Heating window and vacuum processing system

Abstract

The utility model relates to the technical field of vacuum equipment, and discloses a heating window and a vacuum treatment system. The heating window comprises a window body, a heater assembly and a light-transmitting plate. The window body includes a heater assembly receiving hole. The heater assembly is arranged in the heater assembly containing hole of the window body and comprises a heater body and a light-transmitting plate containing hole. The light-transmitting plate is arranged in the light-transmitting plate containing hole of the heater assembly, and the heater assembly is used for heating the light-transmitting plate.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum equipment, and particularly to a heating window and a vacuum processing system. Background Art

[0002] In vacuum coating technologies, such as molecular beam epitaxy (MBE) systems, there is a common problem of material deposition on the window glass. Heating is a method for dealing with the material deposition on the window. Currently, there are mainly two structures for heating windows. One is to directly deposit a metal film on the glass and heat the glass by passing an electric current through the metal film. However, this structure may have problems such as corrosion, peeling, attenuation, and system contamination of the metal film after long-term use, and there are limitations on the heating temperature. If the temperature is too high, the metal film is likely to peel off. The other is to heat outside the vacuum and heat the glass inside the vacuum through heat conduction and thermal radiation. However, this method may cause the outer wall of the vacuum chamber to overheat, posing a risk of vacuum system leakage, and at the same time, the heat loss is relatively serious and the heating efficiency is low. Summary of the Utility Model

[0003] The present disclosure provides a heating window, comprising:

[0004] A window body, including a heater assembly accommodation hole;

[0005] A heater assembly, disposed in the heater assembly accommodation hole of the window body, the heater assembly including a heater body and a light-transmitting plate accommodation hole; and

[0006] A light-transmitting plate, disposed in the light-transmitting plate accommodation hole of the heater assembly, and the heater assembly is used to heat the light-transmitting plate.

[0007] In some embodiments of the present disclosure, a plurality of card slots are circumferentially and spacedly disposed on the heater body;

[0008] The heater assembly further includes a plurality of fasteners, respectively disposed in the plurality of card slots for fixing the light-transmitting plate.

[0009] In some embodiments of the present disclosure, the heater assembly further includes a hoop, which circumferentially surrounds the outer wall of the heater body and is fixedly connected to the plurality of fasteners.

[0010] In some embodiments of the present disclosure, the window body further includes a feed-through hole communicating with the heater assembly accommodation hole,

[0011] The heating window further includes a feed-through, connected to the feed-through hole of the window body, the feed-through including a first feed-through electrode and a second feed-through electrode,

[0012] The heater assembly further includes a first heater electrode and a second heater electrode, respectively connected to the first feed-through electrode and the second feed-through electrode to form a closed-loop path.

[0013] In some embodiments of the present disclosure, a first protrusion is provided at one end of the heater body, and the first heater electrode and the second heater electrode are disposed on the first protrusion; and / or

[0014] At least one second protrusion is provided at the other end of the heater body. The window body includes at least one positioning groove, and at least one second protrusion is received in at least one positioning groove to mount and position the heater body and the window body.

[0015] In some embodiments of the present disclosure, the heater body is a pyrolytic boron nitride (PBN)-pyrolytic graphite (PG)-PBN composite heater, and the PBN-PG-PBN composite heater includes:

[0016] A PBN substrate, the PBN substrate includes a hollow cavity to form a light-transmitting plate receiving hole;

[0017] A PG coating, coated on the outer wall of the PBN substrate, and the PG coating is designed as a heating circuit structure, and both ends of the circuit are respectively connected to the first heater electrode and the second heater electrode; and

[0018] A PBN coating, coated on the PG coating.

[0019] In some embodiments of the present disclosure, the feedthrough further includes:

[0020] A first elastic electrode sheet, the distal end is connected to the first heater electrode, and the proximal end abuts against the first feedthrough electrode;

[0021] A second elastic electrode sheet, the distal end is connected to the second heater electrode, and the proximal end abuts against the second feedthrough electrode.

