Quartz boat size detection device

Abstract

The utility model discloses a quartz boat size detection device, which comprises a rack, a positioning mechanism and an image acquisition mechanism, the positioning mechanism and the image acquisition mechanism are arranged on the rack, the image acquisition mechanism comprises a camera arranged on one side of the positioning mechanism and a light source arranged on the other side of the positioning mechanism, and a quartz boat is positioned between the camera and the light source; the positioning mechanism comprises a sensor, the sensor is electrically connected with the camera, and the positioning mechanism is used for placing the quartz boat and triggering the image acquisition mechanism to perform image acquisition on the quartz boat through the sensor. According to the quartz boat size detection device, the positioning mechanism and the image acquisition mechanism are arranged, and after the quartz boat is placed on the positioning mechanism and positioned accurately, the sensor is triggered, so that the image acquisition mechanism is triggered to photograph the quartz boat, and a measurement result is obtained. The detection device provided by the utility model is convenient to use, and can monitor whether the quartz boat deforms by detecting the size of the quartz boat, so as to reduce the occurrence of clamping and fragmentation of silicon wafers.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer manufacturing, and particularly relates to a quartz boat size detection device. Background Art

[0002] In the boron diffusion process section of the Topcon process, the temperature of the process machine reaches 1050 degrees Celsius. The quartz boat is prone to deformation in this temperature zone for a long time, resulting in easy carding and fragmentation of the quartz boat during the automatic loading and unloading of wafers. Once the quartz boat is deformed, its size value will be affected. By detecting and monitoring the size of the quartz boat, it can be judged whether the quartz boat is deformed. Therefore, in order to reduce the occurrence of carding and fragmentation, it is necessary to design a device that can detect the size of the quartz boat to regularly take out the quartz boat from the production line and detect it on this detection device. Summary of the Utility Model

[0003] In view of this, in order to overcome the defects of the prior art, the purpose of the utility model is to provide a quartz boat size detection device, which is convenient to use and has reliable detection results, helps to timely detect the deformed quartz boat, and reduces the carding and fragmentation of wafers caused by the deformation of the quartz boat.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A quartz boat size detection device includes a frame, a positioning mechanism and an image acquisition mechanism arranged on the frame. The image acquisition mechanism includes a camera arranged on one side of the positioning mechanism and a light source arranged on the other side of the positioning mechanism. The quartz boat is located between the camera and the light source. The positioning mechanism includes a sensor, and the sensor is electrically connected to the camera. The positioning mechanism is used to place the quartz boat and trigger the image acquisition mechanism to collect images of the quartz boat through the sensor.

[0006] According to some preferred embodiments of the utility model, there are two cameras. One camera is close to the upper slot rod of the quartz boat, and the other camera is close to the lower slot rod of the quartz boat. There are also two light sources, and the cameras and the light sources are arranged in one-to-one correspondence. In some embodiments of the utility model, the light source is set as a surface light source to serve as a backlight source.

[0007] According to some preferred embodiments of the utility model, the image acquisition mechanism further includes two symmetrically arranged brackets. Two cameras are connected to one bracket, and two light sources are connected to the other bracket. The center of the lens of one camera and the center of the corresponding light source are on the same horizontal line. In some embodiments of the utility model, the distance between the two brackets is adjustable, and the installation positions of the two brackets on the frame can be adjusted accordingly according to the width of the quartz boat.

[0008] According to some preferred embodiments of the present utility model, the positioning mechanism further includes a first resisting portion, two symmetrically arranged cushion portions, and a second resisting portion provided at one end of each of the cushion portions. One end of the quartz boat contacts the first resisting portion, and both ends of the quartz boat are respectively located on the two cushion portions.

[0009] According to some preferred embodiments of the present utility model, the positioning mechanism further includes a first fixing plate and a second fixing plate, and both the first fixing plate and the second fixing plate are provided on the top surface of the frame.

[0010] According to some preferred embodiments of the present utility model, the first resisting portion and one of the cushion portions are fixedly provided on the first fixing plate, and the other cushion portion is fixedly provided on the second fixing plate; the first resisting portion is close to one of the cushion portions, and one of the cushion portions is located between the first resisting portion and the other cushion portion. In some embodiments of the present utility model, the distance between the second fixing plate and the first fixing plate is adjustable, and can be achieved by changing the installation position of the second fixing plate on the frame.

