Sputtering covering and taking jig mechanism

Abstract

The utility model relates to the technical field of sputtering coating equipment, in particular to a sputtering coating covering and taking jig mechanism which comprises a rack, the conveying module is arranged on the rack; the product transferring module is movably arranged on the rack in the first direction, the second direction and the third direction; and the jig transferring module is movably arranged on the rack in the first direction, the second direction and the third direction, and is used for taking down the jig covering the sputtered product and covering the product to be sputtered of the prepared material conveying unit. According to the scheme, manual feeding and discharging work of sputtering coating is changed into full-automatic treatment, the treatment efficiency is improved, the labor cost is reduced, the product yield is improved, and the production cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of sputtering equipment, in particular to a sputtering cover taking fixture mechanism. Background Art

[0002] Sputtering, usually referring to magnetron sputtering, belongs to the high-speed and low-temperature sputtering method. This process requires a vacuum degree of about 1×10-3 Torr, that is, an inert gas argon (Ar) is filled in a vacuum state of 1.3×10-3 Pa, and a high-voltage direct current is applied between a plastic substrate (anode) and a metal target (cathode). Due to the electrons generated by glow discharge exciting the inert gas, plasma is generated. The plasma bombards the atoms of the metal target and deposits them on the plastic substrate.

[0003] Before sputtering, the product to be sputtered needs to be placed in a certain area, and the fixture is covered on the product. After sputtering is completed, the fixture is removed from the product, and finally the sputtered product is moved to the next process. In the prior art, the above steps are all completed manually. Due to the limited manual processing speed, the production cycle of sputtering is long, the efficiency is low, and the labor intensity of employees is high. And in the case of a mixture of multiple products, it is easy for manual workers to cover the fixture on the wrong product, resulting in product scrapping and reducing the product yield. Summary of the Utility Model

[0004] In view of the above-mentioned disadvantages of the prior art, the purpose of the utility model is to provide a sputtering cover taking fixture mechanism for solving the problems of low manual operation efficiency and low product yield in the prior art.

[0005] To achieve the above purpose and other related purposes, the utility model provides a sputtering cover taking fixture mechanism, including:

[0006] A frame;

[0007] A transfer module, arranged on the frame, including a loading transfer unit, an unloading transfer unit and a stock preparation transfer unit. The loading transfer unit is used to transfer the product to be sputtered along the first direction. The unloading transfer unit is used to transfer the sputtered product along the first direction. The stock preparation transfer unit is used to transfer the tray carrying the sputtered product to the frame, and transfer the tray carrying the product to be sputtered to an external sputtering device;

[0008] A product transfer module, movably arranged on the frame along the first direction, the second direction and the third direction, the first direction, the second direction and the third direction are perpendicular to each other in pairs. The product transfer module is used to move the product to be sputtered on the loading transfer unit to the stock preparation transfer unit, and move the sputtered product on the stock preparation transfer unit to the unloading transfer unit;

[0009] The jig transfer module is movably arranged on the frame along the first direction, the second direction and the third direction, and is used to remove the jig covering the sputtered product and cover it on the product to be sputtered of the stock transfer unit.

[0010] Optionally, the stock transfer unit includes an upper transfer component and a lower transfer component arranged along the third direction, and the transfer directions of the upper transfer component and the lower transfer component are opposite. A supporting component is arranged between the upper transfer component and the lower transfer component, and the supporting component is used to drive the tray to descend from the upper transfer component to the lower transfer component.

[0011] Optionally, the upper transfer component includes a return transfer part and a transition transfer part arranged in sequence along its transfer direction. The transition transfer part is arranged directly above the supporting component. The transition transfer part includes a transition driving part and two relatively arranged transition guide rails. Rotating rollers are respectively arranged on the opposite sides of the two transition guide rails, and the rollers are in transmission connection with the driving end of the transition driving part. The transition driving part is used to drive the two transition guide rails to approach and separate from each other.

[0012] Optionally, the supporting component includes a supporting driving part and a supporting part. The supporting part is in transmission connection with the driving end of the supporting driving part, and the supporting driving part is used to drive the supporting part to rise and fall.

