Bearing device and boat pushing equipment

Abstract

The utility model provides a bearing device and boat pushing equipment, the bearing device comprises at least two sets of paddle structures, any paddle structure comprises a bearing paddle, a first clamping assembly and a second clamping assembly, the bearing paddle extends in the first direction, the first clamping assembly and the second clamping assembly are connected with the bearing paddle, and the first clamping assembly and the second clamping assembly are connected with the bearing paddle in the first direction. The first clamping assembly and the second clamping assembly are arranged in a spaced mode. Each bearing paddle is used for bearing a quartz boat, the first clamping assembly is used for driving the paddle structure to move along a second direction, the second clamping assembly is used for driving the paddle structure to move along a third direction, and the first direction, the second direction and the third direction are mutually vertical in pairs. The boat pushing equipment comprises a driving device and the bearing device, and the driving device is connected with the bearing device. The bearing device and the boat pushing equipment are beneficial for guaranteeing the stability of the production process.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic cells, and particularly relates to a carrying device and a boat pushing device. Background Art

[0002] In photovoltaic cell production technology, a paddle structure is used to support a quartz boat, and the quartz boat is used to load silicon wafers. When producing larger-sized photovoltaic cells, large-sized silicon wafers are loaded in the quartz boat. The stability of a single paddle in carrying the quartz boat is poor. To adapt to carrying the weight of large-sized silicon wafers, a double-paddle structure is usually adopted to support the large-sized silicon wafers. The problem is that the two paddles are connected and fixed by a clamping component. Due to the processing errors between the two paddles, it is difficult to adaptively compensate for the processing errors by simultaneously adjusting the positions of the two paddles. During production operations, the position of the quartz boat is likely to deviate, resulting in excessive wear of the paddle structure or the quartz boat, affecting the service life of the quartz boat and the stability of the production process. Summary of the Utility Model

[0003] The present application aims to at least solve one of the technical problems existing in the prior art. For this purpose, the present application provides a carrying device that can adaptively adjust the positions of the carrying paddles in different groups respectively, which is beneficial to extending the service life of the quartz boat and ensuring the stability of the production process.

[0004] The present application also provides a boat pushing device having the above-mentioned carrying device.

[0005] The carrying device according to the first aspect embodiment of the present application includes at least two groups of paddle structures. Any one of the paddle structures includes a carrying paddle, a first clamping component, and a second clamping component. The carrying paddle extends along a first direction. Both the first clamping component and the second clamping component are connected to the carrying paddle, and along the first direction, the first clamping component and the second clamping component are spaced apart.

[0006] Wherein, each carrying paddle is used to carry a quartz boat. The first clamping component is used to drive the paddle structure to move along a second direction, and the second clamping component is used to drive the paddle structure to move along a third direction. The first direction, the second direction, and the third direction are perpendicular to each other in pairs.

[0007] The carrying device according to the embodiments of the present application has at least the following beneficial effects: Different groups of carrying paddles are used to carry the quartz boat, and the first clamping component and the second clamping component are connected to the carrying paddles in different groups. The first clamping component and the second clamping component are used to drive the carrying paddles in the same group to move along the second direction and / or along the third direction. Thus, the carrying paddles in different groups can be adjusted separately in position to compensate for the processing errors between the carrying paddles in different groups, ensuring that the position of the quartz boat is more accurate, avoiding collisions or abrasions between the quartz boat and structures such as reaction furnaces, being beneficial to extending the service life of the quartz boat, and making the production process more stable.

[0008] According to some embodiments of the present application, the first clamping assembly includes a first frame, a first clamping member, and a second clamping member. The first frame abuts against the bearing paddle along the third direction. The first clamping member is connected to the first frame, and the second clamping member is connected to the first frame. At least one of the first clamping member and the second clamping member abuts against the bearing paddle along the second direction.

[0009] Wherein, the second clamping member is configured to move at least partially relative to the first frame along the second direction to approach or move away from the first clamping member.

[0010] According to some embodiments of the present application, the second clamping member includes a fixed part, a moving part, and a connecting part. The fixed part is connected to the first frame, the connecting part is movably connected to the fixed part, and the moving part is connected to the connecting part. Along the second direction, the moving part is located on the side of the fixed part close to the first clamping member.

[0011] Wherein, the connecting part is configured to drive the moving part to move relative to the fixed part along the second direction to approach or move away from the first clamping member.

[0012] According to some embodiments of the present application, the second clamping member further includes a limiting part. The limiting part is movably connected to the fixed part along the second direction. Along the second direction, the limiting part is configured to approach or move away from the moving part relative to the fixed part, and at least part of the limiting part is located between the fixed part and the moving part.

