Vacuum chamber

Abstract

The vacuum cabin comprises a cabin body, a cabin door and a driving mechanism, the cabin body is provided with a containing space and an opening, and the containing space is communicated with the opening; the cabin door is installed on the cabin body in a sliding mode, and the cabin door is provided with a first position sliding to cover the opening and a second position sliding to completely avoid the opening; the driving mechanism is installed on the cabin body and connected with the cabin door, and the driving mechanism drives the cabin door to reciprocate in the first direction so as to be switched between the first position and the second position. The problem that the trafficability of the vacuum chamber is poor is solved.

Description

Technical Field

[0001] This application relates to the technical field of protection of vacuum chambers, and more particularly, to a vacuum chamber. Background Art

[0002] Existing vacuum chambers are all provided with a hatch door and a chamber body. The hatch door is usually connected to one side of the chamber body in a hinged form, and the hatch door rotates around the hinge. When opening the hatch door, the hatch door cannot completely leave the chamber body, so that the rotation and degree of opening of the hatch door are limited, the opening degree of the hatch door is small, and the passability of the hatch door is poor. Equipment with a large volume cannot enter the chamber body through the hatch door opening. Utility Model Content

[0003] The main object of this application is to provide a vacuum chamber to solve the problem of poor passability of the vacuum chamber mentioned in the background art.

[0004] According to one aspect of this application, a vacuum chamber is provided, including:

[0005] A chamber body having an accommodation space and an opening, the accommodation space being in communication with the opening;

[0006] A hatch door slidably mounted on the chamber body, the hatch door having a first position where it slides to cover the opening and a second position where it slides to completely avoid the opening;

[0007] A driving mechanism mounted on the chamber body, the driving mechanism being connected to the hatch door, and the driving mechanism driving the hatch door to reciprocate in a first direction to switch between the first position and the second position.

[0008] Further, the driving mechanism includes:

[0009] A telescopic member mounted on the chamber body, the telescopic member being fixedly connected to the hatch door, and the telescopic member reciprocatingly telescoping in a first direction to drive the hatch door to switch between the first position and the second position.

[0010] Further, the telescopic member includes a telescopic cylinder, and the telescopic cylinder includes:

[0011] A cylinder body fixedly mounted on the chamber body;

[0012] A first piston rod, one end of the first piston rod being connected to the cylinder body and telescoping relative to the cylinder body in the first direction, and the other end of the first piston rod being connected to the hatch door.

[0013] Further, the first piston rod is connected to the hatch through a first connecting plate and a second connecting plate. The first connecting plate is connected to the first piston rod, the second connecting plate is connected to the hatch, the first connecting plate and the second connecting plate are connected by a fastener, and a buffer is provided between the fastener and the second connecting plate.

[0014] Further, a slide rail is also provided on the cabin body. The slide rail extends along a first direction, and a slider cooperating with the slide rail is provided on the hatch. A buffer is provided between the slider and the hatch.

[0015] Further, the buffer is an elastic member.

[0016] Further, an annular outer flange is provided on the outer periphery of the opening. The vacuum chamber includes:

[0017] A first clamping cylinder, which is located on opposite sides of the hatch along a second direction. The piston rod of the first clamping cylinder extends along the thickness direction of the hatch. A chuck is provided on the piston rod of the first clamping cylinder. One end of the chuck is fixed on the piston rod of the first clamping cylinder and extends a predetermined length along the radial direction of the piston rod of the first clamping cylinder. The chuck abuts against the annular outer flange under the drive of the first clamping cylinder.

[0018] Further, the vacuum chamber further includes:

[0019] A second clamping cylinder, which is located on opposite sides of the hatch along a first direction. The piston rod of the second clamping cylinder extends along the thickness direction of the hatch. The second clamping cylinder includes a rotating chuck for avoiding the hatch. One end of the rotating chuck is fixed on the piston rod of the second clamping cylinder and extends a predetermined length along the radial direction of the piston rod of the second clamping cylinder. When the hatch is in a first position, the rotating chuck rotates under the drive of the second clamping cylinder and makes the hatch abut tightly against the cabin body.

[0020] Further, a sealing ring is provided between the cabin body and the hatch, and the sealing ring surrounds the outer periphery of the opening.

[0021] Further, at least one of the cabin body and the hatch is provided with a sealing groove, the sealing ring is located in the sealing groove, and the vacuum chamber further includes a pressure sensor provided between the sealing ring and the sealing groove.