[0013] Optionally, the product transfer module includes a first rotation driving part, a suction cup assembly and a first vision component. The suction cup assembly is in transmission connection with the driving end of the first rotation driving part. The first rotation driving part is used to drive the suction cup assembly to rotate horizontally, and the first vision component is used to identify the posture of the product and drive the first rotation driving part to act.

[0014] Optionally, the suction cup assembly includes a disc and at least two suction cups. The suction cups are arranged on the disc, and each suction cup is evenly distributed along the circumference of the disc. The disc is in transmission connection with the driving end of the first rotation driving part.

[0015] Optionally, a plurality of suction cup support rods are arranged on the disc. The suction cups and the suction cup support rods are arranged in one-to-one correspondence respectively. A long hole extending along the length direction of the suction cup support rod is arranged on the suction cup support rod. One end of the suction cup passes through the long hole and is movably arranged in the long hole along the extending direction of the long hole. A fastening piece is sleeved on the end of the suction cup passing through the long hole.

[0016] Optionally, the jig transfer module includes a jig transfer drive and a clamping assembly, the clamping assembly includes two clamping blocks, and the jig transfer drive has two driving ends, which are respectively connected to the two clamping blocks for transmission and can drive the two clamping blocks to move closer to and away from each other.

[0017] Optionally, the jig transfer module also includes a jig transfer support assembly, a second visual assembly and a second rotation drive member, the driving end of the second rotation drive member is transmission-connected to the jig transfer support assembly and can drive the jig transfer support assembly to rotate horizontally, the clamping assembly is arranged on the jig transfer support assembly and can rotate horizontally with the jig transfer support assembly, and the second visual assembly is used to identify the posture of the jig and drive the second rotation drive member to move.

[0018] Optionally, the loading conveying unit and the unloading conveying unit are arranged along a third direction, and conveying directions of the loading conveying unit and the unloading conveying unit are opposite.

[0019] As described above, the sputtering cover removal fixture mechanism of the utility model has the following beneficial effects:

[0020] In this solution, the product is transferred from the loading and conveying unit to the material preparation and conveying unit, and then the product to be sputtered (the product without the fixture) is moved from the loading and conveying unit to the material preparation and conveying unit by the product transfer module. The fixture transfer module removes the fixture covering the sputtered product and covers the fixture on the product to be sputtered. All the above fixture transfer operations are completed on the material preparation and conveying unit. The material preparation and conveying unit and the transfer module operate simultaneously. The material preparation and conveying unit conveys the tray carrying the sputtered product to the rack. After the fixture transfer module removes the fixture from the sputtered product, the product to be sputtered covered with the fixture is conveyed by the material preparation and conveying unit to the subsequent sputtering equipment. The sputtered product after the fixture is removed is moved by the product transfer module to the unloading and conveying unit for conveyance. Then the tray originally carrying the sputtered product becomes empty and continues to load the product to be sputtered grabbed by the product transfer module. Then the fixture transfer module removes the fixture from the sputtered product and covers it on the product to be sputtered, and this process repeats. The above process can be simply described as: removing the fixture from the sputtered product (while moving the product to be sputtered to the material preparation and conveying unit) → covering the fixture on the product to be sputtered → moving the sputtered product to the unloading and conveying unit → conveying the product to be sputtered covered with the fixture to the subsequent sputtering equipment for sputtering operation. This solution changes the loading and unloading work of sputtering from manual to fully automated processing, improves the processing efficiency, reduces the labor cost, and avoids product damage caused by fatigue operation of the operator. Replacing manual operation with equipment operation makes the operation more precise, improves the product yield rate, and reduces the production cost. Removing the fixture from the sputtered product and moving the product to be sputtered to the material preparation and conveying unit are carried out simultaneously, avoiding the need for one of the two actions to wait, saving the waiting time, further improving the loading and unloading efficiency, reducing the time required for loading and unloading, and thus improving the overall production efficiency. Description of the Drawings

[0021] Figure 1 It is a side view of an embodiment of the present utility model;

[0022] Figure 2 It is a front view of an embodiment of the present utility model;

[0023] Figure 3 It is a top view of an embodiment of the present utility model;

[0024] Figure 4 It is an overall three-dimensional view of an embodiment of the present utility model from one angle;

