Uncovering mechanism of mask storage box and photoetching machine

Abstract

The utility model provides a mask storage box uncovering mechanism and a photoetching machine, and relates to the technical field of photoetching machines, the mask storage box uncovering mechanism comprises a box body with an opening and an uncovering assembly, a box cover is movably arranged at the opening of the box body, the uncovering assembly is matched with the box cover in a driving manner, and the opening of the box body is matched with the opening of the box body. The uncovering assembly is used for driving the box cover to be opened or closed relative to the opening. According to the cover opening mechanism of the mask storage box, the cover opening assembly is arranged at the opening of the box body, the box cover is automatically opened and closed, the mask is convenient to store and take, and the working efficiency is improved. The photoetching machine provided by the utility model comprises the photoetching machine main body and the mask storage box uncovering mechanism, and by adopting the mask storage box uncovering mechanism with the automatic uncovering function, the effect of quickly storing and taking the mask is realized, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of an opening mechanism for a mask storage box, in particular to an opening mechanism for a mask storage box and a lithography machine. Background Art

[0002] A mask, also known as a reticle, photomask, photo mask, lithography mask, etc., is a graphic master used in the lithography process in microelectronics and integrated circuit manufacturing. An opaque light-shielding film forms a mask pattern on a transparent substrate, and the pattern is transferred to a wafer through exposure. Therefore, the mask is an indispensable part of the lithography process.

[0003] As a precision component, the mask is very sensitive to particles or contaminants. Therefore, the mask is stored in a special mask box and is only taken out of the mask box and placed on the mask table for exposure during the exposure process. The lid of the traditional mask box is arranged on the front side of the mask box and is installed on the mask box in a hinged form. Then, the mask box is installed in the mask storage of the lithography machine. When the transfer manipulator retrieves the corresponding mask, it needs to open the lid before performing the mask retrieval action. Generally, multiple masks are stored in a lithography machine, and the multiple masks are generally placed in layers in the mask storage. When the manipulator takes or stores the mask, it needs to move to the corresponding position and open the lid first, and then perform the access operation, resulting in low access efficiency. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an opening mechanism for a mask storage box and a lithography machine to solve the above technical problems.

[0005] In a first aspect, an embodiment of the utility model provides an opening mechanism for a mask storage box, which includes: a box body with an opening and an opening component. A lid is movably arranged at the opening of the box body, and the opening component is in driving cooperation with the lid. The opening component is used to drive the lid to open or close relative to the opening.

[0006] Further, the opening component includes a first driving mechanism and a swinging component. The swinging component is connected to the driving mechanism and is in driving cooperation with the lid. The first driving mechanism drives the swinging component to swing to open or close the lid.

[0007] Further, the swinging component includes a driving swing arm and an opening lever. One end of the driving swing arm is connected to the rotating shaft of the first driving mechanism, and the opening lever is arranged at the other end of the driving swing arm. The lid is hinged to the box body. The driving swing arm is driven to drive the opening lever to rotate, and the opening lever can abut against the lid and push the lid to rotate to open or close the lid.

[0008] Further, the number of the box bodies is multiple, and the multiple box bodies are arranged. The mask storage box opening mechanism further includes a sliding component arranged along the arrangement direction of the box bodies. The opening component is connected to the sliding component, and the sliding component drives the opening component to move to any corresponding box body so that the opening component is in driving cooperation with the box cover of the corresponding box body.

[0009] Further, the sliding component includes a slide rail, a slider and a second driving mechanism extending along the arrangement direction of the box bodies. The opening component is arranged on the slider, and the second driving mechanism drives the slider to slide along the slide rail.

[0010] Further, the mask storage box opening mechanism further includes a position sensor and a controller. The controller is electrically connected to the position sensor and the sliding component respectively. The position sensor is used for detecting the position information of the opening component or the slider in the sliding component, and the controller is used for controlling the sliding component to drive the opening component to move according to the position information.

[0011] Further, the second driving mechanism includes a driving motor and a driving screw. The driving screw is connected to the rotating shaft of the driving motor. A threaded hole is formed in the slider, and the driving screw is inserted into the threaded hole.

[0012] Further, the driving swing arm is detachably connected to the rotating shaft of the first driving mechanism.

