Plasma electrode and plasma processing system

Abstract

The utility model discloses a plasma electrode, which comprises an electrode body used for being connected with one end of a first power supply, and the other end of the first power supply is used for being grounded or being connected with a reverse electrode arranged opposite to the electrode body; and the heating pipe body is arranged in the electrode body in a snakelike mode, one end of the heating pipe body is used for being connected with one end of a second power supply, and the other end of the heating pipe body is used for being connected with the other end of the second power supply. According to the embodiment provided by the utility model, the heating efficiency of the electrode can be improved, so that the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of electrodes, and particularly to a plasma electrode and a plasma processing system. Background Art

[0002] Currently, in order to improve the plasma processing effect, a plasma processing system usually needs to preheat the electrode first. The traditional plasma processing system performs preliminary plasma processing through the electrode, and then uses the plasma in a high-energy state generated by the preliminary plasma processing to preheat the electrode. Since the ionization degree of the plasma in the preliminary plasma processing is not high, the heat transferred from the plasma to the electrode is less, resulting in a low heating efficiency of the electrode and affecting the production efficiency. Summary of the Utility Model

[0003] The following is an overview of the subject matter described in detail in this article, and this overview is not intended to limit the protection scope of the claims.

[0004] The utility model provides a plasma electrode, which can improve the heating efficiency of the electrode and thus improve the production efficiency.

[0005] The utility model provides a plasma electrode, which is characterized by comprising: an electrode body for connecting one end of a first power supply, and the other end of the first power supply is grounded or connected to a reverse electrode disposed opposite to the electrode body; a heating tube body which is arranged in a serpentine shape inside the electrode body, one end of the heating tube body is used for connecting one end of a second power supply, and the other end of the heating tube body is used for connecting the other end of the second power supply.

[0006] In some embodiments, the shape of the electrode body is a cuboid, and the heating tube body comprises a plurality of first bending parts arranged side by side along the length direction of the electrode body.

[0007] In some embodiments, a cooling channel arranged in a serpentine shape is provided inside the electrode body, and the cooling channel is used for conveying a coolant.

[0008] In some embodiments, the cooling channel comprises a plurality of second bending parts arranged side by side along the length direction of the electrode body, the number of the second bending parts is the same as that of the first bending parts, and each of the first bending parts is respectively located in the depression of the corresponding second bending part.

[0009] In some embodiments, along the width direction of the electrode body, the projection of the cooling channel does not overlap with the projection of the heating tube body.

[0010] In some embodiments, along the height direction of the electrode body, the projection of the cooling channel overlaps with the projection of the heating tube body.

[0011] In some embodiments, one end of the cooling channel is communicated with a liquid inlet pipe, and the other end of the cooling channel is communicated with a liquid outlet pipe, and the liquid inlet pipe and the liquid outlet pipe are parallel to each other.

[0012] In some embodiments, the inner diameter of the cooling channel is greater than the outer diameter of the heating tube body.

[0013] In some embodiments, the heating tube body is integrally formed by a copper bar.

[0014] To achieve the above object, a second aspect of the embodiments of the present invention provides a plasma processing system, including the plasma electrode described in the first aspect above.

[0015] The embodiments of the present invention at least include the following beneficial effects: The electrode body is connected to one end of the first power supply, and the other end of the first power supply is grounded or connected to a reverse electrode disposed opposite to the electrode body. The first power supply can apply a voltage to the electrode body during the plasma processing, thereby forming an electric field that enables the gas to be ionized. The heating tube body is connected to the second power supply. When the current provided by the second power supply passes through the heating tube body, the heating tube body generates heat. Compared with preheating the electrode by using the plasma in a high-energy state generated by the preliminary plasma processing, since the heat generated by the heating tube body is more, heating the electrode by using the heating tube body can heat the electrode to the working temperature faster, can improve the heating efficiency of the electrode. In addition, the heating tube body is arranged in a snake shape inside the electrode body, so that the heating tube body can be evenly distributed inside the electrode body, and the surface area of contact between the heating tube body and the electrode body is increased, so that the inside of the electrode body can be evenly heated, thereby improving the heating effect of the electrode body, and can further improve the heating efficiency of the electrode body, effectively shortening the preheating time of the electrode, thereby improving the production efficiency.

