Single-face polishing equipment

Abstract

The utility model provides single-face polishing equipment, and belongs to the technical field of grinding and polishing. Comprising a machine body, a base and a rack, a grinding assembly is arranged on the base, and a pressure assembly is arranged on the rack; the grinding assembly comprises a rotating disc, a first driving motor used for driving the rotating disc to rotate and a working disc installed on the rotating disc, a plurality of rotating sleeves are arranged on the working disc in the circumferential direction of the working disc, a maintaining frame is arranged above the working disc, and the rotating sleeves are all rotationally arranged on the maintaining frame; the pressure assembly comprises a pressing disc and a driving air cylinder used for driving the pressing disc to vertically ascend and descend, and a vacuum adsorption assembly is arranged on the pressing disc. And after the workpiece is ground to the duration required by the process, the negative pressure source is started to adsorb the workpiece to the pressing disc, and then the pressing disc and the workpiece are completely lifted upwards from the rotating sleeve, so that the workpiece is taken out and put in under the condition that the working disc is not stopped, and the effect of improving the workpiece polishing treatment efficiency is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of grinding and polishing, in particular to a single-sided polishing device. Background Art

[0002] The processing, grinding and polishing of silicon are key processes in semiconductor manufacturing, optical element processing and photovoltaic industry, and the purpose is to obtain silicon wafers with high precision and low surface roughness. In the grinding and polishing process of other circular workpieces, polishing equipment is also essential.

[0003] The patent with the publication number of CN222386711U discloses a single-sided grinding and polishing integrated device, which includes a machine body, a base fixed on the top of the machine body, a frame fixed above the machine body, and a driving mechanism arranged on the machine body. A circular sinking cavity is formed on the top of the base. The driving mechanism includes a traction disk that is horizontally arranged and rotatably connected in the circular sinking cavity and a reduction motor for driving the traction disk to rotate. A grinding disk or a polishing disk is detachably installed on the top of the traction disk, and an inner driven wheel that is concentric and rotatably connected to the top of the grinding disk or the polishing disk.

[0004] However, during the grinding process, the workpiece to be ground or polished can only be installed on the equipment at one time. It is necessary to wait until all the workpieces on the equipment are polished before stopping the equipment and taking out the workpieces. However, in a laboratory environment, sometimes it is necessary to process workpieces of multiple materials at the same time. Different workpieces require different grinding and polishing durations. Starting and stopping the equipment and operating the grinding and polishing steps separately for each material of workpiece takes a lot of time, which affects the grinding and polishing efficiency of the workpiece. Content of the Utility Model

[0005] In view of the above problems, the utility model provides a single-sided polishing device.

[0006] In order to achieve the above invention purpose, the technical scheme adopted by the utility model is as follows:

[0007] Provide a single-sided polishing device, including a machine body, a base arranged on the top of the machine body, and a frame arranged on the machine body and above the base. A grinding component is arranged on the base, and a pressure component is arranged on the frame;

[0008] The grinding component includes a turntable, a first driving motor arranged under the base for driving the turntable to rotate, and a working disk detachably installed on the turntable. A plurality of rotating sleeves are arranged along the circumferential direction of the working disk. A maintaining frame is arranged above the working disk, and the rotating sleeves all pass through and are rotatably arranged on the maintaining frame;

[0009] The pressure component includes a pressing disk. A driving cylinder for driving the pressing disk to vertically lift and lower is arranged on the frame. The pressing disk is rotatably connected to the piston rod of the driving cylinder, and a vacuum adsorption component is arranged on the pressing disk.

[0010] Further, the vacuum adsorption assembly includes a negative pressure ring and a negative pressure pipe. The negative pressure ring is coaxially and rotatably arranged outside the pressure plate. A negative pressure chamber is provided inside the negative pressure pipe. Negative pressure holes communicating with the negative pressure chamber are provided on the bottom wall of the negative pressure ring. One end of the negative pressure pipe is connected to the negative pressure ring and communicates with the negative pressure chamber, and the other end is externally connected to a negative pressure source. The negative pressure ring is fixedly connected to the piston rod of the driving cylinder relatively.

[0011] Further, a step extending outward is provided at the bottom of the pressure plate. A through hole is provided through the step. A plurality of through holes are circumferentially spaced along the step. The negative pressure ring is located above the step, and the negative pressure holes remain in communication with the through holes.

