Positioning mechanism, grabbing system and wafer conveying box

Abstract

The embodiment of the utility model relates to logistics conveying equipment in the field of semiconductor manufacturing, in particular to a positioning mechanism, a grabbing system and a wafer conveying box, and the positioning mechanism comprises a positioning device and a detection module. Wherein the positioning device and the detection module are both arranged on a grabbing platform of the grabbing system, and the positioning device is used for positioning an FOUP located at a target position when the grabbing platform descends; the detection module is used for detecting the state of the positioning device when the positioning device positions the FOUP and outputting at least one electric signal to the main control module according to the detected state. Compared with the prior art, the clamping precision of the grabbing platform when the FOUP is grabbed can be guaranteed, the grabbing failure of the grabbing platform is effectively avoided, and after the FOUP is grabbed, the phenomenon that the FOUP is separated from the grabbing platform can be prevented.

Description

Technical Field

[0001] An embodiment of the present utility model relates to a logistics conveying device in the field of semiconductor manufacturing, and particularly to a positioning mechanism, a grasping system, and a wafer transfer cassette. Background Art

[0002] In the semiconductor industry, the use of an automated material handling system (AMHS) to grip a wafer transfer cassette (FOUP) has a direct impact on the reliability, stability, and efficiency of logistics transportation. In the prior art, in the conveying scheme of the FOUP, most often the FOUP is gripped and conveyed. However, the present utility model has found that during the process of gripping the FOUP, since there is only a positioning feedback in terms of the mechanical structure for the gripping of the FOUP, it often leads to the failure of the gripping platform to grip the FOUP, or during the process of gripping and transporting the FOUP, the FOUP will fall off from the gripping platform. The occurrence of such a phenomenon is due to the fact that the gripping platform fails to accurately position the FOUP during gripping, resulting in a deviation when the gripping platform grips the FOUP. Summary of the Utility Model

[0003] In order to solve the above problems or at least partially solve the above technical problems, some embodiments of the present utility model design a positioning mechanism, a grasping system, and a wafer transfer cassette, which can enable the grasping platform to accurately position the FOUP when grasping the FOUP, thereby ensuring the gripping accuracy of the grasping platform when grasping the FOUP and effectively avoiding the phenomenon of gripping failure.

[0004] In order to achieve the above object, some embodiments of the present utility model provide a positioning mechanism, and the positioning mechanism includes:

[0005] A positioning device, which is arranged on the grasping platform of the grasping system and is used for positioning the wafer transfer cassette FOUP at the target position when the grasping platform descends;

[0006] A detection module, which is arranged on the grasping platform and is used for detecting the state of the positioning device when the positioning device positions the FOUP, and outputting at least one electrical signal to the main control module of the grasping system according to the measured state.

[0007] In addition, some embodiments of the present utility model also design a grasping system, including:

[0008] A grasping platform, which can rise or fall in the vertical direction and is used for grasping or releasing the wafer transfer cassette FOUP at the target position when descending;

[0009] A driving mechanism, which is connected to the grasping platform and is used for driving the grasping platform to rise or fall;

[0010] The positioning mechanism as described above;

[0011] The main control module is respectively communicatively connected to the positioning mechanism, the grasping platform and the driving mechanism;

[0012] Wherein, when the driving mechanism drives the grasping platform to descend and enables the positioning mechanism to position the FOUP at the target position, the main control module is used to obtain at least one electrical signal output by the positioning mechanism in real time, and the main control module is further used to control whether the grasping platform grasps the FOUP at the target position when obtaining at least one of the electrical signals.

[0013] In addition, some embodiments of the present invention also design a wafer transfer cassette, and the wafer transfer cassette is provided with a positioning interface, and the positioning interface is used to cooperate with the positioning mechanism as described above, so that the positioning mechanism is used to position the wafer transfer cassette at the target position when the grasping platform descends.

[0014] Compared with the prior art, in the embodiments of the present invention, since a positioning mechanism is provided on the grasping platform, and the positioning mechanism includes: a positioning device and a detection module, the positioning device can position the FOUP at the target position when the grasping platform descends, and the detection module can detect the state of the positioning device when the positioning device positions the FOUP and output at least one electrical signal to the main control module of the grasping system according to the measured state, so that when the main control module receives at least one electrical signal, it can control whether the grasping platform grasps the FOUP at the target position, thereby ensuring the clamping accuracy of the grasping platform when grasping the FOUP, effectively avoiding the phenomenon of grasping failure of the grasping platform, and preventing the FOUP from slipping out of the grasping platform after completing the grasping of the FOUP. Description of the Drawings

[0015] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are only used to illustrate some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other technical features, connection relationships and even method steps not mentioned in these drawings can also be obtained.