[0022] In some embodiments of the present disclosure, the feedthrough further includes:

[0023] A first connection sleeve, the distal end of the first feedthrough electrode and the proximal end of the first elastic electrode sheet are both disposed in the first connection sleeve and in contact to form a stable electrical connection;

[0024] A second connection sleeve, the distal end of the second feedthrough electrode and the proximal end of the second elastic electrode sheet are both disposed in the second connection sleeve and in contact to form a stable electrical connection;

[0025] and / or

[0026] Both the first elastic electrode sheet and the second elastic electrode sheet are L-shaped.

[0027] In some embodiments of the present disclosure, the first heater electrode includes a first heater electrode through hole, and a first elastic electrode sheet through hole is provided at the distal end of the first elastic electrode sheet,

[0028] The second heater electrode includes a through hole of the second heater electrode, and a through hole of the second elastic electrode piece is provided at the distal end of the second elastic electrode piece.

[0029] The feedthrough further includes a fastening assembly, and the fastening assembly includes:

[0030] A first screw and a first nut for connecting the first heater electrode and the first elastic electrode piece through the through hole of the first heater electrode and the through hole of the first elastic electrode piece; and

[0031] A second screw and a second nut for connecting the second heater electrode and the second elastic electrode piece through the through hole of the second heater electrode and the through hole of the second elastic electrode piece.

[0032] In some embodiments of the present disclosure, the fastening assembly further includes:

[0033] A first flexible gasket and a first arc-shaped gasket, which are sequentially arranged between the first screw and the first elastic electrode piece;

[0034] A first thin gasket, a first butterfly gasket and a first flat gasket, which are sequentially arranged between the first heater electrode and the first nut; and / or

[0035] A second flexible gasket and a second arc-shaped gasket, which are sequentially arranged between the second screw and the second elastic electrode piece;

[0036] A second thin gasket, a second butterfly gasket and a second flat gasket, which are sequentially arranged between the second heater electrode and the second nut.

[0037] In some embodiments of the present disclosure, the heating window further includes:

[0038] An annular heat insulation sheet, the outer ring of which abuts against the inner wall of the heater body, and the inner ring includes a recess, the recess is adapted to the first protrusion of the heater body and is sleeved on the first protrusion, and the annular heat insulation sheet covers the front end face of the heater body at one end of the first protrusion; and / or

[0039] A heat insulation cylinder, which is sleeved in the window body and is used to accommodate the heater assembly; and / or

[0040] A retaining ring, which is installed in a card slot inside the window body.

[0041] The present disclosure provides a vacuum processing system, including:

[0042] A vacuum chamber, including a window;

[0043] According to the heating window in any one of the embodiments of the present disclosure, the distal end of the window body of the heating window is vacuum-sealedly connected to the window;

[0044] At least one evaporation source, which is arranged in the vacuum chamber; and / or

[0045] The outer vacuum-sealed window is hermetically connected to the proximal end of the window body of the heating window.

[0046] The heating window and the vacuum processing system according to some embodiments of the present disclosure can bring beneficial technical effects. For example, the heating window and the vacuum processing system according to some embodiments of the present disclosure have a simple structure, no risk of contaminating the cavity, and can withstand a relatively high heating temperature. Also, for example, the heating window and the vacuum processing system according to some embodiments of the present disclosure have good heating uniformity for the light-transmitting plate of the heating window, and the heating temperature is stable, with a long service life, and can effectively handle the problem of material deposition on the window. Again, for example, the heating window and the vacuum processing system according to some embodiments of the present disclosure have an obstructive effect on the beam current and can effectively protect, for example, the outer vacuum-sealed window. Description of the Drawings

[0047] To more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only one embodiment of the present disclosure. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0048] Figure 1 Shows an exploded schematic view of a heating window according to some embodiments of the present disclosure.

[0049] Figure 2 Shows a cross-sectional view of a heating window according to some embodiments of the present disclosure.

[0050] Figure 3 Shows a cross-sectional view of a heater assembly according to some embodiments of the present disclosure.

[0051] Figure 4 Shows a schematic structural view of a heater assembly according to some embodiments of the present disclosure.

[0052] Figure 5 Shows an exploded schematic view of a feedthrough according to some embodiments of the present disclosure.

