High-purity gas one-way valve

Abstract

The utility model discloses a high-purity gas one-way valve, which relates to the technical field of valve structures and comprises an inlet valve body and an outlet valve body which are mutually welded to form a valve core accommodating cavity, and gas enters from the inlet valve body, penetrates through the valve core accommodating cavity and then is discharged from the outlet valve body; a sealing piece is arranged at the end, close to the inlet valve body, of the valve seat. The sealing piece and the end of the valve seat are injection-molded. The metal elastic piece is fixed in the valve body containing cavity and elastically abuts against the valve seat, the metal elastic piece is provided with at least two channel holes, and the channel sectional areas of the channel holes are different. According to the high-purity gas one-way valve, the valve seat and the sealing piece are formed in an injection molding mode, the sealing piece is fixed to the valve seat, and the situation that the valve function is affected due to displacement deformation of a sealing structure in the working process is effectively avoided. The channel hole of the metal elastic piece is of an eccentric structure, low opening pressure of the valve body is guaranteed, resonance and howling of the valve are avoided, the service life of the valve body structure is prolonged, and the working stability of the valve body structure is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of valve structures, and particularly relates to a high-purity gas check valve. Background Art

[0002] A gas valve is a device used to control the flow of gas. It can regulate the flow rate, pressure, and flow direction of gas. It plays an important role in fields such as chemical industry, petroleum, natural gas transportation, environmental protection, medicine, and food. They usually have characteristics such as high sealing performance, excellent corrosion resistance, flexible operation, rapid opening and closing, safety and reliability, strong adaptability, and high intelligence and automation levels. Gas valves are used for the transportation, storage, and use of gas, can precisely control the gas flow rate, ensure that chemical reactions occur in the correct gas environment, and that gas can be safely stored.

[0003] CN202110609233.1 discloses a high-temperature resistant gas check valve, which includes a valve body. A first cavity is opened at the bottom end of the valve body, and a second cavity is opened on the side wall of the valve body. The first cavity is communicated with the second cavity. A valve cover is installed at the top end of the first cavity. A stepped hole is opened in the first cavity. The stepped hole is located below the second cavity, and a conical sealing surface is ground on the stepped hole; A valve core assembly is arranged on the sealing valve body, and the valve core assembly is located in the first cavity; A pressing assembly is installed on the valve cover, and the pressing assembly is used to fix the valve core assembly; A sealing assembly is installed on the valve core assembly.

[0004] Due to structural problems, existing gas valves are prone to valve resonance and whistling sounds during operation, and the sealing ring is prone to displacement and extrusion, resulting in affected valve functions, unstable gas transportation, and affecting gas transportation efficiency and valve service life. Summary of the Utility Model

[0005] The utility model aims to at least solve the technical problem of "existing gas valves are prone to valve resonance and whistling sounds during operation, and the sealing ring is prone to displacement and extrusion, resulting in affected valve functions, unstable gas transportation, and affecting gas transportation efficiency and valve service life" existing in the prior art. For this reason, the utility model provides a high-purity gas check valve with good sealing performance, which adopts an eccentric structure to achieve low opening pressure of the valve and avoid valve resonance and whistling sounds, and improve gas transportation efficiency and valve service life.

[0006] The high-purity gas check valve according to some embodiments of the utility model includes:

[0007] An inlet valve body, one end of which is welded to a short joint, and the other end is provided with a movable cavity;

[0008] The outlet valve body is welded to a short joint at one end and provided with a channel cavity at the other end. The movable cavity and the channel cavity are welded to form a valve core accommodating cavity. Gas enters from the inlet valve body, passes through the valve core accommodating cavity, and then discharges from the outlet valve body.

[0009] The valve seat is arranged in the valve core accommodating cavity. A seal is provided at one end of the valve seat close to the inlet valve body, and the seal is injection-molded with the end of the valve seat.

[0010] The metal shrapnel is arranged on the side of the valve seat close to the outlet valve body. The metal shrapnel is fixed in the valve body accommodating cavity and elastically abuts against the valve seat. The metal shrapnel is provided with at least two channel holes, and the cross-sectional areas of the channels of the channel holes are different.

[0011] When the gas on the side of the inlet valve body flows towards the outlet valve body, the gas pushes the valve seat to deform the metal shrapnel, so that the valve core accommodating cavity communicates with the inlet valve body and the outlet valve body respectively.