[0012] Further, a mounting frame is rotatably arranged on the frame. The mounting frame is fixedly connected to the retaining frame. The driving cylinder is fixedly arranged on the mounting frame. A second driving motor for driving the mounting frame to rotate is provided on the frame.

[0013] Further, a rubber protective layer is provided on the bottom surface of the pressure plate.

[0014] Further, a pressure sensor is provided between the pressure plate and the piston rod of the driving cylinder.

[0015] Further, a bearing is provided on the retaining frame. The rotating sleeve is rotatably connected to the retaining frame through the bearing.

[0016] Further, a plurality of ceramic columns for contacting the work plate are circumferentially spaced along the bottom of the rotating sleeve.

[0017] The beneficial effects of the present utility model are as follows: When grinding and polishing a workpiece, the workpiece is placed below the pressure plate and attached to the pressure plate. The negative pressure source is started to adsorb the workpiece on the pressure plate. Then, the driving cylinder acts to lower the pressure plate, so that the workpiece is aligned and enters the rotating sleeve and approaches the work plate. After the negative pressure source is closed, the workpiece contacts the work plate. Under the pressure of the driving cylinder, the pressure plate pushes the workpiece to keep contacting the work plate. After the work plate is driven to rotate, the work plate rotates relative to the workpiece to grind the lower surface of the workpiece. When the workpiece is ground for the duration required by the process, the piston rod of the driving cylinder rises a small distance, and the negative pressure source is started to adsorb the workpiece onto the pressure plate. Then, the driving cylinder lifts the pressure plate and the workpiece completely upward from the rotating sleeve, realizing the operation of taking out and putting in the workpiece without stopping the work plate, and capable of continuously grinding or polishing multiple workpieces, improving the efficiency of polishing the workpiece. Description of the Drawings

[0018] Figure 1 It is a schematic diagram of the overall structure of the single-sided polishing device according to the embodiment of the present application.

[0019] Figure 2Explosion structure schematic diagram of the pressure plate and the rotating sleeve of the embodiment of the present application.

[0020] Among them, 1. Base; 11. First driving motor; 12. Working plate; 2. Frame; 21. Mounting frame; 22. Second driving motor; 3. Rotating sleeve; 31. Ceramic column; 4. Cage; 5. Pressure plate; 51. Driving cylinder; 52. Step; 53. Perforation; 6. Negative pressure ring; 61. Negative pressure pipe; 62. Negative pressure hole. Detailed implementation manners

[0021] In order to better understand the above technical solutions, the above technical solutions will be described in detail below in conjunction with the specification drawings and specific implementation manners.

[0022] The embodiment of the present application discloses a single-sided polishing device. Referring to Figure 1 and Figure 2 , it includes a fuselage, a base 1 arranged on the top of the fuselage, and a frame 2 arranged on the fuselage and above the base 1. A grinding assembly is provided on the base 1, and a pressure assembly is provided on the frame 2. Specifically, a processing groove is provided on the top of the base 1. The grinding assembly includes a turntable, a first driving motor 11 and a working plate 12. The turntable is rotatably installed in the processing groove. The first driving motor 11 is fixedly installed below the base 1, and the output shaft of the first driving motor 11 is in transmission connection with the turntable to drive the turntable to rotate. The working plate 12 can be a grinding plate or a polishing plate, and the working plate 12 is detachably installed on the turntable, such as by plugging or bolt connection, and the working plate 12 can be replaced according to the processing needs.

[0023] A plurality of rotating sleeves 3 are provided along the circumferential direction of the working plate 12. A cage 4 is arranged above the working plate 12, and the rotating sleeves 3 all pass through and are rotatably arranged on the cage 4. During the grinding or polishing process of the workpiece, the cage 4 remains stationary relative to the fuselage, so that the working plate 12 can process the bottom wall of the workpiece in the rotating sleeve 3. Then, by using the different rotational linear velocities of the inner and outer circles during the rotation of the working plate 12, the workpiece and the rotating sleeve 3 can rotate self, so as to comprehensively process the bottom wall of the workpiece.

