ensuring the smooth progress of the production process. In addition, as Figure 5 shown, only one protective cover 13 can be provided on one UV irradiation module to accommodate all the UV lamp tubes 2; as Figure 6 shown, multiple protective covers 13 can also be provided on one UV irradiation module, and each protective cover 13 accommodates one UV lamp tube 2 respectively, and the respective protective covers 13 can be disassembled and assembled independently. To avoid damage caused by long-term UV irradiation, the protective cover 13 should be made of materials resistant to UV and high temperatures, and should be fixed on the substrate 1 in a manner resistant to UV and high temperatures.

[0040] In this embodiment, as Figure 2 shown, when multiple UV energy sensors 3 are provided on the substrate 1 near the UV lamp tube 2, the UV energy sensors 3 can be symmetrically arranged relative to the length direction of the UV lamp tube 2. For one UV lamp tube 2, the detection error can be reduced by integrating the measured values of multiple UV energy sensors 3.

[0041] As Figure 7As shown in the figure, the present application also provides a UV irradiation system, including at least one UV irradiation module, and further including a control device 5; the control device 5 is electrically connected to the UV energy sensor 3 of the UV irradiation module. The control device 5 can receive data from the UV energy sensor 3, store and process it, and can set the minimum irradiation power threshold, irradiation energy threshold of a single UV lamp tube 3, and the total irradiation energy intensity threshold of all UV lamp tubes 3 through a program. When the corresponding data exceeds the threshold, the control device 5 gives an alarm and takes countermeasures.

[0042] In this embodiment, as Figure 7 shown, the UV irradiation system further includes a housing structure 6, and the UV irradiation module is detachably installed on the inner wall surface of the housing structure 6. Fixing devices are provided on each wall surface inside the housing structure 6, and several wall surfaces can be selected optionally according to actual conditions and needs to install the UV irradiation module; through holes are provided on each wall surface of the housing structure 6 to facilitate the cable leading out of the internal UV irradiation module. An entrance is provided on the surface of the housing structure 6 for putting in and taking out wafers; a carrying structure is provided inside the housing structure 6 for placing wafers. The layout mode of the UV irradiation module inside the housing structure 6 should ensure that the entire surface of the wafer can receive uniform UV irradiation energy. To avoid damage caused by long-term UV irradiation, the substrate 1 of the UV irradiation module should be fixed on the inner wall surface of the housing structure 6 in a UV-resistant and high-temperature-resistant manner, such as snap fixation, screw fixation, etc., rather than bonding fixation.

[0043] In this embodiment, when the UV irradiation system includes multiple UV irradiation modules, each UV irradiation module has an independent control switch, and the switch states of each UV irradiation module do not interfere with each other. Under the condition of permission, redundant UV irradiation modules should be provided in the UV irradiation system. During the actual production process, the redundant UV modules do not work under normal circumstances. When the UV energy sensor 3 detects that the irradiation power of a UV irradiation module does not meet the standard, the control device 5 will close the problematic UV irradiation module separately through a program and simultaneously activate the same number of redundant UV irradiation modules to ensure that the overall irradiation power meets the standard and the wafer degluing process can proceed smoothly without interruption.

[0044] The above are only the preferred embodiments of the present application and are not used to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A UV irradiation module, characterized in that: include: substrate; A plurality of UV lamp tubes are mounted on the substrate and arranged in an array parallel to each other; A UV energy sensor is provided on the substrate near each of the UV lamps; A mounting position is arranged at a position of the substrate directly opposite to the UV lamp tube, and the UV energy sensor is arranged in the mounting position; a groove is provided at a position of the substrate corresponding to the mounting position, and the UV energy sensor is arranged at the bottom of the groove; and shading plates are arranged on both sides of the mounting position parallel to the extension direction of the UV lamp tube.

2. The UV irradiation module according to claim 1, characterized in that: The UV irradiation module comprises a signal connector, one end of which is connected to the UV energy sensor circuit, and the other end of which is used for signal connection with an external control device.

3. The UV irradiation module according to claim 1, characterized in that: The invention also comprises a transparent protective cover, wherein the protective cover covers the UV lamp tube and the UV energy sensor.

4. The UV irradiation module according to claim 1, characterized in that: When a plurality of the UV energy sensors are arranged on the substrate near the UV lamp tube, the UV energy sensors are arranged symmetrically with respect to the length direction of the UV lamp tube.

5. A UV irradiation system, characterized in that: comprising at least one UV irradiation module as claimed in any one of claims 1 to 4, and further comprising a control device; The control device is connected to the UV energy sensor circuit of the UV irradiation module.

6. The UV irradiation system according to claim 5, characterized in that: It also includes a shell structure, and the UV irradiation module is detachably mounted on the inner wall surface of the shell structure.

7. The UV irradiation system according to claim 5, characterized in that: When the UV irradiation system includes a plurality of UV irradiation modules, each UV irradiation module is provided with an independent control switch, and the switch states of the UV irradiation modules do not interfere with each other.

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