Door body assembly and semiconductor device

Abstract

The utility model discloses a door body assembly and semiconductor equipment. The door body assembly comprises a door frame, a sliding groove, a door body and a swing arm. The door frame is provided with an opening and provided with the sliding groove. The door body is movably arranged at the opening and comprises a first door plate and a second door plate connected with the first door plate, and one end of the first door plate is slidably connected with the sliding groove; one end of the swing arm is hinged to the door frame, the other end of the swing arm is rotationally connected with the second door plate, the swing arm can rotate relative to the door frame under the action of external force to drive the door body to move and switch between the first position and the second position, and when the swing arm drives the door body to move, one end of the first door plate slides along the sliding groove. The door body is rotationally connected with the swing arm, one end of the first door plate is connected with the sliding groove in a sliding mode, movement of the first door plate is restrained by the sliding groove, the door body moves according to the needed posture, and the space occupied by the door body moving between the first position and the second position is reduced; and interference and collision between the door body and other parts on the semiconductor equipment are prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a door body assembly and a semiconductor device. Background Art

[0002] The door structure is a sealing structure configured on most devices. In the related art, the currently common door structures are double-leaf doors, flap doors, etc. Such door structures have relatively high space requirements, and the opening of the door affects some operations of the device and even hinders the operations. Content of the Utility Model

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. For this purpose, the utility model provides a door body assembly, which can reduce the space occupied during the movement of the door body.

[0004] The utility model also provides a semiconductor device having the above door body assembly.

[0005] The door body assembly according to the first aspect embodiment of the utility model includes:

[0006] A door frame provided with an opening;

[0007] A sliding groove disposed on the door frame and near the edge of the opening;

[0008] A door body movably disposed at the opening, the door body includes a first door panel and a second door panel connected to the first door panel, the first door panel and the second door panel intersect, and one end of the first door panel is slidably connected to the sliding groove; and

[0009] A swing arm, one end of which is hinged to the door frame and the other end is rotatably connected to the second door panel. The swing arm is rotatable relative to the door frame under the action of an external force to drive the door body to move and switch between a first position and a second position. When in the first position, the door body covers the opening, and when in the second position, the door body exposes at least one end of the opening;

[0010] Wherein, when the swing arm drives the door body to move, one end of the first door panel slides along the sliding groove.

[0011] The door body assembly according to the embodiment of the utility model has at least the following beneficial effects:

[0012] The door body assembly of the utility model is realized by rotatably connecting the door body with the swing arm so that the door body can rotate relative to the swing arm, so that in the process of the swing arm driving the door body to move, the posture of the door body relative to the swing arm can change under the influence of gravity or other forces, and by providing a slide groove, one end of the first door panel is slidably connected to the slide groove. In the process of the swing arm driving the door body to rotate relative to the door frame, the movement of one end of the first door panel is restrained by the slide groove, driving the door body to rotate relative to the swing arm. By designing the shape and structure of the slide groove, the door body can be moved in a required posture, reducing the space occupied by the door body moving between the first position and the second position, and preventing the door body from interfering with or colliding with other components on the semiconductor device to avoid affecting the normal operation of the device, while improving the smoothness and stability of the door body opening and closing movement.

[0013] According to some embodiments of the present utility model, the door frame includes a front end wall and a top wall connected to the front end wall, and the opening passes through the front end wall and the top wall; the slide groove includes a first groove section, a second groove section and a third groove section connected in sequence, the first groove section is located on a side of the top wall away from the outside of the door frame, and the third groove section is located on a side of the front end wall away from the outside of the door frame;

[0014] The slide groove is used to restrain the first door panel from moving on the side of the plane where the top wall is located away from the outside of the door frame. When the door body is in the second position, at least part of the door body is located on the side of the front end wall facing the outside of the door frame.

[0015] According to some embodiments of the present invention, the door body assembly includes a sliding mechanism, and one end of the first door panel away from the second door panel is slidably connected to the sliding groove through the sliding mechanism, and at least a portion of the sliding mechanism is located in the sliding groove.

[0016] According to some embodiments of the present utility model, the sliding mechanism includes:

[0017] A mounting plate, disposed on the door body, the mounting plate being provided with a mounting hole; and

[0018] The rolling element comprises a first end and a second end facing each other, wherein the first end is connected to the mounting hole, the second end is located outside the mounting hole, and the second end is inserted into the slide groove, and the second end can roll relative to the groove wall of the slide groove.