[0013] Further, a connection hole is formed in the driving swing arm, the output shaft of the first driving mechanism is inserted into the connection hole, and communicating fixing holes are formed in the driving swing arm and the first driving mechanism, and a fixing pin is inserted into the fixing holes.

[0014] On the other hand, an embodiment of the present invention further provides a lithography machine, which includes a lithography machine main body and the mask storage box opening mechanism of any one of the above. The mask storage box opening mechanism is arranged inside the lithography machine main body, and a robotic arm is arranged on the lithography machine main body, and the robotic arm is used for accessing the mask placed in the mask storage box opening mechanism.

[0015] A mask storage box opening mechanism provided by the present invention includes: a box body with an opening and an opening component. A box cover is movably arranged at the opening of the box body. The opening component is in driving cooperation with the box cover, and the opening component is used for driving the box cover to open or close relative to the opening. By arranging the opening component at the opening of the box body, the box cover is automatically opened and closed, which is convenient for accessing the mask and improves the working efficiency.

[0016] A lithography machine provided by an embodiment of the present invention includes a lithography machine main body and the above mask storage box opening mechanism. The mask storage box opening mechanism with the automatic opening function is adopted, and the effect of quickly accessing the mask is achieved, and the working efficiency is improved. Description of the Drawings

[0017] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0018] Figure 1 One of the three-dimensional views of the opening mechanism of the mask storage box provided by the embodiment of the present invention;

[0019] Figure 2 Provided by the embodiment of the present invention Figure 1 An enlarged view of area A in;

[0020] Figure 3 One of the usage state diagrams of the opening mechanism of the mask storage box provided by the embodiment of the present invention;

[0021] Figure 4 Another usage state diagram of the opening mechanism of the mask storage box provided by the embodiment of the present invention;

[0022] Figure 5 Another three-dimensional view of the opening mechanism of the mask storage box provided by the embodiment of the present invention.

[0023] Icon: 100 - box body; 200 - opening component; 300 - box cover; 201 - first driving mechanism; 202 - driving swing arm; 203 - opening lever; 400 - sliding component; 401 - slide rail; 402 - slider; 403 - second driving mechanism; 2021 - connection hole; 500 - fixed pin; 600 - storage rack. Specific embodiments

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and illustrated in the drawings here can be arranged and designed in various different configurations.

[0025] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "vertical", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present utility model is customarily placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", etc. are only used for distinguishing descriptions and cannot be construed as indicating or implying relative importance.

[0026] In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0027] The following will describe in detail some embodiments of the present utility model with reference to the drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0028] Embodiment 1

[0029] Please refer to Figure 1 and Figure 2 As shown, this embodiment provides an opening / closing mechanism for a mask storage box, which includes: a box body 100 provided with an opening and an opening / closing assembly 200. A box cover 300 is movably arranged at the opening of the box body 100. The opening / closing assembly 200 is in driving cooperation with the box cover 300, and the opening / closing assembly 200 is used to drive the box cover 300 to open or close relative to the opening.

[0030] In this embodiment, please refer to Figure 1 As shown, the box body 100 is set as a flat and hollow cube structure with an opening on the side, which is convenient for storing the mask in the box body 100. A box cover 300 is arranged at the opening of the box body. The box cover 300 can be movably opened or closed to the opening of the box body 100. After the mask is stored in the box body 100, the box cover 300 can be closed to protect the mask inside. An opening / closing assembly 200 is arranged at the opening of the box body 100. The opening / closing assembly 200 is in driving cooperation with the box cover 300 and is used to open or close the box cover 300. When it is necessary to access the mask, the opening / closing mechanism for the mask storage box provided in this embodiment automatically opens or closes the box cover 300 by arranging the opening / closing assembly 200 at the opening of the box body 100, which is convenient for taking out or putting in the mask. During use, before an external access device, such as the robotic arm of a lithography machine, accesses the mask, the opening / closing assembly 200 automatically opens the box cover 300 in advance, exposing the opening, which is convenient for the access device to quickly put in or take out the mask and improves work efficiency.