[0013] According to some embodiments of the present application, the first clamping assembly further includes a third clamping member and a fourth clamping member. The third clamping member is movably connected to the fourth clamping member, and the third clamping member is connected to the first frame. The third clamping member and the first frame enclose a first through hole, and the bearing paddle passes through the first through hole. Along the third direction, the fourth clamping member is located between the third clamping member and the bearing paddle.

[0014] According to some embodiments of the present application, each bearing paddle includes a first paddle and a second paddle. The first clamping assembly connected to the first paddle is located at a first position. Along the second direction, the first clamping assembly connected to the second paddle projects onto a second position of the first paddle. Along the first direction, there is a gap between the first position and the second position.

[0015] According to some embodiments of the present application, the second clamping assembly includes a second frame and a movable member. The second frame is provided with a second through hole, and the bearing paddle passes through the second through hole. The movable member is movably connected to the side of the second frame close to the bearing paddle.

[0016] According to some embodiments of the present application, the second clamping assembly includes three movable members. Along the second direction, the inner wall of the second through hole includes opposite left hole walls and right hole walls, and one of the movable members is movably connected to each of the left hole walls and the right hole walls along the second direction. Along the third direction, the inner wall of the second through hole includes opposite upper hole walls and lower hole walls, and one of the movable members is movably connected to the lower hole wall along the third direction.

[0017] According to some embodiments of the present application, the first clamping assembly includes a first frame and a first adjusting member, the carrying device further includes a fixing assembly, the fixing assembly includes a fixing member and a second adjusting member, and along the third direction, the first adjusting member is movably connected to the first frame, and the second adjusting member is movably connected to the fixing member;

[0018] Wherein, along the third direction, the first adjusting member abuts against a side of the fixing member facing away from the carrying paddle, and the second adjusting member abuts against the second clamping assembly.

[0019] The boat pusher device according to the second aspect of the present application includes a driving device and the carrying device in any one of the above embodiments, and the carrying device is connected to the driving device.

[0020] The boat pushing device according to the embodiment of the present application has at least the following beneficial effects: the carrying device is used to carry the quartz boat, the driving device is used to drive the carrying device, the carrying device can accurately adjust the position of the quartz boat and stably support the quartz boat, effectively avoiding excessive wear and fatigue caused by large deviations in the carrying position, and is beneficial to extending the service life of the boat pushing mechanism.

[0021] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0023] Figure 1 This is a schematic diagram of the structure of the carrier device according to an embodiment of the present application;

[0024] Figure 2 This is a schematic diagram of the assembly of the first paddle, the first clamping assembly and the second clamping assembly in an embodiment of the present application;

[0025] Figure 3 A side view of a first clamping assembly of the embodiment of the present application;

[0026] Figure 4 for Figure 3 Sectional view at AA in the middle;

[0027] Figure 5 It is a side view of a portion of the carrying device of an embodiment of the present application;

[0028] Figure 6 It is a front view of the first clamping assembly of the embodiment of the present application;

[0029] Figure 7 This is a schematic diagram of the structure of the second clamping assembly of an embodiment of the present application.

[0030] Reference numerals: first paddle 100;

[0031] second paddle 200;

[0032] first clamping assembly 300, first frame 310, first clamping member 320, second clamping member 330, fixing portion 331, moving portion 332, connecting portion 333, limiting portion 334, third clamping member 340, fourth clamping member 350, first through hole 360, first adjusting member 370;

[0033] second clamping assembly 400, second frame 410, movable member 420, lower movable member 421, left movable member 422, right movable member 423, second through hole 430, left hole wall 431, right hole wall 432, upper hole wall 433, lower hole wall 434;

[0034] fixing assembly 500, fixing member 510, second adjusting member 520. Detailed implementation manners

[0035] The embodiments of the present application will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present application and should not be construed as a limitation to the present application.

[0036] In the description of the present application, it should be understood that for the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0037] In the description of the present application, the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, exceeding, etc. are understood as not including the present number, and above, below, within, etc. are understood as including the present number. If the first and second are described only for the purpose of distinguishing technical features, they should not be construed as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0038] In the description of the present application, unless otherwise clearly defined, words such as setting, installing, connecting, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in the present application in combination with the specific content of the technical solution.

[0039] In the description of the present application, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0040] The embodiments of the present application will be introduced below in conjunction with the accompanying drawings of the specification:

[0041] Reference Figure 1 and Figure 2 According to the carrying device of the embodiment of the present application, it includes at least two groups of paddle structures. Any one of the paddle structures includes a carrying paddle, a first clamping component 300, and a second clamping component 400. The carrying paddle extends along a first direction. Both the first clamping component 300 and the second clamping component 400 are connected to the carrying paddle, and along the first direction, the first clamping component 300 and the second clamping component 400 are spaced apart. Among them, the carrying paddle is used to carry the quartz boat. The first clamping component 300 is used to drive the paddle structure to move along a second direction, and the second clamping component 400 is used to drive the paddle structure to move along a third direction. The first direction, the second direction, and the third direction are perpendicular to each other in pairs. Thus, the first clamping component 300 is used to drive the carrying paddle connected thereto to move along the second direction, and the second clamping component 400 is used to drive the carrying paddle connected thereto to move along the third direction. The position adjustment of each carrying paddle is independent of each other, which is beneficial to compensating for the processing errors between the carrying paddles and ensuring the carrying stability.

