Positioning device for auxiliary chamber of single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace auxiliary chamber positioning device which comprises a positioning base positioned on the outer wall of an auxiliary chamber, a positioning sleeve fixedly arranged below the positioning base, and a positioning rod with one end positioned on an isolating valve and the other end sequentially penetrating through the positioning sleeve and the positioning base, according to the positioning device, the positioning base and the positioning sleeve are fixedly arranged on the outer wall of the auxiliary chamber, and the positioning rod is fixedly arranged on the isolating valve, so that the occupied area of the positioning device is reduced; the positioning device is mainly composed of the positioning base, the positioning rod and the positioning sleeve, the structure is simple, the installation cost is low, and wide application and popularization are facilitated; and the positioning rod is fixedly arranged on the isolating valve, so that the auxiliary chamber does not impact the positioning rod in the centering process, the stable working state of the positioning rod is ensured, and the service life of the positioning rod is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a positioning device for the auxiliary chamber of a single crystal furnace. Background Art

[0002] In a single crystal furnace, recharging is a key production process, which specifically refers to the operation of adding silicon materials into the single crystal furnace (main chamber) multiple times through the auxiliary chamber to meet the production requirements during the production process of a single crystal rod; during the recharging process, first, the bottom opening of the auxiliary chamber needs to be centered with the top opening of the main chamber. After centering, the precise positioning of the auxiliary chamber and the main chamber is achieved through a positioning device. Finally, the auxiliary chamber is placed above the main chamber through an isolation valve, and the feeding cylinder in the auxiliary chamber precisely feeds the single crystal furnace (main chamber).

[0003] A positioning device disclosed in the prior art mainly includes several parts such as a column, a positioning rod, a semi-lunar plate, and a clamping plate; among them, the column is a columnar body fixed on the ground and with a length greater than the length of the auxiliary chamber, on which a positioning rod is fixedly arranged, and the positioning rod extends along the axial direction of the column; the clamping plate is arranged on the outer wall of the auxiliary chamber and extends along the axial direction of the auxiliary chamber, and an arc-shaped semi-lunar plate adapted to the positioning rod is fixedly arranged on the clamping plate; the auxiliary chamber is centered with the main chamber under the action of a moving device. After centering, the semi-lunar plate arranged on the outer wall of the auxiliary chamber in the circumferential direction contacts the positioning rod, and the semi-lunar plate moves downward along the positioning rod as the auxiliary chamber descends, and the positioning of the auxiliary chamber and the main chamber is achieved through the mutual cooperation of the semi-lunar plate and the positioning rod.

[0004] Although the above positioning device can also achieve the positioning operation, it is found in actual operation that during the centering process of the auxiliary chamber and the main chamber, there will be an impact action between the auxiliary chamber and the positioning device. Over time, the positioning rod will be worn or deformed, resulting in inaccurate positioning or inability to achieve positioning. Moreover, this positioning device occupies a large area and has a high installation cost, which is not conducive to wide promotion and use. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a positioning device for the auxiliary chamber of a single crystal furnace to solve the problems raised in the above background art.

[0006] The technical solution adopted by the utility model is as follows:

[0007] A positioning device for the auxiliary chamber of a single crystal furnace includes: a positioning base located on the outer wall of the auxiliary chamber, a positioning sleeve fixedly arranged below the positioning base, and a positioning rod with one end located on the isolation valve and the other end sequentially passing through the positioning sleeve and the positioning base;

[0008] Among them,

[0009] The positioning rod includes:

[0010] A buffer part, on which a coating is covered;

[0011] A guiding part, fixedly arranged below the buffer part, and its outer surface is covered with a coating;

[0012] An equidistant extension part, fixedly arranged below the guiding part;

[0013] A fixing part, arranged below the equidistant extension part and fixedly connected to the isolation valve;

[0014] The positioning sleeve includes:

[0015] A first sleeve, penetrating through the positioning base and located below the positioning base;

[0016] A second sleeve, fixedly arranged below the first sleeve and fixedly connected to the positioning base. The inner hollow shape of the second sleeve is adapted to the guiding part.

[0017] Optionally, the outer diameter of the first sleeve is smaller than the outer diameter of the second sleeve.