[0016] Other features and advantages of the present invention will be described in the following specification, and, in part, will be obvious from the specification, or will be understood by implementing the present invention. The objects and other advantages of the present invention can be realized and obtained by the structures specifically pointed out in the specification, the claims and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings are used to provide a further understanding of the technical solutions of the present invention, and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the technical solutions of the present invention, and do not constitute a limitation to the technical solutions of the present invention.

[0018] Figure 1 Structural schematic diagram of the back of the plasma electrode provided by the embodiment of the present utility model;

[0019] Figure 2 Structural schematic diagram of the inside of the plasma electrode provided by the embodiment of the present utility model;

[0020] Figure 3 Structural schematic diagram of the surface of the plasma electrode provided by the embodiment of the present utility model;

[0021] Figure 4 Structural schematic diagram of the inside of the plasma electrode from another perspective provided by the embodiment of the present utility model;

[0022] Figure 5 Structural schematic diagram of the first bending part provided by the embodiment of the present utility model;

[0023] Figure 6 Structural schematic diagram of the second bending part provided by the embodiment of the present utility model. Detailed implementation manners

[0024] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation to the present utility model.

[0025] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0026] In the description of the present utility model, the meaning of "several" is one or more, the meaning of "multiple" is two or more, understandings such as "greater than", "less than", "exceeding", etc. do not include the present number, and understandings such as "above", "below", "within", etc. include the present number. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0027] In the description of the present utility model, unless otherwise clearly defined, terms such as "set", "installed", "connected", etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present utility model in combination with the specific content of the technical solution.

[0028] At present, in order to improve the plasma treatment effect, a plasma treatment system usually needs to preheat the electrode first. The traditional plasma treatment system performs preliminary plasma treatment on the electrode, and then uses the plasma in the high-energy state generated by the preliminary plasma treatment to preheat the electrode. Since the degree of ionization of the plasma in the preliminary plasma treatment is not high, the heat transferred from the plasma to the electrode is less, resulting in a low heating efficiency of the electrode and affecting the production efficiency.

[0029] Aiming at the problem of slow heating speed of the traditional plasma electrode, the present utility model provides a plasma electrode, including: an electrode body 100, one end of the electrode body 100 is used to connect to one end of a first power supply, and the other end of the first power supply is used to be grounded or connected to a reverse electrode disposed opposite to the electrode body 100; a heating tube body 200, the heating tube body 200 is arranged in a serpentine shape inside the electrode body 100, one end of the heating tube body 200 is used to connect to one end of a second power supply, and the other end of the heating tube body 200 is used to connect to the other end of the second power supply.

[0030] According to the solution provided by the embodiment of the present utility model, the electrode body 100 is connected to one end of the first power supply, and the other end of the first power supply is grounded or connected to a reverse electrode disposed opposite to the electrode body 100. The first power supply can apply a voltage to the electrode body 100 during the plasma treatment process, thereby forming an electric field that causes gas ionization. The heating tube body 200 is connected to the second power supply. When the current provided by the second power supply passes through the heating tube body 200, the heating tube body 200 will generate heat. Compared with using the plasma in the high-energy state generated by the preliminary plasma treatment to preheat the electrode, since the heat generated by the heating tube body 200 is more, using the heating tube body 200 to heat the electrode can make the electrode be heated to the working temperature faster, which can improve the heating efficiency of the electrode. In addition, the heating tube body 200 is arranged in a serpentine shape inside the electrode body 100, so that the heating tube body 200 can be evenly distributed inside the electrode body 100, and the surface area of contact between the heating tube body 200 and the electrode body 100 is increased, enabling the inside of the electrode body 100 to be evenly heated, thereby improving the heating effect of the electrode body 100 and further improving the heating efficiency of the electrode body 100, effectively shortening the preheating time of the electrode, and thus improving the production efficiency.

