Probe card horizontal measurement display device

Abstract

The utility model provides a horizontal measurement display device for a probe card. The horizontal measurement display device comprises a base, a probe card carrying table, a lifting table, a height measuring element, a light-emitting mechanism and a power supply, the probe card carrying platform is used for clamping a probe card; the lifting platform is installed on the base and located below the probe card, and the lifting platform can move up and down, so that the platform surface of the lifting platform is in contact with the probe on the probe card; the height measuring element is installed on the base and used for measuring the height value of the lifting table. The light-emitting mechanism is electrically connected with the probe card; the power source is electrically connected with the light-emitting mechanism and the lifting table. The device is simple in structure and low in manufacturing cost; when the lifting platform is in contact with the probes on the probe card, the power supply, the light-emitting mechanism, the lifting platform and the probe card form a loop, the light-emitting mechanism is lightened, and the height value of the lifting platform when each probe is in contact with the lifting platform is measured in sequence, so that the flatness of the probe card can be judged, the operation is simple and convenient, the detection cost is reduced, and the working efficiency is improved.

Description

Technical Field

[0001] This application belongs to the technical field of integrated circuit testing, and more specifically, it relates to a probe card horizontal measurement display device. Background Art

[0002] The electrical testing of integrated circuit chips (IC chips) is quite important in each stage of the semiconductor manufacturing process. Each IC chip must be tested in both wafer and package forms to ensure its electrical function. For example, in wafer testing, the tester is connected to the probe card through a cable, and then the test signal is sent to the chip to achieve the purpose of testing the quality of the chip. The probe card includes a probe surface and multiple probe pins arranged on the probe surface. The probes are used to detect each chip on the wafer, thereby outputting and receiving chip signals, and sending the chip signal data to the tester for analysis and judgment. In this way, chips with poor electrical properties and functions can be found in advance before the packaging step, thus saving the packaging manufacturing cost.

[0003] It can be seen that the probe card is a key tool for monitoring the yield of finished products, and thus is extremely important in the integrated circuit design and manufacturing process. The flatness of the probe card is an important indicator for detecting the quality of the probe card. Among them, the flatness of the probe card refers to the degree of neatness (or height difference) among the multiple probe pins in the probe card.

[0004] In the prior art, a special machine is required to detect the flatness of the probe card, and the price of this machine is very expensive. Based on this, how to detect the flatness of the probe card at a lower cost has become a technical problem that needs to be solved urgently by those skilled in the art. Summary of the Utility Model

[0005] The purpose of the embodiments of this application is to provide a probe card horizontal measurement display device to solve the technical problem of high detection cost of the flatness of the probe card existing in the prior art.

[0006] To achieve the above object, the technical solution adopted by this application is: to provide a probe card horizontal measurement display device, including a base, a probe card carrier, a lifting platform, a height measurement element, a light emitting mechanism and a power supply; the probe card carrier is used for clamping the probe card; the lifting platform is installed on the base and is located below the probe card, and the lifting platform can move up and down so that the tabletop of the lifting platform contacts the probes on the probe card; the height measurement element is installed on the base and is used for measuring the height value of the lifting platform; the light emitting mechanism is electrically connected to the probe card; the power supply is electrically connected to the light emitting mechanism and the lifting platform respectively. When the lifting platform contacts the probes on the probe card, the power supply, the light emitting mechanism, the lifting platform and the probe card form a circuit.

[0007] Optionally, the probe card carrier includes a support frame and a card seat. The bottom of the support frame is connected to the base, and the top of the support frame is connected to the card seat.

[0008] Optionally, the height measurement element includes a height scale and a pointer; the height scale is erected on the base and is close to the lifting platform; the pointer is installed on the side of the lifting platform and points to the scale on the height scale.

[0009] Optionally, the lifting platform includes a lifting driving member and a contact platform; one end of the lifting driving member is connected to the base, and the other end of the lifting driving member is connected to the contact platform.

[0010] Optionally, the light emitting mechanism includes a light emitting board and a wiring harness. One end of the wiring harness is connected to the light emitting board, and the other end of the wiring harness is connected to the probe card.

[0011] Optionally, multiple groups of light emitting elements are provided on the light emitting board. The light emitting elements include LED lights and wiring harness connectors connected to the LED lights, and the wiring harness connectors are connected to the wiring harness.

[0012] Optionally, the probe card horizontal measurement display device further includes a microscope and a display screen. The probe of the microscope is arranged towards the probe card and is used for detecting whether the probe card is in contact; the display screen is electrically connected to the microscope, and the display screen is used for magnifying and displaying the image collected by the probe of the microscope.