[0019] According to some embodiments of the present utility model, the door assembly further includes a limiting mechanism, and the limiting mechanism includes:

[0020] a limiting plate, disposed on one of the door body and the door frame, the limiting plate being provided with a limiting hole; and

[0021] The limit pin is movably arranged on the other one of the door body and the door frame. When the door body is in the first position, the limit pin is inserted into the limit hole so as to limit the door body in the first position.

[0022] According to some embodiments of the present invention, the door body includes:

[0023] A driving member, which is drivingly connected to the limit pin and is used to drive the limit pin to move; and

[0024] A triggering device, which is configured to: when the door body is in the first position, trigger the driving member to drive the limit pin to insert into the limit hole.

[0025] According to some embodiments of the present invention, the triggering device includes:

[0026] A detection mechanism, which is used to detect the opening and closing state of the door body and output an electrical signal; and

[0027] A circuit board, which is electrically connected to the detection mechanism and the driving member to control the driving member to act according to the electrical signal output by the detection mechanism.

[0028] According to some embodiments of the present invention, the door body assembly further includes a first magnetic attraction part and a second magnetic attraction part. The first magnetic attraction part is arranged on one of the door body and the door frame, and the second magnetic attraction part is arranged on the other one of the door body and the door frame. When the door body is in the first position, the first magnetic attraction part and the second magnetic attraction part are magnetically matched.

[0029] According to some embodiments of the present invention, the door body assembly further includes a torsion hinge, and one end of the swing arm is connected to the door frame through the torsion hinge.

[0030] The semiconductor device according to the second aspect embodiment of the present invention includes the door body assembly described in any one of the above embodiments.

[0031] The semiconductor device according to the embodiment of the present invention has at least the following beneficial effects:

[0032] By adopting the door body assembly of the first aspect embodiment, the door body assembly rotatably connects the door body with the swing arm, enabling the door body to be rotatable relative to the swing arm. Thus, during the movement of the door body driven by the swing arm, the attitude of the door body relative to the swing arm can change under the influence of gravity or other acting forces. Additionally, by providing a sliding groove, one end of the first door panel is slidably connected to the sliding groove. During the rotation of the swing arm driving the door body relative to the door frame, the movement of one end of the first door panel is restricted by the sliding groove, driving the door body to rotate relative to the swing arm. By designing the shape and structure of the sliding groove, the door body can move in the required attitude, reducing the space occupied by the door body during movement between the first position and the second position, while preventing the door body from interfering and colliding with other components on the semiconductor device, avoiding affecting the normal operation of the device, and at the same time improving the smoothness and stability of the opening and closing movement of the door body.

[0033] Additional aspects and advantages of the present utility model will be given in the following description, and will become apparent from the following description, or can be understood through the practice of the present utility model. Brief Description of the Drawings

[0034] The following further describes the present utility model in conjunction with the drawings and embodiments, where:

[0035] Figure 1 is a schematic structural diagram of the door body assembly of the embodiment of the present utility model in the closed state;

[0036] Figure 2 is a schematic structural diagram of the door body assembly of the embodiment of the present utility model in the open state;

[0037] Figure 3 is a schematic diagram of the cooperation between the door body and the sliding groove when the door body of the embodiment of the present utility model is in the first position;

[0038] Figure 4 is a schematic diagram of the cooperation between the door body and the sliding groove when the door body of the embodiment of the present utility model is in the second position;

[0039] Figure 5 is a schematic structural diagram of the sliding mechanism of the embodiment of the present utility model;

[0040] Figure 6 is a cross-sectional view of the door body assembly of the embodiment of the present utility model in the closed state;

[0041] Figure 7 is Figure 6 a partial enlarged view of part A in

[0042] Figure 8 is an assembly diagram of the door body and the swing arm of the embodiment of the present utility model;

[0043] Figure 9 is a schematic block diagram of the trigger device of the embodiment of the present utility model;

[0044] Figure 10 This is a schematic diagram of a partial structure of the door body assembly according to an embodiment of the present invention.