[0011] According to some preferred embodiments of the present utility model, the two second resisting portions are respectively provided on the first fixing plate and the second fixing plate, and each second resisting portion includes two supporting blocks and a blocking block located between the two supporting blocks. The sensor is fixedly provided on the top of one of the blocking blocks. In some embodiments of the present utility model, the distance between the blocking block and the corresponding cushion portion is also adjustable, and can be achieved by changing the installation position of the blocking block on the first fixing plate and the second fixing plate.

[0012] According to some preferred embodiments of the present utility model, the blocking block includes a blocking block body and extension blocks located on both sides of the bottom of the blocking block body. The blocking block body is perpendicular to the first fixing plate and / or the second fixing plate, and the distance between the two extension blocks is equal to the distance between the two supporting blocks.

[0013] According to some preferred embodiments of the present utility model, the height of the supporting block is less than the height of the cushion portion, the distance from the side of the extension block close to the cushion portion to the cushion portion is less than the distance from the side of the blocking block body far from the cushion portion to the cushion portion, and a first cushion block is fixedly provided between the two extension blocks. One side of the quartz boat contacts the first cushion block.

[0014] According to some preferred embodiments of the present utility model, the sensor includes an extension rod, the extension rod has a signal end, and the horizontal distance from the signal end to the cushion portion is greater than the horizontal distance from the first cushion block to the cushion portion.

[0015] Due to the above technical solution, compared with the prior art, a quartz boat size detection device of the present utility model, by setting a positioning mechanism and an image acquisition mechanism, after placing the quartz boat on the positioning mechanism and accurately positioning it, it will trigger a sensor electrically connected to the image acquisition mechanism, thereby triggering the image acquisition mechanism to take a picture of the quartz boat and obtaining a measurement result. The detection device of the present utility model is convenient to use and can monitor whether the quartz boat is deformed by detecting the size of the quartz boat, so as to reduce the occurrence of silicon wafer jamming and fragmentation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0017] Figure 1 FIG. is a three-dimensional structural diagram of a quartz boat installed on a quartz boat size detection device in a preferred embodiment of the present utility model;

[0018] Figure 2 FIG. is a three-dimensional structural diagram of a quartz boat size detection device in a preferred embodiment of the present utility model;

[0019] Figure 3 is Figure 2 a partial enlarged structural diagram of part A in;

[0020] Wherein, the reference numerals are:

[0021] frame - 1, first mounting hole - 11, third mounting hole - 12, positioning mechanism - 2, first resisting part - 21, second cushion block - 211, cushion block part - 22, third cushion block - 221, support block - 231, stop block body - 232, extension block - 233, first cushion block - 234, first fixing plate - 24, second fixing plate - 25, sensor - 26, extension rod - 261, signal end - 262, second mounting hole - 27, image acquisition mechanism - 3, camera - 31, light source - 32, bracket - 33, first mounting plate - 34, second mounting plate - 35, control panel - 4, quartz boat - 5. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] To enable those skilled in the art to better understand the solution of the present utility model, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0023] Referring to Figures 1 to 3 , a quartz boat size detection device according to this embodiment is used to detect the size of the quartz boat 5. It includes a frame 1, a positioning mechanism 2 arranged on the frame 1, an image acquisition mechanism 3 and a control panel 4. The quartz boat 5 is placed on the positioning mechanism 2. The image acquisition mechanism 3 is used to acquire an image of the quartz boat 5. The control panel 4 is electrically connected to the image acquisition mechanism 3, so that the image of the quartz boat 5 acquired by the image acquisition mechanism 3 can be transmitted to the control panel 4, thereby obtaining the size information of the quartz boat 5.

[0024] Further, the positioning mechanism 2 includes a first blocking portion 21, two symmetrically arranged cushion portions 22, a second blocking portion arranged at one end of each cushion portion 22, a first fixing plate 24 and a second fixing plate 25. The first fixing plate 24 and the second fixing plate 25 are both arranged on the top surface of the frame 1. Among them, a plurality of first mounting holes 11 are evenly spaced along the width direction of the second fixing plate 25 on the top of the frame 1. Bolts pass through the second fixing plate 25 and the first mounting holes 11 to install the second fixing plate 25 on the top of the frame 1. The provision of a plurality of first mounting holes 11 facilitates adjusting the distance between the first fixing plate 24 and the second fixing plate 25 according to the size of the quartz boat 5, so that the device can be compatible with quartz boats 5 of more sizes.