[0013] Optionally, the probe card horizontal measurement display device further includes a rotating mechanism. The rotating mechanism is installed on the base and is connected to the microscope. The rotating mechanism can drive the microscope to rotate so that the probe of the microscope faces the probe card or the pointer.

[0014] Optionally, the probe card horizontal measurement display device further includes a first translation device connected between the lifting platform and the base, and the first translation device is capable of driving the lifting platform to move horizontally.

[0015] Optionally, the probe card horizontal measurement display device further includes a second translation device connected between the probe card carrier and the base, and the second translation device is capable of driving the probe card carrier to move horizontally; and the moving directions of the first translation device and the first translation device are perpendicular to each other.

[0016] The beneficial effects of the probe card horizontal measurement display device provided by this application are as follows: Compared with the prior art, the probe card horizontal measurement display device of this application includes a base, a probe card carrier, a lifting platform, a height measurement element, a light-emitting mechanism, and a power supply, with a simple structure and low manufacturing cost; when the lifting platform contacts the probes on the probe card, the power supply, the light-emitting mechanism, the lifting platform, and the probe card form a circuit, and the light-emitting mechanism will be lit. When measuring the height value of the lifting platform when each probe contacts the lifting platform in turn, the flatness of the probe card can be judged, and the operation is simple and convenient, thus greatly reducing the detection cost of the flatness of the probe card and improving the work efficiency. Description of the Drawings

[0017] In order to more clearly illustrate the technical solutions in the embodiments of this application, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following drawings are only some embodiments of this application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 It is a schematic plan view of a probe card horizontal measurement display device provided by an embodiment of this application;

[0019] Figure 2 It is a schematic plan view of a probe card horizontal measurement display device (excluding the light-emitting mechanism) provided by an embodiment of this application;

[0020] Figure 3 It is a schematic plan view of the light-emitting mechanism in a probe card horizontal measurement display device provided by an embodiment of this application.

[0021] Among them, the reference numerals in the drawings are as follows:

[0022] 100 - Base;

[0023] 200 - Probe card;

[0024] 301 - Support frame; 302 - Clamping seat;

[0025] 401 - Lifting drive member; 402 - Contact platform;

[0026] 501 - Height gauge; 502 - Pointer;

[0027] 600 - Lighting mechanism;

[0028] 700 - Microscope;

[0029] 800 - Display screen. Detailed implementation manners

[0030] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application clearer and more understandable, the following further details this application in combination with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not used to limit this application.

[0031] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0032] It should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to this application.

[0033] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of this application, "a plurality of" means two or more, unless otherwise specifically defined.

[0034] Please refer to Figure 1 and Figure 2, the probe card horizontal measurement display device provided by the embodiments of the present application will be described. The probe card horizontal measurement display device includes a base 100, a probe card carrier, a lifting table, a height measurement element, a light emitting mechanism 600, and a power supply; the probe card carrier is used for clamping the probe card 200; the lifting table is installed on the base 100 and is located below the probe card 200, and the lifting table can move up and down so that the tabletop of the lifting table contacts the probes on the probe card 200; the height measurement element is installed on the base 100 and is used for measuring the height value of the lifting table; the light emitting mechanism 600 is electrically connected to the probe card 200; the power supply is electrically connected to the light emitting mechanism 600 and the lifting table respectively. When the lifting table contacts the probes on the probe card 200, the power supply, the light emitting mechanism 600, the lifting table, and the probe card 200 form a circuit.

[0035] Compared with the prior art, the probe card horizontal measurement display device provided by the embodiments of the present application includes a base 100, a probe card carrier, a lifting table, a height measurement element, a light emitting mechanism 600, and a power supply, with a simple structure and low manufacturing cost; when the lifting table contacts the probes on the probe card 200, the power supply, the light emitting mechanism 600, the lifting table, and the probe card 200 form a circuit, and the light emitting mechanism 600 will be lit. By measuring the height value of the lifting table when each probe contacts the lifting table in sequence, the flatness of the probe card 200 can be judged, with simple and convenient operation, thus greatly reducing the detection cost of the flatness of the probe card 200 and improving the work efficiency.

[0036] In an embodiment of the present application, please refer to Figure 1 and Figure 2 , the probe card carrier includes a support frame 301 and a card seat 302. The bottom of the support frame 301 is connected to the base 100, and the top of the support frame 301 is connected to the card seat 302.

[0037] Specifically, a precise clamping mechanism is designed inside the card seat 302 for stably fixing the probe card 200. The clamping mechanism is made of high-strength materials and is equipped with fine-tuning screws to ensure that the probe card 200 can be accurately and firmly positioned on the card seat 302. In addition, the clamping mechanism also has a quick release function, which is convenient for users to quickly replace or adjust the probe card 200 without damaging the probe card 200.

