Tool for deposition of circular-ring-shaped workpiece

Abstract

The utility model relates to the field of annular workpiece deposition, in particular to a tool for annular workpiece deposition, which comprises a rotating component and a deposition component, the deposition component comprises a deposition container, a gas pipeline and a deposition support rod, the gas pipeline is vertically arranged in the deposition container, and the deposition support rod is arranged on the gas pipeline. The gas pipeline is connected with a ventilation assembly used for introducing gas into the gas pipeline. The multiple deposition supporting rods are distributed on the gas pipeline in the length direction of the gas pipeline, and the deposition supporting rods are used for installing workpieces needing to be deposited; and a plurality of gas outlets are formed in the gas pipeline and are distributed in the length direction of the gas pipeline, so that deposition on the surfaces of the annular workpieces at all positions in the deposition container is more uniform.

Description

Technical Field

[0001] The utility model relates to the field of annular workpiece deposition, in particular to a tool used for annular workpiece deposition. Background Art

[0002] Chemical vapor deposition is an important preparation method for forming a thin film on the surface of a workpiece. It is achieved by introducing a vapor deposition pre-reaction gas into a deposition furnace, reacting at high temperature, and depositing the product on the surface of the material to be coated, and finally forming a coating layer on the surface of the material to be coated, thereby obtaining a vapor deposition-coated composite material, which has the characteristics of simple process and suitability for large-scale production. Circular workpieces are common workpiece shapes, and existing chemical deposition equipment usually uses hoisting to deposit circular workpieces. In order to improve the deposition efficiency of circular workpieces, multiple circular workpieces are deposited at one time, which requires that the multiple circular workpieces be evenly distributed at various positions in the deposition container. However, the deposition gas concentration distribution at various positions in the deposition container is uneven, which can easily lead to inconsistent deposition thickness on the surfaces of various circular workpieces. Therefore, it is necessary to improve the uniformity of the deposition gas distribution in the deposition container, thereby improving the consistency of the deposition thickness of each circular workpiece. Utility Model Content

[0003] The utility model aims to provide a tool for depositing annular workpieces, so as to make the deposition on the surface of the annular workpieces at various positions in a deposition container more uniform.

[0004] In order to achieve the above purpose, on the one hand, the utility model adopts the following technical solutions:

[0005] A tool for depositing annular workpieces, comprising a deposition assembly, wherein the deposition assembly comprises a deposition container, a gas pipeline and a deposition support rod, wherein the gas pipeline is vertically arranged and one end of the gas pipeline passes through the bottom of the deposition container to enter the interior of the deposition container, and the other end is connected to a ventilation assembly for introducing gas into the gas pipeline, and the ventilation assembly is located outside the deposition container; a plurality of deposition support rods are arranged, and the plurality of deposition support rods are arranged in the deposition container and installed on the gas pipeline along the length direction of the gas pipeline, and the deposition support rods are used to carry the workpiece to be deposited; a plurality of gas outlet holes are opened on the gas pipeline, and the plurality of gas outlet holes are distributed along the length direction of the gas pipeline; and the apertures of the plurality of gas outlet holes gradually increase in a direction away from the ventilation assembly.

[0006] The beneficial effect is: when it is necessary to deposit the workpiece, the workpiece is placed on the deposition support rod, and the deposition support rod is placed in the deposition container, and the deposition gas is introduced into the deposition container through the gas pipeline. Since a plurality of gas outlets are provided on the gas pipeline, and the gas outlets are distributed along the length direction of the gas pipeline and the apertures gradually increase, after the deposition gas enters the gas outlet pipeline, it can move in the gas outlet pipeline and be discharged into the deposition container through the gas outlet holes. The arrangement of the gas outlets arranged along the length direction of the gas pipeline allows the deposition gas to be released to various positions in the deposition container. At the same time, as the gas moves, the gas concentration in the gas pipeline decreases, and the increased aperture allows more gas to be released into the deposition container, so that the workpieces placed at various positions in the deposition container can be evenly deposited, and the deposition thickness deposited on the workpiece surface is more consistent.