[0031] The following further elaborates on the embodiments of the present utility model in conjunction with the accompanying drawings.

[0032] Refer to Figure 1 , Figure 1 which is a schematic structural diagram of the back of the plasma electrode provided by the embodiment of the present utility model. The embodiment of the present utility model provides a plasma electrode, including:

[0033] The electrode body 100 is used to connect one end of a first power supply, and the other end of the first power supply is used to be grounded or connected to a reverse electrode arranged opposite to the electrode body 100;

[0034] The heating tube body 200 is serpentinely arranged inside the electrode body 100 , one end of the heating tube body 200 is used to connect to one end of the second power supply, and the other end of the heating tube body 200 is used to connect to the other end of the second power supply.

[0035] The electrode body 100 is a flat rectangular metal block, the front end and the rear end of the heating tube body 200 are both outside the electrode body 100, and are arranged at a first end point 410 and a second end point 420 on the upper plane of the electrode body 100, and are parallel to each other. The front section of the heating tube body 200 extends from the first end point 410 to the left to the leftmost side of the electrode body 100, reaches the third end point 430, and then extends downward from the height direction of the leftmost side of the electrode body 100 to the lower plane of the electrode body 100, and reaches the fourth end point 440. The middle part of the heating tube body 200 is immediately adjacent to the fourth end point 440, and extends to the right in a serpentine shape to the right to the rightmost side of the electrode body 100, and reaches the fifth end point 450. The rear end part of the heating tube body 200 extends upward from the height direction of the rightmost side of the electrode body 100 to the upper plane of the electrode body 100, reaches the sixth end point 460, and then extends to the left to the second end point 420, forming an integral heating tube body 200.

[0036] In one possible implementation, since the heating tube body 200 is used to preheat the electrode body 100, the second power supply is turned on before the plasma electrode starts working. After the electrode body 100 is heated to a predetermined working temperature by the heating tube body 200, the first power supply is turned on. At this time, the second power supply is turned off, the heating tube body 200 stops heating, and the electrode body 100 starts to generate plasma.

[0037] The other end of the first power supply is used for grounding or connecting to a reverse electrode arranged opposite to the electrode body 100, so that the electrode body 100 can obtain a higher voltage relative to the other end of the first power supply for exciting plasma in the gas.

[0038] The heating tube body 200 itself generates heat evenly, and the heating tube body 200 is arranged in a serpentine shape inside the electrode body 100, so that the heating tube body 200 is evenly distributed inside the electrode body 100, and the electrode body 100 can be heated quickly and evenly.

[0039] Based on this, the electrode body 100 is connected to one end of the first power supply. The other end of the first power supply is grounded or connected to a reverse electrode disposed opposite to the electrode body 100. The first power supply can apply a voltage to the electrode body 100 during the plasma treatment process, thereby forming an electric field that enables the gas to be ionized. The heating tube body 200 is connected to the second power supply. When the current provided by the second power supply passes through the heating tube body 200, the heating tube body 200 generates heat. Compared with preheating the electrode using the plasma in a high-energy state generated by the preliminary plasma treatment, since the heating tube body 200 generates more heat, using the heating tube body 200 to heat the electrode can heat the electrode to the operating temperature faster, improve the heating efficiency of the electrode. In addition, the heating tube body 200 is serpentinely arranged inside the electrode body 100, enabling the heating tube body 200 to be evenly distributed inside the electrode body 100, increasing the surface area of contact between the heating tube body 200 and the electrode body 100, enabling the inside of the electrode body 100 to be evenly heated, thereby improving the heating effect of the electrode body 100, further improving the heating efficiency of the electrode body 100, effectively shortening the preheating time of the electrode, and thus improving the production efficiency.

[0040] In another possible implementation, the first power supply and the second power supply are turned on simultaneously. The plasma generated by the heating tube body 200 and the electrode body 100 exciting the gas jointly heats the electrode body, which can further improve the heating efficiency of the electrode body 100. When the temperature of the electrode body 100 reaches the operating temperature, the second power supply is turned off, and the plasma electrode starts the formal plasma treatment.

