Driving assembly and vacuum gate valve

Abstract

The utility model discloses a driving assembly and a vacuum gate valve, and relates to the technical field of vacuum gate valves, the driving assembly comprises a base, a driving piece, a transmission assembly and a valve body; a sliding hole is formed in the base; the driving piece is connected with the base; the transmission assembly comprises a valve rod and a fixed seat; the valve rod is in sliding connection with the fixing seat, the valve rod penetrates through the sliding hole and is connected with the driving end of the driving part, and the fixing seat is connected with the base and located on the periphery of the sliding hole; the valve body is connected with the valve rod and located on the side, opposite to the driving piece, of the base. The driving piece can drive the valve rod to move in the axis direction of the valve rod so that the valve body can be close to or away from the base. According to the technical scheme, the problems that when an existing vacuum gate valve is installed at a certain inclination angle or vertically installed, a driving assembly on the vacuum gate valve works in an inclined mode for a long time, a valve rod can be bent, the risk of air leakage exists between the driving assembly and a shell, and then the whole vacuum gate valve loses efficacy can be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum valves, and particularly relates to a driving assembly and a vacuum valve. Background Art

[0002] In a vacuum coating production line, vacuum valves are usually required to isolate different coating chambers; during the coating process, a vacuum valve is needed to isolate the vacuum coating chamber of the part to be exchanged from other vacuum coating chambers to ensure that the vacuum coating chambers do not affect each other. The vacuum valve can adjust the pressure in each chamber to an appropriate level suitable for part exchange. During the part exchange process, the vacuum valve can serve as a safety release mechanism. When an abnormal situation is detected, it can quickly cut off the connection between the chamber and the system to prevent gas leakage or contamination. In a multi-chamber system, the vacuum valve is used to control the process of transferring parts from one chamber to another.

[0003] Traditional vacuum valves generally include a housing, a valve body, and a driving assembly and a push-pull assembly for controlling the movement of the control valve plate. Valve openings are provided on two opposite side walls of the housing. The driving assembly includes a valve stem connected to the valve body, and the valve stem can drive the valve body between the two valve openings. For different vacuum coating equipment, there are certain differences in the installation methods of vacuum valves. When the existing vacuum valve is installed at a certain inclination angle or vertically, in the long-term inclined state of the driving assembly on the vacuum valve, the valve stem may bend, and there may be a risk of air leakage between the driving assembly and the housing, which may lead to the problem of the failure of the entire vacuum valve. Summary of the Utility Model

[0004] The main object of the utility model is to propose a driving assembly and a vacuum valve, aiming to solve the problem that when the existing vacuum valve is installed at a certain inclination angle or vertically, in the long-term inclined state of the driving assembly on the vacuum valve, the valve stem may bend, and there may be a risk of air leakage between the driving assembly and the housing, which may lead to the problem of the failure of the entire vacuum valve.

[0005] To achieve the above object, the driving assembly proposed by the utility model includes: a base, a driving member, a transmission assembly, and a valve body. A sliding hole is provided on the base; the driving member is connected to the base; the transmission assembly includes a valve stem and a fixing seat; the valve stem is slidably connected to the fixing seat, the valve stem passes through the sliding hole, the valve stem is connected to the driving end of the driving member, the fixing seat is connected to the base, and the fixing seat is located on the periphery of the sliding hole; the valve body is connected to the valve stem, and the valve body is located on the side of the base facing away from the driving member; wherein, the driving member can drive the valve stem to move along the axial direction of the valve stem so that the valve body approaches or moves away from the base.

[0006] In one embodiment, the transmission assembly further includes a sealing tube, with two ends of the sealing tube respectively connected to the fixed seat and the valve body, and the sealing tube is located between the valve body and the fixed seat.

[0007] In one embodiment, the transmission assembly further includes a connecting rod, which connects the driving end of the driving member and the valve rod, and the connecting rod is located at an end of the valve rod away from the valve body.