[0018] Optionally, the inside of the first sleeve is a cylindrical hollow shape, and a part of the positioning rod penetrates through it.

[0019] Optionally, the inside of the second sleeve is a conical hollow shape, and a part of the positioning rod penetrates through it.

[0020] Optionally, the positioning base includes:

[0021] A vertical part, fixed on the outer wall of the auxiliary chamber;

[0022] A horizontal part, fixedly arranged on one end face of the vertical part.

[0023] Optionally, the vertical part is plate-shaped or block-shaped or an arc shape adapted to the outer wall of the auxiliary chamber.

[0024] Optionally, the guiding part is a cone.

[0025] Optionally, the fixing part is a plate-like structure.

[0026] Optionally, the buffer part is a hemispherical shape.

[0027] Optionally, it further includes a support plate, detachably arranged on the outer wall of the isolation valve, and having a socket hole thereon;

[0028] The fixing part of the positioning rod is inserted into the socket hole.

[0029] Compared with the prior art, the beneficial effects of the present utility model are:

[0030] In the present utility model, the positioning base and the positioning sleeve are fixedly arranged on the outer wall of the auxiliary chamber, and the positioning rod is fixedly arranged on the isolation valve, so as to reduce the occupied area of the positioning device; and the positioning device is mainly composed of a positioning base, a positioning rod and a positioning sleeve, with a simple structure and low installation cost, which is conducive to wide promotion and use; furthermore, the positioning rod is fixedly arranged on the isolation valve, and the positioning rod will not be impacted during the centering process of the auxiliary chamber, ensuring the stable working state of the positioning rod and prolonging the service life of the positioning rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0032] Figure 1 Structural schematic diagram of the positioning rod in the present application;

[0033] Figure 2 Structural schematic diagram of the positioning sleeve in the present application;

[0034] Figure 3 Cross-sectional structural schematic diagram of the positioning sleeve in the present application;

[0035] Figure 4 Structural schematic diagram of the positioning base in the present application;

[0036] Figure 5 Structural schematic diagram of the embodiment in the present application;

[0037] Figure 6 Enlarged view of the structure at A in the present application;

[0038] Figure 7 Structural schematic diagram of the implementation object in the present application.

[0039] Reference numerals:

[0040] 1. Positioning base; 11. Vertical part; 110. Threaded hole; 12. Horizontal part; 120. Through hole; 121. Threaded hole;

[0041] 2. Positioning rod; 21. Buffer part; 22. Guide part; 23. Equally spaced extension part; 24. Fixed part;

[0042] 3. Positioning sleeve; 31. First sleeve; 32. Second sleeve; 320. Threaded hole;

[0043] 4. Support plate; 5. Auxiliary chamber; 6. Isolation valve; 7. Main chamber. Detailed implementation manners

[0044] In the following text, only some exemplary embodiments are simply described. As can be recognized by those skilled in the art, the described embodiments can be modified in various different ways without departing from the spirit or scope of the present invention. Therefore, the drawings and the description are considered to be exemplary in nature rather than restrictive.

[0045] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the products of the present invention are usually placed during use, or the orientation or positional relationship commonly understood by those skilled in the art. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0046] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, the meaning of "a plurality" is two or more unless otherwise specifically defined.

[0047] The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention. In addition, the present invention may repeat reference numerals and / or reference letters in different examples. This repetition is for the purpose of simplification and clarity and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides examples of various specific processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0048] The embodiments of the present invention will be described in detail below with reference to the drawings.

[0049] In this embodiment, the devices that need to achieve precise positioning are the secondary chamber 5 and the main chamber 7 in the single crystal furnace, as Figure 7As shown in the figure, the auxiliary chamber 5 is located above the main chamber 7. The auxiliary chamber 5 can move back and forth under the action of a moving device. The main chamber 7 is placed on the ground, and an isolation valve 6 is provided at the top opening of the main chamber 7. The connection or disconnection between the main chamber 7 and the auxiliary chamber 5 is realized by controlling the isolation valve 6. Therefore, in this embodiment, the positioning between the auxiliary chamber 5 and the isolation valve 6 is realized through a positioning device. Combining with the positional relationship between the main chamber 7 and the isolation valve 6, the precise positioning between the auxiliary chamber 5 and the main chamber 7 is indirectly realized.

