Coating auxiliary device and vacuum coating equipment

Abstract

The utility model discloses a film coating auxiliary device and vacuum film coating equipment, and relates to the technical field of vacuum film coating equipment, the film coating auxiliary device comprises a base, a rotating mechanism and an operation part rotatably connected to the base through the rotating mechanism, the operation part is detachably connected with the base, and the operation part is detachably connected with the base. The operating part is provided with a bearing part for placing a workpiece; the operation part has a locking state and an unlocking state, and when the operation part is in the locking state, the operation part and the base are relatively fixed; when the operation part is in the unlocking state, the operation part can rotate relative to the base. The coating auxiliary device achieves the purposes of reducing the time for turning over the workpiece and improving the workpiece assembling and machining quality and efficiency at the same time.

Description

Technical Field

[0001] This application relates to the technical field of vacuum coating equipment, and particularly to a coating auxiliary device and a vacuum coating equipment. Background Art

[0002] A vacuum coating equipment is a coating equipment that operates under a relatively high vacuum. By placing a workpiece, such as a substrate and a target material, in a vacuum chamber simultaneously, the target material can be coated onto the workpiece. If both sides of the workpiece need to be coated, but when the vacuum coating equipment does not have the ability to coat both sides of the workpiece at one time, it is necessary to move the coating auxiliary device carrying the workpiece out of the vacuum chamber after one side of the workpiece is coated. Then, after turning the workpiece over, it is placed back into the vacuum chamber to coat the other side of the workpiece. And this turning process needs to be completed within the normal production beat time, otherwise it will affect the processing efficiency.

[0003] In the related art, the workpiece is fixed to the carrying part of the coating auxiliary device by means of screw pressing plate or tape fixing. In this way, during the process of turning over and clamping the workpiece, in order to ensure the assembly positioning accuracy requirements, not only the process is cumbersome and the assembly time is long, but also, if the adhesive fixing method is used, the workpiece will inevitably be damaged during the process of tearing the tape. Summary of the Utility Model

[0004] Embodiments of this application provide a coating auxiliary device and a vacuum coating equipment, aiming to reduce the time for turning over the workpiece and improve the assembly processing quality and efficiency of the workpiece.

[0005] In a first aspect, an embodiment of this application provides a coating auxiliary device for a vacuum coating equipment. The coating auxiliary device includes a base, a rotating mechanism, and an operating part rotatably connected to the base through the rotating mechanism. The operating part is detachably connected to the base, and the operating part has a carrying part for placing a workpiece; the operating part has a locked state and an unlocked state. When the operating part is in the locked state, the operating part is relatively fixed to the base; when the operating part is in the unlocked state, the operating part can rotate relative to the base.

[0006] In some embodiments, the base is a frame structure, and the operating part is rotatably connected to the central cavity of the base; the rotating mechanism includes a rotating component and a stopper. The operating part is rotationally connected to the base through the rotating component, and the stopper is movably connected to the base. The stopper has a stopping part, and the stopping part can extend axially along the rotating component into the central cavity to prevent the operating part from rotating relative to the base.

[0007] In some embodiments, a groove is provided on a first side wall of the base connected to the stopper, the groove penetrates the base in the thickness direction of the base, and a mounting hole penetrating the bottom wall of the groove is provided on the bottom wall of the groove; the stopper includes: a pin shaft, a stopper block, and a first elastic member, the pin shaft can move in the mounting hole, the pin shaft includes a first section and a second section, the diameter of the first section is smaller than that of the second section, and the second section is the stopper portion; the stopper block is detachably connected to one end of the first section away from the second section; the first elastic member is disposed on the first section, and the first elastic member is located between the stopper block and the second section; when the stopper is in the first position, the stopper block stops at the edge of the groove, the first elastic member is compressed, and the stopper portion is located in the mounting hole; when the stopper is in the second position, the stopper block stops at the mounting hole, and the stopper portion of the pin shaft extends into the central cavity.

[0008] In some embodiments, the operation part is a frame structure, the operation part includes a first side along a first direction and a second side along a second direction, the first direction, the second direction and the thickness direction of the operation part are perpendicular to each other in pairs, and the first direction is parallel to the axial direction of the rotation assembly; the first side is connected to the base through the rotation assembly; the second side is disposed opposite to the stopper, and an avoidance hole is provided on the second side. When the avoidance hole rotates to be opposite to the mounting hole, the stopper portion can extend into the avoidance hole to prevent the operation part from rotating relative to the base.

[0009] In some embodiments, the rotation assembly includes a rotating shaft and an inserting shaft arranged coaxially, the rotating shaft and the inserting shaft are rotatably connected between the base and the operation part, and the rotating shaft is perpendicular to the pin shaft so that the operation part rotates around the rotating shaft.