[0016] Figure 1 An axonometric schematic diagram of the positioning device and the friction assembly in some embodiments of the present invention;

[0017] Figure 2 An exploded schematic diagram of the positioning device in some embodiments of the present invention;

[0018] Figure 3 In some embodiments of the present utility model, when the contact member is pressed and moves to a preset position, it is an assembly schematic diagram of the positioning device;

[0019] Figure 4 In some embodiments of the present utility model, when the contact member is rebounded to the initial position by the elastic component, it is an assembly schematic diagram of the positioning device;

[0020] Figure 5 In some embodiments of the present utility model, it is an axonometric view when the detection module is assembled with the support frame;

[0021] Figure 6 In some embodiments of the present utility model, when the grasping platform grasps the wafer transfer cassette FOUP, it is an axonometric schematic diagram when the positioning device positions the FOUP;

[0022] Figure 7 is Figure 6 front view schematic diagram;

[0023] Figure 8 In some embodiments of the present utility model, it is a state schematic diagram when the test piece is not detected by the first detection element but is detected by the second detection element;

[0024] Figure 9 In some embodiments of the present utility model, it is a state schematic diagram when the test piece is not detected by the first detection element and the second detection element;

[0025] Figure 10 In some embodiments of the present utility model, it is a state schematic diagram when the test piece is detected by the first detection element but not detected by the second detection element;

[0026] Figure 11 In some embodiments of the present utility model, it is an axonometric schematic diagram of the grasping system;

[0027] Figure 12 In some embodiments of the present utility model, it is a system module block diagram of the grasping system.

[0028] Wherein, 1 is the grasping platform; 11 is the platform body; 111 is the lower surface; 112 is the upper surface.

[0029] 2 is a positioning mechanism; 21 is a positioning device; 211 is a positioning shaft; 212 is a positioning component; 2121 is a bearing seat; 21211 is a sleeve body; 21212 is a flange; 2122 is a positioning seat; 21221 is an annular support plate; 21222 is an annular abutting portion; 21223 is an annular connecting portion; 21224 is a first accommodating groove; 213 is a contact member; 2131 is a second accommodating groove; 2132 is a positioning protrusion; 214 is an elastic component; 2141 is a bracket; 21411 is an upper fixing side; 21412 is a lower fixing side; 21413 is an upper clamping groove; 21414 is a lower clamping groove; 2142 is a first spring; 2143 is a second spring; 215 is a clamping member; 216 is a component to be measured.

[0030] 3 is a support frame; 31 is a first frame body; 32 is a second frame body.

[0031] 4 is a main control module.

[0032] 5 is a driving mechanism; 51 is a hoisting device; 52 is a transmission belt. Detailed implementation manners

[0033] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are some, but not all, of the embodiments of this application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in this application without creative efforts shall fall within the protection scope of this application.

[0034] Embodiment 1

[0035] The first implementation manner of the present utility model provides a positioning mechanism. As Figures 6 to 10 shown, this positioning mechanism 2 includes: a positioning device 21 and a detection module 22. Among them, both the positioning device 21 and the detection module 22 are arranged on the grasping platform 1 of the grasping system, and as Figure 12 shown, this positioning device 21 is used to position the FOUP 100 at the target position when the grasping platform 1 descends. Secondly, as Figure 6 shown, the detection module 22 is used to detect the state of the positioning device 21 when the positioning device 21 positions the FOUP 100, and output at least one electrical signal to the main control module 4 according to the measured state.

[0036] As can be easily seen from the above, since the positioning mechanism 2 is provided on the gripping platform 1, and the positioning mechanism 2 includes: a positioning device 21 and a detection module 22. When the gripping platform 1 descends, the positioning device 21 can position the FOUP 100 at the target position. When the positioning device 21 positions the FOUP 100, the detection module 22 can detect the state of the positioning device 21 and output at least one electrical signal to the main control module 4 of the gripping system according to the measured state. When the main control module 4 receives at least one electrical signal, it can control whether the gripping platform 1 grips the FOUP 100 at the target position, thereby ensuring the clamping accuracy of the gripping platform 1 when gripping the FOUP 100, effectively avoiding the phenomenon of the gripping platform 1 failing to grip, and preventing the FOUP 100 from slipping out of the gripping platform 1 after completing the gripping of the FOUP 100.

[0037] Specifically, in some embodiments, as shown in Figure 12 When positioning the FOUP 100, the detection module 22 can output one or two electrical signals to the main control module 4, that is, during the positioning process of the FOUP 100, continuously output the first electrical signal to the main control module 4, and when the positioning of the FOUP 100 is completed, while continuously outputting the first electrical signal to the main control module 4, also continuously output the second electrical signal to the main control module 4. Thus, the main control module 4 will only control the gripping platform 1 to grip the FOUP 100 at the target position when it simultaneously obtains the first electrical signal and the second electrical signal output by the positioning mechanism 2.

[0038] Moreover, in order to enable the positioning device 21 to position the FOUP 100 at the target position when the gripping platform 1 descends, as shown in Figure 1 、 Figure 2 、 Figure 3 and Figure 4 The positioning device 21 includes: a positioning shaft 211, a positioning component 212, a contact member 213, an elastic component 214, a clamping member 215 and a test piece 216.

[0039] Among them, as shown in Figure 7 The positioning shaft 211 is arranged along the lifting direction of the gripping platform 1 and penetrates through the platform body 11 of the gripping platform 1, so that the positioning shaft 211 can slide along its own axis direction. The positioning component 212 is sleeved on the positioning shaft 211 and fixed to the lower surface 111 of the platform body 11, so that the positioning component 212 can slide relative to the positioning shaft 211 along the axis direction of the positioning shaft 211. In addition, as shown in Figure 7 、 Figures 2 to 4As shown, the contact member 213 is disposed at one end of the positioning shaft 211 away from the lower surface 111 of the platform body 11, and the contact member 213 is movable relative to the positioning assembly 212 through the positioning shaft 211, so that the contact member 213 can abut against the FOUP 100 when the gripping platform 1 grips the FOUP 100. The elastic component 214 is also sleeved on the positioning shaft 211, and the elastic component 214 is also used to be compressible or resilient along the length direction of the positioning shaft 211 and is located between the positioning assembly 212 and the contact member 213.