[0031] Optionally, in some embodiments of the present embodiment, the opening cover assembly 200 includes a first driving mechanism 201 and a swinging assembly. The swinging assembly is connected to the first driving mechanism, and the swinging assembly is drivingly engaged with the box cover 300. The first driving mechanism 201 drives the swinging assembly to swing to open or close the box cover 300.

[0032] Optionally, in some embodiments of the present embodiment, the swinging assembly includes a driving swing arm 202 and an opening cover lever 203. One end of the driving swing arm 202 is connected to the rotating shaft of the first driving mechanism 201, and the other end of the driving swing arm 202 is provided with the opening cover lever 203. The box cover 300 is hinged to the box body 100. The driving swing arm 202 is driven to drive the opening cover lever 203 to rotate, and the opening cover lever 203 can abut against the box cover 300 and push the box cover 300 to rotate, so as to open or close the box cover 300.

[0033] Please refer to Figure 1 and Figure 5 As shown, in the present embodiment, currently, the box body 100 for storing the mask plate has a side opening, and the upper edge of the box cover 300 is hinged to the box body 100, and the box cover 300 can be opened by rotating upward. The opening cover assembly 200 includes a first driving mechanism 201 and a swinging assembly. The swinging assembly rotates under the drive of the first driving mechanism 201, thereby driving the box cover 300 to rotate, so that the box cover 300 flips to open or close the box cover 300. Please refer to Figure 2 As shown, specifically, the swinging assembly includes a driving swing arm 202 and an opening cover lever 203. The driving swing arm 202 is fixedly connected to the output rotating shaft of the first driving mechanism. The other end of the driving swing arm 202 is provided with the opening cover lever 203. The opening cover lever 203 can abut against the inner side surface of the box cover 300. Please refer to Figure 3 As shown, Figure 3 This is one of the usage state diagrams of the opening mechanism of the mask plate storage box provided in this embodiment. At this time, the box cover 300 is in the closed state. At this time, the driving swing arm 202 is in the vertical state, and the opening cover lever 203 is located between the box cover 300 and the box body 100. Please refer to Figure 4 As shown, Figure 4 This is the second usage state diagram of the opening mechanism of the mask plate storage box provided in this embodiment. When it is necessary to open the box cover 300, the first driving mechanism 201 drives the driving swing arm 202 to rotate, and the opening cover lever 203 on the driving swing arm 202 pushes the box cover 300 to rotate, so as to open the box cover 300. Please refer to Figure 4As shown, the preferred opening angle of the lid 300 of the cassette is 90 degrees, that is, the lid 300 of the cassette is rotated 90 degrees from the closed state to a horizontal state. At this time, the lid 300 of the mask plate cassette is just fully opened. Correspondingly, the swing angle of the driving swing arm 202 also needs to be rotated 90 degrees. Of course, in other embodiments, the opening angle of the lid 300 can also be set to be greater than 90 degrees. At this time, after the lid 300 is pushed open by the driving swing arm 202 and exceeds the horizontal position, it will tilt upward obliquely; the opening angle of the lid 300 can also be slightly less than 90 degrees, as long as it does not affect the taking and placing of the mask plate in the cassette. In short, the opening angle of the lid 300 only needs to satisfy that the manipulator can smoothly take out the mask plate from the mask plate cassette.

[0034] Optionally, in some embodiments of this embodiment, the first driving mechanism 201 can be a driving device such as a driving motor, a swinging air cylinder or a swinging hydraulic cylinder, etc., as long as it can realize the rotation of the driving swing arm 202, and the specific mechanism is not limited.

[0035] Optionally, in some embodiments of this embodiment, the number of the cassettes 100 is multiple, and the multiple cassettes 100 are arranged vertically. The opening mechanism of the mask plate storage cassette further includes a sliding component 400 arranged along the arrangement direction of the cassettes 100. The opening component 200 is connected to the sliding component 400, and the sliding component 400 drives the opening component 200 to move to the cassette 100 corresponding to any horizontal height, so that the opening component 200 is in driving cooperation with the lid 300 of the corresponding cassette 100.