[0010] In some embodiments, the inserting shaft is connected to the base through a second elastic member, and the inserting shaft can move into the central cavity of the base under the action of the elastic force of the second elastic member; the operation part is provided with a first insertion part and a second insertion part corresponding to the positions of the rotating shaft and the inserting shaft; the rotating shaft is detachably clamped with the first insertion part; along the axial direction of the inserting shaft, the inserting shaft extends into the second insertion part, and the rotating shaft is inserted into the first insertion part so that the operation part can rotate relative to the base.

[0011] In some embodiments, an avoidance groove is provided on the second side wall connecting the base and the rotating shaft, and a connecting block is detachably connected to the avoidance groove; the connecting block is provided with the first insertion part, and the first insertion part is a through hole that penetrates the connecting block along the width direction of the connecting block, and the hole wall on one side of the first insertion part along the thickness direction of the connecting block has an opening for inserting the rotating shaft, and the rotating shaft is clamped with the first insertion part through the opening.

[0012] In some embodiments, the rotating shaft includes a first shaft segment, a second shaft segment and a third shaft segment connected between the first shaft segment and the second shaft segment. In a cross-section perpendicular to the rotating shaft, a cross-sectional area of ​​the third shaft segment is larger than a cross-sectional area of ​​the first shaft segment, and a cross-sectional area of ​​the third shaft segment is larger than a cross-sectional area of ​​the second shaft segment. The first shaft segment is fixedly connected to the operating portion, the second shaft segment can be rotatably extended into the first insertion portion, and the third shaft segment is stopped at the first insertion portion.

[0013] In some embodiments, an escape space is provided on the first side wall, a supporting block is detachably connected to the escape space, and the supporting block is provided with the groove.

[0014] In some embodiments, the connection between the inner side wall and the bottom wall of the operating portion forms a stepped bearing portion, and a plurality of elastic pressure plate assemblies are provided on the bearing portion. The elastic pressure plate assemblies are detachably connected to the edge of the workpiece.

[0015] In some embodiments, the number of the stoppers is two, and the two stoppers correspond one-to-one to the two second sides.

[0016] In the coating auxiliary device provided by the embodiment of the present application, the operating part is rotatably connected to the base through a rotating mechanism. When the operating part is in a locked state, the operating part and the base are relatively fixed; when the operating part is in an unlocked state, the operating part can rotate relative to the base. In this way, when the workpiece placed on the bearing part needs to be turned over, it is only necessary to put the operating part in an unlocked state and then lock the operating part, which not only makes the turning operation of the bearing part convenient, but also, during the rotation of the operating part, there is no need to disassemble the workpiece, thereby saving the workpiece assembly process and time, which is conducive to ensuring the processing efficiency of the workpiece, thus achieving the purpose of both reducing the time for turning the workpiece and improving the workpiece assembly processing quality and precision; at the same time, the operating part is detachably connected to the base, so that when both sides of the workpiece are coated, if the workpiece of the same specification is replaced, only the workpiece can be disassembled, and if the workpiece of different specifications is replaced, the operating part and the workpiece can be disassembled together, and the operating part carrying the workpiece to be processed can be replaced, thus further saving the time for replacing the workpiece, thereby improving production efficiency.

[0017] In a second aspect, an embodiment of the present application further provides a vacuum coating device, including the coating auxiliary device as described in the first aspect.

[0018] The coating auxiliary device in the vacuum coating device in the embodiment of the present application has the same structure and achieved technical effects as the coating auxiliary device in the first aspect, and will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 It is a schematic structural diagram of the coating auxiliary device when the operation part is in the locked state in some embodiments of the present application;

[0021] Figure 2 For Figure 1 exploded view;

[0022] Figure 3 For Figure 1 It is a schematic structural diagram of the coating auxiliary device when the operation part in

[0023] Figure 4 For Figure 1 the rotation locus diagram of the operation part in

[0024] Figure 5 For Figure 1 the assembly structure diagram of the base and the rotating mechanism in

[0025] Figure 6 For Figure 5 the A-A cross-sectional view in

[0026] Figure 7 For Figure 6 the structural schematic diagram when the stop part of the stop member extends out of the central cavity of the base in

[0027] Figure 8 For Figure 3 the enlarged view at I in

[0028] Figure 9 For Figure 5 the B-B cross-sectional view in

[0029] Figure 10 It is an exploded view of the rotating shaft and the connecting block of the rotating assembly in some embodiments of the present application;

[0030] Figure 11 For Figure 10 the assembly drawing of the connection between the rotating shaft and the connecting block in

[0031] Figure 12 For Figure 3 the enlarged view of II in

[0032] Figure 13 For Figure 9 the enlarged view of III in

[0033] Figure 14 the schematic diagram of the assembly structure of the operating part and the workpiece in some embodiments of the present application;

