Cleaning device for back surface of mask

Abstract

The utility model relates to the technical field of mask plate cleaning, and discloses a mask plate back cleaning device which comprises a spraying assembly and a plurality of nozzle assemblies detachably installed on the spraying assembly, one nozzle assembly is vertically arranged in the middle of the spraying assembly, the other nozzle assemblies are annularly and evenly distributed on the spraying assembly, and the spraying assembly is arranged in the middle of the spraying assembly. The included angles between the extension lines of the central axes of the multiple nozzle assemblies and the cross section of the spraying assembly are different, and when one or more nozzle assemblies conduct flushing, the edge of the mask can be covered and sprayed all the time. According to the utility model, in the process of cleaning the front surface of the mask, the back surface of the mask can be synchronously washed to remove watermarks; meanwhile, by controlling the opening number of the nozzles, the device can adapt to flushing of the back faces of the masks of different sizes, and by fixing the spraying angles of the nozzles, water columns sprayed out of the nozzles cannot exceed the edges of the back faces of the masks.

Description

Technical Field

[0001] The utility model relates to the technical field of mask cleaning, in particular to a cleaning device for the back of a mask. Background Art

[0002] A mask, also known as a photomask or a photo mask, has a quartz glass as a substrate. First, a metal chromium layer is deposited on the quartz glass substrate, and then a photoresist is coated on the chromium layer to make it a photosensitive material. The designed circuit pattern is made to expose the photoresist through an electron laser device, and the exposed area forms a circuit pattern on the metal chromium through development and etching, becoming a photomask master plate similar to a developed negative film. In recent years, the production volume of domestic display panels has been increasing year by year, and panel manufacturers have started mass-producing 8.5-generation lines. The demand for the size of masks is also getting larger and larger, and the corresponding process requirements are getting higher and higher. Currently, the maximum size of the 8.5-generation line mask can be mass-produced at 1400mm * 1600mm * 15mm, and the minimum size is at 500mm * 750mm * 8mm.

[0003] When cleaning the front of the mask, processes such as rinsing with sulfuric acid and ultrapure water are used in sequence. When cleaning with sulfuric acid, a large amount of acid mist will flow back to the back to produce dot-like liquid imprints. When using ultrapure water to rinse the surface of the mask later, a large amount of water stains will also flow back to the back to form water marks, which is not conducive to ensuring the smoothness of the mask surface. Summary of the Utility Model

[0004] (1) Technical Problems to be Solved

[0005] In view of the deficiencies of the prior art, the utility model provides a cleaning device for the back of a mask, which solves the problem that a large amount of water stains flow back to the back to form water marks when flushing the surface of the existing mask during the cleaning process.

[0006] (2) Technical Solutions

[0007] To achieve the above object, the utility model is realized through the following technical solutions:

[0008] A cleaning device for the back of a mask includes a spraying component and a plurality of nozzle components detachably installed on the spraying component. One of the nozzle components is vertically arranged in the middle of the spraying component, and the rest of the nozzle components are annularly and evenly distributed on the spraying component. The extension lines of the central axes of the plurality of nozzle components form different angles with the cross-section of the spraying component. When one or more of the nozzle components are used for flushing, the edge of the mask can always be covered and sprayed.

[0009] Preferably, an installation platform is arranged on the spraying assembly. The nozzle assembly includes a connection end fixedly connected to the installation platform, and a nozzle is detachably installed on the connection end.

[0010] Preferably, the nozzle is fixedly connected to the connection end by threads and the connection part is sealed.

[0011] Preferably, there are 5 nozzle assemblies, and the installation angles of the nozzles correspond to 5 different included angles, which are 20°, 25°, 30°, 40° and 90° respectively. The nozzle assemblies with the included angles of 30° and 40°, and the nozzle assemblies with the included angles of 20° and 25° are oppositely arranged on the installation platform.

[0012] Preferably, the larger the installation angle of the nozzle, the more the number of spray holes arranged on the nozzle. Among them, the number of spray holes on the nozzles with the included angles of 20°, 25° and 30° is the same.

[0013] (III) Beneficial effects

[0014] The utility model has the following beneficial effects:

[0015] For the cleaning device on the back of the mask plate, by setting nozzle assemblies at different angles, when cleaning a small-sized mask plate, the nozzle assembly arranged at 90° in the middle can be opened, so that the water flow rinsing on the back of the mask plate will not exceed the edge of the small-sized mask plate; when the size of the mask plate to be rinsed increases, the number of opened nozzle assemblies can be gradually increased, and finally all nozzle assemblies are opened to meet the rinsing requirements of the largest-sized mask plate, ensuring that the edge is covered and sprayed during the rinsing process and does not exceed the edge. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of existing MASK cleaning;

[0017] Figure 2 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 3 For the utility model Figure 1 The enlarged schematic diagram of area A in it;

[0019] Figure 4 It is a front view schematic diagram of the utility model;

[0020] Figure 5 It is a left view schematic diagram of the utility model.