[0025] Specifically, the first blocking portion 21 and one of the cushion portions 22 are fixedly arranged on the first fixing plate 24, and the other cushion portion 22 is fixedly arranged on the second fixing plate 25. The first blocking portion 21 is close to one of the cushion portions 22 and one cushion portion 22 is located between the first blocking portion 21 and the other cushion portion 22. One end of the quartz boat 5 contacts the first blocking portion 21, and both ends of the quartz boat 5 are respectively located on the two cushion portions 22. A second cushion 211 is fixedly arranged on the side of the first blocking portion 21 close to the quartz boat 5, and a third cushion 221 is fixedly arranged on the top surface of each cushion portion 22. The second cushion 211 contacts one end of the quartz boat 5, and the third cushion 221 contacts the bottom surface of the quartz boat 5. The provision of the second cushion 211 and the third cushion 221 can ensure better contact between the quartz boat 5 and the positioning mechanism 2 and reduce the wear of the contact on the quartz boat 5.

[0026] The two second blocking parts are respectively arranged at the ends of the first fixing plate 24 and the second fixing plate 25. Each second blocking part includes two support blocks 231 and a blocking block located between the two support blocks 231. The blocking block is perpendicular to the first fixing plate 24 and the second fixing plate 25, and the support blocks 231 are parallel to the first fixing plate 24 and the second fixing plate 25; the length of the support block 231 is greater than the width of the blocking block, and the end of the support block 231 away from the cushion block part 22 is flush with the side of the blocking block away from the cushion block part 22. In this embodiment, the second fixing plate 25 is provided with a plurality of second mounting holes 27 evenly spaced along its length direction. Bolts pass through the blocking block and the second mounting holes 27 to mount the blocking block on the second fixing plate 25. The provision of a plurality of second mounting holes 27 facilitates adjusting the distance between the blocking block and the side of the quartz boat 5 according to the size of the quartz boat 5, so that the device can be compatible with quartz boats 5 of more sizes. Specifically, the blocking block includes a blocking block body 232 and extension blocks 233 located on both sides of the bottom of the blocking block body 232. The distance between the two extension blocks 233 is equal to the distance between the two support blocks 231. The height of the support block 231 is less than the height of the cushion block part 22 to ensure that the quartz boat 5 can contact the cushion block part 22 when it is located on the positioning mechanism 2. The distance from the side of the extension block 233 close to the cushion block part 22 to the cushion block part 22 is less than the distance from the side of the blocking block body 232 away from the cushion block part 22 to the cushion block part 22, so that a first cushion block 234 can be fixedly arranged in the gap between the two extension blocks 233. The first cushion block 234 is used to contact one side of the quartz boat 5 to ensure that the quartz boat 5 is placed in place when it is placed on the positioning mechanism 2.

[0027] In addition, the positioning mechanism 2 further includes a sensor 26. The sensor 26 is arranged on the top of the blocking block body 232 of one of the second blocking parts. The sensor 26 includes an extension rod 261. The extension rod 261 has a signal end 262, and the horizontal distance from the signal end 262 to the corresponding cushion block part 22 is greater than the horizontal distance from the first cushion block 234 to the corresponding cushion block part 22, ensuring that when the quartz boat 5 is placed in place on the positioning mechanism 2, it will squeeze the signal end 262 to trigger the signal of being placed in place.

[0028] Furthermore, the image acquisition mechanism 3 includes two symmetrically arranged brackets 33, a camera 31 disposed on one side of the positioning mechanism 2, and a light source 32 disposed on the other side of the positioning mechanism 2. In this embodiment, there are two cameras 31 and two light sources 32, and the quartz boat 5 is located between the camera 31 and the light source 32. Among them, two first mounting plates 34 are fixedly arranged on one bracket 33, and the first mounting plates 34 are used to mount the camera 31. One camera 31 is close to the upper slot rod of the quartz boat 5, and the other camera 31 is close to the lower slot rod of the quartz boat 5; two second mounting plates 35 are fixedly arranged on the other bracket 33, and the second mounting plates 35 are used to mount the light source 32. The light source 32 in this embodiment is set as a surface light source 32 for use as a backlight 32. The cameras 31 and the light sources 32 are arranged in one-to-one correspondence. The center of the lens of one camera 31 and the center of the corresponding one light source 32 are located on the same horizontal line. Both cameras 31 are electrically connected to the sensor 26, so that after the quartz boat 5 is placed in place and triggers the signal end 262 of the sensor 26, the sensor 26 can further trigger the camera 31 of the image acquisition mechanism 3 to perform image acquisition on the quartz boat 5.