[0050] An embodiment of the utility model provides a positioning device for the auxiliary chamber of a single crystal furnace, including: a positioning base 1, a positioning rod 2, a positioning sleeve 3 and other parts.

[0051] Among them, the positioning base 1 is fixedly arranged on the outer wall of the auxiliary chamber 5, the positioning sleeve 3 is fixedly arranged below the positioning base 1, one end of the positioning rod 2 is fixed on the isolation valve 6, and the other end sequentially penetrates through the positioning sleeve 3 and the positioning base 1. The positioning between the auxiliary chamber 5 and the isolation valve 6 is realized through the mutual cooperation of the positioning rod 2 with the positioning base 1 and the positioning sleeve 3, and further the precise positioning between the auxiliary chamber 5 and the main chamber 7 is realized.

[0052] Specifically, this embodiment shows a structure of the positioning rod 2. As Figure 1 shown, the positioning rod 2 coaxially includes a buffer part 21, a guiding part 22, an equidistant extension part 23 and a fixing part 24 from top to bottom in sequence. Among them, the buffer part 21 is in the shape of a hemisphere, and a high-hardness wear-resistant coating (not shown in the figure) is covered on it; during the process of the positioning rod 2 penetrating through the positioning sleeve 3, it mainly plays a buffering role between the positioning rod 2 and the positioning sleeve 3, reducing the wear of the positioning sleeve 3 and the positioning rod 2 on each other, and improving the service life of the positioning sleeve 3 and the positioning rod 2. The outer surface of the guiding part 22 is covered with a high-hardness wear-resistant coating (not shown in the figure), and the guiding part 22 mainly plays a guiding role for the auxiliary chamber 5, so that the auxiliary chamber 5 moves along the established direction of the guiding part 22 during the descending process. Preferably, the guiding part 22 is a cone, having a small head end and a large head end, the small head end corresponds to the buffer part 21, and the large head end corresponds to the equidistant extension part 23. The equidistant extension part 23 is a columnar body, mainly playing a positioning role for the auxiliary chamber 5. The fixing part 24 is a plate-like structure fixed on the isolation valve 6; the plate-like fixing part 24 increases the contact area between the fixing part 24 and the isolation valve 6, and improves the stability of the positioning rod 2.

[0053] Figures 2 - 3 shows a structure of the positioning sleeve 3. The positioning sleeve 3 includes a first sleeve 31 and a second sleeve 32 integrally formed with the first sleeve 31, and the outer diameter of the first sleeve 31 is smaller than the outer diameter of the second sleeve 32. As Figure 3As shown, the interior of the first sleeve 31 is a cylindrical hollow shape, allowing the positioning rod 2 to pass through smoothly and stably; the interior of the second sleeve 32 is a conical hollow shape. The positioning rod 2 sequentially passes through the second sleeve 32 and the first sleeve 31. Finally, the equally spaced extension portion 23 of the positioning rod 2 fits against the inner wall of the first sleeve 31. On one end face of the second sleeve 32, that is, around the first sleeve 31, a plurality of threaded holes 320 are provided.

[0054] Figure 4 Fig. shows a specific structure of a positioning base 1. The positioning base 1 is generally in an "L" shape and is composed of a vertical portion 11 and a horizontal portion 12. Among them, a plurality of threaded holes 110 are penetrated through the vertical portion 11, and bolts are arranged inside the threads. The vertical portion 11 is fixed to the outer wall of the auxiliary chamber 5 through the bolts. The vertical portion 11 can be in a plate shape, a block shape, or an arc shape adapted to the outer wall of the auxiliary chamber 5. The horizontal portion 12 is fixedly arranged on one end face of the vertical portion 11, and can be integrally formed or fixed by bolts. A through hole 120 is penetrated through the horizontal portion 12, and the diameter of the through hole 120 is slightly larger than the outer diameter of the first sleeve 31. The first sleeve 31 is placed inside the through hole 120. Placing the first sleeve 31 inside the through hole 120 greatly reduces the wear of the positioning base 1 on the positioning rod 2. On the horizontal portion 12, that is, around the through hole 120, a plurality of threaded holes 121 are penetrated through. The threaded holes 121 correspond to the threaded holes 320 provided on the second sleeve 32, and bolts are arranged inside the threaded holes 121. The horizontal portion 12 and the second sleeve 32 are fixedly connected through the bolts. In this embodiment, the vertical portion 11 is in a plate shape, and the plate-shaped vertical portion 11 increases the contact area between the vertical portion 11 and the outer wall of the auxiliary chamber 5, ensuring the stability of the positioning base 1. Of course, if it is necessary to further improve the stability of the positioning base 1, the vertical portion 11 can also be designed as an arc shape adapted to the outer wall of the auxiliary chamber 5.

