Silicon wafer basket lifting device and silicon wafer production line

Abstract

The utility model discloses a silicon wafer flower basket lifting device and a silicon wafer production line, a flower basket is configured to place silicon wafers, the lifting device comprises two sets of lifting modules, and any lifting module comprises a bearing part configured to place the flower basket; the lifting part is rotationally connected with the bearing part; the first driving part is connected with the lifting part, and the first driving part is configured to drive the bearing part to turn over in a vertical plane, so that the bearing part is switched between a first posture and a second posture; the second driving part is connected with the lifting part, and the second driving part is configured to drive the lifting part to move in the vertical direction; and the two bearing parts on the two sets of lifting modules alternately act in a first posture and a second posture. The lifting device can reduce the flower basket replacement time and improve the production efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, in particular to a silicon wafer basket lifting device and a silicon wafer production line. Background Art

[0002] In the production process of photovoltaic cells, multiple processes require silicon wafers to be loaded into baskets, and a lifting device is used in this process. The lifting device usually has only one basket lifting position. When the basket is full, the truss manipulator transfers the basket away and then transfers an empty basket to achieve the replacement of the empty basket and the full basket, which has low production efficiency.

[0003] The above information disclosed in the background technology is only used to increase the understanding of the background technology of the present application, and therefore, it may include information that does not constitute the prior art known to ordinary technicians in the field. Summary of the invention

[0004] In view of the problems pointed out in the background technology, the utility model proposes a silicon wafer basket lifting device and a silicon wafer production line, which can increase the buffer positions, reduce the basket replacement time and improve the production efficiency.

[0005] In order to achieve the above-mentioned utility model purpose, the utility model adopts the following technical solutions:

[0006] In some embodiments, a silicon wafer basket lifting device is provided, wherein the basket is configured to place silicon wafers, and the lifting device includes two sets of lifting modules, and any one of the lifting modules includes:

[0007] A carrying portion, configured to place the flower basket;

[0008] A lifting part, rotatably connected to the bearing part;

[0009] A first driving part connected to the lifting part, wherein the first driving part is configured to drive the bearing part to flip in a vertical plane so that the bearing part switches between a first posture and a second posture;

[0010] a second driving part connected to the lifting part, wherein the second driving part is configured to drive the lifting part to move in a vertical direction;

[0011] Wherein, the two bearing parts on the two sets of lifting modules move alternately between the first posture and the second posture.

[0012] In some embodiments, when the carrying portion is in the first posture, the carrying portion is in a flat posture;

[0013] When the carrying portion is in the second posture, the carrying portion is in a vertical posture.

[0014] In some embodiments, the carrying part includes a carrying frame, and a carrying area for placing the flower basket is formed on the carrying frame;

[0015] One end of the carrying frame is provided with a first clamping part, and the first clamping part is configured to clamp one end of the flower basket;

[0016] The other opposite end of the carrying frame is provided with a second clamping part, and the second clamping part is configured to clamp the other opposite end of the flower basket.

[0017] In some embodiments, the first clamping part is a finger cylinder, a positioning column is arranged at one end of the flower basket, and the finger cylinder is configured to clamp the positioning column.

[0018] In some embodiments, the second clamping part includes a second cylinder, a power output end of the second cylinder is connected with a second limiting part, and the second limiting part is configured to abut against one end of the flower basket to limit the flower basket from moving away from the carrying frame.

[0019] In some embodiments, one end of the carrying frame is provided with a first connecting ear, the lifting part includes a second connecting ear, and the first connecting ear is rotatably connected with the second connecting ear;

[0020] The first driving part is arranged on the second connecting ear, the first driving part includes a first motor, the first motor is connected with a speed reducer, the speed reducer is connected with a rotating shaft, and the rotating shaft is connected with the first connecting ear and the second connecting ear.

