Detection device

Abstract

The utility model relates to a detection device, and the device comprises a housing which is provided with a detection port; the sensor is arranged in the shell, the sensor is provided with a detection part, the detection part faces the detection opening, a detection channel is formed between the detection part and the detection opening, and the detection channel extends out of the shell through the detection opening to form a detection area; the air screen generator is connected to the shell, the air screen generator is provided with an airflow output end, and the airflow output end is located on one side of the detection port and can output airflow to form an air screen; and the gas screen separates the part of the detection area away from the detection part from the detection part. The shell and the gas screen formed by the gas screen generator can jointly block sputtered waste liquid and atomized water vapor outside the shell, and the gas screen allows light to pass through, so that the detection device can be arranged at a position closer to the main roller and can detect the state of the wire duct, thereby preventing wire jumping and / or doubling caused by damage of the wire duct, and improving the slicing quality.

Description

Technical Field

[0001] The present application relates to the technical field of wire cutting machines, and particularly to a detection device. Background Art

[0002] With the development of the semiconductor industry and the photovoltaic industry, wafers such as silicon wafers, silicon carbide wafers, and sapphire wafers are more and more widely used. At present, a common process for producing wafers is as follows: first, a crystal bar is produced, and then the crystal bar is cut into wafers by wire cutting technology. Different from traditional cutting methods such as saw blades and grinding wheels, and also different from laser cutting and internal circle cutting, wire cutting technology uses a cutting wire moving at a high speed on a main roller (usually a diamond wire attached with a cutting edge material or a tungsten wire attached with a cutting edge material) to rub against the crystal bar, so as to achieve the cutting effect. During the whole process, multiple cutting wires form a wire mesh on the main roller, and the crystal bar to be cut is fed downward by a workbench towards the wire mesh and is cut into multiple wafers by the wire mesh. Compared with other technologies, wire cutting technology has the advantages of high efficiency, high productivity, and high precision.

[0003] Specifically, a plurality of wire grooves are provided on the main roller, and each wire groove is provided with a cutting wire, and the multiple cutting wires form a wire mesh. During the process of cutting the crystal bar into wafers, due to various problems such as equipment, process, and materials, the cutting wires in the wire grooves may jump wires and / or merge wires, resulting in a reduction in the slicing quality. Some existing wire cutting machines are provided with a detection device to detect the state of the wire mesh, so as to judge whether wire jumping or wire merging has occurred during the cutting process, and to interrupt or adjust the cutting process in a timely manner to avoid continuous slicing in the case of wire jumping or wire merging and reducing the slicing quality. However, when the detection device detects the situation of wire jumping or wire merging, the situation of wire jumping or wire merging has already occurred, and the quality of the cut wafers has already been reduced.

[0004] Wire groove damage is a common cause of wire jumping and wire merging. It can be considered to detect the state of the wire groove to prevent the occurrence of wire jumping and wire merging, thereby improving the slicing quality. However, the detection device needs to be set at a position relatively close to the wire groove (that is, a position relatively close to the main roller) to detect the state of the wire groove, and there are sputtered waste liquid and atomized water vapor near the main roller, and these waste liquid and water vapor are easily attached to the detection part of the sensor, resulting in the detection device being unable to detect the state of the wire groove. Summary of the Utility Model

[0005] Based on this, in view of the above problems, it is necessary to provide a detection device applied to a wire cutting machine, which can prevent waste liquid and water vapor from adhering to the detection part, so that the detection device can be set at a position relatively close to the main roller to detect the state of the wire groove, thereby preventing the occurrence of wire jumping and / or wire merging caused by wire groove damage and improving the slicing quality.

[0006] In order to solve the above problems, the present application provides the following technical solutions:

[0007] A detection device is applied to a wire cutting machine. The detection device includes:

[0008] A housing provided with a detection port thereon;

[0009] A sensor disposed inside the housing. The sensor has a detection part facing the detection port. A detection channel is formed between the detection part and the detection port, and the detection channel extends out of the housing through the detection port to form a detection area; and

[0010] An air screen generator connected to the housing. The air screen generator has an air flow output end. The air flow output end is located on one side of the detection port and can output an air flow to form an air screen; the air screen separates the part of the detection area away from the detection part from the detection part.