[0022] In this application, the hatch is slidably mounted on the cabin body, enabling the hatch to slide and cover the opening to ensure good sealing of the vacuum chamber and ensuring that the internal system inside the cabin body is in a vacuum state. The hatch being slidably mounted on the cabin body can also enable the hatch to slide completely away from the opening, increasing the opening degree of the hatch to ensure good passability of the vacuum chamber. Larger equipment can smoothly pass through the opening and enter the cabin body. Additionally, compared with the prior art where the hatch is mounted on the cabin body by means of hinge, when opening or closing the hatch, the hatch rotates around the hinge point and the hatch needs to occupy additional space for rotation. In this application, the hatch slides closely against the cabin body and the hatch does not need to occupy additional space, saving more usage space of the vacuum chamber and being conducive to improving the efficient utilization rate of space. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings described herein are used to provide a further understanding of the present application and form a part of the present application. The schematic embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation to the present application. In the drawings:

[0024] Figure 1 is a schematic structural diagram (one) of the vacuum chamber disclosed in the present application;

[0025] Figure 2 is a schematic structural diagram (two) of the vacuum chamber disclosed in the present application;

[0026] Figure 3 is a side view of the vacuum chamber disclosed in the present application;

[0027] Figure 4 is Figure 3 an enlarged view of the Q position in;

[0028] Figure 5 is a top view of the vacuum chamber disclosed in the present application;

[0029] Figure 6 in Figure 4 is a schematic diagram of the A-A cross-section in;

[0030] Figure 7 is Figure 4 a schematic diagram of the B-B cross-section in;

[0031] Figure 8 is Figure 7 an enlarged view of the P position in.

[0032] Among them, the above-mentioned drawings include the following reference numerals:

[0033] 10. Cabin body; 11. Accommodation space; 12. Opening; 13. Slide rail; 14. Annular outer flange; 20. Cabin door; 21. Slide block; 22. Sealing ring; 23. Sealing groove; 30. Driving mechanism; 31. Telescopic member; 311. Telescopic cylinder; 3111. Cylinder body; 3112. First piston rod; 32. First connecting plate; 33. Second connecting plate; 34. Fastener; 35. Buffer member; 40. First clamping cylinder; 41. Chuck; 50. Second clamping cylinder; 51. Rotary chuck. Detailed implementation manners

[0034] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0035] It should be noted that the terms used herein are only for describing the specific implementation manners and are not intended to limit the exemplary implementation manners of the present application. As used herein, unless otherwise clearly specified in the context, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "include" and / or "comprise" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0036] Unless otherwise specifically stated, the relative arrangements of the components and steps set forth in these embodiments, the numerical expressions and values do not limit the scope of the present application. At the same time, it should be understood that for the convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationship. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technologies, methods, and devices should be regarded as part of the authorized specification. In all the examples shown and discussed here, any specific value should be interpreted as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that: similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0037] As Figures 1 to 8 shown, the present application provides a vacuum chamber. The vacuum chamber includes a cabin body 10, a cabin door 20, and a driving mechanism 30. The cabin body 10 has an accommodation space 11 and an opening 12, and the accommodation space 11 communicates with the opening 12. The cabin door 20 is installed on the cabin body 10 and is slidably arranged. The cabin door 20 has a first position where it slides to cover the opening 12 and a second position where it slides to completely avoid the opening 12. The driving mechanism 30 is installed on the cabin body 10, the driving mechanism 30 is connected to the cabin door 20, and the driving mechanism 30 drives the cabin door 20 along a first direction (such as Figure 1in the direction indicated by arrow X, specifically the length direction of the cabin body 10) reciprocates to switch between the first position and the second position.

[0038] In this embodiment, the cabin door 20 is slidably mounted on the cabin body 10, enabling the cabin door 20 to slide and cover the opening 12 to ensure good sealing of the vacuum chamber and ensure that the internal system inside the cabin body 10 is in a vacuum state. The cabin door 20 being slidably mounted on the cabin body 10 can also enable the cabin door 20 to slide completely away from the opening 12, increasing the opening degree of the cabin door 20 to ensure good passability of the vacuum chamber. With such a setting, larger equipment can smoothly pass through the opening 12 and enter the cabin body 10. Additionally, compared with the prior art, the cabin door 20 in this application can slide closely against the cabin body 10, and the cabin door 20 does not need to occupy additional space, saving more space in the use of the vacuum chamber and being conducive to improving the efficient utilization rate of space.