[0029] A plurality of third mounting holes 12 are provided at the top of the frame 1 corresponding to the two brackets 33 along the length direction of the first fixing plate 24. Bolts passing through the bottom of the bracket 33 and the third mounting holes 12 can mount the bracket 33 on the top of the frame 1. Providing a plurality of third mounting holes 12 facilitates adjusting the distance between the two brackets 33 according to the size of the quartz boat 5, so that the device can be compatible with quartz boats 5 of more sizes.

[0030] When detecting the size of the quartz boat 5 in the quartz boat size detection device of this embodiment, after the quartz boat 5 is placed in place on the positioning mechanism 2, the quartz boat 5 will squeeze the signal end 262 to trigger the signal end 262 of the sensor 26 to transmit the in-place signal to the camera 31. The camera 31 will take a picture of the quartz boat 5. Based on the taken picture, with the end face where the quartz boat 5 contacts the first resisting portion 21 as the reference plane, it is necessary to measure the distance from the teeth of the upper slot rod on the reference plane side of the quartz boat 5 to the reference plane and the distance from the teeth of the lower slot rod to the reference plane. Whether the quartz boat 5 is deformed is judged according to whether these distances change.

[0031] The above embodiments are only used to illustrate the technical concept and characteristics of the present invention. The purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it accordingly, and it cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A quartz boat size detection device, characterized in that: The invention comprises a frame, a positioning mechanism and an image acquisition mechanism arranged on the frame, wherein the image acquisition mechanism comprises a camera arranged on one side of the positioning mechanism and a light source arranged on the other side of the positioning mechanism, and the quartz boat is located between the camera and the light source; the positioning mechanism comprises a sensor, and the sensor is electrically connected to the camera; the positioning mechanism is used to place the quartz boat and trigger the image acquisition mechanism through the sensor to acquire images of the quartz boat.

2. The quartz boat size detection device according to claim 1, characterized in that: There are two cameras, one of which is close to the upper groove rod of the quartz boat, and the other is close to the lower groove rod of the quartz boat; there are also two light sources, and the cameras are arranged in one-to-one correspondence with the light sources.

3. The quartz boat size detection device according to claim 2, characterized in that: The image acquisition mechanism also includes two symmetrically arranged brackets, the two cameras are connected to one bracket, the two light sources are connected to the other bracket, and the center of the lens of one camera and the center of the corresponding light source are located on the same horizontal line.

4. The quartz boat size detection device according to claim 1, characterized in that: The positioning mechanism further includes a first stopper, two symmetrically arranged pad blocks and a second stopper arranged at one end of each pad block. One end of the quartz boat contacts the first stopper, and both ends of the quartz boat are respectively located on the two pad blocks.

5. The quartz boat size detection device according to claim 4, characterized in that: The positioning mechanism further includes a first fixing plate and a second fixing plate, and the first fixing plate and the second fixing plate are both arranged on the top surface of the frame.

6. The quartz boat size detection device according to claim 5, characterized in that: The first retaining portion and one of the pad blocks are fixedly arranged on the first fixing plate, and the other of the pad blocks is fixedly arranged on the second fixing plate; the first retaining portion is close to one of the pad blocks and one of the pad blocks is located between the first retaining portion and the other of the pad blocks.

7. The quartz boat size detection device according to claim 5, characterized in that: The two second blocking parts are respectively arranged on the first fixing plate and the second fixing plate, each of the second blocking parts comprises two supporting blocks and a blocking block located between the two supporting blocks, and the sensor is fixedly arranged on the top of one of the blocking blocks.

8. The quartz boat size detection device according to claim 7, characterized in that: The stopper includes a stopper body and extension blocks located at both sides of the bottom of the stopper body. The stopper body is perpendicular to the first fixing plate and / or the second fixing plate. The distance between the two extension blocks is equal to the distance between the two support blocks.

9. The quartz boat size detection device according to claim 8, characterized in that: The height of the support block is smaller than the height of the pad portion, the distance from the side of the extension block close to the pad portion to the pad portion is smaller than the distance from the side of the block body away from the pad portion to the pad portion, a first pad is fixedly arranged between the two extension blocks, and one side of the quartz boat is in contact with the first pad.

10. The quartz boat size detection device according to claim 9, characterized in that: The sensor comprises an extension rod having a signal end, and a horizontal distance from the signal end to the pad portion is greater than a horizontal distance from the first pad to the pad portion.

Images