[0025] Figure 5 It is an overall three-dimensional view of an embodiment of the present utility model from another angle;

[0026] Figure 6 It is a schematic structural diagram of the product transfer module of an embodiment of the present utility model;

[0027] Figure 7 Schematic diagram of an angle jig transfer module according to an embodiment of the present utility model;

[0028] Figure 8 Schematic diagram of another angle jig transfer module according to an embodiment of the present utility model;

[0029] Figure 9 Schematic diagram of yet another angle jig transfer module according to an embodiment of the present utility model;

[0030] Description of part numbers

[0031] 21 - Frame; 22 - Jig transfer module; 221 - Jig transfer driving member; 222 - Clamping block; 221a - Groove; 223 - Jig transfer support assembly; 224 - Second rotation driving member; 225 - Second vision assembly; 23 - Product transfer module; 231 - First rotation driving member; 232 - First vision assembly; 233 - Disc; 234 - Suction cup; 235 - Suction cup support rod; 235a - Long slot; 24 - Loading conveyor unit; 25 - Unloading conveyor unit; 26 - Stocking conveyor unit; 261 - Upper layer conveyor assembly; 261a - Return conveyor component; 261b - Transition conveyor component; 262 - Lower layer conveyor assembly. Specific embodiments

[0032] The following uses specific specific examples to illustrate the embodiments of the present utility model. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model.

[0033] It should be noted that the illustrations provided in this embodiment only schematically illustrate the basic concept of the present utility model. Therefore, only the components related to the present utility model are shown in the drawings, rather than being drawn according to the number, shape, and size of the components in actual implementation. The types, quantities, and proportions of the components in actual implementation can be arbitrarily changed, and the layout type of the components may also be more complex. The structures, proportions, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present utility model. Therefore, they do not have substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size, without affecting the effects that the present utility model can produce and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed in the present utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle", and "one" cited in this specification are only for the convenience of clear narration and are not used to limit the scope of implementation of the present utility model. The change or adjustment of their relative relationships, without substantial change in the technical content, should also be regarded as the scope of implementation of the present utility model.

[0034] Please refer to Figure 1, the first direction of this embodiment is the length direction of the frame 21, the second direction is the width direction of the frame 21, and the third direction is the height direction of the frame 21. This embodiment provides a sputtering cover removal fixture mechanism, including a frame 21, a conveying module, a product transfer module 23 and a fixture transfer module 22, and the conveying module, the product transfer module 23 and the fixture transfer module 22 are all arranged on the frame 21. The conveying module includes a loading conveying unit 24, a unloading conveying unit 25 and a preparation conveying unit 26. This embodiment can handle the loading and unloading of products of at least two specifications at the same time. In one embodiment, the loading conveying unit 24 and the unloading conveying unit 25 have the same conveying direction, and the loading conveying unit 24 may include a plurality of parallel conveyor belts, each conveyor belt of the loading conveying unit 24 corresponds to a product of one specification, and the number of parallel conveyor belts of the loading conveying unit 24 is the same as the number of specifications of the product. Loading and unloading of products of multiple specifications at the same time can improve the efficiency of loading and sputtering. The two ends of the frame 21 along the first direction are respectively connected to other equipment, that is, the upstream and downstream of the sputtering cover and fixture mechanism are connected to other equipment, and the product to be sputtered is transmitted to the loading conveying unit 24 by the upstream equipment. In one embodiment, the height of the part where the loading conveying unit 24 and the upstream equipment are docked is equal, which can facilitate the loading conveying unit 24 to receive the product and improve the loading efficiency of the loading conveying unit 24. The loading conveying unit 24 is used to convey the product to be sputtered along the first direction, and the unloading conveying unit 25 is used to convey the sputtered product along the first direction. In one embodiment, the unloading conveying unit 25 also includes a plurality of parallel conveyor belts to convey the sputtered product to the downstream equipment (sputtering equipment). The simultaneous transmission of multiple specifications of products can improve the unloading efficiency, thereby improving the product production efficiency. A tray is provided on the material preparation conveying unit 26, and the tray can be on the product to be sputtered, or on the sputtered product covered with a fixture. The material preparation conveying unit 26 is used to convey the tray carrying the sputtered product from the downstream equipment to the frame 21 of this embodiment, and then convey the tray carrying the product to be sputtered to the downstream equipment. The product transfer module 23 can move along the first direction, the second direction and the third direction on the frame 21, so as to facilitate the picking and placing of the products to be sputtered. Tracks for the movement of the product transfer module 23 are respectively arranged on the frame 21 along the first direction, the second direction and the third direction, and tracks for the movement of the jig transfer module 22 are also respectively arranged on the frame 21 along the first direction, the second direction and the third direction. In a loading and unloading cycle, the product transfer module 23 first moves the product to be sputtered on the loading conveying unit 24 to the tray of the preparation conveying unit 26, and the preparation conveying unit 26 conveys it to the downstream equipment for sputtering operation. The product transfer module 23 then moves the sputtered product on another tray of the preparation conveying unit 26 to the unloading conveying unit 25, and the unloading conveying unit 25 conveys it to the subsequent production line.The jig transfer module 22 can move on the frame 21 along the first direction, the second direction, and the third direction, and is used to remove the jig covering the sputtered product and cover the jig on the product to be sputtered on the stock preparation conveyor unit 26. The stock preparation conveyor unit 26 conveys the tray carrying the sputtered product from the downstream equipment to the frame 21 of this embodiment. At the same time, the product transfer module 23 transfers the product to be sputtered on the loading conveyor unit 24 to the stock preparation conveyor unit 26.