[0021] In some embodiments, the second driving part includes a column, a second motor and a sliding part are arranged on the column, the second motor is configured to drive the sliding part to move along the height direction of the column, and the sliding part is fixedly connected with the lifting part.

[0022] In some embodiments, a first connecting plate is fixedly arranged between the two columns on the two sets of lifting modules;

[0023] The lifting device further includes a second connecting plate, and the first connecting plate is slidably connected with the second connecting plate;

[0024] The lifting device further includes a third driving part, the third driving part is connected with the column, and the third driving part is configured to drive the column to move in the horizontal direction.

[0025] In some embodiments, two first limiting parts are arranged on the second connecting plate, the two first limiting parts are arranged at intervals in the horizontal direction, the two columns are located between the two first limiting parts, and the first limiting part is configured to limit the lateral displacement of the column.

[0026] In some embodiments, a silicon wafer production line is provided, including the silicon wafer carrier lifting device as described above.

[0027] Compared with the prior art, the advantages and positive effects of the present utility model are as follows:

[0028] The carrier lifting device disclosed in the present application is provided with two sets of lifting modules. The two carrying parts on the two sets of lifting modules act alternately in the first posture and the second posture, which is equivalent to adding a carrier buffer position. When a carrier is being loaded with silicon wafers on the carrying part in the second posture, after the fully loaded carrier is removed from the carrying part in the first posture, the empty carrier is placed on the carrying part in the first posture to wait. In this way, the time for carrier replacement can be reduced and the production efficiency can be improved.

[0029] After reading the specific embodiments of the present utility model in conjunction with the accompanying drawings, other features and advantages of the present utility model will become clearer. Description of the Drawings

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the accompanying drawings required for use in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other accompanying drawings can be obtained based on these drawings without creative efforts.

[0031] Figure 1 A structural diagram of a silicon wafer production line according to some embodiments;

[0032] Figure 2 A structural diagram of a silicon wafer carrier lifting device according to some embodiments;

[0033] Figure 3 A structural diagram of a silicon wafer carrier lifting device with a carrier placed therein according to some embodiments;

[0034] Figure 4 Another structural diagram of a silicon wafer carrier lifting device according to some embodiments;

[0035] Figure 5 A structural diagram of a lifting module according to some embodiments;

[0036] Figure 6 A structural diagram of a second driving part according to some embodiments;

[0037] Figure 7 A structural diagram of a carrying part and a carrier according to some embodiments;

[0038] Figure 8Another structural diagram of the carrier part and the flower basket according to some embodiments;

[0039] Figure 9 A structural diagram of the flower basket according to some embodiments;

[0040] Figure 10 Another structural diagram of the flower basket according to some embodiments;

[0041] Reference numerals:

[0042] 1. Flower basket lifting device;

[0043] 2. Wafer horizontal conveying device;

[0044] 3. Wafer inserting water tank device;

[0045] 4. Wafer conveying line;

[0046] 10. Lifting module;

[0047] 100. Carrier part; 110. First clamping part; 111. Finger cylinder; 120. Second clamping part; 121. Second cylinder; 122. Second limiting part; 130. Buffer part; 131. Third cylinder, 132. Abutting part; 140. First connecting ear; 150. Carrier frame;

[0048] 200. Lifting part; 210. Second connecting ear;

[0049] 300. First driving part; 310. First motor; 320. Reducer; 330. Rotating shaft;

[0050] 400. Second driving part; 410. Second motor; 420. Column; 430. Sliding part;

[0051] 500. Third driving part;

[0052] 600. First connecting plate; 610. Slide block;

[0053] 700. Second connecting plate; 710. Slide rail; 720. First limiting part; 730. Hydraulic buffer device;

[0054] 800. Flower basket; 810. Positioning column. Detailed implementation manners

[0055] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0056] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0057] The terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, unless otherwise specified, the meaning of "a plurality" is two or more.

