Material mover capable of inclining materials and transfer equipment for semiconductors

Abstract

The utility model relates to the technical field of single crystal production, and provides a dumper capable of inclining materials and transfer equipment for semiconductors, the dumper capable of inclining the materials comprises a mounting frame, a rotating seat, a limiting assembly and an overturning frame, the mounting frame is provided with a mounting space, and one side of the mounting frame is provided with a receding opening communicated with the mounting space; the rotating seat is arranged at the top of the mounting frame; the limiting assembly is arranged on the mounting frame and corresponds to the bottom of the mounting space; the turnover frame is used for bearing materials, part of the turnover frame is installed in the installation space, the turnover frame is rotationally connected with the installation frame through the rotating base, the bottom of the turnover frame is suitable for being stopped at the limiting assembly, or the turnover frame rotates and inclines relative to the installation frame with the rotating base as a rotating fulcrum. And the overturning frame can rotate relative to the mounting frame through the rotating seat, so that inclination of the materials is achieved, and the positions of the materials are convenient to adjust.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal production, in particular to a material transport vehicle capable of tilting materials and a transfer device for semiconductors. Background Art

[0002] At present, in the photovoltaic industry, the clamping positioning and unlocking of the quartz cylinder for feeding the silicon crystal furnace on the material vehicle are both realized manually. Especially during the process of replacing the quartz cylinder on the material vehicle, it is necessary for workers to untie the buckles of the upper and lower clamps that clamp the quartz cylinder on the material vehicle, open the clamp rings, then place the quartz cylinder in the position. After placing it well, then hold and clamp the opened clamp rings on the quartz cylinder and close the buckles of the clamps so that the upper and lower two clamps surround and lock the quartz cylinder. And currently, the material vehicle is manually transported. Since the quartz cylinder is fixed on the material vehicle, when relevant operations such as feeding are required for the quartz cylinder, the position of the quartz cylinder is fixed, which is inconvenient for operation. Summary of the Utility Model

[0003] The utility model aims to at least solve one of the technical problems existing in the related art. For this purpose, the utility model provides a material transport vehicle capable of tilting materials, aiming to realize the tilting of the loaded materials to facilitate relevant operations.

[0004] The utility model also provides a transfer device for semiconductors.

[0005] The material transport vehicle capable of tilting materials according to the utility model includes:

[0006] A mounting frame, the mounting frame is provided with a mounting space, and one side of the mounting frame is provided with an avoidance opening communicating with the mounting space;

[0007] A rotating seat, the rotating seat is arranged on the top of the mounting frame;

[0008] A limiting component, the limiting component is arranged on the mounting frame and is correspondingly arranged at the bottom of the mounting space;

[0009] A turning frame, the turning frame is used for carrying materials, a part of the turning frame is installed in the mounting space, the turning frame is rotatably connected to the mounting frame through the rotating seat, and the bottom of the turning frame is adapted to stop at the limiting component, or the turning frame rotates and tilts relative to the mounting frame with the rotating seat as the rotation fulcrum.

[0010] The material transport vehicle capable of tilting materials according to an embodiment of the present utility model installs a tilting frame through the installation space of the installation frame. The tilting frame is used to carry materials to realize the transportation of materials. At the same time, the tilting frame can rotate relative to the installation frame through a rotating seat to realize the tilting of materials, facilitating the adjustment of the material position. When the material is placed on the tilting frame, the tilting frame takes the rotating seat as a fulcrum, and under the action of gravity, its bottom has a tendency to swing towards the limiting component. Since the tilting frame rotates with the rotating seat at the top of the installation frame as a fulcrum, in order to prevent the tilting frame from swinging randomly, the limiting component stops and limits the tilting frame. In this way, when the tilting frame is subjected to an external force, its bottom moves and tilts towards the avoidance opening direction, and the avoidance opening provides an avoidance space for the tilting of the tilting frame, so that the tilting frame has a larger tilting angle.

[0011] According to an embodiment of the present utility model, the installation frame includes:

[0012] A chassis, and the limiting component is arranged on the chassis;

[0013] A frame body, which is arranged above the chassis. The frame body includes a first support portion, a second support portion and a connecting portion. The first support portion and the second support portion are arranged oppositely, and the connecting portion connects the first support portion and the second support portion. The first support portion, the second support portion and the connecting portion enclose to form the installation space. An avoidance opening is formed on one side of the first support portion and the second support portion away from the connecting portion. The material transport vehicle capable of tilting materials includes two rotating seats. One rotating seat is installed on the first support portion, and the other rotating seat is installed on the second support portion. One side of the tilting frame is connected to one rotating seat, and the other side is connected to the other rotating seat.

[0014] According to an embodiment of the present utility model, the material transport vehicle capable of tilting materials further includes a driving member. One end of the driving member is rotatably connected to the limiting component, and the other end is rotatably connected to the tilting frame. The driving member is adapted to push the tilting frame to rotate and tilt with the rotating seat as a fulcrum.

[0015] According to an embodiment of the present utility model, the limiting component is located on one side of the installation frame away from the avoidance opening, and the driving member is connected to one side of the tilting frame facing away from the avoidance opening.

[0016] According to an embodiment of the present utility model, the limiting component includes:

[0017] An installation block, which is installed on the installation frame;

[0018] A limiting rod, which is installed on one side of the installation block facing the tilting frame. At least part of the limiting rod protrudes from the installation block, and the limiting rod is used to stop and abut against the tilting frame.

[0019] According to an embodiment of the present utility model, the limiting component further includes a stop spring, the stop spring abuts between the limiting rod and the mounting block, the limiting rod is movably arranged on the mounting block, the limiting rod moves towards the mounting block under the extrusion of the flipping frame, and compresses the stop spring.

[0020] According to an embodiment of the present utility model, the limiting component includes at least two limiting rods and two stop springs, the at least two limiting rods are arranged at intervals along the extending direction of the mounting block, and each stop spring is arranged corresponding to one limiting rod.

[0021] According to an embodiment of the present utility model, a pulling handle is arranged at the top of the flipping frame.

[0022] According to an embodiment of the present utility model, a clamping space is arranged on one side of the flipping frame, a bottom support is arranged at the bottom of the clamping space, and the tilting material transport vehicle further includes:

[0023] A traction component, the traction component is movably connected to the flipping frame, and an elastic member is connected between the traction component and the flipping frame;

[0024] A support plate, the support plate is connected to one end of the traction component adjacent to the bottom support, and there is an active interval between the support plate and the bottom support;

[0025] A claw component, the claw component is fixedly connected to the traction component and extends towards the clamping space. Wherein, the support plate is used for supporting materials, the support plate moves towards the bottom support under the pressure of the materials, so that the traction component pulls the claw component to clamp the materials, when the materials are away from the support plate, the support plate moves away from the bottom support, and the traction component drives the claw component to open under the elastic restoring force of the elastic member.