[0008] In one embodiment, the driving assembly further includes a telescopic rod, with two ends of the telescopic rod respectively connected to the connecting rod and the base, and the telescopic rod is located between the connecting rod and the base.

[0009] In one embodiment, the transmission assembly further includes a bearing, which is sleeved on the valve rod, the bearing is detachably connected to the fixed seat, and the bearing is located on a side of the sealing tube away from the valve body.

[0010] In one embodiment, the transmission assembly further includes an air tube, a wire passing channel is formed in the valve rod, the air tube is located in the wire passing channel, and the air tube is used to adjust the air pressure in the valve body.

[0011] In one embodiment, the valve body further includes a connecting seat, which is connected to the valve body, the valve rod is detachably connected to the connecting seat, and the connecting seat is located at an end of the valve body close to the base.

[0012] In one embodiment, the valve body further includes a first circuit connecting member and a second circuit connecting member, the first circuit connecting member is inserted into the second circuit connecting member, the first circuit connecting member is located in the wire passing channel, the second circuit connecting member is located in the valve body, and the first circuit connecting member and the second circuit connecting member are used to connect the valve body and the wire in the wire passing channel in series.

[0013] In one embodiment, at least one sliding hole is formed in the base, the driving assembly includes at least one valve rod and at least one fixed seat, each valve rod is slidably connected to the fixed seat, and each valve rod passes through a sliding hole.

[0014] The present utility model also provides a vacuum valve, which includes: a housing and a driving assembly, a vacuum chamber is formed in the housing, and valve openings communicating with the vacuum chamber are formed on two opposite side walls of the housing; the driving assembly is used to drive the valve body to block the valve openings.

[0015] The technical solution of the present utility model provides a driving assembly, which includes: a base, a driving member, a transmission assembly, and a valve body; a sliding hole is provided on the base for guiding the movement of the valve stem to ensure the movement direction and stability of the valve stem. The driving member is connected to the base and serves as a power source, and transmits the power to the valve stem through the transmission assembly. The transmission assembly consists of a valve stem and a fixed seat. The valve stem is slidably connected to the fixed seat and is connected to the base through the sliding hole. Such a design allows the valve stem to move along the axial direction under the guidance of the fixed seat, reducing the possibility of bending. The fixed seat is connected to the base and is located on the periphery of the sliding hole. This layout provides a stable support for the valve stem and at the same time limits the movement range of the valve stem, preventing adverse effects caused by inclined installation. By optimizing the structural design of the driving assembly, the present utility model enhances the stability and durability of the valve stem, reduces the air leakage risk during inclined installation or vertical installation, and thus improves the overall performance and reliability of the vacuum valve. Brief Description of the Drawings

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the structures shown in these drawings.

[0017] Figure 1 Schematic diagram of the structure of an embodiment of the driving assembly provided by the present utility model;

[0018] Figure 2 Schematic diagram of the structure of another embodiment of the driving assembly provided by the present utility model;

[0019] Figure 3 Enlarged view of the driving assembly provided by the present utility model at B.

[0020] Explanation of the reference numerals in the drawings:

[0021] 100, driving assembly; 1, base; 1a, sliding hole; 2, driving member; 3, transmission assembly; 4, valve body; 5, telescopic rod; 31, valve stem; 32, fixed seat; 33, sealing tube; 34, connecting rod; 35, bearing; 36, air pipe; 31a, wire passing channel; 41, connecting seat; 42, first circuit connector; 43, second circuit connector; 200, vacuum valve.

[0022] The realization, functional features, and advantages of the object of the present utility model will be further described in conjunction with the embodiments and with reference to the drawings. Detailed Embodiments

[0023] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0024] It should be noted that if there are directional indications (such as up, down, left, right, front, back...) involved in the embodiments of the present invention, the directional indications are only used to explain the relative positional relationship and movement conditions between components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0025] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, if "and / or" or "and / or" appears throughout the text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or a solution that satisfies both A and B at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by the present invention.

[0026] The present invention provides a driving assembly 100.