[0058] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "mounted", "connected" and "coupled" shall be construed broadly. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0059] In the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0060] The following disclosure provides many different embodiments or examples for implementing different structures of the present utility model. To simplify the disclosure of the present utility model, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present utility model. In addition, the present utility model may repeat reference numerals and / or reference letters in different examples. Such repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present utility model provides examples of various specific processes and materials, but those of ordinary skill in the art may be aware of the application of other processes and / or the use of other materials.

[0061] In some embodiments, a silicon wafer production line is provided. Referring to Figure 1 , it includes a carrier lifting device 1, a silicon wafer horizontal conveying device 2, an inserting water tank device 3, etc. The carrier lifting device 1, the silicon wafer horizontal conveying device 2, and the inserting water tank device 3 are arranged in sequence along the horizontal direction. The silicon wafers in the inserting water tank device 3 are moved by the silicon wafer horizontal conveying device 2 to the carrier lifting device 1.

[0062] The silicon wafer production line includes a plurality of silicon wafer conveying lines 4. For example, it includes two silicon wafer conveying lines 4. Each silicon wafer conveying line 4 includes a carrier lifting device 1, a silicon wafer horizontal conveying device 2, and an inserting water tank device 3, etc. The plurality of silicon wafer conveying lines 4 helps to improve production efficiency.

[0063] In some embodiments, Figure 2 FIG. is a structural diagram of the lifting device observed from one side. Figure 4 FIG. is a structural diagram of the lifting device observed from the other side.

[0064] The silicon wafer carrier lifting device 1 includes a carrier 800, and the carrier 800 is configured to place silicon wafers. Figure 3 The carrier 800 is placed inside the shown lifting device.

[0065] The lifting device includes two sets of lifting modules 10, and the structures of the two sets of lifting modules 10 are the same. Any one of the lifting modules 10 includes a bearing part 100. The bearing part 100 is configured to place the carrier 800.

[0066] A limiting structure for limiting the carrier 800 is provided on the bearing part 100. After the carrier 800 is placed on the bearing part 100 by a manipulator, the limiting structure limits the carrier 800 on the bearing part 100, so that the carrier 800 is stably placed on the bearing part 100 and prevents the carrier 800 from falling off the bearing part 100.

[0067] When it is necessary to remove the carrier 800 from the bearing part 100, the limiting structure releases the limit on the carrier 800, and the manipulator removes the carrier 800 from the bearing part 100.

[0068] The lifting module 10 includes a lifting part 200. The lifting part 200 is rotatably connected to the carrying part 100.

[0069] The lifting module 10 includes a first driving part 300. The first driving part 300 is connected to the lifting part 200, and the first driving part 300 is configured to drive the carrying part 100 to flip in the vertical plane, so that the carrying part 100 is switched between a first posture and a second posture.

[0070] The lifting module 10 includes a second driving part 400. The second driving part 400 is connected to the lifting part 200, and the second driving part 400 is configured to drive the lifting part 200 to move in the vertical direction.

[0071] When the carrying part 100 is in the first posture, the manipulator places the empty flower basket 800 on the carrying part 100, or the manipulator removes the full flower basket 800 from the carrying part 100.

[0072] When the carrying part 100 is in the second posture, the silicon wafers conveyed by the silicon wafer horizontal conveying device 2 are loaded into the flower basket 800.

[0073] The two carrying parts 100 on the two sets of lifting modules 10 perform alternating actions between the first posture and the second posture. In other words, for the sake of easy understanding, the two sets of lifting modules 10 are respectively defined as the lifting module 10A and the lifting module 10B. When the carrying part 100 on the lifting module 10A is in the first posture, the carrying part 100 on the lifting module 10B is in the second posture; when the carrying part 100 on the lifting module 10A is in the second posture, the carrying part 100 on the lifting module 10B is in the first posture.