[0042] For the convenience of description, the carrying paddles in different groups of paddle structures will be hereinafter divided into a first paddle 100 and a second paddle 200, and the carrying device in the present application will be further described.

[0043] Reference Figures 1 to 2, for example, the carrying device includes a first paddle 100, a second paddle 200, at least two first clamping components 300, and at least two second clamping components 400. The first paddle 100 extends along a first direction, and the second paddle 200 is arranged parallel to the first paddle 100. The first paddle 100 and the second paddle 200 are used to carry the quartz boat, which is beneficial to ensuring the stability of the carrying. The first clamping component 300 is used to drive the first paddle 100 or the second paddle 200 to move along a second direction, and the second clamping component 400 is used to drive the first paddle 100 or the second paddle 200 to move along a third direction. The second direction is perpendicular to the first direction, the third direction is perpendicular to the second direction, and the third direction is perpendicular to the first direction. The first paddle 100 is connected to at least one first clamping component 300 and at least one second clamping component 400, and the second paddle 200 is connected to at least another first clamping component 300 and at least another second clamping component 400. Thus, the position adjustment of the first paddle 100 and the second paddle 200 is independent of each other, which is convenient for better compensating the processing error between the first paddle 100 and the second paddle 200, effectively avoiding excessive wear of the quartz boat due to incorrect position, prolonging the service life of the quartz boat. In addition, the reduction of wear also makes the production process more stable.

[0044] Specifically, the first paddle 100 and the second paddle 200 are arranged parallel to each other. Along the second direction, there is a gap between the first paddle 100 and the second paddle 200. The carrying device includes two first clamping components 300 and two second clamping components 400. The first paddle 100 is connected to one of the first clamping components 300 and one of the second clamping components 400, and the first clamping component 300 and the second clamping component 400 are arranged at intervals along the first direction. The second paddle 200 is connected to another first clamping component 300 and another second clamping component 400, and the first clamping component 300 and the second clamping component 400 are arranged at intervals along the first direction. The first clamping component 300 connected to the first paddle 100 is used to drive the first paddle 100 to move along the second direction, and the second clamping component 400 connected to the first paddle 100 is used to drive the first paddle 100 to move along the third direction, realizing the position adjustment of the first paddle 100 along the second direction and / or along the third direction. Similarly, the first clamping component 300 and the second clamping component 400 connected to the second paddle 200 can realize the position adjustment of the second paddle 200 along the second direction and / or along the third direction, thereby realizing the independent position adjustment of the first paddle 100 and the second paddle 200, which is beneficial to better compensating the processing error between the first paddle 100 and the second paddle 200 and improving the accuracy of the carrying position of the quartz boat.

[0045] It should be noted that the adjustments between the first clamping assembly 300 and the second clamping assembly 400, between different first clamping assemblies 300, and between different second clamping assemblies 400 are independent of each other. The first paddle 100 and the second paddle 200 can be made of silicon carbide. The improper position of the quartz boat includes horizontal offset, vertical offset, angular skew, etc. relative to the reaction furnace.

[0046] Reference Figure 1 and Figure 2 , in some other embodiments, the first paddle 100 or the second paddle 200 is connected to the first clamping assembly 300 and the second clamping assembly 400. Along the first direction, the first clamping assembly 300 and the second clamping assembly 400 are arranged at intervals. When the second clamping assembly 400 drives the first paddle 100 or the second paddle 200 to move along the third direction, the first clamping assembly 300 is fixed, and the second clamping assembly 400 drives part of the first paddle 100 or part of the second paddle 200 to move along the third direction, so as to adjust the included angle between the first paddle 100 or the second paddle 200 and the horizontal plane.

[0047] Reference Figure 1 and Figure 2 , in some other embodiments, the first paddle 100 can be connected to multiple first clamping assemblies 300 and multiple second clamping assemblies 400 at the same time. Along the first direction, the multiple first clamping assemblies 300 and the multiple second clamping assemblies 400 are connected to the first paddle 100 at intervals, so as to drive the first paddle 100 to move along the second direction and / or the third direction at different positions of the first paddle 100, which is beneficial to more finely adjust the position of the first paddle 100. Similarly, the second paddle 200 can also be connected to multiple first clamping assemblies 300 and multiple second clamping assemblies 400 to further more finely adjust the position of the second paddle 200. The position adjustment of the first paddle 100 and the second paddle 200 is more precise, which further improves the position accuracy of the carried quartz boat and is beneficial to further ensure the stability of the production process.