[0045] Reference numerals:

[0046] Door body assembly 10;

[0047] Door frame 100; front end wall 110; top wall 120; opening 130; first opening 131; second opening 132;

[0048] Door body 200; first door panel 210; second door panel 220;

[0049] Swing arm mechanism 300; swing arm 310; connecting arm 311; support rod 312; torsion hinge 320;

[0050] Chute 400; first slot section 410; second slot section 420; third slot section 430;

[0051] Limiting mechanism 500; limiting plate 510; limiting hole 511; limiting pin 520;

[0052] First magnetic attraction part 530; second magnetic attraction part 540; driving part 600;

[0053] Trigger device 700; detection mechanism 710; detector 711; baffle 712; circuit board 720;

[0054] Sliding mechanism 800; mounting plate 810; mounting hole 811;

[0055] Rolling element 820; first end 821; second end 822; bearing 830. Detailed implementation manners

[0056] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation to the present invention.

[0057] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0058] In the description of the present utility model, the meaning of "several" is more than one, the meaning of "multiple" is more than two, and understandings such as "greater than", "less than", "exceeding", etc. do not include the present number, and understandings such as "above", "below", "within", etc. include the present number. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0059] In the description of the present utility model, unless otherwise clearly defined, words such as "set", "installed", "connected", etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in the present utility model in combination with the specific content of the technical solution.

[0060] In the description of the present utility model, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0061] The present application provides a door body assembly. Specifically, the door body assembly provided by the present application is mainly applied to semiconductor devices, such as semiconductor processing devices or semiconductor testing devices. Of course, the door body assembly can also be applied to other devices with the need to open and close doors.

[0062] Please refer to Figure 1 and Figure 2 , Figure 1 is a schematic structural diagram of the door body assembly of the embodiment of the present utility model in the closed state, Figure 2 is a schematic structural diagram of the door body assembly of the embodiment of the present utility model in the open state. In the embodiment of the present application, the door body assembly 10 includes a door frame 100 and a door body 200.

[0063] The door frame 100 and the door body 200 together form the door structure of the semiconductor device, and the door frame 100 and the door body 200 can cooperate to seal the mechanisms, devices, etc. inside the semiconductor device inside the device. Among them, the door frame 100 is used as a positioning and supporting component to position, support, and connect the door body 200. At the same time, the door frame 100 itself can also form a part of the structure of the outer shell of the semiconductor device. The door frame 100 is provided with an opening 130, and the door body 200 is movably arranged at the opening 130.

[0064] The structural shape of the door body 200 is determined according to the usage requirements of the semiconductor device, rather than the traditional plate-like structure. In the embodiment of the present application, the door body 200 includes a first door panel 210 and a second door panel 220 connected to the first door panel 210, and the first door panel 210 and the second door panel 220 intersect. In one embodiment, as Figure 2 shown, the plane where the first door panel 210 is located and the plane where the second door panel 220 is located intersect at 90°, so that the door body 200 is generally in an L shape as a whole.

[0065] The door body assembly 10 further includes a swing arm mechanism 300. The swing arm mechanism 300 includes a swing arm 310. One end of the swing arm 310 is hinged to the door frame 100, and the other end is rotatably connected to the second door panel 220. The swing arm 310 is rotatable relative to the door frame 100 under the action of an external force to drive the door body 200 to move and switch between a first position and a second position. When the door body 200 is in the first position, the door body 200 covers the above-mentioned opening 130, that is, in the closed state. When the door body 200 is in the second position, the door body 200 exposes at least part of the opening 130, that is, in the open state.

[0066] Since the door body 200 is in the above-mentioned L shape, rather than the traditional plate-like shape, when the swing arm 310 drives the door body 200 to rotate, if the door body 200 is in a fixed connection state with the swing arm 310, the attitude of the door body 200 relative to the swing arm 310 will not change, and the movement path of the door body 200 will occupy more space. In the embodiment of the present application, the door body 200 is rotatably connected to the swing arm 310, so that the door body 200 is rotatable relative to the swing arm 310. Thus, during the process of the swing arm 310 driving the door body 200 to move, the attitude of the door body 200 relative to the swing arm 310 can change under the influence of gravity or other acting forces. Then, on this premise, by applying a certain traction to the door body 200, the door body 200 can move along a trajectory that minimizes space occupation.