[0040] Finally, as Figures 2 to 4 shown, the clamping member 215 and the component to be measured 216 are also both disposed on the positioning shaft 211. Among them, the clamping member 215 can be a snap spring and is located above the positioning assembly 212, and the component to be measured 216 is disposed away from the contact member 213. At the same time, in combination with Figure 5 、 Figure 6 、 Figures 8 to 10 shown, the component to be measured 216 is also used to be detected in real time by the detection module 22 when the positioning shaft 211 slides, so that the detection module 22 can output at least one electrical signal to the main control module 4 according to the measured position of the component to be measured 216. In application, when the contact member 213 abuts against the FOUP 100 and is pressed during the downward movement of the gripping platform 1, in combination with Figure 3 and Figure 7 shown, the contact member 213 can move in the direction close to the lower surface 111 of the platform body 11 by means of the sliding fit between the positioning shaft 211 and the positioning assembly 212, and the elastic component 214 can be continuously compressed under the extrusion of the contact member 213. Conversely, when the contact member 213 moves upward on the gripping platform 1, in combination with Figure 4 shown, at this time the contact member 213 no longer abuts against the FOUP 100, thereby relieving the pressed state of the contact member 213, and the elastic component 214 can rebound at this time and drive the contact member 213 to move in the direction away from the lower surface 111 of the platform body 11. When the contact member 213 moves to the initial position in the direction away from the lower surface 111 of the platform body 11, as Figure 4 shown, the clamping member 215 on the positioning shaft 211 can abut against the positioning assembly 212, and at this time the positioning shaft 211 and the positioning assembly 212 are relatively fixed to each other, so that the positioning mechanism 2 can meet the positioning requirements for the subsequent FOUP 100.

[0041] Specifically, in some embodiments, as Figure 1 and Figure 2 shown, the positioning assembly 212 includes: a bearing seat 2121 and a positioning seat 2122. Among them, in combination with Figure 3 and Figure 4As shown, the bearing housing 2121 is sleeved on the positioning shaft 211 and is relatively slidable with respect to the positioning shaft 211. The positioning seat 2122 is coaxially fixed with the bearing housing 2121 and is detachably connected to the lower surface 111 of the platform body 11. For example, the positioning seat 2122 and the platform body 11 can be locked and fixed by bolts. Of course, in other embodiments, the positioning seat 2122 and the platform body 11 can also be detachably connected in other ways. In this embodiment, the connection method between the positioning seat 2122 and the platform body 11 is not specifically limited. In application, in combination with Figure 3 and Figure 4 As shown, the bearing housing 2121 can guide the relative sliding between the positioning shaft 211 and the positioning seat 2122, and at the same time can prevent the positioning shaft 211 from directly contacting the positioning seat 2122 during sliding. When the contact member 213 moves in the direction close to the lower surface 111 of the platform body 11 by means of the positioning shaft 211, the positioning seat 2122 can limit the movement of the contact member 213. And, in some embodiments, as Figure 3 and Figure 4 As shown, one side of the elastic component 214 along the axis direction of the positioning shaft 211 can be abutted against the positioning seat 2122, and the other side of the elastic component 214 along the axis direction of the positioning shaft 211 can be abutted against the contact member 213, so that the elastic component 214 can be compressed by the acting forces exerted on it by the contact member 213 and the positioning seat 2122 when the contact member 213 moves in the direction close to the lower surface 111 of the platform body 11.

[0042] And, in order to coaxially fix the bearing housing 2121 and the positioning seat 2122 along the axis direction of the positioning shaft 211, in some embodiments, as Figures 2 to 4 As shown, the bearing housing 2121 includes: a sleeve body 21211 and a flange portion 21212. Among them, the sleeve body 21211 is sleeved on the positioning shaft 211 and is relatively slidable with respect to the positioning shaft 211. And the sleeve body 21211 has an inner side (not marked in the figure) that slidably cooperates with the positioning shaft 211 and an outer side (not marked in the figure) opposite to the inner side. The flange portion 21212 is formed by a part of the outer side of the sleeve body 21211 protruding away from the inner side.

[0043] Secondly, corresponding to the structure of the sleeve body 21211, as Figure 2 、 Figure 3 and Figure 4As shown, the positioning seat 2122 includes: an annular support plate 21221, an annular abutting portion 21222, and an annular connecting portion 21223. Among them, the annular support plate 21221 is sleeved on the sleeve body 21211 and is detachably connected to the flange portion 21212. Secondly, the annular abutting portion 21222 is formed by a part of the annular support plate 21221 protruding in the direction of the contact member 213 along its circumferential direction. And when the contact member 213 slides towards the lower surface 111 of the platform body 11 to a preset position, the annular abutting portion 21222 can directly abut against the contact member 213. Finally, combined with Figure 2 、 Figure 3 Combined with Figure 4 As shown, the annular connecting portion 21223 is connected to the annular abutting portion 21222 around the circumferential direction of the annular abutting portion 21222 and is detachably connected to the platform body 11. It should be noted that since the annular abutting portion 21222 is formed by a part of the annular support plate 21221 protruding in the direction of the contact member 213 along its circumferential direction, an installation space (not marked in the figure) for installing the elastic component 214 can be formed by the annular abutting portion 21222 on the annular support plate 21221.