[0011] The detection device has at least the following beneficial effects: The housing and the air screen formed by the air screen generator can jointly block the sputtered waste liquid and atomized water vapor outside the housing, thereby preventing the waste liquid and water vapor from adhering to the detection part and interfering with the sensor's detection. Moreover, the air screen allows light to pass through. The light reflected by the wire groove and wire mesh can sequentially pass through the detection area, the detection port, and the detection channel to reach the detection part, thereby allowing the sensor to complete the detection. In this way, the detection device can be arranged closer to the main roller and can detect the state of the wire groove and the state of the wire mesh, thereby preventing the occurrence of wire jumping and / or wire merging caused by wire groove damage and improving the slicing quality.

[0012] In addition, due to Bernoulli's principle, the air pressure near the air screen is relatively low, which makes the atomized water vapor more likely to float towards the air screen rather than towards the housing. After the water vapor floats to the air screen, it will be blown by the air screen to an area away from the housing, which is beneficial to preventing the water vapor from entering the housing.

[0013] In one embodiment, a part of the bottom side of the housing protrudes to form a hollow dirt-blocking structure. The hollow part of the dirt-blocking structure forms a hollow channel. One end of the hollow channel away from the detection part forms the detection port, and the hollow channel participates in forming the detection channel.

[0014] With this arrangement, whether the waste liquid splashes clockwise or counterclockwise, it will be blocked by the dirt-blocking structure. Moreover, when using the detection device to closely detect the state of the wire groove, only need to make the dirt-blocking structure close to the main roller, which allows an appropriate distance to be reserved between the sensor and the main roller. Even if a small amount of sputtered waste liquid breaks through the air screen, it is difficult to splash onto the sensor, which is beneficial to protecting the sensor.

[0015] In one embodiment, the hollow channel gradually contracts along the direction from the detection part towards the detection port.

[0016] With such an arrangement, on the one hand, the portion of the hollow channel away from the detection portion is narrower, which is beneficial for preventing waste liquid and water vapor from entering the shell; on the other hand, the portion of the hollow channel close to the detection portion is wider, which provides a larger working space for the sensor, so that light reflected at a larger angle can also reach the detection portion through the hollow channel without being blocked by the portion of the hollow channel close to the detection portion.

[0017] In one of the embodiments, the gas screen generator is disposed outside the shell, and the gas screen is located below the dirt blocking structure and separates the detection port from the detection area.

[0018] Such an arrangement is helpful to prevent water vapor from entering the shell.

[0019] In one of the embodiments, the air flow output end is arranged in the shell, and the air screen generator blows air toward the outside of the shell to form the air screen, and the air screen separates the detection port and the detection area.

[0020] Such an arrangement is helpful to prevent water vapor from entering the shell.

[0021] In one of the embodiments, the detection device further includes a baffle, which is at least partially located in the hollow channel and is rotatably connected to the shell or the dirt-blocking structure to open and close the hollow channel.

[0022] With such arrangement, the opening and closing of the hollow channel can be controlled by rotating the baffle.

[0023] In one embodiment, the detection device further includes a first driving member and a first connecting rod, wherein the first driving member is linearly movably connected to the shell or the dirt blocking structure, and both ends of the first connecting rod are rotatably connected to the first driving member and the baffle respectively.

[0024] With such an arrangement, the first driving member can move linearly, thereby driving the first connecting rod to rotate, and further driving the baffle to rotate to open and close the hollow channel.

[0025] In one of the embodiments, the sensor is rotatably disposed on the housing.

[0026] With such a configuration, the direction of the detection part can be adjusted by rotating the sensor. On the one hand, when only a single detection is required, it is convenient to adjust the direction of the detection part to a direction that is conducive to detection. On the other hand, when multiple detections are required, the direction of the detection part can be adjusted multiple times so that the detection part is directed to different areas at different times, thereby increasing the detection range and avoiding detection blind spots.

[0027] In one embodiment, the detection device further includes a second driving member and a second connecting rod. The second driving member is connected to the housing in a linearly movable manner. The sensor is rotatably connected to the housing. Two ends of the second connecting rod are respectively rotatably connected to the sensor and the second driving member.

[0028] With such an arrangement, the second driving member can move linearly, thereby driving the second connecting rod to move, and further driving the sensor to rotate to adjust the orientation of the detection portion.

[0029] In one embodiment, a light-transmitting plate made of a transparent material is fixedly provided on the sensor, and the light-transmitting plate is located below the detection portion.