[0034] Figure 15 For Figure 14 the partial structure decomposition diagram in

[0035] Figure 16 For Figure 14 the C-C cross-sectional view in

[0036] Figure 17 the schematic diagram of the assembly structure of the elastic pressing plate assembly in some embodiments of the present application;

[0037] Figure 18 For Figure 17 the D-D cross-sectional view in

[0038] Explanation of reference numerals:

[0039] 10. Base; 101. Central cavity; 102. Groove; 111. First side wall; 112. Second side wall; 12. Inner side wall; 13. Bottom wall; 14. Mounting hole;

[0040] 20. Operating part; 201. Carrying part; 21. First side; 22. Second side; 23. Avoidance hole; 24. Avoidance groove; 25. Connecting block; 251. First insertion part; 252. Second insertion part; 253. Opening; 26. Avoidance space; 27. Carrying block; 28. Perforation;

[0041] 30. Rotating mechanism;

[0042] 40. Rotating assembly; 41. Rotating shaft; 410. First plane; 411. First shaft section; 412. Second shaft section; 413. Third shaft section; 42. Insertion shaft; 43. Second elastic member;

[0043] 50. Stopper; 501. Stopping part; 51. Pin shaft; 511. First section; 512. Second section; 52. Stopping block; 53. First elastic member;

[0044] 60. Elastic pressing plate assembly; 61. Pressing block, 610. Waist-shaped hole; 62. Fastener; 63. Third elastic member; 64. Snap ring; 65. First buffer member; 66. Second buffer member;

[0045] 200. Workpiece. Detailed implementation manners

[0046] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts shall fall within the protection scope of the present application.

[0047] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0048] In the description of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; for those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0049] The terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, unless otherwise stated, the meaning of "plurality" is two or more.

[0050] The embodiment of the present application also provides a vacuum coating device, and the vacuum coating device includes a coating auxiliary device.

[0051] The above-mentioned vacuum coating device is a coating device carried out under a relatively high vacuum degree. The workpiece to be coated is called a substrate, and the material to be coated is called a target. The substrate and the target are placed in a vacuum chamber at the same time to coat the target on the substrate. Coating methods include vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, and many others.

[0052] Sputtering coating can be simply understood as bombarding the target material with electrons or high-energy lasers, causing the surface components to be sputtered out in the form of atomic groups or ions, and finally deposited on the surface of the substrate, undergoing a film-forming process, and finally forming a thin film.

[0053] The vacuum coating equipment in this application is aimed at coating both sides of a workpiece.

[0054] After the coating of one side of the workpiece is completed, the coating auxiliary device carrying the semi-processed workpiece can be withdrawn from the vacuum chamber, and then the semi-processed workpiece is turned over and fixed by the operating part, and then the coating auxiliary device is placed in the vacuum chamber, so as to coat the uncoated side of the semi-processed workpiece. In this way, the turning of the workpiece placed on the operating part is achieved only by the rotation of the operating part, and the workpiece does not need to be removed from the operating part and reassembled during the turning process, thus achieving the purpose of reducing the time of turning over the workpiece and improving the quality and efficiency of workpiece assembly processing.

[0055] like Figures 1 to 3 As shown, the coating auxiliary device includes a base 10, a rotating mechanism 30 and an operating part 20 rotatably connected to the base 10 through the rotating mechanism 30. The operating part 20 is detachably connected to the base 10, and the operating part 20 has a bearing part 201 for placing a workpiece 200; the operating part 20 has a locked state and an unlocked state. When the operating part 20 is in the locked state, the operating part 20 and the base 10 are relatively fixed; when the operating part 20 is in the unlocked state, the operating part 20 can rotate relative to the base 10.

[0056] The base 10 is mainly used to carry and install the operating unit 20. The base 10 and the frame can be two independent components, and the base 10 can also be a part of the frame.

[0057] The operating part 20 is rotatably connected to the base 10 via a rotating mechanism 30 . When the operating part 20 is in a locked state, the operating part 20 and the base 10 are relatively fixed. When the operating part 20 is in an unlocked state, the operating part 20 can rotate relative to the base 10 . In this way, when the workpiece 200 placed on the supporting part 201 needs to be turned over, it is only necessary to unlock the operating part 20 and then lock the operating part 20, which not only makes the turning operation of the supporting part 201 convenient, but also, during the rotation of the operating part 20, there is no need to disassemble the workpiece 200, thereby saving the assembly process and time of the workpiece 200, which is conducive to ensuring the processing efficiency of the workpiece 200. In this way, the purpose of reducing the time for turning over the workpiece 200 and improving the assembly processing quality and efficiency of the workpiece 200 is achieved; at the same time, the operating part 20 is detachably connected to the base 10, so that when both sides of the workpiece 200 are coated, if a workpiece 200 of the same specification is replaced, only the workpiece 200 can be disassembled, and if a workpiece 200 of different specifications is replaced, the operating part 20 and the workpiece 200 can be disassembled together, and the operating part 20 carrying the workpiece 200 to be processed can be replaced. In this way, the time for replacing the workpiece 200 is further saved, thereby improving production efficiency.