[0041] In addition, referring to Figure 2 、 Figure 3 、 Figure 4 and Figure 5 , Figure 2 is a schematic structural diagram of the inside of the plasma electrode provided by the embodiment of the present invention, Figure 3 is a schematic structural diagram of the surface of the plasma electrode provided by the embodiment of the present invention, Figure 4 is a schematic structural diagram of another perspective of the inside of the plasma electrode provided by the embodiment of the present invention, Figure 5 is a schematic structural diagram of the first bending portion provided by the embodiment of the present invention, Figure 6 is a schematic structural diagram of the second bending portion provided by the embodiment of the present invention. In some embodiments of the present invention, the shape of the electrode body 100 is a cuboid, and the heating tube body 200 includes a plurality of first bending portions 210 arranged side by side along the length direction of the electrode body 100.

[0042] It should be noted that the first bending portion 210 may include a first recessed portion 211 and a connecting portion 212 connected in sequence. Therefore, the tail end of the first recessed portion 211 of any one first bending portion 210 will be connected to the head end of the connecting portion 212 of the same first bending portion 210, and the tail end of the connecting portion 212 of the previous first bending portion 210 will be connected to the head end of the first recessed portion 211 of the next first bending portion 210. For any one first bending portion 210, along the width direction of the electrode body 100, the projection of the first recessed portion 211 of the first bending portion 210 may be U-shaped, semi-circular or other shapes, and the shape of the projection of the connecting portion 212 of the first bending portion 210 may be strip-shaped, arc-shaped or other shapes. The embodiments of the present invention do not limit this here;

[0043] Specifically, starting from the leftmost side, the left half of the first recessed portion 211 of the first first bending portion 210 is located on the line connecting the third end point 430 and the fourth end point 440. The heating tube body 200 can extend downward from the third end point 430 to reach the head end of the first recessed portion 211 of its first first bending portion 210. The last first bending portion 210 only has the first recessed portion 211, and the right half of the first recessed portion 211 of the last first bending portion 210 is located on the line connecting the fifth end point 450 and the sixth end point 460. The tail end of the first recessed portion 211 of the last first bending portion 210 can extend upward to reach the sixth end point 460. The first bending portions 210 located between the first first bending portion 210 and the last first bending portion 210 are connected according to the connection method between the first bending portions 210. Thus, the serpentine arrangement of the heating tube body 200 is completed.

[0044] Based on this, since the shape of the electrode body 100 is a cuboid and the heating tube body 200 includes a plurality of first bending portions 210 arranged side by side along the length direction of the electrode body 100, the serpentine arrangement of the heating tube body 200 can be completed, enabling the heating tube body 200 to be evenly distributed inside the electrode body 100, increasing the surface area of contact between the heating tube body 200 and the electrode body 100, enabling the inside of the electrode body 100 to be heated evenly, thereby improving the heating effect of the electrode body 100, and further improving the temperature rising efficiency of the electrode body 100, effectively shortening the preheating time of the electrode, and thus improving the production efficiency.

[0045] In addition, referring to Figure 2 and Figure 4 , in some embodiments of the present invention, a cooling channel 300 arranged in a serpentine shape is provided inside the electrode body 100, and the cooling channel 300 is used to convey a coolant.

[0046] Among them, when manufacturing the electrode body 100, a groove in the shape of the cooling channel 300 can be made on the electrode body 100 through a mold. Finally, when the electrode body 100 is made, there will be a smooth cooling channel 300 inside.

[0047] Among them, the cooling channel 300 is used to reduce the temperature of the electrode body 100 during plasma treatment. During the plasma treatment process, the continuously accumulated heat will cause the electrode body 100 to reach a high temperature, which may exceed the optimal working temperature of the electrode body 100, resulting in a decrease in the efficiency of plasma treatment.