[0036] Please refer to Figure 1 As shown, in this embodiment, the opening mechanism of the mask plate storage cassette further includes a storage rack 600. The number of the cassettes 100 is multiple, and the multiple cassettes 100 are arranged vertically at intervals along the storage rack 600, making full use of the space and facilitating the storage of multiple mask plates. Each cassette 100 stores only one mask plate or only mask plates of the same type, which is convenient for classifying and managing the mask plates. The structure of each cassette 100 is the same, and the openings all face the same direction, and a lid 300 is provided at the opening of each cassette 100. The opening mechanism of the mask plate storage cassette further includes a vertically arranged sliding component 400. The opening component 200 is arranged on the sliding component 400, and the sliding component 400 drives the opening component 200 to move in the vertical direction, so that the opening component 200 can move to the position of any cassette 100 and be in driving cooperation with the lid 300 of the corresponding cassette 100. By setting the sliding component 400 to move the opening component 200, only one opening component 200 is needed to open the lid 300 of any cassette 100, thus simplifying the mechanism and saving costs.

[0037] Optionally, in some embodiments of the present embodiment, the sliding assembly 400 includes a slide rail 401 extending along the arrangement direction of the cartridge 100, a slider 402, and a second driving mechanism 403. The cover opening assembly 200 is disposed on the slider 402, and the second driving mechanism 403 drives the slider 402 to slide along the slide rail 401.

[0038] Please refer to Figure 1 As shown, in this embodiment, the slide rail 401 is vertically arranged and has the same arrangement direction as the cartridge 100. The slider 402 is slidably mounted on the slide rail 401. The cover opening assembly 200 is disposed on the slider 402, and the second driving mechanism 403 drives the slider 402 to move up and down along the slide rail 401, thereby driving the cover opening assembly 200 to move to any position of the cartridge 100. The moving structure of the slide rail 401 and the slider 402 can ensure the stability of the cover opening assembly 200 during movement, and has a simple structure, is easy to maintain, and saves production costs.

[0039] Optionally, in some embodiments of the present embodiment, the second driving mechanism 403 includes a driving motor and a driving screw. The driving screw is vertically arranged, and one end of the driving screw is fixedly connected to the rotating shaft of the driving motor. A threaded hole is formed in the slider 402, and the driving screw passes through the threaded hole. When the driving motor drives the driving screw to rotate, the slider 402 can be driven to lift through the engagement of the driving screw and the threaded hole. Controlling the lifting of the slider 402 by the driving screw has a simple structure and good self-locking and controllability. By controlling the number of turns of the motor, the slider 402 can be stably hovered at any position of the slide rail 401.

[0040] Optionally, in some embodiments of the present embodiment, the mask storage box cover opening mechanism further includes a position sensor and a controller. The controller is electrically connected to the position sensor and the sliding assembly 400 respectively. The position sensor is used to detect the position information of the cover opening assembly 200 or the slider 402 in the sliding assembly 400, and the controller is used to control the sliding assembly 400 to drive the cover opening assembly 200 to move according to the position information.

[0041] In this embodiment, the position sensor is used to detect the position information of the slider 402, and the controller controls the movement of the sliding assembly 400 according to the position information of the slider 402. It can be understood that since the height of each mask cassette in the mask library is determined, when the opening / closing assembly 200 needs to open a mask cassette on a certain layer, it can directly move to the height where the cassette body 100 of that layer is located. During specific operation, the position information of the slider 402 can be detected by the position sensor first, or provided by the rotation state of the motor. An encoder can be set on the rotating shaft of the motor, and according to the preset and detected number of turns of the motor rotation, the height position of the slider can be determined. The controller calculates the distance and direction that the slider 402 needs to move according to the position information and the position information of the cassette body 100 that needs to be opened, and then controls the sliding assembly 400 to drive the opening / closing assembly 200 to move to the corresponding cassette body 100 for the opening operation.

[0042] Optionally, in some embodiments of this embodiment, the position sensor is preferably arranged at the upper and lower limit positions of the slide rail 401. The position sensor can detect the position of the slider 402. In addition to facilitating the movement of the slider 402 to the position of the cassette body 100 that needs to be opened, it can also play a limiting role to limit the slider 402 and prevent the slider 402 from moving beyond the limit position and causing equipment damage.