[0074] By arranging two sets of lifting modules 10 on the lifting device, and the two carrying parts 100 on the two sets of lifting modules 10 perform alternating actions between the first posture and the second posture, it is equivalent to adding a buffer position for the flower basket 800. When a flower basket 800 is being loaded with silicon wafers on the carrying part 100 in the second posture, after the full flower basket 800 is removed from the carrying part 100 in the first posture, the empty flower basket 800 is placed on the carrying part 100 in the first posture to wait. In this way, the replacement time of the flower basket 800 can be reduced and the production efficiency can be improved.

[0075] In some embodiments, referring to Figure 2 , when the carrying part 100 is in the first posture, the carrying part 100 is in a flat posture. At this time, the flower basket 800 on the carrying part 100 is in a flat posture, which is convenient for the manipulator to pick and place.

[0076] When the carrying part 100 is in the second posture, the carrying part 100 is in a vertical posture. At this time, the flower basket 800 on the carrying part 100 is in a vertical posture, which is convenient for loading the silicon wafers.

[0077] In some embodiments, referring to Figure 2 , after one of the carrying parts 100 (denoted as the carrying part 100A) is driven by the first driving part 300 to be converted from the first posture to the second posture, that is, the carrying part 100A is converted from the horizontal posture to the vertical posture, the wafers conveyed by the wafer horizontal conveying device 2 are loaded into the flower basket 800. The flower basket 800 is in the vertical posture. The wafers are first loaded into the top area of the flower basket 800. As the wafer loading progresses, the carrying part 100A moves upward under the drive of the second driving part 400. The carrying part 100A drives the flower basket 800 to move upward synchronously. The wafers are continuously loaded into the flower basket 800 until the flower basket 800 is full. Then the carrying part 100A is driven by the first driving part 300 to be converted from the second posture to the first posture. Then the carrying part 100A moves downward under the drive of the second driving part 400. The carrying part 100A drives the full flower basket 800 to move downward synchronously. After moving downward in place, the manipulator removes the full flower basket 800 and then places the empty flower basket 800 on the carrying part 100A in the first posture; when loading wafers into the flower basket 800 on the carrying part 100A, an empty flower basket 800 is placed on the other carrying part 100 (denoted as the carrying part 100B); when the carrying part 100A drives the full flower basket 800 to move downward, the carrying part 100B is converted to the second posture and drives the empty flower basket 800 to move upward to facilitate wafer loading. The two carrying parts 100 act alternately, reducing the replacement time of the flower basket 800 and improving the production efficiency.

[0078] In some embodiments, referring to Figure 9 , the carrying part 100 includes a carrying frame 150, and a carrying area for placing the flower basket 800 is formed on the carrying frame 150.

[0079] A first clamping part 110 is arranged at one end of the carrying frame 150, and the first clamping part 110 is configured to clamp one end of the flower basket 800. Referring to Figure 7 . A second clamping part 120 is arranged at the other opposite end of the carrying frame 150, and the second clamping part 120 is configured to clamp the other opposite end of the flower basket 800. Referring to Figure 8 .

[0080] After the flower basket 800 is placed on the carrying part 100, the relative two ends of the flower basket 800 are limited and fixed through the first clamping part 110 and the second clamping part 120, improving the placement stability of the flower basket 800 on the carrying part 100.

[0081] In some embodiments, referring to Figure 7 and Figure 9, the first clamping part 110 is a finger cylinder 111, and the finger cylinder 111 is fixedly installed at one end of the carrier 150. A positioning post 810 is provided at one end of the flower basket 800, and the finger cylinder 111 is configured to clamp the positioning post 810. The finger cylinder 111 has a low cost and a simple structure.

[0082] In some embodiments, referring to Figure 8 and Figure 9 , the second clamping part 120 includes a second cylinder 121, and a second limiting part 122 is connected to the power output end of the second cylinder 121. The second limiting part 122 is configured to abut against one end of the flower basket 800 to limit the movement of the flower basket 800 away from the carrier 150.

[0083] The second limiting part 122 has two L-shaped claws, and the claws are clamped with the side wall of the flower basket 800 to limit the flower basket 800.