[0067] Please refer to Figure 2 , the door body assembly 10 further includes a sliding groove 400. The sliding groove 400 is arranged in the door frame 100 and is arranged close to the edge of the opening 130. One end of the first door panel 210 is slidably connected to the sliding groove 400. When the swing arm 310 drives the door body 200 to move, one end of the first door panel 210 slides along the sliding groove 400.

[0068] Then, during the process of the swing arm 310 driving the door body 200 to rotate relative to the door frame 100, one end of the first door panel 210 is restricted by the chute 400 during movement, driving the door body 200 to rotate relative to the swing arm 310. By specifically designing the shape and structure of the chute 400, the door body 200 can move in the required posture, reducing the space occupied by the door body 200 during movement between the first position and the second position, and at the same time preventing the door body 200 from interfering and colliding with other components on the semiconductor device, improving the smoothness and stability of the opening and closing movement of the door body 200.

[0069] In one embodiment, please refer to Figure 1 and Figure 2 , the door frame 100 includes a front end wall 110 and a top wall 120 connected to the front end wall 110, and an opening 130 penetrates through a part of the front end wall 110 and a part of the top wall 120. The opening 130 includes a first opening 131 and a second opening 132 that communicate with each other. The first opening 131 is provided on the top wall 120, and the second opening 132 is provided on the front end wall 110. Specifically, when the door body 200 is in the first position, the first door panel 210 covers the first opening 131, and the second door panel 220 covers the second opening 132.

[0070] Please refer to Figure 3 and Figure 4 , Figure 3 is a schematic diagram of the cooperation between the door body in the first position of the embodiment of the present invention and the chute, Figure 4 is a schematic diagram of the cooperation between the door body in the second position of the embodiment of the present invention and the chute. The chute 400 includes a first groove section 410, a second groove section 420, and a third groove section 430 that are sequentially connected. The first groove section 410 is located on the side of the top wall 120 facing away from the outside of the door frame 100, the third groove section 430 is located on the side of the front end wall 110 facing away from the outside of the door frame 100, and the second groove section 420 is located between the first groove section 410 and the third groove section 430. The second groove section 420 is a transition section. Among them, in order to better cooperate with the swing arm 310 to drive the door body 200 to rotate, the distance between the first groove section 410 and the top wall 120 increases from the end of the first groove section 410 far from the front end wall 110 to the end close to the front end wall 110; the distance between the third groove section 430 and the front end wall 110 increases from the end of the third groove section 430 far from the top wall 120 to the end close to the top wall 120.

[0071] Among them, the chute 400 is used to restrict the movement of the first door panel 210 on the side of the plane where the top wall 120 is located facing away from the outside of the door frame 100. When the door body 200 is in the second position, at least part of the door body 200 is located on the side of the front end wall 110 facing the outside of the door frame 100. For the convenience of description, taking the top wall 120 as the reference plane, the side of the top wall 120 facing the outside of the door frame 100 is defined as the upper side, and the side of the top wall 120 facing away from the outside of the door frame 100 is defined as the lower side.

[0072] Specifically, when the door body 200 moves from the first position to the second position, the swing arm 310 drives the whole door body 200 to move from the second opening 132 to the outside of the front end wall 110. The first groove section 410 restricts the first door panel 210, so that the first door panel 210 is always located below the plane where the top wall 120 is located. Correspondingly, when the door body 200 moves from the second position to the first position, the swing arm 310 drives the whole door body 200 to move from the second opening 132 to the inside of the front end wall 110. The third groove section 430 restricts the first door panel 210, so that the door body 200 is always located below the plane where the top wall 120 is located. Then, during the process of the door body 200 moving and switching between the first position and the second position, the movement track of the door body 200 is always located below the plane where the top wall 120 is located, and the door body 200 does not occupy the space above the top wall 120. Especially when there are other usage requirements for the space above the top wall 120 (for example, a material taking mechanism needs to be set), a storage space is left above the top wall 120, and at the same time, the interference and collision between the door body 200 and the obstacles above the top wall 120 are prevented, and the opening and closing actions of the door can be smoothly realized.

[0073] The door body assembly 10 includes a sliding mechanism 800. One end of the first door panel 210 away from the second door panel 220 is slidably connected to the sliding groove 400 through the sliding mechanism 800, and at least part of the sliding mechanism 800 is located in the sliding groove 400. By connecting the sliding mechanism 800 to one end of the first door panel 210 away from the second door panel 220, the sliding mechanism 800 is far away from the connection position of the swing arm 310 and the second door panel 220, avoiding the situation that the distance between the two is too close and the restraint effect is too large, which restricts the rotation of the first door panel 210 relative to the swing arm 310, enabling the door body 200 to have a large attitude change relative to the swing arm 310, which is beneficial to the movement of the door body 200.