[0043] Optionally, in some other embodiments, the position sensor can also be arranged on the slider 402. When the slider 402 moves up and down, the position sensor detects the real-time moving position, and then judges whether it moves to the opening position at the corresponding height.

[0044] Optionally, in some embodiments of this embodiment, the driving swing arm 202 is detachably connected to the rotating shaft of the first driving mechanism 201.

[0045] In this embodiment, a connection hole 2021 is formed on the driving swing arm 202, the output shaft of the first driving mechanism 201 passes through the connection hole 2021, and communication fixing holes are formed on the driving swing arm 202 and the first driving mechanism 201, and a fixing pin 500 is inserted through the fixing holes.

[0046] Please refer to Figure 2 As shown, the driving swing arm 202 is detachably connected to the output shaft of the first driving mechanism 201 and is assisted by the fixing pin 500. On the one hand, the driving swing arm 202 and the first driving mechanism 201 can be produced separately, reducing the production difficulty and production cost. On the other hand, different driving swing arms 202 can be disassembled and replaced according to needs, so as to realize the opening operation of different cassette covers 300.

[0047] Optionally, in some implementations of this embodiment, the side wall of the box body 100 is provided with a movable groove, and the cover-opening lever 203 can extend into the movable groove and move along the movable groove. When the cover-opening lever 203 is located in the movable groove, the cover-opening lever 203 abuts against the inner side of the box cover 300, thereby realizing the driving cooperation with the box cover 300. When the main system of the lithography machine sends a cover-opening signal (for example, the mask box of the 5th layer needs to be opened), the cover-opening assembly 200, driven by the sliding assembly 400, rises or falls from the initial position (the initial position is preferably the upper limit position or the lower limit position, or other positions) to the cover-opening position at the corresponding layer. During the movement, the cover-opening lever 203 passes through the movable grooves of other box bodies 100 without causing obstruction. After moving to the preset position, the cover-opening lever 203 is just located in the movable groove of the box body 100 at that location, and the cover-opening lever 203 is located between the box cover 300 and the box body 100. When the cover needs to be opened, the main control system sends a command to the first driving mechanism 201, and the first driving mechanism 201 drives the driving swing arm 202 to rotate. While the driving swing arm 202 rotates, it drives the cover opening lever 203 to contact the box cover 300 from below, and makes the box cover 300 rotate around its hinge axis to open the box cover 300.

[0048] Optionally, in some implementations of this embodiment, the upper edge of the box cover 300 is hinged to the box body 100, so that the box cover 300 is rotated upward to open. Under the action of its own gravity, the box cover 300 has a tendency to close downward. When the box cover 300 needs to be closed, it is only necessary to cancel the driving force for opening the box cover 300, that is, to rotate the driving swing arm 202 to reset the driving swing arm 202 to a vertical state, which is convenient and quick to operate.

[0049] Optionally, in some other embodiments, elastic members such as springs, elastic sheets and other mechanisms may be provided to provide elastic force so that the box cover 300 tends to be reset to a closed state. After the box cover is closed, it has a certain self-locking force, thereby blocking the mask and preventing the mask from falling off from the mask box.

[0050] Example 2

[0051] The present embodiment provides a photolithography machine, which includes a photolithography machine body and the mask storage box opening mechanism provided in the above embodiment. The mask storage box opening mechanism is arranged in the photolithography machine body. A mechanical arm is arranged on the photolithography machine body, and the mechanical arm is used to store and retrieve the mask placed in the mask storage box opening mechanism.

[0052] In this embodiment, the mask storage box cover opening mechanism is equipped with a cover opening assembly 200, which can achieve the cover opening effect. When the lithography machine needs to store or access the mask, a control signal is sent in advance, and the cover opening assembly 200 opens the box cover 300 of the corresponding box body 100 in advance, and then the mask is stored or accessed by a mechanical arm, thereby improving work efficiency.

[0053] In summary, the embodiment of the present utility model provides an opening mechanism for a mask storage box, which includes: a box body 100 provided with an opening and an opening component 200. A box cover 300 is movably arranged at the opening of the box body 100. The opening component 200 is drivingly matched with the box cover 300, and the opening component 200 is used to drive the box cover 300 to open or close relative to the opening. By arranging the opening component 200 at the opening of the box body 100, the box cover 300 can be automatically opened and closed, which is convenient for accessing the mask and improves work efficiency.

