Spectral responsivity calibration device

Abstract

The utility model provides a spectral responsivity calibration device, and relates to the technical field of optical metrology. The device comprises a light source module, a light path module, a detection module, a control system and a packaging box, wherein the control system is respectively in communication connection with a light source, a light path and the detection module; the light source module is a direct-current voltage-stabilizing light source combined by a deuterium lamp and a halogen lamp; the light path module comprises an adjustable grating, a monochromator, a reflector and a lock-in amplifier, and the light path module is of a double-light-path design; the detection module comprises a reference detector, a standard detector and a detected detector. The standard detector is composed of a standard silicon detector, a standard indium gallium arsenic detector, a standard germanium detector and a standard lead sulfide detector. The device can be used for calibrating the spectral responsivity of ultraviolet, visible and near infrared detectors, and can be used for measuring and calibrating the spectral responsivity of the detected detector through a comparison method by arranging standard detectors such as silicon, germanium, indium gallium arsenic, lead sulfide and the like.

Description

Technical Field

[0001] The utility model relates to the technical field of optical metrology, and particularly relates to a spectral responsivity calibration device. Background Art

[0002] A photodetector is a sensor made of a material with the photoelectric effect that can convert light radiation energy into an electrical signal convenient for measurement. With the rapid development of fields such as semiconductors, lasers, and communications, photodetectors are widely used in various devices. Since photodetectors are selective to spectra and the spectral responsivities at different wavelengths are different, to a certain extent, the spectral responsivity is an important parameter index for measuring the performance of photodetectors. Therefore, the metrological calibration demand for the spectral responsivity of photodetectors has also increased accordingly.

[0003] Since photodetectors are mainly applied to devices with a relatively large volume and are not easily disassembled and sent to a laboratory for metrological calibration, the common spectral responsivity calibration devices for photodetectors can no longer meet the on-site calibration demand. Currently, the devices used for calibrating the spectral responsivity of photodetectors are mainly composed of a light source system, a monochromator, an optical path system, a detection system, and a software control system. This device has advantages such as strong controllability, good stability, and high reliability. However, this device has the following problems: (1) This device has a relatively large volume and is not convenient to carry, and can only be used in a laboratory, unable to meet the on-site calibration demand; (2) A silicon-based detector is commonly used as a standard detector in this device, resulting in the ability to only calibrate the spectral responsivity of silicon-based detectors and unable to cover other types of detectors, such as germanium detectors, indium gallium arsenide detectors, lead sulfide detectors, etc.; (3) The measurement range of the current conventional spectral responsivity calibration device is relatively small, and the wavelength range can only be calibrated from 300 nm to 1100 nm, unable to meet the calibration demand for detectors in the ultraviolet and near-infrared bands. Therefore, in order to solve the on-site calibration demand for the spectral responsivity of detectors in the ultraviolet, visible, and near-infrared bands, it is urgent to propose a detector spectral responsivity calibration device. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a spectral responsivity calibration device to solve the calibration problem of the responsivity of detectors in a wide wavelength range in view of the above-mentioned deficiencies of the prior art.

[0005] To achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0006] The utility model provides a spectral responsivity calibration device, which includes: a light source module, an optical path module, a detection module, a control system, and a packaging box.

[0007] The light source module, the optical path module, the detection module, and the control system are all arranged on the packaging box, and the control system is respectively communicatively connected with the light source module, the optical path module, and the detection module.

[0008] The light source module is a DC regulated light source composed of a deuterium lamp and a halogen lamp;

[0009] The optical path module includes an adjustable grating, a monochromator, a mirror and a lock-in amplifier. The optical path module is designed with a double optical path. One optical path is used for calibrating the detector responsivity, and the other optical path uses a reference detector for system monitoring;

[0010] The detection module includes a reference detector, a standard detector and a detector under test. The standard detector is composed of a standard silicon detector, a standard indium gallium arsenide detector, a standard germanium detector and a standard lead sulfide detector;

[0011] The control system is used to realize the system control of the light source module, the optical path module and the detection module.

[0012] Optionally, the light source stability of the light source module is ≥99.8%, and the light source non-uniformity is ≤1.0%.

[0013] Optionally, the optical path module further includes a slit provided at the light inlet, and a filter, a semi-transparent semi-reflective mirror and a lens provided in the optical path.