[0026] The semiconductor transfer device according to the embodiment of the second aspect of the present utility model includes:

[0027] The above-mentioned tilting material transport vehicle;

[0028] A quartz cylinder, arranged on the tilting material transport vehicle;

[0029] Hook device, the hook device includes a hook body, a movable block and a connecting piece. The hook body forms a receiving cavity with an opening. The movable block is movably arranged in the receiving cavity to at least partially open or at least partially close the opening. The connecting piece is used to be installed on the quartz tube. The connecting piece is adapted to move towards the hook body to push the movable block to move and open the opening, and switch the connecting piece to the hooked state. In the hooked state, the connecting piece at least partially enters the receiving cavity, and the movable block is adapted to abut against and lock the connecting piece.

[0030] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present utility model. Brief Description of the Drawings

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or in the related art, the following will briefly introduce the drawings required for use in the description of the embodiments or the related art. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0032] Figure 1 is a schematic structural view of a material transport vehicle capable of tilting materials provided by an embodiment of the present utility model;

[0033] Figure 2 is a schematic structural view of a vehicle frame provided by an embodiment of the present utility model;

[0034] Figure 3 is a front view of a material transport vehicle capable of tilting materials provided by an embodiment of the present utility model;

[0035] Figure 4 is Figure 3 a cross-sectional view taken along line A-A in

[0036] Figure 5 is a left view of a material transport vehicle capable of tilting materials provided by an embodiment of the present utility model;

[0037] Figure 6 is a schematic structural view of a tipping frame in a vehicle frame provided by an embodiment of the present utility model;

[0038] Figure 7 is an exploded view of a tipping frame in a vehicle frame provided by an embodiment of the present utility model;

[0039] Figure 8 is a schematic structural view of a jaw assembly provided by an embodiment of the present utility model;

[0040] Figure 9It is a side view of the jaw assembly provided by an embodiment of the present utility model;

[0041] Figure 10 It is an exploded view of the jaw assembly provided by an embodiment of the present utility model;

[0042] Figure 11 It is a front view of the first process of placing materials on the material transport vehicle capable of tilting materials provided by an embodiment of the present utility model;

[0043] Figure 12 is Figure 11 the cross-sectional view at A-A in

[0044] Figure 13 It is a side view of the first process of placing materials on the material transport vehicle capable of tilting materials provided by an embodiment of the present utility model;

[0045] Figure 14 It is a front view of the second process of placing materials on the material transport vehicle capable of tilting materials provided by an embodiment of the present utility model;

[0046] Figure 15 is Figure 14 the cross-sectional view at B-B in

[0047] Figure 16 It is a side view of the second process of placing materials on the material transport vehicle capable of tilting materials provided by an embodiment of the present utility model;

[0048] Figure 17 It is a front view of the process of lifting materials on the material transport vehicle capable of tilting materials provided by an embodiment of the present utility model;

[0049] Figure 18 is Figure 17 the cross-sectional view at C-C in

[0050] Figure 19 It is a side view of the process of lifting materials on the material transport vehicle capable of tilting materials provided by an embodiment of the present utility model;

[0051] Figure 20 It is a structural schematic diagram of a quartz tube and a hook device provided by an embodiment of the present utility model;

[0052] Figure 21 It is a structural schematic diagram of the hook device provided by an embodiment of the present utility model;

[0053] Figure 22 It is a partial structural schematic diagram of the hook device provided by an embodiment of the present utility model.

[0054] Reference numerals:

[0055] 1. Frame; 11. Caster; 12. Underframe; 13. Stop spring; 14. Limit rod; 15. Mounting bracket; 151. Vertical square pipe; 152. Push-pull handle; 153. Horizontal square pipe; 155. Avoidance opening; 156. First support part; 157. Second support part; 158. Connecting part; 2. Flipping frame; 211. Bottom support; 213. First guiding fixing plate; 214. First welding plate; 215. Second welding plate; 216. Second guiding fixing plate; 218. Lever handle; 22. Tray; 23. Lifting rod; 25. Bent hanging ear; 26. Claw assembly; 261. Pressure block; 262. Pin shaft; 263. Support plate; 264. Spherical plain bearing; 265. Shaft circlip; 266. Connecting shaft; 267. Step screw; 268. Claw; 269. Mounting base plate; 27. Elastic member; 28. Adjusting nut; 29. Rotating seat; 3. Nitrogen spring; 4. Quartz cylinder; 100. Hook body; 110. Opening; 130. Elastic member; 200. Movable block; 220. Rotating member; 300. Connecting member. Detailed implementation manners

[0056] The following further describes in detail the implementation manners of the present utility model in conjunction with the accompanying drawings and embodiments. The following embodiments are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0057] In the description of the embodiments of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0058] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific situations.

[0059] In the embodiments of the present utility model, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "below" and "beneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or simply means that the horizontal height of the first feature is less than that of the second feature.

[0060] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0061] Please refer to Figures 1 to 5 , the material transport vehicle capable of tilting materials according to the present utility model includes a mounting frame 15, a rotating seat 29, a limiting component and a tilting frame 2. The mounting frame 15 is provided with a mounting space, and an avoidance opening 155 communicating with the mounting space is provided on one side of the mounting frame 15; the rotating seat 29 is arranged on the top of the mounting frame 15; the limiting component is arranged on the mounting frame 15 and is correspondingly arranged at the bottom of the mounting space; the tilting frame 2 is used for carrying materials, a part of the tilting frame 2 is arranged in the mounting space, the tilting frame 2 is rotationally connected to the mounting frame 15 through the rotating seat 29, the bottom of the tilting frame 2 is adapted to abut against the limiting component, or the tilting frame 2 rotates and tilts relative to the mounting frame 15 with the rotating seat 29 as the rotation fulcrum.

[0062] The material transport vehicle capable of tilting materials according to the embodiments of the present utility model installs and flips the flipping frame 2 through the installation space of the installation frame 15. The flipping frame 2 is used to carry materials to realize the transportation of materials. At the same time, the flipping frame 2 can rotate relative to the installation frame 15 through the rotating seat 29 to tilt the materials, facilitating the adjustment of the material position. When the materials are placed on the flipping frame 2, the flipping frame 2 takes the rotating seat 29 as a fulcrum, and under the action of gravity, its bottom has a tendency to swing towards the limiting component. Since the flipping frame 2 rotates with the rotating seat 29 at the top of the installation frame 15 as a fulcrum, in order to prevent the flipping frame 2 from swinging randomly, the limiting component stops and limits the flipping frame 2. In this way, when the flipping frame 2 is subjected to an external force, its bottom moves and tilts towards the avoidance opening 155, and the avoidance opening 155 provides an avoidance space for the flipping frame 2 to tilt, so that the flipping frame 2 has a larger tilting angle.