[0048] It should be noted that in the photovoltaic cell production process, the higher the position accuracy of the paddle structure carrying the quartz boat, the higher the stability and efficiency of the production process will be. Within a certain range, increasing the number of the first clamping assembly 300 and the second clamping assembly 400 is beneficial to increasing the fineness of the position adjustment.

[0049] Reference Figures 1 to 4, in some embodiments, the first clamping assembly 300 includes a first frame 310, a first clamping member 320, and a second clamping member 330. The first frame 310 abuts against the paddle structure in the third direction. The carrier paddles in different groups can be divided into a first paddle 100 and a second paddle 200, that is, the first frame 310 abuts against the first paddle 100 or the second paddle 200 in the third direction. The first clamping member 320 is connected to the first frame 310, and the second clamping member 330 is connected to the first frame 310. At least one of the first clamping member 320 and the second clamping member 330 abuts against the carrier paddle in the second direction, that is, abuts against the first paddle 100 or the second paddle 200. The second clamping member 330 is configured to be at least partially movable relative to the first frame 310 in the second direction to approach or move away from the first clamping member 320. The second clamping member 330 is used to hold the first paddle 100 or the second paddle 200 and move it in the second direction to adjust the position of the first paddle 100 or the second paddle 200 in the second direction, so as to ensure the position accuracy of the quartz boat in the second direction.

[0050] Specifically, taking the first clamping assembly 300 connected to the first paddle 100 as an example, the second clamping member 330 moves relative to the first frame 310 in the second direction, and is used to drive the first paddle 100 to move in the second direction. The first clamping member 320 and the second clamping member 330 clamp and fix the first paddle 100 in the second direction. Similarly, for the first clamping assembly 300 connected to the second paddle 200, the second clamping member 330 moves relative to the first frame 310 in the second direction and is used to drive the second paddle 200 to move in the second direction. Adjusting the positions of the first paddle 100 and the second paddle 200 in the second direction is independent of each other, which is beneficial to adaptively compensate for the processing error between the first paddle 100 and the second paddle 200 and ensure the position accuracy of the quartz boat in the second direction.

[0051] It should be noted that when the second clamping member 330 adjusts the position of the first paddle 100 or the second paddle 200, there is a gap between the first frame 310 and the first paddle 100 or the second paddle 200 in the second direction, and there is also a gap between the second clamping assembly 400 and the first paddle 100 or the second paddle 200 in the second direction, which is used to ensure the position adjustment of the first paddle 100 or the second paddle 200 in the second direction.

[0052] Reference Figures 1 to 4, in some embodiments, the second clamping member 330 includes a fixing portion 331, a moving portion 332, and a connecting portion 333. The fixing portion 331 is connected to the first frame 310. The connecting portion 333 is movably connected to the fixing portion 331. The moving portion 332 is connected to the connecting portion 333. Along the second direction, the moving portion 332 is located on the side of the fixing portion 331 close to the first clamping member 320. The connecting portion 333 is configured to drive the moving portion 332 to move relative to the fixing portion 331 along the second direction to approach or move away from the first clamping member 320. The moving portion 332 is used to drive the first paddle 100 or the second paddle 200 to move along the second direction to adjust the position of the first paddle 100 or the second paddle 200 along the second direction.

[0053] Specifically, the connecting portion 333 may be a connecting structure such as a bolt or a sliding rod. Taking the connecting portion 333 as a bolt as an example, the connecting portion 333 is rotatably connected to the fixing portion 331, and the connecting portion 333 is rotatably connected to the moving portion 332, which is used to ensure the rotation of the connecting portion 333 relative to the fixing portion 331. By rotating the connecting portion 333 relative to the fixing portion 331, the connecting portion 333 moves relative to the fixing portion 331 along the second direction. The connecting portion 333 drives the moving portion 332 to move relative to the fixing portion 331 along the second direction together. The moving portion 332 drives the first paddle 100 or the second paddle 200 to move along the second direction, so as to realize the position adjustment of the first paddle 100 or the second paddle 200 along the second direction. Driving the first paddle 100 or the second paddle 200 to move through a screw drive method is beneficial to ensuring the position adjustment accuracy along the second direction.

[0054] It should be noted that when the moving portion 332 abuts against the first paddle 100 or the second paddle 200 along the second direction, the first frame 310 abuts against the first paddle 100 or the second paddle 200 along the third direction, which is used to bear the first paddle 100 or the second paddle 200. When adjusting the position of the first paddle 100 or the second paddle 200 along the second direction, the position of the first paddle 100 or the second paddle 200 along the third direction can be fixed and unchanged.