[0084] Referring to Figure 10 , the second cylinder 121 is fixedly installed on the inner side wall of the carrier 150. An opening is provided on the carrier 150, and the claws pass through the opening, and the second cylinder 121 drives the claws to move up and down.

[0085] In some embodiments, referring to Figure 10 , the carrier part 100 further includes a buffer part 130, and the buffer part 130 includes an abutting part 132 and a third cylinder 131. The third cylinder 131 is fixedly installed at the bottom of the carrier 150. The abutting part 132 is a strip-shaped structure, and the abutting part 132 extends along the length direction of the carrier part 100. The abutting part 132 is arranged at the power output end of the third cylinder 131.

[0086] When the flower basket 800 is placed on the carrier part 100, the abutting part 132 is away from the flower basket 800. After the flower basket 800 is placed in place, the abutting part 132 moves towards the direction close to the flower basket 800. When wafers are loaded into the flower basket 800, the wafers abut against the abutting part 132, and the abutting part 132 plays a buffering role for the wafers to prevent the wafers from being damaged due to high-speed impact.

[0087] In some embodiments, referring to Figure 5 , a first connecting ear 140 is provided at one end of the carrier 150. The lifting part 200 includes a second connecting ear 210, and the first connecting ear 140 is rotatably connected to the second connecting ear 210.

[0088] The first driving part 300 is arranged on the second connecting ear 210. The first driving part 300 includes a first motor 310. The first motor 310 is connected to a speed reducer 320. The speed reducer 320 is connected to a rotating shaft 330. The rotating shaft 330 is connected to the first connecting ear 140 and the second connecting ear 210.

[0089] The first motor 310 and the speed reducer 320 drive the first connecting ear 140 to rotate around the rotating shaft 330, realizing the flipping of the carrying part 100.

[0090] In some embodiments, referring to Figure 6 , the second driving part 400 includes a column 420, and a second motor 410 and a sliding part 430 are arranged on the column 420. The second motor 410 is fixedly installed at the bottom of the column 420. The second motor 410 is configured to drive the sliding part 430 to move along the height direction of the column 420, and the sliding part 430 is fixedly connected to the lifting part 200, thereby realizing the lifting movement of the lifting part 200 in the vertical direction.

[0091] In some embodiments, referring to Figure 6 , a first connecting plate 600 is fixedly arranged between two columns 420 on two sets of lifting modules 10, and the first connecting plate 600 extends in the horizontal direction.

[0092] The lifting device further includes a second connecting plate 700, and the first connecting plate 600 is slidably connected to the second connecting plate 700. For example, a slider 610 is arranged on the first connecting plate 600, and a slide rail 710 is arranged on the second connecting plate 700, and the slider 610 is slidably arranged on the slide rail 710.

[0093] The lifting device further includes a third driving part 500. For example, the third driving part 500 is a cylinder. The third driving part 500 is fixedly connected to the column 420, and the third driving part 500 is configured to drive the column 420 to move in the horizontal direction.

[0094] When the flower basket 800 on the lifting module 10A is filled with silicon wafers, the third driving part 500 drives the column 420 to traverse a certain distance, so that the lifting module 10B is directly opposite to the silicon wafer horizontal conveying device 2, facilitating the silicon wafers conveyed from the silicon wafer horizontal conveying device 2 to be smoothly loaded into the flower basket 800 on the lifting module 10B.

[0095] The sliding connection between the first connecting plate 600 and the second connecting plate 700 helps to improve the smoothness of the transverse movement of the column 420.

[0096] The two columns 420 are connected by the first connecting plate 600, and the transverse movement of the two columns 420 shares a driving mechanism and maintains synchronous movement.

[0097] In some embodiments, referring to Figure 6 , two first limiting parts 720 are arranged on the second connecting plate 700. The first limiting parts 720 are mechanical limiting structures. The two first limiting parts 720 are arranged at intervals in the horizontal direction. The two columns 420 are located between the two first limiting parts 720, and the first limiting parts 720 are configured to limit the lateral displacement of the column 420.