[0038] In an embodiment of the present application, please refer to Figure 1 and Figure 2 , the height measurement element includes a height scale 501 and a pointer 502; the height scale 501 is erected on the base 100 and is close to the lifting table; the pointer 502 is installed on the side of the lifting table and points to the scale on the height scale 501.

[0039] In this embodiment, the height value of the lifting platform is measured by using a height gauge 501 and a pointer 502, which is simple to operate, low in cost, and convenient to read.

[0040] In another embodiment of the present application, the probe card horizontal measurement display device also includes an automatic calibration system to further improve the accuracy and convenience of height measurement. The automatic calibration system includes a high-precision laser rangefinder and a controller. The laser rangefinder is installed in a corner of the base 100, and the laser beam it emits can accurately point to a specific position of the lifting platform. The controller is responsible for receiving the distance data sent by the laser rangefinder, and comparing and calibrating it with the readings of the height ruler 501 and the pointer 502.

[0041] When the lifting platform is lifting, the laser rangefinder measures the distance from the lifting platform to the base 100 in real time and sends the distance data to the controller. A calibration algorithm is preset inside the controller, which can calculate the correction value of the height gauge 501 and the pointer 502 readings based on the data of the laser rangefinder. Then, the controller sends the correction value to the control system of the lifting platform through wireless transmission, and the control system calibrates the readings of the height gauge 501 and the pointer 502 in real time based on the correction value.

[0042] This automatic calibration system can not only improve the accuracy of height measurement, but also reduce the error caused by human operation. At the same time, since the laser rangefinder has the characteristics of high precision and fast response, it can ensure that the lifting platform can still obtain accurate height measurement data when it is in high-speed motion.

[0043] In one embodiment of the present application, please refer to Figure 1 and Figure 2 The lifting platform includes a lifting drive member 401 and a contact platform 402 ; one end of the lifting drive member 401 is connected to the base 100 , and the other end of the lifting drive member 401 is connected to the contact platform 402 .

[0044] In this embodiment, the lifting drive 401 uses a high-performance electric push rod, which has the characteristics of fast response speed, large thrust and good stability, and can ensure the stability and safety of the lifting platform during the lifting process. The electric push rod has a built-in precise control system, which can accurately control the lifting speed and position as needed. The contact platform 402 is made of conductive material, and the contact platform 402 is electrically connected to the power supply.

[0045] In one embodiment of the present application, see Figure 3 The light-emitting mechanism 600 includes a light-emitting board and a wiring harness, one end of the wiring harness is connected to the light-emitting board, and the other end of the wiring harness is connected to the probe card 200 .

[0046] In this embodiment, by providing a flexible cable, the connection between the light-emitting board and the probe card 200 can be facilitated. It can be understood that the number of PINs of the flexible cable is equal to that of the probe card 200, for example: 66 PINs, 50 PINs or 40 PINs.

[0047] In an embodiment of the present application, a plurality of groups of light-emitting elements are provided on the light-emitting board. The light-emitting elements include LED lights and flexible cable connectors connected to the LED lights, and the flexible cable connectors are connected to the flexible cable.

[0048] It can be understood that the light-emitting board is made of a material with high light transmittance, such as acrylic or glass, to ensure that the light emitted by the LED lights can be evenly and brightly transmitted. In addition, the light-emitting board is provided with carefully designed grooves or holes, and the size and position of these grooves or holes are precisely calculated so that the LED lights can be embedded therein while ensuring the best light diffusion effect.

[0049] In an embodiment of the present application, please refer to Figure 1 and Figure 2 simultaneously, the probe card horizontal measurement display device further includes a microscope 700 and a display screen 800. The probe of the microscope 700 is arranged facing the probe card 200 for detecting whether the probe card 200 is in contact; the display screen 800 is electrically connected to the microscope 700, and the display screen 800 is used to magnify and display the image collected by the probe of the microscope 700.

[0050] In this embodiment, by providing the microscope 700, the probes of the probe card 200 can be magnified, and further judged, the contact state between the probes of the probe card 200 and the contact platform 402, so as to reduce the measurement error. By providing the display screen 800, the picture collected by the probe of the microscope 700 can be intuitively displayed.

[0051] In an embodiment of the present application, the probe card horizontal measurement display device further includes a rotating mechanism (not shown). The rotating mechanism is installed on the base 100 and is connected to the microscope 700. The rotating mechanism can drive the microscope 700 to rotate so that the probe of the microscope 700 faces the probe card 200 or the pointer 502.