[0027] Please refer to Figures 1 to 3 , in an embodiment of the present invention, the driving assembly 100 includes: a base 1, a driving member 2, a transmission assembly 3, and a valve body 4. A sliding hole 1a is formed in the base 1; the driving member 2 is connected to the base 1; the transmission assembly 3 includes a valve rod 31 and a fixed seat 32; the valve rod 31 is slidably connected to the fixed seat 32, the valve rod 31 passes through the sliding hole 1a, the valve rod 31 is connected to the driving end of the driving member 2, the fixed seat 32 is connected to the base 1, and the fixed seat 32 is located at the periphery of the sliding hole 1a; the valve body 4 is connected to the valve rod 31, and the valve body 4 is located on the side of the base 1 facing away from the driving member 2; wherein, the driving member 2 can drive the valve rod 31 to move along the axial direction of the valve rod 31, so that the valve body 4 approaches or moves away from the base 1.

[0028] In one embodiment, the base 1, as an important part of the vacuum valve 200, is usually designed to stably mount and support the entire driving assembly 100. The base 1 needs to have sufficient strength and stability to withstand the forces generated during the operation of the valve. A sliding hole 1a is provided on the base 1 to guide the movement of the valve stem 31, ensuring that the valve stem 31 can move smoothly between the two valve openings. The material selection of the base 1 depends on the application environment and required performance of the vacuum valve 200. Common materials include stainless steel, aluminum alloy, carbon steel, etc. Stainless steel is widely used due to its excellent corrosion resistance and strength, especially in high-vacuum and corrosive environments. Aluminum alloy is selected for its light weight and good thermal conductivity, suitable for applications that require rapid evacuation. Carbon steel is a cost-effective choice for general industrial applications. The base 1 is used in a variety of vacuum systems, including semiconductor manufacturing, scientific research, thin-film coating, medical equipment, and various industrial production processes. In semiconductor manufacturing, the vacuum valve 200 is used to isolate different process chambers, ensuring the purity and precise control of the process. As the installation base of the driving assembly 100, the base 1 needs to meet specific application requirements in terms of design and material selection to ensure the efficient, stable, and long-term operation of the driving assembly 100.

[0029] Furthermore, the driving member 2 is a key component in the vacuum valve 200 for driving the movement of the valve stem 31. The driving member 2 is usually a cylinder or a linear motor, etc., which convert power into the linear movement of the valve stem 31. The design of the driving member 2 needs to ensure stable operation at various installation angles, avoiding performance degradation or damage caused by inclination. For example, by using frictionless bearings 35 and a precision gear system, it can be ensured that the valve stem 31 will not bend even under long-term inclined conditions, thereby reducing the risk of air leakage. The material selection of the driving member 2 needs to consider corrosion resistance, strength, and wear resistance. Common materials include stainless steel, aluminum alloy, carbon steel, and special alloys.

[0030] It should be noted that the function of the transmission component 3 in the driving component 100 is to transmit the driving force to the valve body 4 to realize the opening and closing of the valve. The transmission component 3 includes a valve stem 31 and a fixed seat 32; the valve stem 31 is a key component in the transmission component 3. It connects the driving part 2 and the valve body 4 to transmit power and motion. The valve stem 31 is usually designed to be able to withstand high axial forces and pressures to ensure stability and sealing during the opening and closing of the valve. The fixed seat 32 is used to fix the position of the valve stem 31 to ensure accurate guidance of the valve stem 31 during movement. The fixed seat 32 is usually installed on the base 1 and is slidably connected to the valve stem 31 to ensure that the valve stem 31 can move smoothly within the sliding hole 1a. The material selection of the valve stem 31 and the fixed seat 32 needs to consider corrosion resistance, strength, temperature resistance and wear resistance. Commonly used materials include stainless steel, aluminum alloy, carbon steel, etc. Stainless steel is widely used due to its excellent corrosion resistance and strength, especially in high-vacuum and corrosive environments. Aluminum alloy is selected because of its light weight and good thermal conductivity, which is suitable for applications that require rapid evacuation.