[0044] In addition, in order to enable the elastic component 214 to be compressed or rebound under the movement of the contact member 213, in some other embodiments, such as Figure 2 、 Figure 3 And Figure 4 As shown, the elastic component 214 includes: a bracket 2141, a first spring 2142, and a second spring 2143. Among them, the bracket 2141 is sleeved on the positioning shaft 211 along the axis direction of the positioning shaft 211, and the bracket 2141 has an upper fixed side 21411 opposite to the positioning seat 2122 and a lower fixed side 21412 opposite to the contact member 213 along the axis direction of the positioning shaft 211. Among them, the first spring 2142 is sleeved on the positioning shaft 211 along the axis direction of the positioning shaft 211 and is clamped with the upper fixed side 21411 of the bracket 2141. And the second spring 2143 is sleeved on the positioning shaft 211 along the axis direction of the positioning shaft 211 and is clamped with the lower fixed side 21412 of the bracket 2141. And in order to enable the upper fixed side 21411 and the lower fixed side 21412 of the bracket 2141 to clamp the first spring 2142 and the second spring 2143 respectively, in some embodiments, such as Figure 2 As shown, the upper fixed side 21411 of the bracket 2141 is provided with an upper card slot 21413 in the direction close to the lower fixed side 21412. At the same time, the lower fixed side 21412 of the bracket 2141 is provided with a lower card slot 21414 in the direction close to the upper fixed side 21411.

[0045] And corresponding to the structural characteristics of the elastic component 214, such as Figure 3As shown, the length of the sleeve 21211 can be appropriately increased so that a part of the sleeve 21211 can pass through the lower surface of the annular support plate 21221 of the positioning seat 2122, and a first accommodation groove 21224 can be formed between the sleeve 21211 and the annular abutting portion 21222. At the same time, the inner diameter of the first spring 2142 can be appropriately enlarged corresponding to the first accommodation groove 21224 and the sleeve 21211, so that a part of the first spring 2142 can be sleeved on the sleeve 21211 of the bearing seat 2121. It can be seen from this that the first accommodation groove 21224 can accommodate the first spring 2142 when the first spring 2142 is compressed. Similarly, corresponding to the first accommodation groove 21224, a second accommodation groove 2131 can also be provided on the side of the contact member 213 relative to the positioning seat 2122. At the same time, a part of the bottom of the second accommodation groove 2131 protrudes toward the positioning seat 2122 to form a positioning protrusion 2132, so that a part of the second spring 2143 can be sleeved on the positioning protrusion 2132. It can be seen from this that the second accommodation groove 2131 can accommodate the second spring 2143 when the second spring 2143 is compressed.

[0046] In addition, in order to enable the detection module 22 to output at least one electrical signal to the main control module 4 according to the measured position of the workpiece 216 to be measured, in some embodiments, such as Figure 8 , Figure 9 , Figure 10 and Figure 12 shown, the detection module 22 includes: a first detection element 221 and a second detection element 222. Among them, the first detection element 221 and the second detection element 222 are arranged in sequence along the axis direction parallel to the positioning shaft 211, and the first detection element 221 and the second detection element 222 are used to detect the workpiece 216 to be measured respectively when the positioning shaft 211 slides along its own axis. And, in order to fix the first detection element 221 and the second detection element 222 on the platform body 11, in some embodiments, as shown in Figure 5 , a support frame 3 can be provided on the upper surface 112 of the platform body 11 of the grasping platform 1, and the support frame 3 includes: a first frame body 31 and a second frame body 32 arranged on the first frame body 31. Among them, as shown in Figure 5 , the first frame body 31 is used to install and fix the first detection element 221, and the second frame body 32 is used to install and fix the second detection element 222. And, the first detection element 221 can output a first electrical signal when the workpiece 216 to be measured is not detected, while the second detection element 222 can output a second electrical signal when the workpiece 216 to be measured is detected. It can be easily found that, in some embodiments, the electrical signals output by the detection module 22 include: the first electrical signal output by the first detection element 221 and the second electrical signal output by the second detection element 222.

[0047] Therefore, when the gripping platform 1 descends such that the contact member 213 abuts against the FOUP 100 and is pressed, the contact member 213 can, by virtue of the sliding fit between the positioning shaft 211 and the positioning assembly 212, move in the direction approaching the lower surface 111 of the platform body 11. And when the contact member 213 moves in the direction approaching the lower surface 111 of the platform body 11 to a preset position, as Figure 3 shown, the test piece 216 provided on the positioning shaft 211 can be directly detected by the second detection element 222 and cannot be detected by the first detection element 221, as Figure 8 shown in the state, such that the main control module 4 can simultaneously receive the first electrical signal output by the first detection element 221 and the second electrical signal output by the second detection element 222 at this time. And when the pressure applied to the contact member 213 is released, the contact member 213 can, under the elastic return action of the elastic component 214, move in the direction away from the lower surface 111 of the platform body 11. And when the contact member 213 moves in the direction away from the lower surface 111 of the platform body 11 to the initial position, as Figure 4 shown, the test piece 216 provided on the positioning shaft 211 can be directly detected by the first detection element 221 and cannot be detected by the second detection element 222, as Figure 10 shown in the state, such that the main control module 4 can neither receive the first electrical signal nor receive the second electrical signal at this time. And, it is worth noting that when the contact member 213 abuts against the FOUP 100 and is under the pressure of the FOUP 100, such that during the process of the contact member 213 moving in the direction approaching the lower surface 111 of the platform body 11, that is, at this time the contact member 213 has left the initial position but has not yet moved to the preset position and is at an intermediate position between the preset position and the initial position, the test piece 216 at this time cannot be detected by either the first detection element 221 or the second detection element 222, as Figure 9 shown in the state, such that the main control module 4 can only receive the first electrical signal output by the first detection element 221 and cannot receive the second electrical signal.

