Chip demolding machine with good clamping effect

Abstract

The utility model relates to the technical field of chip demoulding, and discloses a chip demoulding machine with a good clamping effect, which comprises a demoulding box, a demoulding frame arranged in the demoulding box, a demoulding through hole arranged in the middle of the upper part of the demoulding frame, a bearing plate arranged on the periphery of the inner side of the lower end of the demoulding through hole, and pressing structures arranged on the demoulding frame and positioned on two sides of the demoulding through hole, a lifting plate is arranged in the demolding box and located below the demolding frame, the lifting plate is driven by a lifting air cylinder which is fixed in the demolding box and located on the rear side of the demolding frame, a bearing frame is connected to the upper portion of the lifting plate, a tension sensor is connected between the bearing frame and the lifting plate, and side face clamping structures used for fixing the two sides of a chip mold are connected to the bearing frame. A vacuum suction cup is arranged on the bearing frame, and a camera is connected to the position, over the demolding through hole, in the demolding box. The utility model has the advantages of downward demoulding, safety and stability, good clamping and fixing effect, high separation success rate and good shooting and imaging effect.

Description

Technical Field

[0001] The utility model relates to the technical field of chip demoulding, in particular to a chip demoulding machine with good clamping effect. Background Technique

[0002] Chip demoulding refers to the step of peeling the formed chip from the mold during semiconductor manufacturing. During the chip manufacturing process, various different electronic devices, such as transistors, capacitors, etc., are first established on the mold, and then these devices are connected through a series of processing steps, and finally a complete chip is formed. During the entire manufacturing process, the chip is located on the surface of the mold. Demoulding is the last step, and the chip is separated from the mold by peeling between the chip and the mold.

[0003] The working principle of the existing chip demoulding machine is to fix the chip module after studding on the demoulding platform, adsorb the chip through the equipment vacuum chuck, and pull out the chip from the special mold by the servo pulling up the chip. At the same time, the demoulding state can be monitored in real time through the side camera, which solves the problems of uneven force control and easy damage and deformation of the chip tin columns during manual demoulding. However, there are still some problems: when the chip is separated from the mold, the chip is adsorbed by the vacuum chuck and is in a suspended state. In case of abnormal situations such as sudden power failure, the chip loses the suction of the chuck and will fall down, risking product scrapping; the friction between the mold and the chip of some products is large, exceeding the pulling force and vacuum adsorption force set for demoulding, resulting in demoulding failure and having to perform re-demoulding operations; in the prior art, due to the structure of the demoulding machine, the camera cannot be placed above, resulting in unclear and inaccurate imaging, affecting the control of product quality. Summary of the Utility Model

[0004] In order to solve the above various problems, the utility model proposes a chip demoulding machine with good clamping effect, which has downward demoulding, is safe and stable, has good clamping and fixing effect, high demoulding success rate, and good shooting and imaging effect.

[0005] In order to solve the above technical problems, the technical solution proposed by the utility model is: a chip demoulding machine with good clamping effect, including a demoulding box, a demoulding frame is arranged inside the demoulding box, a demoulding through hole is arranged in the middle above the demoulding frame, a bearing plate is arranged around the inner side of the lower end of the demoulding through hole, pressing structures are arranged on both sides of the demoulding through hole on the demoulding frame, a lifting plate is arranged below the demoulding frame inside the demoulding box, the lifting plate is driven by a lifting cylinder fixed inside the demoulding box and located behind the demoulding frame, a bearing frame is connected above the lifting plate, a tension sensor is connected between the bearing frame and the lifting plate, a side clamping structure for fixing both sides of the chip mold is connected to the bearing frame, a vacuum chuck is arranged on the bearing frame, and a camera is connected above the demoulding through hole inside the demoulding box.

[0006] Further, the pressing structure includes pressing bars symmetrically and rotatably connected to the demolding frame through a rotating shaft. A fixing block is connected to one side of the demolding frame and located on one side of the demolding through-hole. A magnet capable of adsorbing the pressing bar is connected to one side of the fixing block.