[0058] like Figure 2 and Figure 5 As shown, in some embodiments, the base 10 is a frame structure, that is, the base 10 has a central cavity 101, and the operating part 20 is rotatably connected to the central cavity 101 of the base 10. By designing the base 10 as a frame plate mechanism, the operating part 20 can rotate 360 ​​degrees in the central cavity 101 of the base 10.

[0059] It should be noted that the above frame structure refers to a structure having a central cavity 101 formed by a plurality of plates.

[0060] like Figure 5 As shown, the base 10 includes two first side walls 111 along the first direction and two second side walls 112 along the second direction, and the two first side walls 111 and the two second side walls 112 are connected to form a central cavity 101. The first side walls 111 and the second side walls 112 can be an integral structure or a split structure, which is not specifically limited here.

[0061] like Figure 2 , Figure 6 , Figure 7 and Figure 9 As shown, the rotating mechanism 30 includes a rotating component 40 and a stopper 50. The operating part 20 is rotatably connected to the base 10 via the rotating component 40. The stopper 50 is movably connected to the base 10. The stopper 50 has a stopper 501. The stopper 501 can extend into the central cavity 101 along the axial direction of the rotating component 40 to prevent the operating part 20 from rotating relative to the base 10.

[0062] With the above settings, the movement of the stopper 50 enables the operation part 20 to quickly switch between the unlocked state and the locked state, and the operation is simple.

[0063] As Figure 2 , Figure 3 shown, in some embodiments, the operation part 20 is a frame structure. The operation part 20 includes a first side 21 along a first direction and a second side 22 along a second direction. The first direction, the second direction and the thickness direction of the operation part 20 are perpendicular to each other in pairs, and the first direction is parallel to the axial direction of the rotating component 40; the first side 21 is connected to the base 10 through the rotating component 40; the second side 22 is disposed opposite to the stopper 50, and an avoidance hole 23 is formed in the second side 22. When the avoidance hole 23 rotates to be opposite to the mounting hole 14, the stopper portion 501 of the stopper 50 can extend into the avoidance hole 23 to prevent the operation part 20 from rotating relative to the base 10.

[0064] For the structure of the above-mentioned stopper 50, please refer to the detailed introduction in the following text.

[0065] Since the workpiece 200 is a plate-shaped or sheet-shaped substrate, by designing the operation part 20 into a frame structure as well, on the one hand, it is convenient for the assembly and positioning of the workpiece 200, and on the other hand, on the basis that the base 10 is a frame structure, in this way, it is convenient for the connection and fixation of the operation part 20 and the base 10, that is to say, it is convenient to realize the unlocked state and the locked state of the operation part 20.

[0066] As Figure 6 , Figure 7 and Figure 8 shown, in some embodiments, the first side wall 111 of the base 10 connected to the stopper 50 has a groove 102. The groove 102 penetrates through the base 10 along the thickness direction of the base 10, and a mounting hole 14 penetrating through the bottom wall 13 of the groove is formed on the bottom wall 13 of the groove 102; the stopper 50 includes: a pin shaft 51, a stopper block 52 and a first elastic member 53. The pin shaft 51 can move in the mounting hole 14. The pin shaft 51 includes a first section 511 and a second section 512. The diameter of the first section 511 is smaller than that of the second section 512, and the second section 512 is the stopper portion 501; the stopper block 52 is detachably connected to one end of the first section 511 away from the second section 512; the first elastic member 53 is disposed on the first section 511, and the first elastic member 53 is located between the stopper block 52 and the second section 512; when the stopper 50 is in the first position, the stopper block 52 stops at the edge of the groove 102, the first elastic member 53 is compressed, and the stopper portion 501 is located in the mounting hole 14; when the stopper 50 is in the second position, the stopper block 52 stops at the mounting hole 14, and the stopper portion 501 of the pin shaft 51 extends into the central cavity 101.

[0067] The above-mentioned bearing block 27 can be detachably fixed in the avoidance hole 23 by bolts or screws, etc., and the avoidance space 26 can have the same structure as the avoidance groove 24 described later.

[0068] The above-mentioned stopper 52 is a cuboid. The thickness direction of the stopper 52 is parallel to the pin shaft 51. The dimension in the length direction of the stopper 52 is greater than the groove width of the groove 102, and the dimension in the width direction of the stopper 52 is less than the groove width of the groove 102. Thus, during the rotation of the stopper 50, when the stopper 52 is in the first position, that is, the length direction of the stopper 52 is parallel to the groove width direction of the groove 102, as Figure 8 shown; when the stopper 52 is in the second position, that is, the length direction of the stopper 52 is perpendicular to the groove width direction of the groove 102.