[0048] From this, it is not difficult to see that since the test piece 216 can only move between the first detection element 221 and the second detection element 222 during the movement of the contact member 213, therefore, if the main control module 4 only receives the first electrical signal, it can control the gripping platform 1 not to grip the FOUP 100 at the target position, while when the main control module receives the first electrical signal and the second electrical signal, it can control the gripping platform 1 to grip the FOUP 100 at the target position.

[0049] And, it should be noted that, in order to enable the first detection element 221 and the second detection element 222 to effectively detect the test piece 216, in some embodiments, as Figures 8 to 10As shown, the first detection element 221 and the second detection element 222 are both opposed type photoelectric switches. Specifically, as Figures 8 to 10 , Figure 12 shown, the first detection element 221 includes: a first light receiving end 2211, a first light emitting end 2212, and a first controller 2213 electrically connected to the first light receiving end 2211 and the first light emitting end 2212 respectively. Among them, the first controller 2213 is also electrically connected to the main control module 4. The first light receiving end 2211 and the first light emitting end 2212 are arranged opposite to each other. The first light emitting end 2212 can emit a light signal towards the first light receiving end 2211, so that the first light receiving end 2211 can receive the light signal emitted by the first light emitting end 2212. Moreover, a first gap 2214 is formed between the first light receiving end 2211 and the first light emitting end 2212. When the workpiece 216 moves along the axis direction of the positioning shaft 211, the first gap 2214 can allow the workpiece 216 to enter, and the light signal emitted by the first light emitting end 2212 can be blocked by the workpiece 216. Similarly, as Figures 8 to 10 , Figure 12 shown, the second detection element 222 includes: a second light receiving end 2221, a second light emitting end 2222, and a second controller 2223. Among them, the second controller 2223 is also electrically connected to the main control module 4. The second light receiving end 2221 and the second light emitting end 2222 are arranged opposite to each other. The second light emitting end 2222 can emit a light signal towards the second light receiving end 2221, so that the second light receiving end 2221 can receive the light signal emitted by the second light emitting end 2222. Moreover, a second gap 2224 is formed between the second light receiving end 2221 and the second light emitting end 2222. When the workpiece 216 moves along the axis direction of the positioning shaft 211, the second gap 2224 can also allow the workpiece 216 to enter, and the light signal emitted by the second light emitting end can be blocked by the workpiece 216.

[0050] Moreover, based on the first electrical signal that the first detection element 221 can output when the component to be measured 216 is not detected, and the second electrical signal that the second detection element 222 can output when the component to be measured 216 is detected, it can be concluded that when the light signal emitted by the first light emitting end 2212 is received by the first light receiving end 2211, it is the state where the first detection element 221 does not detect the component to be measured 216. At this time, the first controller 2213 can output the first electrical signal. On the contrary, when the light signal emitted by the first light emitting end 2212 is blocked by the component to be measured 216 and not received by the first light receiving end 2211, it is the state when the first detection element 221 detects the component to be measured 216. At this time, the first controller 2213 does not output the first electrical signal. Similarly, when the light signal emitted by the second light emitting end 2222 is received by the second light receiving end 2221, it is the state where the second detection element 222 does not detect the component to be measured 216. At this time, the second controller 2213 does not output the second electrical signal. On the contrary, when the light signal emitted by the second light emitting end 2222 is blocked by the component to be measured 216 and not received by the second light receiving end 2221, it is the state when the second detection element 222 detects the component to be measured 216. At this time, the second controller 2213 outputs the second electrical signal.

[0051] For example, when the contact 213 is in the initial position, as Figure 10 shown, at this time the component to be measured 216 is exactly in the first gap 2214 of the first detection element 221, so that the component to be measured 216 can block the light signal emitted by the first light emitting end 2212, resulting in the first light receiving end 2211 being unable to receive this light signal, which means that the first detection element 221 has detected the component to be measured 216 at this time, so that the first controller 2213 of the first detection element 221 at this time will not output the first electrical signal to the main control module 4. And since there is no component to be measured 216 in the second gap 2224 of the second detection element 222 at this time, the light signal emitted by the second light emitting end 2222 can be directly received by the second light receiving end 2221, which means that the second detection element 222 has not detected the component to be measured 216 at this time, so that the second controller 2223 of the second detection element 222 will also not output the second electrical signal to the main control module 4.

[0052] Anyway, when the contact 213 moves to the preset position, as Figure 8As shown, the component under test 216 is exactly in the second gap 2224 of the second detection element 222 at this time, such that the component under test 216 can block the light signal emitted by the second light emitting end 2222, resulting in the second light receiving end 2221 being unable to receive this light signal, which means that the second detection element 222 detects the component under test 216 at this time, enabling the second controller 2223 of the second detection element 222 to output a second electrical signal to the main control module 4. At this time, since there is no component under test 216 in the first gap 2214 of the first detection element 221, the light signal emitted by the first light emitting end 2212 can be directly received by the first light receiving end 2211, which means that the first detection element 221 does not detect the component under test 216 at this time, enabling the first controller 2213 of the first detection element 221 to also output a first electrical signal to the main control module 4.