[0053] Figure 6A Shows a perspective view of an assembled heating window according to some embodiments of the present disclosure.

[0054] Figure 6B Shows a front view of an assembled heating window according to some embodiments of the present disclosure.

[0055] Figure 6C Shows a side view of an assembled heating window according to some embodiments of the present disclosure.

[0056] Figure 7 Shows a thermal simulation diagram of a heated window according to some embodiments of the present disclosure.

[0057] Figure 8 Shows a graph of the temperature change of the heated window over time according to some embodiments of the present disclosure.

[0058] Figure 9 Shows a schematic structural diagram of a vacuum processing system according to some embodiments of the present disclosure.

[0059] Figure 10 Shows a state diagram of the outer vacuum-sealed window after the vacuum processing system according to some embodiments of the present disclosure is used.

[0060] In the above figures, each reference numeral represents:

[0061] 1000 - Vacuum processing system

[0062] 100 - Heated window

[0063] 110 - Window body

[0064] 111 - Heater assembly receiving hole

[0065] 112 - Feedthrough hole

[0066] 120 - Heater assembly

[0067] 121 - Heater body

[0068] 122 - Translucent plate receiving hole

[0069] 123 - Translucent plate

[0070] 124 - Clip

[0071] 125 - Hoop

[0072] 126a - First heater electrode

[0073] 126b - Second heater electrode

[0074] 127 - First protrusion

[0075] 128 - Second protrusion

[0076] 130 - Feedthrough

[0077] 131a - First feedthrough electrode

[0078] 131b - Second feedthrough electrode

[0079] 132a - First elastic electrode piece

[0080] 132b - Second elastic electrode piece

[0081] 133a - First connecting sleeve

[0082] 133b - Second connecting sleeve

[0083] 134 - Fastening assembly

[0084] 1341a - First screw

[0085] 1342a - First nut

[0086] 1343a - First flexible gasket

[0087] 1344a - First arc-shaped gasket

[0088] 1345a - First thin gasket

[0089] 1346a - First butterfly gasket

[0090] 1347a - First flat gasket

[0091] 140 - Heat insulation sheet

[0092] 150 - Heat insulation cylinder

[0093] 160 - Retaining ring

[0094] 200 - Vacuum chamber

[0095] 300 - Outer vacuum-sealed viewing window

[0096] 400 - Evaporation source Detailed implementation manners

[0097] Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0098] In the description of the present disclosure, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "top", "bottom", etc. is based on the orientation or positional relationship shown in the drawings. These are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present disclosure. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. In the description of the present disclosure, it should be noted that unless otherwise clearly specified and limited, the terms "mounted", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the communication inside two elements. In the description of the present disclosure, the distal end or the far side refers to the end or side that extends deep into the vacuum environment (for example, the vacuum chamber), and the proximal end or the near side is the end or side opposite to the distal end or the far side (for example, the end or side away from the vacuum chamber, or the end or side close to the vacuum chamber wall inside the vacuum chamber, etc.). Alternatively, the end or side close to the driving device is the proximal end or the near side, and the end or side away from the driving device is the distal end or the far side. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0099] Figure 1 Fig. shows an exploded schematic view of the heating window 100 according to some embodiments of the present disclosure.

[0100] Figure 2 Fig. shows a cross-sectional view of the heating window 100 according to some embodiments of the present disclosure.

[0101] As Figure 1 and Figure 2 shown, in some embodiments of the present disclosure, the heating window 100 may include a window body 110, a heater assembly 120, and a light-transmitting plate 123. The window body 110 may include a heater assembly receiving hole 111. The heater assembly 120 is disposed in the heater assembly receiving hole 111 of the window body 110. The heater assembly 120 may include a heater body 121 and a light-transmitting plate receiving hole 122. The light-transmitting plate 123 is disposed in the light-transmitting plate receiving hole 122 of the heater assembly 120. The heater assembly 120 is used to heat the light-transmitting plate 123.