[0007] Based on the above features, the pressing bar can rotate, facilitating the taking and placing of the chip mold. The magnet can quickly adsorb and fix the pressing bar, avoiding cumbersome bolt fixing, with simple and convenient operation and firm fixing of the chip mold.

[0008] Further, the carrier frame includes a first carrier plate, a second carrier plate, and a third carrier plate connected in sequence from bottom to top. The vacuum suction cup is arranged on the third carrier plate.

[0009] Based on the above features, the first carrier plate, the second carrier plate, and the third carrier plate are arranged in layers, facilitating the installation and placement of the demolding tools with a neat and orderly structure.

[0010] Further, the side clamping structure includes finger cylinders fixedly connected to the second carrier plate. There are two finger cylinders respectively arranged towards both sides. A clamping plate is connected to the end of the finger cylinder. Limiting bars are symmetrically connected to the upper ends of the opposite sides of the clamping plate. A limiting card slot for matching the chip mold is formed between the two limiting bars on the same side.

[0011] Based on the above features, the finger cylinder drives the clamping plate to move, which can ensure stable clamping and fixing of the chip mold. The limiting card slot can further increase the fixing stability of the chip mold.

[0012] Further, the clamping plate is an inverted T-shaped plate. A through slot matching the clamping plate is arranged on the demolding frame, and the through slot is communicated with the demolding through-hole.

[0013] Based on the above features, the through slot can limit the moving direction of the clamping plate, thereby ensuring its stable movement to achieve stable clamping of the side of the chip mold.

[0014] Further, a control panel, a display screen, a warning light, an emergency stop button, and a display light are connected above the front side of the demolding box.

[0015] Based on the above features, it is convenient to control and view the chip demolding process. The warning light and the emergency stop button can give an alarm reminder and an emergency stop when the demolding frame has an abnormality.

[0016] Further, the periphery of the demolding through-hole on the demolding frame is an arc surface.

[0017] Based on the above features, it is convenient to take and place the chip mold.

[0018] The advantages of the present utility model compared with the prior art are as follows: The lifting plate, the bearing frame and the vacuum suction cup are arranged below the demolding frame. In cooperation with the demolding through hole on the demolding frame, the chip can be pulled and demolded from below. After the demolding is completed, the chip moves down together with the demolding carrier, thus solving the problem of chip dropping and damage in the upward pulling method, which is safe and reliable. The pressing structure cooperates with the bearing plate to stably fix the chip mold vertically, and the side clamping structure can stably fix the chip horizontally. The two cooperate with each other to increase the friction force on the basis of the original vacuum suction force, which can greatly improve the pulling force and effectively increase the demolding success rate. The camera is installed directly above the demolding through hole, with better visual effect, clearer imaging, and more conducive to the control of product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a perspective view of the present utility model;

[0020] Figure 2 is a front view of the present utility model;

[0021] Figure 3 is a schematic structural diagram of the interior of the demolding box of the present utility model;

[0022] Figure 4 is a schematic structural diagram of the demolding frame and the bearing frame part of the present utility model;

[0023] Figure 5 is an enlarged view of part A of the present utility model.

[0024] As shown in the figure: 1. Demolding box; 2. Demolding frame; 3. Bearing plate; 4. Lifting plate; 5. Lifting cylinder; 6. Tensile sensor; 7. Vacuum suction cup; 8. Camera; 9. Rotating shaft; 10. Pressure strip; 11. Fixed block; 12. Magnet; 13. Carrier plate 1; 14. Carrier plate 2; 15. Carrier plate 3; 16. Finger cylinder; 17. Clamping plate; 18. Limiting strip; 19. Control panel; 20. Display screen; 21. Warning light; 22. Emergency stop button; 23. Display light. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] The following further describes the present utility model in detail with reference to the accompanying drawings.

[0026] Combined with the attached Figure 4 and the attached Figure 5 , a chip demolding machine with good clamping effect, including a demolding box 1. A demolding frame 2 is arranged inside the demolding box 1. A demolding through hole is arranged in the middle above the demolding frame 2. The inner periphery of the lower end of the demolding through hole is provided with a bearing plate 3. The periphery of the demolding through hole on the demolding frame 2 is an arc surface, which is convenient for taking and placing the chip mold.