[0069] Through the above settings, the stopper 50 can be rotated so that the stopper portion 501 of the stopper 50 extends into the central cavity 101 under the action of the first elastic member 53, so that the stopper 50 can play a role in stopping the relative rotation of the operating portion 20 with respect to the base 10, that is, the operating portion 20 is in a locked state, as Figure 7 shown; or, when the stopper 52 is stopped at the edge of the groove 102, the stopper portion 501 of the stopper 50 is kept in the mounting hole 14 under the elastic force of the first elastic member 53, as Figure 6 shown, that is, the operating portion 20 is in an unlocked state, and the operating portion 20 can rotate relative to the base 10. At the same time, the design that the stopper 50 includes the first elastic member 53 enables the operating portion 20 to achieve automatic locking and manual unlocking under the action of the first elastic member 53, thereby improving the assembly efficiency of the operating portion 20 and the base 10.

[0070] As Figure 3 and Figure 8 shown, an avoidance space 26 is formed on the first side wall 111. A bearing block 27 is detachably connected at the avoidance space 26, and a groove 102 is formed on the bearing block 27.

[0071] With such a setting, compared with directly forming the groove 102 on the first side wall 111 of the base 10, first forming the avoidance space 26 on the first side wall 111, and then detachably fixing the bearing block 27 with the groove 102 formed thereon in the avoidance space 26 of the first side wall 111. In this way, not only is the processing of the base 10 relatively simple and it is easy to improve the assembly accuracy of the base 10 and the operating portion 20; moreover, since the force at the connection between the operating portion 20 and the groove 102 is relatively large and is prone to damage during the rotation of the operating portion 20, by connecting the bearing block 27 with the operating portion 20, in this way, when the connection with the groove 102 is damaged, only the bearing block 27 needs to be replaced, which is convenient for maintenance and has a low maintenance cost.

[0072] As Figure 3As shown, in some embodiments, the number of the stoppers 50 is two, and the two stoppers 50 correspond to the two second sides 22 one by one.

[0073] With the above arrangement, when the operating part 20 is in the locked state, the operating part 20 is fixed in the central cavity 101 of the base 10 by the stopper parts 501 of the two stoppers 50, so that the operating part 20 is firmly fixed to the base 10.

[0074] Of course, the structure of the stopper 50 can also be one, three, four, etc., which is not specifically limited herein.

[0075] As Figure 9 shown, in some embodiments, the rotating assembly 40 includes a rotating shaft 41 and an inserting shaft 42 arranged coaxially. The rotating shaft 41 and the inserting shaft 42 are rotatably connected between the base 10 and the operating part 20, and the rotating shaft 41 is perpendicular to the pin shaft 51, so that the operating part 20 rotates around the rotating shaft 41. That is, the pin shaft 51 is parallel to the horizontal direction, and the rotating shaft 41 and the inserting shaft 42 are parallel to the vertical direction. In this way, the operating part 20 can rotate relative to the base 10 around the vertical direction.

[0076] By rotatably connecting the rotating shaft 41 and the inserting shaft 42 between the base 10 and the operating part 20, the operating part 20 can rotate relative to the base 10. Moreover, since the rotating shaft 41 is perpendicular to the pin shaft 51, the pin shaft 51 of the stopper 50 can well play a role in stopping the rotation of the operating part 20.

[0077] As Figure 9 、 Figure 10 and Figure 11 shown, in some embodiments, an avoidance groove 24 is formed on the second side wall 112 of the base 10 connected to the rotating shaft 41, and a connecting block 25 is detachably connected to the avoidance groove 24; a first insertion part 251 is formed on the connecting block 25. The first insertion part 251 is a through hole penetrating the connecting block 25 along the width direction of the connecting block 25. One side wall of the first insertion part 251 along the thickness direction of the connecting block 25 has an opening 253 for inserting the rotating shaft 41, and the rotating shaft 41 is clamped with the first insertion part 251 through the opening 253.

[0078] The above connecting block 25 can be detachably fixed in the avoidance space 26 by bolts or screws, etc.

[0079] With the above settings, when the connecting block 25 is fixed at the avoidance groove 24, the rotating shaft 41 can be rotationally clamped with the first insertion portion 251 through the opening 253. In this way, not only the rotation of the rotating shaft 41 and the base 10 is realized, but also the disassembly and assembly of the rotating shaft 41 are convenient, saving the cost of subsequent maintenance time. At the same time, compared with directly opening the first insertion portion 251 on the second side wall 112, the operating portion 20 is connected to the first insertion portion 251 through the rotating mechanism 30. When the force at the connection of the first insertion portion 251 is relatively large, by connecting the connecting block 25 to the operating portion 20, in this way, when the first insertion portion 251 is damaged, only the connecting block 25 needs to be replaced, and the maintenance is convenient and the maintenance cost is low.

