Multi-layer gate valve

Abstract

The utility model belongs to the technical field of vacuum chamber valves, and particularly relates to a multi-layer gate valve which comprises a frame and a plurality of gate valves, a plurality of turning plates are rotationally arranged in the frame, and the turning plates are sequentially arranged in an array mode so that the turning plates can rotate and form a plurality of feeding ports. The tail end of each turnover plate can be attached to the head end of the next turnover plate, the long edges of the turnover plates at the head position and the tail position can be attached to the frame, a pair of sealing pieces is arranged on the inner wall of the frame, and the sealing pieces can be attached to the short edges of the turnover plates so that the opening of the frame can be sealed by the turnover plates; according to the multilayer gate valve, the multiple overturning plates are rotationally arranged in the frame, the tail ends of the overturning plates can be attached to the head section of the next overturning plate to form a sealing face, the long edges of the overturning plates at the head position and the tail position can be attached to the frame, and the short edges of the overturning plates can be attached to the sealing piece, so that the opening portion of the frame is sealed by all the overturning plates; the situation that a whole turnover plate is used, deformation of the turnover plate is caused, and finally the pressure of the coating cavity is released is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum chamber valves, specifically relates to a flip valve, and particularly relates to a multi-layer valve gate. Background Art

[0002] Vacuum coating technology is a novel new technology for material synthesis and processing, and is an important part of the surface engineering technology field; among them, in the production process of solar cell wafers, the wafers need to be vacuum coated, and the wafers need to be transported into a vacuum chamber for coating. The coating chamber includes single-layer and multi-layer ones. The existing coating chamber installs a flip-type valve gate at its opening end for sealing. The conventional flip-type valve gate usually hinges a flip plate in a frame, and realizes the sealing of the valve gate by driving the flip plate to rotate and fit with the seal in the frame. However, for a multi-layer coating chamber, the flip plate is too large in volume and is prone to deformation, resulting in pressure relief of the coating chamber.

[0003] Therefore, how to avoid pressure relief of the coating chamber caused by the too large volume of the flip plate is a technical problem that needs to be solved urgently in this field.

[0004] It should be noted that the above information disclosed in this background art part is only used to understand the background art of the concept of this application. Therefore, the above description is not considered as information of the prior art. Summary of the Utility Model

[0005] The embodiments of the present disclosure at least provide a multi-layer valve gate.

[0006] In a first aspect, the embodiments of the present disclosure provide a multi-layer valve gate, including: a frame, in which a plurality of flip plates are rotatably arranged, the flip plates are arranged in an array in sequence so that the flip plates can rotate to form a plurality of feeding ports, and; the tail end of the flip plate can fit the head end of the next flip plate, and the long edges of the flip plates at the first position and the last position can fit the frame, and a pair of seals are arranged on the inner wall of the frame, and the seals can fit the short edges of the flip plates so that the mouth of the frame is sealed by the flip plates.

[0007] In an optional embodiment, a fitting plate is bent on the long edge of the flip plate, and the fitting plate is bent in the closing direction of the flip plate, and adjacent fitting plates can fit so that the tail end of the flip plate can fit the head end of the next flip plate.

[0008] In an optional embodiment, a hinge column is arranged at the midpoint of the short edge of the flip plate, and the hinge column is inserted into the inner wall of the frame.

[0009] In an alternative embodiment, a plurality of pairs of rotary cylinders are provided on the outer wall of the frame; both ends of the hinge column extend out of the frame, and the extended ends of the hinge column are connected to the output ends of the rotary cylinders.

[0010] In an alternative embodiment, a synchronizing rod is provided at the extended end of the hinge column, and the ends of the synchronizing rods on the same side are hinged to a synchronizing shaft.

[0011] In an alternative embodiment, a synchronizing rod is provided at the extended end of the hinge column, a synchronizing block is hinged to the end of the synchronizing rod on the same side, and adjacent synchronizing blocks are connected by a synchronizing shaft.

[0012] In an alternative embodiment, the frame is rectangular, the rotation axis of the turning plate is parallel to the short side of the frame, and the seal is installed on the inner wall of the long side of the frame.

[0013] In an alternative embodiment, a fitting plate is provided on the short side of the frame, the long sides of the first and last turning plates can abut against the fitting plate, and; the fitting plate is inclined towards the opening direction of the folding plate.