[0024] The pressure assembly includes a pressure plate 5. A driving cylinder 51 for driving the pressure plate 5 to vertically lift is arranged on the frame 2. The piston rod of the driving cylinder 51 is vertically downward and is coaxially rotatably connected with the pressure plate 5. The driving cylinder 51 on the frame 2 corresponds to the rotating sleeve 3 below one by one. By the driving cylinder 51, pressure can be applied to the pressure plate 5, thereby improving the processing efficiency of the workpiece.

[0025] In order to accurately control the extension and retraction length of the piston rod of the driving cylinder 51, the driving cylinder 51 can be controlled by a control center. The control center can be a computer, a controller, etc., which uses program settings to control the extension / retraction length of the piston rod of the driving cylinder 51 in each work process.

[0026] Each platen 5 is provided with a vacuum adsorption assembly, which consists of a negative pressure ring 6 and a negative pressure tube 61. The negative pressure ring 6 is coaxially rotatably arranged on the outside of the platen 5. A negative pressure cavity is provided inside the negative pressure tube 61. A negative pressure hole 62 connected to the negative pressure cavity is provided on the bottom wall of the negative pressure ring 6. A circle of mounting ring grooves is coaxially provided on the outer wall of the platen 5. The negative pressure ring 6 is coaxially rotatably installed in the mounting ring groove. The negative pressure ring 6 can also be rotatably connected to the mounting ring groove through a bearing. One end of the negative pressure tube 61 is connected to the negative pressure ring 6 and connected to the negative pressure cavity, and the other end is connected to an external negative pressure source, which can be a negative pressure vacuum machine. A connecting piece is fixed on the piston rod of the driving cylinder 51, and the connecting piece is fixedly connected to the negative pressure ring 6. The negative pressure ring 6 is relatively fixedly connected to the piston rod of the driving cylinder 51. When the platen 5 rotates on the working disk 12 with the workpiece, the negative pressure ring 6 can remain stationary with the driving cylinder 51 to reduce the winding of the negative pressure tube 61.

[0027] Furthermore, a step 52 extending outward is integrally formed at the bottom of the pressure plate 5, and a through hole 53 is formed through the step 52. A plurality of through holes 53 are formed at intervals along the circumference of the step 52. The negative pressure ring 6 is located above the step 52. During the relative rotation of the negative pressure ring 6 and the pressure plate 5, a plurality of negative pressure holes 62 are always kept in communication with the through hole 53, so that the negative pressure ring 6 can negatively adsorb the workpiece through the through hole 53. Specifically, the through hole 53 can be designed as a strip hole with the center of the pressure plate 5 as the midpoint. In order to avoid the contact between the negative pressure ring 6 and the workpiece during the grinding process of the workpiece, causing the workpiece or the negative pressure ring 6 to wear, the bottom wall of the negative pressure ring 6 should be higher than the bottom wall of the pressure plate 5. By providing the step 52 integrally formed with the pressure plate 5, when the workpiece is adsorbed on the bottom wall of the pressure plate 5, the bottom wall of the pressure plate 5 can be in smooth contact with the surface of the workpiece, effectively avoiding deformation or even rupture of the workpiece due to the drop between the bottom wall of the negative pressure ring 6 and the bottom wall of the pressure plate 5 during the process of the negative pressure ring 6 adsorbing the workpiece.

[0028] Furthermore, a mounting frame 21 is rotatably mounted on the frame 2, and a connecting column is coaxially fixedly connected to the bottom of the mounting frame 21, and the bottom end of the connecting column is fixedly connected to the maintaining frame 4. By rotating the mounting frame 21, the maintaining frame 4 can be driven to rotate, thereby adjusting the position of each rotating sleeve 3 on the base 1. By adjusting the reciprocating rotation of the mounting frame 21, the rotating sleeve 3 that needs to take / put the workpiece can be moved in front of the person, saving effective space in the factory. Specifically, a second drive motor 22 is fixedly mounted on the frame 2 by bolts, and the output shaft of the second drive motor 22 is transmission-connected to the mounting frame 21 by gear transmission, so that the mounting frame 21 is driven to rotate forward / reverse by the second drive motor 22.