[0063] As Figure 2 shown, exemplarily, the flipping frame 2 is fixedly connected to the mounting block at the top of the installation frame 15 through the rotating seat 29, and the flipping frame 2 can be flipped and rotated through the rotating seat 29. The flipping frame 2 includes a welded L-shaped frame body and a rotating seat 29. The L-shaped frame body is welded into a main frame structure by a bottom support in the shape of a bucket such as the bottom tray 211, two vertical square tubes, and four horizontal square tubes. It can be understood that by flipping the flipping frame 2, the height of the quartz cylinder 4 placed on the flipping frame 2 can be reduced, facilitating feeding operations or other inspection operations, etc.

[0064] As Figure 13 shown, optionally, when the materials are placed on the flipping frame 2, the rotating seat 29 is located on the side of the materials away from the avoidance opening 155. Since the rotating seat 29 is located at the top of the installation frame 15, the center of gravity of the materials is lower than the rotating seat 29. Thus, under the action of gravity, the center of gravity of the materials has a tendency to deflect towards the side of the rotating seat 29, that is, the bottom of the materials swings towards the direction away from the avoidance opening 155, thereby preventing the materials from protruding out of the avoidance opening 155. At the same time, in order to prevent the materials from swinging too much and tilting, the limiting component stops and limits the bottom of the materials to improve the placement stability of the materials.

[0065] Please refer to Figure 1 and Figure 2According to an embodiment of the utility model, the mounting frame 15 includes a base frame 12 and a frame body, and the limiting assembly is arranged on the base frame 12; the frame body is arranged above the base frame 12, and the frame body includes a first support portion 156, a second support portion 157 and a connecting portion 158, the first support portion 156 and the second support portion 157 are arranged opposite to each other, and the connecting portion 158 connects the first support portion 156 and the second support portion 157, and the first support portion 156, the second support portion 157 and the connecting portion 158 enclose a mounting space, and a side of the first support portion 156 and the second support portion 157 away from the connecting portion 158 forms an avoidance opening 155, and the material transport vehicle that can tilt the material includes two rotating seats 29, one rotating seat 29 is installed on the first supporting portion 156, and the other rotating seat 29 is installed on the second supporting portion 157, one side of the flip frame 2 is connected to one rotating seat 29, and the other side is connected to the other rotating seat 29.

[0066] The mounting frame 15 includes a base frame 12 and a C-shaped square tube frame body on the base frame 12. The base frame 12 is a widened load-bearing chassis to improve the load-bearing capacity. The spacing between the multiple legs at the bottom of the base frame 12 is increased to meet the requirements of the jacking AGV to smoothly enter and exit from the bottom. The frame body is welded by multiple vertical square tubes 151 and multiple horizontal square tubes 153 to form a C-shape, that is, a clearance opening 155 is provided on one side. Specifically, the C-shaped structure is formed by the first support part 156, the second support part 157 and the connecting part 158. At the same time, a steel pipe bent into a C shape is connected to the rear side of the mounting frame 15, that is, the side away from the clearance opening 155, as a handle for manually pushing and pulling the material cart. Optionally, at least one side of the mounting frame 15 is provided with a push-pull handle 152 to facilitate manual grasping and thus pushing the material cart.

[0067] It can be understood that the first support portion 156 and the second support portion 157 are respectively used to support the two sides of the flip frame 2 to maintain the rotation balance of the flip frame 2, and the connecting portion 158 is used to connect the two support portions to keep the distance between the two support portions stable and prevent position deviation from occurring easily.

[0068] According to an embodiment of the utility model, a plurality of casters 11 are provided at the bottom of the mounting frame 15, one side of the mounting frame 15 is defined as the front side, and the other side is defined as the rear side. The casters 11 located at the front side are fixed casters, and the casters 11 located at the rear side are universal casters. It can be understood that casters 11 are provided at the four corners of the bottom of the mounting frame 15, and the four casters 11 are divided into two fixed casters and two universal casters. The fixed casters are provided at the front side of the mounting frame 15, and the universal casters are provided at the rear side of the chassis of the material cart. In this way, the material cart is pushed at the rear side of the mounting frame 15, and this arrangement facilitates the steering movement of the material cart when the AGV is not used.

[0069] According to an embodiment of the present utility model, the material transport vehicle capable of tilting materials further includes a driving member. One end of the driving member is rotatably connected to the limiting assembly, and the other end is rotatably connected to the tipping frame 2. The driving member is adapted to push the tipping frame 2 to rotate and tilt with the rotating seat 29 as a fulcrum. It can be understood that the driving member is used to jack up the bottom of the tipping frame 2 from the side, so as to facilitate pushing the tipping frame 2 to tilt when carrying materials. The driving member can be structures such as a cylinder, a motor, and a push rod, as long as it can push and support the tipping frame 2, and no limitation is made here.

[0070] Taking the nitrogen spring 3 as an example here, a second welding plate 215 for installing the bending hanging ear 25 is vertically welded on the tipping frame 2, and the bending hanging ear 25 for installing the nitrogen spring 3 is also provided thereon. One end of the nitrogen spring 3 is rotatably connected to the bending hanging ear 25 to jack up the tipping frame 2. When the tipping frame 2 is vertical, the nitrogen spring 3 is in a compressed state, and the axial extension line of the nitrogen spring 3 is to the right (or rear) of the rotating seat 29. The pressure of the nitrogen spring 3 causes the tipping frame 2 to have a tendency to turn inward and is in a state of maintaining vertical stability under the stopping action of the limiting assembly. It can be understood that the driving member can also support the tipping frame 2 at a certain angle so that the materials are kept tilted at a certain angle for easy operation.

[0071] According to an embodiment of the present utility model, the limiting assembly is located on the side of the mounting frame 15 away from the avoidance opening 155, and the driving member is connected to the side of the tipping frame 2 facing away from the avoidance opening 155. In this way, it is convenient for the driving member to jack up the tipping frame 2, achieving a labor-saving effect.

[0072] According to an embodiment of the present utility model, the limiting assembly includes a mounting block and a limiting rod 14. The mounting block is installed on the mounting frame 15; the limiting rod 14 is installed on the side of the mounting block facing the tipping frame 2, and at least part of the limiting rod 14 protrudes from the mounting block. The limiting rod 14 is used to stop and abut against the tipping frame 2.