[0052] In this embodiment, by providing the rotating mechanism, the orientation of the probe of the microscope 700 can be adjusted. When the probe of the microscope 700 faces the pointer 502, the reading of the height gauge 501 can be magnified and the image can be displayed on the display screen 800, making the reading of the height gauge 501 more convenient and accurate. The rotating mechanism may include a rotating motor and a mounting seat. The microscope 700 is installed on the mounting seat, and the mounting seat is connected to the output shaft of the rotating motor.

[0053] In an embodiment of the present application, the probe card horizontal measurement display device further includes a first translation device (not shown), the first translation device is connected between the lifting platform and the base 100, and the first translation device can drive the lifting platform to move horizontally.

[0054] In this embodiment, by providing the first translation device, the positions of the lifting platform and the probes on the probe card 200 can be adjusted, facilitating the detection of each probe on the probe card 200 one by one.

[0055] In an embodiment of the present application, the probe card horizontal measurement display device further includes a second translation device (not shown), the second translation device is connected between the probe card carrier and the base 100, and the second translation device can drive the probe card carrier to move horizontally; and the moving directions of the first translation device and the first translation device are perpendicular to each other.

[0056] In this embodiment, by providing the second translation device, the accuracy of the position adjustment of the lifting platform and the probes on the probe card 200 can be further improved; when the first translation device moves left and right, the second translation device can move forward and backward, or when the first translation device moves forward and backward, the second translation device can move left and right.

[0057] In this embodiment, the structures of the first translation device and the second translation device are the same. Taking the first translation device as an example, the first translation device includes a slider, a slide rail, and a translation driving member. The slider is installed at the bottom of the lifting platform, the slide rail is installed on the base, and the slider is slidably connected to the slide rail; the translation driving member is connected to the lifting platform, and the telescopic direction of the translation driving member is the same as the length direction of the slide rail; the translation driving member can specifically adopt a telescopic cylinder or a telescopic oil cylinder.

[0058] The above are only the preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A probe card level measurement display device, characterized in that: include: Base, A probe card carrier, the probe card carrier being used for clamping the probe card; A lifting platform, the lifting platform is installed on the base and is located below the probe card, and the lifting platform can move up and down so that the table surface of the lifting platform contacts the probes on the probe card; A height measuring element, which is mounted on the base and is used to measure the height value of the lifting platform; a light emitting mechanism electrically connected to the probe card; and A power supply is electrically connected to the light emitting mechanism and the lifting platform respectively. When the lifting platform contacts the probes on the probe card, the power supply, the light emitting mechanism, the lifting platform and the probe card form a loop.

2. The probe card level measurement display device according to claim 1, wherein: The probe card carrier comprises a support frame and a card seat, the bottom of the support frame is connected to the base, and the top of the support frame is connected to the card seat.

3. The probe card level measurement display device according to claim 1, wherein: The height measuring element comprises a height gauge and a pointer; the height gauge is erected on the base and close to the lifting platform; the pointer is installed on the side of the lifting platform and points to the scale on the height gauge.

4. The probe card level measurement display device according to claim 1, wherein: The lifting platform includes a lifting drive member and a contact platform; one end of the lifting drive member is connected to the base, and the other end of the lifting drive member is connected to the contact platform.

5. The probe card level measurement display device according to claim 1, wherein: The light-emitting mechanism comprises a light-emitting board and a flat cable, one end of the flat cable is connected to the light-emitting board, and the other end of the flat cable is connected to the probe card.

6. The probe card level measurement display device according to claim 5, wherein: The light-emitting board is provided with a plurality of light-emitting elements, wherein the light-emitting elements include LED lamps and cable connectors connected to the LED lamps, and the cable connectors are connected to the cable.

7. The probe card level measurement display device as claimed in claim 3, characterized in that: The probe card level measurement display device also includes a microscope and a display screen. The probe of the microscope is arranged toward the probe card to detect whether the probe card is in contact. The display screen is electrically connected to the microscope and is used to magnify and display the image collected by the microscope probe.

8. The probe card level measurement and display device according to claim 7, wherein: The probe card level measurement and display device further comprises a rotating mechanism, which is mounted on a base and connected to the microscope. The rotating mechanism can drive the microscope to rotate so that the probe of the microscope faces the probe card or the pointer.

9. The probe card level measurement and display device according to any one of claims 1 to 8, characterized in that: The probe card horizontal measurement and display device further includes a first translation device, which is connected between the lifting platform and the base, and can drive the lifting platform to move in a horizontal direction.

10. The probe card level measurement and display device according to claim 9, wherein: The probe card horizontal measurement display device also includes a second translation device, which is connected between the probe card carrier and the base, and can drive the probe card carrier to move in a horizontal direction; and the movement directions of the first translation device and the second translation device are perpendicular to each other.

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