[0102] As Figure 1As shown, in some embodiments, the heater body 121 can be cylindrical, and a light-transmitting plate receiving hole 122 is formed in the internal cavity of the cylinder. Those skilled in the art can understand that the structure of the heater body 121 is not limited to cylindrical, and can include various suitable structures, such as various ring-shaped or cylindrical structures, and the cross-section can be in various shapes, such as circular, polygonal, rectangular, elliptical, etc.

[0103] The heating window 100 according to some embodiments of the present disclosure has a simple structure. The heater assembly 120 heats the light-transmitting plate 123 to thermally evaporate the material deposited on the light-transmitting plate 123, thereby actively solving the problem that the deposition of the material affects the transparency of the window. And no metal coating is used. Therefore, there is no risk of contaminating the cavity and it can withstand a relatively high heating temperature.

[0104] Figure 3 A cross-sectional view showing the heater assembly 120 according to some embodiments of the present disclosure is shown. Figure 4 A schematic structural view showing the heater assembly 120 according to some embodiments of the present disclosure is shown.

[0105] As Figure 3 and Figure 4 As shown, in some embodiments of the present disclosure, a plurality of card slots (not shown in the figure) are circumferentially spaced on the heater body 121. The heater assembly 120 may further include a plurality of card members 124, which are respectively arranged in the plurality of card slots for fixing the light-transmitting plate 123.

[0106] In some embodiments, four card slots (not shown in the figure) are evenly circumferentially spaced on the heater body 121. The heater assembly 120 may further include four card members 124, which are respectively arranged in the four card slots for fixing the light-transmitting plate 123. Those skilled in the art can understand that this is only exemplary, and other suitable numbers of card slots, such as two, three, five or more, can also be circumferentially spaced on the heater body 121.

[0107] In some embodiments, the card slot can be a pair of card slots penetrating the heater body 121. The card member 124 is a parallel clip with a two-piece opening design. The parallel clip passes through the heater body 121 through the card slot and clamps the light-transmitting plate 123.

[0108] As Figure 3 and Figure 4 As shown, in some embodiments of the present disclosure, the heater assembly 120 may further include a hoop 125. The hoop 125 circumferentially surrounds the outer wall of the heater body 121 and is fixedly connected to the plurality of card members 124. The card member 124 can quickly fix the light-transmitting plate 123 in place, and the installation process is simple. Then, the hoop 125 is used to fix the card member 124, improving the overall structural stability of the heater assembly 120.

[0109] In some embodiments, the clamping hoop 125 can be fixed to the plurality of clamping members 124 by welding (e.g., spot welding). However, this is merely exemplary, and the clamping hoop 125 can also be fixed to the plurality of clamping members 124 by other means such as screws and nuts.

[0110] Figure 5 A schematic exploded view of the feedthrough 130 according to some embodiments of the present disclosure is shown.

[0111] As Figure 1 、 Figure 4 and Figure 5 shown, in some embodiments of the present disclosure, the window body 110 may further include a feedthrough hole 112 communicating with the heater assembly receiving hole 111. The heating window 100 may further include a feedthrough 130. The feedthrough 130 is connected to the feedthrough hole 112 of the window body 110. The feedthrough 130 may include a first feedthrough electrode 131a and a second feedthrough electrode 131b. The heater assembly 120 may further include a first heater electrode 126a and a second heater electrode 126b, which are respectively connected to the first feedthrough electrode 131a and the second feedthrough electrode 131b to form a closed-loop path.

[0112] As Figure 3 and Figure 4 shown, in some embodiments of the present disclosure, a first protrusion 127 is provided at one end of the heater body 121. The first heater electrode 126a and the second heater electrode 126b are provided on the first protrusion 127. Arranging the first heater electrode 126a and the second heater electrode 126b on the first protrusion 127 is easy for installation and maintenance, and helps to reduce the overheating risk of the first heater electrode 126a and the second heater electrode 126b and extend the service life.

[0113] As Figure 3 and Figure 4 shown, in some embodiments of the present disclosure, at least one second protrusion 128 is provided at the other end of the heater body 121. The window body 110 may further include at least one positioning groove (not shown in the figure), and the at least one second protrusion 128 is received in the at least one positioning groove to position the installation of the heater body 121 and the window body 110.