[0021] In the figure: 1. Spraying assembly; 2. Installation platform; 3. Nozzle assembly; 31. Connection end; 32. Nozzle. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0023] Please refer to Figure 1 , the present utility model provides a technical solution: a cleaning device for the back of a mask plate, including a spraying assembly 1 and a plurality of nozzle assemblies 3 detachably installed on the spraying assembly 1. One nozzle assembly 3 is vertically arranged in the middle of the spraying assembly 1, and the remaining nozzle assemblies 3 are evenly distributed in a ring on the spraying assembly 1. The extension lines of the central axes of the plurality of nozzle assemblies 3 have different angles with the cross-section of the spraying assembly 1. When one or more nozzle assemblies 3 are used for flushing, the edge of the mask plate can always be covered and sprayed.

[0024] In the present utility model, by providing nozzle assemblies 3 with different angles, when cleaning a small-sized mask plate, the nozzle assembly 3 arranged at 90° in the middle can be opened, so that the water flow flushing on the back of the mask plate will not exceed the edge of the small-sized mask plate; when the size of the mask plate to be flushed increases, the number of opened nozzle assemblies 3 can be gradually increased, and finally all nozzle assemblies 3 are opened to meet the flushing requirements of the largest-sized mask plate, ensuring that the edge is covered and sprayed during the flushing process and does not exceed the edge.

[0025] In this embodiment, an installation table 2 is arranged on the spraying assembly 1. The nozzle assembly 3 includes a connection end 31 fixedly connected to the installation table 2, and a nozzle 32 is detachably installed on the connection end 31.

[0026] In this embodiment, the nozzle 32 is fixedly connected to the connection end 31 by threads and the connection part is sealed.

[0027] In this embodiment, there are 5 nozzle assemblies 3 arranged, and the installation angles of the nozzles 32 correspond to 5 different angles, which are 20°, 25°, 30°, 40° and 90° respectively. The nozzle assemblies 3 with angles of 30° and 40°, and the nozzle assemblies 3 with angles of 20° and 25° are arranged opposite to each other on the installation table 2. When cleaning a small-sized mask plate of 500*750*8mm, only the nozzle 32 at 90° in the middle is opened. At this time, if two or more nozzles 32 are opened, the water sprayed back will exceed the edge of the mask plate; when flushing the largest size of 1400mm*1600mm*15mm, all 5 nozzles 32 with different angles need to be opened to ensure that the edge of the mask plate can be covered and sprayed; for other mask plates of different sizes, nozzles 32 with different angles can be opened according to the verification situation.

[0028] Refer toFigures 2-4 As shown, in this embodiment, the larger the installation angle of the nozzle 32, the more the number of spray holes provided on the nozzle 32. Among them, the number of spray holes on the nozzles 32 with angles of 20°, 25° and 30° is the same. For the nozzles 32 with angles of 20°, 25° and 30°, there are 3 horizontal holes on each nozzle 32, there are 7 holes on the nozzle 32 with an angle of 40°, and there are 9 holes on the nozzle 32 with an angle of 90°. The smaller the angle, the easier it is for the sprayed water to exceed the edge of the back of the spray mask plate. Therefore, it is necessary to control the number of spray holes on the nozzles 32 at each angle to ensure that during the flushing process, the water flow will not exceed the edge of the mask plate to affect the front cleaning of the mask plate or the normal operation of other components.

[0029] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation. An element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0030] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cleaning device for the back side of a mask, characterized in that: It includes a spray assembly and several nozzle assemblies detachably mounted on the spray assembly, wherein one nozzle assembly is vertically arranged in the middle of the spray assembly, and the other nozzle assemblies are evenly distributed in a ring on the spray assembly. The extended lines of the central axes of several nozzle assemblies have different angles with the cross-section of the spray assembly. When a single or multiple nozzle assemblies are used for flushing, the edge of the mask can always be covered and sprayed.

2. The device for cleaning the back side of a mask according to claim 1, characterized in that: A mounting platform is arranged on the spray assembly, and the nozzle assembly includes a connecting end fixedly connected to the mounting platform, and a nozzle is detachably mounted on the connecting end.

3. The device for cleaning the back side of a mask according to claim 2, characterized in that: The nozzle is threadedly fixed to the connecting end and the connecting portion is sealed.

4. A mask back cleaning device according to claim 2 or 3, characterized in that: There are five nozzle assemblies, and the nozzle installation angles correspond to five different angles, namely 20°, 25°, 30°, 40° and 90°. The nozzle assemblies with angles of 30° and 40° and the nozzle assemblies with angles of 20° and 25° are relatively arranged on the mounting table.

5. The device for cleaning the back side of a mask according to claim 4, characterized in that: The larger the installation angle, the more spray holes are arranged on the nozzle, wherein the number of spray holes on the nozzles with angles of 20°, 25° and 30° is the same.

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