[0027] Combined with the attached Figure 3 and the attached Figure 4 and the attachedFigure 5 On the demolding frame 2 and on both sides of the demolding through-hole, there is a pressing structure. The pressing structure includes pressing strips 10 symmetrically and rotatably connected to the demolding frame 2 through a rotating shaft 9. On one side of the demolding through-hole on the demolding frame 2, there is a fixed block 11 connected. On one side of the fixed block 11, there is a magnet 12 that can adsorb the pressing strip 10. The pressing strip can rotate, which is convenient for taking and placing the chip mold. The magnet 12 can quickly adsorb and fix the pressing strip 10, avoiding the cumbersome bolt fixation, with simple and convenient operation and firm fixation of the chip mold.

[0028] Combined with the attached Figure 2 and the attached Figure 3 and the attached Figure 4 In the demolding box 1 and below the demolding frame 2, there is a lifting plate 4. The lifting plate 4 is driven by a lifting cylinder 5 fixed in the demolding box 1 and behind the demolding frame 2. Above the lifting plate 4, there is a carrier frame connected. On the carrier frame, there is a vacuum suction cup 7. Between the carrier frame and the lifting plate 4, there is a tension sensor 6 connected. The carrier frame includes a carrier plate one 13, a carrier plate two 14, and a carrier plate three 15 connected in sequence from bottom to top. The vacuum suction cup 7 is arranged on the carrier plate three 15. The carrier plate one 13, the carrier plate two 14, and the carrier plate three 15 are arranged in layers, which is convenient for installing and placing the demolding tools, and the structure is neat and orderly.

[0029] Combined with the attached Figure 1 and the attached Figure 2 and the attached Figure 4 On the carrier frame, there is a side clamping structure for fixing both sides of the chip mold. The side clamping structure includes a finger cylinder 16 fixedly connected to the carrier plate two 14. There are two finger cylinders 16 and they are arranged towards both sides respectively. At the end of the finger cylinder 16, there is a clamping plate 17 connected. On the upper end of the opposite side of the clamping plate 17, there are symmetrically connected limiting strips 18. Between the two limiting strips 18 on the same side, there is a limiting card slot that matches the chip mold. The finger cylinder 16 drives the clamping plate 17 to move, which can ensure its stable clamping and fixing of the chip mold. The limiting card slot can further increase the fixing stability of the chip mold. The clamping plate 17 is an inverted T-shaped plate. On the demolding frame 2, there is a through-hole that matches the clamping plate 17. The through-hole is communicated with the demolding through-hole. The through-hole can limit the moving direction of the clamping plate 17, thereby ensuring its stable movement to achieve stable clamping of the side of the chip mold.

[0030] Combined with the attached Figure 1 and the attached Figure 2 In the demolding box 1 and directly above the demolding through-hole, there is a camera 8 connected. Above the front side of the demolding box 1, there are a control panel 19, a display screen 20, a warning light 21, an emergency stop button 22, and a display light 23 connected, which is convenient for controlling and viewing the chip demolding process. The warning light 21 and the emergency stop button 22 can give an alarm reminder and an emergency stop when the demolding frame 2 has an abnormality.

[0031] Specific embodiments of the present utility model: Connect the demolding machine to an external power supply. Rotate the pressure bar 10 away from the demolding through-hole, and the magnet 12 is separated from the pressure bar 10. Place the mold with the chip in the demolding through-hole, with the chip facing downwards, and the bearing plate 3 supports it. Rotate the pressure bar 10 back, and the magnet 12 adsorbs and fixes the pressure bar 10. At this time, the pressure bar 10 is located above the mold and presses and fixes its edge. Operate the control panel 19 to make the lifting cylinder 5 drive the lifting platform to move upwards, and then make the carrier plate three 15 drive the vacuum suction cup 7 to move upwards until the vacuum suction cup 7 approaches the chip. At this time, the clamping plate 17 moves upwards with the carrier plate two 14 into the through-hole, and the limit card slots between the limit bars 18 are aligned with the mold. Control the finger cylinder 16 to drive the clamping plate 17 to move closer to the mold until the edge of the mold is caught in the limit card slot. At this time, the mold is stably fixed by the pressure bar 10 and the limit card slot. Turn on the vacuum suction cup 7 to attract and separate the chip from the mold from below. At the same time, turn on the camera 8, and observe the mold image captured by the camera 8 through the display screen 20 to observe the chip demolding situation. The display light 23 lights up during the working process of the demolding machine. When the tensile force sensor 6 detects that the demolding tensile force exceeds the specified range, the warning light 21 alarms, and the demolding machine stops working through the emergency stop button 22 to prevent chip damage.