[0048] Among them, the coolant is non-conductive and has good thermal conductivity. It can be liquids such as deionized water, oil-based coolants, and fluorinated liquids, and can be selected in combination with specific plasma applications.

[0049] Based on this, by arranging the cooling channel 300 inside the electrode body 100 to take away the accumulated heat of the electrode body 100 and keep the electrode body 100 at the optimal working temperature, the efficiency of the electrode body 100 for plasma treatment can be improved.

[0050] In another possible implementation, an insulating sleeve can be added to the cooling channel 300, and the coolant can be selected more widely.

[0051] In addition, referring to Figure 2 、 Figure 4 and Figure 6 , Figure 6 FIG.

[0052] is a schematic structural view of the second bending portion provided by the embodiment of the present invention. In some embodiments of the present invention, the cooling channel 300 includes a plurality of second bending portions 310 arranged side by side along the length direction of the electrode body 100. The number of the second bending portions 310 is the same as the number of the first bending portions 210, and each of the first bending portions 210 is respectively located in the depression of the corresponding second bending portion 310.

[0053] It can be understood that, similar to the first bending portion 210, the second bending portion 310 is used to complete the serpentine arrangement of the cooling channel 300. Finally, the shape of the completed cooling channel 300 is also consistent with the shape of the heating tube body 200. One of the differences between the cooling channel 300 and the heating tube body 200 is that the cooling channel 300 only exists within the electrode body 100 and does not extend outward.

[0054] Among them, each first bending portion 210 is respectively located within the recess of the corresponding second bending portion 310. Specifically, the first recess portions 211 of each first bending portion 210 are respectively located within the second recess portions 311 of the corresponding second bending portion 310, and the first connecting portions 212 of each first bending portion 210 are respectively located above the communicating portions 312 of the corresponding second bending portion 310.

[0055] Based on this, by arranging a plurality of second bending portions 310 distributed side by side along the length direction of the electrode body 100 to form a serpentine cooling channel 300, the cooling channel 300 can be evenly distributed inside the electrode body 100, and the surface area of contact between the cooling channel 300 and the electrode body 100 is increased, enabling the interior of the electrode body 100 to dissipate heat evenly. Thus, the heat dissipation effect of the electrode body 100 is improved, and the heat dissipation efficiency of the electrode body 100 can be further enhanced, effectively shortening the heat dissipation time of the electrode. When the electrode body 100 overheats, it can quickly return to the optimal working temperature, thereby increasing production efficiency.

[0056] In addition, referring to Figure 2 and Figure 4 , in some embodiments of the present invention, along the width direction of the electrode body 100, the projection of the cooling channel 300 does not overlap with the projection of the heating tube body 200.

[0057] In addition, referring to Figure 2 and Figure 4 , in some embodiments of the present invention, along the height direction of the electrode body 100, the projection of the cooling channel 300 overlaps with the projection of the heating tube body 200.

[0058] Based on this, by the projection of the cooling channel 300 not overlapping with the projection of the heating tube body 200 along the width direction of the electrode body 100 and the projection of the cooling channel 300 overlapping with the projection of the heating tube body 200 along the height direction of the electrode body 100, the width of the electrode body 100 can be reduced, the volume of the electrode body 100 can be decreased, and the heating tube body 200 and the cooling channel 300 do not intersect, which can reduce the influence of the cooling channel 300 on the heating tube body 200, and the heating tube body 200 can maintain sufficient heating efficiency.

[0059] In addition, referring to Figure 2 and Figure 4, in some embodiments of the present utility model, one end of the cooling channel 300 is connected to a liquid inlet pipe, and the other end of the cooling channel 300 is connected to a liquid outlet pipe, and the liquid inlet pipe and the liquid outlet pipe are parallel to each other.

[0060] In a possible implementation manner, the liquid inlet pipe is connected to a liquid pump so that the coolant can be pumped into the cooling channel 300. The liquid outlet pipe is connected to a coolant treatment tank. After the coolant treatment tank processes the coolant, it can be used for other purposes. If it meets the original coolant indicators, it can also be returned to the cooling channel 300 for recycling.