[0073] It can be understood that the limiting rod 14 can be connected perpendicular to the mounting block. The mounting block is fixed to the mounting frame 15, and the limiting rod 14 protrudes from the mounting block to stop and limit the tipping frame 2. The limiting rod 14 can be made of soft rubber material to play a buffering role when the tipping frame 2 rebounds after tilting, avoiding damage to both when they collide.

[0074] According to an embodiment of the present utility model, the limiting assembly further includes a stop spring 13. The stop spring 13 abuts between the limiting rod 14 and the mounting block. The limiting rod 14 is movably arranged on the mounting block. The limiting rod 14 moves towards the mounting block under the extrusion of the tipping frame 2 and compresses the stop spring 13. In this way, when the limiting rod 14 stops the tipping frame 2, the stop spring 13 buffers after the two come into contact, avoiding damage to both when they collide.

[0075] According to an embodiment of the present utility model, the limiting assembly includes at least two limiting rods 14 and two stop springs 13. The at least two limiting rods 14 are arranged at intervals along the extending direction of the mounting block, and each stop spring 13 is arranged corresponding to one limiting rod 14. The two limiting rods 14 stop and limit the flipping frame 2, and the stopping effect is better. The contact area with the flipping frame 2 is increased, and the risk of deviation at the stopping position of the two can be reduced.

[0076] As Figure 4 and Figure 5 shown, according to an embodiment of the present utility model, a pulling handle 218 is provided at the top of the flipping frame 2. It is convenient for workers to grab and manually flip the flipping frame 2 at a certain angle.

[0077] Please refer to Figure 1 , Figure 6 and Figure 7 , according to an embodiment of the present utility model, a clamping space is provided on one side of the flipping frame 2. A bottom support 211 is provided at the bottom of the clamping space. The material transport vehicle capable of tilting the material further includes a traction assembly, a support plate 22, and a claw assembly 26. The traction assembly is movably connected to the flipping frame 2, and an elastic member 27 is connected between the traction assembly and the flipping frame 2; the support plate 22 is connected to one end of the traction assembly adjacent to the bottom support 211, and there is an active interval between the support plate 22 and the bottom support 211; the claw assembly 26 is fixedly connected to the traction assembly and extends toward the clamping space. Among them, the support plate 22 is used to support the material. The support plate 22 moves toward the bottom support 211 under the pressure of the material, so that the traction assembly pulls the claw assembly 26 to clamp the material. When the material moves away from the support plate 22, the support plate 22 moves away from the bottom support 211, and the traction assembly drives the claw assembly 26 to open under the elastic restoring force of the elastic member 27.

[0078] For the material transport vehicle capable of tilting the material according to the embodiment of the present utility model, by placing the material in the clamping space of the vehicle frame 1, the material is carried by the support plate 22, and the material is clamped and fixed by the claw assembly 26. When the material is placed on the support plate 22, the support plate 22 moves toward the bottom support 211 at the bottom of the clamping space under the pressure, thereby driving the traction assembly to move. When the traction assembly moves, it drives the claw assembly 26 to act, thereby clamping the material placed in the clamping space. When the material is lifted, the pressure received by the support plate 22 gradually disappears, and the traction assembly returns to the initial position under the elastic restoring force of the elastic member 27, that is, it drives the claw assembly 26 to act, thereby loosening the material. In this way, when the material is placed on the support plate 22, the claw assembly 26 automatically clamps the material, and as the material is lifted, the claw assembly 26 automatically loosens the material, thus realizing the automatic clamping and loosening of the material without manual operation.

[0079] It should be noted that the present utility model can achieve automatic positioning and clamping of the quartz cylinder 4 when it is placed, and automatic release of the clamping when it is lifted, without manual operation. At the same time, as an automatic conveyance using an AGV (Automated Guided Vehicle), the present utility model can realize the automation of the entire silicon crystal loading and conveyance. During the actual operation process, by controlling the lifting and lowering of the quartz cylinder 4, the clamping and release of the cylinder body can be achieved, thereby realizing the automatic clamping and release operation of the quartz cylinder 4. At the same time, a lifting AGV can be used to convey the entire material cart. The application scope of the present utility model is not limited to the automatic loading and unloading of the quartz cylinder 4 in the photovoltaic industry, but can also be applied to the automatic loading and unloading process of other cylindrical materials.

[0080] Please refer to Figure 6 and Figure 7 , according to an embodiment of the present utility model, the traction assembly includes a lifting rod 23 and an elastic member 27. The lifting rod 23 is movably connected to the vehicle frame 1. One end of the lifting rod 23 is connected to the support plate 22, and the claw assembly 26 is fixedly connected to the lifting rod 23; one end of the elastic member 27 abuts against the lifting rod 23, and the other end abuts against the vehicle frame 1.

[0081] It can be understood that an L-shaped bracket is provided on the vehicle frame 1. A bottom support 211 is provided at the bottom of the L-shaped bracket for supporting the support plate 22. The bottom support 211 is in a bucket shape, and the material is stopped and limited by the side plates of the bottom support 211 to improve the stability of placing the material. Specifically, two vertical square tubes and four horizontal square tubes are welded to form the main frame structure of the L-shaped bracket, and a first guiding fixed plate 213 is connected at a position adjacent to the bottom support 211 at the bottom. At the same time, a second guiding fixed plate 216 is connected in the middle of the L-shaped bracket, and a first welding plate 214 for installing the claw assembly 26 is also connected to the L-shaped bracket. Guide holes are provided on both the first guiding plate and the second guiding plate. In this way, the lifting rod 23 passes through the first guiding plate and the second guiding plate respectively, so that the lifting rod 23 can move relative to the vehicle frame 1, specifically along the connection line direction of the first guiding plate and the second guiding plate. Since one end of the lifting rod 23 is connected to the support plate 22 and the lifting rod 23 is connected to the claw assembly 26, when the support plate 22 moves, it will drive the lifting rod 23 to move, thereby driving the claw assembly 26 to act.

[0082] Exemplarily, the pallet 22 is fixedly connected to the lower part of the lifting rod 23 by upper and lower nuts. The lifting rod 23 passes through the first guiding and fixing plate 213, the claw assembly 26, and the second guiding and fixing plate 216 from bottom to top, and both are locked with the claw assembly 26 by upper and lower nuts. At the same time, one end of the elastic member 27 abuts against the lifting rod 23, and the other end abuts against the vehicle frame 1. At this time, under the elastic force of the elastic member 27, the elastic force of the elastic member 27 reaches an equilibrium with the gravity of the pallet 22 and other components connected to the lifting rod 23, so that there is a certain gap between the pallet 22 and the bottom support 211. At this time, if the pallet 22 drives the lifting rod 23 to move downward, the claw assembly 26 will be driven to perform a clamping action, and when the pallet 22 drives the lifting rod 23 to move upward, the claw assembly 26 will be driven to perform a spreading action. In this way, it is convenient to realize the automatic clamping and loosening of the claw assembly 26 without manual operation. The elastic member 27 can be a spring, a spring sheet or a structure made of other soft rubber materials, which is not limited herein.