[0007] A further technical solution of the utility model is that it also includes a rotating component, which is connected to the gas pipeline, is located outside the deposition container and is used to drive the gas pipeline to rotate.

[0008] The beneficial effect is that when depositing on the workpiece, the gas pipeline is rotated by the rotating assembly, so that when the gas outlet discharges the deposition gas, the deposition gas is more evenly transported to the deposition container, further improving the uniformity of the distribution of the deposition gas in the deposition container.

[0009] A further technical solution of the utility model is that the rotating assembly includes a rotating shaft and a driving member, one end of the rotating shaft is fixedly connected to the gas pipeline, and the other end is connected to the driving member, and the driving member is used to drive the rotating shaft and the gas pipeline to rotate.

[0010] A further technical solution of the utility model is that the ventilation assembly includes an intake sleeve and an intake pipe, the intake sleeve is wrapped around one end of the gas pipe connected to the rotating shaft, and the gas pipe is sealed and connected to the intake sleeve; the gas pipe and the rotating shaft are both rotatably connected to the intake sleeve, and a hole is opened at one end of the intake pipe passing through the intake sleeve for transporting the gas in the intake sleeve to the intake pipe.

[0011] A further technical solution of the utility model is that a bearing is provided at the rotationally connected portion between the air intake sleeve, the gas pipeline and the rotating shaft.

[0012] A further technical solution of the utility model is that the plurality of air outlet holes are arranged in a row along the length direction of the gas pipeline, a group of air outlet holes is arranged in each row, and a plurality of groups of air outlet holes are evenly distributed on the gas pipeline along its circumferential direction.

[0013] A further technical solution of the utility model is that a plurality of protrusions are arranged on the deposition support rod, and the plurality of protrusions are evenly and spacedly distributed on the deposition support rod along the length direction of the deposition support rod, and the workpiece to be deposited is placed between adjacent protrusions.

[0014] The beneficial effect is: when it is necessary to deposit the annular workpiece, the annular workpiece is hung on the deposition support rod so that the annular workpiece is evenly distributed in the deposition container, and then the deposition gas is transported to the air inlet pipe through the ventilation component, so that the deposition gas is transported to the deposition container through the air outlet holes distributed at different positions on the air inlet pipe. At the same time, as the aperture of the air outlet holes away from the ventilation component increases, the release amount of the deposition gas per unit time during the movement process is increased, so that the deposition gas distributed in the deposition container is more evenly distributed, and the rotation of the rotating component on the air inlet pipe drives the annular workpiece on the deposition support rod to rotate, so that the annular workpiece can be more evenly contacted with the deposition gas in the deposition container, thereby improving the uniformity of deposition on the surface of the annular workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The utility model is a schematic diagram showing the internal structure of a sedimentation container.

[0016] Figure 2 is an exploded schematic diagram showing the connection structure of the ventilation assembly;

[0017] Figure 3 yes Figure 2 A partial enlarged view of the middle A;

[0018] In the figure: 1-deposition assembly, 11-deposition container, 12-gas pipeline, 13-deposition support rod, 2-rotation assembly, 21-driving member, 22-rotation axis, 3-ventilation assembly, 31-inlet sleeve, 32-inlet pipeline, 33-inlet hole, 4-outlet hole, 5-protrusion. DETAILED DESCRIPTION

[0019] The following is combined with Figure 1-Figure 3 The specific implementation methods of the utility model are further described.