[0080] As Figure 10 and Figure 11 shown, the connecting block 25 is in a long direction, that is, the thickness direction of the connecting block 25 is parallel to the thickness direction of the second side wall 112, the length direction of the connecting block 25 is parallel to the length direction of the second side wall 112, and both ends of the connecting block 25 along the length direction ( Figure 10 the horizontal direction in

[0081] As Figure 9 shown, in some embodiments, the rotating shaft 41 includes a first shaft section 411, a second shaft section 412, and a third shaft section 413 connected between the first shaft section 411 and the second shaft section 412. In a cross-section perpendicular to the rotating shaft 41, the cross-sectional area of the third shaft section 413 is larger than the cross-sectional area of the first shaft section 411, and the cross-sectional area of the third shaft section 413 is larger than the cross-sectional area of the second shaft section 412; the first shaft section 411 is fixedly connected to the operating portion 20, the second shaft section 412 can be rotatably inserted into the first insertion portion 251, and the third shaft section 413 abuts against the first insertion portion 251.

[0082] As Figure 10 shown, the first shaft section 411 is the top section of the rotating shaft 41, the second shaft section 412 is the bottom section of the rotating shaft 41, and the second shaft section 412 is the middle section of the rotating shaft 41. With such a setting, not only the reliable rotational connection between the rotating shaft 41 and the operating portion 20 and the base 10 is ensured, but also the second shaft section 412 can play a good abutting role, preventing the rotating shaft 41 from being inserted into the first insertion portion 251 under external force.

[0083] To further improve the connection reliability between the rotating shaft 41 and the operating portion 20, a through hole 28 is opened on the second side wall 112 of the operating portion 20, as Figure 3As shown, the first shaft section 411 is provided with a first plane 410. When the first shaft section 411 extends into the second side wall 112, thus, a bolt or a screw can be passed through the through hole 28 to abut against the first plane 410, so that the rotating shaft 41 is relatively fixed to the second side wall 112 of the base 10.

[0084] It should be noted that usually, a bolt or a screw extends into the through hole 28 until it abuts against the first plane 410 of the rotating shaft 41, so that the first shaft section 411 of the rotating shaft 41 is fixed to the operating part 20. Only when the rotating shaft 41 is damaged and needs to be replaced, the rotating shaft 41 needs to be separated from the operating part 20.

[0085] As Figure 9 、 Figure 12 and Figure 13 shown, in some embodiments, the insertion shaft 42 is connected to the base 10 through the second elastic member 43. The insertion shaft 42 can move into the central cavity 101 of the base 10 under the action of the elastic force of the second elastic member 43; the operating part 20 is provided with a first insertion part 251 and a second insertion part 252 corresponding to the positions of the rotating shaft 41 and the insertion shaft 42; the rotating shaft 41 is detachably clamped with the first insertion part 251; along the axial direction of the insertion shaft 42, the insertion shaft 42 extends into the second insertion part 252, and the rotating shaft 41 is inserted into the first insertion part 251, so that the operating part 20 can rotate relative to the base 10. As Figure 9 shown, when the operating part 20 is in the unlocked state, the operating part 20 can rotate relative to the base 10 within the central cavity 101.

[0086] Through the above settings, during the assembly process of the insertion shaft 42 and the second insertion part 252, the insertion pin can be automatically inserted into the second insertion part 252 under the action of the elastic member of the second elastic member 43, so that on the basis of the rotational connection between the insertion shaft 42 and the base 10, the automation of the assembly of the insertion shaft 42 is improved. Moreover, the insertion shaft 42 can be detachably connected to the base 10. At the same time, the rotating shaft 41 is detachably clamped with the first insertion part 251, further improving the assembly efficiency of the operating part 20 and the base 10.

[0087] It should be noted that the above-mentioned second elastic member 43 can have the same structure as the first elastic member 53, which is a spring. The structure of the connection between the insertion shaft 42, the second elastic member 43 and the base 10 is the same as the structure of the pin shaft 51 in the stopper 50, the connection between the first elastic member 53 and the base 10. That is, the insertion shaft 42 has the same structure as the pin shaft 51 in the stopper 50, and the second elastic member 43 has the same structure as the first elastic member 53. Such a design not only reduces the types of components in the rotating mechanism 30, optimizes the structure of the rotating mechanism 30, but also saves the processing cost.

[0088] Of course, the structure of the connection between the insertion shaft 42, the second elastic member 43 and the base 10 may be different from the structure of the connection between the stopper 50 and the base 10, or some structures may be the same, and no specific limitation is made here.

[0089] As Figure 15 and Figure 16 shown, in some embodiments, a stepped bearing portion 201 is formed at the connection between the inner side wall 12 and the bottom wall 13 of the operation portion 20. A plurality of elastic pressing plate assemblies 60 are provided on the bearing portion 201, and the elastic pressing plate assemblies 60 are detachably connected to the edge of the workpiece 200.