[0054] The embodiment of the present utility model also provides a lithography machine, which includes a lithography machine main body and the above-mentioned opening mechanism for the mask storage box. By adopting the opening mechanism for the mask storage box with the automatic opening function, the effect of quickly accessing the mask is realized, and the work efficiency is improved.

[0055] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than to limit them; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A mask storage box cover opening mechanism, characterized in that: include: A box body (100) with an opening and a cover opening assembly (200) are provided, a box cover (300) is movably provided at the opening of the box body (100), the cover opening assembly (200) is drivingly matched with the box cover (300), and the cover opening assembly (200) is used to drive the box cover (300) to open or close relative to the opening.

2. The mask storage box cover opening mechanism according to claim 1, characterized in that: The cover opening assembly (200) comprises a first driving mechanism (201) and a swinging assembly, wherein the swinging assembly is connected to the driving mechanism and is driven in cooperation with the box cover (300), and the first driving mechanism (201) drives the swinging assembly to swing so that the box cover (300) is opened or closed.

3. The mask storage box cover opening mechanism according to claim 2, characterized in that: The swing assembly comprises a driving swing arm (202) and a cover opening lever (203); one end of the driving swing arm (202) is connected to the rotating shaft of the first driving mechanism (201); the other end of the driving swing arm (202) is provided with a cover opening lever (203); the box cover (300) is hinged to the box body (100); the driving swing arm (202) is driven to drive the cover opening lever (203) to rotate; the cover opening lever (203) can abut against the box cover (300) and push the box cover (300) to rotate, so that the box cover (300) is opened or closed.

4. The mask storage box cover opening mechanism according to claim 1, characterized in that: The number of the box bodies (100) is multiple, and the multiple box bodies (100) are arranged in an array. The mask storage box cover opening mechanism also includes a sliding component (400) arranged along the arrangement direction of the box bodies (100), and the cover opening component (200) is connected to the sliding component (400). The sliding component (400) drives the cover opening component (200) to move to any corresponding box body (100), so that the cover opening component (200) is driven to cooperate with the box cover (300) of the corresponding box body (100).

5. The mask storage box cover opening mechanism according to claim 4, characterized in that: The sliding assembly (400) comprises a sliding rail (401) extending along the arrangement direction of the box body (100), a slider (402) and a second driving mechanism (403); the cover opening assembly (200) is arranged on the slider (402); and the second driving mechanism (403) drives the slider (402) to slide along the sliding rail (401).

6. The mask storage box cover opening mechanism according to claim 4 or 5, characterized in that: The mask storage box cover opening mechanism further comprises a position sensor and a controller, wherein the controller is electrically connected to the position sensor and the sliding assembly (400) respectively, the position sensor is used to detect position information of the cover opening assembly (200) or a slider (402) in the sliding assembly (400), and the controller is used to control the sliding assembly (400) to drive the cover opening assembly (200) to move according to the position information.

7. The mask storage box cover opening mechanism according to claim 5, characterized in that: The second driving mechanism (403) comprises a driving motor and a driving screw, wherein the driving screw is connected to the rotating shaft of the driving motor, and a threaded hole is provided on the slider (402), and the driving screw is inserted into the threaded hole.

8. The mask storage box cover opening mechanism according to claim 3, characterized in that: The driving swing arm (202) is detachably connected to the rotating shaft of the first driving mechanism (201).

9. The mask storage box cover opening mechanism according to claim 8, characterized in that: The driving swing arm (202) is provided with a connecting hole (2021), the output shaft of the first driving mechanism (201) is inserted into the connecting hole (2021), and the driving swing arm (202) and the first driving mechanism (201) are provided with connecting fixing holes, and a fixing pin (500) is inserted into the fixing hole.

10. A photolithography machine, characterized in that: It comprises a photolithography machine body and a mask storage box cover opening mechanism as described in any one of claims 1 to 9, wherein the mask storage box cover opening mechanism is arranged inside the photolithography machine body, and a mechanical arm is arranged on the photolithography machine body, and the mechanical arm is used to store and retrieve the mask placed in the mask storage box cover opening mechanism.

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