[0020] like Figure 1 and Figure 2As shown, a tool for depositing an annular workpiece includes a rotating component 2 and a deposition component 1, wherein the deposition component 1 includes a deposition container 11, a gas pipeline 12, and a deposition support rod 13. The deposition container 11 is a vertically arranged cylindrical barrel structure, and the gas pipeline 12 is vertically arranged and one end is penetrated in the deposition container 11 along the depth direction of the deposition container 11, and the other end extends out of the deposition container 11 and is connected to a ventilation component 3, which is located outside the deposition container 11 and is used to pass gas into the gas pipeline 12; a plurality of gas outlets are opened on the gas pipeline 12 that penetrates the deposition container 11 The plurality of gas outlet holes 4 are evenly distributed along the length direction of the gas pipeline 12, and the apertures of the plurality of gas outlet holes 4 gradually increase in the direction away from the ventilation component 3; when the ventilation component 3 passes the deposition gas into the gas pipeline 12, as the deposition gas moves in the gas pipeline 12 in the direction away from the ventilation component 3, the concentration of the deposition gas gradually decreases, and the apertures of the gas outlet holes 4 gradually increase, so that more deposition gas can be discharged from the gas outlet holes 4 per unit time, so that the density of the deposition gas in the deposition container 11 is uniform, thereby improving the uniformity of subsequent deposition on the workpiece;

[0021] like Figure 1 and Figure 2 As shown, the deposition support rod 13 is arranged perpendicular to the length direction of the gas pipeline 12, one end of the deposition support rod 13 is welded to the gas pipeline 12, the number of the deposition support rods 13 is set to be multiple, and the multiple deposition support rods 13 are distributed on the gas pipeline 12 at intervals along the length direction of the gas pipeline 12, and the deposition support rod 13 is used to install the annular workpiece to be deposited; the deposition gas is input into the gas pipeline 12 through the ventilation component 3, so that the deposition gas can be dispersed at various positions in the deposition container 11 through the gas outlet holes 4 at different positions, so that the annular workpiece on the deposition support rod 13 can be deposited more evenly by the deposition gas in the deposition container 11;

[0022] refer to Figure 1 and Figure 2 In some embodiments, a rotating assembly 2 is connected to the gas pipeline 12, and the rotating assembly 2 is used to drive the gas pipeline 12 to rotate; the rotating assembly 2 includes a driving member 21 and a rotating shaft 22. In the present application, the driving member 21 is configured as a motor, one end of the rotating shaft 22 is welded to the gas pipeline 12, and the other end is welded to the output end of the driving member 21. In the present application, the driving member is configured as a motor, and the driving member 21 is used to drive the rotating shaft 22 and the gas pipeline 12 to rotate; this allows the rotating assembly 2 to drive the gas pipeline 12 to rotate when the gas pipeline 12 releases the deposition gas through the gas outlet 4, so that the gas outlet 4 evenly discharges the deposition gas to various positions in the deposition container 11, and at the same time drives the annular workpiece on the deposition support rod 13 to rotate in the deposition container 11, so that the annular workpiece can be more evenly contacted with the deposition gas, further improving the uniformity of the deposition on the workpiece surface;

[0023] refer to Figure 1 and Figure 2 In some embodiments, the ventilation assembly 3 includes an air intake sleeve 31 and an air intake pipe 32. The air intake sleeve 31 is configured as a cylindrical structure. One end of the air intake sleeve 31 is sleeved on the gas pipe 12, and the other end is sleeved on the rotating shaft 22. The gas pipe 12 and the rotating shaft 22 are respectively sealed and connected to the air intake sleeve 31; the gas pipe 12 and the rotating shaft 22 are both rotatably connected to the air intake sleeve 31, and the rotatably connected parts of the air intake sleeve 31, the gas pipe 12 and the rotating shaft 22 are provided with bearings, and the air intake pipe 32 is inserted into the air intake sleeve 31. An air inlet hole 33 is provided at one end of the inner portion, so that the air inlet pipe 32 is connected to the air inlet sleeve 31; by setting the ventilation assembly 3, the air inlet pipe 32 allows the deposition gas to be introduced into the air inlet sleeve 31, and the deposition gas enters the gas pipe 12 through the air inlet hole 33. At the same time, the rotating shaft 22 drives the gas pipe 12 to rotate in the air inlet sleeve 31, so that the deposition gas is dispersed and densely distributed in the deposition container 11 from the air outlet hole 4 to deposit the annular workpiece. The setting of the bearing further improves the smoothness of the rotation connection between the gas pipe 12 and the rotating shaft 22;

