Probe card anti-falling assembly and dismounting tool

Abstract

The utility model relates to a probe card anti-drop assembly, the head part of a screw is provided with a connecting hole, the rod part of the screw is internally provided with a spring, and a tough metal sheet is inserted in a through groove. The utility model discloses a probe card dismounting tool. The end part of a screwdriver is provided with an ejector pin which can pass through a connecting hole and act on a tough metal sheet. The utility model has the advantages that: (1) the structure is simple, the operation is simple and convenient, the applicability is strong, the fixation strength of the screw is enhanced, and the screw is prevented from falling off and influencing the wafer test; and (2) the ejector pin is additionally arranged on the screwdriver, so that the rapid scaling of the tough metal sheet is realized, the screw is locked, the tedious operation of dispensing is replaced, and the risk that the wafer is damaged due to the falling of the residual glue is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging, in particular to an anti-detachment component and disassembly and assembly tool for a probe card. Background Art

[0002] In the field of semiconductor packaging, it is necessary to test wafers one by one through a probe card. However, the screws for locking the probe card are prone to loosen and fall off due to the vibration caused by long-term testing, and the falling off of the screws poses a risk of scratching the wafers.

[0003] The existing method for preventing the screws from falling off is to fix them with glue at the edge of the screw head. However, for repeated disassembly and assembly of the probe card, it is necessary to re-apply glue to the screw head, and it is difficult to clean the residual glue; the glue is prone to deformation at high temperatures, affecting the fixing strength, and there is a risk of residual glue falling off. The residual glue is easy to stick to the wafers, resulting in wafer damage.

[0004] Therefore, it is necessary to further improve the installation structure of the probe card to solve the problem of screw loosening. Summary of the Utility Model

[0005] The purpose of the utility model is to provide an anti-detachment component and disassembly and assembly tool for a probe card, which can effectively prevent the screws from falling off and affecting the wafer testing.

[0006] To achieve the above-mentioned utility model purpose, in the first aspect of the utility model, an anti-detachment component for a probe card is provided, including a probe card and screws. The screws fasten the probe card through the fixing holes of the probe card, and the heads of the screws are located within the fixing holes;

[0007] It is characterized in that a connection hole is provided in the head of the screw, a spring is provided in the rod portion of the screw, a through groove is horizontally provided between the head and the rod portion, and a ductile metal sheet is inserted in the through groove. The ductile metal sheet is located above the spring;

[0008] The spring acts upward on the ductile metal sheet, pushing the ductile metal sheet to extend out of the through groove, so that the end of the ductile metal sheet abuts against the fixing hole.

[0009] Preferably, the middle part of the ductile metal sheet is in a "U" shape.

[0010] As a further improvement of the utility model, the fixing hole is in a flared shape.

[0011] As a further improvement of the utility model, the fixing hole is in a "convex" shape.

[0012] In the second aspect of the present utility model, a probe card disassembly and assembly tool is provided. The probe card disassembly and assembly tool is a screwdriver, and the end of the screwdriver is provided with a thimble that can pass through the connection hole and act on the resilient metal sheet.

[0013] As a further improvement of the utility model, when the probe card disassembly and assembly tool is in cooperation with the screw, the thimble pushes the resilient metal sheet to compress the spring, and the end of the resilient metal sheet is disengaged from the fixing port.

[0014] For a probe card anti-drop component and disassembly and assembly tool of the present utility model, the end of the screwdriver is oriented towards the head of the screw, the thimble passes through the connection hole, the end of the screwdriver abuts against the head of the screw and rotates and presses it downwards, and the thimble presses down the resilient metal sheet below at the same time. While the resilient metal sheet is being pressed down to squeeze the spring, due to its good resilience, both ends of the resilient metal sheet retract into the through groove, preventing the resilient metal sheet that is always open from interfering with the screw being rotated; after the rotation is completed, the screwdriver is withdrawn, the resilient metal sheet loses the pressure of the thimble, and it extends out of the through groove again and expands as the spring resets, and locks the head of the screw.

[0015] Advantages of a probe card anti-drop component and disassembly and assembly tool of the present utility model compared with the prior art:

[0016] (1) The structure is simple, the operation is convenient, the applicability is strong, the fixing strength of the screw is enhanced, and its falling off is avoided, which affects the wafer test;

[0017] (2) The screwdriver is provided with a thimble to realize the rapid scaling of the resilient metal sheet, lock the screw, replace the cumbersome operation of dispensing glue, and avoid the risk of residual glue falling off and damaging the wafer. Description of the Drawings

[0018] Figure 1 It is a schematic diagram of the screw structure;

[0019] Figure 2 It is a schematic diagram of the screwdriver structure;

[0020] Figure 3 It is a schematic diagram of the structure before the screwdriver screws the screw;

[0021] Figure 4 It is a schematic diagram of the structure when the screwdriver screws the screw;

[0022] Figure 5 It is a schematic diagram of the conventional fixing port structure of the probe card;

[0023] Figure 6 It is a schematic diagram of the trumpet-shaped fixing port structure of the probe card;

[0024] Figure 7 It is a schematic diagram of the "convex" shaped fixing port structure of the probe card. Detailed implementation manners

[0025] The following further elaborates on the detailed implementation manners of the present utility model in conjunction with the attached drawings.