[0030] With such an arrangement, even if liquid enters the housing due to an accident, the light-transmitting plate can block the liquid, thereby playing a role in protecting the detection portion. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 is a perspective schematic diagram of a wire cutting machine according to an embodiment of the present application;

[0032] Figure 2 is Figure 1 a schematic diagram of the positional relationship of some structures in the wire cutting machine shown;

[0033] Figure 3 is Figure 2 a perspective schematic diagram of the detection device and the movable arm in;

[0034] Figure 4 is Figure 3 an enlarged schematic diagram at A in;

[0035] Figure 5 is a schematic diagram of the positional relationship between the air screen and the detection port according to an embodiment of the present application;

[0036] Figure 6 is a schematic diagram of the positional relationship between the air screen and the detection port according to an embodiment of the present application;

[0037] Figure 7 is a schematic diagram of the positional relationship between the air screen and the detection port according to an embodiment of the present application;

[0038] Figure 8 is Figure 7 an enlarged schematic diagram at B in;

[0039] Figure 9 is Figure 4 a schematic diagram of the connection relationship between the baffle, the first connecting rod, and the first driving member in;

[0040] Figure 10 is a schematic diagram of the connection relationship between the first main roller, the second main roller, and multiple cutting wires;

[0041] Figure 11 For Figure 10 An enlarged schematic view of location C in

[0042] Reference numerals:

[0043] 1. Detection device; 11. Housing; 111. Anti-fouling structure; 1111. Hollow channel; 11111. Detection port; 12. Sensor; 121. Detection part; 13. Detection channel; 14. Air screen generator; 141. Airflow output end; 15. Baffle; 16. First electric push rod; 161. First driving part; 17. First connecting rod; 18. Second electric push rod; 181. Second driving part; 19. Second connecting rod; 110. Transparent plate;

[0044] 2. Cutting chamber; 21. Frame; 22. First main roller; 221. First wire groove; 23. Second main roller; 231. Second wire groove; 24. Wire mesh; 241. Cutting wire; 25. Cutting area;

[0045] 3. Linear module; 31. Third driving part;

[0046] 4. Movable arm; 41. Rotating joint; 42. Translating joint; 43. First end; 44. Second end;

[0047] 5. Detection area;

[0048] 6. Air screen;

[0049] 7. Channel. Detailed implementation manners

[0050] To make the above objects, features, and advantages of the present application more obvious and understandable, the following will describe the detailed implementation manners of the present application in conjunction with the accompanying drawings. Many specific details are set forth in the following description to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0051] In the description of the present application, it should be understood that the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application.

[0052] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0053] In the present application, unless otherwise clearly specified and defined, terms such as "mounted", "connected", "coupled", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0054] In the present application, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0055] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there can also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are only for illustrative purposes and do not represent the only implementation.

[0056] Referring to Figure 1 , the present application provides a detection device 1 and a wire cutting machine applied to a wire cutting machine. The wire cutting machine includes a cutting chamber 2 and a detection device 1.

[0057] Referring to Figure 1 , Figure 2 , Figure 10 and Figure 11 , the cutting chamber 2 includes a frame 21, a first main roller 22, a second main roller 23 and a plurality of cutting wires 241. The first main roller 22 and the second main roller 23 are both rotatably connected to the frame 21. A plurality of first wire grooves 221 are provided on the first main roller 22, and a plurality of second wire grooves 231 corresponding to the first wire grooves 221 are provided on the second main roller 23. The same cutting wire 241 is provided in each first wire groove 221 and the corresponding second wire groove 231. The first main roller 22 and the second main roller 23 are arranged in parallel to form a cutting area 25 therebetween, and the plurality of cutting wires 241 form a wire mesh 24 in the cutting area 25. During the operation of the wire cutting machine, the first main roller 22 and the second main roller 23 drive the cutting wires 241 to rotate at a high speed, and the ingot is fed downward from a position above the wire mesh 24 and is cut into a plurality of wafers by the wire mesh 24.

[0058] Referring to Figure 1 , the detection device 1 is located in the cutting chamber 2 and can move relative to the first main roller 22 in a direction parallel to the axial direction of the first main roller 22. The detection device 1 includes a housing 11 and a sensor 12. A detection port 11111 is provided on the housing 11. The sensor 12 is provided in the housing 11 and has a detection portion 121. The detection portion 121 faces the detection port 11111, and a detection channel 13 is formed between the detection portion 121 and the detection port 11111. The detection channel 13 extends outward from the detection port 11111 to form a detection area 5 outside the housing 11. The light reflected by an external object enters the housing 11 through the detection port 11111 and reaches the detection portion 121. The sensor 12 obtains the state information of the external object by receiving the light reflected by the external object. Exemplarily, the sensor 12 is a laser sensor or an image sensor.