[0083] Of course, in other embodiments, the lifting rod 23 can also be a steel wire rope or a chain, etc., as long as it can move relative to the vehicle frame 1 and drive the claw assembly 26 to act, which is not limited herein.

[0084] According to an embodiment of the present invention, the traction assembly further includes an adjusting nut 28. The adjusting nut 28 is arranged on the lifting rod 23 and can move along the length direction of the lifting rod 23. The elastic member 27 is a spring, and the spring is sleeved on the lifting rod 23. One end of the spring abuts against the adjusting nut 28, and the other end abuts against the vehicle frame 1. The adjusting nut 28 is adapted to move on the lifting rod 23 to adjust the compression amount of the spring.

[0085] Exemplarily, the adjusting nut 28 is sleeved on the lifting rod 23, and there is a telescopic space for installing the spring between the adjusting nut 28 and the vehicle frame 1. Specifically, the spring abuts against the adjusting nut 28 and the second guiding and fixing plate 216 on the vehicle frame 1 respectively. In this way, by adjusting the adjusting nut 28 downward, the spring is compressed. When the elastic force of the compressed spring is equal to the gravity of the pallet 22, the lifting rod 23, the adjusting nut 28 and the spreading force of the two claw assemblies 26, the elastic force of the spring reaches an equilibrium with the gravity of the parts connected to the lifting rod 23. It can be understood that if the adjusting nut 28 is further adjusted downward to further compress the spring, under the action of the increasing elastic force, the lifting rod 23 and the pallet 22 will move upward, and at the same time, the jaws of the claw assembly 26 will be further spread. That is to say, by adjusting the position of the adjusting nut 28 to control the compression amount of the spring, the spreading size of the claw assembly 26 can be adjusted, so as to adapt to clamping quartz cylinders 4 or other materials of different sizes, and improve the adaptability of the material cart.

[0086] According to an embodiment of the present utility model, the traction assembly includes two lifting rods 23 and two elastic members 27. The two lifting rods 23 are arranged in parallel. The two lifting rods 23 are respectively disposed on both sides of the support plate 22, and the two lifting rods 23 are connected to both sides of the claw assembly 26. Each elastic member 27 corresponds to one lifting rod 23. It can be understood that setting two lifting rods 23 and two elastic members 27 is beneficial to improving the connection stability and facilitating the clamping and fixing of the material. At the same time, setting two lifting rods 23 and two elastic members 27 facilitates the connection of the claw assembly 26. And the two lifting rods 23 are connected to the claw assembly 26, which can better lift the claw assembly 26 to act and keep the forces on both sides of the claw assembly 26 evenly distributed.

[0087] As Figures 8 to 10 shown, according to an embodiment of the present utility model, the claw assembly 26 includes a pressing block 261, two support plates 263, two claws 268 and a mounting substrate 269. The pressing block 261 is fixedly connected to the traction assembly; one support plate 263 is rotatably connected to one side of the pressing block 261, and the other support plate 263 is rotatably connected to the other side of the pressing block 261; one end of one claw 268 is rotatably connected to one support plate 263, and one end of the other claw 268 is rotatably connected to the other support plate 263. Wherein, when the pressing block 261 is pressed down and lifted, the two claws 268 are clamped and opened by the rotation of the support plates 263; the mounting substrate 269 connects the two claws 268 to keep the two claws 268 in the same plane for clamping and opening.

[0088] Exemplarily, the claw assembly 26 includes a mounting substrate 269, two claws 268, a stepped screw 267 screwed onto the mounting substrate 269 for the two claws 268 to rotate around, and a connecting shaft 266 connected to the threaded hole at the tail end of the claw 268. The other end of the connecting shaft 266 is inserted into the bearing hole of the spherical plain bearing 264. The support plate is connected to the spherical plain bearing 264 through the threaded hole at the tail end, and the two support plates 263 are connected to the pressing block 261 through a pin shaft 262 and a shaft retaining ring 265. The two stepped screws 267 are the rotation fulcrum shafts for the claws 268 to open and clamp. When the pressing block 261 is pressed down and lifted, the two claws 268 are clamped and opened through the pin shaft 262 and the support plates 263. Thus, since the pressing block 261 is fixedly connected to the traction assembly, when the traction assembly moves, it drives the pressing block 261 to move, causing the pressing block 261 to be pressed down or lifted, thereby realizing the clamping and opening of the two claws 268 to clamp or release the quartz tube 4, with a simple structure.

[0089] According to an embodiment of the present utility model, flexible buffer structures are provided on the opposite sides of the two claws 268. The flexible buffer structure can be a rubber sleeve, a silica gel sleeve or other soft rubber materials. Specifically, a urethane rubber with a buffering effect is installed on the inner side of the clamping of the claw 268 for contacting the tube wall when clamping the quartz tube 4 to prevent scratching the tube wall.

[0090] As shown Figure 6 In accordance with an embodiment of the present utility model, a material transport vehicle capable of tilting materials includes at least two sets of jaw assemblies 26, and the at least two sets of jaw assemblies 26 are arranged at intervals along the extension direction of the traction assembly. By providing at least two sets of jaw assemblies 26, they are arranged at intervals in the height direction of the quartz cylinder 4, thereby ensuring the stability of clamping the quartz cylinder 4 and reducing the risk of the quartz cylinder 4 falling off.

[0091] The following combines Figures 11 to 19 to introduce the material transport process of an embodiment of the material transport vehicle capable of tilting materials of the present utility model:

[0092] When the tipping frame 2 is vertical, as Figures 11 to 13 shown, when a quartz cylinder 4 of a certain specification is just placed in the material transport vehicle capable of tilting materials, when the bottom of the quartz cylinder 4 contacts the support plate 22 (at this time there is no pressure), the distance between the support plate 22 and the bucket-shaped bottom support 211 at the bottom of the L-shaped frame body is h. At this time, the support plate 22 and the two jaw assemblies 26 are in a state of balance between the force and their own gravity under the action of the adjusting nut 28 and the compression spring. At this time, the jaws 268 are in an open state and do not contact the wall of the quartz cylinder 4.

[0093] When the quartz cylinder 4 continues to move downward, pressing the support plate 22 downward, at this time the support plate 22 will press down the pressure block 261 of the jaw assembly 26 through the lifting rod 23, thereby making the jaws 268 clamp the wall of the quartz cylinder 4. At the same time, the adjusting nut 28 moves downward along with the lifting rod 23, and continues to compress the compression spring.