[0029] In order to improve the protection effect on the workpiece, in the embodiment of the present application, a protective layer of a relatively hard material is provided on the bottom surface of the pressure plate 5. Further, a pressure sensor is provided between the pressure plate 5 and the piston rod of the driving cylinder 51. The pressure sensor can detect the downward pressure of the pressure plate 5 on the workpiece in real time. The pressure sensor is electrically connected to the controller. The controller can control the stroke of the piston rod of the driving cylinder 51. The controller receives the pressure value detected by the pressure sensor and controls the movement of the piston rod of the driving cylinder 51, so that the pressure plate 5 presses the workpiece with a constant pressure, maintaining the grinding effect of the workpiece on the working plate 12.

[0030] Further, a plurality of ceramic columns 31 for contacting the working plate 12 are arranged at intervals along the circumferential direction of the bottom of the rotating sleeve 3. By means of the ceramic columns 31, the direct contact between the rotating sleeve 3 and the working plate 12 can be avoided, preventing the continuous wear of the rotating sleeve 3 on the working plate 12 and extending the service life of the rotating sleeve 3.

[0031] Those skilled in the art should understand that although the preferred embodiments of the present invention have been described, once the basic creative concepts are known to those skilled in the art, additional changes and modifications can be made to these embodiments. Therefore, the appended claims are intended to be construed to include the preferred embodiments and all changes and modifications falling within the scope of the present invention. Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention is also intended to include these modifications and variations.

Claims

1. A single-side polishing device, characterized in that: It comprises a machine body, a base (1) arranged on the top of the machine body, and a frame (2) arranged on the machine body and located above the base (1), wherein a grinding assembly is arranged on the base (1), and a pressure assembly is arranged on the frame (2); The grinding assembly comprises a rotating disk, a first driving motor (11) arranged below a base (1) for driving the rotating disk to rotate, and a working disk (12) detachably mounted on the rotating disk, wherein the working disk (12) is provided with a plurality of rotating sleeves (3) along its circumference, a retaining frame (4) is arranged above the working disk (12), and the rotating sleeves (3) are all passed through and rotatably arranged on the retaining frame (4); The pressure assembly comprises a pressure plate (5), the frame (2) is provided with a driving cylinder (51) for driving the pressure plate (5) to vertically rise and fall, the pressure plate (5) is rotatably connected to a piston rod of the driving cylinder (51), and the pressure plate (5) is provided with a vacuum adsorption assembly.

2. A single-side polishing device according to claim 1, characterized in that: The vacuum adsorption assembly comprises a negative pressure ring (6) and a negative pressure tube (61), wherein the negative pressure ring (6) is coaxially rotatably arranged on the outer side of the pressure plate (5), a negative pressure cavity is provided inside the negative pressure tube (61), a negative pressure hole (62) connected to the negative pressure cavity is provided on the bottom wall of the negative pressure ring (6), one end of the negative pressure tube (61) is connected to the negative pressure ring (6) and connected to the negative pressure cavity, and the other end is connected to an external negative pressure source, and the negative pressure ring (6) is relatively fixedly connected to the piston rod of the driving cylinder (51).

3. A single-side polishing device according to claim 2, characterized in that: The bottom of the pressure plate (5) is provided with a step (52) extending outward, and the step (52) is penetrated by a through hole (53). A plurality of the through holes (53) are spaced apart along the circumference of the step (52). The negative pressure ring (6) is located above the step (52), and the negative pressure hole (62) remains connected to the through hole (53).

4. A single-side polishing device according to claim 1, characterized in that: A mounting frame (21) is rotatably arranged on the frame (2), the mounting frame (21) is fixedly connected to the maintenance frame (4), the driving cylinder (51) is fixedly arranged on the mounting frame (21), and a second driving motor (22) for driving the mounting frame (21) to rotate is provided on the frame (2).

5. The single-side polishing device according to claim 1, characterized in that: The bottom surface of the pressure plate (5) is provided with a rubber protective layer.

6. A single-side polishing device according to claim 1, characterized in that: A pressure sensor is provided between the pressure plate (5) and the piston rod of the driving cylinder (51).

7. The single-side polishing device according to claim 1, characterized in that: The retaining frame (4) is provided with a bearing, and the rotating sleeve (3) is rotatably connected to the retaining frame (4) via the bearing.

8. The single-side polishing device according to claim 1, characterized in that: The bottom of the rotating sleeve (3) is provided with a plurality of ceramic columns (31) for contacting the working disk (12) at intervals along its circumference.

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