[0055] During specific operation, as Figures 5 - 6 shown, first, the centering operation between the auxiliary chamber 5 and the isolation valve 6 (main chamber 7) is completed above the isolation valve 6 (main chamber 7). Subsequently, the auxiliary chamber 5 moves downward with the assistance of the moving device. During the moving process, the positioning rod 2 gradually contacts the positioning sleeve 3. The auxiliary chamber 5 continues to move downward until the positioning rod 2 completely penetrates the positioning sleeve 3 and the positioning base 1, completing the positioning between the auxiliary chamber 5 and the isolation valve 6, and indirectly realizing the positioning between the auxiliary chamber 5 and the main chamber 7.

[0056] In order to further improve the stability between the fixing portion 24 of the positioning rod 2 and the isolation valve 6, a support plate 4 can also be detachably arranged on the outer wall of the isolation valve 6. The support plate 4 has a socket hole, and the fixing portion 24 of the positioning rod 2 is inserted into the socket hole.

[0057] Finally, it should be noted that the above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A single crystal furnace auxiliary chamber positioning device, characterized in that: include: A positioning base located on the outer wall of the auxiliary chamber, a positioning sleeve fixedly arranged below the positioning base, and a positioning rod with one end located on the isolation valve and the other end passing through the positioning sleeve and the positioning base in sequence; wherein the positioning rod comprises: a buffer portion, which is covered with a coating; a guide portion, which is fixedly arranged below the buffer portion and whose outer surface is covered with a coating; an equidistant extension portion, which is fixedly arranged below the guide portion; a fixing portion, which is arranged below the equidistant extension portion and is fixedly connected to the isolation valve; the positioning sleeve comprises: a first sleeve, which passes through the positioning base and is located below the positioning base; a second sleeve, which is fixedly arranged below the first sleeve and is fixedly connected to the positioning base, and the hollow shape inside the second sleeve is adapted to the guide portion.

2. The single crystal furnace auxiliary chamber positioning device according to claim 1, characterized in that: The outer diameter of the first sleeve is smaller than the outer diameter of the second sleeve.

3. The single crystal furnace auxiliary chamber positioning device according to claim 2, characterized in that: The interior of the first sleeve is cylindrical and hollow, and a portion of the positioning rod passes through it.

4. The single crystal furnace auxiliary chamber positioning device according to claim 2, characterized in that: The interior of the second sleeve is conical and hollow, and a portion of the positioning rod passes through it.

5. The single crystal furnace auxiliary chamber positioning device according to claim 1, characterized in that: The positioning base comprises: a vertical portion fixed on the outer wall of the auxiliary chamber; and a horizontal portion fixedly arranged on one end surface of the vertical portion.

6. The single crystal furnace auxiliary chamber positioning device according to claim 5, characterized in that: The vertical portion is in a plate shape, a block shape, or an arc shape that matches the outer wall of the auxiliary chamber.

7. The single crystal furnace auxiliary chamber positioning device according to claim 1, characterized in that: The guide portion is a cone.

8. The single crystal furnace auxiliary chamber positioning device according to claim 1, characterized in that: The fixing portion is a plate-shaped structure.

9. The single crystal furnace auxiliary chamber positioning device according to claim 1, characterized in that: The buffer portion is in a hemispherical shape.

10. The single crystal furnace auxiliary chamber positioning device according to claim 1, characterized in that: Also includes: A support plate is detachably arranged on the outer wall of the isolation valve and is provided with a plug hole; the fixing portion of the positioning rod is plugged into the plug hole.

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