[0059] Referring to Figures 2 to 4, the detection device 1 further includes an air screen generator 14. The air screen generator 14 is connected to the housing 11 and has an air flow output end 141. The air flow output end 141 is located on one side of the detection port 11111 and can output an air flow to form an air screen 6. The air screen 6 separates the part of the detection area 5 away from the detection part 121 from the detection part 121. Exemplarily, the air screen generator 14 is an air knife or a gas knife.

[0060] Refer to Figure 2 , the detection device 1 can be located above the first main roller 22, and its detection part 121 faces the first wire groove 221. The detection device 1 can also be located above the second main roller 23, and its detection part 121 faces the second wire groove 231.

[0061] In the detection device provided in the present application, the housing 11 and the air screen 6 formed by the air screen generator 14 can jointly block the sputtered waste liquid and atomized water vapor outside the housing 11, thereby preventing the waste liquid and water vapor from adhering to the detection part 121 and interfering with the detection by the sensor 12. Moreover, the air screen 6 allows light to pass through. The light reflected by the wire groove (the first wire groove 221 or the second wire groove 231) and the wire mesh 24 can sequentially pass through the detection area 5, the detection port 11111 and the detection channel 13 and reach the detection part 121, thereby allowing the sensor 12 to complete the detection. In this way, the detection device 1 can be arranged closer to the main roller and can detect the state of the wire groove and the state of the wire mesh 24, thereby preventing the occurrence of jumper and / or parallel wire caused by wire groove damage and improving the slicing quality.

[0062] It is worth mentioning that due to the Bernoulli principle, the air pressure near the air screen 6 is relatively low, which makes the atomized water vapor more likely to float towards the air screen 6 rather than towards the housing 11. After the water vapor floats to the air screen 6, it will be blown by the air screen 6 to an area away from the housing 11, which is beneficial to preventing the water vapor from entering the housing 11.

[0063] When it is found that the wire groove is severely damaged, the cutting process is interrupted in time and the main roller is replaced to ensure the slicing quality.

[0064] Exemplarily, the frame 21 can be fixed to the ground by anchor bolts.

[0065] Preferably, during the operation of the wire cutting machine, the distance between the lowest position on the detection port 11111 and the plane where the wire mesh 24 is located is less than or equal to 20 mm.

[0066] In some embodiments, the sensor 12 is a laser sensor. The sensor 12 emits a laser beam towards the wire groove and the wire mesh 24, and measures the time difference between the emission and reception of the laser beam, so as to detect the distance between the wire groove and the wire mesh 24 relative to the detection part 121. The state of the wire groove and the wire mesh 24 can be detected through data simulation imaging. It is worth mentioning that the sputtered waste liquid and atomized water vapor will cause the scattering of the laser. In the embodiment where the sensor 12 is a laser sensor, the farther the distance between the detection part 121 and the detection object, the more waste liquid and water vapor there are between the detection part 121 and the detection object, and the more serious the laser scattering phenomenon is, resulting in a decrease in detection accuracy or inability to detect. In the wire cutting machine provided in the present application, the detection device 1 can be arranged closer to the main roller, so as to shorten the detection distance and significantly reduce the adverse impact of waste liquid and water vapor on the detection accuracy.

[0067] In other embodiments, the sensor 12 is an image sensor. The sensor 12 captures the light reflected by the wire groove and the wire mesh 24, and uses optical imaging and image processing technologies to obtain the state information of the wire groove and the wire mesh 24, so as to detect the state of the wire groove and the wire mesh 24.

[0068] Preferably, referring to Figure 4 , a light-transmitting plate 110 made of a transparent material is fixedly arranged on the sensor 12, and the light-transmitting plate 110 is located below the detection part 121. In this way, even if liquid enters the housing 11 due to an accident, the light-transmitting plate 110 can block the liquid, thereby playing a role in protecting the detection part 121. Exemplarily, the light-transmitting plate 110 is made of glass or acrylic.