[0055] Reference Figures 1 to 4 , in some other embodiments, the moving portion 332 and the first clamping member 320 jointly surround the outer peripheral wall of the first paddle 100 or the second paddle 200. On the basis of ensuring the driving of the first paddle 100 or the second paddle 200 along the second direction, it can also limit the excessive movement of the first paddle 100 or the second paddle 200 along the third direction relative to the first clamping assembly 300.

[0056] It should be noted that along the third direction, there is a gap between the moving portion 332 and the first paddle 100 or the second paddle 200. This gap can not only ensure the movement of the first paddle 100 or the second paddle 200 within a certain range along the third direction, but also prevent the first paddle 100 or the second paddle 200 from being excessively deflected along the third direction relative to the first clamping assembly 300.

[0057] Reference Figures 1 to 4 , in some embodiments, the second clamping member 330 further includes a limiting portion 334. The limiting portion 334 is movably connected to the fixing portion 331 along a second direction. Along the second direction, the limiting portion 334 is configured to move closer to or away from the moving portion 332 relative to the fixing portion 331, and at least a part of the limiting portion 334 is located between the fixing portion 331 and the moving portion 332, and is used to limit the shortest distance between the moving portion 332 and the fixing portion 331 along the second direction. Along the second direction, when the moving portion 332 abuts against the limiting portion 334, there is a shortest distance between the moving portion 332 and the fixing portion 331, and this distance is the distance between the limiting portion 334 located between the fixing portion 331 and the moving portion 332, which is convenient for more accurately determining the position of the moving portion 332, limiting the moving range of the moving portion 332 along the second direction, and is beneficial to further improving the adjustment accuracy.

[0058] It should be noted that the limiting portion 334 may be a structure such as a bolt or a slider. Taking the limiting portion 334 as a bolt as an example, the limiting portion 334 is rotatably connected to the fixing portion 331, and moves along the second direction relative to the fixing portion 331 by rotation to adjust the length of the limiting portion 334 located between the fixing portion 331 and the moving portion 332. The setting of the limiting portion 334 is convenient for the moving portion 332 to determine the distance between the moving portion 332 and the fixing portion 331 along the second direction, and the limiting portion 334 is also used to provide abutment for the moving portion 332, effectively avoiding the movement of the moving portion 332 along the second direction after the adjustment is completed, which is beneficial to maintaining the position of the first paddle 100 or the second paddle 200 along the second direction, and making the position limitation of the first paddle 100 or the second paddle 200 by the carrying device more stable.

[0059] Reference Figure 5 and Figure 6, in some embodiments, the first clamping assembly 300 further includes a third clamping member 340 and a fourth clamping member 350. The third clamping member 340 is movably connected to the fourth clamping member 350, and the third clamping member 340 is connected to the first frame 310. The third clamping member 340 and the first frame 310 enclose a first through hole 360, and the bearing paddle is inserted through the first through hole 360. Specifically, the bearing paddles in different groups of paddle structures at least include a first paddle 100 and a second paddle 200. The first paddle 100 and the second paddle 200 are inserted through different first through holes 360, that is, the first paddle 100 is inserted through the first through hole 360 defined by the first clamping assembly 300 connected to the first paddle 100, and the second paddle 200 is inserted through the first through hole 360 defined by the first clamping assembly 300 connected to the second paddle 200. Along the third direction, the fourth clamping member 350 is located between the third clamping member 340 and the bearing paddle. Taking the first paddle 100 as an example, the fourth clamping member 350 is located between the third clamping member 340 and the first paddle 100. The fourth clamping member 350 can move relative to the third clamping member 340 and is used to abut and fix the first paddle 100 or the second paddle 200 along the third direction to maintain the position of the first paddle 100 or the second paddle 200 along the third direction.

[0060] It should be noted that the movable connection between the third clamping member 340 and the fourth clamping member 350 can be realized by means such as screw drive and linear slide rail, and it is only necessary to realize the movement of the fourth clamping member 350 relative to the third clamping member 340 along the third direction.

[0061] Reference Figure 1 , in some embodiments, the bearing paddle includes a first paddle 100 and a second paddle 200. The first paddle 100 and the second paddle 200 belong to different groups of paddle structures. The first clamping assembly 300 connected to the first paddle 100 is located at a first position. Along the second direction, the first clamping assembly 300 connected to the second paddle 200 projects onto a second position of the first paddle 100. Along the second direction, both the first position and the second position are located on the side of the first paddle 100 facing the second paddle 200, and along the first direction, there is an interval between the first position and the second position, that is, the two first clamping assemblies 300 are arranged in a staggered manner, which is beneficial to reducing the interval between the first paddle 100 and the second paddle 200, making the two groups of paddle structures closer and the structure of the bearing device more compact.