[0074] Optionally, in an embodiment, please refer to Figure 5 、 Figure 6 and Figure 7 , Figure 5 is a schematic structural diagram of the sliding mechanism of the embodiment of the present invention, Figure 6 is a cross-sectional view of the door body assembly in the closed state of the embodiment of the present invention, Figure 7 is Figure 6Partial enlarged view at position A in the figure. The sliding mechanism 800 includes a mounting plate 810 and a rolling member 820. The mounting plate 810 is disposed on the door body 200, and the mounting plate 810 is provided with a mounting hole 811. The rolling member 820 includes a first end 821 and a second end 822 opposite to each other. The first end 821 is connected within the mounting hole 811, the second end 822 is located outside the mounting hole 811, and the second end 822 is inserted into the sliding groove 400, and the second end 822 is rollable relative to the groove wall of the sliding groove 400. To facilitate the rolling of the rolling member 820, the outer peripheral surface of the second end 822 is designed to be an arc surface or a spherical surface.

[0075] Then, the sliding mechanism 800 actually makes rolling contact with the groove wall of the sliding groove 400 through the rolling member 820, reducing the frictional force between the two, making it easier for the sliding mechanism 800 to move along the sliding groove 400 under a smaller force, improving the smoothness of the movement of the door body 200, and being more conducive to the opening / closing action of the door body 200. Moreover, the rolling member 820 and the sliding groove 400 are in rolling cooperation, greatly reducing the contact area between the two, which can reduce the wear of the sliding groove 400 and the sliding mechanism 800, correspondingly reducing the vibration generated by wear during the sliding process of the sliding mechanism 800, further improving the smoothness and stability of the movement of the door body 200, while reducing noise and increasing the service life of the sliding mechanism 800.

[0076] Among them, the rolling member 820 can be set to be rotatable itself. For example, a rotational connection can be adopted between the second end 822 and the first end 821 of the rolling member 820, so that the second end 822 can rotate relative to the first end 821 under the action of force. The rolling member 820 can also achieve rolling by setting a rotational cooperation component, such as Figure 5 As shown, the sliding mechanism 800 can further include a bearing 830. The bearing 830 is installed within the mounting hole 811. The first end 821 of the rolling member 820 is disposed within the bearing 830, and the second end 822 extends outside the bearing 830. Thus, under the rotational action of the bearing 830, the entire rolling member 820 is driven to rotate. Among them, the accompanying drawings of this embodiment are only schematic examples of the latter and should not be regarded as a limitation to this application.

[0077] In one embodiment, please refer to Figure 8 , Figure 8 is the assembly schematic diagram of the door body and the swing arm of the embodiment of the present utility model. The swing arm mechanism 300 further includes a torsion hinge 320. One end of the swing arm 310 is hinged to the door frame 100 through the torsion hinge 320. It can be understood that the torsion hinge 320 can provide a resistance to hinder the rotation of the swing arm 310, which can slow down the speed of the door body 200 when opening, prevent the door body 200 from falling rapidly under the action of gravity when opening, and prevent pinching accidents. Such as Figure 8As shown, the swing arm 310 includes two connecting arms 311 and a support rod 312 connected between the two connecting arms 311. The two connecting arms 311 are respectively rotatably connected to the left and right sides of the second door panel 220. By providing the support rod 312 to connect the two connecting arms 311, the two connecting arms 311 can be rotated synchronously, improving the smoothness of the movement of the door body 200. Among them, the torsion hinge 320 is connected to the support rod 312.

[0078] Optionally, in some other embodiments of the present application, a damping rotating shaft can also be used to rotatably connect the swing arm 310 to the door frame 100.

[0079] During the operation of some semiconductor devices, they are in high-temperature, high-pressure or high-voltage environments. To ensure the safety of the semiconductor devices, it is necessary to ensure that the door body 200 is firmly in the closed state, that is, the door body 200 is firmly limited to the first position.