[0098] In some embodiments, with reference to Figure 6 , two hydraulic buffer devices 730 are provided on the second connecting plate 700, and the two hydraulic buffer devices 730 are arranged at intervals in the horizontal direction. The hydraulic buffer device 730 is used to prevent the column 420 from colliding when it moves horizontally.

[0099] In the description of the above embodiments, the specific features, structures, materials or characteristics can be combined in a suitable manner in any one or more embodiments or examples.

[0100] The above are only the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention should be covered by the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims

1. A silicon wafer basket lifting device, wherein the basket is configured to place silicon wafers, characterized in that: The lifting device includes two sets of lifting modules, and any one of the lifting modules includes: A carrying portion, configured to place the flower basket; A lifting part, rotatably connected to the bearing part; A first driving part connected to the lifting part, wherein the first driving part is configured to drive the bearing part to flip in a vertical plane so that the bearing part switches between a first posture and a second posture; a second driving part connected to the lifting part, wherein the second driving part is configured to drive the lifting part to move in a vertical direction; Wherein, the two bearing parts on the two sets of lifting modules move alternately between the first posture and the second posture.

2. The silicon wafer basket lifting device according to claim 1, characterized in that: When the carrying portion is in the first posture, the carrying portion is in a horizontal posture; When the carrying portion is in the second posture, the carrying portion is in a vertical posture.

3. The silicon wafer basket lifting device according to claim 1, characterized in that: The bearing part comprises a bearing frame, and a bearing area for placing the flower basket is formed on the bearing frame; A first clamping portion is provided at one end of the carrier frame, and the first clamping portion is configured to clamp one end of the flower basket; The other opposite end of the carrier is provided with a second clamping portion, and the second clamping portion is configured to clamp the other opposite end of the flower basket.

4. The silicon wafer basket lifting device according to claim 3, characterized in that: The first clamping part is a finger cylinder, a positioning column is provided at one end of the flower basket, and the finger cylinder is configured to clamp the positioning column.

5. The silicon wafer basket lifting device according to claim 3, characterized in that: The second clamping part includes a second cylinder, a power output end of the second cylinder is connected to a second limiting part, and the second limiting part is configured to abut against one end of the flower basket to limit the movement of the flower basket in a direction away from the supporting frame.

6. The silicon wafer basket lifting device according to claim 3, characterized in that: A first connecting ear is disposed at one end of the carrier, and the lifting portion includes a second connecting ear, and the first connecting ear is rotatably connected to the second connecting ear; The first driving part is arranged on the second connecting ear, the first driving part comprises a first motor, the first motor is connected to a reducer, the reducer is connected to a rotating shaft, and the rotating shaft connects the first connecting ear and the second connecting ear.

7. The silicon wafer basket lifting device according to any one of claims 1 to 6, characterized in that: The second driving part includes a column, and a second motor and a sliding part are arranged on the column. The second motor is configured to drive the sliding part to move along the height direction of the column, and the sliding part is fixedly connected to the lifting part.

8. The silicon wafer basket lifting device according to claim 7, characterized in that: A first connecting plate is fixedly arranged between the two upright posts on the two sets of lifting modules; The lifting device further comprises a second connecting plate, the first connecting plate being slidably connected to the second connecting plate; The lifting device further includes a third driving unit, which is connected to the column and is configured to drive the column to move in a horizontal direction.

9. The silicon wafer basket lifting device according to claim 8, characterized in that: The second connecting plate is provided with two first limiting portions, the two first limiting portions are arranged at intervals in the horizontal direction, the two columns are located between the two first limiting portions, and the first limiting portions are configured to limit the lateral displacement of the columns.

10. A silicon wafer production line, characterized in that: It comprises the silicon wafer basket lifting device as described in any one of claims 1 to 9.

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