[0053] Or, when the contact 213 moves to the middle position between the initial position and the preset position, the component under test 216 is exactly between the first detection element 221 and the second detection element 222 at this time, such that the light signal emitted by the first light emitting end 2212 can be received by the first light receiving end 2211, and the light signal emitted by the second light emitting end 2222 can be received by the second light receiving end 2221. That is, at this time, neither the first detection element 221 nor the second detection element 222 detects the component under test 216, enabling the first controller 2213 of the first detection element 221 to output a first electrical signal to the main control module 4, while the second controller 2223 of the second detection element 222 does not output a second electrical signal to the main control module 4.

[0054] It can be easily seen from this that when the grasping platform 1 descends, the detection module 22 can output one or two electrical signals to the main control module 4 according to the state of the positioning device 21 during the positioning of the FOUP 100 at the target position, so that the main control module 4 can effectively control whether the grasping platform 1 grasps the FOUP 100, thereby ensuring the accuracy of the grasping platform 1 when grasping the FOUP 100.

[0055] It should be noted that the first detection element 221 and the second detection element 222 mentioned above are only illustrated by taking the opposed photoelectric switch as an example. For the opposed photoelectric switch, the component to be measured 216 can be an opaque light-shielding member, so that when it moves into the first gap 2214 of the first detection element 221, it can block the light signal emitted by the first light-emitting end 2212, or when it moves into the second gap 2224 of the second detection element 222, it can block the light signal emitted by the second light-emitting end 2222. Of course, in other embodiments, the first detection element 221 and the second detection element 222 can also be other sensing elements. For example, the first detection element 221 and the second detection element 222 can also adopt Hall elements. For the corresponding Hall elements, the component to be measured 216 can also be a metal component that can be sensed by the Hall element. In this embodiment, the types of the first detection element 221, the second detection element 222, and the component to be measured 216 are not specifically limited.

[0056] In addition, as a preferred solution, in some other embodiments, such as Figure 1 and Figure 6 shown, the positioning mechanism 2 further includes: a friction assembly 23. The friction assembly 23 is disposed on the upper surface 112 of the platform body 11. At the same time, the friction assembly 23 is also in contact with the positioning shaft 211, so that when the friction assembly 23 slides along the axial direction of the positioning shaft 211 itself, the radial direction of the positioning shaft 211 can be limited. Specifically, in some embodiments, such as Figure 5 shown, the friction assembly 23 includes: a fixing frame 231 disposed on the upper surface 112 of the platform body 11, and a friction block 232 disposed on the fixing frame 231. And the friction block 232 can always be in contact with the outer surface of the positioning shaft 211. Therefore, through the contact between the friction block 232 and the positioning shaft 211, when the positioning shaft 211 moves along its own axial direction, a certain frictional resistance can be applied to the positioning shaft 211, so as to prevent the positioning shaft 211 from generating radial rotation when moving along its own axial direction, thereby further improving the positioning accuracy of the positioning mechanism 2 when positioning the FOUP 100. It should be noted that in some embodiments, the friction block 232 can adopt a flexible friction member, such as: rubber parts, silicone parts, etc. Of course, it can also be other components with friction characteristics. In this embodiment, the type of the friction block 232 is not specifically limited.

[0057] Embodiment 2

[0058] Embodiment 2 of the present utility model relates to a grasping system, such as Figure 6 and Figure 11 shown, the grasping system includes: a grasping platform 1, a driving mechanism 5, and the positioning mechanism 2 as described in Embodiment 1.

[0059] Among them, the grasping platform 1 can move up or down in the vertical direction and is used to grasp or release the wafer transfer cassette FOUP 100 at the target position when descending. The driving mechanism 5 is connected to the grasping platform 1 and is used to drive the grasping platform 1 to move up or down. Moreover, as shown in Figure 12 the master control module 4 is respectively communicatively connected to the positioning mechanism 2, the grasping platform 1, and the driving mechanism 5.

[0060] When the driving mechanism 5 drives the grasping platform 1 to descend and the positioning mechanism 2 positions the FOUP 100 at the target position, the master control module 4 is used to obtain at least one electrical signal output by the positioning mechanism 2 in real time. The master control module 4 is also used to control whether the grasping platform 1 grasps the FOUP 100 at the target position when obtaining at least one electrical signal.

[0061] It can be easily seen from the above that since the positioning mechanism 2 is provided on the grasping platform 1, and the positioning mechanism 2 includes a positioning device 21 and a detection module 22. The positioning device 21 can position the FOUP 100 at the target position when the grasping platform 1 descends, and the detection module 22 can detect the state of the positioning device 21 when the positioning device 21 positions the FOUP 100 and output at least one electrical signal to the master control module 4 of the grasping system according to the measured state, so that the master control module 4 can control whether the grasping platform 1 grasps the FOUP 100 at the target position when receiving at least one electrical signal, thus ensuring the clamping accuracy of the grasping platform 1 when grasping the FOUP 100, effectively avoiding the phenomenon of grasping failure of the grasping platform 1, and preventing the FOUP 100 from slipping out of the grasping platform 1 after grasping the FOUP 100 is completed.