[0039] In one embodiment, the driving mechanism 30 includes a telescopic member 31. The telescopic member 31 is mounted on the cabin body 10. The telescopic member 31 is fixedly connected to the cabin door 20, and the telescopic member 31 reciprocally extends and retracts along the first direction to drive the cabin door 20 to switch between the first position and the second position. The reciprocal extension and retraction of the telescopic member 31 along the first direction can provide power for the sliding of the cabin door 20, and the telescopic member 31 can drive the cabin door 20 fixed to it to reciprocally move along the first direction. When the telescopic member 31 extends, the cabin door 20 follows the telescopic member 31 and slides to the first position to cover the opening 12. When the telescopic member 31 contracts, the cabin door 20 follows the telescopic member 31 and slides to the second position to completely avoid the opening 12, keeping the opening 12 completely open. The telescopic member 31 can directly transfer the power to the cabin door 20, which is beneficial to reducing the loss during the power transfer process, thereby improving the efficiency of power transfer. The telescopic member 31 can also more precisely control the switching of the cabin door 20 between the first position and the second position, more precisely ensuring that the cabin door 20 can tightly seal the opening 12 when in the first position and can completely avoid the opening 12 when in the second position, improving the passability of the cabin body 10. And in the prior art, the vacuum chamber requires manual rotation of the cabin door 20 to open or close the cabin body 10, while in this embodiment, the telescopic member 31 is used to replace manual operation to provide sufficient power for the movement of the cabin door 20, reducing the labor cost to a certain extent and being more labor-saving.

[0040] Among them, the telescopic member 31 includes a telescopic cylinder 311, and the telescopic cylinder 311 includes a cylinder block 3111 and a first piston rod 3112. The cylinder block 3111 is fixedly installed on the cabin body 10. One end of the first piston rod 3112 is connected to the cylinder block 3111 and telescopically moves relative to the cylinder block 3111 in the first direction, and the other end of the first piston rod 3112 is connected to the cabin door 20. Both ends of the first piston rod 3112 reciprocate in the cylinder block 3111 under the action of an external force, causing the first piston rod 3112 to telescopically move relative to the cylinder block 3111 in the first direction. The cabin door 20 is connected to the first piston rod 3112, and the first piston rod 3112 can drive the cabin door 20 to slide in the first direction. Specifically, when the telescopic cylinder 311 works, it can drive the first piston rod 3112 to move to drive the cabin door 20 to slide. Moreover, the telescopic cylinder 311 can achieve precise control of the position of the cabin door 20 to ensure that the cabin door 20 can completely cover the opening 12.

[0041] As Figures 3 to 6 shown, in one embodiment, the first piston rod 3112 and the cabin door 20 are connected through a first connecting plate 32 and a second connecting plate 33. The first connecting plate 32 is connected to the first piston rod 3112. The second connecting plate 33 is connected to the cabin door 20. The first connecting plate 32 and the second connecting plate 33 are connected by a fastener 34, and a buffer member 35 is provided between the fastener 34 and the second connecting plate 33. The double-connection method of the first connecting plate 32 and the second connecting plate 33 has higher stability, can effectively disperse and resist external impacts, and protects the cabin door 20 and the telescopic cylinder 311 from damage. The positions of the first connecting plate 32 and the second connecting plate 33 can be adjusted according to the positions between the cabin door 20 and the telescopic cylinder 311, making the installation and debugging of the driving mechanism 30 more convenient and flexible, and being able to better adapt to different installation environments and the size of the cabin door 20. After the cabin door 20 is in the first position, the vacuum chamber is evacuated, so that the cabin door 20 is closely attached to the cabin body 10, the cabin door 20 deforms toward the cabin body 10 side, and the cabin door 20 squeezes the buffer member 35 to deform. The deformation amount of the buffer member 35 is the deformation amount between the cabin door 20 and the cabin body 10, and the stress received by the buffer member 35 is equal to the vacuum suction force received by the cabin door 20. When the atmospheric pressure is restored in the cabin body 10, the buffer member 35 returns to the pre-pressed state, and the buffer member 35 can push up the cabin door 20 to offset the vacuum deformation. During the process of evacuating and restoring the atmospheric pressure in the cabin body 10, the buffer member 35 can provide a certain buffering effect, further ensuring the accuracy of the sliding of the cabin door 20 and effectively preventing damage to the hard connection between the telescopic cylinder 311 and the cabin door 20 during the evacuation process.

