Split type gas inlet pipe for CVD (Chemical Vapor Deposition) furnace

Abstract

The utility model relates to the technical field of CVD (Chemical Vapor Deposition) furnaces, and discloses a split type gas inlet pipe for a CVD furnace, which is characterized in that a first fixing ring is sleeved on the outer side of a gas inlet pipe main body, two first connecting bolts penetrate through the upper side and the lower side of the first fixing ring, and two first arc-shaped plates are movably connected to one ends of the two first connecting bolts respectively; a second fixing ring is mounted on one side of the first fixing ring, second connecting bolts are movably connected to the upper side and the lower side of the second fixing ring, and a second arc-shaped plate is movably connected to one end of each second connecting bolt; by rotating the first connecting bolt and the second connecting bolt in the forward direction, the first connecting bolt and the second connecting bolt drive one end of the first arc-shaped plate and one end of the second arc-shaped plate to abut against the outer side of the air inlet pipe body and the outer side of the air inlet inner pipe respectively, and then centering fixing of the air inlet inner pipe can be completed; and the air inlet pipe main body and the air inlet inner pipe with different pipe diameters can be fixed, so that the air inlet pipe is convenient to use.

Description

Technical Field

[0001] The utility model relates to the technical field of CVD furnaces, in particular to a split air inlet pipe for a CVD furnace. Background Art

[0002] Chemical vapor deposition (CVD) refers to a method in which chemical gases or vapors react on the surface of a substrate to synthesize coatings or nanomaterials. It is the most widely used technology in the semiconductor industry for depositing a variety of materials, including a wide range of insulating materials, most metal materials and metal alloy materials.

[0003] In the patent with the authorization announcement number CN213203193U, a split air intake pipe for a CVD furnace is disclosed, which is connected to the air intake pipe body through its inner pipe through a quick vacuum flange, the quick vacuum flange is sealed with a polytetrafluoroethylene sealing ring, and the quick vacuum flange and the sealing ring are fixed with a clamp. This structure is convenient for assembling and disassembling the air intake pipe while ensuring the air tightness of the air intake pipe, and is convenient for cleaning the inner and outer pipes of the air intake pipe, thereby improving the cleaning efficiency of the air intake pipe, ensuring the cleanliness of the inside of the air intake pipe, and improving the stability of product quality. At the same time, the inner pipe is fixed to the lower end of the air intake pipe body by an equidistant three-claw fixing ring. This arrangement facilitates the inner pipe 1 to be centrally arranged inside the air intake pipe body 8.

[0004] The above-mentioned prior art solutions have the following defects: although the above-mentioned patent can fix the inner tube by an equidistant three-claw fixing ring, for inner tubes of different diameters, a new equidistant three-claw fixing ring needs to be replaced, which makes the split air inlet pipe inconvenient to use. For this reason, a split air inlet pipe for a CVD furnace is proposed. Utility Model Content

[0005] The utility model aims to provide a split air inlet pipe for a CVD furnace to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a split air intake pipe for a CVD furnace, comprising an air intake pipe body, an air intake inner pipe is installed inside the air intake pipe body, an air intake outer pipe is arranged outside the air intake pipe body, and a centering component is arranged at one end of the air intake pipe body;

[0007] The centering component includes a first fixing ring, two first connecting bolts, and two first arc-shaped plates. The first fixing ring is sleeved on the outer side of the main air inlet pipe. The two first connecting bolts penetrate through the upper and lower sides of the first fixing ring. The two first arc-shaped plates are respectively movably connected to one end of the two first connecting bolts. A second fixing ring is installed on one side of the first fixing ring. The upper and lower sides of the second fixing ring are both movably connected with second connecting bolts. One end of the second connecting bolt is movably connected with a second arc-shaped plate.

[0008] Preferably, two convex blocks are fixedly connected to the outer side of the first fixing ring. One side of each of the two convex blocks is fixedly connected with a connecting rod. Two connecting blocks are fixedly connected to the outer side of the second fixing ring. The connecting blocks are fixedly connected to the other end of the connecting rod.

[0009] Preferably, the first connecting bolt and the second connecting bolt are respectively threadedly connected to the inside of the first fixing ring and the second fixing ring.

[0010] Preferably, the first arc-shaped plate abuts against the outer side of the main air inlet pipe, and the second arc-shaped plate abuts against the outer side of the inner air inlet pipe.

[0011] Preferably, a vacuum flange is connected between the other end of the main air inlet pipe and the inner air inlet pipe. A clamp is arranged on the outer side of the vacuum flange.

[0012] Preferably, connection heads are installed at one ends of the inner air inlet pipe and the outer air inlet pipe.

