Corrugated pipe of single crystal furnace

Abstract

The utility model discloses a single crystal furnace corrugated pipe which comprises a lower flange, the side outer wall of the lower flange is connected with the outer wall of a first middle flange through a first corrugated pipe, and the side outer wall, far away from the first corrugated pipe, of the first middle flange is connected with the outer wall of a second middle flange through a second corrugated pipe. The outer wall of the side, away from the second corrugated pipe, of the second middle flange is connected with the outer wall of a third middle flange through a third corrugated pipe, and the outer wall of the side, away from the third corrugated pipe, of the third middle flange is connected with the outer wall of a fourth middle flange through a fourth corrugated pipe. The outer wall of the side, away from the fourth corrugated pipe, of the fourth middle flange is connected with the outer wall of the upper flange through a fifth corrugated pipe, and guide sleeves are fixedly arranged on the inner walls of the upper sides and the lower sides of the first middle flange, the second middle flange, the third middle flange, the fourth middle flange and the upper flange. According to the single crystal furnace corrugated pipe, the limiting effect is enhanced, so that the normal use of a pipeline is prevented from being influenced by distortion and deviation when the single crystal furnace corrugated pipe works.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace pipelines, and particularly relates to a bellows for a single crystal furnace. Background Art

[0002] A single crystal furnace is a device for preparing single crystal materials, which is commonly used in the semiconductor industry, optoelectronic industry, etc. The bellows for a single crystal furnace is an important part of the single crystal furnace. Its main function is to provide a place for gas flow and also has the effect of heat transfer. Therefore, the bellows for a single crystal furnace is usually made of materials with high temperature resistance, high pressure resistance and good sealing performance.

[0003] However, the following problems exist when the existing bellows for a single crystal furnace is in use:

[0004] Since the stroke of the bellows for a single crystal furnace is relatively long, in order to prevent the bellows for a single crystal furnace from being distorted and displaced when deformed due to the internal pressure of the bellows for a single crystal furnace, it is necessary to limit the position of the bellows for a single crystal furnace. However, the existing position limiting effect of the bellows for a single crystal furnace is insufficient, which easily leads to distortion and displacement of the bellows for a single crystal furnace during operation and affects the normal use of the pipeline.

[0005] In view of the above problems, it is urgent to innovate and design on the basis of the original bellows for a single crystal furnace. Content of the Utility Model

[0006] The purpose of the utility model is to provide a bellows for a single crystal furnace to solve the problem that the existing position limiting effect of the bellows for a single crystal furnace is insufficient, which easily leads to distortion and displacement of the bellows for a single crystal furnace during operation and affects the normal use of the pipeline as mentioned in the above background art.

[0007] To achieve the above purpose, the utility model provides the following technical scheme: A bellows for a single crystal furnace, including a lower flange, the outer wall of the side of the lower flange is connected to the outer wall of a first middle flange through a first bellows, the outer wall of the side of the first middle flange away from the first bellows is connected to the outer wall of a second middle flange through a second bellows, the outer wall of the side of the second middle flange away from the second bellows is connected to the outer wall of a third middle flange through a third bellows, the outer wall of the side of the third middle flange away from the third bellows is connected to the outer wall of a fourth middle flange through a fourth bellows, the outer wall of the side of the fourth middle flange away from the fourth bellows is connected to the outer wall of an upper flange through a fifth bellows, and guide sleeves are fixedly arranged on the inner walls of the upper and lower sides of the first middle flange, the second middle flange, the third middle flange, the fourth middle flange and the upper flange.

[0008] Preferably, guide rods are respectively installed on the inner walls of the upper and lower sides of the lower flange, nuts are sleeved on the outer walls of one ends of the guide rods, and retaining rings are fixedly arranged on the outer walls of the other ends of the guide rods.

[0009] Preferably, the guide rods are respectively threadedly connected to the lower flange and the nut, and the nut and the lower flange are in contact with each other.