[0012] According to some embodiments of the present invention, the seal is made of rubber material, and the seal is secondarily formed on the end face of the valve seat.

[0013] According to some embodiments of the present invention, the periphery of the seal is in a ring-shaped convex structure, and the periphery of the seal abuts against the end face of the inlet valve body to block the channel between the valve core accommodating cavity and the inlet valve body.

[0014] According to some embodiments of the present invention, the valve seat is made of metal material, and the valve seat moves along the axis direction of the inlet valve body.

[0015] According to some embodiments of the present invention, a raised guide block is provided on the side of the valve seat close to the outlet valve body. The guide block is arranged along the periphery of the valve seat, and the guide block is embedded in the channel hole of the metal shrapnel.

[0016] According to some embodiments of the present invention, an installation block is provided in the middle of the valve seat. The metal shrapnel is provided with an installation hole corresponding to the position of the installation block, and the installation block is connected to the installation hole to fix the positions of the valve seat and the metal shrapnel.

[0017] According to some embodiments of the present invention, the metal shrapnel is made of cobalt-chromium-tungsten-nickel-iron alloy.

[0018] According to some embodiments of the present invention, the channel holes of the metal shrapnel adopt an eccentric structure, and elastic ribs are arranged between adjacent channel holes. The elastic ribs are respectively connected to the periphery and the middle of the metal shrapnel.

[0019] According to some embodiments of the present utility model, the periphery of the metal elastic sheet is fixed to the inner wall of the valve core accommodating cavity, and the elastic rib of the metal elastic sheet elastically deforms following the movement of the valve seat.

[0020] According to some embodiments of the present utility model, the inlet valve body and the outlet valve body are connected by welding, and the inlet valve body and the outlet valve body are connected to the short joint by welding.

[0021] The high-purity gas one-way valve according to some embodiments of the present utility model has at least the following beneficial effects: The valve seat and the seal are injection molded, so that the seal is fixed on the valve seat, effectively avoiding displacement and deformation of the sealing structure during operation and affecting the valve function. The channel hole of the metal elastic sheet adopts an eccentric structure, which ensures the low opening pressure of the valve body, avoids valve resonance and whistling sounds, and improves the service life and working stability of the valve body structure.

[0022] The additional aspects and advantages of the present utility model will be partly given in the following description, partly will become obvious from the following description, or be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The above and / or additional aspects and advantages of the present utility model will become obvious and easy to understand from the description of the embodiments in conjunction with the following drawings, wherein:

[0024] Figure 1 is a cross-sectional view of the high-purity gas one-way valve according to an embodiment of the present utility model;

[0025] Figure 2 is a rear view of the valve seat according to an embodiment of the present utility model;

[0026] Figure 3 is a cross-sectional view of the valve seat according to an embodiment of the present utility model;

[0027] Figure 4 is a front view of the metal elastic sheet according to an embodiment of the present utility model.

[0028] Reference numerals:

[0029] Short joint 110, valve core accommodating cavity 120,

[0030] Inlet valve body 210, movable cavity 211, outlet valve body 220, channel cavity 221,

[0031] Valve seat 310, seal 311, mounting block 312, guide block 313,

[0032] Metal elastic sheet 410, channel hole 411, mounting hole 412, elastic rib 413. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0033] Embodiments of the present utility model will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation to the present utility model.

[0034] In the description of the present utility model, it should be understood that for the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, top, bottom, etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0035] In the description of the present utility model, the meaning of several is one or more, the meaning of multiple is more than two, greater than, less than, exceeding, etc. are understood as not including the present number, and above, below, within, etc. are understood as including the present number. If there is a description of first and second, it is only for the purpose of distinguishing technical features and should not be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or the sequence relationship of the indicated technical features.

[0036] In the description of the present utility model, unless otherwise clearly defined, words such as setting, installing, connecting, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in the present utility model in combination with the specific content of the technical solution.

[0037] Next, refer to Figures 1-4 to describe a high-purity gas one-way valve according to an embodiment of the present utility model.