[0035] In this embodiment, the product to be sputtered (the product without the jig covered) is conveyed to the stock preparation conveyor unit 26 through the loading conveyor unit 24, and then the product transfer module 23 moves the product to be sputtered from the loading conveyor unit 24 to the stock preparation conveyor unit 26. The jig transfer module 22 removes the jig covering the sputtered product and covers the jig on the product to be sputtered on the stock preparation conveyor unit 26. The stock preparation conveyor unit 26 and the transfer module operate simultaneously. The stock preparation conveyor unit 26 conveys the tray carrying the sputtered product to the frame 21. After the jig transfer module 22 removes the jig on the sputtered product, the product to be sputtered covered with the jig is conveyed by the stock preparation conveyor unit 26 to the subsequent sputtering equipment. The sputtered product after the jig is removed is moved by the product transfer module 23 to the unloading conveyor unit 25 for conveyance. Then the tray originally carrying the sputtered product becomes empty and continues to load the product to be sputtered grabbed by the product transfer module 23 from the loading conveyor unit 24. Then the jig transfer module 22 removes the jig on the sputtered product and covers it on the product to be sputtered, and so on in a cycle. The above process can be simply described as: taking the jig from the sputtered product (while moving the product to be sputtered on the loading conveyor unit 24 to the stock preparation conveyor unit 26) → covering the jig on the product to be sputtered on the stock preparation conveyor unit 26 → moving the sputtered product to the unloading conveyor unit 25 → conveying the product to be sputtered covered with the jig to the subsequent sputtering equipment for sputtering operation. This solution changes the loading and unloading work of sputtering from manual to fully automated processing, improves the processing efficiency, reduces the labor cost, and improves the product yield, reducing the production cost. Taking the jig from the sputtered product and moving the product to be sputtered to the stock preparation conveyor unit 26 are carried out simultaneously, avoiding the need for one of the two actions to wait, saving the waiting time, further improving the loading and unloading efficiency, reducing the time required for loading and unloading, and thus improving the overall production efficiency.