[0031] In this embodiment, the valve body 4 is a very critical component in the vacuum valve 200. Its design and material selection are crucial for the overall performance of the valve. Usually, multiple groups of cylinders are included inside the valve body 4. The valve plates on both sides of the valve body 4 are driven by the cylinders to perform reciprocating motion to open or close the vacuum valve 200. The structure of the valve body 4 usually includes a part connected to the valve stem 31 and interfaces connected to pipelines, such as flanges, threads or welded ends. The material selection of the valve body 4 usually includes stainless steel, aluminum alloy, carbon steel, etc. These materials have good corrosion resistance and strength.

[0032] The technical solution of the present utility model provides a driving component 100, which includes: a base 1, a driving part 2, a transmission component 3 and a valve body 4; a sliding hole 1a is provided on the base 1 to guide the movement of the valve stem 31 to ensure the movement direction and stability of the valve stem 31. The driving part 2 is connected to the base 1 and serves as a power source. The power is transmitted to the valve stem 31 through the transmission component 3. The transmission component 3 is composed of a valve stem 31 and a fixed seat 32. The valve stem 31 is slidably connected to the fixed seat 32 and is connected to the base 1 through the sliding hole 1a. Such a design allows the valve stem 31 to move along the axial direction under the guidance of the fixed seat 32, reducing the possibility of bending. The fixed seat 32 is connected to the base 1 and is located at the periphery of the sliding hole 1a. This layout provides a stable support for the valve stem 31 and at the same time limits the movement range of the valve stem 31 to prevent adverse effects caused by inclined installation. By optimizing the structural design of the driving component 100, the present utility model enhances the stability and durability of the valve stem 31, reduces the air leakage risk during inclined installation or vertical installation, and thus improves the overall performance and reliability of the vacuum valve 200.

[0033] In the embodiment of the present utility model, please refer toFigure 2 and Figure 3 The transmission assembly 3 further includes a sealing tube 33. The two ends of the sealing tube 33 are respectively connected to the fixed seat 32 and the valve body 4, and the sealing tube 33 is located between the valve body 4 and the fixed seat 32.

[0034] In this embodiment, the transmission assembly 3 includes a sealing tube 33. This sealing tube 33 is a key component of the transmission assembly 3, and is designed to ensure the sealing performance and stability of the valve stem 31 during movement. One end of the sealing tube 33 is connected to the fixed seat 32, and the other end is connected to the valve body 4, forming a sealing channel for the movement of the valve stem 31. Generally, the sealing tube 33 and the valve body 4 can be connected by detachable connection methods such as bolts or snaps, and sealing gaskets and other structures are provided at the connection to ensure that there is no air leakage at the connection; similarly, the sealing tube 33 and the fixed seat 32 can also be connected by detachable connection methods such as bolts or snaps, and sealing gaskets and other structures are provided at the connection to ensure that there is no air leakage at the connection; such a layout ensures that when the valve stem 31 moves axially, the sealing tube 33 can provide continuous sealing between the entire valve body 4 and the fixed seat 32, preventing the infiltration of external gas or the leakage of internal gas, thereby maintaining the integrity of the vacuum environment. The material and structure design of the sealing tube 33 are designed to meet the requirements of the high-vacuum environment, while ensuring the reliability and durability of long-term operation. Specifically, a bellows made of stainless steel or a flexible hose made of rubber can be used; through this design, the sealing tube 33 not only provides effective sealing, but also helps to reduce the friction of the movement of the valve stem 31, improving the efficiency and life of the entire valve system.

[0035] In the embodiment of the present utility model, please refer to Figure 1 The transmission assembly 3 further includes a connecting rod 34. The connecting rod 34 connects the driving end of the driving member 2 and the valve stem 31, and the connecting rod 34 is located at the end of the valve stem 31 away from the valve body 4.