[0062] Specifically, the carrying device may include two sets of paddle structures. The carrying paddles in the two sets of paddle structures can be distinguished into a first paddle 100 and a second paddle 200. The carrying device includes at least two first clamping components 300. One first clamping component 300 is connected to a first position of the first paddle 100, and the other first clamping component 300 is connected to the second paddle 200. Along the second direction, the other first clamping component 300 projects onto a second position of the first paddle 100. Along the first direction, there is a gap between the first position and the second position, that is, the first clamping component 300 connected to the first paddle 100 is arranged offset relative to the first clamping component 300 connected to the second paddle 200, preventing the two first clamping components 300 from abutting along the second direction, which is beneficial to reducing the gap between the first paddle 100 and the second paddle 200 along the second direction, making the structure of the carrying device more compact.

[0063] It should be noted that under the drive of the first clamping component 300 and the second clamping component 400, the second position will move slightly relative to the first position. Before the position adjustment of the first clamping component 300 and the second clamping component 400, after the position adjustment of the first clamping component 300, after the position adjustment of the second clamping component 400, and after the position adjustments of both the first clamping component 300 and the second clamping component 400, there is a gap between the second positions along the first direction, which is used to ensure the compactness of adjacent two sets of paddle structures.

[0064] Reference Figure 1 , in some other embodiments, both the first paddle 100 and the second paddle 200 extend along the first direction, the first paddle 100 and the second paddle 200 are arranged in parallel, and there is a gap between the first paddle 100 and the second paddle 200 along the second direction. The first paddle 100 is connected with a plurality of first clamping components 300, and the second paddle 200 is connected with a plurality of first clamping components 300. Along the first direction, the first clamping components 300 respectively connected to the first paddle 100 and the second paddle 200 are arranged offset, which is beneficial to shortening the gap between the first paddle 100 and the second paddle 200, making the carrying device more compact.

[0065] Reference Figures 5 to 7, in some embodiments, the second clamping assembly 400 includes a second frame 410 and a movable member 420. The second frame 410 is provided with a second through hole 430, and the carrier paddle is inserted through the second through hole 430. The carrier paddles in different groups of paddle structures include a first paddle 100 and a second paddle 200. The first paddle 100 and the second paddle 200 are inserted through different second through holes 430, that is, the first paddle 100 is inserted through the second through hole 430 of the second clamping assembly 400 connected to the first paddle 100, and the second paddle 200 is inserted through the second through hole 430 of the second clamping assembly 400 connected to the second paddle 200. The movable member 420 is movably connected to one side of the second frame 410 close to the carrier paddle. The movable member 420 is used to abut against and drive the carrier paddle to move, so as to adjust the position of the carrier paddle along the second direction or the third direction, thereby realizing the position adjustment of the quartz boat and ensuring the stability of the production process.

[0066] Specifically, taking the first paddle 100 as an example, the second clamping assembly 400 is provided with a second through hole 430, the first paddle 100 is inserted through the second through hole 430, the movable member 420 is movably connected to the inner wall of the first through hole 360, the movable member 420 is located between the second frame 410 and the first paddle 100, and the movable member 420 abuts against the first paddle 100 to move by moving relative to the second frame 410, and is used to adjust the position of the first paddle 100 along the second direction or the third direction.

[0067] Reference Figures 5 to 7 , in some other embodiments, the movable member 420 is movably connected to the inner wall of the second through hole 430, the movable member 420 can move relative to the second frame 410 along the second direction, and the first paddle 100 or the second paddle 200 is inserted through the second through hole 430. Taking the first paddle 100 inserted through the second through hole 430 as an example, along the second direction, the movable member 420 is located on the side of the second frame 410 facing the first paddle 100, and the movable member 420 moves relative to the second frame 410 along the second direction, and is used to abut against and fix the first paddle 100.

[0068] It should be noted that the connection between the movable member 420 and the second frame 410 can be a bolt connection, which is beneficial to more precisely adjust the moving distance of the movable member 420 relative to the second frame 410, so as to more precisely and stably fix the first paddle 100, and is beneficial to ensuring the loading accuracy of the first paddle 100 for the quartz boat.

[0069] Reference Figures 5 to 7, in some embodiments, the bearing paddles located in different groups of paddle structures include a first paddle 100 and a second paddle 200. Taking one group of paddle structures as an example, the second clamping assembly 400 includes three movable members 420. Along the second direction, the inner wall of the second through hole 430 includes a left hole wall 431 and a right hole wall 432 which are oppositely arranged. One movable member 420 is movably connected to each of the left hole wall 431 and the right hole wall 432 along the second direction. Along the third direction, the inner wall of the second through hole 430 further includes an upper hole wall 433 and a lower hole wall 434 which are opposite to each other. One movable member 420 is movably connected to the lower hole wall 434 along the third direction. The movable members 420 connected to the left hole wall 431 and the right hole wall 432 can move relative to the second frame 410 along the second direction to abut against and fix the first paddle 100 for defining the position of the first paddle 100 along the second direction. The movable member 420 connected to the lower hole wall 434 can move relative to the second frame 410 along the third direction to carry the first paddle 100 to move along the third direction and adjust the position of the first paddle 100 along the third direction. Similarly, the second paddle 200 can be inserted into another second through hole 430. The movable member 420 fixes the second paddle 200 along the second direction and adjusts the position of the second paddle 200 along the third direction.