[0094] When the quartz cylinder 4 moves downward to the lowest end (that is, the support plate 22 fits with the bucket-shaped bottom support 211), the state is as Figures 14 to 16 shown. At this time, adjust the nuts on the upper and lower sides of the pressure block 261 of the jaw assembly 26 to make the jaws clamp the wall of the quartz cylinder 4 and clamp it tightly. Thus, the debugging of the material transport vehicle capable of tilting materials is completed. Subsequently, as long as the quartz cylinder 4 is placed on the support plate 22 of the material vehicle, the support plate 22 will automatically be pressed to fit with the bottom support 211, and at the same time the jaws will automatically clamp the wall of the quartz cylinder 4, completing the automatic clamping and positioning of the quartz cylinder 4.

[0095] As Figure 17 shown, at this time the material vehicle has completed the automatic clamping and positioning of the quartz cylinder 4. In this state, the material vehicle can safely transport the quartz cylinder 4. During transportation, workers can move the material vehicle by pushing and pulling the handle 152, or an overhead AGV can enter between the two casters 11 at the bottom of the material transport vehicle capable of tilting materials, lift the material transport vehicle capable of tilting materials, and make the casters 11 leave the ground. Thereafter, the material transport vehicle capable of tilting materials will be completely transported by the AGV.

[0096] When the quartz cylinder 4 needs to be tilted (such as when feeding materials into the quartz cylinder 4 or in other scenarios where tilting is required), the manual handle 218 at the top of the turning frame 2 can be manually operated (or a robotic arm can be used at the corresponding workstation) to make the turning frame 2 rotate around the rotating seat 29. When the axial extension line of the nitrogen spring 3 crosses the axis line of the rotating seat 29, the turning frame 2 will be flipped under the thrust of the nitrogen spring 3 to the state as shown in Figure 5 shown.

[0097] When the transport vehicle for tiltable materials reaches the designated position, a material taking operation needs to be performed. As shown in Figures 18 to 19 shown, when the quartz cylinder 4 needs to be lifted, directly lift the lifting rod 23 of the quartz cylinder 4. When the quartz cylinder 4 is lifted, the spring will drive the lifting rod 23 to rise through the adjusting nut 28, and then drive the pressing block 261 of the claw assembly 26 to rise. Further, through the pin shaft 262, the support plate 263, and the spherical plain bearing 264, the tail end of the claw 268 is pulled together, causing the front end of the claw 268 to open, automatically releasing the clamping and locking of the quartz cylinder 4. At this time, the automatic unlocking function of the clamping of the quartz cylinder 4 is completed, and the quartz cylinder 4 can be directly lifted off.

[0098] The utility model is not only applicable to the field of automatic positioning and clamping and automatic release of clamping of the quartz cylinder 4 in the photovoltaic industry, but also applicable to all other occasions where it is necessary to use the self-weight of heavy objects to position and fix themselves and automatically unlock.

[0099] Please refer to Figure 1 and Figure 20 for the embodiments of the second aspect of the present utility model, which provides a transfer device for semiconductors, including a transport vehicle for tiltable materials according to any one of the above embodiments; a quartz cylinder 4, arranged on the transport vehicle for tiltable materials; and a hook device, at least part of the hook device is installed on the quartz cylinder 4.

[0100] The hook device includes a hook body 100, a movable block 200, and a connecting piece 300. The hook body 100 forms a receiving cavity with an opening 110. The movable block 200 is movably arranged in the receiving cavity to at least partially open or at least partially close the opening 110; the connecting piece 300 is used to be installed on the quartz cylinder 4, and the connecting piece 300 is adapted to move towards the hook body 100 to push the movable block 200 to move and open the opening 110, switching the connecting piece 300 to the hooked state; in the hooked state, at least part of the connecting piece 300 enters the receiving cavity, and the movable block 200 is adapted to abut against and lock the connecting piece 300.

[0101] It can be understood that in this embodiment, the hook body 100 is connected to the cable of the lifting device and moves along with the movement of the cable to achieve the horizontal movement and vertical lifting movement of the hook body 100. The connecting member 300 is installed on the quartz cylinder 4. During the movement of the hook body 100, it can be hooked with the connecting member 300, so that the quartz cylinder 4 can be lifted and transported.

[0102] In an alternative embodiment, the connecting member 300 is fixedly installed or detachably installed on the quartz cylinder 4. The lifting device controls the hook body 100 to move above the connecting member 300, aligns the connecting member 300 with the opening 110 of the receiving cavity, and then the lifting device can control the hook body 100 to move downward, so that the connecting member 300 can push the movable block 200 to move and open the opening 110. The connecting member 300 can enter the receiving cavity through the opening 110. After the connecting member 300 enters the receiving cavity, the movable block 200 can reset, so that the movable member abuts against and locks the connecting member 300 to achieve automatic hooking. At this time, when the lifting device controls the hook body 100 to move upward, it can lift the connecting member 300 and the quartz cylinder 4 to realize the transportation of the quartz cylinder 4. In this process, manual hooking is not required, improving the lifting and transportation efficiency.

[0103] In this embodiment, the receiving cavity of the hook body 100 has an opening 110. The receiving cavity can better accommodate and fix the connecting member 300. Through the opening 110 of the receiving cavity, the connecting member 300 can be accurately aligned and enter the receiving cavity, and then be locked under the action of the movable block 200, thus realizing the process of automatic hooking. This design not only improves the accuracy of hooking, but also increases the stability and safety during the operation. The hook body 100 has an opening 110 in the receiving cavity, enabling the connecting member 300 to smoothly enter and be locked, avoiding instability or detachment during the operation, and effectively reducing the accidental risk.

[0104] According to an embodiment of the present invention, referring to Figure 21 and Figure 22 as shown, the movable block 200 is slidably arranged on the hook body 100, or the movable block 200 is rotatably arranged on the hook body 100.

[0105] It can be understood that in an alternative embodiment, the movable block 200 is rotatably arranged on the hook body 100. During the rotation of the hook body 100, it can open or close the opening 110 to facilitate the end of the connecting member 300 to enter and exit the receiving cavity.

[0106] In the initial state, the hook body 100 is separated from the connecting member 300, and the connecting member 300 is disposed outside the receiving cavity. When the hook body 100 moves towards the connecting member 300, the connecting member 300 pushes the movable block 200 to rotate to open the opening 110. At this time, the hook body 100 can continue to move downward, so that the connecting member 300 enters the receiving cavity from the opening 110. When the connecting member 300 enters the receiving cavity to a certain extent, the movable member can automatically fall back under the action of gravity to close the opening 110. At this time, when the lifting device controls the hook body 100 to move upward, the connecting member 300 can abut against the movable block 200 to achieve locking.