[0036] In one embodiment, the transmission assembly 3 further includes a connecting rod 34. The function of the connecting rod 34 is to connect the driving end of the driving member 2 to the valve stem 31, ensuring the effective transmission of the power of the driving member 2 to the valve stem 31. The connecting rod 34 is designed to be located at one end of the valve stem 31 and on the side of the valve stem 31 away from the valve body 4. Such a layout allows the driving member 2 to directly apply a force to the valve stem 31 through the connecting rod 34, driving the valve stem 31 to perform the required linear motion, and then controlling the opening and closing of the valve body 4. The design of the connecting rod 34 takes into account the force transmission efficiency and the structural stability to ensure the accurate transmission of the driving force under various operating conditions. The shape of the connecting rod 34 is not limited, and generally, a rod shape or a structure with a certain arc can be used; in addition, the material and surface treatment of the connecting rod 34 are also specially selected and designed to meet the requirements of the high-vacuum environment, prevent wear or corrosion during long-term operation, and ensure the long-term stability and reliability of the transmission assembly 3. The material is generally stainless steel or aluminum alloy, etc. Through this design, the connecting rod 34 not only optimizes the force transmission path but also enhances the mechanical efficiency and operation accuracy of the entire vacuum valve 200.

[0037] In an embodiment of the present utility model, please refer to Figure 1 , the driving assembly 100 further includes a telescopic rod 5. The two ends of the telescopic rod 5 are respectively connected to the connecting rod 34 and the base 1, and the telescopic rod 5 is located between the connecting rod 34 and the base 1.

[0038] In one embodiment, the driving assembly 100 includes a telescopic rod 5. The telescopic rod 5 is a key component for realizing the transmission and adjustment of the driving force. The design of the telescopic rod 5 enables its two ends to be respectively connected to the connecting rod 34 and the base 1, with one end fixedly or detachably connected to one end of the connecting rod 34 and the other end connected to the corresponding part of the base 1. Such a layout allows the telescopic rod 5 to perform telescopic motion between the connecting rod 34 and the base 1, thereby finely controlling the displacement of the valve stem 31. The middle part of the telescopic rod 5, that is, the area located between the connecting rod 34 and the base 1, can be telescoped according to the driving action of the driving member 2 to adapt to the different position requirements of the valve stem 31 when the valve is opened and closed. The material selection and surface treatment of the telescopic rod 5 are designed to ensure its wear resistance and corrosion resistance in the high-vacuum environment, while maintaining sufficient strength and rigidity to withstand the forces during the operation. Generally, it can be made of aluminum alloy or stainless steel, etc. This design not only provides a flexible force transmission mechanism but also can absorb the length changes caused by thermal expansion, mechanical vibration, or installation errors, thus ensuring the sealing performance and reliability of the valve.

[0039] In an embodiment of the present utility model, please refer to Figure 2 and Figure 3, the transmission assembly 3 further includes a bearing 35. The bearing 35 is sleeved on the valve stem 31. The bearing 35 is detachably connected to the fixed seat 32. The bearing 35 is located on the side of the sealing tube 33 away from the valve body 4.

[0040] In this embodiment, the transmission assembly 3 further includes a bearing 35 as a component. The design of the bearing 35 is used to reduce the friction between the valve stem 31 and the fixed seat 32 during the movement of the valve stem 31, improve the transmission efficiency, and ensure the smoothness and accuracy of the movement of the valve stem 31. The bearing 35 is sleeved on the valve stem 31, that is, the inner ring of the bearing 35 is matched with the outer surface of the valve stem 31, and the outer ring of the bearing 35 is connected to the fixed seat 32. The connection between the bearing 35 and the fixed seat 32 is designed to be detachable. Such a design facilitates the installation, maintenance, and replacement of the bearing 35. When maintenance or replacement of the bearing 35 is required, the bearing 35 can be conveniently removed without the need for large-scale disassembly of the entire valve system. This detachable connection is usually achieved through bolts, pins, snap rings, or other mechanical fasteners. The bearing 35 is located on one side of the sealing tube 33 and is at the end away from the valve body 4. This layout enables the bearing 35 not only to support the valve stem 31 but also to provide stable guidance when the valve stem 31 moves axially, while ensuring the sealing of the entire structure by the sealing tube 33. The position selection of the bearing 35 helps to reduce the bending or torsional stress on the sealing tube 33 caused by the movement of the valve stem 31, thereby protecting the integrity of the sealing tube 33 and ensuring the sealing performance of the valve. The precise fit and lubrication state of the bearing 35 are crucial for ensuring the long-term stable operation of the transmission assembly 3. Through this design, the bearing 35 provides an efficient, low-friction, and easy-to-maintain transmission solution for the vacuum gate valve 200.