[0114] As Figure 3 shown, in some embodiments, two second protrusions 128 are provided at the other end of the heater body 121, but this is merely exemplary. Other suitable numbers of second protrusions 128 may also be provided at the other end of the heater body 121.

[0115] In some embodiments of the present disclosure, the heater body 121 is a pyrolytic boron nitride (PBN)-pyrolytic graphite (PG)-PBN composite heater. The PBN-PG-PBN composite heater may include a PBN substrate, a PG coating, and a PBN coating. The PBN substrate may include a hollow cavity to form a light-transmitting plate receiving hole 122. The PG coating is coated on the outer wall of the PBN substrate, and the PG coating is designed as a heating circuit structure (e.g., a serpentine heating circuit structure, etc.), and both ends of the circuit are respectively connected to the first heater electrode 126a and the second heater electrode 126b. The PBN coating is coated on the PG coating.

[0116] As Figure 5 shown, in some embodiments of the present disclosure, the feedthrough 130 may further include a first elastic electrode sheet 132a and a second elastic electrode sheet 132b. The distal end of the first elastic electrode sheet 132a is connected to the first heater electrode 126a, and the proximal end abuts against the first feedthrough electrode 131a. The distal end of the second elastic electrode sheet 132b is connected to the second heater electrode 126b, and the proximal end abuts against the second feedthrough electrode 131b.

[0117] As Figure 5 shown, in some embodiments of the present disclosure, the feedthrough 130 may further include a first connection sleeve 133a and a second connection sleeve 133b. The distal end of the first feedthrough electrode 131a and the proximal end of the first elastic electrode sheet 132a are both disposed within the first connection sleeve 133a and in contact to form a stable electrical connection. The distal end of the second feedthrough electrode 131b and the proximal end of the second elastic electrode sheet 132b are both disposed within the second connection sleeve 133b and in contact to form a stable electrical connection. By integrating the distal end of the first feedthrough electrode 131a and the proximal end of the first elastic electrode sheet 132a in the first connection sleeve 133a, and integrating the distal end of the second feedthrough electrode 131b and the proximal end of the second elastic electrode sheet 132b in the second connection sleeve 133b, the structure is compact, space can be saved, and the first feedthrough electrode 131a, the first elastic electrode sheet 132a, the second feedthrough electrode 131b, and the second elastic electrode sheet 132b can be respectively limited to prevent them from contacting each other.

[0118] As Figure 5 shown, in some embodiments of the present disclosure, both the first elastic electrode sheet 132a and the second elastic electrode sheet 132b are L-shaped. However, this is only exemplary, and those skilled in the art can understand that the first elastic electrode sheet 132a and the second elastic electrode sheet 132b can also be any other suitable shapes, such as N-shaped, etc.

[0119] As Figure 5As shown, in some embodiments of the present disclosure, the first heater electrode 126a may include a first heater electrode through-hole (not shown in the figure). A first elastic electrode sheet through-hole (not shown in the figure) is provided at the distal end of the first elastic electrode sheet 132a. For example, it may be provided on the short side of the L-shaped first elastic electrode sheet 132a. The second heater electrode 126b may include a second heater electrode through-hole (not shown in the figure). A second elastic electrode sheet through-hole (not shown in the figure) is provided at the distal end of the second elastic electrode sheet 132b. For example, it may be provided on the short side of the L-shaped second elastic electrode sheet 132b. The feedthrough 130 may further include a fastening assembly 134. The fastening assembly 134 may include a first screw 1341, a first nut 1342, a second screw, and a second nut (not shown in the figure). The first screw 1341 and the first nut 1342 are used to connect the first heater electrode 126a and the first elastic electrode sheet 132a through the first heater electrode through-hole and the first elastic electrode sheet through-hole. The second screw and the second nut are used to connect the second heater electrode 126b and the second elastic electrode sheet 132b through the second heater electrode through-hole and the second elastic electrode sheet through-hole.