[0014] Optionally, the detection module further includes an automatic switching device. The standard detector and the detector under test are arranged on the automatic switching device to realize the arbitrary switching between the standard detector and the detector under test, and the spectral responsivity of the detector under test is calibrated by the comparison method.

[0015] The beneficial effects of the present utility model include:

[0016] The spectral responsivity calibration device provided by the utility model includes: a light source module, an optical path module, a detection module, a control system and a packaging box. The light source module, the optical path module, the detection module and the control system are all arranged on the packaging box, and the control system is respectively communicatively connected with the light source module, the optical path module and the detection module; the light source module is a DC regulated light source composed of a deuterium lamp and a halogen lamp; the optical path module includes an adjustable grating, a monochromator, a reflector and a lock-in amplifier. The optical path module is designed with a dual optical path. One optical path is used for calibrating the detector responsivity, and the other optical path uses a reference detector for system monitoring; the detection module includes a reference detector, a standard detector and a detector under test. The standard detector is composed of a standard silicon detector, a standard indium gallium arsenide detector, a standard germanium detector and a standard lead sulfide detector; the control system is used to realize the system control of the light source module, the optical path module and the detection module. This calibration device can be used for calibrating the spectral responsivity of ultraviolet, visible and near-infrared detectors. On the premise of ensuring the measurement accuracy, by reasonably arranging the light source module, the optical path module, the test module and the control module on the packaging box, the portability of this calibration device is realized; by equipping standard detectors such as silicon, germanium, indium gallium arsenide and lead sulfide, the spectral responsivity measurement and calibration of the detector under test can be carried out by the comparison method. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 FIG. shows a schematic structural diagram of a spectral responsivity calibration device provided by an embodiment of the present utility model;

[0019] Figure 2 FIG. shows a schematic optical path diagram of a spectral responsivity calibration device provided by an embodiment of the present utility model;

[0020] Figure 3 FIG. shows a schematic optical path diagram of a spectral responsivity calibration device provided by another embodiment of the present utility model. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] In order to make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Usually, the components of the embodiments of the present utility model described and illustrated in the drawings here can be arranged and designed in various different configurations.

[0022] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0023] It should be noted that like reference numerals and letters denote like items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0024] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings or the orientation or positional relationship in which the product of the present invention is usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation on the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be construed as indicating or implying relative importance.

[0025] In the description of the present invention, it should also be noted that unless otherwise clearly defined and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] Since photodetectors are mainly used in devices with relatively large volumes and are not easily disassembled and sent to a laboratory for metrological calibration, the common spectral responsivity calibration devices for photodetectors can no longer meet the on-site calibration requirements. Currently, the devices used to calibrate the spectral responsivity of photodetectors are mainly composed of a light source system, a monochromator, an optical path system, a detection system, and a software control system. This device has advantages such as strong controllability, good stability, and high reliability. However, this device has the following problems: (1) This device is relatively large in volume and not convenient to carry, and can only be used in the laboratory, unable to meet the on-site calibration requirements; (2) In this device, a silicon-based detector is commonly used as the standard detector, resulting in the ability to only calibrate the spectral responsivity of silicon-based detectors and unable to cover other types of detectors, such as germanium detectors, indium gallium arsenide detectors, lead sulfide detectors, etc.; (3) Currently, the measurement range of conventional spectral responsivity calibration devices is relatively small, and the wavelength range can only be calibrated from 300 nm to 1100 nm, unable to meet the calibration requirements for detectors in the ultraviolet and near-infrared bands. Therefore, in order to solve the on-site calibration requirements for the spectral responsivity of detectors in the ultraviolet, visible, and near-infrared bands, there is an urgent need to propose a detector spectral responsivity calibration device.

[0027] Figure 1 FIG. 4 shows a schematic structural diagram of a spectral responsivity calibration device provided by an embodiment of the present invention; Figure 2 FIG. 5 shows a schematic optical path diagram of a spectral responsivity calibration device provided by an embodiment of the present invention.

[0028] As Figure 1 and Figure 2 shown, the present invention provides a spectral responsivity calibration device, which includes: a light source module 11, an optical path module 12, a detection module 13, a control system 14, and a packaging box 15.

[0029] The light source module 11, the optical path module 12, the detection module 13, and the control system 14 are all arranged on the packaging box 15, and the control system 14 is respectively communicatively connected to the light source module 11, the optical path module 12, and the detection module 13.