[0010] Preferably, the guide rod and the guide sleeve form a sliding structure.

[0011] Preferably, a first limiting rod is fixedly connected to the outer wall of the lower flange on the side of the first bellows, and a first limiting cap is threadedly connected to the outer wall of the end of the first limiting rod. Moreover, a second limiting rod is fixedly installed on the outer wall of the first middle flange below the first limiting rod, and a second limiting cap is threadedly installed on the outer wall of the end of the second limiting rod.

[0012] Preferably, the first limiting rod is slidably connected to the first middle flange, and the second limiting rod is slidably arranged with the second middle flange.

[0013] Preferably, a third limiting rod is fixedly installed on the outer wall of the second middle flange on the side of the third bellows, and a third limiting cap is threadedly arranged on the outer wall of the end of the third limiting rod. The inner wall of the third middle flange below the third limiting rod is movably connected with a movable limiting rod, and left and right limiting caps are respectively threadedly installed on the outer walls of both ends of the movable limiting rod.

[0014] Preferably, the third limiting rod is slidably connected to the third middle flange, and the movable limiting rod is slidably arranged with the third middle flange and the fourth middle flange respectively.

[0015] Compared with the prior art, the beneficial effect of the present utility model is that the bellows of the single crystal furnace strengthens the limiting effect, thereby avoiding the distortion and deviation of the bellows of the single crystal furnace during operation, which affects the normal use of the pipeline;

[0016] The deformed bellows of the single crystal furnace during operation is guided by the guide sleeve sliding along the guide rod, so that the bellows of the single crystal furnace moves along the axial direction of the guide rod. At the same time, the bellows of the single crystal furnace is limited by the first limiting cap, the second limiting cap, the third limiting cap, the left limiting cap and the right limiting cap, avoiding excessive deformation of the bellows of the single crystal furnace. Therefore, the device strengthens the limiting effect and avoids the distortion and deviation of the bellows of the single crystal furnace during operation, which affects the normal use of the pipeline. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic front sectional structure diagram of the present utility model;

[0018] Figure 2 is a schematic front sectional structure diagram of the first limiting rod of the present utility model;

[0019] Figure 3 is a schematic sectional view structure diagram of the movable limiting rod of the present utility model;

[0020] Figure 4 is a schematic partial side view structure diagram of the first middle flange of the present utility model;

[0021] Figure 5 This is a schematic side view of a partial structure of the flange three in the present utility model.

[0022] In the figure: 1. Lower flange; 2. First bellows; 3. First middle flange; 4. Second bellows; 5. Second middle flange; 6. Third bellows; 7. Third middle flange; 8. Fourth bellows; 9. Fourth middle flange; 10. Fifth bellows; 11. Upper flange; 12. Guide rod; 13. Nut; 14. Retaining ring; 15. Guide sleeve; 16. First limiting rod; 17. First limiting cap; 18. Second limiting rod; 19. Second limiting cap; 20. Third limiting rod; 21. Third limiting cap; 22. Movable limiting rod; 23. Left limiting cap; 24. Right limiting cap. Specific embodiments

[0023] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0024] Please refer to Figures 1-5 , the present utility model provides a technical solution: a single crystal furnace bellows, including a lower flange 1, a first bellows 2, a first middle flange 3, a second bellows 4, a second middle flange 5, a third bellows 6, a third middle flange 7, a fourth bellows 8, a fourth middle flange 9, a fifth bellows 10, an upper flange 11, a guide rod 12, a nut 13, a retaining ring 14, a guide sleeve 15, a first limiting rod 16, a first limiting cap 17, a second limiting rod 18, a second limiting cap 19, a third limiting rod 20, a third limiting cap 21, a movable limiting rod 22, a left limiting cap 23 and a right limiting cap 24. The outer wall of the side of the lower flange 1 is connected to the outer wall of the first middle flange 3 through the first bellows 2. The outer wall of the side of the first middle flange 3 away from the first bellows 2 is connected to the outer wall of the second middle flange 5 through the second bellows 4. The outer wall of the side of the second middle flange 5 away from the second bellows 4 is connected to the outer wall of the third middle flange 7 through the third bellows 6. The outer wall of the side of the third middle flange 7 away from the third bellows 6 is connected to the outer wall of the fourth middle flange 9 through the fourth bellows 8. The outer wall of the side of the fourth middle flange 9 away from the fourth bellows 8 is connected to the outer wall of the upper flange 11 through the fifth bellows 10. Guide sleeves 15 are fixedly arranged on the inner walls of the upper and lower sides of the first middle flange 3, the second middle flange 5, the third middle flange 7, the fourth middle flange 9 and the upper flange 11.