[0080] For this, in an embodiment, the door body assembly 10 further includes a limiting mechanism for limiting the door body 200 to the first position. By providing the limiting mechanism, the limiting mechanism is used to limit the degree of freedom of movement of the door body 200, so as to firmly limit the door body 200 to the first position, prevent the door body 200 from moving due to vibration during the operation of the semiconductor device and revealing the opening 130, and improve the operation safety of the semiconductor device.

[0081] The structure of the limiting mechanism can be various. For example, the limiting mechanism can be that a jack is provided on the door body 200 and a bolt is provided on the door frame 100. When the door body 200 moves to the first position, the bolt and the jack are locked and matched; it can also be that a baffle is provided on the outer surface of the door frame 100. When the door body 200 moves to the first position, a part of the baffle also moves to the outer wall surface of the door body 200, and the baffle blocks the outward movement of the door body 200 to limit the door body 200 to the first position.

[0082] Exemplarily, in an embodiment, please refer to Figure 7 and Figure 8 , the limiting mechanism 500 includes a limiting plate 510 and a limiting bolt 520. The limiting plate 510 is provided on the door body 200, the limiting plate 510 is provided with a limiting hole 511, the limiting bolt 520 is movably provided on the door frame 100. When the door body 200 is in the first position, the limiting bolt 520 is inserted into the limiting hole 511 to limit the door body 200 to the first position. Of course, in other alternative embodiments of the present application, the limiting plate 510 can also be provided on the door frame 100, and the limiting bolt 520 can be provided on the door body 200. The accompanying drawings of this embodiment only take the limiting plate 510 provided on the door body 200 and the limiting bolt 520 provided on the door frame 100 as an example for illustration, and should not be regarded as a limitation to the present application.

[0083] Specifically, when the door body 200 is in the first position, that is, in the closed state, the limit plug 520 is inserted into the limit hole 511. The limit hole 511 restricts the degree of freedom of the limit plug 520 to move along the radial direction of the limit hole 511, thereby restricting the movement of the door body 200, achieving locking the door body 200 in the first position, preventing the door body 200 from being opened due to the influence of vibration, especially preventing the door body 200 from being opened during the operation of the semiconductor device, and improving the safety of the semiconductor device. It can be understood that when the door needs to be opened, driving the limit plug 520 to move out of the limit hole 511 can release the locking limit of the door body 200, enabling the door body 200 to move to the second position under the action of an external force.

[0084] Among them, the limit plug 520 can be configured to move under the action of a manually applied force, or a driving device can be configured to move under the driving force provided by the driving device.

[0085] In order to improve the efficiency of opening and closing the door, in an embodiment, the door body assembly 10 further includes a driving member 600. The driving member 600 is drivingly connected to the limit plug 520, and the limit plug 520 can move under the drive of the driving member 600 to achieve the insertion action of inserting into the limit hole 511 or the extraction action of being withdrawn from the limit hole 511. Among them, the driving member 600 can be a driving device such as an electric cylinder, a cylinder, or an oil cylinder, and the embodiments of the present application do not limit this.

[0086] In this embodiment, by setting the driving member 600 to be connected to the limit plug 520, when closing the door, the driving member 600 drives the limit plug 520 to automatically insert into the limit hole 511, and when opening the door, the driving member 600 drives the limit plug 520 to move out of the limit hole 511. There is no need for manual operation, and the locking limit or release of the limit of the door body 200 can be quickly realized, improving the efficiency of opening and closing the door body 200. And since the movement of the limit plug 520 is realized by relying on the driving member 600, the limit plug 520 and the driving member 600 can be arranged inside the door body 200 and the door frame 100, without being exposed outside the door body 200. When the door body 200 is in the closed state, the limit plug 520 and the driving member 600 are hidden inside the door body 200, which can improve the appearance effect of the door body assembly 10 and the aesthetics of the semiconductor device.

[0087] To trigger the driving member 600 to work, the door body assembly 10 further includes a triggering device, and the triggering device is configured to: when the door body 200 is in the first position, trigger the driving member 600 to drive the limit plug 520 to insert into the limit hole 511.