[0036] In one embodiment, the stock preparation transfer unit 26 includes an upper transfer assembly 261 and a lower transfer assembly 262 arranged along the third direction (vertical direction). The upper transfer assembly 261 is disposed directly above the lower transfer assembly 262. A tray loaded with products after sputtering (covered with a jig) is placed on the return transfer member 261a. After the tray fully loaded on the return transfer member 261a becomes empty, it flows onto the transition transfer member 261b. An empty tray is placed on the transition transfer member 261b. Then, the product transfer module 23 transfers the product to be sputtered on the loading transfer unit 24 onto the empty tray on the transition transfer member 261b. The transfer directions of the upper transfer assembly 261 and the lower transfer assembly 262 are opposite. A supporting assembly is provided between the upper transfer assembly 261 and the lower transfer assembly 262. The supporting assembly is used to drive the tray to descend from the upper transfer assembly 261 to the lower transfer assembly 262. The upper transfer assembly 261 is used to transfer the tray loaded with products after sputtering from an external device (sputtering device) to the frame 21 of this embodiment. The lower transfer assembly 262 is used to transfer the tray loaded with products to be sputtered to an external device (sputtering device). Both the upper transfer assembly 261 and the lower transfer assembly 262 extend along the first direction. One end of the upper transfer assembly 261 away from the frame 21 of this embodiment is connected to an external device (sputtering device). One end of the lower transfer assembly 262 away from the frame 21 of this embodiment is also connected to an external device (sputtering device), and the connection positions are different. The jig transfer module 22 removes the jig on the product after sputtering. The product transfer module 23 removes the product after sputtering on the tray. The product transfer module 23 moves the product to be sputtered onto the tray. The jig transfer module 22 covers the product to be sputtered with the jig. The supporting assembly drives the tray to descend onto the lower transfer assembly 262. The lower transfer assembly 262 transfers the tray loaded with products to be sputtered to an external device (sputtering device). The above structural arrangement can save the space occupied by the equipment and reduce the overall volume and floor area of this embodiment.

[0037] In one embodiment, the upper transfer component 261 includes a return transfer member 261a and a transition transfer member 261b arranged in sequence along its transfer direction. The transition transfer member 261b is arranged directly above the supporting component. In one example, the transition transfer member 261b includes a transition driving member and two oppositely arranged transition guide rails. Rotating rollers are respectively arranged on the opposite sides of the two transition guide rails, and the rollers are in transmission connection with the driving end of the transition driving member. The transition driving member is used to drive the two transition guide rails to approach and separate from each other. The number of transition driving members can be one or more. The transition driving member can be a driving device such as a motor. The transition driving member can drive the rollers to rotate through a transmission structure disclosed in the prior art, or directly drive. The return transfer member 261a includes a return driving member and a rotating roller. The driving end of the return driving member is in transmission connection with the rotating roller. The return driving member drives the rotating roller to rotate through a transmission structure disclosed in the prior art, or directly drive. The tray is transferred by being arranged on the rotating roller when passing through the return driving member, and is transferred by being arranged on its rollers when passing through the transition transfer member 261b. The tray full of products after sputtering stays on the return transfer member 261a. After the jig and the products after sputtering are removed, the tray is transferred forward to the transition transfer member 261b (meanwhile, the tray full of products after sputtering is transferred from an external device (sputtering device) to the transition transfer member 261b). The product transfer module 23 then places the product to be sputtered on the tray, and the jig transfer module 22 covers the jig on the product to be sputtered. The two transition guide rails separate from each other, the supporting component drives the tray to descend onto the lower transfer component 262, the two transition guide rails close, and the lower transfer component 262 transfers the tray full of products to be sputtered to an external device (sputtering device). Through the above structure, each link of this embodiment can be more closely connected, and the waiting time between each link can be minimized as much as possible, thereby improving the loading and unloading efficiency and the sputtering production efficiency.

[0038] In one embodiment, the supporting component includes a supporting driving member and a supporting member. The driving end of the supporting driving member is in transmission connection with the supporting member. The supporting driving member is used to drive the supporting member to rise and fall. The supporting driving member can be a driving device such as a motor. The supporting driving member can drive the supporting member to rise and fall through a transmission structure disclosed in the prior art, or directly drive the supporting member to rise and fall. The supporting member can be two vertically arranged rectangular frames, respectively abutted against the bottoms of both ends of the tray along the length direction. The lower layer conveying component 262 can also be driven by a driving device such as a motor to drive the rotating roller to rotate. The supporting member can rise and fall between adjacent rotating rollers of the lower layer conveying component 262 to avoid interference therewith. The supporting member can rise from between adjacent rotating rollers of the lower layer conveying component 262 to abut against the bottom of the tray, or can fall from between adjacent rotating rollers of the lower layer conveying component 262 to below the rotating rollers of the lower layer conveying component 262 to place the tray on the lower layer conveying component 262. The above structural arrangement can reduce the occupied space while connecting the upper layer conveying component 261 and the lower layer conveying component 262, and also improve the conveying efficiency of the tray.