[0120] As Figure 5 As shown, in some embodiments of the present disclosure, the fastening assembly 134 may further include a first flexible gasket 1343, a first arc-shaped gasket 1344, a first thin gasket 1345, a first butterfly gasket 1346, and a first flat gasket 1347. The first flexible gasket 1343 and the first arc-shaped gasket 1344 are sequentially disposed between the first screw 1341 and the first elastic electrode sheet 132a. The first thin gasket 1345, the first butterfly gasket 1346, and the first flat gasket 1347 are sequentially disposed between the first heater electrode 126a and the first nut 1342.

[0121] In some embodiments, one side of the first arc-shaped gasket 1344 may be arc-shaped and the other side may be flat. Among them, the arc-shaped side faces the first elastic electrode sheet 132. The first arc-shaped gasket 1344 can evenly distribute the pressure applied by the screw, reduce the pressure concentration of the first screw 1341 on the first elastic electrode sheet 132a, and make the first heater electrode 126a fit better with the first elastic electrode sheet 132a, reducing the micro-gap. A flexible gasket 1343 is arranged between the first arc-shaped gasket 1344 and the first elastic electrode sheet 132a, which can reduce the wear between the first arc-shaped gasket 1344 and the first elastic electrode sheet 132a and improve the connection stability between the first heater electrode 126a and the first elastic electrode sheet 132a. The first thin gasket 1345 is beneficial to increasing the contact area with the first heater electrode 126a. The first butterfly-shaped gasket 1346 has a certain self-locking ability, which can prevent the nut from loosening and improve the connection stability. The first flat gasket 1347 can disperse the pressure applied by the first nut 1342 to improve the stability between the first heater electrode 126a and the first elastic electrode sheet 132a.

[0122] As Figure 5 shown, in some embodiments, there are two first thin gaskets 1345, but this is only exemplary. The first thin gasket 1345 can also be one or multiple.

[0123] As Figure 5 shown, in some embodiments of the present disclosure, the fastening assembly 134 may further include a second flexible gasket, a second arc-shaped gasket, a second thin gasket, a second butterfly-shaped gasket and a second flat gasket (not shown in the figure). The second flexible gasket and the second arc-shaped gasket are sequentially arranged between the second screw and the second elastic electrode sheet 132b. The second thin gasket, the second butterfly-shaped gasket and the second flat gasket are sequentially arranged between the second heater electrode 126b and the second nut.

[0124] Those skilled in the art can understand that the second flexible gasket, the second arc-shaped gasket, the second thin gasket, the second butterfly-shaped gasket and the second flat gasket can respectively have the same structure as the first flexible gasket 1343, the first arc-shaped gasket 1344, the first thin gasket 1345, the first butterfly-shaped gasket 1346 and the first flat gasket 1347, and will not be elaborated here.

[0125] As Figure 1 and Figure 2As shown, in some embodiments of the present disclosure, the heating window 100 may further include an annular heat insulation sheet 140. The outer ring of the annular heat insulation sheet 140 abuts against the inner wall of the heater body 121. The inner ring of the annular heat insulation sheet 140 includes a recess (not shown in the figure), and the recess is adapted to the first protrusion 127 of the heater body 121. The annular heat insulation sheet 140 is sleeved on the first protrusion 127 through the recess. The annular heat insulation sheet 140 covers the front end face of the heater body 121 at one end of the first protrusion 127.

[0126] In some embodiments, the heat insulation sheet 140 is sleeved on the heater body 121 and blocks the front end face of the heater body 121, which can not only reduce the heat leakage at the end of the heater body 121, but also has the function of blocking the beam current.

[0127] As Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the heating window 100 may further include a heat insulation cylinder 150. The heat insulation cylinder 150 is sleeved (for example, coaxially sleeved) in the window body 110 and is used to accommodate the heater assembly 120.

[0128] In some embodiments, the heat insulation cylinder 150 may include multiple layers of tantalum cylinders. The heat insulation cylinder 150 is arranged between the window body 110 and the heater assembly 120, which not only provides heat insulation but also has the function of blocking the beam current.

[0129] As Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the heating window 100 may further include a retaining ring 160. The retaining ring 160 is installed in the card slot inside the window body 110. The retaining ring 160 can prevent the axial movement of the parts installed inside the window body 110.