[0014] In an alternative embodiment, the seal is strip-shaped, and the rotation axis of the turning plate penetrates through the seal.

[0015] The beneficial effect of the present utility model is that this multi-layer valve forms a sealing surface by rotatably arranging a plurality of turning plates in the frame, and the tail end of the turning plate can fit the first section of the next turning plate. Moreover, the long sides of the first and last turning plates can fit the frame, and the short sides of the turning plates fit the seal, so that the mouth of the frame is sealed by all the turning plates, avoiding the use of a single integral turning plate, which may cause deformation of the turning plate and ultimately lead to pressure relief in the coating chamber.

[0016] Other features and advantages of the present utility model will be described in the following specification, and, in part, will become apparent from the specification or be understood by implementing the present utility model. The objectives and other advantages of the present utility model are achieved and obtained by the structures specifically pointed out in the specification, claims, and drawings.

[0017] To make the above objectives, features, and advantages of the present utility model more obvious and understandable, specific preferred embodiments are hereby given, and in conjunction with the accompanying drawings, the detailed description is as follows. Description of the Drawings

[0018] To more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0019] Figure 1 A three-dimensional view of a multi-layer valve provided by an embodiment of the present disclosure;

[0020] Figure 2 A cross-sectional view of a multi-layer valve provided by an embodiment of the present disclosure;

[0021] Figure 3 An open state diagram of a multi-layer valve provided by an embodiment of the present disclosure.

[0022] In the figure:

[0023] 1. Frame; 11. Flipping plate; 11a. Fitting plate; 11b. Hinge column; 11c. Synchronous rod; 11d. Synchronous shaft; 11e. Synchronous block; 12. Feed inlet; 13. Sealing member; 14. Rotary cylinder. Specific embodiments

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the following will clearly and completely describe the technical solutions of the present utility model with reference to the drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

[0025] In this text, when it is mentioned that the first component is located on the second component, this may mean that the first component can be directly formed on the second component, or a third component can be inserted between the first component and the second component. In addition, in the drawings, to effectively describe the technical content, the thickness of the components can be exaggerated or reduced.

[0026] In this document, when an element or layer is referred to as being "on," "joined to," "connected to," "attached to," or "coupled to" another element or layer, it can be directly on, joined, connected, attached, or coupled to the other element or layer, or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly joined to," "directly connected to," "directly attached to," or "directly coupled to" another element or layer, there may be no intervening elements or layers. Other words used to describe the relationship between elements should be interpreted in a similar manner (e.g., "between" versus "directly between," "adjacent" versus "directly adjacent," etc.). As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0027] In this document, example embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as "at least one of..." modify the entire list of elements when following a list of elements, rather than modifying individual elements in the list. For example, the expression "at least one of a, b, and c" should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0028] The terms used herein are for the purpose of describing particular example configurations only and are not intended to be limiting. As used herein, the singular articles "a," "an," and "the" may also be intended to include the plural forms, unless clearly stated otherwise herein. The terms "comprises," "comprising," and "having" are inclusive and thus specify the presence of stated features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as necessarily requiring them to be performed in the particular order discussed or illustrated, unless specifically identified as an order of performance. Additional or alternative steps may be employed.

[0029] As used herein, phrases such as "in one embodiment," "according to one embodiment," "in some embodiments," etc. generally refer to the fact that the particular feature, structure, or characteristic following the phrase may be included in at least one embodiment of the present disclosure. Thus, a particular feature, structure, or characteristic may be included in more than one embodiment of the present disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms "example," "exemplary," etc. are used "as an example, instance, or illustration." Any embodiment, aspect, or design described herein as "example" or "exemplary" is not necessarily to be construed as preferred or superior to other embodiments, aspects, or designs. Instead, the use of the terms "example," "exemplary," etc. is intended to present concepts in a concrete manner.

[0030] It has been found through research that in the prior art, always using a whole flipping plate to seal a multi-layer coating chamber easily leads to pressure relief in the coating chamber, which is the problem and purpose to be solved by the utility model.

[0031] Based on the above research, the embodiments of the present disclosure provide a multi-layer valve, which uses multiple flipping plates that can be mutually joined to achieve the sealing of the valve.

[0032] Regarding the defects existing in the above solutions, they are all the results obtained by the utility model inventors through practice and careful research. Therefore, the process of discovering the above problems and the solutions proposed by the present disclosure in this article for the above problems should all be the contributions made by the utility model inventors to the present disclosure during the process of the present disclosure.