[0070] It should be noted that along the second direction, the second clamping assembly 400 includes a left hole wall 431 and a right hole wall 432 which are arranged at intervals. Along the third direction, the second clamping assembly 400 includes an upper hole wall 433 and a lower hole wall 434 which are arranged at intervals. The left hole wall 431, the right hole wall 432, the upper hole wall 433 and the lower hole wall 434 enclose the second through hole 430. The bearing paddle is inserted into the second through hole 430 along the first direction. The movable member 420 is movably connected to the sides of the left hole wall 431, the right hole wall 432 and the lower hole wall 434 facing the bearing paddle. The second direction is the horizontal direction and the third direction is the vertical direction. The movable member 420 movably connected to the lower hole wall 434 is used to carry the first paddle 100 to rise along the third direction. And under the action of gravity, the first paddle 100 descends as the movable member 420 descends, realizing the lifting of the first paddle 100 along the third direction.

[0071] Specifically, the three movable members 420 include a lower movable member 421, a left movable member 422, and a right movable member 423. The lower movable member 421 is movably connected to the lower hole wall 434, the left movable member 422 is movably connected to the left hole wall 431, and the right movable member 423 is movably connected to the right hole wall 432. The left movable member 422 and the right movable member 423 move relative to the second frame 410 along the second direction to abut against the first paddle 100 or the second paddle 200 to move along the second direction. The left movable member 422 and the right movable member 423 jointly fix the first paddle 100 or the second paddle 200. The lower movable member 421 moves relative to the second frame 410 along the third direction to abut against the first paddle 100 or the second paddle 200 to move along the third direction to adjust the position of the first paddle 100 or the second paddle 200 along the third direction.

[0072] refer to Figures 5 to 7 In some embodiments, the first clamping assembly 300 includes a first frame 310 and a first adjusting member 370, and the supporting device also includes a fixing assembly 500, and the fixing assembly 500 includes a fixing member 510 and a second adjusting member 520. Along the third direction, the first adjusting member 370 is movably connected to the first frame 310, and the second adjusting member 520 is movably connected to the fixing member 510. Along the third direction, the first adjusting member 370 abuts against a side of the fixing member 510 that is away from the supporting paddle. The supporting paddles located in different paddle structures include a first paddle 100 and a second paddle 200. Taking the first paddle 100 as an example, the first adjusting member 370 abuts against a side of the fixing member 510 that is away from the first paddle 100, and the second adjusting member 520 abuts against the second clamping assembly 400. The fixing member 510 can be installed horizontally, and by adjusting the first adjusting member 370 and the second adjusting member 520, the first paddle 100 or the second paddle 200 can be deflected relative to the horizontal plane, that is, the angle of the plane defined by the first paddle 100 and the second paddle 200 relative to the horizontal plane changes, thereby changing the tilt of the first paddle 100 or the second paddle 200. This enables a more precise adjustment of the position of the quartz boat.

[0073] Specifically, the first adjusting member 370 and the second adjusting member 520 can be bolts, the first adjusting member 370 is threadedly connected to the first frame 310, and the second adjusting member 520 is threadedly connected to the fixing member 510. Taking the position adjustment of the first paddle 100 as an example, along the third direction, the first adjusting member 370 abuts against the side of the fixing member 510 away from the first paddle 100, and the second adjusting member 520 abuts against the second clamping assembly 400, and the fixing member 510 is used to be connected to the main part of the boat pushing device and remain stationary during position adjustment. Rotate the first adjusting member 370 and the second adjusting member 520, along the third direction, the first adjusting member 370 moves in a direction away from the fixing member 510, and the second adjusting member 520 moves in a direction close to the second clamping assembly 400, so that the first paddle 100 is tilted relative to the horizontal line, and the warpage adjustment of the first paddle 100 relative to the horizontal line is achieved.

[0074] Alternatively, along the third direction, the first adjusting member 370 moves toward the fixing member 510, and the second adjusting member 520 moves away from the second clamping assembly 400, so that the first paddle 100 is inclined relative to the horizontal line, realizing the warping adjustment of the first paddle 100 relative to the horizontal line.

[0075] Thus, on the basis of adjusting the position of the first paddle 100 by moving it along the second direction, the inclination angle of the first paddle 100 relative to the horizontal line can also be adjusted to change the inclination angle of the quartz boat relative to the horizontal line, further improving the flexibility and fineness of the load position adjustment.

[0076] It should be noted that the second direction can be the horizontal direction, and the principle of the inclination adjustment of the second paddle 200 relative to the horizontal direction is the same as that of the first paddle.