[0130] Figure 6A Shows a perspective view of the assembled heating window 100 according to some embodiments of the present disclosure. Figure 6B Shows a front view of the assembled heating window 100 according to some embodiments of the present disclosure. Figure 6C Shows a side view of the assembled heating window 100 according to some embodiments of the present disclosure.

[0131] Figure 7 Shows a thermal simulation diagram of the heating window 100 according to some embodiments of the present disclosure.

[0132] As Figure 7 As shown, through the thermal simulation of the heating window 100, it can be seen that the heating uniformity of the light-transmitting plate 123 of the heating window 100 according to some embodiments of the present disclosure is good, and the maximum temperature difference is only about 12°C.

[0133] Figure 8Shows a graph of the temperature change of the heating window 100 over time according to some embodiments of the present disclosure.

[0134] The heating window 100 was actually measured. The heating window 100 was heated to 251 °C and maintained for 16 h. The temperature change during the heat preservation process is as Figure 8 shown. The temperature fluctuation range of the heating window 100 is 251.61 °C - 252.48 °C, and the temperature difference change range is 0.87 °C. It can be seen that the temperature of the heating window 100 according to some embodiments of the present disclosure is relatively stable during long-term continuous operation.

[0135] Figure 9 Shows a schematic structural diagram of a vacuum processing system 1000 according to some embodiments of the present disclosure.

[0136] As Figure 9 shown, in some embodiments of the present disclosure, the vacuum processing system 1000 may include a vacuum chamber 200, a heating window 100 according to any one of the embodiments of the present disclosure, and at least one evaporation source 400. The vacuum chamber 200 may include a window. The distal end of the window body 110 of the heating window 100 is vacuum-sealedly connected to the window. At least one evaporation source 400 is disposed in the vacuum chamber 200.

[0137] Figure 9 It is shown that the end of the heating window 100 close to the feedthrough 130 is connected to the vacuum chamber body, which is only exemplary. It is also possible to connect the end far from the feedthrough 130 to the vacuum chamber body. Those skilled in the art can install it according to actual requirements.

[0138] As Figure 9 shown, in some embodiments of the present disclosure, the vacuum processing system 1000 may further include an outer vacuum-sealed window 300. The outer vacuum-sealed window 300 is sealingly connected to the proximal end of the window body 110 of the heating window 100.

[0139] Figure 10 Shows a state diagram of the outer vacuum-sealed window 300 after the vacuum processing system 1000 according to some embodiments of the present disclosure is used.

[0140] As Figure 10 shown, experiments were carried out under the condition of reducing the heating power of the heater. Only a small amount of material was deposited on the edge of the light-transmitting plate 123 of the heating window 100, but no material was deposited on the outer vacuum-sealed window 300. It can be seen that the heating window 100 according to some embodiments of the present disclosure also has a good function of blocking the beam current.

[0141] It should be noted that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present disclosure shall be included within the protection scope of the present disclosure.

Claims

1. A heated window, characterized in that: include: a window body including a heater assembly receiving aperture; A heater assembly is disposed in the heater assembly receiving hole of the window body, wherein the heater assembly includes a heater body and a light-transmitting plate receiving hole; as well as A light-transmitting plate is arranged in the light-transmitting plate accommodating hole of the heater assembly, and the heater assembly is used to heat the light-transmitting plate.

2. The heated window according to claim 1, characterized in that: The heater body is provided with a plurality of slots spaced apart along the circumferential direction; The heater assembly further includes a plurality of clamps, which are respectively disposed in the plurality of clamping slots and are used to fix the light-transmitting plate.

3. The heated window according to claim 2, characterized in that: The heater assembly further includes a clamp, which circumferentially surrounds the outer wall of the heater body and is fixedly connected to the plurality of clamps.

4. The heated window according to claim 1, characterized in that: The window body further includes a feed-through hole communicating with the heater assembly receiving hole, The heating window further comprises a feedthrough connected to the feedthrough hole of the window body, wherein the feedthrough comprises a first feedthrough electrode and a second feedthrough electrode. The heater assembly further includes a first heater electrode and a second heater electrode, which are respectively connected to the first feed-through electrode and the second feed-through electrode to form a closed loop path.