[0042] In one embodiment, a slide rail 13 is further provided on the cabin body 10. The slide rail 13 extends along a first direction, and a slider 21 cooperating with the slide rail 13 is provided on the cabin door 20. The slide rail 13 provides a clear guide for the movement of the cabin door 20, ensuring that the cabin door 20 can move smoothly along the first direction. The slide rail 13 effectively reduces the shaking and offset of the cabin door 20 during movement, effectively improving the stability and accuracy of the movement of the cabin door 20. The slider 21 cooperates with the slide rail 13, which can reduce the friction between the slider 21 and the slide rail 13, thereby reducing the driving force required for the cabin door 20 to move, and also helping to reduce the noise generated by friction and extend the service life of the slide rail 13 and the slider 21.

[0043] As Figures 7 to 8 shown, in one embodiment, a buffer member 35 is provided between the slider 21 and the cabin door 20. The buffer member 35 can provide a certain buffering effect. When the inside of the cabin body 10 is evacuated, the cabin door 20 squeezes the buffer member 35 to cause deformation. When the atmospheric pressure is restored inside the cabin body 10, the buffer member 35 returns to the pre-pressed state. During the process of evacuating and restoring the atmospheric pressure inside the cabin body 10, the buffer member 35 is tightened between the slider 21 and the cabin door 20, ensuring that the slider 21 is stably slidably mounted in the slide rail 13, protecting the cabin door 20, the slider 21 and the slide rail 13 from damage, and being beneficial to improving the stability of the cabin sliding.

[0044] In one embodiment, the buffer member 35 can be set as an elastic member. Specifically, the elastic member can be a spring, an elastic rubber, etc., and this embodiment is not uniquely limited.

[0045] In one embodiment, an annular outer flange 14 is provided on the outer periphery of the opening 12. The vacuum chamber further includes a first clamping cylinder 40, and the first clamping cylinder 40 is located along the second direction of the cabin door 20 (such as Figure 1In the direction indicated by arrow Y, the second direction is perpendicular to the first direction, and the second direction is the height direction of the cabin body 10) on the opposite sides, and the piston rod of the first clamping cylinder 40 extends along the thickness direction of the cabin door 20. A chuck 41 is provided on the piston rod of the first clamping cylinder 40. One end of the chuck 41 is fixed to the piston rod of the first clamping cylinder 40 and extends a predetermined length in the radial direction of the piston rod of the first clamping cylinder 40. The chuck 41 abuts against the annular outer flange 14 under the drive of the first clamping cylinder 40. After the cabin door 20 slides to the first position, the piston rod of the first clamping cylinder 40 contracts, so that the chuck 41 abuts against the annular outer flange 14 under the drive of the first clamping cylinder 40, and the cabin door 20 is pushed towards the cabin body 10, further ensuring good sealing between the cabin door 20 and the cabin body 10. Specifically, a plurality of first clamping cylinders 40 are included, and the plurality of first clamping cylinders 40 are spaced apart on the opposite sides of the cabin door 20 along the second direction to ensure uniform force on the cabin door 20, and to a certain extent improve the good sealing between the cabin door 20 and the cabin body 10. In this embodiment, two first clamping cylinders 40 are provided on the opposite sides of the cabin door 20 along the second direction. The number of the first clamping cylinders 40 can be adjusted according to the actual situation. As long as it is other deformation methods under the concept of this application, they are all within the protection scope of this application.

[0046] In one embodiment, the vacuum chamber further includes a second clamping cylinder 50. The second clamping cylinder 50 is located on the opposite sides of the cabin door 20 along the first direction, and the piston rod of the second clamping cylinder 50 extends along the thickness direction of the cabin door 20. The second clamping cylinder 50 includes a rotating chuck 51 for avoiding the cabin door 20. One end of the rotating chuck 51 is fixed to the piston rod of the second clamping cylinder 50 and extends a predetermined length in the radial direction of the piston rod of the second clamping cylinder 50. When the cabin door 20 is in the first position, the rotating chuck 51 rotates under the drive of the second clamping cylinder 50 and makes the cabin door 20 abut against the cabin body 10. The second clamping cylinder 50 in this embodiment is a 180° rotating clamping cylinder. After the cabin door 20 is in the first position, after the rotating chuck 51 rotates 180°, the piston rod of the second clamping cylinder 50 contracts to make the cabin door 20 abut against the cabin body 10. The second clamping cylinder 50 further presses the cabin door 20 onto the cabin body 10 to ensure good sealing between the cabin door 20 and the cabin body 10, and to ensure that the internal system of the vacuum chamber is in a vacuum environment. Specifically, two second clamping cylinders 50 are provided in this embodiment. Among them, the second clamping cylinder 50 far from the second position can be provided on the cabin body 10 to prevent interference during the movement of the cabin door 20. After the cabin door 20 slides to the first position, the rotating chuck 51 rotates 180° and is buckled with the cabin door 20 to clamp the cabin door 20 towards the cabin body 10. The second clamping cylinder 50 close to the second position can be provided on the cabin door 20. After the cabin door 20 slides to the first position, the rotating chuck 51 rotates 180° and is buckled with the cabin body 10 to clamp the cabin door 20 towards the cabin body 10.