[0032] In the description of the present utility model, it should be noted that unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; for those of ordinary skill in the art, the specific meaning of the above terms in the present utility model can be understood according to specific situations.

[0033] The above describes the present utility model and its embodiments. Such a description is not restrictive. What is shown in the drawings is only one of the embodiments of the present utility model, and the actual structure is not limited thereto. Generally speaking, if those of ordinary skill in the art are inspired by it and without departing from the creative purpose of the present utility model, without creative design, structures and embodiments similar to the technical solution are designed, they should all fall within the protection scope of the present utility model.

Claims

1. A chip demoulding machine with good clamping effect, comprising a demoulding box (1), characterized in that: The demoulding box (1) is provided with a demoulding frame (2), a demoulding through hole is provided in the middle of the upper part of the demoulding frame (2), a bearing plate (3) is provided around the inner side of the lower end of the demoulding through hole, a clamping structure is provided on the demoulding frame (2) and located on both sides of the demoulding through hole, a lifting plate (4) is provided below the demoulding frame (2) in the demoulding box (1), the lifting plate (4) is driven by a lifting cylinder (5) fixed in the demoulding box (1) and located on the rear side of the demoulding frame (2), a bearing frame is connected above the lifting plate (4), a tension sensor (6) is connected between the bearing frame and the lifting plate (4), a side clamping structure for fixing both sides of the chip mold is connected to the bearing frame, a vacuum suction cup (7) is provided on the bearing frame, and a camera (8) is connected in the demoulding box (1) and located directly above the demoulding through hole.

2. A chip demoulding machine with good clamping effect according to claim 1, characterized in that: The clamping structure comprises a pressure strip (10) symmetrically rotatably connected to a demoulding frame (2) via a rotating shaft (9); a fixing block (11) is connected to one side of a demoulding through hole on the demoulding frame (2); and a magnet (12) capable of adsorbing the pressure strip (10) is connected to one side of the fixing block (11).

3. A chip demoulding machine with good clamping effect according to claim 1, characterized in that: The carrier frame comprises a carrier plate 1 (13), a carrier plate 2 (14) and a carrier plate 3 (15) which are sequentially connected from bottom to top, and the vacuum suction cup (7) is arranged on the carrier plate 3 (15).

4. A chip demoulding machine with good clamping effect according to claim 3, characterized in that: The side clamping structure comprises a finger cylinder (16) fixedly connected to the second carrier plate (14), wherein two finger cylinders (16) are provided and are respectively arranged on both sides, and a clamping plate (17) is connected to the end of the finger cylinder (16), and a limit strip (18) is symmetrically connected to the upper end of the opposite side of the clamping plate (17), and a limit slot matching the chip mold is formed between the two limit strips (18) on the same side.

5. A chip demoulding machine with good clamping effect according to claim 4, characterized in that: The clamping plate (17) is an inverted T-shaped plate, and the demoulding frame (2) is provided with a through groove matching the clamping plate (17), and the through groove is connected to the demoulding through hole.

6. A chip demoulding machine with good clamping effect according to claim 1, characterized in that: A control panel (19), a display screen (20), a warning light (21), an emergency stop button (22) and a display light (23) are connected to the upper front side of the demoulding box (1).

7. A chip demoulding machine with good clamping effect according to claim 1, characterized in that: The demoulding frame (2) has a curved surface around the demoulding through hole.

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