[0107] In another alternative embodiment, the movable block 200 is slidably disposed on the hook body 100. In the initial state, the hook body 100 is separated from the connecting member 300, and the connecting member 300 is disposed outside the receiving cavity. When the hook body 100 moves towards the connecting member 300, the connecting member 300 pushes the movable block 200 to slide to open the opening 110. At this time, the hook body 100 can continue to move downward, so that the connecting member 300 enters the receiving cavity from the opening 110, realizing the hooking of the connecting member 300. Through the sliding arrangement of the movable block 200, the connecting member 300 can smoothly enter the receiving cavity to complete the hooking process.

[0108] According to an embodiment of the present invention, referring to FIG. Figure 21 and Figure 22 as shown, the hook body 100 is provided with a guide groove 120, and the movable block 200 is adapted to slide along the guide groove 120.

[0109] It can be understood that in this embodiment, by providing the guide groove 120 on the hook body 100, through the setting of the guide groove 120, the movable block 200 can be effectively guided to slide along a specific path, ensuring the stability and accuracy of the connecting member 300 during the hooking process. The movable block 200 sliding along the guide groove 120 can provide a more precise movement trajectory, ensuring that the connecting member 300 can smoothly enter the receiving cavity and be locked, avoiding unnecessary swinging or deviation. This design can effectively increase the success rate of hooking, reduce the friction force during the sliding process of the movable block 200, and improve the reliability and stability of the entire automatic hooking device at the same time.

[0110] According to an embodiment of the present invention, referring to Figure 21 and Figure 22 as shown, the hooking device further includes an elastic member 130, and the elastic member 130 connects the movable block 200 and the hook body 100; during the process of the connecting member 300 switching to the hooking state, the elastic member 130 is adapted to push the movable block 200 to slide, so that the movable block 200 abuts against and locks the connecting member 300.

[0111] It can be understood that in an optional embodiment, one end of the elastic member 130 is connected to the movable block 200, and the other end is connected to the inner wall of the hook body 100. When the hook body 100 moves downward, the connecting member 300 pushes the movable block 200 to slide and open the opening 110. At this time, the elastic member 130 is compressed. When the connecting member 300 enters the accommodating cavity to a certain extent, the elastic member 130 pushes the movable block 200 to slide back to its original position, so that the movable block 200 abuts against the connecting member 300 to achieve locking.

[0112] The elastic member 130 can provide a pre-tightening force, and can always maintain a certain tension during the hooking process, ensuring that the contact between the connecting member 300 and the movable block 200 is always tight and stable. The presence of the elastic member 130 can provide additional force and flexibility to help the movable block 200 better adapt to the shape and position changes of the connecting member 300 during the hooking process. When the connecting member 300 switches to the hooking state, the elastic member 130 can effectively push the movable block 200 to slide, ensuring that the movable block 200 can accurately abut against and lock the connecting member 300, thereby completing the hooking operation. This design not only improves the accuracy and stability of hooking, but also reduces the workload of the operator.

[0113] According to an embodiment of the present invention, a rotating member 220 is rotatably provided on the movable block 200. The connecting member 300 is adapted to move towards the hook body 100 to move between a hooked state and a decoupled state. In the hooked state, the rotating member 220 abuts against the connecting member 300; in the decoupled state, the rotating member 220 is separated from the connecting member 300, and the connecting member 300 is adapted to move relative to the hook body 100 to push the rotating member 220 to drive the movable block 210 to slide and open the opening 110, separating the connecting member 300 from the hook body 100.

[0114] It can be understood that in this embodiment, this design enables the hooking device to have an automatic decoupling function, greatly improving the operation efficiency and safety. When a decoupling operation is required, the connecting member 300 and the hook body 100 can move relative to each other, pushing the rotating member 220 to rotate, and driving the movable block 200 to slide to open the opening 110, thereby realizing the rapid detachment of the connecting member 300 from the hook body 100 and conveniently completing the loading and unloading operation.

[0115] According to an embodiment of the present invention, referring to Figure 21 and Figure 22 As shown, at least one of the contact portions between the movable block 200 and the connecting member 300 is provided with an inclined surface for guiding during the process of the connecting member 300 moving towards the hook body 100.

[0116] It can be understood that in this embodiment, the contact part of at least one of the movable block 200 and the connecting piece 300 is provided with an inclined surface, which is used for guiding during the process of the connecting piece 300 and the hook body 100 moving towards each other. By providing an inclined surface at the contact part, it can guide the correct alignment of the connecting piece 300 and the hook body 100 when they move towards each other, so that the connecting piece 300 can push the movable block 200 to slide. The guiding function of the inclined surface can help eliminate problems such as friction, jamming or incorrect installation caused by inaccurate alignment. It can guide the connecting piece 300 and the movable block 200 to correctly align and cooperate with each other during the movement process, thus ensuring the smooth progress of the hook operation.

[0117] The shape and angle of the inclined surface can be designed according to actual needs to ensure that the connecting piece 300 can accurately enter the receiving cavity of the movable block 200 or the hook body 100 and complete the locking smoothly. This embodiment does not make specific limitations on this.

[0118] In an optional implementation manner, an inclined surface for guiding is provided on the movable block 200. In another optional implementation manner, an inclined surface for guiding is provided on the connecting piece 300. In another optional implementation manner, inclined surfaces for guiding are provided on both the movable block 200 and the connecting piece 300, which can be designed according to specific requirements and actual application scenarios. This embodiment does not make specific limitations on this.

[0119] It can be understood that in this embodiment, the transfer equipment for semiconductors includes a quartz cylinder 4, a hook device and the above-mentioned material transport vehicle capable of tilting materials. The quartz cylinder 4 is a material container for secondary feeding of a crystal pulling furnace, usually made of high-purity quartz material. It is used to protect semiconductor materials and provide good sealing and protection during the transfer process. The inside of the quartz cylinder 4 usually has a shape and size suitable for placing semiconductor materials. The material transport vehicle capable of tilting materials is a carrier for carrying and transporting semiconductor materials. It is usually made of strong metal materials and has sufficient strength and stability.

[0120] In an optional implementation manner, the material transport vehicle capable of tilting materials is transported by an AGV (Automated Guided Vehicle), which is equipped with an electric control system and can realize the automatic transportation of the quartz cylinder 4. An AGV is an unmanned vehicle that can autonomously drive in places such as factories and warehouses. It can sense the surrounding environment through various sensors such as lasers, ultrasonic waves, and vision, so as to perform route planning and obstacle avoidance and realize automated transportation tasks.