[0033] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0034] The following will, in conjunction with the drawings, elaborate on some embodiments of the present utility model. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0035] See Figures 1-3 , Figures 1-3 shows a multi-layer valve, which includes: a frame 1, in which several flipping plates 11 are rotatably arranged. The flipping plates 11 are arranged in an array in sequence, so that the flipping plates 11 can rotate to form several feeding ports 12, and; the tail end of the flipping plate 11 can fit the head end of the next flipping plate 11, and the long edges of the flipping plates 11 at the first position and the last position can fit the frame 1. A pair of sealing members 13 are arranged on the inner wall of the frame 1, and the sealing members 13 can fit the short edges of the flipping plates 11, so that the mouth of the frame 1 is sealed by the flipping plates 11; in short, this multi-layer valve constitutes a sealing surface by rotatably arranging multiple flipping plates 11 in the frame 1, and the tail end of the flipping plate 11 can fit the head section of the next flipping plate 11. The long edges of the flipping plates 11 at the first position and the last position can fit the frame 1, and the short edges of the flipping plates 11 fit the sealing members 13, so that the mouth of the frame 1 is sealed by all the flipping plates 11, avoiding the use of a whole flipping plate 11, causing deformation of the flipping plate 11, and ultimately leading to pressure relief in the coating chamber.

[0036] In some embodiments, a fitting plate 11a is bent on the long edge of the flipping plate 11. The fitting plate 11a is bent in the closing direction of the flipping plate. The adjacent fitting plates 11a can fit, so that the tail end of the flipping plate 11 can fit the head end of the next flipping plate 11; in short, by setting the fitting plate 11a, the flipping plates 11 can fit better with each other, realizing the sealing between the flipping plates 11.

[0037] In some embodiments, a hinge post 11b is provided at the midpoint of the short edge of the flip plate 11, and the hinge post 11b is inserted into the inner wall of the frame 1; in short, by arranging the hinge post 11b at the midpoint of the short edge of the flip plate 11, the torque can be transmitted to the flip plate 11 more evenly, improving the sealing performance between the flip plates 11.

[0038] In some embodiments, several pairs of rotary cylinders 14 are provided on the outer wall of the frame 1; both ends of the hinge post 11b extend out of the frame 1, and the extended ends of the hinge post 11b are connected to the output ends of the rotary cylinders 14; in short, the rotary cylinders 14 are mounted on the outer wall of the frame 1 through brackets, and the output ends of the rotary cylinders 14 are connected to the extended ends of the hinge post 11b to drive the hinge post 11b to rotate and drive the flip plate 11 to rotate.

[0039] In some embodiments, a synchronizing rod 11c is provided at the extended end of the hinge post 11b, and the ends of the synchronizing rods 11c on the same side are hinged to a synchronizing shaft 11d; in short, the synchronizing rods 11c are connected to the same synchronizing shaft 11d, and the synchronizing rods 11c are hinged to the synchronizing shaft 11d, that is, by rotating one hinge post 11b, all the hinge posts 11b on the same side can be driven to rotate.

[0040] In some embodiments, a synchronizing rod 11c is provided at the extended end of the hinge post 11b, a synchronizing block 11e is hinged to the end of the synchronizing rod 11c on the same side, and the adjacent synchronizing blocks 11e are connected by a synchronizing shaft 11d; in short, to ensure the rigidity of the synchronizing shaft 11d, the length of the synchronizing shaft 11d is shortened, and they are connected by the synchronizing blocks 11e, and the structure is simple and reliable.

[0041] In some embodiments, the frame 1 is rectangular, the rotation axis of the flip plate 11 is parallel to the short edge of the frame 1, and the seal 13 is installed on the inner wall of the long edge of the frame 1; in short, one side of the seal 13 fits against the long edge of the frame 1, and the other side fits against the short edge of the flip plate 11 to achieve the sealing of the frame 1.

[0042] In some embodiments, a fitting plate 11a is provided on the short edge of the frame 1, and the long edges of the first and last flip plates 11 can abut against the fitting plate 11a, and; the fitting plate 11a is inclined towards the opening direction of the folding plate; in short, the fitting plate 11a on the short edge of the frame 1 is parallel to the fitting plate 11a on the long edge of the flip plate 11 to ensure good sealing between the first and last flip plates 11 and the frame 1.