[0069] Referring to Figure 3 and Figure 4 , a part of the bottom side of the housing 11 protrudes to form a hollow dirt-proof structure 111. The hollow part of the dirt-proof structure 111 forms a hollow channel 1111. One end of the hollow channel 1111 far from the detection part 121 forms a detection port 11111, and the hollow channel 1111 participates in forming a detection channel 13. In this way, whether the waste liquid splashes clockwise or counterclockwise, it will be blocked by the dirt-proof structure 111. Moreover, when using the detection device 1 to detect the state of the wire groove at a short distance, only need to make the dirt-proof structure 111 close to the main roller, which allows an appropriate distance to be reserved between the sensor 12 and the main roller. Even if a small amount of sputtered waste liquid breaks through the air screen 6, it is difficult to splash onto the sensor 12, which is beneficial to protecting the sensor 12.

[0070] Referring to Figure 3 and Figure 4, the hollow channel 1111 gradually contracts along the direction of the detection part 121 towards the detection port 11111. On the one hand, this makes the part of the hollow channel 1111 far from the detection part 121 narrower, which is beneficial to preventing waste liquid and water vapor from entering the housing 11; on the other hand, this makes the part of the hollow channel 1111 close to the detection part 121 wider, which provides a larger working space for the sensor 12, enabling light reflected at a larger angle to also pass through the hollow channel 1111 and reach the detection part 121 without being blocked by the part of the hollow channel 1111 close to the detection part 121.

[0071] Refer to Figure 4 , the air screen generator 14 is arranged outside the housing 11, and the air screen 6 is completely located below the dirt blocking structure 111. In these embodiments, preferably, as Figure 4 shown, the air screen 6 fits with the detection port 11111 to block the hollow channel 1111, and almost all of the detection area 5 is located below the air screen 6, thus isolating the detection port 11111 from the detection area 5, which is beneficial to preventing water vapor from entering the housing 11; optionally, as Figure 5 shown, there may also be a small distance between the air screen 6 and the detection port 11111, but in order to prevent water vapor from entering the housing 11, the distance between the air screen 6 and the detection port 11111 is less than or equal to 2 mm. Except for the part between the air screen 6 and the detection port 11111 and the part passed by the air screen 6, the entire detection area 5 is located below the air screen 6.

[0072] Refer to Figure 6 and Figure 7 , in some embodiments, the air flow output end 141 of the air screen generator 14 is arranged inside the housing 11, and the air screen generator 14 blows air towards the outside of the housing 11 to form the air screen 6. In these embodiments, preferably, as Figure 6 shown, the air screen 6 blows out of the detection device 1 against the detection port 11111 to block the hollow channel 1111, and almost all of the detection area 5 is located below the air screen 6, thus isolating the detection port 11111 from the detection area 5, which is beneficial to preventing water vapor from entering the housing 11; optionally, as Figure 8 shown, it is also allowed that the air screen 6 and the edge of the detection port 11111 jointly enclose a channel 7 that connects the inside and outside of the housing 11, but in order to prevent water vapor from entering the housing 11, the width / radius of this channel 7 is less than or equal to 2 mm. Except for the part between the air screen 6 and the detection port 11111 and the part passed by the air screen 6, the entire detection area 5 is located below the air screen 6.

[0073] Refer to Figure 3 and Figure 4, the detection device 1 further includes a baffle 15. The baffle 15 is at least partially located in the hollow channel 1111 and is rotatably connected to the housing 11 or the dirt-retaining structure 111 to open and close the hollow channel 1111. In this way, the opening and closing of the hollow channel 1111 can be controlled by rotating the baffle 15. Refer to Figure 4 , when it is necessary to use the detection device 1 for detection, rotate the baffle 15 clockwise to open the hollow channel 1111. After the detection device 1 completes the detection, the baffle 15 can be rotated counterclockwise to close the hollow channel 1111, thereby preventing the splashed waste liquid and atomized water vapor from adhering to the detection part 121. At this time, the air screen generator 14 can be turned off to save energy.

[0074] Refer to Figure 4 and Figure 9 , the detection device 1 further includes a first driving member 161 and a first connecting rod 17. The first driving member 161 is slidably connected to the housing 11 or the dirt-retaining structure 111. Two ends of the first connecting rod 17 are respectively rotatably connected to the first driving member 161 and the baffle 15. The baffle 15 is at least partially located in the hollow channel 1111 and is rotatably connected to the housing 11 or the dirt-retaining structure 111. In this way, the first driving member 161 can be linearly moved, so as to drive the first connecting rod 17 to rotate, and further drive the baffle 15 to rotate to open and close the hollow channel 1111.