[0013] Compared with the prior art, the present utility model adopts the above technical solutions and has the following technical effects: By rotating the first connecting bolt and the second connecting bolt forward, the first connecting bolt and the second connecting bolt respectively drive one end of the first arc-shaped plate and the second arc-shaped plate to respectively abut against the outer sides of the main air inlet pipe and the inner air inlet pipe, so as to complete the centering fixation of the inner air inlet pipe, and it can fix the main air inlet pipe and the inner air inlet pipe with different pipe diameters, thereby facilitating the use of the air inlet pipe. Description of the Drawings

[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0015] Figure 1 It is a schematic structural diagram of the present utility model;

[0016] Figure 2 Schematic diagram of the main structure of the intake pipe of the present utility model;

[0017] Figure 3 Of the present utility model Figure 2 Enlarged schematic diagram of area A in;

[0018] Figure 4 Schematic diagram of the clamp structure of the present utility model;

[0019] Figure 5 Schematic diagram of the inner intake pipe structure of the present utility model.

[0020] Explanation of reference numerals in the drawings: 1. Main body of the intake pipe; 2. Inner intake pipe; 3. Outer intake pipe; 4. First fixing ring; 5. First connecting bolt; 6. First arc-shaped plate; 7. Convex block; 8. Connecting rod; 9. Connecting block; 10. Second fixing ring; 11. Second connecting bolt; 12. Second arc-shaped plate; 13. Connecting head; 14. Vacuum flange; 15. Clamp. Specific implementation manners

[0021] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0022] It should be noted that the structures, ratios, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those who are familiar with this technology to understand and read, and are not used to limit the limited conditions that can be implemented in this application. Therefore, they do not have technical substance significance. Any modification of the structure, change of the proportional relationship, or adjustment of the size, without affecting the effects that can be produced by this application and the purposes that can be achieved, should still fall within the scope that can be covered by the technical content disclosed in this application.

[0023] Embodiment

[0024] Please refer to Figures 1-5 , the present utility model provides a technical solution: a split intake pipe for a CVD furnace, including a main body 1 of the intake pipe, an inner intake pipe 2 is installed inside the main body 1 of the intake pipe, an outer intake pipe 3 is arranged outside the main body 1 of the intake pipe, and a centering assembly is arranged at one end of the main body 1 of the intake pipe.

[0025] By setting the centering component, the air inlet pipe main body 1 and the inner air inlet pipe 2 with different pipe diameters can be fixed, thus facilitating the use of the air inlet pipe; the centering component includes a first fixing ring 4, two first connecting bolts 5 and two first arc-shaped plates 6. The first fixing ring 4 is sleeved on the outer side of the air inlet pipe main body 1. The two first connecting bolts 5 penetrate through the upper and lower sides of the first fixing ring 4. One ends of the two first arc-shaped plates 6 are respectively movably connected to the two first connecting bolts 5. A second fixing ring 10 is installed on one side of the first fixing ring 4. Both the upper and lower sides of the second fixing ring 10 are movably connected with second connecting bolts 11. One end of the second connecting bolt 11 is movably connected with a second arc-shaped plate 12. The first arc-shaped plate 6 abuts against the outer side of the air inlet pipe main body 1, and the second arc-shaped plate 12 abuts against the outer side of the inner air inlet pipe 2. By rotating the first connecting bolt 5 and the second connecting bolt 11 forward, the first connecting bolt 5 and the second connecting bolt 11 respectively drive one ends of the first arc-shaped plate 6 and the second arc-shaped plate 12 to respectively abut against the outer sides of the air inlet pipe main body 1 and the inner air inlet pipe 2, and the centering and fixing of the inner air inlet pipe 2 can be completed.

[0026] In order to ensure that the inner air inlet pipe 2 is centered inside the air inlet pipe main body 1, two convex blocks 7 are fixedly connected to the outer side of the first fixing ring 4. One side of each of the two convex blocks 7 is fixedly connected with a connecting rod 8. Two connecting blocks 9 are fixedly connected to the outer side of the second fixing ring 10. The connecting blocks 9 are fixedly connected to the other ends of the connecting rods 8. The first fixing ring 4 and the second fixing ring 10 are connected through the connecting rods 8 to ensure the centered placement of the inner air inlet pipe 2. The first connecting bolt 5 and the second connecting bolt 11 are respectively threadedly connected to the inside of the first fixing ring 4 and the second fixing ring 10. When it is necessary to fix the inner air inlet pipe 2 inside the air inlet pipe main body 1 with different pipe diameters, by rotating the first connecting bolt 5 and the second connecting bolt 11 in the reverse direction, the first connecting bolt 5 and the second connecting bolt 11 respectively drive the first arc-shaped plate 6 and the second arc-shaped plate 12 to abut against the inner sides of the first fixing ring 4 and the second fixing ring 10, and then the first fixing ring 4 is sleeved on the outer side of the air inlet pipe main body 1, and at the same time the second fixing ring 10 is sleeved on the outer side of the inner air inlet pipe 2, which is convenient for subsequent fixing of the inner air inlet pipe 2.