[0062] Specifically, in some embodiments, as shown in Figure 11 the grasping platform 1 includes a platform body 11 and a clamping mechanism 12 provided on the platform body 11. The driving mechanism 5 includes a hoisting device 51 and a plurality of transmission belts 52 connecting the platform body 11. Among them, the hoisting device 51 is used to wind or release each transmission belt 52. At the same time, as shown in Figure 12 the hoisting device 51 and the clamping mechanism 12 are also communicatively connected to the master control module 4. By controlling the hoisting device 51 through the master control module 4, the hoisting device 51 can drive the grasping platform 1 to move up or down by releasing or winding each transmission belt 52. In addition, when the grasping platform 1 descends to a predetermined position and the positioning mechanism 2 completes the positioning of the FOUP 100, by controlling the clamping mechanism 12 through the master control module 4, the clamping mechanism 12 can also clamp the FOUP 100.

[0063] Embodiment Three

[0064] Embodiment 3 of the present utility model relates to a wafer transfer cassette, as Figure 12 shown. The wafer transfer cassette FOUP 100 is provided with a positioning interface (not labeled in the figure), and the positioning interface is used to cooperate with the positioning mechanism 2 as described in Embodiment 1, so that when the positioning mechanism 2 is used to grab the platform 1 and descend, the FOUP 100 at the target position is positioned.

[0065] It can be easily seen from the above that by means of the positioning interface (not labeled in the figure) provided on the FOUP 100, when the grabbing platform 1 descends, the positioning interface can cooperate with the contact member 213 on the positioning mechanism 2 on the grabbing platform 1, so that the positioning mechanism 2 can achieve the positioning of the FOUP 100, and thus when the grabbing platform 1 grabs the FOUP 100, the grabbing accuracy of the grabbing platform 1 for the FOUP 100 can be further improved.

[0066] Specifically, in some embodiments, the outer shape of the positioning interface should be adapted to the outer shape of the contact member 213. As shown in combination with Figure 7 the figure, the contact member 213 can be inserted into the positioning interface, and the contact member 213 and the FOUP 100 can be relatively fixed to each other, so as to ensure the grabbing accuracy when the grabbing platform 1 grabs the FOUP 100. And it should be noted that in some embodiments, the contact member 213 can be a flexible component, so that after the contact member 213 is inserted into the positioning interface 1001, it can be in flexible contact with the FOUP 100, so as to ensure the positioning performance of the contact member 213 for the FOUP 100 while avoiding the FOUP 100 being damaged by the contact member 213 when contacting the contact member 213, thereby improving the protection performance for the FOUP 100.

[0067] Finally, it should be noted that those of ordinary skill in the art can understand that in order to enable readers to better understand the present application, many technical details are proposed in the embodiments of the present application. However, even without these technical details and various changes and modifications based on the above embodiments, the technical solutions required to be protected by the claims of the present application can be basically realized. Therefore, in practical applications, various changes can be made to the above embodiments in form and details without departing from the spirit and scope of the present application.

Claims

1. A positioning mechanism, characterized in that: The positioning mechanism comprises: A positioning device is provided on the gripping platform of the gripping system, and is used to position the wafer transfer box FOUP at the target position when the gripping platform descends; The detection module is arranged on the grasping platform, and is used to detect the state of the positioning device when the positioning device is positioning the FOUP, and output at least one electrical signal to the main control module of the grasping system according to the detected state.

2. The positioning mechanism according to claim 1, characterized in that: The positioning device comprises: A positioning shaft is provided along the lifting direction of the grabbing platform, penetrates the platform body of the grabbing platform, and can slide along its own axis direction; A positioning assembly, which is sleeved on the positioning shaft and fixed to the lower surface of the platform body, and is slidable relative to the positioning shaft along the axial direction of the positioning shaft; A contact member is disposed at an end of the positioning shaft away from the lower surface of the platform body and is movable relative to the positioning assembly through the positioning shaft; the contact member is used to abut against the FOUP when the grabbing platform grabs the FOUP; An elastic component, sleeved on the positioning shaft and located between the positioning component and the contact, and used for being compressible or rebounding along the length direction of the positioning shaft; A clamping member, arranged on the positioning shaft and located above the positioning assembly; The piece to be tested is arranged on the positioning shaft and away from the contact piece, so as to be detected by the detection module in real time when the positioning shaft slides; Wherein, when the contact member is pressed and moves toward the direction close to the lower surface of the platform body, the elastic component is compressed; When the contact piece is released from pressure, the elastic component rebounds and drives the contact piece to move in the direction away from the lower surface of the platform body. The clamping piece is used to abut against the positioning component when the contact piece moves in the direction away from the lower surface of the platform body to the initial position, so that the positioning shaft and the positioning component are relatively fixed.

3. The positioning mechanism according to claim 2, characterized in that: The positioning component comprises: A bearing seat is sleeved on the positioning shaft and is slidable relative to the positioning shaft; A positioning seat, coaxially fixed with the bearing seat and detachably connected to the lower surface of the platform body; The elastic component abuts against the positioning seat on one side along the axial direction of the positioning shaft, and the elastic component abuts against the contact piece on the other side along the axial direction of the positioning shaft.