[0047] In one embodiment, a sealing ring 22 is provided between the cabin body 10 and the cabin door 20. The sealing ring 22 surrounds the outer periphery of the opening 12. The sealing ring 22 can prevent external air from entering the cabin body 10, improve the sealing effect between the cabin body 10 and the cabin door 20, and further ensure the good operation of the internal system of the vacuum chamber.

[0048] In one embodiment, a sealing groove 23 is provided on at least one of the cabin body 10 and the cabin door 20, and the sealing ring 22 is located in the sealing groove 23. The vacuum chamber further includes a pressure sensor disposed between the sealing ring 22 and the sealing groove 23. When the vacuum chamber starts to evacuate, the cabin door 20 is pushed towards the cabin body 10 under the pressure of the external air. At this time, the cabin door 20 will squeeze the sealing ring 22, affecting the sealing performance of the sealing ring 22. Therefore, in this embodiment, the pressure sensor is used to detect the pressure at various positions of the sealing ring 22. When the pressure sensor detects that the pressure at a certain position on the sealing ring 22 is abnormal, an alarm will be issued. At this time, the vacuum chamber stops evacuating. During the evacuation process, if the force on the cabin door 20 is uniform when it is in close contact with the cabin body 10, and the contact between the cabin door 20, the sealing ring 22 and the cabin body 10 is good, the pressure on each part of the sealing ring 22 will be kept consistent, so that the extrusion on the pressure sensor is in a uniform extrusion state, and there is no situation where the extrusion force at a certain position is too large. At this time, the pressure sensor will not issue an alarm signal.

[0049] As Figures 1 to 8 shown, the vacuum chamber provided in this embodiment uses a telescopic cylinder 311 to directly control the opening and closing of the cabin door 20, and uses a slide rail 13 and a slider 21 as a supporting device, which can not only ensure the smooth and stable sliding movement of the cabin door 20, but also ensure the accuracy and straightness of the movement of the cabin door 20. The cabin door 20 can be fully opened, and the opening range of the cabin body 10 is large and the passability is better. This embodiment also uses a first clamping cylinder 40 and a second clamping cylinder 50 to enable the cabin door 20 to quickly clamp the cabin body 10. The clamping process is fast, and the structures of the first clamping cylinder 40 and the second clamping cylinder 50 are simple. The second clamping cylinder 50 can avoid interference during the movement process. This embodiment also adds a pressure sensor in the sealing groove 23. The pressure sensor can monitor the change of the sealing ring 22 in real time and reflect the force conditions at various positions in the sealing ring 22 in real time. When the sealing ring 22 is abnormal, the pressure sensor can effectively identify it, quickly locate the air leakage position, and then quickly repair the air leakage position. At the same time, when the pressure sensor detects that the pressure at a certain position on the sealing ring 22 is abnormal, the pressure sensor can quickly alarm to achieve effective early warning. A buffer member 35 is also provided in this embodiment. The buffer member 35 can effectively cope with the deformation effect caused by evacuation and ensure the stability of the movement of the cabin door 20.

[0050] For ease of description, spatial relative terms such as "above", "over", "on the upper surface", "upper" etc. may be used herein to describe the spatial positional relationship of one device or feature to other devices or features as shown in the figures. It should be understood that the spatial relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is inverted, a device described as "above" or "over" other devices or structures will then be positioned "below" or "under" the other devices or structures. Thus, the exemplary term "above" can include both the orientations of "above" and "below". The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the corresponding explanations for the spatial relative descriptions used herein will be made accordingly.

[0051] In addition, it should be noted that the use of terms such as "first", "second" etc. to define components is only for the convenience of differentiating the corresponding components. Without additional statements, the above terms have no special meanings, and thus should not be construed as limiting the protection scope of the present application.