5. The heated window according to claim 4, characterized in that: A first protrusion is provided at one end of the heater body, and the first heater electrode and the second heater electrode are provided on the first protrusion; and / or The other end of the heater body is provided with at least one second protrusion, and the window body includes at least one positioning groove, and the at least one second protrusion is accommodated in the at least one positioning groove to install and position the heater body and the window body.

6. The heated window according to claim 5, characterized in that: The heater body is a pyrolytic boron nitride (PBN)-pyrolytic graphite (PG)-PBN composite heater, and the pyrolytic boron nitride (PBN)-pyrolytic graphite (PG)-PBN composite heater includes: A PBN substrate, the PBN substrate comprising a hollow cavity to form the light-transmitting plate receiving hole; A PG coating is coated on the outer wall of the PBN substrate, wherein the PG coating is designed as a heating loop structure, and both ends of the loop are respectively connected to the first heater electrode and the second heater electrode; and a PBN coating is coated on the PG coating.

7. The heated window according to claim 4, characterized in that: The feedthrough further comprises: a first elastic electrode sheet, a distal end of which is connected to the first heater electrode and a proximal end of which is in contact with the first feed-through electrode; The second elastic electrode sheet has a distal end connected to the second heater electrode and a proximal end abutting against the second feed-through electrode.

8. The heated window according to claim 7, characterized in that: The feedthrough further comprises: a first connecting sleeve, wherein the distal end of the first feedthrough electrode and the proximal end of the first elastic electrode sheet are both disposed in the first connecting sleeve and in contact with each other to form a stable circuit connection; a second connecting sleeve, wherein the distal end of the second feedthrough electrode and the proximal end of the second elastic electrode sheet are both disposed in the second connecting sleeve and in contact with each other to form a stable circuit connection; and / or The first elastic electrode sheet and the second elastic electrode sheet are both L-shaped.

9. The heated window according to claim 7, characterized in that: The first heater electrode includes a first heater electrode through hole, and the distal end of the first elastic electrode sheet is provided with a first elastic electrode sheet through hole. The second heater electrode includes a second heater electrode through hole, and the distal end of the second elastic electrode sheet is provided with a second elastic electrode sheet through hole. The feedthrough further includes a fastening assembly, the fastening assembly comprising: a first screw and a first nut, used to connect the first heater electrode and the first elastic electrode sheet through the first heater electrode through hole and the first elastic electrode sheet through hole; and The second screw and the second nut are used to connect the second heater electrode and the second elastic electrode sheet through the second heater electrode through hole and the second elastic electrode sheet through hole.

10. The heated window according to claim 9, characterized in that: The fastening assembly further comprises: A first flexible gasket and a first arc-shaped gasket are sequentially arranged between the first screw and the first elastic electrode sheet; A first thin washer, a first butterfly washer and a first flat washer are sequentially arranged between the first heater electrode and the first nut; and / or A second flexible gasket and a second arc-shaped gasket are sequentially arranged between the second screw and the second elastic electrode sheet; A second thin washer, a second butterfly washer, and a second flat washer are sequentially arranged between the second heater electrode and the second nut.

11. The heated window according to claim 5, characterized in that: Also includes: an annular heat insulating sheet, the outer ring of which abuts against the inner wall of the heater body, the inner ring of which includes a recessed portion, the recessed portion is adapted to the first protrusion of the heater body and is sleeved on the first protrusion, and the annular heat insulating sheet covers the front end surface of the heater body located at one end of the first protrusion; and / or an insulating cylinder, sleeved in the window body and used to accommodate the heater assembly; and / or The retaining ring is installed in the card slot inside the window body.

12. A vacuum processing system, characterized in that: include: a vacuum chamber, including a window; The heated window according to any one of claims 1 to 11, wherein the distal end of the window body of the heated window is vacuum-sealed to the window; at least one evaporation source disposed in the vacuum chamber; and / or The outer vacuum sealing window is sealingly connected to the proximal end of the window body of the heating window.

Images