4. The positioning mechanism according to claim 3, characterized in that: The bearing seat comprises: A sleeve body is sleeved on the positioning shaft and is slidable relative to the positioning shaft; the sleeve body has an inner side that is slidably matched with the positioning shaft and an outer side that is opposite to the inner side; A flange portion, formed by a portion of the outer side of the sleeve protruding in a direction away from the inner side; The positioning seat comprises: An annular support plate, sleeved on the sleeve body and detachably connected to the flange portion; An annular abutment portion is formed by the annular support plate partially protruding toward the contact member along its circumference, and is used to abut against the contact member when the contact member slides toward the lower surface of the platform body to a preset position; An annular connecting portion is connected to the annular abutting portion around the circumference of the annular abutting portion and is detachably connected to the platform body.

5. The positioning mechanism according to claim 4, characterized in that: The elastic component comprises: A bracket is sleeved on the positioning shaft along the axial direction of the positioning shaft; the bracket has an upper fixed side opposite to the positioning seat and a lower fixed side opposite to the contact member along the axial direction of the positioning shaft; A first spring is sleeved on the positioning shaft along the axial direction of the positioning shaft and is clamped with the upper fixed side of the bracket; The second spring is sleeved on the positioning shaft along the axial direction of the positioning shaft and is clamped with the lower fixed side of the bracket.

6. The positioning mechanism according to claim 5, characterized in that: The annular abutting portion is also separated from the sleeve to form a first accommodating groove, the first accommodating groove is used to receive the first spring when the first spring is compressed, and the first spring is also partially sleeved on the sleeve; The contact member is provided with a second accommodating groove on one side relative to the positioning seat, and the second accommodating groove is used to accommodate the second spring when the second spring is compressed. A portion of the bottom of the second accommodating groove protrudes toward the positioning seat to form a positioning protrusion that is partially sleeved by the second spring.

7. The positioning mechanism according to claim 2, characterized in that: The detection module comprises: The first detection element and the second detection element are sequentially arranged along the axial direction parallel to the positioning shaft, and are used to respectively detect the piece to be tested when the positioning shaft slides along its own axial direction; wherein the electrical signal includes: a first electrical signal output when the first detection element does not detect the piece to be tested, and a second electrical signal output when the second detection element detects the piece to be tested; Wherein, when the tested piece is used for the elastic component to rebound and drive the contact piece to move in a direction away from the lower surface of the platform body to the initial position, it is detected by the first detection element and is not detected by the second detection element; The test piece is also used for being detected by the second detection element and not being detected by the first detection element when the contact piece is pressed and moves to a preset position in a direction close to the lower surface of the platform body; The test piece is also used for not being detected by the first detection element and the second detection element when the contact piece is pressed and moves toward the lower surface of the platform body to an intermediate position between the preset position and the initial position.

8. The positioning mechanism according to claim 7, characterized in that: The first detection element is a through-beam photoelectric switch, and the first detection element includes: The first light receiving end and the first light emitting end are arranged opposite to each other; the first light emitting end is used to emit a light signal to the first light receiving end, and a first gap is formed between the first light emitting end and the first light receiving end, and the first gap is used for the test piece to enter when the test piece moves along the axial direction of the positioning axis, and blocks the light signal emitted by the first light emitting end; A first controller is electrically connected to the first light receiving end, the first light emitting end and the main control module respectively; Wherein, the first controller is used to output a first electrical signal when the light signal emitted by the first light emitting end is received by the first light receiving end; The first controller is further configured to not output a first electrical signal when the light signal emitted by the first light emitting end is blocked by the device under test and is not received by the first light receiving end.

9. The positioning mechanism according to claim 7, characterized in that: The second detection element is a through-beam photoelectric switch, and the second detection element includes: The second light receiving end and the second light emitting end are arranged opposite to each other; the second light emitting end is used to emit a light signal to the second light receiving end, and a second gap is formed between the second light emitting end and the second light receiving end, and the second gap is used for the entry of the test piece when the test piece moves along the axial direction of the positioning axis, and blocks the light signal emitted by the second light emitting end; A second controller is electrically connected to the second light receiving end, the second light emitting end and the main control module respectively; Wherein, the second controller is used for not outputting a second electrical signal when the light signal emitted by the second light emitting end is received by the second light receiving end; The second controller is further configured to output a second electrical signal when the light signal emitted by the second light emitting end is blocked by the device under test and is not received by the second light receiving end.

10. The positioning mechanism according to any one of claims 2 to 9, characterized in that: The positioning mechanism also includes: The friction component is arranged on the upper surface of the platform body and abuts against the outer surface of the positioning shaft, and is used for limiting the radial direction of the positioning shaft when the positioning shaft slides along its own axial direction.

11. A gripping system, characterized in that: include: The grabbing platform can rise or fall in the vertical direction and is used to grab or release the wafer transfer box FOUP at the target position when descending; A driving mechanism, connected to the grabbing platform, and used to drive the grabbing platform to rise or fall; The positioning mechanism according to any one of claims 1 to 10; The main control module is communicatively connected with the positioning mechanism, the grabbing platform and the driving mechanism respectively; Among them, when the driving mechanism drives the grabbing platform to descend and enables the positioning mechanism to position the FOUP at the target position, the main control module is used to obtain at least one electrical signal output by the positioning mechanism in real time. The main control module is also used to control whether the grabbing platform grabs the FOUP at the target position when obtaining at least one of the electrical signals.

12. A wafer transfer box, characterized in that: The wafer transfer box FOUP is provided with a positioning interface, and the positioning interface is used to cooperate with the positioning mechanism described in any one of claims 1-10, so that the positioning mechanism is used to position the FOUP at the target position when the grabbing platform descends.

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