[0041] In an embodiment of the present utility model, please refer to Figure 2 and Figure 3 , the transmission assembly 3 further includes an air pipe 36. The valve stem 31 is provided with a wire passing channel 31a. The air pipe 36 is located in the wire passing channel 31a. The air pipe 36 is used to adjust the air pressure in the valve body 4.

[0042] In one embodiment, the sealing tube 33 is provided with a wire passing channel 31a for accommodating the air pipe 36. This design enables the valve stem 31 to move freely inside the sealing tube 33. At the same time, the air pipe 36 is connected to the valve body 4 through the wire passing channel 31a to adjust the air pressure in the valve body 4. The design of the valve stem 31 having the wire passing channel 31a ensures the stability and sealing of the air pipe 36 during the movement of the valve stem 31, preventing gas leakage, which is crucial for maintaining a high vacuum degree in the vacuum system. Through this design, precise air pressure adjustment can be achieved, thereby controlling the opening and closing of the valve and ensuring the efficient and reliable operation of the valve in the vacuum system. Further, the gap between the wire passing channel 31a and the air pipe 36 can also be used to arrange wires to transmit the electrical signals in the valve body 4 out through the wire passing channel 31a.

[0043] In an embodiment of the present utility model, please refer to Figure 2 and Figure 3 , the valve body 4 further includes a connecting seat 41. The connecting seat 41 is connected to the valve body 4, and the valve stem 31 is detachably connected to the connecting seat 41. The connecting seat 41 is located at one end of the valve body 4 close to the base 1.

[0044] In an embodiment of the present utility model, the valve body 4 includes a connecting seat 41, which is a key component to ensure the effective connection between the transmission assembly 3 and the valve body 4. The connection between the connecting seat 41 and the valve body 4 is designed to be detachable. Such a design allows for the easy replacement or repair of the connecting seat 41 or the valve stem 31 when needed, without the need for complex disassembly of the entire valve body 4. This detachable connection is usually achieved through bolts, pins, snap fasteners or other mechanical fasteners, and at the same time, structures such as sealing rings are provided at the connection to ensure the firmness and reliability of the connection. The connecting seat 41 is located at one end of the valve body 4 close to the base 1. This layout makes the connection between the valve stem 31 and the connecting seat 41 more compact, helps to reduce the length of the valve body 4, while maintaining the stability and transmission efficiency of the valve stem 31. In addition, this design also helps to form an effective seal inside the valve body 4 to prevent gas leakage. The detachable connection design between the valve stem 31 and the connecting seat 41 provides great convenience for the maintenance and operation of the valve. When it is necessary to replace the valve stem 31 or the connecting seat 41, disassembly and assembly can be carried out quickly, reducing maintenance time and cost. The connecting seat 41 improves the assembly and maintenance efficiency of the driving assembly 100.

[0045] In an embodiment of the present utility model, please refer to Figure 3 , the valve body 4 further includes a first circuit connector 42 and a second circuit connector 43. The first circuit connector 42 is plugged into the second circuit connector 43. The first circuit connector 42 is located in the wire passing channel 31a, and the second circuit connector 43 is located inside the valve body 4. The first circuit connector 42 and the second circuit connector 43 are used to connect the wires in series between the valve body 4 and the wire passing channel 31a.