[0039] In one embodiment, the product transfer module 23 includes a first rotation driving member 231, a suction cup assembly, and a first vision component 232. The suction cup assembly is in transmission connection with the driving end of the first rotation driving member 231. The first rotation driving member 231 is used to drive the suction cup assembly to rotate horizontally. The first vision component 232 is used to detect and identify the posture of the product (the posture of the product refers to whether the product is placed along the first direction or the second direction) and drive the first rotation driving member 231 to act. The first vision component 232 is connected to an image processing system, and the action of the first rotation driving member 231 is controlled through the image processing system. The suction cup assembly sucks and moves the product by contacting the top surface of the product. Due to the structural arrangement of the product, the suction cup assembly can avoid damaging the product and improve the moving efficiency of the product. Different specifications of the product result in different sizes, shapes, etc. of the product. In order to increase the number of products placed on each tray, the tray is a rectangular tray, and the placement directions of different products are different. The first vision component 232 can include an industrial camera. The industrial camera converts the target captured by digital image into an image signal and transmits it to a dedicated image processing system. The image system performs various operations on these signals to extract the features of the target, and then controls the actions of the on-site equipment according to the discrimination results. This enables the direction of the product to be identified in this embodiment, and the first rotation driving member 231 is driven to rotate horizontally to place the product to be sputtered on the designated position on the tray. When taking the sputtered product, the sputtered product can also be adjusted to the required direction and then placed on the blanking conveying unit 25, which is convenient for subsequent process processing.

[0040] In one embodiment, the first vision component 232 is also capable of identifying the specifications of the product to be sputter-coated through the QR code on the product, so as to move the product to be sputter-coated to the corresponding position on the tray, thereby improving the loading efficiency and accuracy.

[0041] In one embodiment, the suction cup assembly includes a disc 233 and at least two suction cups 234. The suction cups 234 are arranged on the bottom of the disc 233, and the suction cups 234 are evenly distributed along the circumferential direction of the disc 233. The driving end of the first rotation driving member 231 is in transmission connection with the top of the disc 233. The first rotation driving member 231 drives the suction cup assembly to rotate by driving the disc 233 to rotate. The first rotation driving member 231 can be a driving device such as a motor. The above arrangement can improve the stability of sucking and moving the product, thereby improving the loading and unloading efficiency, and also preventing the product from falling during movement and causing damage, which affects the normal operation of this embodiment.

[0042] In one embodiment, a plurality of horizontally arranged suction cup support rods 235 are evenly distributed along the circumferential direction on the bottom of the disc 233. The suction cups 234 and the suction cup support rods 235 are respectively arranged in one-to-one correspondence. The suction cup support rods 235 are provided with elongated holes 235a extending along their lengths. One end of the suction cup 234 passes through the elongated hole 235a and is movably arranged in the elongated hole 235a along the extending direction of the elongated hole 235a. A fastener is sleeved on the end of the suction cup 234 passing through the elongated hole 235a. The suction cups 234 are arranged on the disc 233 through the suction cup support rods 235. The above structure can adjust the relative positions of the suction cups 234 by adjusting the horizontal positions of the suction cups 234 in the elongated holes 235a to match products of different specifications and sizes, thereby improving the adaptability of this embodiment. The fastener can adjust the tightness of the suction cup 234 in the elongated hole 235a, loosen it when the position needs to be adjusted, and tighten it when it needs to be fastened.

[0043] In one embodiment, the fixture transfer module 22 includes a fixture transfer driving member 221 and a clamping assembly. The clamping assembly includes two oppositely arranged clamping blocks 222. The fixture transfer driving member 221 has two oppositely arranged driving ends, and the two driving ends are respectively in transmission connection with the two clamping blocks 222 and can drive the two clamping blocks 222 to approach and separate from each other. The fixture transfer driving member 221 can be a double-acting cylinder in the prior art, and the two driving ends of the double-acting cylinder are respectively arranged at both ends of the cylinder. The two clamping blocks 222 respectively extend into the two holes of the fixture. The double-acting cylinder drives the two clamping blocks 222 to move away from each other to complete the clamping of the fixture. When the fixture needs to be placed down, the double-acting cylinder drives the two clamping blocks 222 to approach each other, that is, the fixture can be released. The above structure can improve the stability of picking up the fixture and prevent the fixture from falling off during the movement of the fixture, which affects the normal loading and unloading.