[0088] Among them, there can be various triggering methods for the triggering device. The triggering device can be a mechanical triggering mechanism. For example, a switch for controlling its startup can be provided on the driving member 600. The mechanical triggering mechanism is connected to the door body 200. When the door body 200 moves, it can drive the mechanical triggering mechanism to move together. By reasonably setting the position of the mechanical triggering mechanism, when the door body 200 moves to the first position, the mechanical triggering mechanism just squeezes the switch to generate a mechanical trigger for the driving member 600, so that the driving member 600 drives the limit pin 520 to perform an insertion movement. The triggering device can also be an electronic control trigger realized by combining a sensor and an electronic control board.

[0089] In one embodiment, please refer to Figure 9 , Figure 9 which is a schematic block diagram of the triggering device according to an embodiment of the present invention. The triggering device 700 includes a detection mechanism 710 and a circuit board 720. The detection mechanism 710 is electrically connected to the circuit board 720. The detection mechanism 710 is used to detect the opening and closing state of the door body 200 and output an electrical signal. The circuit board 720 is electrically connected to the driving member 600 and the detection mechanism 710. The circuit board 720 is used to control the driving member 600 to work according to the electrical signal output by the detection mechanism 710. It can be understood that a control circuit or a controller for controlling the driving member 600 is provided on the circuit board 720.

[0090] Specifically, when the detection mechanism 710 detects that the door body 200 moves to the first position, the detection mechanism 710 outputs a first electrical signal to the circuit board 720. The circuit board 720 outputs a first control signal to control the driving member 600 to drive the limit pin 520 to perform an insertion operation, so that the limit pin 520 is inserted into the limit hole 511 to lock the door body 200 at the first position. It can be understood that the door body assembly 10 can also be provided with an opening switch. The opening switch is electrically connected to the circuit board 720 through a cable. When the user needs to open the door body 200, pressing the switch outputs a second electrical signal to the circuit board 720, so that the circuit board 720 outputs a second control signal to control the driving member 600 to drive the limit pin 520 to be pulled out from the limit hole 511 to release the limit on the door body 200.

[0091] By detecting the opening and closing state of the door body 200 through the detection mechanism 710 and outputting a corresponding electrical signal, and enabling the circuit board 720 to control the work of the driving member 600 according to the electrical signal, automatic triggering of the driving member 600 can be realized, which is more reliable than manual operation triggering.

[0092] Specifically, detectors such as a laser sensor and an infrared sensor can be used to detect whether the door body 200 is in the closed state. In one embodiment, please combine Figure 8 and refer to Figure 10 , Figure 10This is a partial structural schematic diagram of the door body assembly according to an embodiment of the present utility model. The detection mechanism 710 includes a detector 711 and a baffle 712. The detector 711 can be a laser pair sensor. The laser pair sensor is fixed on the door frame 100 and includes a transmitting part and a receiving part. The transmitting part and the receiving part are arranged at intervals relatively. The baffle 712 is arranged on the support rod 312 of the swing arm 310. Since the swing arm 310 rotates, the position of the baffle 712 changes following the rotation of the swing arm 310. When the door body 200 moves to the first position, the baffle 712 just moves between the transmitting part and the receiving part, and the baffle 712 blocks the laser signal emitted by the transmitting part, so that the receiving part cannot receive it. At this time, the detector 711 outputs an electrical signal, and the circuit board 720 controls the driving member 600 to drive the limit pin 520 to insert into the limit hole 511.

[0093] In one embodiment, please refer to again Figure 8 and Figure 10 , the door body assembly 10 further includes a first magnetic attraction part 530 and a second magnetic attraction part 540. The first magnetic attraction part 530 is arranged on one of the door body 200 and the door frame 100, and the second magnetic attraction part 540 is arranged on the other of the door body 200 and the door frame 100. When the door body 200 is in the first position, the first magnetic attraction part 530 is magnetically attracted and matched with the first magnetic attraction part 530. It can be understood that the magnetic pole polarities of the opposite sides of the first magnetic attraction part 530 and the second magnetic attraction part 540 are opposite.

[0094] By arranging the first magnetic attraction part 530 and the second magnetic attraction part 540, when the user applies a force to drive the door body 200 to move to the first position, a magnetic attraction force is generated between the first magnetic attraction part 530 and the second magnetic attraction part 540, and the first magnetic attraction part 530 and the second magnetic attraction part 540 are firmly attracted together to realize limiting the door body 200 at the first position. That is to say, the first magnetic attraction part 530 and the second magnetic attraction part 540 constitute another limiting structure to realize auxiliary limiting of the door body 200. When the limit pin 520 fails to lock and limit due to power failure or other abnormalities, the door body 200 can still be stably limited at the first position through the magnetic attraction between the first magnetic attraction part 530 and the second magnetic attraction part 540, preventing the door body 200 from being opened during the operation of the equipment and improving the safety of the equipment.