[0038] As Figures 1-4 shown, the high-purity gas one-way valve includes an inlet valve body 210, an outlet valve body 220, a valve seat 310, and a metal spring piece 410. The inlet valve body 210 and the outlet valve body 220 need to be connected to the inlet port and the outlet port respectively. Therefore, one ends of the inlet valve body 210 and the outlet valve body 220 are respectively provided with a welded short joint 110, and the inlet valve body 210 and the outlet valve body 220 are connected to the gas channel through the welded short joints 110. The other end of the inlet valve body 210 is provided with a movable cavity 211, and the cross-sectional area of the movable cavity 211 is larger than the cross-sectional area of the gas channel of the inlet valve body 210. The other end of the outlet valve body 220 is provided with a channel cavity 221, and the cross-sectional area of the channel cavity 221 is larger than the cross-sectional area of the gas channel of the outlet valve body 220.

[0039] The movable cavity 211 and the channel cavity 221 are welded to each other to form a valve core accommodating cavity 120. Gas enters from the inlet valve body 210, passes through the valve core accommodating cavity 120, and then discharges from the outlet valve body 220. The valve core accommodating cavity 120 formed after the movable cavity 211 and the channel cavity 221 are connected to each other is a sealed structure, and only two channel openings are respectively connected to the gas channels of the inlet valve body 210 and the outlet valve body 220.

[0040] When the gas on one side of the inlet valve body 210 flows towards the outlet valve body 220, the gas pushes the valve seat 310 to deform the metal elastic sheet 410, so that the valve core accommodating cavity 120 is respectively communicated with the inlet valve body 210 and the outlet valve body 220. Specifically, when the gas passes through the high-purity gas one-way valve of the present invention, it can only pass through the valve core accommodating cavity 120, and the valve seat 310 and the metal elastic sheet 410 are both arranged in the valve core accommodating cavity 120. The valve seat 310 and the metal elastic sheet 410 are combined to form a one-way valve core structure in the valve core accommodating cavity 120. When the gas enters from the inlet valve body 210 and the pressure value reaches the set value, the valve seat 310 will be pushed open, and at this time, the gas enters the valve core accommodating cavity 120 and discharges from the outlet valve body 220.

[0041] When the pressure value on the side of the inlet valve body 210 is lower than the set value, the resilience of the metal elastic sheet 410 is greater than the pressure value. At this time, the metal elastic sheet 410 pushes the valve seat 310 to close the port of the inlet valve body 210. When the gas flows back from the outlet valve body 220, since the covering area of the valve seat 310 is larger than the gas channel area of the inlet valve body 210, the valve seat 310 closes the inlet valve body 210, realizing the one-way flow function.

[0042] A seal 311 is arranged at one end of the valve seat 310 close to the inlet valve body 210. The seal 311 and the end of the valve seat 310 are injection-molded with the metal elastic sheet 410, which is arranged on the side of the valve seat 310 close to the outlet valve body 220. The metal elastic sheet 410 is fixed in the valve body accommodating cavity and elastically abuts against the valve seat 310. The metal elastic sheet 410 is provided with at least two channel holes 411, and the channel cross-sectional areas of the channel holes 411 are different.

[0043] Existing valve bodies usually use spring parts to realize the rebound and opening of the valve seat 310. However, the acting force of the spring parts on the valve seat 310 is evenly distributed, so that the minimum opening pressure value of the existing valve body structure cannot be made lower, the accuracy is limited, and it is easy to cause valve resonance and whistling sound, affecting the structural stability and gas transmission efficiency.

[0044] The channel holes 411 of the metal spring 410 of the utility model have different areas, so that when the valve seat 310 pushes the metal spring 410, the deformation thresholds of each area are different. The area with a small threshold will be pushed open first, so that the gas gradually enters the valve core accommodating cavity 120, which can achieve a lower valve opening pressure and effectively avoid the generation of internal notarization and whistling sounds of the valve. The working process is more stable and the gas transmission efficiency is effectively improved.

[0045] The high-purity gas one-way valve of the utility model has a simple design structure, and the material of the sealing member 311 can be selected from different materials according to different requirements. The inner flow channel of the valve body is smooth without dead angles, meeting the cleanliness requirements of semiconductor high-purity pipeline gas.