[0043] In some embodiments, the seal 13 is strip-shaped, and the rotation axis of the flip plate 11 penetrates through the seal 13; in short, a through hole is formed in the seal 13 to allow the rotation axis (i.e., the connecting column) of the flip plate 11 to pass through, so as to avoid interference between the connecting column and the seal 13.

[0044] In the description of the embodiments of the present invention, unless otherwise clearly defined and limited, the terms "mounted", "connected" and "connected" shall be understood in a broad sense. For example, they may be fixedly connected, detachably connected or integrally connected; they may be mechanically connected or electrically connected; they may be directly connected or indirectly connected through an intermediate medium, and may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention may be understood according to specific situations.

[0045] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In addition, terms such as "first", "second" and other numerical terms used herein do not imply an order or sequence unless clearly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer or section discussed above may be referred to as the second element, component, region, layer or section.

[0046] Spatially relative terms, such as "inner", "outer", "below", "beneath", "lower", "above", "upper", etc., may be used herein to facilitate describing one element or feature's relationship to another element or feature as illustrated in the figures. Except for the orientation depicted in the figures, spatially relative terms are intended to encompass different orientations of the device in use or operation. For example, if the device in the figures is turned over, an element described as "below" or "beneath" another element or feature will then be oriented "above" the other element or feature. Thus, the exemplary term "below" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein are to be interpreted accordingly.

[0047] In the above discussion, unless otherwise stated, when used to describe a numerical value, the terms "about", "approximately", "substantially", etc. mean a variation of + / −10% of that value.

[0048] Based on the above-mentioned ideal embodiments of the present utility model as inspiration, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of this utility model. The technical scope of this utility model is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A multi-layer gate valve, characterized in that: include: A frame (1) having a plurality of flip plates (11) rotatably arranged therein; The flip plates (11) are arranged in an array in sequence, so that the flip plates (11) can rotate and form a plurality of feed ports (12), and the tail end of the flip plate (11) can fit the head end of the next flip plate (11), and the long edges of the first and last flip plates (11) can fit the frame (1); and The inner wall of the frame (1) is provided with a pair of sealing members (13), and the sealing members (13) are capable of fitting against the short edge of the flip plate (11), so that the mouth of the frame (1) is sealed by the flip plate (11).

2. The multi-layer gate valve according to claim 1, characterized in that: The flip plate (11) is bent along its long edge to form a bonding plate (11a), the bonding plate (11a) being bent in the closing direction of the flip plate, and adjacent bonding plates (11a) being able to bond, so that the rear end of the flip plate (11) can bond to the front end of the next flip plate (11).

3. The multi-layer gate valve according to claim 1, characterized in that: A hinge column (11b) is provided at the midpoint of the short edge of the flip plate (11), and the hinge column (11b) is inserted into the inner wall of the frame (1).

4. The multi-layer gate valve according to claim 3, characterized in that: The outer wall of the frame (1) is provided with a plurality of pairs of rotating cylinders (14); Both ends of the hinged column (11b) extend out of the frame (1), and the extended end of the hinged column (11b) is connected to the output end of the rotary cylinder (14).

5. The multi-layer gate valve according to claim 4, characterized in that: The protruding end of the hinged column (11b) is provided with a synchronization rod (11c), and the end of the synchronization rod (11c) on the same side is hinged on a synchronization shaft (11d).

6. The multi-layer gate valve according to claim 4, characterized in that: The protruding end of the hinged column (11b) is provided with a synchronization rod (11c), the end of the synchronization rod (11c) on the same side is hinged with a synchronization block (11e), and adjacent synchronization blocks (11e) are connected via a synchronization shaft (11d).

7. The multi-layer gate valve according to claim 1, characterized in that: The frame (1) is rectangular, the rotation axis of the flip plate (11) is parallel to the short edge of the frame (1), and the sealing member (13) is installed on the inner wall of the long edge of the frame (1).

8. The multi-layer gate valve according to claim 7, characterized in that: The short edge of the frame (1) is provided with a bonding plate (11a), and the long edges of the first-positioned and last-positioned flip plates (11) are capable of abutting against the bonding plate (11a), and; The laminating plate (11a) is inclined towards the opening direction of the folding plate.

9. The multi-layer gate valve according to claim 1, characterized in that: The sealing member (13) is strip-shaped, and the rotation axis of the flip plate (11) passes through the sealing member (13).

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