[0075] Refer to Figure 4 and Figure 9 , in some embodiments, the detection device 1 includes a first electric push rod 16. The seat body of the first electric push rod 16 is fixedly arranged inside the housing 11, and the first driving member 161 is the push rod of the first electric push rod 16. In other embodiments, the detection device 1 includes a first cylinder. The cylinder body of the first cylinder is fixedly arranged inside the housing 11, and the first driving member 161 is the piston rod of the first cylinder.

[0076] In other embodiments, the first driving member 161 is telescopically connected to the housing 11. When the first driving member 161 expands and contracts, it drives the first connecting rod 17 to rotate, thereby driving the baffle 15 to rotate to open and close the hollow channel 1111.

[0077] It is worth mentioning that by adopting the method of rotating the baffle 15 to open and close the hollow channel 1111, the first driving member 161 only needs to move a short distance. In other words, this enables the first driving member 161 to complete the operation within a limited length space.

[0078] In other embodiments, the baffle 15 can also be slidably connected to the housing 11 or the dirt-retaining structure 111 and can slide into the hollow channel 1111, and the opening and closing of the hollow channel 1111 is realized by sliding the baffle 15.

[0079] Since the wire mesh 24 bears the downward pressure of the ingot during the ingot cutting process, the cutting wire 241 will undergo a certain elastic stretching during cutting to form a wire bow. When the wire bow is too large, the tension of the cutting wire 241 is too large, and the cutting wire 241 is prone to breakage. When the wire bow is too small, the cutting efficiency is low, and the slicing quality may be poor. When the wire bows of the cutting wires 241 in the wire mesh 24 are of different sizes, the tensions of the cutting wires 241 are not uniform, which is also likely to cause problems such as breakage of the cutting wire 241 and reduction of cutting quality. Therefore, in addition to jumper wires and parallel wires reducing the slicing quality, abnormal wire bow conditions will also reduce the slicing quality. Therefore, detecting the wire bow to ensure slicing under normal wire bow conditions is also beneficial to improving the slicing quality. For the detection device 1 provided in this application, by bringing it close to the wire groove and ensuring that the wire groove and the wire bow are both within the field of view of the detection part 121, the wire groove condition and the wire bow condition can be detected simultaneously.

[0080] Refer to Figure 4 , the sensor 12 is rotatably arranged on the housing 11. In this way, the orientation of the detection part 121 can be adjusted by rotating the sensor 12. On the one hand, when only single detection is required, it is convenient to adjust the orientation of the detection part 121 to a direction favorable for detection; on the other hand, when multiple detections are required, the orientation of the detection part 121 can be adjusted multiple times so that the detection part 121 faces different areas in batches, thereby increasing the detection range and avoiding detection dead angles. Preferably, the axial direction of the rotation axis of the sensor 12 relative to the housing 11 is parallel to the axial direction of the first main roller 22.

[0081] Exemplarily, refer to Figure 4 , the detection device 1 further includes a second driving member 181 and a second connecting rod 19. The second driving member 181 is linearly movably connected to the housing 11, the sensor 12 is hinged to the housing 11, and the two ends of the second connecting rod 19 are respectively rotatably connected to the sensor 12 and the second driving member 181. In this way, the second driving member 181 can be linearly moved, thereby driving the second connecting rod 19 to move, and further driving the sensor 12 to rotate to adjust the orientation of the detection part 121.

[0082] One beneficial effect of multiple detections is as follows: During the cutting process, by adjusting the orientation of the detection part 121 multiple times, the overall change trend of the wire bow from the lowest height to the highest height can be obtained, thereby obtaining more accurate wire bow change trend information, which is beneficial for the wire cutting machine to adaptively give the optimal cutting process.

[0083] Refer to Figure 4, in some embodiments, the detection device 1 includes a second electric push rod 18. The seat body of the second electric push rod 18 is fixedly arranged inside the housing 11, and the second driving member 181 is the push rod of the second electric push rod 18. In other embodiments, the detection device 1 includes a second cylinder. The cylinder body of the second cylinder is fixedly arranged inside the housing 11, and the second driving member 181 is the piston rod of the second cylinder.

[0084] Refer to Figure 1 , the wire cutting machine further includes a third driving member 31. The third driving member 31 is slidably connected to the frame 21 along a direction parallel to the axial direction of the first main roller 22, and the housing 11 is connected to the third driving member 31. The third driving member 31 drives the detection device 1 to move along a direction parallel to the axial direction of the first main roller 22, so that the detection device 1 detects the states of all the first wire grooves 221 (or all the second wire grooves 231) and all the cutting wires 241. After the detection is completed, the third driving member 31 drives the detection device 1 to one side of the frame 21 and places it, and the baffle 15 closes the hollow channel 1111 of the detection device 1.