[0044] In one embodiment, horizontal grooves 221 a are respectively provided on opposite sides of the two clamping blocks 222 . When the fixture is clamped, the grooves 221 a are stuck in the hole wall of the fixture, further improving the stability of the fixture clamping.

[0045] In one embodiment, the jig transfer module 22 also includes a jig transfer support assembly 223, a second visual assembly 225 and a second rotating drive member 224, the driving end of the second rotating drive member 224 is connected to the jig transfer support assembly 223 and can drive the jig transfer support assembly 223 to rotate horizontally, the clamping assembly is arranged on the jig transfer support assembly 223 and can rotate horizontally with the jig transfer support assembly 223, the second visual assembly 225 is used to detect and identify the posture of the jig (placed in the first direction or in the second direction) and drive the second rotating drive member 224 to move, and the second visual assembly 225 is electrically connected to the second rotating drive member 224. Correspondingly, the jig transfer module 22 can also identify the posture of the jig and the product, and adjust the horizontal position of the clamping assembly through the above structure to pick up the jig more accurately and cover the jig on the product to be sputtered. The second visual assembly 225 can also be an industrial CCD camera. The jig transfer support assembly 223 can be a support frame.

[0046] In one embodiment, the loading conveying unit 24 and the unloading conveying unit 25 are arranged along the third direction (vertical direction), and the loading conveying unit 24 and the unloading conveying unit 25 have opposite conveying directions. This can reduce the overall volume of this embodiment, reduce the occupied space, and improve applicability.

[0047] In one embodiment, the material preparation conveying unit 26 is arranged in the middle of the frame 21 along the first direction. The loading conveying unit 24 includes two conveying lines, which are arranged on both sides of the material preparation conveying unit 26 along the first direction; the unloading conveying unit 25 also includes two conveying lines, which are arranged on both sides of the material preparation conveying unit 26 along the first direction. This makes the layout of this embodiment reasonable, facilitates the coordination between the modules, improves the loading and unloading efficiency, and avoids interference.

[0048] In one embodiment, the loading conveying unit 24 is divided into several sections along the first direction, and baffles that can be raised and lowered in the vertical direction are arranged between the sections, and the baffles can be driven to rise and fall by a motor. The baffles can be arranged to rise when the number of products in front is sufficient to block the subsequent products from being conveyed forward; and to fall when the number of products in front is insufficient to allow the products to continue to be conveyed forward.

[0049] In one embodiment, running guide rails that are parallel to each other are respectively arranged on both sides of the rack 21 along the first direction. The product transfer module 23 is arranged at the bottom of the running guide rails and can move along the running guide rails in the first direction. The fixture transfer module 22 is arranged on the opposite sides of the running guide rails and can move along the running guide rails in the first direction. The above arrangement can save space, avoid interference between the product transfer module 23 and the fixture transfer module 22, and improve the operation efficiency of this embodiment.

[0050] In one embodiment, both the product transfer module 23 and the fixture transfer module 22 include rails arranged along the second direction and the third direction and corresponding driving members, so that the operating ends of the product transfer module 23 and the fixture transfer module 22 can move along the second direction and the third direction.

[0051] In one embodiment, there are multiple product transfer modules 23 and multiple fixture transfer modules 22, and they are evenly arranged on both sides of the rack 21 along the first direction, so that the product transfer module 23 can simultaneously pick up and deliver multiple products to be sputtered or sputtered products, and the fixture transfer module 22 can simultaneously pick up and deliver multiple fixtures, improving the loading and unloading efficiency.