[0027] A vacuum flange 14 is connected between the other end of the air inlet pipe main body 1 and the inner air inlet pipe 2. A sealing ring is arranged inside the vacuum flange 14, which can ensure the sealing effect between the air inlet pipe main body 1 and the inner air inlet pipe 2. A clamp 15 is arranged on the outer side of the vacuum flange 14. The clamp 15 wraps around the outer side of the vacuum flange 14, which can complete the fixed connection of the vacuum flange 14. Connecting heads 13 are installed at one ends of the inner air inlet pipe 2 and the outer air inlet pipe 3. The connecting heads 13 can facilitate the connection of the pipes.

[0028] Working principle or structural principle. When it is necessary to fix the intake inner pipe 2 inside the intake pipe main body 1 with different pipe diameters, by reversely rotating the first connecting bolt 5 and the second connecting bolt 11, the first connecting bolt 5 and the second connecting bolt 11 respectively drive the first arc-shaped plate 6 and the second arc-shaped plate 12 to abut against the inner sides of the first fixing ring 4 and the second fixing ring 10. Then, the first fixing ring 4 is sleeved on the outer side of the intake pipe main body 1, and at the same time, the second fixing ring 10 is sleeved on the outer side of the intake inner pipe 2. Then, the first connecting bolt 5 and the second connecting bolt 11 are rotated forward, so that one ends of the first connecting bolt 5 and the second connecting bolt 11 respectively drive the first arc-shaped plate 6 and the second arc-shaped plate 12 to abut against the outer sides of the intake pipe main body 1 and the intake inner pipe 2, and the centering fixation of the intake inner pipe 2 can be completed. Moreover, the intake pipe main body 1 and the intake inner pipe 2 with different pipe diameters can be fixed, thus facilitating the use of the intake pipe.

[0029] Those skilled in the art can understand that the features recited in the various embodiments and / or claims of the present invention can be combined or combined in various ways, even if such combinations or combinations are not explicitly recited in the present invention. In particular, without departing from the spirit and teachings of the present invention, the features recited in the various embodiments and / or claims of the present invention can be combined and combined in various ways. All such combinations and / or combinations fall within the scope of the present invention.

Claims

1. A split air inlet pipe for a CVD furnace, comprising an air inlet pipe body (1), characterized in that: An inner air intake pipe (2) is installed inside the air intake pipe body (1), an outer air intake pipe (3) is arranged outside the air intake pipe body (1), and a centering component is arranged at one end of the air intake pipe body (1); The centering component comprises a first fixing ring (4), two first connecting bolts (5) and two first arc-shaped plates (6); the first fixing ring (4) is sleeved on the outer side of the intake pipe body (1); the two first connecting bolts (5) penetrate the upper and lower sides of the first fixing ring (4); the two first arc-shaped plates (6) are respectively movably connected to one end of the two first connecting bolts (5); a second fixing ring (10) is installed on one side of the first fixing ring (4); the upper and lower sides of the second fixing ring (10) are movably connected to the second connecting bolts (11); and one end of the second connecting bolt (11) is movably connected to the second arc-shaped plate (12).

2. The split air inlet pipe for a CVD furnace according to claim 1, characterized in that: Two protrusions (7) are fixedly connected to the outer side of the first fixing ring (4), and one side of each of the two protrusions (7) is fixedly connected to a connecting rod (8). Two connecting blocks (9) are fixedly connected to the outer side of the second fixing ring (10), and the connecting block (9) is fixedly connected to the other end of the connecting rod (8).

3. The split air inlet pipe for a CVD furnace according to claim 1, characterized in that: The first connecting bolt (5) and the second connecting bolt (11) are respectively connected to the inside of the first fixing ring (4) and the second fixing ring (10) through threads.

4. The split air inlet pipe for a CVD furnace according to claim 1, characterized in that: The first arc-shaped plate (6) contacts the outer side of the air intake pipe body (1), and the second arc-shaped plate (12) contacts the outer side of the air intake inner pipe (2).

5. The split air inlet pipe for a CVD furnace according to claim 1, characterized in that: A vacuum flange (14) is connected between the other end of the air intake pipe body (1) and the air intake inner pipe (2), and a clamp (15) is arranged on the outside of the vacuum flange (14).

6. The split air inlet pipe for a CVD furnace according to claim 1, characterized in that: One end of the inner air intake pipe (2) and the outer air intake pipe (3) are both equipped with a connector (13).

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