[0052] The above are only the preferred embodiments of the present application and are not used to limit the present application. For those skilled in the art, various modifications and changes can be made to the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A vacuum chamber, characterized in that: include: A cabin body (10), the cabin body (10) having a containing space (11) and an opening (12), the containing space (11) being in communication with the opening (12); A door (20), the door (20) being mounted and slidably disposed on the cabin body (10), the door (20) having a first position of sliding to cover the opening (12), and a second position of sliding to completely avoid the opening (12); A driving mechanism (30), wherein the driving mechanism (30) is installed on the cabin body (10), the driving mechanism (30) is connected to the cabin door (20), and the driving mechanism (30) drives the cabin door (20) to move back and forth along a first direction to switch between the first position and the second position.

2. The vacuum chamber according to claim 1, characterized in that: The driving mechanism (30) comprises: A telescopic member (31), the telescopic member (31) being mounted on the cabin body (10), the telescopic member (31) being fixedly connected to the cabin door (20), the telescopic member (31) being reciprocatingly telescoped along a first direction to drive the cabin door (20) to switch between the first position and the second position.

3. The vacuum chamber according to claim 2, characterized in that: The telescopic member (31) comprises a telescopic cylinder (311), and the telescopic cylinder (311) comprises: A cylinder body (3111), wherein the cylinder body (3111) is fixedly mounted on the cabin body (10); A first piston rod (3112), one end of which is connected to the cylinder body (3111) and is retractable relative to the cylinder body (3111) along the first direction, and the other end of which is connected to the cabin door (20).

4. The vacuum chamber according to claim 3, characterized in that: The first piston rod (3112) is connected to the cabin door (20) via a first connecting plate (32) and a second connecting plate (33); the first connecting plate (32) is connected to the first piston rod (3112), and the second connecting plate (33) is connected to the cabin door (20); the first connecting plate (32) and the second connecting plate (33) are connected via a fastener (34), and a buffer (35) is provided between the fastener (34) and the second connecting plate (33).

5. The vacuum chamber according to claim 4, characterized in that: The cabin body (10) is also provided with a slide rail (13), the slide rail (13) extending along a first direction, the cabin door (20) is provided with a slider (21) cooperating with the slide rail (13), and the buffer member (35) is provided between the slider (21) and the cabin door (20).

6. The vacuum chamber according to claim 4, characterized in that: The buffer member (35) is an elastic member.

7. The vacuum chamber according to claim 1, characterized in that: The outer periphery of the opening (12) is provided with an annular outer flange (14), and the vacuum chamber comprises: A first clamping cylinder (40), wherein the first clamping cylinder (40) is located on opposite sides of the hatch (20) along the second direction, the piston rod of the first clamping cylinder (40) extends along the thickness direction of the hatch (20), and a chuck (41) is provided on the piston rod of the first clamping cylinder (40), one end of the chuck (41) is fixed on the piston rod of the first clamping cylinder (40) and extends a predetermined length along the radial direction of the piston rod of the first clamping cylinder (40), and the chuck (41) is driven by the first clamping cylinder (40) to abut against the annular outer flange (14).

8. The vacuum chamber according to claim 1, characterized in that: The vacuum chamber also includes: A second clamping cylinder (50), wherein the second clamping cylinder (50) is located at two opposite sides of the cabin door (20) along the first direction, and the piston rod of the second clamping cylinder (50) extends along the thickness direction of the cabin door (20). The second clamping cylinder (50) comprises a rotating chuck (51), and the rotating chuck (51) is used to avoid the cabin door (20). One end of the rotating chuck (51) is fixed on the piston rod of the second clamping cylinder (50) and extends a predetermined length along the radial direction of the piston rod of the second clamping cylinder (50). When the cabin door (20) is located at the first position, the rotating chuck (51) is driven by the second clamping cylinder (50) to rotate and make the cabin door (20) pressed against the cabin body (10).

9. The vacuum chamber according to any one of claims 1 to 8, characterized in that: A sealing ring (22) is provided between the cabin body (10) and the cabin door (20), and the sealing ring (22) is arranged around the outer periphery of the opening (12).

10. The vacuum chamber according to claim 9, characterized in that: A sealing groove (23) is provided on at least one of the cabin body (10) and the cabin door (20), the sealing ring (22) is located in the sealing groove (23), and the vacuum cabin further comprises a pressure sensor, which is provided between the sealing ring (22) and the sealing groove (23).

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