[0090] Since the workpiece 200 is usually plate-shaped or sheet-shaped, a stepped bearing portion 201 is formed at the connection between the inner side wall 12 and the bottom wall 13 of the operation portion 20, so that the edge of the workpiece 200 can be abutted against the bearing portion 201. In this way, the movement of the workpiece 200 relative to the bearing portion 201 in the direction perpendicular to the thickness direction of the workpiece 200 is restricted. At the same time, the elastic pressing plate assembly 60 is connected to the edge of the workpiece 200 and the bearing portion 201. In this way, the workpiece 200 is fixed relative to the bearing portion 201 in the thickness direction, and the movement of the workpiece 200 in the thickness direction is restricted, so that the workpiece 200 is connected and fixed to the bearing portion 201, and it is beneficial to improve the assembly accuracy of the workpiece 200.

[0091] As Figure 16 , Figure 17 and Figure 18 shown, the elastic pressing plate assembly 60 includes a pressing block 61, a fastener 62, a third elastic member 63 and a snap ring 64. The pressing block 61 is provided with an oblong hole 610 along the length direction. The fastener 62 can pass through the oblong hole 610. The third elastic member 63 is sleeved on the fastener 62. The fastener 62 includes a screw rod and a protrusion connected to one end of the screw rod. When one end of the fastener 62 passes through the oblong hole 610, the third elastic member 63 is stopped between the protrusion and the oblong hole 610.

[0092] By providing the oblong hole 610 on the pressing plate, in this way, the fastener 62 can move along the length direction of the pressing block 61, so as to realize the clamping and loosening of the workpiece 200.

[0093] The above-mentioned fastener 62 is a bolt or a screw, and the above-mentioned third elastic member 63 can be a spring.

[0094] A through hole for the fastener 62 is provided on the bearing portion 201. The assembly process of the elastic pressing plate assembly 60 with the bearing portion 201 and the workpiece 200 is as follows:

[0095] The bolt of the fastener 62 sleeved with the third elastic member 63 (along as Figure 16In the horizontal direction from right to left), it sequentially passes through the through hole and the waist-shaped hole 610 on the bearing part 201. At this time, the third elastic member 63 is compressed, and the snap ring 64 is locked at the connection between the bolt and the waist-shaped hole 610. At this time, the elastic pressing plate assembly 60 is assembled and fixed with the bearing part 201.

[0096] In order to improve the assembly reliability of the elastic pressing plate assembly 60 with the bearing part 201 and the workpiece 200, a first buffer member 65 can be provided between the ring lock and the connection between the bolt and the waist-shaped hole 610, such as Figure 16 and Figure 18 shown. Before the snap ring 64 is connected to the bolt, the first buffer member 65 is sleeved on the bolt and abuts against the waist-shaped hole 610, and then the snap ring 64 is clamped with the bolt. In this way, the base area at the connection with the waist-shaped hole 610 is increased, and moreover, the size limitation of the snap ring 64 is reduced.

[0097] The above-mentioned first buffer member 65 can be a washer.

[0098] Furthermore, in order to reduce the damage to the workpiece 200 during the assembly process, a second buffer member 66 can be provided between the contact surface of the pressing block 61 and the workpiece 200, such as Figure 16 shown. In this way, during the movement of the coating auxiliary device, the workpiece 200 can be well protected, thereby improving the yield rate of the workpiece 200.

[0099] The above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A coating auxiliary device for vacuum coating equipment, characterized in that: The coating auxiliary device comprises: Base (10); Rotating mechanism (30); An operating part (20) is rotatably connected to the base (10) via the rotating mechanism (30); the operating part (20) is detachably connected to the base (10); and the operating part (20) has a bearing part (201) for placing a workpiece (200); The operating part (20) has a locked state and an unlocked state. When the operating part (20) is in the locked state, the operating part (20) and the base (10) are relatively fixed; when the operating part (20) is in the unlocked state, the operating part (20) can rotate relative to the base (10); The base (10) is a frame structure, and the operating part (20) is rotatably connected to a central cavity (101) of the base (10); The rotating mechanism (30) comprises a rotating assembly (40) and a stopper (50), the operating part (20) is rotatably connected to the base (10) via the rotating assembly (40), the stopper (50) is movably connected to the base (10), and the stopper (50) has a stopper (501), and the stopper (501) can extend into the central cavity (101) along the axial direction of the rotating assembly (40) to prevent the operating part (20) from rotating relative to the base (10).