[0121] In an alternative embodiment, a tilting material carrier transports a quartz cylinder 4 correspondingly. This design is simple and direct, ensuring that each quartz cylinder 4 can be fully fixed and protected during transportation, reducing the possibility of interference between quartz cylinders 4, and at the same time, it is easier to control the stability and safety of transportation. In another alternative embodiment, a tilting material carrier can be designed to be able to load multiple quartz cylinders 4 simultaneously to improve transportation efficiency. This design is suitable for scenarios where batch transportation is required, which can reduce the number of loading and unloading operations and improve production efficiency. Different embodiments can be selected according to actual production requirements and process flows, and this embodiment does not make specific limitations in this regard.

[0122] In a specific embodiment, the operation process of the transfer equipment for semiconductors can be as follows: Manually unscrew the special crystal-growing head for crystal pulling and install an automatic hook; The AGV tilting material carrier transports the full quartz cylinder 4 tilting material carrier to the loading docking interface; Automatically complete the hanging, feeding, and unhooking of the quartz cylinder 4; The AGV transports out the empty quartz cylinder 4 tilting material carrier and transports in a new full quartz cylinder 4 tilting material carrier; Continue to automatically complete the hanging, feeding, and unhooking of the quartz cylinder 4; Until the feeding is completed; Manually unscrew the hook and install the special crystal-growing head for crystal pulling to complete the entire feeding process.

[0123] It can be understood that since the tilting material carrier in the transfer equipment for semiconductors has the beneficial effects of the above embodiments, the transfer equipment for semiconductors correspondingly has the beneficial effects of the above embodiments. The specific implementation manners can refer to the above embodiments, and this application will not elaborate further.

[0124] Finally, it should be noted that the above embodiments are only used to illustrate the present invention, rather than to limit the present invention. Although the present invention has been described in detail with reference to the embodiments, those of ordinary skill in the art should understand that various combinations, modifications, or equivalent replacements of the technical solutions of the present invention do not depart from the spirit and scope of the technical solutions of the present invention, and should all be covered by the scope of the claims of the present invention.

Claims

1. A material transport vehicle capable of tilting materials, characterized in that: include: A mounting frame, wherein the mounting frame is provided with a mounting space, and a side of the mounting frame is provided with an avoidance opening communicating with the mounting space; A rotating seat, the rotating seat is arranged on the top of the mounting frame; A limit assembly, the limit assembly is arranged on the mounting frame, and the limit assembly is arranged corresponding to the bottom of the mounting space; A flip frame, the flip frame is used to carry materials, part of the flip frame is installed in the installation space, the flip frame is rotatably connected to the mounting frame through the rotating seat, wherein the bottom of the flip frame is suitable for stopping at the limit assembly, or the flip frame rotates and tilts relative to the mounting frame with the rotating seat as the rotating fulcrum.

2. The tiltable material transport vehicle according to claim 1, characterized in that: The mounting frame comprises: A base frame, wherein the limit assembly is arranged on the base frame; A frame body, wherein the frame body is arranged above the base frame, the frame body includes a first supporting part, a second supporting part and a connecting part, the first supporting part and the second supporting part are arranged opposite to each other, the connecting part connects the first supporting part and the second supporting part, the first supporting part, the second supporting part and the connecting part enclose the installation space, the first supporting part and the second supporting part form the avoidance opening on the side away from the connecting part, the material transport vehicle that can tilt the material includes two rotating seats, one rotating seat is installed on the first supporting part, and the other rotating seat is installed on the second supporting part, one side of the flip frame is connected to one rotating seat, and the other side is connected to the other rotating seat.

3. The tiltable material transport vehicle according to claim 1, characterized in that: The tiltable material transport vehicle also includes a driving member, one end of which is rotatably connected to the limit assembly, and the other end of which is rotatably connected to the flip frame. The driving member is suitable for pushing the flip frame to rotate and tilt with the rotating seat as a fulcrum.

4. The tiltable material transport vehicle according to claim 3, characterized in that: The limiting assembly is located at a side of the mounting frame away from the avoiding opening, and the driving member is connected to a side of the flip frame away from the avoiding opening.

5. The tiltable material transport vehicle according to any one of claims 1 to 4, characterized in that: The limiting component comprises: A mounting block, the mounting block being mounted on the mounting frame; A limit rod is installed on a side of the mounting block facing the flip frame, the limit rod at least partially protrudes from the mounting block, and the limit rod is used for stopping and abutting against the flip frame.

6. The tiltable material transport vehicle according to claim 5, characterized in that: The limit assembly also includes a stop spring, which abuts between the limit rod and the mounting block. The limit rod is movably arranged on the mounting block. The limit rod moves toward the mounting block under the pressure of the flip frame and compresses the stop spring.

7. The tiltable material transport vehicle according to claim 6, characterized in that: The limiting assembly includes at least two limiting rods and two stopping springs. The at least two limiting rods are arranged at intervals along the extending direction of the mounting block, and each stopping spring is arranged corresponding to one limiting rod.

8. The tiltable material transport vehicle according to any one of claims 1 to 4, characterized in that: A lever handle is provided on the top of the turning frame.

9. The tiltable material transport vehicle according to any one of claims 1 to 4, characterized in that: A clamp space is provided on one side of the turning frame, a bottom support is provided at the bottom of the clamp space, and the material transport vehicle capable of tilting materials further comprises: A traction assembly, wherein the traction assembly is movably connected to the overturning frame, and an elastic member is connected between the traction assembly and the overturning frame; A support plate, the support plate is connected to one end of the traction assembly adjacent to the base, and a movable gap is formed between the support plate and the base; A claw assembly, wherein the claw assembly is fixedly connected to the traction assembly and extends toward the clamp space, wherein the support plate is used to support the material, and the support plate moves toward the base under the pressure of the material, so that the traction assembly pulls the claw assembly to clamp the material, and when the material moves away from the support plate, the support plate moves away from the base, and the traction assembly drives the claw assembly to open under the elastic restoring force of the elastic member.

10. A semiconductor transfer device, characterized in that: include: The tiltable material transport vehicle according to any one of claims 1 to 9; A quartz cylinder, arranged on the material transport vehicle capable of tilting the material; A hook device, the hook device comprises a hook body, a movable block and a connecting piece, the hook body forms a accommodating cavity with an opening, the movable block is movably arranged in the accommodating cavity to at least partially open or at least partially close the opening; the connecting piece is used to be installed on the quartz cylinder, the connecting piece is suitable for moving towards the hook body to push the movable block to move and open the opening, and switch the connecting piece to a hook state; in the hook state, the connecting piece at least partially enters the accommodating cavity, and the movable block is suitable for abutting to lock the connecting piece.

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