[0025] On the upper and lower inner walls of the lower flange 1, guide rods 12 are respectively installed. A nut 13 is sleeved on the outer wall of one end of the guide rod 12, and a retaining ring 14 is fixedly arranged on the outer wall of the other end of the guide rod 12, facilitating the guiding of the single crystal furnace bellows through the guide rod 12 and preventing the single crystal furnace bellows from deflecting.

[0026] The guide rods 12 are respectively threadedly connected to the lower flange 1 and the nut 13, and the nut 13 is in contact with the lower flange 1, facilitating the user to rotate the guide rod 12 for the disassembly and assembly of the guide rod 12 and improving the installation stability of the guide rod 12 through the nut 13.

[0027] The guide rod 12 and the guide sleeve 15 form a sliding structure, facilitating the movement of the flange driven by the deformation of the bellows, enabling the guide sleeve 15 to slide along the guide rod 12, and thus enabling the stable deformation of the single crystal furnace bellows.

[0028] On the outer wall of the lower flange 1 on the side of the first bellows 2, a first limiting rod 16 is fixedly connected. A first limiting cap 17 is threadedly connected to the outer wall of the end of the first limiting rod 16. On the outer wall of the middle flange 1-3 below the first limiting rod 16, a second limiting rod 18 is fixedly installed. A second limiting cap 19 is threadedly installed on the outer wall of the end of the second limiting rod 18, facilitating the limiting of the deformed bellows and preventing the bellows from excessive deformation.

[0029] The first limiting rod 16 is slidably connected to the middle flange 1-3, and the second limiting rod 18 is slidably arranged with the middle flange 2-5. When the first bellows 2 deforms, the first bellows 2 drives the middle flange 1-3 to slide relative to the first limiting rod 16. When the second bellows 4 deforms, the second bellows 4 pushes the middle flange 2-5 to slide relative to the second limiting rod 18.

[0030] On the outer wall of the middle flange 2-5 on the side of the third bellows 6, a third limiting rod 20 is fixedly installed. A third limiting cap 21 is threadedly arranged on the outer wall of the end of the third limiting rod 20. An active limiting rod 22 is movably connected to the inner wall of the middle flange 3-7 below the third limiting rod 20. Left limiting caps 23 and right limiting caps 24 are respectively threadedly installed on the outer walls of both ends of the active limiting rod 22, facilitating the limiting of the bellows and enabling the bellows to work stably.

[0031] The third limiting rod 20 is slidably connected to the middle flange 3-7, and the active limiting rod 22 is slidably arranged with the middle flange 3-7 and the middle flange 4-9 respectively. When the third bellows 6 deforms, it is facilitated to push the middle flange 3-7 to slide relative to the third limiting rod 20, and when the device deforms, it is facilitated for the middle flange 3-7 and the middle flange 4-9 to slide relative to the active limiting rod 22.