[0046] In some embodiments of the present invention, Figure 1 and Figure 3 As shown, the seal 311 is made of rubber material, and the seal 311 is secondary molded on the end surface of the valve seat 310. Specifically, in this embodiment, the seal 311 is made of vulcanized rubber and directly forms an integral structure with the valve seat 310. The existing sealing structure usually adopts an assembled structure, that is, a groove is set on the valve seat 310, and the seal 311 is sleeved in the groove. Under the working conditions of large pressure difference and large flow, the assembled sealing structure is easy to deform or separate from the valve seat 310, resulting in failure of the valve body structure function, and because the one-way valve is usually not disassembled to ensure the sealing performance, the seal 311 can only be replaced as a whole after being separated, and the maintenance cost is high.

[0047] The seal 311 in this embodiment forms an integrated structure with the valve seat 310, so that the sealing area of ​​the seal 311 is larger and the stability of the seal 311 is better, which effectively avoids the separation of the seal 311 and the valve seat 310, improves the structural stability of the valve, and increases the service life.

[0048] In some embodiments of the present invention, Figure 1 and Figure 3 As shown, the periphery of the sealing member 311 is an annular protruding structure, and the periphery of the sealing member 311 abuts against the end surface of the inlet valve body 210 to block the passage between the valve core accommodating cavity 120 and the inlet valve body 210 .

[0049] Specifically, the seal 311 is concave toward the valve core accommodating cavity 120 , which can increase the contact area between the seal 311 and the gas, thereby making it easier to feedback pressure value changes, making the valve seat 310 more responsive, and helping to further reduce the opening pressure of the valve seat 310 .

[0050] In some embodiments of the present utility model, the valve seat 310 is made of a metal material and the valve seat 310 moves along the axial direction of the inlet valve body 210. Specifically, the valve seat 310 is made of a metal material, and after being formed integrally with the seal 311, the structural strength is higher and it is not easy to deform.

[0051] In some embodiments of the present utility model, as Figures 1-3 shown, a protruding guide block 313 is provided on one side of the valve seat 310 close to the outlet valve body 220. The guide block 313 is arranged along the periphery of the valve seat 310, and the guide block 313 is embedded in the channel hole 411 of the metal spring piece 410. Specifically, the guide block 313 and the valve seat 310 are integrally formed, and the guide block 313 is fitted with the channel hole 411, which can assist in positioning the position of the metal spring piece 410 and prevent the metal spring piece 410 from rotating excessively.

[0052] In some embodiments of the present utility model, as Figure 1 、 Figure 2 and Figure 4 shown, an installation block 312 is provided in the middle of the valve seat 310. The metal spring piece 410 is provided with an installation hole 412 corresponding to the position of the installation block 312. The installation block 312 is connected to the installation hole 412 to fix the positions of the valve seat 310 and the metal spring piece 410.

[0053] Specifically, after the installation hole 412 of the metal spring piece 410 is connected to the installation block 312 in the middle of the valve seat 310, when the valve seat 310 moves axially, it will push the middle part of the metal spring piece 410, causing the overall deformation of the metal spring piece 410 and connecting the inlet valve body 210 and the outlet valve body 220.

[0054] Furthermore, the metal spring piece 410 is made of a cobalt-chromium-tungsten-nickel-iron alloy. The cobalt-chromium-tungsten-nickel-iron alloy is also known as the Elgiloy alloy, which has the characteristics of high strength, corrosion resistance, high fatigue strength and good elasticity, meeting the high-frequency working requirements of the metal spring piece 410.

[0055] In some embodiments of the present utility model, as Figure 4 shown, the channel hole 411 of the metal spring piece 410 adopts an eccentric structure, and elastic ribs 413 are provided between adjacent channel holes 411. The elastic ribs 413 are respectively connected to the periphery and the middle part of the metal spring piece 410. Specifically, the cross-sectional area of each channel hole is different, and the lengths of the elastic ribs 413 are also different. The elastic ribs 413 and the metal spring piece 410 are integrally cut. When the elastic ribs 413 with longer lengths are subjected to the same force, the degree of deformation is greater than that of the elastic ribs 413 with shorter lengths, thereby realizing the eccentric opening of the metal spring piece 410 and achieving a low opening pressure value.