[0030] The light source module 11 is a DC regulated power supply composed of a deuterium lamp 22 and a halogen lamp 23. This light source module 11 supports plug-and-play, and the light source stability of the light source module 11 is ≥99.8%, and the light source non-uniformity is ≤1.0%.

[0031] The optical path module 12 includes an adjustable grating 25, a monochromator, a mirror 21, and a lock-in amplifier. The optical path module 12 is designed with a double optical path. One of the optical paths is used for calibrating the detector responsivity, and the other optical path uses a reference detector 29 for system monitoring, thereby effectively reducing the influence of stray light on the measurement results and at the same time being able to ensure the stability of the incident light intensity to meet the detector calibration requirements.

[0032] Optionally, the optical path module 12 further includes a slit 24 disposed at the light input port, and a filter 26, a semi-transmissive and semi-reflective mirror 27, and a lens 28 disposed in the optical path.

[0033] The detection module 13 includes a reference detector 29, a standard detector, and a detector under test. The standard detector and the detector under test are disposed at the detector responsivity calibration position 210. The standard detector is composed of a standard silicon detector, a standard indium gallium arsenide detector, a standard germanium detector, and a standard lead sulfide detector, and can achieve detection in the wavelength range of 200 nm to 3000 nm, covering the calibration requirements of ultraviolet, visible, and near-infrared full-band detectors.

[0034] The control system 14 is used to achieve system control of the light source module 11, the optical path module 12, and the detection module 13. The control system 14 can perform dark current and system correction functions on the calibration device to achieve accurate measurement of the spectral responsivity of detectors in different bands, and the measurement range is 0.01 A / W to 0.95 A / W.

[0035] As Figure 3 shown, the detection module 13 further includes an automatic switching device 31 disposed at the detector responsivity calibration position 210. The standard detector and the detector under test are disposed on the automatic switching device 31. Specifically, the automatic switching device 31 is a turntable driven by a stepper motor. There are five setting positions on the turntable, and these five setting positions are respectively used to set four standard detectors and the detector under test. When the turntable rotates to different positions, the detectors in the optical path are different. By controlling the rotation of the turntable by the stepper motor, arbitrary switching of the standard detector and the detector under test on the optical path can be achieved, and the spectral responsivity of the detector under test can be calibrated by the comparison method.

[0036] In summary, the present calibration device can be used for calibrating the spectral responsivity of ultraviolet, visible, and near-infrared detectors. On the premise of ensuring the measurement accuracy, by reasonably setting the light source module, the optical path module, the test module, and the control module on the packaging box, the portability of the calibration device is realized; by equipping standard detectors such as silicon, germanium, indium gallium arsenide, and lead sulfide, the spectral responsivity of the detector under test can be measured and calibrated by the comparison method. The measurement and calibration range is: wavelength 200 nm to 3000 nm, spectral responsivity: 0.01 A / W to 0.95 A / W, and the wavelength interval and bandwidth are adjustable.

[0037] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A spectral responsivity calibration device, characterized in that: The calibration device comprises: a light source module, an optical path module, a detection module, a control system and a packaging box. The light source module, the optical path module, the detection module and the control system are all arranged on the packaging box, and the control system is respectively connected to the light source module, the optical path module and the detection module for communication; The light source module is a DC voltage-stabilized light source composed of a deuterium lamp and a halogen lamp; The optical path module includes an adjustable grating, a monochromator, a reflector and a lock-in amplifier. The optical path module is designed with dual optical paths, one of which is used for detector responsivity calibration and the other is used for system monitoring using a reference detector. The detection module includes a reference detector, a standard detector and a detector to be tested, wherein the standard detector is composed of a standard silicon detector, a standard indium gallium arsenide detector, a standard germanium detector and a standard lead sulfide detector; The control system is used to realize system control of the light source module, the optical path module and the detection module.

2. The spectral responsivity calibration device according to claim 1, characterized in that: The light source stability of the light source module is ≥99.8%, and the light source non-uniformity is ≤1.0%.

3. The spectral responsivity calibration device according to claim 1, characterized in that: The optical path module also includes a slit arranged at the light entrance and a filter, a semi-transparent and semi-reflective mirror, and a lens arranged in the optical path.

4. The spectral responsivity calibration device according to claim 1, characterized in that: The detection module also includes an automatic switching device, and the standard detector and the detected detector are arranged on the automatic switching device to realize arbitrary switching between the standard detector and the detected detector, and spectral responsivity of the detected detector is calibrated by comparison method.

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