[0024] refer to Figure 1 and Figure 3 In some embodiments, a plurality of protrusions 5 are provided on the deposition support rod 13, and the plurality of protrusions 5 are evenly and spacedly welded on the deposition support rod 13 along the length direction of the deposition support rod 13; the protrusions 5 are provided to limit the position of the annular workpiece on the deposition support rod 13, so that two adjacent annular workpieces will not fit together, thereby further improving the deposition effect on the annular workpiece.

[0025] refer to Figure 2 In some embodiments, a plurality of gas outlet holes 4 are arranged in a row along the length direction of the gas pipeline 12, and each row of gas outlet holes 4 is arranged as a group, and a plurality of groups of gas outlet holes 4 are evenly distributed along the circumferential direction of the gas pipeline 12; the arrangement of the plurality of groups of gas outlet holes 4 enables the gas pipeline 12 to discharge the deposition gas to the deposition container 11 at a faster and more uniform rate.

Claims

1. A tool for depositing annular workpieces, characterized in that: The invention comprises a deposition component, which comprises a deposition container, a gas pipeline and a deposition support rod. The gas pipeline is vertically arranged and one end of the gas pipeline passes through the bottom of the deposition container to enter the interior of the deposition container, and the other end is connected to a ventilation component for introducing gas into the gas pipeline, and the ventilation component is located outside the deposition container; a plurality of deposition support rods are arranged, and the plurality of deposition support rods are arranged in the deposition container and installed on the gas pipeline along the length direction of the gas pipeline, and the deposition support rods are used to carry the workpiece to be deposited; a plurality of gas outlet holes are opened on the gas pipeline, and the plurality of gas outlet holes are distributed along the length direction of the gas pipeline; and the apertures of the plurality of gas outlet holes gradually increase in the direction away from the ventilation component.

2. The tooling for depositing annular workpieces according to claim 1, characterized in that: It also includes a rotating component, which is connected to the gas pipeline. The rotating component is located outside the deposition container and is used to drive the gas pipeline to rotate.

3. The tooling for depositing annular workpieces according to claim 2, characterized in that: The rotating assembly comprises a rotating shaft and a driving member. One end of the rotating shaft is fixedly connected to the gas pipeline, and the other end is connected to the driving member. The driving member is used to drive the rotating shaft and the gas pipeline to rotate.

4. The tooling for depositing annular workpieces according to claim 1, characterized in that: The ventilation assembly includes an intake sleeve and an intake pipe. The intake sleeve is wrapped around one end of the gas pipe connected to the rotating shaft, and the gas pipe and the intake sleeve are sealed and connected. The gas pipe and the rotating shaft are both rotatably connected to the intake sleeve, and a hole is opened at one end of the intake pipe passing through the intake sleeve for transporting the gas in the intake sleeve to the intake pipe.

5. The tooling for depositing annular workpieces according to claim 4, characterized in that: The inlet sleeve is rotatably connected to the gas pipeline and the rotating shaft and is provided with a bearing.

6. The tooling for depositing annular workpieces according to claim 1, characterized in that: The plurality of air outlet holes are arranged in a row along the length direction of the gas pipeline, and each row of air outlet holes is provided with a group. The gas pipeline is evenly distributed with a plurality of groups of air outlet holes along the circumferential direction thereof.

7. The tooling for depositing annular workpieces according to claim 1, characterized in that: The deposition support rod is provided with a plurality of protrusions, which are evenly and spacedly distributed on the deposition support rod along the length direction of the deposition support rod, and the workpiece to be deposited is placed between adjacent protrusions.

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