2. The coating auxiliary device according to claim 1, characterized in that: A first side wall (111) of the base (10) connected to the stopper (50) is provided with a groove (102), the groove (102) penetrates the base (10) along the thickness direction of the base (10), and a mounting hole (14) penetrating the groove bottom wall is provided on the groove bottom wall of the groove (102); The stopper (50) comprises: A pin shaft (51) is movable in the mounting hole (14), the pin shaft (51) comprising a first section (511) and a second section (512), the diameter of the first section (511) being smaller than the diameter of the second section (512), and the second section (512) being the stopper (501); a stop block (52) detachably connected to an end of the first section (511) away from the second section (512); A first elastic member (53) is disposed on the first section (511), and the first elastic member (53) is located between the stop block (52) and the second section (512); When the stop member (50) is in the first position, the stop block (52) stops at the edge of the groove (102), the first elastic member (53) is compressed, and the stop portion (501) is located in the mounting hole (14); when the stop member (50) is in the second position, the stop block (52) stops at the mounting hole (14), and the stop portion (501) of the pin shaft (51) extends into the central cavity (101).

3. The coating auxiliary device according to claim 2, characterized in that: The operating portion (20) is a frame structure, and the operating portion (20) comprises a first side (21) along a first direction and a second side (22) along a second direction, the first direction and the second direction are perpendicular to the thickness direction of the operating portion (20), and the first direction is parallel to the axial direction of the rotating assembly (40); The first side (21) is connected to the base (10) via a rotating assembly (40); the second side (22) is arranged opposite to the stopper (50), and a avoidance hole (23) is provided on the second side (22); when the avoidance hole (23) is rotated to be opposite to the mounting hole (14), the stopper (501) can extend into the avoidance hole (23) to prevent the operating part (20) from rotating relative to the base (10).

4. The coating auxiliary device according to claim 3, characterized in that: The rotating assembly (40) comprises a rotating shaft (41) and an inserting shaft (42) which are coaxially arranged. The rotating shaft (41) and the inserting shaft (42) are rotatably connected between the base (10) and the operating part (20). The rotating shaft (41) is perpendicular to the pin shaft (51) so that the operating part (20) can rotate around the rotating shaft (41).

5. The coating auxiliary device according to claim 4, characterized in that: The insertion shaft (42) is connected to the base (10) via a second elastic member (43), and the insertion shaft (42) can move into the central cavity (101) of the base (10) under the action of the elastic force of the second elastic member (43); The operating portion (20) is provided with a first insertion portion (251) and a second insertion portion (252) at positions corresponding to the rotating shaft (41) and the inserting shaft (42); the rotating shaft (41) and the first insertion portion (251) are detachably connected; Along the axial direction of the insertion shaft (42), the insertion shaft (42) extends into the second insertion portion (252), and the rotating shaft (41) is inserted into the first insertion portion (251), so that the operating portion (20) can rotate relative to the base (10).

6. The coating auxiliary device according to claim 5, characterized in that: An avoidance groove (24) is provided on the second side wall (112) of the base (10) connected to the rotating shaft (41), and a connecting block (25) is detachably connected to the avoidance groove (24); the connecting block (25) is provided with the first insertion portion (251), the first insertion portion (251) is a through hole that penetrates the connecting block (25) along the width direction of the connecting block (25); a hole wall of one side of the first insertion portion (251) along the thickness direction of the connecting block (25) has an opening (253) for inserting the rotating shaft (41), and the rotating shaft (41) is clamped with the first insertion portion (251) through the opening (253).

7. The coating auxiliary device according to claim 5, characterized in that: The rotating shaft (41) comprises a first shaft segment (411), a second shaft segment (412) and a third shaft segment (413) connected between the first shaft segment (411) and the second shaft segment (412); in a cross section perpendicular to the rotating shaft (41), a cross-sectional area of ​​the third shaft segment (413) is greater than a cross-sectional area of ​​the first shaft segment (411), and a cross-sectional area of ​​the third shaft segment (413) is greater than a cross-sectional area of ​​the second shaft segment (412); The first shaft section (411) is fixedly connected to the operating portion (20), the second shaft section (412) can be rotated to extend into the first insertion portion (251), and the third shaft section (413) is stopped at the first insertion portion (251).

8. The coating auxiliary device according to any one of claims 3 to 7, characterized in that: An escape space (26) is provided on the first side wall (111), a bearing block (27) is detachably connected to the escape space (26), and the bearing block (27) is provided with the groove (102); And / or, the connection between the inner side wall and the bottom wall of the operating portion (20) forms a stepped bearing portion (201), and a plurality of elastic pressure plate assemblies (60) are provided on the bearing portion (201), and the elastic pressure plate assemblies (60) are detachably connected to the edge of the workpiece (200).

9. The coating auxiliary device according to any one of claims 3 to 7, characterized in that: The number of the stoppers (50) is two, and the two stoppers (50) correspond one-to-one to the two second sides (22).

10. A vacuum coating device, characterized in that: include: The coating auxiliary device according to any one of claims 1 to 9.

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