[0061] Based on this, by connecting a liquid inlet pipe to one end of the cooling channel 300, connecting a liquid outlet pipe to the other end of the cooling channel 300, and the liquid inlet pipe and the liquid outlet pipe being parallel to each other, a flowing coolant can be provided for the cooling channel 300, so that the coolant can effectively take away the heat of the electrode body 100.

[0062] In another possible implementation manner, the liquid inlet pipe is connected to a liquid pump that can control the liquid flow rate, and the heat removal efficiency can be controlled by controlling the coolant flow rate.

[0063] In addition, referring to Figure 2 and Figure 4 , in some embodiments of the present utility model, the inner diameter of the cooling channel 300 is greater than the outer diameter of the heating tube body 200.

[0064] Based on this, by designing the inner diameter of the cooling channel 300 to be greater than the outer diameter of the heating tube body 200, it is convenient to distinguish the positions of the cooling channel 300 and the heating tube body 200 when manufacturing the plasma electrode.

[0065] In addition, referring to Figure 2 and Figure 4 , in some embodiments of the present utility model, the heating tube body 200 is integrally formed by a copper strip.

[0066] Based on this, the copper strip has the advantages of low cost, easy bending, and good thermal conductivity. By integrally forming the heating tube body 200 with the copper strip, the cost of the plasma electrode can be reduced, the implantation difficulty of the heating tube body 200 can be reduced, and the heating rate of the electrode body 100 can be increased.

[0067] According to the plasma processing system of the second aspect embodiment of the present utility model, the plasma processing system includes the above plasma electrode.

[0068] According to the plasma processing system of the embodiment of the present utility model, since it includes the above plasma electrode, it has all the technical effects of the above plasma electrode.

[0069] The embodiments of the present utility model have been described in detail above in conjunction with the accompanying drawings. However, the present utility model is not limited to the above embodiments, and various changes can be made without departing from the gist of the present utility model within the scope of knowledge possessed by those of ordinary skill in the relevant art.

Claims

1. A plasma electrode, characterized in that: include: An electrode body, wherein the electrode body is used to connect one end of a first power supply, and the other end of the first power supply is used to be grounded or connected to a reverse electrode arranged opposite to the electrode body; A heating tube body is serpentinely arranged inside the electrode body, one end of the heating tube body is used to connect to one end of a second power supply, and the other end of the heating tube body is used to connect to the other end of the second power supply.

2. A plasma electrode according to claim 1, characterized in that: The electrode body is in the shape of a cuboid, and the heating tube body includes a plurality of first curved portions distributed side by side along the length direction of the electrode body.

3. A plasma electrode according to claim 2, characterized in that: The electrode body is provided with cooling channels distributed in a serpentine shape inside, and the cooling channels are used to transport cooling liquid.

4. A plasma electrode according to claim 3, characterized in that: The cooling channel includes a plurality of second curved portions distributed side by side along the length direction of the electrode body, the number of the second curved portions is the same as the number of the first curved portions, and each of the first curved portions is located in a recess of the corresponding second curved portion.

5. A plasma electrode according to claim 3, characterized in that: Along the width direction of the electrode body, the projection of the cooling channel does not overlap with the projection of the heating tube body.

6. A plasma electrode according to claim 3, characterized in that: Along the height direction of the electrode body, the projection of the cooling channel overlaps with the projection of the heating tube body.

7. A plasma electrode according to claim 3, characterized in that: One end of the cooling channel is connected to a liquid inlet pipe, and the other end of the cooling channel is connected to a liquid outlet pipe. The liquid inlet pipe and the liquid outlet pipe are parallel to each other.

8. A plasma electrode according to claim 3, characterized in that: The inner diameter of the cooling channel is greater than the outer diameter of the heating tube body.

9. The plasma electrode according to claim 1, characterized in that: The heating tube body is made of copper strips in one piece.

10. A plasma processing system, characterized in that: A plasma electrode comprising any one of claims 1 to 9.

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