[0032] Working principle: When using this single crystal furnace bellows, first, as Figures 1-5As shown, the user connects the lower flange 1 and the upper flange 11 to the single crystal furnace. When the device works, the first bellows 2, the second bellows 4, the third bellows 6, the fourth bellows 8 and the fifth bellows 10 deform simultaneously. At this time, the first middle flange 3, the second middle flange 5, the third middle flange 7, the fourth middle flange 9 and the upper flange 11 drive the guide sleeve 15 to slide along the guide rod 12, so as to guide and limit the deformed device. Therefore, the device strengthens the limiting effect, avoids the distortion and deviation of the single crystal furnace bellows during operation, which affects the normal use of the pipeline. At the same time, the first middle flange 3 slides relative to the first limiting rod 16, the second middle flange 5 slides relative to the second limiting rod 18, the third middle flange 7 slides relative to the third limiting rod 20, and the third middle flange 7 and the fourth middle flange 9 are relative to the movable limiting rod 22, so as to further improve the stability of the bellows deformation. Then, the first limiting cap 17, the second limiting cap 19, the third limiting cap 21, the left limiting cap 23 and the right limiting cap 24 limit the flange, so as to avoid the excessive deformation of the bellows affecting the use stability of the bellows.

[0033] Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A single crystal furnace bellows, comprising a lower flange (1), characterized in that: The side outer wall of the lower flange (1) is connected to the outer wall of the middle flange one (3) through the first bellows (2); the side outer wall of the middle flange one (3) away from the first bellows (2) is connected to the outer wall of the middle flange two (5) through the second bellows (4); the side outer wall of the middle flange two (5) away from the second bellows (4) is connected to the outer wall of the middle flange three (7) through the third bellows (6); the side outer wall of the middle flange three (7) away from the third bellows (6) is connected to the outer wall of the middle flange four (9) through the fourth bellows (8); the side outer wall of the middle flange four (9) away from the fourth bellows (8) is connected to the outer wall of the upper flange (11) through the fifth bellows (10); and the upper and lower inner walls of the middle flange one (3), the middle flange two (5), the middle flange three (7), the middle flange four (9) and the upper flange (11) are all fixedly provided with guide sleeves (15).

2. The single crystal furnace bellows according to claim 1, characterized in that: Guide rods (12) are respectively installed on the upper and lower inner walls of the lower flange (1), and a nut (13) is sleeved on the outer wall of one end of the guide rod (12), and a retaining ring (14) is fixedly arranged on the outer wall of the other end of the guide rod (12).

3. The single crystal furnace bellows according to claim 2, characterized in that: The guide rod (12) is threadedly connected to the lower flange (1) and the nut (13) respectively, and the nut (13) and the lower flange (1) are in close contact.

4. The single crystal furnace bellows according to claim 2, characterized in that: The guide rod (12) and the guide sleeve (15) form a sliding structure.

5. The single crystal furnace bellows according to claim 1, characterized in that: A first limiting rod (16) is fixedly connected to the outer wall of the lower flange (1) on the side of the first corrugated pipe (2), and a first limiting cap (17) is threadedly connected to the outer wall of the end of the first limiting rod (16), and a second limiting rod (18) is fixedly installed on the outer wall of the middle flange (3) below the first limiting rod (16), and a second limiting cap (19) is threadedly installed on the outer wall of the end of the second limiting rod (18).

6. The single crystal furnace bellows according to claim 5, characterized in that: The first limiting rod (16) and the middle flange 1 (3) are slidably connected, and the second limiting rod (18) and the middle flange 2 (5) are slidably arranged.

7. The single crystal furnace bellows according to claim 1, characterized in that: A third limiting rod (20) is fixedly mounted on the outer wall of the middle flange 2 (5) on the side of the third bellows (6), and a third limiting cap (21) is threadedly mounted on the outer wall of the end of the third limiting rod (20); a movable limiting rod (22) is movably connected to the inner wall of the middle flange 3 (7) below the third limiting rod (20), and a left limiting cap (23) and a right limiting cap (24) are respectively threadedly mounted on the outer walls at both ends of the movable limiting rod (22).

8. The single crystal furnace bellows according to claim 7, characterized in that: The third limiting rod (20) is slidably connected to the middle flange three (7), and the movable limiting rod (22) is slidably arranged with the middle flange three (7) and the middle flange four (9) respectively.

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