[0052] The above embodiments merely illustrate the principles and effects of the present invention by way of example, rather than limiting the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. A sputtering cover removal fixture mechanism, characterized in that: include: frame; a conveying module, arranged on the frame, comprising a loading conveying unit, a unloading conveying unit and a preparation conveying unit, wherein the loading conveying unit is used to convey the product to be sputtered along a first direction, the unloading conveying unit is used to convey the sputtered product along a first direction, the preparation conveying unit is used to convey a tray carrying the sputtered product to the frame, and convey the tray carrying the product to be sputtered to an external sputtering device; A product transfer module is movably arranged on the frame along a first direction, a second direction and a third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other, and the product transfer module is used to move the product to be sputtered on the loading conveying unit to the preparation conveying unit, and to move the product after sputtering on the preparation conveying unit to the unloading conveying unit; The jig transfer module is movably arranged on the frame along the first direction, the second direction and the third direction, and is used to remove the jig covering the sputtered product and cover the product to be sputtered of the material preparation and conveying unit.

2. The sputtering cover removal jig mechanism according to claim 1, characterized in that: The material preparation conveying unit includes an upper conveying component and a lower conveying component arranged along a third direction, and the conveying directions of the upper conveying component and the lower conveying component are opposite. A supporting component is arranged between the upper conveying component and the lower conveying component, and the supporting component is used to drive the tray to descend from the upper conveying component to the lower conveying component.

3. The sputtering cover removal jig mechanism according to claim 2, characterized in that: The upper conveying component includes a return conveying component and a transition conveying component which are arranged in sequence along its conveying direction. The transition conveying component is arranged directly above the supporting component. The transition conveying component includes a transition driving component and two relatively arranged transition guide rails. Rollers are rotatably arranged on opposite sides of the two transition guide rails. The rollers are transmission-connected to the driving end of the transition driving component. The transition driving component is used to drive the two transition guide rails to approach and move away from each other.

4. The sputtering cover removal jig mechanism according to claim 2 or 3, characterized in that: The supporting assembly comprises a supporting driving member and a supporting member, wherein the supporting member is drivingly connected to a driving end of the supporting driving member, and the supporting driving member is used to drive the supporting member to rise and fall.

5. The sputtering cover removal jig mechanism according to claim 1, characterized in that: The product transfer module includes a first rotating drive member, a suction cup assembly and a first visual component. The suction cup assembly is transmission-connected to the driving end of the first rotating drive member. The first rotating drive member is used to drive the suction cup assembly to rotate horizontally. The first visual component is used to identify the posture of the product and drive the first rotating drive member to move.

6. The sputtering cover removal jig mechanism according to claim 5, characterized in that: The suction cup assembly comprises a circular disc and at least two suction cups, wherein the suction cups are arranged on the circular disc, and each of the suction cups is evenly distributed along the circumference of the circular disc, and the circular disc is drivingly connected to the driving end of the first rotating driving member.

7. The sputtering cover removal jig mechanism according to claim 6, characterized in that: A plurality of suction cup support rods are arranged on the disc, and the suction cups are arranged corresponding to the suction cup support rods one by one. The suction cup support rod is provided with a long hole extending along its length direction. One end of the suction cup passes through the long hole and is movably arranged in the long hole along the extension direction of the long hole. A fastener is arranged on the outer sleeve of the end of the suction cup passing through the long hole.

8. The sputtering cover removal fixture mechanism according to claim 1, characterized in that: The jig transfer module includes a jig transfer drive and a clamping assembly, the clamping assembly includes two clamping blocks, and the jig transfer drive has two driving ends, which are respectively connected to the two clamping blocks for transmission and can drive the two clamping blocks to move closer to and away from each other.

9. The sputtering cover removal jig mechanism according to claim 8, characterized in that: The jig transfer module also includes a jig transfer support assembly, a second visual assembly and a second rotation drive member, wherein the driving end of the second rotation drive member is transmission-connected to the jig transfer support assembly and can drive the jig transfer support assembly to rotate horizontally, the clamping assembly is arranged on the jig transfer support assembly and can rotate horizontally with the jig transfer support assembly, and the second visual assembly is used to identify the posture of the jig and drive the second rotation drive member to move.

10. The sputtering cover removal jig mechanism according to claim 1, characterized in that: The loading conveying unit and the unloading conveying unit are arranged along a third direction, and conveying directions of the loading conveying unit and the unloading conveying unit are opposite.

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