[0095] This application also provides a semiconductor device, and the semiconductor device includes the door body assembly 10 conceived based on any of the above embodiments.

[0096] Since the semiconductor device adopts all the technical solutions of the door body assembly 10 in the above embodiments, it at least has all the beneficial effects brought by the technical solutions in the above embodiments.

[0097] The embodiments of the present utility model have been described in detail above in conjunction with the accompanying drawings. However, the present utility model is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present utility model within the scope of knowledge possessed by those of ordinary skill in the relevant art. In addition, the embodiments of the present utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. Door assembly, characterized in that: include: a door frame, provided with an opening; A slide groove is arranged on the door frame and close to the edge of the opening; a door body, movably disposed at the opening, the door body comprising a first door panel and a second door panel connected to the first door panel, the first door panel and the second door panel intersect, and one end of the first door panel is slidably connected to the slide groove; and A swing arm, one end of which is hinged to the door frame, and the other end of which is rotatably connected to the second door panel. The swing arm can rotate relative to the door frame under the action of an external force to drive the door body to move and switch between a first position and a second position. When in the first position, the door body covers the opening, and when in the second position, the door body reveals at least one end of the opening. When the swing arm drives the door body to move, one end of the first door panel slides along the sliding groove.

2. The door assembly according to claim 1, characterized in that: The door frame includes a front end wall and a top wall connected to the front end wall, and the opening passes through the front end wall and the top wall; the slide groove includes a first groove section, a second groove section and a third groove section connected in sequence, the first groove section is located on a side of the top wall away from the outside of the door frame, and the third groove section is located on a side of the front end wall away from the outside of the door frame; The slide groove is used to restrain the first door panel from moving on the side of the plane where the top wall is located away from the outside of the door frame. When the door body is in the second position, at least part of the door body is located on the side of the front end wall facing the outside of the door frame.

3. The door assembly according to claim 1 or 2, characterized in that: The door body assembly comprises a sliding mechanism, and one end of the first door panel away from the second door panel is slidably connected to the slide groove through the sliding mechanism, and at least a part of the sliding mechanism is located in the slide groove.

4. The door assembly according to claim 3, characterized in that: The sliding mechanism comprises: A mounting plate, disposed on the door body, the mounting plate being provided with a mounting hole; and The rolling element comprises a first end and a second end facing each other, wherein the first end is connected to the mounting hole, the second end is located outside the mounting hole, and the second end is inserted into the slide groove, and the second end can roll relative to the groove wall of the slide groove.

5. The door assembly according to claim 1 or 2, characterized in that: The door assembly further includes a limiting mechanism, which includes: a limiting plate, disposed on one of the door body and the door frame, the limiting plate being provided with a limiting hole; and A limit latch is movably arranged on the other of the door body and the door frame. When the door body is in the first position, the limit latch is inserted into the limit hole to limit the door body to the first position.

6. The door assembly according to claim 5, characterized in that: The door body comprises: A driving member, drivingly connected to the limit latch and used to drive the limit latch to move; and A trigger device is configured to: when the door body is in the first position, trigger the driving member to drive the limiting pin to insert into the limiting hole.

7. The door assembly according to claim 6, characterized in that: The trigger device comprises: A detection mechanism, used to detect the open and closed state of the door body and output an electrical signal; and The circuit board is electrically connected to the detection mechanism and the driving member to control the action of the driving member according to the electrical signal output by the detection mechanism.

8. The door assembly according to claim 1 or 2, characterized in that: The door body assembly also includes a first magnetic portion and a second magnetic portion, wherein the first magnetic portion is disposed at one of the door body and the door frame, and the second magnetic portion is disposed at the other of the door body and the door frame, and when the door body is in the first position, the first magnetic portion is magnetically coupled with the second magnetic portion.

9. The door assembly according to claim 1 or 2, characterized in that: The door body assembly also includes a torsion hinge, and one end of the swing arm is connected to the door frame through the torsion hinge.

10. A semiconductor device, characterized in that The door assembly comprises the door assembly described in any one of claims 1 to 9.

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