[0026] As Figure 1-2 and Figure 5 shown, in the first aspect of the present utility model, a probe card anti - detachment assembly is provided, which includes a probe card 7 and a screw. The screw fastens the probe card 7 through the fixing port 71 of the probe card 7, and the head 1 of the screw is located within the fixing port 71;

[0027] A connection hole 11 is provided in the head 1 of the screw. A spring 4 is provided within the rod 2 of the screw. A through - slot 12 is horizontally provided between the head 1 and the rod 2, and a resilient metal sheet 3 is inserted into the through - slot 12. The resilient metal sheet 3 is located above the spring 4;

[0028] The spring 4 acts upward on the resilient metal sheet 3, pushing the resilient metal sheet 3 to extend from the through - slot 12 so that the end of the resilient metal sheet 3 abuts against the fixing port 71.

[0029] In the second aspect of the present utility model, a probe card disassembly and assembly tool is provided. The probe card disassembly and assembly tool is a screwdriver 5, and the end of the screwdriver 5 is provided with a thimble 6 that can pass through the connection hole 11 and act on the resilient metal sheet 3. When the probe card disassembly and assembly tool is in cooperation with the screw, the thimble 6 pushes the resilient metal sheet 3 to compress the spring 4 and separates the end of the resilient metal sheet 3 from the fixing port 71.

[0030] For a probe card anti - detachment assembly and disassembly and assembly tool of the present utility model, as Figure 3 shown, the end of the screwdriver 5 is directed towards the head 1 of the screw, and the thimble 6 passes through the connection hole 11. As Figure 4 shown, the end of the screwdriver 5 abuts against the head 1 of the screw and rotates and presses it downward. The thimble 6 presses the resilient metal sheet 3 below downward. While the resilient metal sheet 3 is being pressed downward to squeeze the spring 4, due to its good toughness, the two ends of the resilient metal sheet 3 retract into the through - slot 12, preventing the always - open resilient metal sheet 3 from interfering with the rotating screw. After the rotation is completed, the screwdriver 5 is withdrawn. The resilient metal sheet 3 loses the pressure of the thimble 6 and re - extends and expands from the through - slot 12 with the reset of the spring 4, and locks the head of the screw.

[0031] The middle part of the resilient metal sheet 3 is in a "U" - shaped structure, which is convenient for the thimble 6 to abut against the "U" - shaped structure and press the spring 4 downward, facilitating the scaling of the resilient metal sheet 3 with the action of the thimble 6.

[0032] The inner wall of the conventional fixing port 71 is flat, and the two ends of the resilient metal sheet 3 may slide on the inner wall of the fixing port 71.

[0033] AsFigure 6 As shown, the fixing opening 71 can be flared. The flared fixing opening 71 can clamp both ends of the resilient metal sheet 3, further enhancing the fastening strength of the screw.

[0034] As Figure 7 shown, the fixing opening 71 can be "convex" in shape. The "convex"-shaped fixing opening 71 can limit the resilient metal sheet 3, further reducing the loosening of the screw.

[0035] The preferred embodiments of the present utility model have been specifically described above. However, the present utility model is not limited to the described embodiments. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present utility model. These equivalent modifications or substitutions are all included within the scope defined by the claims of this application.

Claims

1. A probe card anti-drop assembly, comprising a probe card and a screw, wherein the screw is passed through a fixing opening of the probe card to fasten the probe card, and a head of the screw is located in the fixing opening; It is characterized in that The head of the screw is provided with a connection hole, the rod of the screw is provided with a spring, a through slot is transversely provided between the head and the rod, a tough metal sheet is inserted into the through slot, and the tough metal sheet is located above the spring; The spring acts on the ductile metal sheet upwards to push the ductile metal sheet out of the through slot, so that the end of the ductile metal sheet abuts against the fixing opening.

2. A probe card anti-drop assembly as claimed in claim 1, characterized in that: The middle part of the ductile metal sheet is a "U"-shaped structure.

3. The probe card anti-drop assembly according to claim 1, characterized in that: The fixing opening is trumpet-shaped.

4. The probe card anti-drop assembly according to claim 1, characterized in that: The fixing opening is in the shape of a "convex" character.

5. A probe card disassembly tool, used for disassembling the screw as claimed in any one of claims 1 to 4, characterized in that: The probe card disassembly and assembly tool is a screwdriver, and the end of the screwdriver is provided with a pin which can pass through the connection hole and act on the ductile metal sheet.

6. A probe card disassembly and assembly tool as claimed in claim 5, characterized in that: When the probe card disassembly tool is matched with the screw, the ejector pin pushes the ductile metal sheet to compress the spring and causes the end of the ductile metal sheet to be separated from the fixing port.

Images