[0077] Reference Figures 1 to 7 , according to the boat pushing device of the embodiment of the present application, includes a driving device and the loading device in any of the above embodiments. The loading device is connected to the driving device. The loading device is used to load the quartz boat, and the driving device is used to drive the loading device to move. The loading device loads the quartz boat into or out of the reaction furnace under the drive of the driving device. The accurate and stable support of the loading device for the quartz boat is beneficial to ensuring the stability of the production process, and effectively avoids the friction between the boat pushing structure and the quartz boat relative to the reaction furnace, which is beneficial to extending the service life of the boat pushing structure and the quartz boat.

[0078] The above has described the embodiments of the present application in detail with reference to the drawings. However, the present application is not limited to the above embodiments. Within the knowledge scope of those of ordinary skill in the art, various changes can be made without departing from the purpose of the present application. In addition, without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other.

Claims

1. A carrying device, characterized in that: include: At least two groups of paddle structures, any of which comprises a load-bearing paddle, a first clamping assembly and a second clamping assembly, the load-bearing paddle extending along a first direction, the first clamping assembly and the second clamping assembly both being connected to the load-bearing paddle, and the first clamping assembly and the second clamping assembly being spaced apart along the first direction; Wherein, each of the supporting paddles is used to support a quartz boat, the first clamping assembly is used to drive the paddle structure to move along a second direction, and the second clamping assembly is used to drive the paddle structure to move along a third direction, and the first direction, the second direction and the third direction are perpendicular to each other.

2. The carrying device according to claim 1, characterized in that: The first clamping assembly comprises a first frame, a first clamping member and a second clamping member, the first frame abuts against the paddle structure along the third direction, the first clamping member is connected to the first frame, the second clamping member is connected to the first frame, and at least one of the first clamping member and the second clamping member abuts against the load-bearing paddle along the second direction; Wherein, the second clamping member is configured to move relative to the first frame at least partially along the second direction to approach or move away from the first clamping member.

3. The carrying device according to claim 2, characterized in that: The second clamping member includes a fixed portion, a movable portion and a connecting portion, the fixed portion is connected to the first frame, the connecting portion is movably connected to the fixed portion, the movable portion is connected to the connecting portion, and along the second direction, the movable portion is located at a side of the fixed portion close to the first clamping member; Wherein, the connecting portion is configured to drive the moving portion to move relative to the fixing portion along the second direction so as to be close to or away from the first clamping member.

4. The carrying device according to claim 3, characterized in that: The second clamping member also includes a limiting portion, which is movably connected to the fixed portion along the second direction. Along the second direction, the limiting portion is configured to be close to or away from the movable portion relative to the fixed portion, and at least part of the limiting portion is located between the fixed portion and the movable portion.

5. The carrying device according to claim 2, characterized in that: The first clamping assembly also includes a third clamping member and a fourth clamping member, the third clamping member is movably connected to the fourth clamping member, and the third clamping member is connected to the first frame, the third clamping member and the first frame enclose a first through hole, the supporting paddle is penetrated through the first through hole, and along the third direction, the fourth clamping member is located between the third clamping member and the supporting paddle.

6. The carrying device according to claim 1, characterized in that: Each of the supporting paddles includes a first paddle and a second paddle. The first clamping assembly connected to the first paddle is located at a first position. Along the second direction, the first clamping assembly connected to the second paddle is projected to the second position of the first paddle. Along the first direction, there is a gap between the first position and the second position.

7. The carrying device according to claim 1, characterized in that: The second clamping assembly includes a second frame and a movable member, the second frame is provided with a second through hole, the carrying paddle is penetrated through the second through hole, and the movable member is movably connected to a side of the second frame close to the carrying paddle.

8. The carrying device according to claim 7, characterized in that: The second clamping assembly includes three movable parts. Along the second direction, the inner wall of the second through hole includes a left hole wall and a right hole wall relative to each other, and each of the left hole wall and the right hole wall is movably connected to one of the movable parts along the second direction. Along the third direction, the inner wall of the second through hole includes an upper hole wall and a lower hole wall relative to each other, and the lower hole wall is movably connected to one of the movable parts along the third direction.

9. The carrying device according to claim 1, characterized in that: The first clamping assembly includes a first frame and a first adjusting member, the carrying device also includes a fixing assembly, the fixing assembly includes a fixing member and a second adjusting member, along the third direction, the first adjusting member is movably connected to the first frame, and the second adjusting member is movably connected to the fixing member; Wherein, along the third direction, the first adjusting member abuts against a side of the fixing member facing away from the carrying paddle, and the second adjusting member abuts against the second clamping assembly.

10. A boat pushing device, characterized in that: include: Drive device; The carrying device according to any one of claims 1 to 9, wherein the carrying device is connected to the driving device.

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