[0085] Exemplarily, refer to Figure 1 , the wire cutting machine includes a linear module 3. The guide rail of the linear module 3 is fixedly arranged on the frame 21, and the third driving member 31 is the sliding table of the linear module 3. The third driving member 31 and the guide rail form a sliding pair.

[0086] In other embodiments, the third driving member 31 can also be telescopically connected to the frame 21, and the telescopic direction of the third driving member 31 is parallel to the axial direction of the first main roller 22. In this way, the third driving member 31 can also drive the detection device 1 to move along a direction parallel to the axial direction of the first main roller 22.

[0087] During the working process of the wire cutting machine, dust will be generated in its cutting chamber 2. When the dust concentration is relatively low, the detection device 1 can be made close to the main roller to shorten the detection distance to improve the detection accuracy. When the dust concentration is relatively high, in order to avoid a large amount of dust accumulating on the surface of the detection device 1 and having an adverse effect on the detection device 1, the detection device 1 can be moved to a higher position to continue the detection.

[0088] Refer to Figures 1 to 3 , the wire cutting machine further includes a movable arm 4. The movable arm 4 includes a rotary joint 41 and a translation joint 42. The axial direction of the rotary joint 41 is parallel to the axial direction of the first main roller 22, and the translation joint 42 can move along the height direction of the frame 21. Refer to Figure 2 and Figure 3, the movable arm 4 has a first end 43 which is connected to the housing 11. The movable arm 4 also has a second end 44 which is disposed away from the first end 43, and the second end 44 is connected to the third driving member 31. In this way, the height position of the detection device 1 and the orientation of the detection portion 121 can be adjusted by the movable arm 4. When the dust concentration is low, the detection device 1 can be moved close to the wire groove by the movable arm 4, so as to shorten the detection distance and improve the detection accuracy. When the dust concentration is high, the detection device 1 can be moved to a higher position by the movable arm 4 for detection, so as to avoid a large amount of dust accumulating on the surface of the detection device 1 and having an adverse effect on the detection device 1.

[0089] In some embodiments, the wire cutting machine includes a dust concentration detector which is disposed in the cutting chamber 2. According to the detection result of the dust concentration detector on the dust concentration in the cutting chamber 2, the movable arm 4 will perform corresponding actions to make the detection device 1 close to the main roller or move to a higher position, so that the detection device 1 can switch between short-distance detection and long-distance detection.

[0090] In addition, the height position of the detection device 1 and the orientation of the detection portion 121 can be adjusted by the movable arm 4 to adapt to the cutting tasks of wafers of different specifications.

[0091] In other embodiments, the movable arm 4 may also include a telescopic joint and the above-mentioned rotary joint 41, and the telescopic joint can be telescoped along the height direction of the frame 21. Such a movable arm 4 can also adjust the height position of the detection device 1 and the orientation of the detection portion 121.

[0092] In Figure 3 the illustrated embodiment, the first end 43 is located at the rotary joint 41, and the second end 44 is located at the translation joint 42. In other embodiments, the positions of the first end 43 and the second end 44 can also be interchanged, that is: the first end 43 is located at the translation joint 42, and the second end 44 is located at the rotary joint 41.

[0093] Preferably, there are a plurality of the third driving members 31, the movable arms 4 and the detection devices 1, and the third driving members 31, the movable arms 4 and the detection devices 1 are arranged in one-to-one correspondence. In this way, different detection devices 1 can detect the wire groove and the wire mesh 24 at different angles, which is beneficial to improving the accuracy of the detection result. Moreover, each detection device 1 can perform detection independently. Refer to Figure 2 , preferably, there are two of the third driving members 31, the movable arms 4 and the detection devices 1. In other embodiments, there may also be 3 or 4 of the third driving members 31, the movable arms 4 and the detection devices 1.