[0046] In this embodiment, the valve body 4 includes a first circuit connector 42 and a second circuit connector 43. The first circuit connector 42 is located within the wire passing channel 31a, while the second circuit connector 43 is located within the valve body 4. The two are connected by plugging, and such a design allows the valve body 4 to be electrically connected to the wires within the wire passing channel 31a, thereby achieving series connection of the circuit. Specifically, the cooperation between the first circuit connector 42 and the second circuit connector 43 provides a flexible and reliable circuit connection method. This design not only simplifies the circuit wiring but also enhances the electrical performance of the entire drive assembly 100. In practical applications, such a design enables the vacuum valve 200 to control the fluid while also achieving circuit control. For example, in an intelligent valve system, the valve state can be monitored and adjusted through circuit connection. In terms of materials, the selection of the first circuit connector 42 and the second circuit connector 43 needs to consider corrosion resistance, temperature resistance, and electrical performance. Materials such as copper, stainless steel, or special alloys are usually selected to ensure stability and reliability in various working environments. At the same time, the materials of the circuit connectors also need to have good electrical conductivity and anti-interference ability to ensure efficient and stable transmission of the circuit.

[0047] In an embodiment of the present utility model, please refer to Figure 1 , at least one sliding hole 1a is formed on the base 1, the drive assembly 100 includes at least one valve stem 31 and at least one fixed seat 32, each valve stem 31 is slidably connected to the fixed seat 32, and each valve stem 31 passes through a sliding hole 1a.

[0048] In one embodiment, the base 1 includes at least one sliding hole 1a, and the drive assembly 100 includes at least one valve stem 31 and at least one fixed seat 32. This design allows the valve stem 31 to perform precise sliding motion under the guidance of the fixed seat 32. A sliding connection is adopted between each valve stem 31 and the fixed seat 32 to ensure the smoothness and reliability of the motion. At the same time, each valve stem 31 passes through a sliding hole 1a. Such a design not only provides structural stability but also allows the valve stem 31 to perform linear motion within the base 1, thereby driving the opening or closing of the valve. The guiding motion of multiple valve stems 31 within multiple sliding holes 1a reduces the risk of bending caused by tilting or uneven loads, improving the reliability of the entire valve system. In terms of material selection, the base 1 and the valve stem 31 usually adopt high-strength and wear-resistant materials such as stainless steel or special alloys to adapt to high loads and harsh environmental conditions. The fixed seat 32 may adopt engineering plastics or metals to ensure a stable and durable sliding connection with the valve stem 31. The design of multiple sliding holes 1a enables the valve body 4 to adapt to a variety of different installation angles and working environments, including inclined or vertical installation.

[0049] The present utility model also provides a vacuum valve 200, which includes a housing and a driving assembly 100. The specific structure of the driving assembly 100 refers to the above-mentioned embodiments. Since this vacuum valve 200 adopts all the technical solutions of the above-mentioned embodiments, it has at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be elaborated one by one here. Among them, a vacuum chamber is formed inside the housing, and valve openings communicating with the vacuum chamber are provided on two opposite side walls of the housing; the driving assembly 100 is used to drive the valve body 4 to block the valve openings.

[0050] In this embodiment, a vacuum chamber is formed inside the housing, and valve openings communicating with the vacuum chamber are provided on two opposite side walls thereof. The driving assembly 100, including a valve rod 31, a fixed seat 32, a driving member 2, etc., is designed to drive the valve body 4 to perform precise movements to achieve dynamic blocking of the valve openings. The configuration of the driving assembly 100 allows the valve body 4 to perform reliable opening and closing actions when receiving a control signal, such as pneumatic or electric operation, so as to control the gas flowing in and out of the vacuum chamber inside the housing. This design not only ensures the high-efficiency sealing performance of the valve, but also provides operation flexibility and maintenance convenience, meeting the strict requirements for precise control and reliability in the vacuum system.