[0056] In some embodiments of the present utility model, as Figure 1 andFigure 4 As shown, the periphery of the metal shrapnel 410 is fixed to the inner wall of the valve core accommodating cavity 120, and the elastic ribs 413 of the metal shrapnel 410 elastically deform as the valve seat 310 moves. Specifically, the periphery of the metal shrapnel 410 is fixed to the inner wall of the valve core accommodating cavity 120, and only the elastic ribs 413 and the middle area deform following the valve seat 310.

[0057] In some embodiments of the present invention, as Figure 1 shown, a welding connection is adopted between the inlet valve body 210 and the outlet valve body 220, and a welding connection is also adopted between the inlet valve body 210 and the outlet valve body 220 and the short joint 110. Specifically, by using the automatic welding technology, the external leakage between the connecting parts can be effectively eliminated, and the sealing performance and structural stability of the product can be improved.

[0058] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0059] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and purposes of the present invention, and the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A high purity gas one-way valve, characterized in that: include: An inlet valve body (210) is welded to a short joint (110) at one end and is provided with a movable chamber (211) at the other end; An outlet valve body (220) is welded to a short joint (110) at one end and is provided with a channel cavity (221) at the other end; the movable cavity (211) and the channel cavity (221) are welded to each other to form a valve core accommodating cavity (120); gas enters from the inlet valve body (210), passes through the valve core accommodating cavity (120), and is then discharged from the outlet valve body (220); A valve seat (310) is arranged in the valve core accommodating cavity (120), and a sealing member (311) is arranged at one end of the valve seat (310) close to the inlet valve body (210), and the sealing member (311) and the end of the valve seat (310) are injection molded; A metal spring (410) is arranged on a side of the valve seat (310) close to the outlet valve body (220), the metal spring (410) is fixed in the valve body accommodating cavity and elastically abuts against the valve seat (310), the metal spring (410) is provided with at least two channel holes (411), and the channel cross-sectional areas of the channel holes (411) are different; When the gas on one side of the inlet valve body (210) flows toward the outlet valve body (220), the gas pushes the valve seat (310) to deform the metal spring (410), thereby causing the valve core accommodating cavity (120) to communicate with the inlet valve body (210) and the outlet valve body (220), respectively.

2. The high-purity gas one-way valve according to claim 1, characterized in that: The sealing member (311) is made of rubber material and is secondary molded on the end surface of the valve seat (310).

3. The high-purity gas one-way valve according to claim 2, characterized in that: The periphery of the sealing member (311) is an annular protruding structure, and the periphery of the sealing member (311) abuts against the end surface of the inlet valve body (210) to seal the passage between the valve core accommodating cavity (120) and the inlet valve body (210).

4. The high-purity gas one-way valve according to claim 1, characterized in that: The valve seat (310) is made of metal material, and the valve seat (310) moves along the axial direction of the inlet valve body (210).

5. The high-purity gas one-way valve according to claim 4, characterized in that: A protruding guide block (313) is provided on one side of the valve seat (310) close to the outlet valve body (220). The guide block (313) is provided along the periphery of the valve seat (310). The guide block (313) is embedded in the channel hole (411) of the metal spring sheet (410).

6. The high-purity gas one-way valve according to claim 4, characterized in that: A mounting block (312) is provided in the middle of the valve seat (310), and a mounting hole (412) is provided on the metal spring (410) at a position corresponding to the mounting block (312); the mounting block (312) is connected to the mounting hole (412) to fix the positions of the valve seat (310) and the metal spring (410).

7. The high-purity gas one-way valve according to claim 1, characterized in that: The metal spring (410) is made of cobalt-chromium-tungsten-nickel-iron alloy.

8. The high-purity gas one-way valve according to claim 1, characterized in that: The channel holes (411) of the metal spring pieces (410) adopt an eccentric structure, and elastic ribs (413) are arranged between adjacent channel holes (411), and the elastic ribs (413) are respectively connected to the periphery and the middle of the metal spring pieces (410).

9. The high-purity gas one-way valve according to claim 8, characterized in that: The periphery of the metal spring sheet (410) is fixed to the inner wall of the valve core accommodating cavity (120), and the elastic rib (413) of the metal spring sheet (410) elastically deforms following the movement of the valve seat (310).

10. The high-purity gas one-way valve according to any one of claims 1 to 9, characterized in that: The inlet valve body (210) and the outlet valve body (220) are connected by welding, and the inlet valve body (210), the outlet valve body (220) and the short joint (110) are connected by welding.

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