[0094] Refer to Figure 2 , in the embodiments where there are a plurality of detection devices 1, two of the detection devices 1 are respectively the first detection device (i.e. Figure 2The first detection device (1) located on the left side in [device name] and the second detection device (i.e., Figure 2 The detection device (1) located on the right side in [device name]. The first detection device is located above the first main roller (22), and the detection part (121) of the first detection device faces the first wire groove (221) to detect the state of the first wire groove (221). The second detection device is located above the second main roller (23), and the detection part (121) of the second detection device faces the second wire groove (231) to detect the state of the second wire groove (231). When the wire mesh (24) rotates clockwise, the waste liquid splashes clockwise. Less waste liquid splashes below the first detection device, while more waste liquid splashes below the second detection device. The splashed waste liquid affects the field of view of the detection part (121). To improve the detection accuracy, only the first detection device can be used for detection at this time, and the hollow channel (1111) of the second detection device is closed; when the wire mesh (24) rotates counterclockwise, the waste liquid splashes counterclockwise. More waste liquid splashes below the first detection device, while less waste liquid splashes below the second detection device. To improve the detection accuracy, only the second detection device can be used for detection at this time, and the hollow channel (1111) of the first detection device is closed.

[0095] In some embodiments, the cutting chamber (2) includes a control unit (not shown in the figure), and the sensor (12) of each detection device (1) is communicatively and electrically connected to the control unit. After the detection device (1) detects an abnormality, including damage to the wire groove, jumper, parallel wire, or change in the height of the wire bow, it transmits the abnormality information to the control unit. After receiving the abnormality information, the control unit can either interrupt the cutting process of the cutting chamber (2) by itself to prevent slicing under abnormal conditions, or issue an alarm to notify the staff to handle the abnormality.

[0096] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as falling within the scope described in this specification.

[0097] The above-described embodiments merely represent several implementation manners of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation on the protection scope of the present application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A detection device, applied to a wire cutting machine, characterized in that: include: A housing (11), wherein the housing (11) is provided with a detection port (11111); A sensor (12) is arranged in the housing (11), the sensor (12) having a detection portion (121), the detection portion (121) facing the detection port (11111), a detection channel (13) formed between the detection portion (121) and the detection port (11111), the detection channel (13) extending through the detection port (11111) to the outside of the housing (11) to form a detection area (5); and An air screen generator (14) is connected to the shell (11), and the air screen generator (14) has an air flow output end (141). The air flow output end (141) is located on one side of the detection port (11111) and is capable of outputting air flow to form an air screen (6); the air screen (6) separates the part of the detection area (5) away from the detection part (121) from the detection part (121).

2. The detection device according to claim 1, characterized in that: A portion of the bottom side of the shell (11) is raised to form a hollow dirt-blocking structure (111), the hollow portion of the dirt-blocking structure (111) forms a hollow channel (1111), one end of the hollow channel (1111) away from the detection portion (121) forms the detection port (11111), and the hollow channel (1111) participates in forming the detection channel (13).

3. The detection device according to claim 2, characterized in that: The hollow channel (1111) gradually shrinks along the direction of the detection portion (121) toward the detection port (11111).

4. The detection device according to claim 2, characterized in that: The gas screen generator (14) is arranged outside the shell (11), and the gas screen (6) is located below the dirt blocking structure (111) and separates the detection port (11111) from the detection area (5).

5. The detection device according to claim 2, characterized in that: The airflow output end (141) is arranged in the shell (11), and the air screen generator (14) blows air toward the outside of the shell (11) to form the air screen (6), and the air screen (6) separates the detection port (11111) from the detection area (5).

6. The detection device according to claim 2, characterized in that: The detection device further comprises a baffle (15), wherein the baffle (15) is at least partially located in the hollow channel (1111) and is rotatably connected to the shell (11) or the dirt blocking structure (111) to open and close the hollow channel (1111).

7. The detection device according to claim 6, characterized in that: The detection device also includes a first driving member (161) and a first connecting rod (17); the first driving member (161) is linearly movably connected to the housing (11) or the dirt blocking structure (111); and the two ends of the first connecting rod (17) are rotatably connected to the first driving member (161) and the baffle (15), respectively.

8. The detection device according to claim 1, characterized in that: The sensor (12) is rotatably disposed on the housing (11).

9. The detection device according to claim 8, characterized in that: The detection device also includes a second driving member (181) and a second connecting rod (19); the second driving member (181) is connected to the housing (11) in a linearly movable manner; the sensor (12) is rotationally connected to the housing (11); and the two ends of the second connecting rod (19) are rotationally connected to the sensor (12) and the second driving member (181), respectively.

10. The detection device according to claim 1, characterized in that: A light-transmitting plate (110) made of a transparent material is fixedly disposed on the sensor (12), and the light-transmitting plate (110) is located below the detection portion (121).

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