[0051] The above description is only an exemplary embodiment of the present utility model, and does not limit the patent scope of the present utility model accordingly. Any equivalent structural transformation made under the technical concept of the present utility model by using the content of the specification and drawings of the present utility model, or any direct / indirect application in other related technical fields is included in the patent protection scope of the present utility model.

Claims

1. A drive assembly, characterized in that: include: A base (1), wherein a sliding hole (1a) is provided on the base (1); A driving member (2), wherein the driving member (2) is connected to the base (1); A transmission assembly (3), the transmission assembly (3) comprising a valve stem (31) and a fixed seat (32); the valve stem (31) is slidably connected to the fixed seat (32), the valve stem (31) is inserted into the sliding hole (1a), the valve stem (31) is connected to the driving end of the driving member (2), the fixed seat (32) is connected to the base (1), and the fixed seat (32) is located at the periphery of the sliding hole (1a); as well as a valve body (4), the valve body (4) being connected to the valve stem (31), the valve body (4) being located on a side of the base (1) facing away from the driving member (2); The driving member (2) is capable of driving the valve stem (31) to move along the axial direction of the valve stem (31) so as to move the valve body (4) closer to or farther away from the base (1).

2. The drive assembly according to claim 1, characterized in that The transmission assembly (3) further comprises a sealing tube (33), the two ends of which are respectively connected to the fixing seat (32) and the valve body (4), and the sealing tube (33) is located between the valve body (4) and the fixing seat (32).

3. The drive assembly according to claim 2, characterized in that: The transmission assembly (3) further comprises a connecting rod (34), wherein the connecting rod (34) connects the driving end of the driving member (2) and the valve stem (31), and the connecting rod (34) is located at an end of the valve stem (31) away from the valve body (4).

4. The drive assembly according to claim 3, characterized in that: The driving assembly further comprises a telescopic rod (5), the two ends of which are respectively connected to the connecting rod (34) and the base (1), and the telescopic rod (5) is located between the connecting rod (34) and the base (1).

5. The drive assembly according to claim 2, characterized in that: The transmission assembly (3) further comprises a bearing (35), wherein the bearing (35) is sleeved on the valve stem (31), the bearing (35) is detachably connected to the fixing seat (32), and the bearing (35) is located on a side of the sealing tube (33) away from the valve body (4).

6. The drive assembly according to claim 1, characterized in that: The transmission assembly (3) further comprises an air pipe (36), the valve stem (31) is provided with a wire-passing channel (31a), the air pipe (36) is located in the wire-passing channel (31a), and the air pipe (36) is used to adjust the air pressure in the valve body (4).

7. The drive assembly according to claim 6, characterized in that The valve body (4) further comprises a connecting seat (41), the connecting seat (41) being connected to the valve body (4), the valve stem (31) being detachably connected to the connecting seat (41), and the connecting seat (41) being located at one end of the valve body (4) close to the base (1).

8. The drive assembly according to claim 7, characterized in that The valve body (4) further comprises a first circuit connector (42) and a second circuit connector (43), wherein the first circuit connector (42) and the second circuit connector (43) are plugged into each other, the first circuit connector (42) is located in the wire passage (31a), and the second circuit connector (43) is located in the valve body (4), and the first circuit connector (42) and the second circuit connector (43) are used to connect the valve body (4) and the wires in the wire passage (31a) in series.

9. The drive assembly according to any one of claims 1 to 8, characterized in that: At least one sliding hole (1a) is provided on the base (1), and the driving assembly comprises at least one valve stem (31) and at least one fixed seat (32), each of the valve stems (31) is slidably connected to the fixed seat (32), and each of the valve stems (31) is inserted into one of the sliding holes (1a).

10. A vacuum gate valve, characterized in that: include: A housing, wherein a vacuum cavity is formed in the housing, and valve openings communicating with the vacuum cavity are formed on two opposite side walls of the housing; and The drive assembly according to any one of claims 1 to 9, wherein the drive assembly is used to drive the valve body (4) to cover the valve opening.

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